CN110686602A - Displacement testing system and displacement testing method - Google Patents
Displacement testing system and displacement testing method Download PDFInfo
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- CN110686602A CN110686602A CN201911076334.6A CN201911076334A CN110686602A CN 110686602 A CN110686602 A CN 110686602A CN 201911076334 A CN201911076334 A CN 201911076334A CN 110686602 A CN110686602 A CN 110686602A
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention discloses a displacement test system, which comprises a centrifuge, a micro-fiber probe, a characteristic point calibration label, a micro-fiber insertion part, a development and image acquisition device, a cold light source, an optical fiber image transmission bundle, an objective lens, an ocular lens, a network cable and an industrial personal computer; the displacement testing method comprises the steps of label calibration image acquisition, calibration image processing, displacement/pixel parameter calculation, radial/circumferential displacement image acquisition, detection parameter setting, measurement image processing and displacement display storage. The optical fiber endoscope is applied to a centrifugal dynamic test task, the advantages of the optical fiber endoscope are fully exerted, compared with the traditional displacement measurement mode, the product destructiveness is small, the in-situ test is basically realized, and the operation is simple and easy to implement; the displacement is measured by using an optical imaging technology, and the precision and the accuracy of displacement measurement can be improved by further mining and developing an image processing algorithm and technology, wherein the precision can reach a plurality of mum levels at most.
Description
Technical Field
The invention belongs to the technical field of testing, and particularly relates to a displacement testing system and a displacement testing method.
Background
In the environmental adaptability test of a complex structure product, radial and circumferential displacements of the structure are often required to be detected, and the dynamic response rule of the corresponding displacement is known, so that the scientific evaluation and prediction capability of the performance change of equipment is improved, and the detection damage of a detection device to the product is required to be reduced. Therefore, a displacement test system capable of realizing long distance, low damage and high precision is developed, and the requirement for developing related test technology is increasingly strong.
The traditional displacement measurement adopts a differential displacement sensor, an eddy current sensor, a laser displacement meter and the like, the devices can only measure the displacement change in a single direction, the size is large, the product compensation processing is more during the actual test, the destructiveness to the product is large, the measurement of the radial displacement of the structure can be met, but the measurement of the circumferential displacement is basically invalid.
In order to solve the above problems, a displacement testing system and a displacement testing method have been developed by the inventor.
Disclosure of Invention
The present invention is directed to a displacement testing system and a displacement testing method for solving the above problems.
The invention realizes the purpose through the following technical scheme:
a displacement testing system, comprising:
a centrifuge; the centrifuge comprises a hanging basket, a centrifuge arm and a main shaft, and a test product is placed in the hanging basket; the outer wall of the test product is provided with an opening;
a micro fiber probe; one end of the micro optical fiber probe is arranged in the opening of the test product;
marking a label on the characteristic point; characteristic point calibration labels are arranged on an upper layer structure and a lower layer structure of the test product;
a micro-fiber insertion section; the micro optical fiber insertion part is fixedly installed along the arm of the centrifugal machine;
a visualization and image acquisition device;
a cold light source; the cold light source, the developing and image collecting device are all arranged near the main shaft; the illumination light emitted from the cold light source is transmitted by the optical fiber light beam and then used for illuminating the calibrated label;
an optical fiber image transmission bundle; the optical fiber image transmission beam and the optical fiber image transmission beam are both arranged on the arm of the centrifugal machine;
an objective lens;
an eyepiece;
a network cable;
an industrial personal computer; the characteristic point calibration label is imaged by the objective lens, transmitted to the ocular lens through the optical fiber image transmission bundle and amplified at the ocular lens, and the imaging and image acquisition equipment is used for converting optical signals into electric signals and transmitting the electric signals to the industrial personal computer through a network cable.
The displacement testing method comprises the following steps:
collecting a calibration label image; before measurement, a standard extensometer calibrator and a characteristic point calibration label are used for carrying out system calibration, and a characteristic point calibration label image is collected;
processing a calibration image; image information is transmitted into an industrial personal computer, and the industrial personal computer carries out image digital processing on the calibrated image;
displacement/pixel parameter calculation;
acquiring a radial/circumferential displacement image; during measurement, the same characteristic point calibration label is pasted on a measured object, and an optical fiber endoscope is arranged to collect a measurement point image;
setting detection parameters; the method comprises the steps of setting pixel values of the micro-fiber probe from a characteristic point mark calibration label center, and displacement values and displacement correction coefficients corresponding to each pixel.
Processing a measurement image; and carrying out corresponding image digitization processing, calculating the centroid coordinates of the characteristic points so as to calculate the pixel value of the displacement, converting the image displacement into a physical size according to the pixel-displacement corresponding relation and the displacement correction coefficient obtained by the calibration device, and calculating the change value of the displacement.
Displacement display storage; and displaying and storing the change value of the displacement on an industrial personal computer.
The invention has the beneficial effects that:
the invention relates to a displacement test system and a displacement test method;
1. the optical fiber endoscope is applied to a centrifugal dynamic test task, the advantages of the optical fiber endoscope are fully exerted, compared with a traditional displacement measurement mode, the product destructiveness is small, in-situ test is basically realized, and the operation is simple and easy to implement.
2. The displacement is measured by using an optical imaging technology, and the precision and the accuracy of displacement measurement can be improved by further mining and developing an image processing algorithm and technology, wherein the precision can reach a plurality of mum levels at most.
3. The optical fiber endoscope has a small diameter, so that the damage to the product is small. And the front end inserting part can be made into different lengths according to requirements, so that the testing requirements under different distances are met.
4. The front-end imaging is a pure optical technology, does not involve photoelectric conversion, does not generate heat or scald, and is safer, more stable and more reliable when being installed in some special products or being measured beside.
5. The optical fiber endoscope can also be externally connected with various industrial cameras with special purposes, such as an ultraviolet camera, an infrared camera, a high-speed camera and the like, for external video imaging, the imaging is more direct, the sense of reality is stronger, the stereoscopic impression and the hierarchy are rich, the image planarization is not like an electronic mirror, the image is more real and reliable when the displacement image is collected, and the precision can be higher when the displacement image is processed and calculated.
Drawings
Fig. 1 is a schematic structural diagram of a displacement testing system in the present application.
FIG. 2 is a schematic view of the radial displacement calculation of the present application;
FIG. 3 is a schematic view of the circumferential displacement calculation of the present application;
FIG. 4 is a schematic diagram of the image graying process in the present application;
FIG. 5 is a histogram of gray values of an image in the present application;
fig. 6 is a schematic diagram of image binarization processing in the present application;
FIG. 7 is a schematic illustration of the image edge dilation process of the present application;
FIG. 8 is a schematic diagram of the sobel edge detection of the image in the present application;
FIG. 9 is a schematic illustration of the identification of feature point I in the present application;
FIG. 10 is a schematic illustration of the identification of feature point II in the present application;
FIG. 11 is a schematic illustration of feature point III identification in the present application;
FIG. 12 is a schematic illustration of the identification of a characteristic point IV in the present application;
FIG. 13 is a flow chart of a displacement test method of the present application;
fig. 14 is a schematic structural diagram of the extensometer calibrator of the present application.
In the figure: 1. the device comprises a hanging basket, 2, an upper layer structure, 3, a characteristic point calibration label, 4, a lower layer structure, 5, a micro optical fiber probe, 6, a mounting bracket, 7, a micro optical fiber inserting part, 8, an image transmitting beam, 9, a light transmitting beam, 10, a centrifuge arm, 11, a main shaft, 12, an ocular lens, 13, a display and image acquisition device, 14, a cold light source, 15, a network cable, 16, an industrial personal computer, 17, a extensometer calibration instrument, 18, an upper concave surface calibration block, 19 and a lower convex surface calibration block.
Detailed Description
The invention will be further described with reference to the accompanying drawings in which:
as shown in fig. 1;
a displacement testing system, comprising:
a centrifuge; the centrifuge comprises a hanging basket 1, a centrifuge arm 10 and a main shaft 11, and a test product is placed in the hanging basket 1; the outer wall of the test product is provided with an opening;
a micro fiber probe 5; one end of the micro optical fiber probe 5 is arranged in the opening of the test product;
the mounting bracket 6 and the micro optical fiber probe 5 are also fixed on the mounting bracket 6;
a characteristic point calibration label 3; characteristic point calibration labels 3 are arranged on the upper layer structure and the lower layer structure of the test product;
a micro-fiber insertion section 7; the micro optical fiber insertion part 7 is fixedly installed along the arm of the centrifugal machine; and taking protective measures;
a visualization and image acquisition device 13;
a cold light source 14; the cold light source 14 and the imaging and image acquisition equipment 13 are all arranged near the main shaft; the illuminating light emitted from the cold light source 14 is transmitted by the optical fiber light-transmitting beam 9 and then used for illuminating the calibrated label;
an optical fiber image transmission bundle 8; the optical fiber image transmission beam 9 and the optical fiber image transmission beam 8 are both arranged on the arm of the centrifuge;
an objective lens;
an eyepiece 12;
a network cable 15;
an industrial personal computer 16; the characteristic point calibration label 3 is transmitted to an ocular 12 through an optical fiber image transmission bundle 8 after being imaged by an objective lens, amplified at the ocular 12, and a visualization and image acquisition device 13 is used for converting an optical signal into an electric signal and transmitting the electric signal to an industrial personal computer 16 through a network cable 15.
As shown in fig. 1, the micro fiber probe 5 and the micro fiber insertion part 7 are integrally provided.
The resolution of the visualization and image acquisition device 13 should be higher than that of the front-end micro fiber probe 5.
As shown in fig. 13, the displacement testing method includes:
collecting a calibration label image; before measurement, a standard extensometer calibrator 17 (shown in fig. 14) and the characteristic point calibration labels 3 are used for system calibration, and calibration label images are collected (the characteristic point calibration labels, one for calibration and one for formal measurement, are arranged at the two positions of the standard extensometer calibrator 17 and a test product); specifically, a standard extensometer calibrator 17 with the measuring range of 25mm is adopted, the resolution is 0.0002mm, an upper concave surface calibration block 18 and a lower convex surface calibration block 19 are matched according to requirements, the upper concave surface calibration block 18 is fixed after the position is adjusted, the lower convex surface calibration block 19 is moved, and the distance between the calibration blocks is controlled; before calibration measurement, the lower convex surface calibration block 19 is lifted to make the convex surface and the concave surface of the curved surface model tightly attached, the clearance between the convex surface and the concave surface is adjusted by a feeler gauge to be small enough, the reading on the calibration instrument is taken as an initial clearance, respectively sticking characteristic point calibration labels on the upper concave surface calibration block 18 and the lower convex surface calibration block 19, fixing the micro optical fiber probe 5 on the mounting bracket 6, aiming at the characteristic point calibration labels on the upper concave surface calibration block 18 and the lower convex surface calibration block 19, the illumination light emitted from the cold light source 14 is transmitted to the probe end through the optical fiber image transmission beam 9, the characteristic point calibration labels on the illumination calibration block are transmitted out through the optical fiber image transmission beam 8 after being imaged by the objective lens, amplifying the image at the ocular 12, converting the optical signal image into an electric signal through a developing and image collecting device 13 arranged behind the ocular 12, transmitting and displaying the electric signal on an external industrial personal computer 16 through a network cable 15, and finishing the characteristic point marking label image collection.
Processing a calibration image; the image information is transmitted into the industrial personal computer 16, and the industrial personal computer 16 carries out image digital processing on the calibrated image; the image digital processing method comprises image gray processing, binarization and edge expansion processing and feature point identification.
Displacement/pixel parameter calculation; calculating the centroid coordinates of the feature points so as to calculate the pixel value of the displacement, and then corresponding the pixel value of the plane coordinates of the calibration image to the known displacement value so as to obtain the actual centroid distance of the double feature points on the feature point calibration label; the calibration device generates known and determined displacement amount, and a pixel-displacement corresponding relation is established through the correspondence between the centroid variation amount and the displacement variation amount of the characteristic point.
The method for obtaining the actual distance between the centroids of the double characteristic points on the calibration label comprises the following steps:
searching and determining a characteristic point I and a characteristic point II in a binary image of the calibration image;
determining centroid coordinates of the characteristic point I and the characteristic point II;
and calculating the pixel value of the displacement according to the centroid coordinates of the characteristic point I and the characteristic point II, converting the image displacement into a physical size according to the pixel-displacement corresponding relation and the displacement correction coefficient obtained by the calibration device, and calculating the change value of the displacement.
The centroid coordinate calculation method of the characteristic point I and the characteristic point II comprises the following steps:
the method for calculating the actual distance between the centroids of the double characteristic points comprises the following steps:
in the above formula, Xi、YiRespectively the coordinates of the characteristic images;
n is the total number of pixel points forming the characteristic point image;
Xc，Ycis the centroid coordinates of the object.
In some embodiments, the feature point labels are adhered to the upper layer structure and the lower layer structure in advance, and the centroid coordinates of the feature points change after the product is subjected to radial or circumferential displacement. Comparing n images at a certain time interval, determining a characteristic point in a binary image of a first image, calculating to obtain a centroid coordinate of the characteristic point, sequentially calculating the centroid coordinates of 2, 3 and 4 … n identical characteristic points, calculating a pixel value of centroid coordinate deviation, converting image displacement (unit: pixel) into a physical size (unit: um) according to a pixel-displacement corresponding relation and a displacement correction coefficient obtained by a calibration test, and calculating a change value of displacement. Because the calibration device generates known and determined displacement, the pixel-displacement corresponding relation can be established through the correspondence between the centroid variation and the displacement variation of the characteristic points. The calculation schematic is shown in fig. 2 and 3.
Acquiring a radial/circumferential displacement image; during measurement, the same characteristic point calibration label is pasted on a measured object, and an optical fiber endoscope is arranged to collect a measurement point image; the method specifically comprises the steps that a micro optical fiber probe 5 is fixed on a mounting bracket 6, is aligned with a characteristic point calibration label on a test product, illuminating light emitted from a cold light source 14 is transmitted to a probe end through an optical fiber light transmitting beam 9, the characteristic point calibration label on an illumination calibration block is transmitted out through an optical fiber image transmitting beam 8 after being imaged through an objective lens, is amplified at an ocular lens 12, converts an optical signal image into an electric signal through a developing and image collecting device 13 arranged behind the ocular lens 12, and transmits and displays the electric signal on an external industrial personal computer 16 through a network cable 15.
Setting detection parameters; the method comprises the steps of setting pixel values of the micro optical fiber probe 5 from a characteristic point mark center, and displacement values and displacement correction coefficients (deviation coefficients of actual measurement displacement and marked measurement displacement, the default is 1) corresponding to each pixel.
Processing a measurement image; the corresponding image digitization processing (image digitization processing such as gray level transformation, binarization, feature point identification and the like through an image processing system) is carried out, the centroid coordinates of the feature points are calculated, the pixel value of the displacement is calculated, the image displacement (unit: pixel) is converted into the physical size (unit: um) according to the pixel-displacement corresponding relation and the displacement correction coefficient obtained by the calibration device, and the change value of the displacement is calculated.
Displacement display storage; and displaying and storing the change value of the displacement on the industrial personal computer 16.
In some embodiments, during measurement, the same characteristic point calibration label is pasted on the measured object, the optical fiber endoscope is installed to collect the measurement point image, the detection parameters are set, then the corresponding image digital processing is carried out to obtain the calibration label dual characteristic point centroid plane coordinates, the obtained dual characteristic point centroid actual distance is used to calculate the actual plane displacement variation of the characteristic point on the characteristic point calibration label, and the actual plane displacement variation is displayed and stored on the industrial personal computer 16. The following describes the displacement calculation process of the present invention specifically, taking the actual feature point image as an example.
Step 1: image graying processing
Since the gradation of an image is a basis of image segmentation and feature point extraction, it is particularly important to perform gradation processing on an image. The graying processing of the image is to process a color image (not shown in the figure, represented as a color pattern of fig. 4) into a grayscale image through a suitable function, remove the color therein to obtain a grayscale image, and obtain the grayscale thereof through matlab software processing as shown in fig. 4. It can be seen from the histogram (as shown in fig. 5) that the gray values are mainly distributed between 140 and 180, indicating moderate brightness. According to the post-processing result, the brightness can meet the requirement.
Step 2: binarization and edge dilation
The gray scale of the image is divided into different grades, and the method of setting a gray scale threshold (threshold) can be used for determining a meaningful area or the boundary of a segmentation object. The thresholding process commonly used is an image binarization process, that is, a threshold value is selected, and the image is converted into a black-and-white binary image, which is used for image segmentation, edge tracking and other processes. According to the method, the threshold value is selected by adopting a self-adaptive threshold value method, edge expansion processing is carried out on the binary image, the identification capability of the image feature point can be improved, the image is obtained through calculation and is shown in figure 6 after binarization, and the image is shown in figure 7 after edge expansion processing.
Step 3 edge detection analysis
The binarized and puffed image is subjected to sobel edge detection, and the processed image is shown in fig. 8. By analyzing the image, the edge of the image obtained by the sobel edge detection is clearly visible, and most of the noise caused by the background color in the picture is filtered when thresholding is adopted.
Step 4, characteristic point acquisition and centroid calculation
By analyzing FIG. 8 detected by sobel edge detection method, it can be seen that the image includes the characteristic points I, II, III, IV desired to be recognized. By identifying and calculating the feature point outlines (perimeter and area) and performing image matching, the feature point images with completely removed noise shown in fig. 9, 10, 11 and 12 can be obtained, and the centroid coordinate values of the feature points i, ii, iii and iv are obtained by calculation.
And (3) completing the digital processing of other frame images according to the phase synchronization step to obtain the centroid data of the feature point of each frame image, comparing the centroid data with the centroid coordinates of the feature point of the first frame video to obtain the centroid (XY) variation, and establishing a pixel-displacement corresponding function relationship through the correspondence between the centroid variation and the displacement variation of the feature point due to the known and determined displacement generated by the calibration device.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A displacement test system comprising a centrifuge; the centrifuge comprises a hanging basket, a centrifuge arm and a main shaft, and a test product is placed in the hanging basket; the outer wall of the test product is provided with an opening; it is characterized in that the displacement test system further comprises:
a micro fiber probe; one end of the micro optical fiber probe is arranged in the opening of the test product;
marking a label on the characteristic point; characteristic point calibration labels are arranged on an upper layer structure and a lower layer structure of the test product;
a micro-fiber insertion section; the micro optical fiber insertion part is fixedly installed along the arm of the centrifugal machine;
a visualization and image acquisition device;
a cold light source; the cold light source, the developing and image collecting device are all arranged near the main shaft; the illumination light emitted from the cold light source is transmitted by the optical fiber light beam and then used for illuminating the calibrated label;
an optical fiber image transmission bundle; the optical fiber image transmission beam and the optical fiber image transmission beam are both arranged on the arm of the centrifugal machine;
an objective lens;
an eyepiece;
a network cable;
an industrial personal computer; the characteristic point calibration label is imaged by the objective lens, transmitted to the ocular lens through the optical fiber image transmission bundle and amplified at the ocular lens, and the imaging and image acquisition equipment is used for converting optical signals into electric signals and transmitting the electric signals to the industrial personal computer through a network cable.
2. The displacement testing system of claim 1, wherein the micro fiber probe and the micro fiber insertion portion are integrally provided.
3. The displacement testing system of claim 1, wherein the imaging and image acquisition device has a resolution higher than that of the front-end microfiber probe.
4. The displacement test method is characterized by comprising the following steps:
collecting a calibration label image; before measurement, a standard extensometer calibrator and a characteristic point calibration label are used for carrying out system calibration, and a characteristic point calibration label image is collected;
processing a calibration image; image information is transmitted into an industrial personal computer, and the industrial personal computer carries out image digital processing on the calibrated image;
displacement/pixel parameter calculation;
acquiring a radial/circumferential displacement image; during measurement, the same characteristic point calibration label is pasted on a measured object, and an optical fiber endoscope is arranged to collect a measurement point image;
setting detection parameters; the method comprises the steps of setting pixel values of the micro-fiber probe from a characteristic point mark calibration label center, and displacement values and displacement correction coefficients corresponding to each pixel.
Processing a measurement image; and carrying out corresponding image digitization processing, calculating the centroid coordinates of the characteristic points so as to calculate the pixel value of the displacement, converting the image displacement into a physical size according to the pixel-displacement corresponding relation and the displacement correction coefficient obtained by the calibration device, and calculating the change value of the displacement.
Displacement display storage; and displaying and storing the change value of the displacement on an industrial personal computer.
5. The displacement testing method of claim 4, wherein the system calibration is performed using a standard extensometer calibrator and a feature point calibration label, and the collecting of the feature point calibration label image comprises:
matching an upper concave surface calibration block and a lower convex surface calibration block according to requirements, adjusting the position of the upper concave surface calibration block, fixing the upper concave surface calibration block, moving the lower convex surface calibration block, and controlling the distance between the calibration blocks; before calibration measurement, the lower convex surface calibration block is lifted to enable the convex surface and the concave surface of the curved surface model to be attached tightly, a clearance between the convex surface and the concave surface is adjusted to be small enough by a feeler gauge, at the moment, a reading on a calibration instrument is used as an initial clearance, characteristic point calibration labels are respectively adhered on the upper concave surface calibration block and the lower convex surface calibration block, a micro optical fiber probe is fixed on a mounting bracket to align with the characteristic point calibration labels on the upper concave surface calibration block and the lower convex surface calibration block, illuminating light emitted from a cold light source is transmitted to the probe end through an optical fiber light transmission beam, the characteristic point calibration labels on the illumination calibration block are transmitted out through an optical fiber image transmission beam after imaging through an objective lens, the illuminating light signal image is amplified at an ocular lens, an optical signal image is converted into an electric signal through a developing and image acquisition device placed behind the ocular lens, and the electric signal is transmitted and displayed on an external industrial.
6. The displacement testing method according to claim 4, wherein the image digitization processing method comprises image graying processing, binarization and edge dilation processing, and feature point identification.
7. The displacement test method of claim 4, wherein the displacement/pixel parameter calculation comprises: calculating the centroid coordinates of the characteristic points so as to calculate the pixel value of the displacement, and then corresponding the pixel value of the plane coordinates of the calibration image to the known displacement value so as to obtain the actual distance of the centroid of the double characteristic points on the calibration label; the calibration device generates known and determined displacement amount, and a pixel-displacement corresponding relation is established through the correspondence between the centroid variation amount and the displacement variation amount of the characteristic point.
8. The displacement testing method of claim 7, wherein the method for obtaining the actual distance between the centroids of the double characteristic points on the calibration label comprises the following steps:
searching and determining a characteristic point I and a characteristic point II in a binary image of the calibration image;
determining centroid coordinates of the characteristic point I and the characteristic point II;
and calculating the pixel value of the displacement according to the centroid coordinates of the characteristic point I and the characteristic point II, converting the image displacement into a physical size according to the pixel-displacement corresponding relation and the displacement correction coefficient obtained by the calibration device, and calculating the change value of the displacement.
9. The displacement test method according to claim 8, wherein the centroid coordinates of the feature point i and the feature point ii are calculated by:
the method for calculating the actual distance between the centroids of the double characteristic points comprises the following steps:
in the above formula, Xi、YiRespectively the coordinates of the characteristic images;
n is the total number of pixel points forming the characteristic point image;
Xc，Ycis the centroid coordinates of the object.
10. The displacement testing method of claim 4, wherein radial/circumferential displacement image acquisition comprises:
the micro optical fiber probe is fixed on a mounting bracket, is aligned with a characteristic point calibration label on a test product, and illumination light emitted from a cold light source is transmitted to the probe end through an optical fiber light transmitting beam, and the calibration label on an illumination calibration block is transmitted through an optical fiber image transmitting beam after being imaged by an objective lens, is amplified at an ocular lens, and then converts an optical signal image into an electric signal through a developing and image collecting device arranged behind the ocular lens, and is displayed on an external industrial personal computer through network cable transmission.
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| CN112505083A (en) * | 2020-11-20 | 2021-03-16 | 北京工业大学 | Method and system for tracking and positioning in-situ creep and fatigue test point in scanning electron microscope |
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| CN112505083A (en) * | 2020-11-20 | 2021-03-16 | 北京工业大学 | Method and system for tracking and positioning in-situ creep and fatigue test point in scanning electron microscope |
| CN112505083B (en) * | 2020-11-20 | 2023-01-31 | 北京工业大学 | Method and system for tracking and positioning in-situ creep and fatigue test point in scanning electron microscope |
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