CN110681537A - Vacuum packaging device for power module - Google Patents
Vacuum packaging device for power module Download PDFInfo
- Publication number
- CN110681537A CN110681537A CN201911126390.6A CN201911126390A CN110681537A CN 110681537 A CN110681537 A CN 110681537A CN 201911126390 A CN201911126390 A CN 201911126390A CN 110681537 A CN110681537 A CN 110681537A
- Authority
- CN
- China
- Prior art keywords
- glue injection
- agitator
- power module
- glue
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/70—Mixers specially adapted for working at sub- or super-atmospheric pressure, e.g. combined with de-foaming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/22—Control or regulation
- B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
- B01F35/2213—Pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C15/00—Enclosures for apparatus; Booths
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/36—Mixing of ingredients for adhesives or glues; Mixing adhesives and gas
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Coating Apparatus (AREA)
Abstract
The invention discloses a vacuum packaging device for a power module, which comprises a stirring barrel, wherein a sealed feeding port is arranged on the stirring barrel, a first rotary-vane vacuum pump is arranged in the stirring barrel, a vacuum gauge and a discharge valve are arranged on the stirring barrel, a stirring motor is arranged at the upper end of the stirring barrel, a rotary rod on the stirring motor penetrates into the stirring barrel, and stirring rotary teeth are arranged on the rotary rod of the stirring motor.
Description
Technical Field
The invention relates to the technical field of power modules, in particular to a vacuum packaging device for a power module.
Background
With the wide application of high-power semiconductor chips, the power of devices is continuously increasing. The power module usually works under the conditions of high voltage and large current, and although the A + B flame-retardant epoxy glue is applied as a new packaging material, the reliability influence caused by packaging bubbles in the packaging process becomes the most main control factor in the process. The packaging bubbles influence the crosslinking reaction of the A + B epoxy adhesive, so that the polymer is poor in adhesion and the sealing defect is caused; the cavity for packaging the bubble also influences heat conduction, packaging insulation defects may be caused between module electrodes due to the bubble, creepage, sparking, chip impact and other factors occur during loading, and the reliability of the power module is reduced due to the influence of various aspects. Therefore, how to increase the reliability, remove the air and moisture dissolved, stirred and filled in the glue under normal pressure, avoid the defects of the prior art, reduce the influence of bubbles in the packaging process of the power module, reduce the probability of bubbles generated by the expansion of the air and the moisture in the glue proportioning, filling and post-curing, and meet the requirements of the manufacturing process and the reliability application is the subject to be solved by the invention.
Disclosure of Invention
The invention aims to provide a vacuum packaging device for a power module, which aims to solve the problem of poor packaging process effect.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a power module vacuum packaging hardware, includes the agitator, be equipped with airtight dog-house on the agitator, be equipped with first rotary-vane vacuum pump in the agitator, be equipped with vacuometer and unloading valve on the agitator, the upper end of agitator is equipped with the agitator motor, the bull stick on the agitator motor penetrates in the agitator, be equipped with the stirring on the bull stick of agitator motor and revolve the tooth, there is transmission flow pump through the pipe connection in the agitator, be equipped with flow control valve and fine filter screen on the pipeline, the other end of transmission flow pump is equipped with dredges the pipe, the other end of dredging the pipe is located in the injecting glue section of thick bamboo.
Preferably, a first negative-pressure air exhaust pipe is arranged on the stirring barrel, a second negative-pressure air exhaust pipe is arranged on the glue injection barrel, and the other side of the second negative-pressure air exhaust pipe is fixedly connected to a second rotary-vane vacuum pump.
Preferably, one end of the glue injection cylinder is connected with a plunger glue injection pump through a pipeline, the lower end of the plunger glue injection pump is provided with a glue injection pipe, the other end of the glue injection pipe is connected to the needle head, the upper end of the needle head is provided with a needle head seat, the upper end of the needle head seat is provided with a Z-axis motor, the lower end of the Z-axis motor is arranged on the upper surface of the glue injection support, and the lower end of the glue injection support is provided with a glue injection machine platform.
Preferably, the upper end of injecting glue machine platform is equipped with X, Y axle motion platforms, the upper end of X, Y axle motion platforms is equipped with the injecting glue machine bottom plate, the upper end of injecting glue machine bottom plate is equipped with the power module tool, be equipped with heating system on the injecting glue machine bottom plate.
Preferably, the outside of injecting glue machine platform is equipped with the sealed dustcoat of ya keli, be equipped with ya keli sealing door on the sealed dustcoat of ya keli, be equipped with heating controller in the sealed dustcoat of ya keli.
Compared with the prior art, the invention has the beneficial effects that: 1. the mechanism comprises accessories such as an X/Y-axis platform of the glue injection machine, a Z-axis needle head conveying motor, a plunger type flow pump, a liquid guide pipe, a needle seat and a needle head, wherein a reinforced airtight acrylic protective cover is arranged outside the glue injection machine and used for ensuring negative pressure maintenance during filling and sealing, a sealing door convenient for taking and placing a power module is arranged on the side of the glue injection machine, and the stability of the device is greatly enhanced.
2. The device can be effectual controls agitator internal pressure, uses safe and reliable.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an enlarged view of the invention at A;
fig. 3 is an acrylic sealing cover structure according to the present invention.
FIG. 4 is a circuit diagram of a first rotary-vane vacuum pump according to the present invention;
FIG. 5 is a circuit diagram of a stirring motor of the present invention;
FIG. 6 is a circuit diagram of a transmission flow pump of the present invention;
FIG. 7 is a circuit diagram of a second rotary-vane vacuum pump according to the present invention;
FIG. 8 is a circuit diagram of the Z-axis motor of the present invention;
FIG. 9 is a circuit diagram of the plunger glue injection pump of the present invention;
fig. 10 is a circuit diagram of a heating controller of the present invention.
In the figure: the device comprises a stirring barrel 1, a sealed feeding port 2, a first rotary-vane vacuum pump 3, a vacuum meter 4, a discharge valve 5, a stirring motor 6, a stirring rotary tooth 7, a transmission flow pump 8, a dredging pipe 9, a flow control valve 10, a fine filter screen 11, a glue injection barrel 12, a first negative-pressure air exhaust pipe 13, a second negative-pressure air exhaust pipe 14, a second rotary-vane vacuum pump 15, a glue injection machine platform 16, a glue injection machine baseplate 17, a power module jig 18, a motion platform 19X, Y, a motor 20Z shaft, a needle base 21, a needle head 22, a glue injection pipe 23, a plunger glue injection pump 24, a glue injection support 25, a sealing acrylic sealing outer cover 26, a sealing acrylic sealing door 27, a heating system 28 and a heating controller 29.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and fig. 2, the present invention provides a technical solution: a power module vacuum packaging device comprises a stirring barrel 1, wherein negative pressure in the stirring barrel 1 is kept at-0.2 bar when glue solution is transmitted, a closed feeding port 2 is arranged on the stirring barrel 1, a first rotary-vane vacuum pump 3 is arranged in the stirring barrel 1, a vacuum meter 4 and a discharge valve 5 are arranged on the stirring barrel 1, a stirring motor 6 is arranged at the upper end of the stirring barrel 1, a rotating rod on the stirring motor 6 penetrates into the stirring barrel 1, a stirring rotary tooth 7 is arranged on the rotating rod of the stirring motor 6, a transmission flow pump 8 is connected in the stirring barrel 1 through a pipeline, the glue solution is transmitted into a glue injection barrel 12 through a fine filter net 11, the transmission pump 8 and a flow control valve 10 through a dredging pipe 9 through a connecting piece 14 on the side surface of the stirring barrel 1, the flow control valve 10 and the fine filter net 11 are arranged on the pipeline, and a valve core is in a closed state at ordinary times, so that mutual transmission of; the inside is equipped with fine filter 11 and is used for filtering the bucket interior impurity, and flow control valve 10 switching instruction and flow control are by man-machine interface output control, and the transmission speed range of glue solution after the mixture is: 300 mm/s-5000 mm/s, the other end of the transmission flow pump 8 is provided with a dredging pipe 9, the other end of the dredging pipe 9 is arranged in the glue injection barrel 12, and the vacuum negative pressure value in the glue injection barrel 12 during transmission is set to-55 Kpa.
Referring to fig. 1 and 2, a first negative pressure air exhaust pipe 13 is disposed on the mixing tank 1, a second negative pressure air exhaust pipe 14 is disposed on the glue injection cylinder 12, the vacuum negative pressure in the glue injection cylinder 12 is realized by connecting the air exhaust pipe 13 at the top thereof with a second rotary-vane vacuum pump 15, and the other side of the second negative pressure air exhaust pipe 14 is fixedly connected to the second rotary-vane vacuum pump 15.
Referring to fig. 2, one end of the glue injection barrel 12 is connected to a plunger glue injection pump 24 through a pipeline, the plunger glue injection pump 24 has a filling pressure of-60 Kpa, the lower end of the plunger glue injection pump 24 is provided with a glue injection tube 23, the other end of the glue injection tube 23 is connected to a needle 22, the diameter of the needle 22 is 0.5mm, the filling glue amount is 57.3g, the upper end of the needle 22 is provided with a needle base 21, the upper end of the needle base 21 is provided with a Z-axis motor 20, the Z-axis motor 20 can drive the needle base 21 to move in the Z direction, the up-down moving speed of the Z-axis motor 20 is divided into two sections, and the original point position, namely, the fast down moving, the slow down moving, the glue injection position, the; wherein the fast upward and downward moving speed is 800mm/s, the slow downward moving speed is 300mm/s, the lower end of the Z-axis motor 20 is arranged on the upper surface of the glue injection bracket 25, and the lower end of the glue injection bracket 25 is provided with a glue injection machine platform 16.
Referring to fig. 2, an X, Y-axis moving platform 19 is disposed at the upper end of the platform 16 of the glue injection machine, the X-direction step distance of the X, Y-axis moving platform 19 is 50mm, the Y-axis step distance is 75mm, the vacuum negative pressure in the glue injection state is-60 Kpa, and the pre-curing heating temperature is 100 ℃ ± 10; the curing time is 120 +/-5 s, the upper end of the X, Y-axis moving platform 19 is provided with a glue injection machine bottom plate 17, the upper end of the glue injection machine bottom plate 17 is provided with a power module jig 18, the power module is arranged in the jig 18, a Z-axis motor 20 drives a needle 22 to extend into the module structure for encapsulation, and the glue injection machine bottom plate 17 is provided with a heating system 28.
Referring to fig. 3, an acrylic sealing outer cover 26 is disposed on the outer side of the platform 16 of the glue injector, an acrylic sealing door 27 is disposed on the acrylic sealing outer cover 26, a heating controller 29 is disposed in the acrylic sealing outer cover 26, the glue injector is sealed by the acrylic sealing outer cover 26, and the sealing door 27 is disposed on the side; the heating system 28 is arranged inside the glue injection platform 16 and controlled by the controller 29, and is used for pre-curing the encapsulated power module.
Referring to fig. 4, the control switch is TY10AR22PL-211M4G, which has two-gear positive and negative adjustment, and the first rotary-vane vacuum pump 3 can be controlled to be powered off and powered on by rotating the control switch, and the first rotary-vane vacuum pump 3 is XD-10 and is connected in series to the control switch and the working power supply through a circuit.
Referring to fig. 5, the model of the control switch is TY10AR22PL-211M4G, the control switch has two-gear adjustment, positive and neutral, the stirring motor 6 can be controlled to be powered off and powered on by rotating the control switch, the model of the stirring motor 6 is CM351, and the stirring motor is connected to the control switch and the working power supply in series through a circuit.
Referring to fig. 6, the control switch is of type TY10AR22PL-211M4G, which has two-gear positive and neutral adjustment, and the control switch is rotated to control the power-off and power-on of the transmission flow pump 8, and the transmission flow pump 8 is of type MP-258 and is connected in series to the control switch and the working power supply through a circuit.
Referring to fig. 7, the control switch is TY10AR22PL-211M4G, which has two-gear positive and negative adjustment, and the second rotary-vane vacuum pump is capable of being controlled to be powered off and powered on by rotating the control switch, and is XD-10, and is connected in series to the control switch and the working power supply through a circuit.
Referring to fig. 8, the control switch is of type TY10AR22PL-211M4G, which has two-gear positive and neutral adjustment, and can control the power-off and power-on of the Z-axis motor 20 by rotating the control switch, and the Z-axis motor 20 is of type CM351 and is connected in series to the control switch and the working power supply through a circuit.
Referring to fig. 9, the type of the control switch is TY10AR22PL-211M4G, the control switch has two-gear adjustment, positive and neutral, the power-off and power-on of the plunger glue injection pump 24 can be controlled by rotating the control switch, the type of the plunger glue injection pump 24 is MP-258, and the plunger glue injection pump is connected in series to the control switch and the working power supply through a circuit.
Referring to fig. 10, the control switch is of type TY10AR22PL-211M4G, which has two-gear positive and neutral adjustment, and can control the power-off and power-on of the heating controller 29 by rotating the control switch, and the heating controller 29 is of type NTC0416 and is connected to the control switch and the working power supply in series by a circuit.
In the specific implementation of the device, the technological method of the device comprises three procedures of ① blending A, B two flame-retardant epoxy glues under vacuum negative pressure, ② transmitting the glues through negative pressure difference under vacuum negative pressure, ③ completing encapsulating the power module under vacuum negative pressure, a device mechanism ① A/B glue mixing and stirring mechanism, a ② transmission mechanism and an ③ encapsulating mechanism.
The technological method for mixing the glue under the vacuum negative pressure comprises the following steps: A. b, mixing the epoxy flame-retardant adhesive and xylene according to a ratio of 100: 50: 3, proportioning process; starting an ion air pump before stirring and mixing to ensure that the negative pressure in the barrel is-40 Kpa, and switching to a stirring mode after maintaining the time for 60 +/-5S; under the stirring mode, the negative pressure is-45 Kpa, the stirring time is 60 +/-5S, and then the heating mode is switched to; the negative pressure of a heating mode is-45 Kpa, the heating time is 100 +/-5S, the temperature is 50 +/-5 ℃, and then the mode is converted into an output mode; the negative pressure of the output mode is-48 Kpa and is continuously maintained; the stirring rotary teeth 7 act clockwise; the process setting and the machinery are controlled by a human-computer interface.
Feeding A, B glue into a stirring barrel 1 in proportion under normal pressure, starting a rotary vane type vacuum pump 3 after a feeding port 2 is sealed, entering a first stage mode in a working state, setting a vacuum negative pressure value to be 40Kpa, arranging a vacuum gauge 4 at the top of the stirring barrel 1, maintaining the negative pressure for 60 +/-5 s, and separating out air in the stirring barrel and part of air dissolved in the glue from a discharge valve 5; the working state enters a second stage mode, a stirring motor 6 is started to drive a stirring rotary tooth 7 to mix and stir the glue solution, the vacuum negative pressure value is-45 Kpa, and the mixing time is kept under the negative pressure for 60 +/-5 s; the working state enters a third step mode, the vacuum negative pressure value is-45 Kpa, the heating time under the negative pressure is 100 +/-5 s, and the heating temperature is 50 +/-5 ℃; the working state enters a fourth step mode, and the vacuum negative pressure is maintained at minus 45 Kpa.
The technological method for realizing the transmission of the glue solution through the vacuum negative pressure difference comprises the following steps: the negative pressure in the stirring barrel 1 is kept to be-0.2 bar when the glue solution is transmitted; the glue solution is transmitted into a glue injection barrel 12 through a fine filter net 11, a transmission pump 8 and a flow control valve 10 through a dredging pipe 9 by a connecting piece 14 on the side surface of the stirring barrel 1, and the vacuum negative pressure value is set to be-55 Kpa during transmission in the glue injection barrel 12; the vacuum negative pressure in the glue injection cylinder 12 is realized by connecting an air exhaust pipe 13 at the top of the glue injection cylinder with a rotary vane vacuum pump 15; the opening and closing instructions and the flow control of the flow control valve are output and controlled by a human-computer interface; the transmission speed range of the mixed glue solution is as follows: 300 mm/s-5000 mm/s.
The technological method for encapsulating and pre-curing the power module under vacuum negative pressure comprises the following steps: the power module is arranged in the jig 18, and the Z-axis motor 20 drives the needle head 22 to extend into the module structure for encapsulation; the diameter of the needle 22 is 0.5mm, the quantity of the potting adhesive is 57.3g, and the filling pressure of a plunger glue filling pump 24 is-60 Kpa; the up-down moving speed of the Z-axis motor 20 is divided into two sections, namely, an original position, a fast down-moving position, a slow down-moving position, a glue injection position, a slow up-moving position, a fast up-moving position and a next working position; wherein the fast upward and downward moving speed is 800mm/s, the slow downward moving speed is 300mm/s, the X-direction step distance of the X, Y-axis moving platform 19 is 50mm, the Y-axis step distance is 75mm, the vacuum negative pressure in the glue injection state is-60 Kpa, and the pre-curing heating temperature is 100 +/-10 ℃; the curing time is 120 +/-5 s.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a power module vacuum packaging hardware, includes agitator (1), its characterized in that: be equipped with airtight dog-house (2) on agitator (1), be equipped with first rotary-vane vacuum pump (3) in agitator (1), be equipped with vacuum gauge (4) and unload valve (5) on agitator (1), the upper end of agitator (1) is equipped with agitator motor (6), bull stick on agitator motor (6) penetrates in agitator (1), be equipped with stirring rotary-tooth (7) on the bull stick of agitator motor (6), there is transmission flow pump (8) through the pipe connection in agitator (1), be equipped with flow control valve (10) and fine filtration net (11) on the pipeline, the other end of transmission flow pump (8) is equipped with dredge pipe (9), the other end of dredging pipe (9) is located in injecting glue section of thick bamboo (12).
2. The vacuum packaging apparatus for power module as claimed in claim 1, wherein: the mixing tank is characterized in that a first negative-pressure air exhaust pipe (13) is arranged on the mixing tank (1), a second negative-pressure air exhaust pipe (14) is arranged on the glue injection barrel (12), and the other side of the second negative-pressure air exhaust pipe (14) is fixedly connected to a second rotary-vane vacuum pump (15).
3. The vacuum packaging apparatus for power module as claimed in claim 1, wherein: one end of the glue injection barrel (12) is connected with a plunger glue injection pump (24) through a pipeline, the lower end of the plunger glue injection pump (24) is provided with a glue injection pipe (23), the other end of the glue injection pipe (23) is connected onto a needle head (22), the upper end of the needle head (22) is provided with a needle head seat (21), the upper end of the needle head seat (21) is provided with a Z-axis motor (20), the lower end of the Z-axis motor (20) is arranged on the upper surface of a glue injection support (25), and the lower end of the glue injection support (25) is provided with a glue injection machine platform (16).
4. A power module vacuum packaging apparatus as claimed in claim 3, wherein: the upper end of injecting glue quick-witted platform (16) is equipped with X, Y axle motion platform (19), the upper end of X, Y axle motion platform (19) is equipped with injecting glue bottom plate (17), the upper end of injecting glue bottom plate (17) is equipped with power module tool (18), be equipped with heating system (28) on injecting glue bottom plate (17).
5. A power module vacuum packaging apparatus as claimed in claim 3, wherein: the outside of injecting glue machine platform (16) is equipped with sealed dustcoat of ya keli (26), be equipped with yakeli sealing door (27) on sealed dustcoat of ya keli (26), be equipped with heating controller (29) in the sealed dustcoat of yakeli (26).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911126390.6A CN110681537A (en) | 2019-11-18 | 2019-11-18 | Vacuum packaging device for power module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911126390.6A CN110681537A (en) | 2019-11-18 | 2019-11-18 | Vacuum packaging device for power module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110681537A true CN110681537A (en) | 2020-01-14 |
Family
ID=69117423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911126390.6A Withdrawn CN110681537A (en) | 2019-11-18 | 2019-11-18 | Vacuum packaging device for power module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110681537A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112387523A (en) * | 2020-11-04 | 2021-02-23 | 湖南壹品堂门窗加工有限公司 | Glue applying device for assembling aluminum alloy doors and windows |
| CN114274394A (en) * | 2021-12-03 | 2022-04-05 | 湖北硕为塑胶科技有限公司 | Manufacturing process of antibacterial and bacteriostatic product package |
| CN114713461A (en) * | 2022-04-07 | 2022-07-08 | 利能(佛山市)塑料制品有限公司 | Liquid flow control device |
-
2019
- 2019-11-18 CN CN201911126390.6A patent/CN110681537A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112387523A (en) * | 2020-11-04 | 2021-02-23 | 湖南壹品堂门窗加工有限公司 | Glue applying device for assembling aluminum alloy doors and windows |
| CN114274394A (en) * | 2021-12-03 | 2022-04-05 | 湖北硕为塑胶科技有限公司 | Manufacturing process of antibacterial and bacteriostatic product package |
| CN114713461A (en) * | 2022-04-07 | 2022-07-08 | 利能(佛山市)塑料制品有限公司 | Liquid flow control device |
| CN114713461B (en) * | 2022-04-07 | 2023-11-03 | 利能(佛山市)塑料制品有限公司 | Device for controlling liquid flow |
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