CN110676545A - Multi-branch filter - Google Patents
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- CN110676545A CN110676545A CN201910790414.1A CN201910790414A CN110676545A CN 110676545 A CN110676545 A CN 110676545A CN 201910790414 A CN201910790414 A CN 201910790414A CN 110676545 A CN110676545 A CN 110676545A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
- H01P1/20327—Electromagnetic interstage coupling
- H01P1/20354—Non-comb or non-interdigital filters
- H01P1/20381—Special shape resonators
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Abstract
The invention discloses a multi-branch filter, comprising: the first shielding layer is provided with a first sealant discharging structure and comprises an intermediate body and a branch body, and one end of the branch body is connected with the intermediate body; the middle supporting layer is a frame structure with the same structure as the first shielding layer and is arranged on the first shielding layer; the second shielding layer is provided with a second glue discharging structure, is arranged on the middle supporting layer, has the same structure as the first shielding layer, and forms an electromagnetic shielding cavity together with the first shielding layer and the middle supporting layer; and the signal transmission structure is the same as the first shielding layer structure and is arranged in the middle supporting layer. According to the terahertz broadband transmission device, the first shielding layer, the middle supporting layer and the second shielding layer jointly form the electromagnetic shielding cavity, signal transmission is carried out through the signal transmission structure, and the transmission branches are arranged on the middle transmission body, so that the terahertz broadband transmission device can meet the use of a terahertz frequency band.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a multi-branch filter.
Background
The terahertz wave (THz) comprises an electromagnetic wave with the frequency of 0.1 to 10THz, has the wavelength range of 30 mu m-3 mm, is positioned at the high-frequency and low-frequency far infrared spectrum edge of the millimeter wave band of the electromagnetic wave, and is widely applied to the fields of communication, radar, electronic countermeasure, electromagnetic weapons, astronomy, medical imaging, nondestructive testing, safety inspection and the like. In practical application, the terahertz system needs to filter electromagnetic noise outside an unnecessary frequency range, improve the anti-interference capability and use a filter.
At present, a microstrip line planar filter is commonly used, the application range of the microstrip filter is not wide, the expansibility is not strong, the microstrip filter is mainly concentrated in a low-frequency system at present, the loss of signals is large, the system integration is difficult, and the development of the system is restricted. Therefore, a high-performance filter product suitable for a high-frequency microwave band, especially a terahertz frequency band, is urgently needed to be developed.
Disclosure of Invention
The embodiment of the invention provides a multi-branch filter, and aims to solve the problem that the existing filter cannot meet the use requirement of a terahertz frequency band.
The embodiment of the invention provides a multi-branch filter, which comprises:
the first shielding layer is provided with a first sealant discharging structure and comprises a middle body and a branch body, and one end of the branch body is connected with the middle body;
the middle supporting layer is a frame structure with the same structure as the first shielding layer and is arranged on the first shielding layer, a signal input interface is arranged at a position, corresponding to the left end of the intermediate body, in the frame structure, and a signal output interface is arranged at a position, corresponding to the right end of the intermediate body, in the frame structure;
the second shielding layer is provided with a second glue discharging structure, is arranged on the middle supporting layer, has the same structure as the first shielding layer, and forms an electromagnetic shielding cavity together with the first shielding layer and the middle supporting layer;
the signal transmission structure is the same as the first shielding layer structure and is arranged in the middle supporting layer, the signal transmission structure comprises a middle transmission body and a transmission branch, the first end of the transmission branch is connected with the middle supporting layer, the second end of the transmission branch is connected with the middle transmission body, the left end of the middle transmission body is arranged in the signal input interface, and the right end of the middle transmission body is arranged in the signal output port.
In an embodiment of the present application, the intermediate support layer comprises:
the first supporting layer is of a frame structure and is arranged on the first shielding layer;
the second supporting layer is the same as the first supporting layer in frame structure and is arranged on the first supporting layer, the left end of the second supporting layer is provided with the signal input port, and the right end of the second supporting layer is provided with the signal output port; the signal transmission structure is arranged in the second supporting layer, and the first end of the transmission branch is connected with the inner side face of the second supporting layer;
and the third supporting layer is the same as the frame structure of the first supporting layer and is arranged on the second supporting layer.
In an embodiment of the present application, the left end of the first support layer, the right end of the first support layer, the left end of the third support layer, the right end of the third support layer, the left end of the second support layer, and the right end of the second support layer are all open structures.
In an embodiment of the present application, a length of the second shielding layer is the same as a length of the third supporting layer, a length of the first supporting layer, a length of the second supporting layer are the same as a length of the first shielding layer, and a length of the third supporting layer is smaller than a length of the first supporting layer;
the left end of the third supporting layer is flush with the left end of the second shielding layer, and the left end of the third supporting layer does not exceed the left end of the second supporting layer;
the right end of the third supporting layer is flush with the right end of the second shielding layer, and the right end of the third supporting layer does not exceed the right end of the second supporting layer.
In an embodiment of the application, the intermediate support layer further comprises a support plate for supporting the signal transmission structure, the support plate being arranged between the first support layer and the second support layer.
In an embodiment of the present application, a concave groove is formed at a position where the support plate is disposed on the second support layer; the concave groove is used for accommodating the supporting plate.
In an embodiment of the application, the first sealant discharging structure includes a first through hole and/or a first groove disposed on a side surface of the first shielding layer and penetrating through upper and lower surfaces of the first shielding layer;
the second glue discharging structure comprises a second through hole and/or a second groove which is arranged on the side face of the second shielding layer and penetrates through the upper surface and the lower surface of the second shielding layer.
In an embodiment of the application, when the first sealant discharging structure includes first grooves disposed on the side surface of the first shielding layer and penetrating the upper and lower surfaces of the first shielding layer, the first grooves are uniformly distributed on the side surface of the first shielding layer;
when the second glue discharging structure comprises second grooves which are arranged on the side face of the second shielding layer and penetrate through the upper surface and the lower surface of the second shielding layer, the second grooves are uniformly distributed on the side face of the second shielding layer;
when the first glue discharging structure comprises a first groove and the second glue discharging structure comprises a second groove, the position of the second groove on the second shielding layer is the same as the position of the first groove on the first shielding layer.
In an embodiment of the present application, when the first grooves are uniformly distributed on the side surface of the first shielding layer, a third notch is disposed at the edge of the first supporting layer, a fourth notch is disposed at the edge of the third supporting layer, and the third notch and the fourth notch are both located above the first grooves.
In an embodiment of the present application, the first shielding layer, the middle supporting layer, and the second shielding layer are all made of copper.
According to the terahertz broadband transmission device, the first shielding layer, the middle supporting layer and the second shielding layer jointly form the electromagnetic shielding cavity, signal transmission is carried out through the signal transmission structure, and the transmission branches are arranged on the middle transmission body, so that the terahertz broadband transmission device can meet the use of a terahertz frequency band.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is a schematic structural diagram of layers of a multi-branch filter according to an embodiment of the present invention;
fig. 2 is a schematic diagram of an overall structure of a multi-branch filter according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a signal transmission structure according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a signal transmission structure and a middle support layer according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a support plate and an intermediate support layer according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a support plate provided in accordance with an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a right end portion of a multi-branch filter according to an embodiment of the present invention.
Wherein: 1. a first shielding layer; 2. a second shielding layer; 3. a first support layer; 4. a second support layer; 5. a third support layer; 6. an intermediate; 7. a branch body; 8. a signal transmission structure; 9. an intermediate transmission body; 10. transmitting the branch knots; 11. and a support plate.
Detailed Description
In order to make the technical solution better understood by those skilled in the art, the technical solution in the embodiment of the present invention will be clearly described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is a part of the embodiment of the present invention, and not a whole embodiment. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present disclosure without any creative effort shall fall within the protection scope of the present disclosure.
The terms "include" and any other variations in the description and claims of this document and the above-described figures, mean "including but not limited to", and are intended to cover non-exclusive inclusions. Furthermore, the terms "first" and "second," etc. are used to distinguish between different objects and are not used to describe a particular order.
Implementations of the present invention are described in detail below with reference to the following detailed drawings:
fig. 1 to 7 illustrate a multi-branch filter provided in an embodiment of the present invention, and for convenience of illustration, only the parts related to the embodiment of the present invention are shown, and detailed as follows:
as shown in fig. 1 to 4, an embodiment of the present invention provides a multi-branch filter, including:
the first shielding layer 1 is provided with a first binder removal structure, the first shielding layer 1 comprises a middle body 6 and a branch body 7, and one end of the branch body 7 is connected with the middle body 6;
the middle supporting layer is a frame structure with the same structure as the first shielding layer 1 and is arranged on the first shielding layer 1, a signal input interface is arranged at a position, corresponding to the left end of the intermediate body 6, in the frame structure, and a signal output interface is arranged at a position, corresponding to the right end of the intermediate body 6, in the frame structure;
the second shielding layer 2 is provided with a second glue discharging structure, is arranged on the middle supporting layer, has the same structure as the first shielding layer 1, and forms an electromagnetic shielding cavity together with the first shielding layer 1 and the middle supporting layer;
the signal transmission structure 8 is structurally the same as the first shielding layer 1 and is arranged in the middle supporting layer, the signal transmission structure 8 comprises a middle transmission body 9 and a transmission branch 10, a first end of the transmission branch 10 is connected with the middle supporting layer, a second end of the transmission branch 10 is connected with the middle transmission body 9, a left end of the middle transmission body 9 is arranged in the signal input interface, and a right end of the middle transmission body 9 is arranged in the signal output port.
In this embodiment, the first ends of the transmission branches 10 are connected to the middle support layer to form a short-circuit structure, the distance between resonators corresponding to each transmission branch 10 determines the coupling strength of the filter, the main transmission path is a coupling structure formed by the middle transmission body 9, and the distance and size of the transmission branches 10 can be adjusted according to the specific performance of a desired product. The structure of the terahertz frequency band filter is suitable for a terahertz frequency band filter, can be integrally manufactured with a terahertz system, does not need to be manufactured separately, and can be integrated with a micro-filter system.
In the embodiment of the present invention, the first shielding layer 1 and the second shielding layer 2 play a role of signal shielding. The signal transmission structure 8 performs signal transmission.
In the embodiment of the present invention, the signal transmission structure 8 is made of copper material.
In the embodiment of the present invention, the transmission branches 10 in the signal transmission structure 8 are resonance branches, and the length of each transmission branch 10 is λ/2 wavelength of the required frequency.
In an embodiment of the invention, the intermediate support layer comprises:
the first supporting layer 3 is of a frame structure and is arranged on the first shielding layer 1;
the second supporting layer 4 has the same frame structure as the first supporting layer 3, and is arranged on the first supporting layer 3, the left end of the second supporting layer 4 is provided with the signal input port, and the right end of the second supporting layer 4 is provided with the signal output port; the signal transmission structure 8 is arranged inside the second support layer 4, and the first end of the transmission branch 10 is connected with the inner side surface of the second support layer 4;
and a third support layer 5 having the same frame structure as the first support layer 3 and disposed on the second support layer 4.
In the embodiment of the present invention, the thicknesses of the first support layer 3, the second support layer 4, the third support layer 5, the first shield layer 1, and the second shield layer 2 are all 100 μm. The first supporting layer 3 and the third supporting layer 5 play a role of mechanical support and electromagnetic shielding at the edge of the whole filter structure, and the second supporting layer 4 is a signal transmission layer.
In the embodiment of the present invention, the left end of the first support layer 3, the right end of the first support layer 3, the left end of the third support layer 5, the right end of the third support layer 5, the left end of the second support layer 4, and the right end of the second support layer 4 are all open structures.
As shown in fig. 1-2 and 7, in the embodiment of the present invention, the length of the second shielding layer 2 is the same as the length of the third supporting layer 5, the length of the first supporting layer 3, the length of the second supporting layer 4 and the length of the first shielding layer 1 are the same, and the length of the third supporting layer 5 is smaller than the length of the first supporting layer 3;
the left end of the third supporting layer 5 is flush with the left end of the second shielding layer 2, and the left end of the third supporting layer 5 does not exceed the left end of the second supporting layer 4;
the right end of the third supporting layer 5 is flush with the right end of the second shielding layer 2, and the right end of the third supporting layer 5 does not exceed the right end of the second supporting layer 4.
In this embodiment, the left end of the third supporting layer 5 is different from the left end of the second supporting layer 4 by 0.3 mm, and the right end of the third supporting layer 5 is different from the right end of the second shielding layer 2 by 0.3 mm.
As shown in fig. 5-6, in an embodiment of the invention, the intermediate support layer further comprises a support plate 11 for supporting the signal transmission structures 8, the support plate 11 being arranged between the first support layer 3 and the second support layer 4.
In this embodiment, the support plate 11 is provided on both the intermediate body 6 and the branch bodies 7 of the intermediate support layer.
In this embodiment, the support plate 11 has a thickness of 30 micrometers, a length of 560 micrometers and a width of 200 micrometers, and the support plate 11 occupies the bottom of the second support layer 4. The distance between two adjacent support plates 11 is 1 mm, which can ensure the stability of the whole structure.
In this embodiment, the thickness of the portion of the second support layer 4 on which the support plate 11 is disposed is 70 micrometers, and the thickness of the other portions is still 100 micrometers, so as to ensure that the total thickness of the second support layer 4 is 100 micrometers.
In this embodiment, the supporting structure is a nonmetal with a low dielectric constant, and does not short the signal transmission structure 8.
In the embodiment of the present invention, the position of the second supporting layer 4 where the supporting plate 11 is arranged is provided with a concave groove; the concave groove is used for accommodating the supporting plate 11.
In an embodiment of the present invention, the first sealant discharging structure includes a first through hole and/or a first groove disposed on a side surface of the first shielding layer 1 and penetrating through upper and lower surfaces of the first shielding layer 1;
the second glue discharging structure comprises a second through hole and/or a second groove which is arranged on the side surface of the second shielding layer 2 and penetrates through the upper surface and the lower surface of the second shielding layer 2.
In an embodiment of the present invention, a distance between two adjacent first through holes is 800 micrometers. The distance between two adjacent first grooves was 800 μm. The distance between two adjacent second through holes is 800 micrometers. The distance between two adjacent second grooves was 800 μm.
In the embodiment of the present invention, when the first sealant-discharging structure includes first grooves disposed on the side surface of the first shielding layer 1 and penetrating through the upper and lower surfaces of the first shielding layer 1, the first grooves are uniformly distributed on the side surface of the first shielding layer 1;
when the second glue discharging structure comprises the second groove which is arranged on the side surface of the second shielding layer 2 and penetrates through the upper surface and the lower surface of the second shielding layer 2,
the second grooves are uniformly distributed on the side surface of the second shielding layer 2;
when the first glue discharging structure comprises a first groove and the second glue discharging structure comprises a second groove, the position of the second groove on the second shielding layer 2 is the same as the position of the first groove on the first shielding layer 1.
In the embodiment of the present invention, when the first grooves are uniformly distributed on the side surface of the first shielding layer 1, a third notch is disposed at the edge of the first supporting layer 3, a fourth notch is disposed at the edge of the third supporting layer 5, and the third notch and the fourth notch are both above the first grooves.
In the embodiment of the present invention, the first shielding layer 1, the middle supporting layer, and the second shielding layer 2 are all made of copper.
The preparation process of the specific signal transmission structure comprises the following steps:
and coating photoresist on the wafer carrier, and carrying out photoetching and developing.
Manufacturing an electroplated copper conductor layer on the wafer carrier subjected to photoetching and developing;
carrying out planarization treatment on the copper conductor layer and the photoresist;
repeating the steps to manufacture the micro coaxial grounding conductor;
manufacturing a micro coaxial inner conductor supporting medium;
and repeating photoetching, electroplating and flattening to form a complete three-dimensional micro-coaxial transmission line conductor structure.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A multi-branch filter, comprising:
the first shielding layer is provided with a first sealant discharging structure and comprises a middle body and a branch body, and one end of the branch body is connected with the middle body;
the middle supporting layer is a frame structure with the same structure as the first shielding layer and is arranged on the first shielding layer, a signal input interface is arranged at a position, corresponding to the left end of the intermediate body, in the frame structure, and a signal output interface is arranged at a position, corresponding to the right end of the intermediate body, in the frame structure;
the second shielding layer is provided with a second glue discharging structure, is arranged on the middle supporting layer, has the same structure as the first shielding layer, and forms an electromagnetic shielding cavity together with the first shielding layer and the middle supporting layer;
the signal transmission structure is the same as the first shielding layer structure and is arranged in the middle supporting layer, the signal transmission structure comprises a middle transmission body and a transmission branch, the first end of the transmission branch is connected with the middle supporting layer, the second end of the transmission branch is connected with the middle transmission body, the left end of the middle transmission body is arranged in the signal input interface, and the right end of the middle transmission body is arranged in the signal output port.
2. The multi-branch filter of claim 1, wherein the middle support layer comprises:
the first supporting layer is of a frame structure and is arranged on the first shielding layer;
the second supporting layer is the same as the first supporting layer in frame structure and is arranged on the first supporting layer, the left end of the second supporting layer is provided with the signal input port, and the right end of the second supporting layer is provided with the signal output port; the signal transmission structure is arranged in the second supporting layer, and the first end of the transmission branch is connected with the inner side face of the second supporting layer;
and the third supporting layer is the same as the frame structure of the first supporting layer and is arranged on the second supporting layer.
3. The multi-branch filter of claim 2, wherein the left end of the first support layer, the right end of the first support layer, the left end of the third support layer, the right end of the third support layer, the left end of the second support layer, and the right end of the second support layer are all open structures.
4. The multi-branch filter of claim 3, wherein the length of the second shielding layer is the same as the length of the third supporting layer, the length of the first supporting layer, the length of the second supporting layer, and the length of the first shielding layer are the same, and the length of the third supporting layer is smaller than the length of the first supporting layer;
the left end of the third supporting layer is flush with the left end of the second shielding layer, and the left end of the third supporting layer does not exceed the left end of the second supporting layer;
the right end of the third supporting layer is flush with the right end of the second shielding layer, and the right end of the third supporting layer does not exceed the right end of the second supporting layer.
5. The multi-branch filter of claim 2, wherein the intermediate support layer further comprises a support plate for supporting the signal transmission structure, the support plate being disposed between the first support layer and the second support layer.
6. The multi-branch filter according to claim 5, wherein the second support layer is provided with a concave groove at a position where the support plate is provided; the concave groove is used for accommodating the supporting plate.
7. The multi-branch filter of claim 2, wherein the first glue-draining structure comprises a first through hole and/or a first groove disposed at a side of the first shielding layer and penetrating upper and lower surfaces of the first shielding layer;
the second glue discharging structure comprises a second through hole and/or a second groove which is arranged on the side face of the second shielding layer and penetrates through the upper surface and the lower surface of the second shielding layer.
8. The multi-branch filter of claim 7, wherein when the first bank structure includes first grooves disposed on the side surfaces of the first shielding layer and penetrating the upper and lower surfaces of the first shielding layer, the first grooves are uniformly distributed on the side surfaces of the first shielding layer;
when the second glue discharging structure comprises second grooves which are arranged on the side face of the second shielding layer and penetrate through the upper surface and the lower surface of the second shielding layer, the second grooves are uniformly distributed on the side face of the second shielding layer;
when the first glue discharging structure comprises a first groove and the second glue discharging structure comprises a second groove, the position of the second groove on the second shielding layer is the same as the position of the first groove on the first shielding layer.
9. The multi-branch filter of claim 8, wherein when the first grooves are uniformly distributed on the side of the first shielding layer, a third notch is provided at the edge of the first supporting layer, a fourth notch is provided at the edge of the third supporting layer, and the third notch and the fourth notch are both above the first grooves.
10. The multi-branch filter of claim 1, wherein the first shield layer, the middle support layer, and the second shield layer are all copper material.
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