CN110676211A - Mechanical arm electrostatic discharge device for precision instrument or semiconductor chip - Google Patents
Mechanical arm electrostatic discharge device for precision instrument or semiconductor chip Download PDFInfo
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- CN110676211A CN110676211A CN201910940755.2A CN201910940755A CN110676211A CN 110676211 A CN110676211 A CN 110676211A CN 201910940755 A CN201910940755 A CN 201910940755A CN 110676211 A CN110676211 A CN 110676211A
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- connecting shaft
- module
- rotating arm
- electrostatic discharge
- clamping part
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0075—Means for protecting the manipulator from its environment or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/06—Safety devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Elimination Of Static Electricity (AREA)
Abstract
The invention discloses a mechanical arm electrostatic discharge device for a precision instrument or a semiconductor chip, which comprises a charge-discharge module, a voltage monitoring module, a controller, a driving module and at least one nozzle, wherein the charge-discharge module is connected with a clamping part and transfers the static electricity of the clamping part into the charge-discharge module, the voltage monitoring module is connected with the charge-discharge module and is used for monitoring the voltage of the charge-discharge module and transmitting the monitored voltage to the controller, the controller controls the driving module to work according to the information transmitted by the voltage monitoring module, the driving module drives the nozzle to work and controls the injection angle and the injection intensity of the nozzle, and the nozzle is aligned with the clamping part to inject ion wind. The invention can reduce the damage to products or instruments caused by MM or CDM mode instantaneous discharge and improve the yield of products.
Description
Technical Field
The invention relates to the field of intelligent manufacturing, in particular to a mechanical arm electrostatic discharge device for a precision instrument or a semiconductor chip.
Background
Static electricity exists in nature, and when static electricity accumulated in the external environment or the inside flows into or out of the inside through a pin, various integrated circuits or precision instruments can be damaged by instantaneously generated current (the peak value can reach several amperes) or voltage, so that the functions of the integrated circuits or the precision instruments are disabled. Static electricity is costly to both the manufacturer and the consumer of integrated circuits or precision instruments. When human body feels static electricity exists, the generated static electricity reaches tens of thousands of volts, and most of electronic components and precision instruments are damaged. Therefore, the electrostatic protection with qualified design is a sense of all the industrialized electronic devices.
There are three models of electrostatic discharge:
the human Body discharging mode HBM (human Body model) simulates the process that when the human Body walks and rubs on the ground or other factors accumulate static electricity and touches electronic components, the static electricity on the human Body is transferred to pins of the electronic components from the human Body;
in the Machine discharge mode MM (Machine Model), when a Machine which itself accumulates static electricity touches an electronic component, the static electricity is discharged through the electronic component and causes electrostatic impact on the electronic component. This is a common electrical discharge phenomenon that occurs when a powered machine contacts an electronic component during an automatic test. The device itself is an electrostatic source except human body and machine, the packaging form mainly adopted by the device is three kinds of metal, ceramic and plastic at present, and in the process of assembly, transmission, experiment, test, transportation and storage, the tube shell accumulates certain charges due to the mutual friction of the tube shell and other materials, so that the whole device is charged with static electricity. Once the pin is grounded to generate a discharge behavior, the generated transient current or excessive voltage will damage the chip packaged inside, resulting in the failure of the whole device.
The charge-Device discharge mode (CDM) is a phenomenon in which an electronic component simulated as a ground accumulates static electricity therein and then discharges static electricity at the instant of the ground to damage itself. The discharge time of the mode is about a few nanoseconds, and the discharge phenomenon is difficult to be truly simulated. Because the static electricity accumulated inside can be changed due to the equivalent capacitance of the element to the ground, the angle and the position of the chip and the packaging form of the chip can cause different equivalent capacitances.
In full-automatic production of intelligent manufacturing, due to the fact that no personnel contact with equipment, instruments and products, even in semi-automatic intelligent manufacturing, good electrostatic protection training can be conducted on personnel and environment improvement can be conducted on HBM mode electrostatic damage, however, in some intelligent manufacturing scenes, especially in application of intelligent manufacturing of precision instruments, micro-nano material devices, semiconductor chips and the like, on one hand, MM and CDM mode electrostatic damage of machines or product elements is difficult to improve through personnel training or environment control, and on the other hand, products of the precision instruments, the micro-nano material devices, the semiconductor chips and the like are very sensitive to electrostatic damage. Therefore, in the related intelligent manufacturing processes of precision instruments, micro-nano material devices, semiconductor chips and the like, the MM and CDM mode electrostatic damage needs to be protected urgently, so that the yield is improved, the cost is reduced, the product quality is ensured, and the intellectualization of the production processes of the precision instruments, the micro-nano material devices, the semiconductor chips and the like is realized.
Disclosure of Invention
The invention provides a mechanical arm electrostatic discharge device for a precision instrument or a semiconductor chip, aiming at solving the problem that MM or CDM mode instantaneous discharge can damage various integrated circuits or precision instruments, and the mechanical arm electrostatic discharge device can reduce the damage to products or instruments caused by MM or CDM mode instantaneous discharge and improve the yield of the products.
A robotic arm electrostatic discharge device for precision instruments or semiconductor chips, comprising:
a base for carrying other components of a robotic arm;
the base rotating shaft is fixed on the base;
the three sections of rotating arms are respectively a first section of rotating arm, a second section of rotating arm and a third section of rotating arm;
the two connecting shaft bodies are respectively a first connecting shaft body and a second connecting shaft body, one end of the first section of rotating arm is fixed on the base rotating shaft, the other end of the first section of rotating arm is connected with one end of the second section of rotating arm through the first connecting shaft body, and the other end of the second section of rotating arm is connected with one end of the third section of rotating arm through the second connecting shaft body;
the rotating arm end connecting shaft is connected with the other end of the third section of rotating arm;
the clamping part connecting shaft is indirectly or directly connected with the rotating arm end connecting shaft;
the clamping part is connected with the clamping part connecting shaft and is used for clamping a precision instrument or a semiconductor chip;
and the electrostatic discharge device is arranged between the rotating arm end connecting shaft and the clamping part connecting shaft or sleeved on the third section rotating arm and is used for eliminating static electricity of the clamping part.
Further, the electrostatic discharge device includes:
the charging and discharging module is connected with the clamping part and transfers the static electricity on the clamping part into the charging and discharging module;
the voltage monitoring module is connected with the charge-discharge module and used for monitoring the voltage of the charge-discharge module and transmitting the monitored voltage to the controller;
the controller controls the driving module to work according to the monitoring voltage;
the driving module drives the nozzle to work and controls the spraying angle and the spraying strength of the nozzle;
at least one nozzle, the nozzle aims at the clamping part and sprays ion wind.
Further, the electrostatic discharge device also comprises at least one distance measuring device which is used for measuring the distance between the semiconductor chip and the clamping part and transmitting the distance to the controller, and the controller controls the nozzle to jet the ion wind according to the distance and the monitoring voltage of the voltage monitoring module.
Further, the charge-discharge module is arranged as an RC charge-discharge circuit.
Furthermore, the voltage monitoring module is set as a voltage comparator, the non-inverting input end and the inverting input end of the voltage comparator are respectively connected to the two ends of the capacitor, and the output end of the voltage comparator is connected to the controller.
Furthermore, the electrostatic discharge device further comprises an electronic module accommodating part, the distance measuring device, the controller, the driving module, the charging and discharging module and the voltage monitoring module are arranged in the electronic module accommodating part, and the nozzle is arranged below the electronic module accommodating part.
Further, when the electrostatic discharge device is arranged between the rotating arm end connecting shaft and the clamping part connecting shaft, the clamping part is connected with the clamping part connecting shaft, the clamping part connecting shaft is connected with the bottom of the electronic module accommodating part and arranged at the center of the bottom of the electronic module accommodating part, and the upper surface of the electronic module accommodating part is connected with the rotating arm end connecting shaft.
Further, when the electrostatic discharge device is sleeved on the third section of rotating arm, the rotating arm end connecting shaft is connected with the third section of rotating arm, the clamping part is connected with the third section of rotating arm through the clamping part connecting shaft, and the electrostatic discharge device is arranged close to the clamping part.
Compared with the prior art, the invention has the beneficial effects that: the electrostatic discharge device is provided with the charge-discharge module, the charge-discharge module is connected with the clamping part, the static electricity of the clamping part is transferred into the charge-discharge module, the nozzle is aligned to the clamping part to spray ion wind to neutralize the static electricity in the charge-discharge module, the voltage monitoring module is used for monitoring the static voltage of the charge-discharge module, when the static voltage of the charge-discharge module is smaller than a set value, the nozzle is controlled to stop spraying the ion wind, the clamping part is allowed to contact a product at the moment, and the static electricity in the product is transferred to the charge-discharge module through the clamping part, so that the problem that the equipment or the product is damaged due to instant discharge in an MM or CDM mode in the prior art is solved, the failure rate of the equipment or the product can be reduced, and the yield of the.
Drawings
Fig. 1 is a schematic structural diagram of a robot provided in an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an electrostatic discharge device according to an embodiment of the present invention;
fig. 3 is a circuit diagram of an electrostatic discharge device according to an embodiment of the invention.
In the drawing, 101 is a base, 102 is a base rotation shaft, 1031 is a first stage rotation arm, 1032 is a second stage rotation arm, 1033 is a third stage rotation arm, 1041 is a first connection shaft body, 1042 is a second connection shaft body, 105 is a rotation arm end connection shaft, 107 is a clamping part connection shaft, 108 is a clamping part, 210 is an electronic module accommodating part, 211 is a nozzle, and 212 is a distance measuring device.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An embodiment of the present invention provides an electrostatic discharge device for a robot arm, as shown in fig. 1 and fig. 2, the robot arm includes a base 101, a base rotating shaft 102, three sections of rotating arms, two connecting shafts, a rotating arm end connecting shaft 105, a clamping portion connecting shaft 107 and a clamping portion 108, wherein the base 101 is used for carrying other components of the robot arm, the base rotating shaft 102 is fixed on the base 101, the three sections of rotating arms are a first section of rotating arm 1031, a second section of rotating arm 1032 and a third section of rotating arm 1033, the two connecting shafts are a first connecting shaft 1041 and a second connecting shaft 1042, the three sections of rotating arms are sequentially connected together through the two connecting shafts, the rotating arm end connecting shaft 105 is connected to an end portion of the third section of rotating arm 1033, the clamping portion connecting shaft 107 is indirectly connected or directly connected to the rotating arm end connecting shaft 105, the clamping portion 108 is connected to the clamping portion connecting shaft 107, the electrostatic discharge device is disposed between the rotating arm end connecting shaft 105 and the clamping part connecting shaft 107 or sleeved on the third section rotating arm 1033, and the electrostatic discharge device is used for eliminating static electricity generated by the clamping part 108.
Further, the electrostatic discharge device comprises a charge-discharge module, a voltage monitoring module, a controller, a driving module and at least one nozzle 211, wherein the charge-discharge module is connected with the clamping part 108, the static electricity of the clamping part 108 is transferred into the charge-discharge module, the voltage monitoring module is connected with the charge-discharge module and is used for monitoring the voltage of the charge-discharge module and transmitting the monitored voltage to the controller, the controller controls the driving module to work according to the voltage monitored by the voltage monitoring module, when the monitored voltage is greater than the set value of the controller, the controller controls the driving module to drive the nozzle 211 to work, the clamping part 108 is aligned with the driving module to spray ion wind, so that the static electricity in the charge-discharge module is eliminated, when the detected voltage is less than the set value of the controller, the controller controls the driving module and the nozzle 211 to stop working, the ion wind is prevented from, static electricity in the product is transferred to the charge-discharge module through the clamping part 108, so that damage to equipment and the product per se caused by instant discharge of the product is prevented.
Further, the embodiment further comprises at least one distance measuring device 212 for measuring the distance between the semiconductor chip and the clamping part 108 and transmitting the distance to the controller, wherein the controller controls the nozzle 211 to intermittently eject the ion wind according to the distance and the monitoring voltage of the voltage monitoring module, and specifically, when the distance measuring device 212 detects that the distance between the clamping part 108 and the product is smaller than a set value, the nozzle 211 is controlled to stop working, so as to prevent the ion wind ejected from the nozzle 211 from damaging the product when the clamping part 108 contacts the product; when the distance measuring device 212 detects that the distance between the gripping part 108 and the product is greater than the set value, the nozzle 211 is allowed to operate, it should be noted that whether the nozzle 211 operates is determined, the detection result of the distance measuring device 212 and the monitoring result of the voltage monitoring module need to be determined at the same time, and only the nozzle 211 can operate if the detection result of the distance measuring device 212 and the monitoring result of the voltage monitoring module are satisfied at the same time.
Specifically, in the present embodiment, the distance measuring device 212 employs an infrared probe, a laser probe, an ultrasonic probe, or a camera, but of course, the distance measuring device 212 of the present embodiment may also employ other devices as long as the device has a function of measuring a distance and the detection precision is within 5cm, and thus, the device is not limited to this.
As a specific example of the charge-discharge module of this embodiment, as shown in fig. 3, the charge-discharge module is configured as an RC charge-discharge circuit, the RC charge-discharge circuit includes a resistor and a capacitor, one end of the resistor is connected to the clamping portion 108, the other end of the resistor is connected to the capacitor, the other end of the capacitor is grounded, and in this embodiment, the other end of the capacitor is grounded through an external device.
It should be noted that, as shown in fig. 3, the resistor in the RC charging and discharging circuit provided in this embodiment is an equivalent resistor, the equivalent resistor comprises a resistor and a parasitic resistor designed in the main circuit, the capacitor is an equivalent capacitor comprising a capacitor and a parasitic capacitor designed in the main circuit, the high voltage discharged in CDM or MM mode is stabilized by controlling the charging and discharging time of the RC charging and discharging circuit, when electrostatic charge is generated and accumulated during the operation of the semiconductor chip by the robot arm, the electrostatic charge of the gripper 108 of the robot arm is transferred to the charge-discharge module for storage, thereby avoiding the discharge in CDM or MM mode, when the gripping part 108 of the robot arm is far away from the precision instrument, the micro-nano material device and the semiconductor chip are not in operation, the driving module controls the nozzle 211 to start blowing until all the electrostatic charges stored in the charge-discharge module are neutralized, and the robot arm starts the next operation.
As a specific embodiment of the voltage monitoring module in this embodiment, as shown in fig. 3, the voltage monitoring module is configured as a voltage comparator, a non-inverting input terminal and an inverting input terminal of the voltage comparator are respectively connected to two ends of a capacitor, and an output terminal of the voltage comparator is connected to a controller.
As a specific embodiment of the nozzle 211 of this embodiment, as shown in fig. 2, the nozzle 211 is used for ejecting the ion wind at a short distance, the position and the intensity of the ion wind ejected from the nozzle 211 are controlled by a controller and a driving module, the driving module includes a stepping motor, and the angle ejected from the nozzle 211 is adjusted by controlling the stepping motor.
Further, in the present embodiment, the ion wind source is preferably an external supply system, but in the present embodiment, the ion wind source may be an internal generation system.
Specifically, when the ion wind source adopts an external supply mode, an ion wind pipe on an external device is inserted into the electrostatic discharge device provided in this embodiment, the electrostatic discharge device provided in this embodiment includes an electromagnetic valve, one end of the electromagnetic valve is connected to the ion wind pipe, the other end of the electromagnetic valve is connected to the nozzle 211, the electromagnetic valve is driven by the driving module to work, so that the ion wind enters the nozzle 211, the ion wind is ejected to the gripping part 108, the intensity of the ion wind is adjusted by adjusting the size of the air inlet of the nozzle 211, and of course, the air supply intensity of the external device can also be adjusted;
when the ion wind source adopts an internal generation mode, the electrostatic discharge device provided by the embodiment further comprises an ion generation cavity and an air supply mechanism, plasmas are generated in the ion generation cavity by utilizing a direct current arc discharge method, an alternating current power frequency discharge method, a high-frequency induction discharge method or a low-pressure discharge method, and then the plasmas generated in the cavity are sent out of the cavity through the air supply mechanism according to an input electric signal, so that the plasmas are sprayed out through the nozzle 211.
Further, in the embodiment, two nozzles 211 are provided, the nozzles 211 are arranged around the robot gripping unit 108 in a surrounding manner, the nozzles 211 can generate a large amount of air flows with positive and negative charges, the electrostatic charges of the robot gripping unit 108 are neutralized by spraying ion wind to the robot gripping unit 108, when the charges on the surface of the robot gripping unit 108 are negative charges, the positive charges in the air flows are attracted, when the charges on the surface of the robot gripping unit 108 are positive charges, the negative charges in the air flows are attracted, and when the equal amount of positive and negative charges are contacted, the electrical neutralization can be achieved, of course, the number of the nozzles 211 can be selected from other ones, without limiting too much.
In the present embodiment, the operation mode of the nozzle 211 is also an uninterrupted spray mode, and the operation mode is determined according to the actual operation scene.
Specifically, when the distance measuring device 212 detects that the gripping unit 108 is far from the object to be operated, the nozzle 211 ejects the ion wind toward the gripping unit 108 to remove the static electricity generated from the gripping unit 108 and prevent the MM mode discharge, and when the distance measuring device 212 detects that the gripping unit 108 is near to the object to be operated, the nozzle 211 ejects the ion wind toward the semiconductor chip to remove the static electricity generated from the semiconductor chip and prevent the CDM mode discharge.
Further, the embodiment further includes an electronic module accommodating portion 210, the distance measuring device 212, the controller, the driving module, the charge-discharge module and the voltage monitoring module are disposed in the electronic module accommodating portion 210, and the nozzle 211 is disposed below the electronic module accommodating portion 210.
Specifically, the material that the electronic module accommodating part 210 adopts is the metal material, and when the electronic module accommodating part 210 adopts the metal material, adds in its inner frame and establishes insulating pad, makes each electronic module and the electronic module accommodating part 210 insulating in this embodiment, and the material of the electronic module accommodating part 210 can also adopt other certainly, like organic glass, high strength working of plastics, as long as can satisfy the electronic module accommodating part 210 rather than insulating between each inside electronic module can, the contrast does not do too much restriction.
Further, when the electrostatic discharge device is disposed between the rotating arm end connecting shaft 105 and the clamping portion connecting shaft 107, the clamping portion 108 is connected to the clamping portion connecting shaft 107, the clamping portion connecting shaft 107 is connected to the bottom of the electronic module accommodating portion 210 and disposed at the bottom center of the electronic module accommodating portion 210, the upper surface of the electronic module accommodating portion 210 is connected to the rotating arm end connecting shaft 105, at this time, the clamping portion 108 and the second connecting shaft 1042 are in a completely isolated state, so that the clamping portion 108 is not interfered by the electric signal of the second connecting shaft 1042, and the electrostatic voltage monitored by the voltage monitoring module is more accurate, thereby the electrostatic discharge effect provided by the present embodiment is better.
Secondly, when the electrostatic discharge device is sleeved on the third section of the rotating arm 1033, the rotating arm end connecting shaft 105 is connected to the third section of the rotating arm 1033, the clamping part 108 is connected to the third section of the rotating arm 1033 through the clamping part connecting shaft 107, the electrostatic discharge device is disposed near the clamping part 108, at this time, the clamping part 108 and the second connecting shaft body 1042 are in a non-complete isolation state, by selecting the material and size of the rotating arm end connecting shaft 105 and/or the clamping part connecting shaft 107, the resistance from the rotating arm to the clamping part 108 is ensured to be between 100k Ω to 10M Ω, and meanwhile, electrical insulation treatment is performed between the rotating arm and the clamping part 108, for example, a common washer is replaced by an insulating washer, and a common screw is replaced by.
Thus, the electric path is modified to be the rotating arm → the rotating arm end connecting shaft 105 → the electrostatic discharge device → the gripping part connecting shaft 107 → the gripping part 108.
In order to improve the insulation effect between the rotating arm and the clamping part 108, in this embodiment, some insulating or semi-insulating plastics are used between the two parts, so that the resistance value of the parasitic resistance of the electrical path plus the resistance of the charge-discharge module is between 100k Ω and 10M Ω.
In summary, the present invention provides an electrostatic discharge device for a robot arm of a precision instrument or a semiconductor chip, wherein the electrostatic discharge device is applied to the robot arm, and the electrostatic discharge device processes the static electricity of the clamping part 108 of the robot arm, thereby reducing the failure rate of products and equipment, and improving the yield of products.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. An electrostatic discharge device for a robot arm used in a precision instrument or a semiconductor chip, comprising:
a base (101), the base (101) for carrying other components of a robotic arm;
a base rotation shaft (102), the base rotation shaft (102) being fixed to the base (101);
three stages of rotary arms, which are a first stage rotary arm (1031), a second stage rotary arm (1032), and a third stage rotary arm (1033), respectively;
the two connecting shaft bodies are respectively a first connecting shaft body (1041) and a second connecting shaft body (1042), one end of the first section of rotating arm (1031) is fixed on the base rotating shaft (102), the other end of the first section of rotating arm (1031) is connected with one end of the second section of rotating arm (1032) through the first connecting shaft body (1041), and the other end of the second section of rotating arm (1032) is connected with one end of the third section of rotating arm (1033) through the second connecting shaft body (1042);
a rotating arm end connecting shaft (105), wherein the rotating arm end connecting shaft (105) is connected with the other end of the third section rotating arm (1033);
a gripping section connecting shaft (107), the gripping section connecting shaft (107) being indirectly connected or directly connected to the rotating arm end connecting shaft (105);
a clamping part (108), wherein the clamping part (108) is connected with the clamping part connecting shaft (107), and the clamping part (108) is used for clamping a precision instrument or a semiconductor chip;
the electrostatic discharge device is arranged between the rotating arm end connecting shaft (105) and the clamping part connecting shaft (107) or sleeved on the third section rotating arm (1033), and the electrostatic discharge device is used for eliminating static electricity of the clamping part (108).
2. The electrostatic discharge device of claim 1, wherein the electrostatic discharge device comprises:
the charging and discharging module is connected with the clamping part (108) and transfers static electricity on the clamping part (108) to the charging and discharging module;
the voltage monitoring module is connected with the charge-discharge module and used for monitoring the voltage of the charge-discharge module and transmitting the monitored voltage to the controller;
the controller controls the driving module to work according to the monitoring voltage;
the driving module drives the nozzle (211) to work and controls the spraying angle and the spraying intensity of the nozzle (211);
at least one nozzle (211), the nozzle (211) ejecting the ion wind in alignment with the gripping section (108).
3. The electrostatic discharge apparatus for a precision instrument or a robot arm of a semiconductor chip as claimed in claim 2, further comprising at least one distance measuring device (212) for measuring a distance between the semiconductor chip and the chucking part (108) and transmitting the distance to a controller, the controller controlling the nozzle (211) to eject the ion wind according to the distance and a monitoring voltage of the voltage monitoring module.
4. The electrostatic discharge apparatus for a robot arm used for a precision instrument or a semiconductor chip according to claim 3, wherein the nozzle (211) intermittently ejects an ion wind in alignment with the gripping section (108).
5. The electrostatic discharge device of claim 3, wherein the charge-discharge module is configured as an RC charge-discharge circuit.
6. The electrostatic discharge device of claim 5, wherein the voltage monitoring module is a voltage comparator, the non-inverting input terminal and the inverting input terminal of the voltage comparator are respectively connected to two ends of the capacitor, and the output terminal of the voltage comparator is connected to the controller.
7. The electrostatic discharge device of a robot arm for a precision instrument or a semiconductor chip according to claim 6, further comprising an electronic module housing part (210), wherein the distance measuring device (212), the controller, the driving module, the charge-discharge module and the voltage monitoring module are disposed in the electronic module housing part (210), and the nozzle (211) is disposed below the electronic module housing part (210).
8. The electrostatic discharge device of claim 7, wherein when the electrostatic discharge device is disposed between the rotating arm end connecting shaft (105) and the gripper connecting shaft (107), the gripper (108) is connected to the gripper connecting shaft (107), the gripper connecting shaft (107) is connected to the bottom of the electronic module accommodating portion (210) and disposed at the center of the bottom of the electronic module accommodating portion (210), and the upper surface of the electronic module accommodating portion (210) is connected to the rotating arm end connecting shaft (105).
9. The electrostatic discharge device of the mechanical arm for the precision instrument or the semiconductor chip as claimed in claim 7, wherein when the electrostatic discharge device is sleeved on the third section of the rotating arm (1033), the rotating arm end connecting shaft (105) is connected with the third section of the rotating arm (1033), the clamping part (108) is connected with the third section of the rotating arm (1033) through the clamping part connecting shaft (107), and the electrostatic discharge device is disposed near the clamping part (108).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910940755.2A CN110676211A (en) | 2019-09-30 | 2019-09-30 | Mechanical arm electrostatic discharge device for precision instrument or semiconductor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910940755.2A CN110676211A (en) | 2019-09-30 | 2019-09-30 | Mechanical arm electrostatic discharge device for precision instrument or semiconductor chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110676211A true CN110676211A (en) | 2020-01-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910940755.2A Withdrawn CN110676211A (en) | 2019-09-30 | 2019-09-30 | Mechanical arm electrostatic discharge device for precision instrument or semiconductor chip |
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| Country | Link |
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| CN (1) | CN110676211A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114814557A (en) * | 2022-05-24 | 2022-07-29 | 上海晶岳电子有限公司 | Electrostatic gun and method for performing electrostatic discharge test by using same |
-
2019
- 2019-09-30 CN CN201910940755.2A patent/CN110676211A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114814557A (en) * | 2022-05-24 | 2022-07-29 | 上海晶岳电子有限公司 | Electrostatic gun and method for performing electrostatic discharge test by using same |
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