CN110670026B - OLED evaporation source with adjusting function and using method thereof - Google Patents
OLED evaporation source with adjusting function and using method thereof Download PDFInfo
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- CN110670026B CN110670026B CN201911104919.4A CN201911104919A CN110670026B CN 110670026 B CN110670026 B CN 110670026B CN 201911104919 A CN201911104919 A CN 201911104919A CN 110670026 B CN110670026 B CN 110670026B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The invention discloses an OLED evaporation source with an adjusting function and a using method thereof. The crucible can be directly placed in the outer shell, the clamping groove on the lower surface of the first annular plate can be clamped at the top end of the ball on the upper surface of the second annular plate, and the bottom end of the crucible can be attracted with the magnet block, so that the crucible and the base can be quickly fixed; a plurality of heating pipes are distributed in the outer shell body at equal intervals, the crucible can be driven to rotate at a constant speed along with the base by the motor, and evaporation materials in the crucible can be heated uniformly under the combined action of the heating pipes and the crucible rotating at the constant speed.
Description
Technical Field
The invention relates to an OLED evaporation source and a using method thereof, in particular to an OLED evaporation source with a regulating function and a using method thereof, and belongs to the technical field of OLED evaporation source application.
Background
A laboratory generally adopts manual vacuum evaporation equipment to carry out evaporation on a single sample so as to manufacture experimental samples of different types; a pilot line generally adopts semi-automatic vacuum evaporation equipment to carry out continuous multi-piece sample evaporation so as to facilitate the switching of small-batch products; the production line generally adopts full-automatic vacuum evaporation equipment to carry out flowing water sample evaporation (or adopts a line evaporation technology and a line evaporation process) so as to improve the yield and reduce the product cost.
In prior art, the coating by vaporization source structure that uses in the present laboratory is all comparatively simple, and the crucible is comparatively loaded down with trivial details when fixed, and the inhomogeneous phenomenon of being heated appears easily when heating the inside coating by vaporization material of crucible in the coating by vaporization source simultaneously and takes place, can influence its coating by vaporization effect, and present coating by vaporization source does not have the function of adjusting the coating by vaporization volume, can't adjust according to the demand. Therefore, an OLED evaporation source with a regulating function and a using method thereof are provided for solving the problems.
Disclosure of Invention
The invention aims to solve the problems and provide an OLED evaporation source with a regulating function and a using method thereof.
The invention achieves the purpose through the following technical scheme, and the OLED evaporation source with the adjusting function comprises an adjusting structure, an upper cover plate, a second lug plate, a first lug plate, an outer shell, a crucible, a supporting plate, a motor driving structure and a fixing plate which are sequentially arranged from top to bottom;
the adjusting structure comprises a first screw rod, a disc, a first through hole and a second through hole, the second through hole is formed in the upper surface of the upper cover plate, the bottom end of the first screw rod is fixedly connected with the upper surface of the disc, and the top end of the first screw rod penetrates through the second through hole; an adjusting nut is screwed at the top end of the first screw rod, a clamping spring is arranged at the bottom end of the adjusting nut, the clamping spring is sleeved on the surface of the first screw rod, the first through hole is positioned outside the second through hole, and the first through holes are formed in the upper cover plate and the disc surface;
the motor driving structure comprises a motor, a first annular plate, a second annular plate, a bearing and a connecting shaft, the bottom end of the connecting shaft is rotatably connected with the bottom end of the inner cavity of the outer shell through the bearing, the motor is fixedly connected to the upper surface of the fixed plate, and the tail end of an output shaft of the motor is fixedly connected with the bottom end of the connecting shaft; the top end of the connecting shaft is fixedly connected with a base, the upper surface of the base is fixedly connected with a magnet block, and the magnet block is attracted with the bottom end of the crucible; first annular slab cup joint in crucible top side, open the lower surface of first annular slab has the draw-in groove, second annular slab lateral surface with shell body inside wall rigid coupling, the upper surface mosaic of second annular slab has the ball, just the draw-in groove block is in the ball top.
Preferably, the supporting plate is fixedly connected between the outer shell and the fixing plate, and a fixing hole is formed in the upper surface of the fixing plate.
Preferably, the first ear plate is fixedly connected to the side surfaces of the two sides of the top end of the outer shell, and the second ear plate is fixedly connected to the side surfaces of the two sides of the upper cover plate.
Preferably, the upper surface rigid coupling of first otic placode has the second screw rod, open the surface of second otic placode has the connecting hole, just the second screw rod top runs through connecting hole and spiral shell have fixation nut.
Preferably, the outer shell is of a hollow structure, and the inner side wall of the outer shell is fixedly connected with a heating pipe.
Preferably, the upper surface of the upper cover plate is provided with a guide hole, the upper surface of the disc is fixedly connected with a guide block, and the guide block is clamped in the guide hole.
Preferably, a plurality of balls are distributed on the upper surface of the second annular plate in an annular manner, and the first annular plate is connected with the second annular plate in a rolling manner.
Preferably, a plurality of first through holes are annularly distributed on the upper cover plate and the upper surface of the disc, and the upper and lower first through holes are aligned with each other.
Preferably, the support plate is of a semicircular structure, and the motor is located inside the support plate.
Preferably, the OLED evaporation source with the adjusting function is obtained by a using method of the OLED evaporation source with the adjusting function, and the using method comprises the following steps:
firstly, placing an evaporation material in a crucible, then placing the crucible in the crucible from the top end of an outer shell, so that a clamping groove on the lower surface of a first annular plate is clamped with a ball on the upper surface of a second annular plate, meanwhile, the bottom end of the crucible can be attracted with a magnet block, and then fixing an upper cover plate and the outer shell through the matching between a first lug plate and a second lug plate;
adjusting the evaporation amount, manually rotating the first screw rod to enable the disc to rotate along the guide hole on the surface of the upper cover plate, so that the upper cover plate and the first through hole on the surface of the disc are kept aligned or staggered, the opening and closing of the first through hole are controlled, and the evaporation amount can be adjusted;
thirdly, the clamping spring can be compressed by screwing the adjusting nut, the fitting property between the disc and the upper cover plate can be enhanced under the counterforce of the clamping spring, and the sealing performance is good; after the adjusting nut is disassembled, the disc and the upper cover plate can be separated, so that the disc and the upper cover plate can be cleaned conveniently, and the assembly is simpler;
fourth, driving motor work, motor work can drive the connecting axle and slowly rotate to can drive the base and rotate, because the magnet piece on base top and the bottom actuation of crucible, the base can drive the crucible and rotate in step this moment, can heat the crucible at the inside heating pipe of shell body, make the crucible inside can be heated evenly, improve the coating by vaporization effect.
The invention has the beneficial effects that:
according to the invention, the crucible can be directly placed in the outer shell, the clamping groove on the lower surface of the first annular plate can be clamped at the top end of the ball on the upper surface of the second annular plate, and meanwhile, the bottom end of the crucible can be attracted with the magnet block, so that the crucible and the base can be quickly fixed, and the crucible is simple to place and take;
according to the invention, the first screw rod is manually rotated, so that the disc rotates along the guide hole on the surface of the upper cover plate, and the first through holes on the surfaces of the upper cover plate and the disc are aligned or staggered, so that the opening and closing of the first through holes are controlled, and the evaporation amount can be adjusted;
according to the invention, the plurality of heating pipes are equidistantly distributed in the outer shell, the motor can drive the crucible to rotate at a constant speed along with the base, and evaporation materials in the crucible can be uniformly heated under the combined action of the plurality of heating pipes and the crucible rotating at a constant speed, so that the evaporation effect is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is an enlarged view of the structure at A in FIG. 2;
FIG. 4 is a schematic view of a disk structure according to the present invention.
In the figure: 1. the fixing plate, 2, a fixing hole, 3, a support plate, 4, an outer shell, 5, a first lug plate, 6, a second lug plate, 61, a connecting hole, 7, an upper cover plate, 71, a guide hole, 8, a clamping spring, 9, an adjusting nut, 10, a first screw rod, 11, a first through hole, 12, a second screw rod, 13, a fixing nut, 14, a motor, 15, a crucible, 16, a disc, 161, a guide block, 17, a bearing, 18, a second through hole, 19, a heating pipe, 20, a magnet block, 21, a base, 22, a first annular plate, 221, a clamping groove, 23, a second annular plate, 24, a ball, 25 and a connecting shaft.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the embodiments described below are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Referring to fig. 1-4, an OLED evaporation source with an adjusting function includes an adjusting structure, an upper cover plate 7, a second ear plate 6, a first ear plate 5, an outer shell 4, a crucible 15, a support plate 3, a motor driving structure and a fixing plate 1, which are sequentially installed from top to bottom;
the adjusting structure comprises a first screw rod 10, a disc 16, a first through hole 11 and a second through hole 18, the second through hole 18 is formed in the upper surface of the upper cover plate 7, the bottom end of the first screw rod 10 is fixedly connected with the upper surface of the disc 16, and the top end of the first screw rod 10 penetrates through the second through hole 18; an adjusting nut 9 is screwed at the top end of the first screw rod 10, a clamping spring 8 is arranged at the bottom end of the adjusting nut 9, the clamping spring 8 is sleeved on the surface of the first screw rod 10, the first through hole 11 is positioned outside the second through hole 18, and the first through hole 11 is formed in the surfaces of the upper cover plate 7 and the disc 16;
the motor driving structure comprises a motor 14, a first annular plate 22, a second annular plate 23, a bearing 17 and a connecting shaft 25, wherein the bottom end of the connecting shaft 25 is rotatably connected with the bottom end of the inner cavity of the outer shell 4 through the bearing 17, the motor 14 is fixedly connected to the upper surface of the fixed plate 1, and the tail end of an output shaft of the motor 14 is fixedly connected with the bottom end of the connecting shaft 25; a base 21 is fixedly connected to the top end of the connecting shaft 25, a magnet block 20 is fixedly connected to the upper surface of the base 21, and the magnet block 20 is attracted to the bottom end of the crucible 15; first annular plate 22 cup joint in 15 top sides of crucible, open the lower surface of first annular plate 22 has draw-in groove 221, second annular plate 23 lateral surface with 4 inside wall rigid couplings of shell body, the upper surface of second annular plate 23 inlays and has ball 24, just draw-in groove 221 block is in ball 24 top.
The outer shell 4 with the rigid coupling has between fixed plate 1 backup pad 3, just the upper surface of fixed plate 1 is opened has fixed orifices 2.
The first ear plates 5 are fixedly connected to the side surfaces of the two sides of the top end of the outer shell 4, and the second ear plates 6 are fixedly connected to the side surfaces of the two sides of the upper cover plate 7.
The upper surface rigid coupling of first otic placode 5 has second screw rod 12, open on the surface of second otic placode 6 has connecting hole 61, just second screw rod 12 top runs through connecting hole 61 and spiral shell have fixation nut 13.
The outer shell 4 is a hollow structure, and a heating pipe 19 is fixedly connected to the inner side wall of the outer shell.
The upper cover plate 7 has a guide hole 71 formed in an upper surface thereof, the disc 16 has a guide block 161 fixed to an upper surface thereof, and the guide block 161 is engaged with the inside of the guide hole 71.
The upper surface of the second annular plate 23 is annularly distributed with a plurality of balls 24, and the first annular plate 22 is connected with the second annular plate 23 in a rolling manner.
The upper cover plate 7 and the upper surface of the disc 16 are both distributed with a plurality of first through holes 11 in an annular shape, and the upper and lower first through holes 11 are aligned with each other.
The support plate 3 is of a semicircular structure, and the motor 14 is located inside the support plate 3.
The use method of the OLED evaporation source with the adjusting function is obtained by the OLED evaporation source with the adjusting function and comprises the following steps:
firstly, vapor deposition materials are placed in a crucible 15, then the crucible 15 is placed in the outer shell 4 from the top end of the outer shell, so that a clamping groove 221 on the lower surface of a first annular plate 22 is clamped with a ball 24 on the upper surface of a second annular plate 23, meanwhile, the bottom end of the crucible 15 is attracted with a magnet block 20, and then an upper cover plate 7 and the outer shell 4 are fixed through the matching between a first lug plate 5 and a second lug plate 6;
secondly, regulating the evaporation amount, manually rotating the first screw 10 to enable the disc 16 to rotate along the guide hole 71 on the surface of the upper cover plate 7, so that the upper cover plate 7 and the first through hole 11 on the surface of the disc 16 are kept aligned or staggered, the opening and closing of the first through hole 11 are controlled, and the evaporation amount can be regulated;
thirdly, the clamping spring 8 can be compressed by screwing the adjusting nut 9, the fitting property between the disc 16 and the upper cover plate 7 can be enhanced under the counterforce of the clamping spring 8, and the sealing performance is good; after the adjusting nut 9 is disassembled, the disc 16 and the upper cover plate 7 can be separated, so that the cleaning of the disc and the upper cover plate is convenient, and the assembly is simple;
fourthly, driving motor 14 works, and motor 14 work can drive connecting axle 25 and slowly rotate to can drive base 21 and rotate, because the magnet piece 20 on base 21 top and the bottom actuation of crucible 15, base 21 can drive crucible 15 and rotate in step this moment, and heating pipe 19 inside at shell 4 can heat crucible 15, makes crucible 15 inside can be heated evenly, has improved the coating by vaporization effect.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The utility model provides an OLED evaporation source with regulatory function which characterized in that: comprises an adjusting structure, an upper cover plate (7), a second lug plate (6), a first lug plate (5), an outer shell (4), a crucible (15), a support plate (3), a motor driving structure and a fixing plate (1) which are sequentially arranged from top to bottom;
the adjusting structure comprises a first screw rod (10), a disc (16), a first through hole (11) and a second through hole (18), the second through hole (18) is formed in the upper surface of the upper cover plate (7), the bottom end of the first screw rod (10) is fixedly connected with the upper surface of the disc (16), and the top end of the first screw rod (10) penetrates through the second through hole (18); an adjusting nut (9) is screwed at the top end of the first screw rod (10), a clamping spring (8) is arranged at the bottom end of the adjusting nut (9), the clamping spring (8) is sleeved on the surface of the first screw rod (10), the first through hole (11) is positioned on the outer side of the second through hole (18), and the first through hole (11) is formed in the surfaces of the upper cover plate (7) and the disc (16);
the motor driving structure comprises a motor (14), a first annular plate (22), a second annular plate (23), a bearing (17) and a connecting shaft (25), the bottom end of the connecting shaft (25) is rotatably connected with the bottom end of the inner cavity of the outer shell (4) through the bearing (17), the motor (14) is fixedly connected to the upper surface of the fixing plate (1), and the tail end of an output shaft of the motor (14) is fixedly connected with the bottom end of the connecting shaft (25); a base (21) is fixedly connected to the top end of the connecting shaft (25), a magnet block (20) is fixedly connected to the upper surface of the base (21), and the magnet block (20) is attracted to the bottom end of the crucible (15); first annular slab (22) cup joint in crucible (15) top side, open the lower surface of first annular slab (22) has draw-in groove (221), second annular slab (23) lateral surface with shell body (4) inside wall rigid coupling, the upper surface of second annular slab (23) inlays and has ball (24), just draw-in groove (221) block is in ball (24) top.
2. The OLED evaporation source with the adjusting function of claim 1, wherein: the outer shell body (4) with the rigid coupling has between fixed plate (1) backup pad (3), just fixed orifices (2) have been opened to the upper surface of fixed plate (1).
3. The OLED evaporation source with the adjusting function according to claim 2, characterized in that: the first ear plate (5) is fixedly connected with the side faces of the two sides of the top end of the outer shell (4), and the second ear plate (6) is fixedly connected with the side faces of the two sides of the upper cover plate (7).
4. The OLED evaporation source with the adjusting function according to claim 3, wherein: the upper surface rigid coupling of first otic placode (5) has second screw rod (12), open on the surface of second otic placode (6) has connecting hole (61), just second screw rod (12) top is run through connecting hole (61) and spiral shell have fixation nut (13).
5. The OLED evaporation source with the adjusting function according to claim 4, wherein: the outer shell (4) is of a hollow structure, and a heating pipe (19) is fixedly connected to the inner side wall of the outer shell.
6. The OLED evaporation source with the adjusting function according to claim 5, wherein: the upper surface of upper cover plate (7) is opened has guiding hole (71), the upper surface rigid coupling of disc (16) has guide block (161), just guide block (161) block is in inside guiding hole (71).
7. The OLED evaporation source with the adjusting function according to claim 6, wherein: the upper surface of the second annular plate (23) is annularly provided with a plurality of balls (24), and the first annular plate (22) is in rolling connection with the second annular plate (23).
8. The OLED evaporation source with the adjusting function according to claim 7, wherein: the upper cover plate (7) and the upper surface of the disc (16) are both annularly distributed with a plurality of first through holes (11), and the upper and lower first through holes (11) are aligned with each other.
9. The OLED evaporation source with the adjusting function according to claim 8, wherein: the support plate (3) is of a semicircular structure, and the motor (14) is located inside the support plate (3).
10. The use method of the OLED evaporation source with the adjusting function, which is obtained by the OLED evaporation source with the adjusting function according to claim 9, is characterized in that: the using method comprises the following steps:
firstly, vapor deposition materials are placed in a crucible (15), then the crucible (15) is placed in the crucible from the top end of an outer shell (4), so that a clamping groove (221) in the lower surface of a first annular plate (22) is clamped with a ball (24) in the upper surface of a second annular plate (23), meanwhile, the bottom end of the crucible (15) is attracted with a magnet block (20), and then an upper cover plate (7) and the outer shell (4) are fixed through the matching between a first lug plate (5) and a second lug plate (6);
secondly, regulating the evaporation amount, manually rotating the first screw (10) to enable the disc (16) to rotate along the guide hole (71) on the surface of the upper cover plate (7), so that the upper cover plate (7) and the first through hole (11) on the surface of the disc (16) are kept aligned or staggered, the opening and closing of the first through hole (11) are controlled, and the evaporation amount can be regulated;
thirdly, the clamping spring (8) can be compressed by screwing the adjusting nut (9), the attaching performance between the disc (16) and the upper cover plate (7) can be enhanced under the counterforce of the clamping spring (8), and the sealing performance is good; after the adjusting nut (9) is disassembled, the disc (16) and the upper cover plate (7) can be separated, so that the disc and the upper cover plate are convenient to clean and the assembly is simple;
fourthly, driving motor (14) work, motor (14) work can drive connecting axle (25) and slowly rotate, thereby can drive base (21) and rotate, because magnet piece (20) on base (21) top and the bottom actuation of crucible (15), base (21) can drive crucible (15) synchronous rotation this moment, heating pipe (19) inside at outer casing (4) can heat crucible (15), make crucible (15) inside can be heated evenly, the evaporation coating effect has been improved.
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| CN201911104919.4A CN110670026B (en) | 2019-11-13 | 2019-11-13 | OLED evaporation source with adjusting function and using method thereof |
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| CN110670026B true CN110670026B (en) | 2021-08-03 |
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| CN111206228A (en) * | 2020-02-28 | 2020-05-29 | 苏州泓沵达仪器科技有限公司 | High-efficiency nano vacuum evaporation source |
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2019
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| US4876114A (en) * | 1987-09-23 | 1989-10-24 | International Business Machines Corporation | Process for the self fractionation deposition of a metallic layer on a workpiece |
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Denomination of invention: OLED evaporation source with regulating function and its application method Effective date of registration: 20220620 Granted publication date: 20210803 Pledgee: China Postal Savings Bank Co.,Ltd. Pizhou sub branch Pledgor: JIANGSU SHIWEI SEMICONDUCTOR TECHNOLOGY CO.,LTD. Registration number: Y2022320000292 |
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