CN110645299A - Double-air-chamber air cushion vibration isolation semi-active control device and fuzzy control method thereof - Google Patents

Double-air-chamber air cushion vibration isolation semi-active control device and fuzzy control method thereof Download PDF

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CN110645299A
CN110645299A CN201910877182.3A CN201910877182A CN110645299A CN 110645299 A CN110645299 A CN 110645299A CN 201910877182 A CN201910877182 A CN 201910877182A CN 110645299 A CN110645299 A CN 110645299A
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孙英杉
刘雪涛
侯钧瀚
梁俊杰
方中澳
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Wuhan University of Technology WUT
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F16F9/0209—Telescopic
    • F16F9/0281—Details
    • F16F9/029—Details electrical, e.g. connections or contacts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/32—Details
    • F16F9/3292—Sensor arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/32—Details
    • F16F9/44—Means on or in the damper for manual or non-automatic adjustment; such means combined with temperature correction
    • F16F9/46—Means on or in the damper for manual or non-automatic adjustment; such means combined with temperature correction allowing control from a distance, i.e. location of means for control input being remote from site of valves, e.g. on damper external wall
    • F16F9/464—Control of valve bias or pre-stress, e.g. electromagnetically
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2222/00—Special physical effects, e.g. nature of damping effects
    • F16F2222/12—Fluid damping
    • F16F2222/126—Fluid damping using gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00—Purpose; Design features
    • F16F2230/18—Control arrangements

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Abstract

The invention discloses a double-air-chamber air cushion vibration isolation semi-active control device and a fuzzy control method thereof, wherein the double-air-chamber air cushion vibration isolation semi-active control device comprises a machine table, a base, a vibration isolator and a fuzzy controller; the machine table is arranged on the base, and the vibration isolator is arranged between the machine table and the base; the vibration isolator comprises a cavity, a piston cover, a partition plate and an electromagnetic throttle valve; the inner cavity of the cavity is divided into an upper air chamber and a lower air chamber by the partition board; the piston cover is arranged at the top of the cavity, and the electromagnetic throttle valve is respectively connected with the upper air chamber and the lower air chamber; a sensor is arranged on the machine platform, and the fuzzy controller is respectively connected with the sensor and the electromagnetic throttle valve; the sensor is used for detecting the vibration of the machine table and transmitting a signal to the fuzzy controller, and the fuzzy controller controls the electromagnetic throttle valve to adjust the air quantity in the upper air chamber and the lower air chamber according to the detected signal; the invention realizes the automation of vibration isolation operation, improves the precision of test operation on the machine table and can isolate the influence of high-frequency vibration of the floor on the instrument platform.

Description

Double-air-chamber air cushion vibration isolation semi-active control device and fuzzy control method thereof
Technical Field
The invention relates to the technical field of vibration reduction control, in particular to a double-air-chamber air cushion vibration isolation semi-active control device and a fuzzy control method thereof.
Background
With the continuous development of science and technology, the high-tech industry is gradually advancing to the nanometer level, the requirements of many precision instruments on the environment are higher and higher, and the vibration specifications of instruments and equipment are stricter, so that although the vibration is only slight, the detection precision of the instruments can be affected, and even the instruments and equipment cannot normally operate.
In terms of the vibration isolation system, there are classified into a passive system, an active system and a semi-active system. The passive system has a good vibration isolation effect on high-frequency vibration, is low in price, is suitable for most machines, and can amplify the natural frequency of the system. The actuators and sensors used in the active vibration isolation system are high in cost, and the control technology is difficult, so that the active vibration isolation system is very expensive at present. The semi-active control system is developed in recent years, and has the advantages of low economic cost of a passive system and high reaction speed of an active system, and currently, as for the semi-active damper, the semi-active damper has dampers with different control modes such as a magneto-rheological liquid type damper, a variable oil pressure cylinder type damper and the like.
The fuzzy control is an optimization process taking a thinking mode similar to the if-then ambiguity of the human experience rule as a decision, and has the greatest advantage that an accurate mathematical model is not needed theoretically, and only the relation between input signals and output signals needs to be known, and then the experience is converted into a simulation rule base to carry out inference, so that the control is realized. Therefore, if a semi-active damper technology based on a fuzzy control mode can be developed according to vibration isolation requirements and integrated into a semi-active vibration isolation system, not only the vibration isolation effect can be improved, but also the cost of the system can be greatly reduced.
Disclosure of Invention
The invention aims to solve the technical problem that aiming at the defects in the prior art, the invention provides the double-air-chamber air cushion vibration isolation semi-active control device and the fuzzy control method thereof, which realize the automation of vibration isolation operation, improve the precision of test operation on a machine table and can isolate the influence of high-frequency vibration of a floor on an instrument platform.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a double-air-chamber air cushion vibration isolation semi-active control device comprises a machine table, a base, a vibration isolator and a fuzzy controller; the machine table is arranged on the base, and the vibration isolator is arranged between the machine table and the base;
the vibration isolator comprises a cavity, a piston cover, a partition plate and an electromagnetic throttle valve; the baffle plate is arranged in the cavity and divides the inner cavity of the cavity into an upper air chamber and a lower air chamber; the piston cover is arranged at the top of the cavity, and the electromagnetic throttle valve is respectively connected with the upper air chamber and the lower air chamber;
a sensor is arranged on the machine table, and the fuzzy controller is respectively connected with the sensor and the electromagnetic throttle valve; the sensor is used for detecting the vibration of the machine table and transmitting a signal to the fuzzy controller, and the fuzzy controller controls the electromagnetic throttle valve to adjust the air quantity in the upper air chamber and the lower air chamber according to the detected signal.
According to the technical scheme, the machine table is provided with a panel and a bracket; guide rails are arranged on two sides of the panel; the support sets up on the guide rail, arranges in the top of panel, the support slides back and forth on the board along the guide rail.
According to the technical scheme, the upper air chamber is internally provided with the elastic film, and the elastic film 9 is a rubber film.
According to the technical scheme, the support is a portal frame, and the fuzzy controller is arranged on the support.
According to the technical scheme, the sensor is an acceleration sensor; a low-pass filter and a proportional integrator are sequentially connected between the input end of the fuzzy controller and the acceleration sensor; the output end of the fuzzy controller is connected with the electromagnetic throttle valve.
According to the technical scheme, the fuzzy controller controls input of different voltage signals to change the valve port area of the electromagnetic throttle valve, and the voltage signal range is 0-5V.
A vibration reduction fuzzy control method adopting the double-air-chamber air cushion vibration isolation semi-active control device comprises the following steps:
1) setting the controller as a fuzzy controller with two inputs and one output, and determining a fuzzy control rule, a membership function and a de-fuzzy rule of the fuzzy controller;
2) the fuzzy controller detects a vibration speed signal and a vibration acceleration signal of the machine platform through a sensor, and the vibration speed signal and the vibration acceleration signal are respectively used as a speed input variable quantity and an acceleration input variable quantity of the fuzzy controller;
3) converting the speed input variable quantity and the acceleration input variable quantity into a speed fuzzy variable quantity and an acceleration fuzzy variable quantity respectively through corresponding membership functions, and deriving a voltage fuzzy output quantity through the two fuzzy variable quantities according to a fuzzy control rule;
4) determining a value from the voltage fuzzy output quantity according to a fuzzy solving rule, namely the voltage value output to the electromagnetic throttle valve by the fuzzy controller;
5) the electromagnetic throttle valve changes the opening size of the electromagnetic throttle valve according to the voltage value so as to control the gas flow in the upper air chamber and the lower air chamber, the damping of the vibration isolator is changed due to the change of the gas flow, the vibration of the machine table is reduced, and the high-frequency vibration of the floor is isolated.
According to the technical scheme, in the step 1), the two inputs are respectively the vibration speed variation and the vibration acceleration variation detected by the sensor, and the output is the voltage output to the electromagnetic throttle valve by the fuzzy controller and used for controlling the size of the opening of the electromagnetic throttle valve.
According to the technical scheme, the step 1) further comprises the following steps: the two input variable quantities and one output variable quantity are respectively set as a speed variable quantity, an acceleration variable quantity and a voltage variable quantity, membership fuzzy subsets and membership functions of the speed variable quantity, the acceleration variable quantity and the voltage variable quantity are respectively set as { very small, medium, large, very large }, { very small, medium, large, very large } and { very small, medium, large, very large }, according to physical meanings of all parameters, and the membership functions are all triangular membership functions.
According to the above technical solution, in step 1) and step 4), the fuzzy control rule is that the expression for defuzzifying the output fuzzy result according to the center average value method is as follows:
Figure BDA0002204683570000031
wherein y is the output quantity of the fuzzy controller; bi represents the ith fuzzy output subset; h (B)i') is the membership value of the ith control rule; p is a radical ofiAnd the corresponding value of the central point of the membership function of the ith control rule is obtained.
According to the technical scheme, the fuzzy control rule in the steps 1) and 3) is as follows:
when the acceleration fuzzy variable is very small, and the speed fuzzy variable is very small or small, the voltage fuzzy output quantity is VS; when the acceleration fuzzy variable is small, and the speed fuzzy variable is medium, large or very large, the voltage fuzzy output quantity is M;
when the acceleration fuzzy variable is small and the speed fuzzy variable is very small or small, the voltage fuzzy output quantity is S; when the acceleration fuzzy variable is small and the speed fuzzy variable is medium, the voltage fuzzy output quantity is M; when the acceleration fuzzy variable is small and the speed fuzzy variable is large or very large, the voltage fuzzy output quantity is B;
when the acceleration fuzzy variable is medium, and the speed fuzzy variable is small, small or medium, the voltage fuzzy output quantity is M; when the acceleration fuzzy variable is medium and the speed fuzzy variable is large or very large, the voltage fuzzy output quantity is B;
when the acceleration fuzzy variable is large and the speed fuzzy variable is small, the voltage fuzzy output quantity is M; when the acceleration fuzzy variable is large, the speed fuzzy variable is small or medium, the voltage fuzzy output quantity is B; when the acceleration fuzzy variable is large and the speed fuzzy variable is large or very large, the voltage fuzzy output quantity is VB; when the acceleration fuzzy variable is large, the voltage fuzzy output quantity is VB;
VS, S, M, B, VB correspond to the voltage fuzzy output quanta set { very small, medium, large, very large }, respectively.
The invention has the following beneficial effects:
compared with the prior art, the invention controls the gas flow between the double air chambers by changing the opening size of the electromagnetic throttle valve, so as to adjust the damping coefficient of the vibration isolator, reduce the machine vibration caused by the operation of equipment on the machine, isolate the influence of high-frequency vibration of a floor on an instrument platform, and further improve the precision of the test operation on the machine platform; meanwhile, by utilizing a semi-active control technology, the structure can be dynamically controlled according to the reaction of the structure and the external interference by combining the advantages of a passive control structure and an active control structure, the control facility can be operated only by small energy, the required control facility is economical and reliable, the requirement on maintenance is low, the automation of vibration isolation operation can be realized, and corresponding accurate vibration isolation behaviors can be instantly performed according to the vibration magnitude of the machine, so that the precision of on-machine test operation is further improved.
Drawings
FIG. 1 is an elevational view of a dual air chamber air cushion vibration isolation semi-active control device in an embodiment of the present invention;
fig. 2 is a schematic structural view of the vibration isolator in an embodiment of the invention;
FIG. 3 is a schematic diagram of a damping control method of a dual-air-chamber air cushion vibration isolation semi-active control device in an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an electromagnetic throttle valve according to an embodiment of the present invention;
FIG. 5 is an architecture diagram of a fuzzy controller according to an embodiment of the present invention;
FIG. 6(a) is a membership function of an acceleration signal according to an embodiment of the present invention;
FIG. 6(b) is a membership function of a velocity signal in an embodiment of the present invention;
FIG. 6(c) is a membership function of the voltage output signal according to an embodiment of the present invention;
in the figure: 1-machine table, 2-panel, 3-fuzzy controller, 4-portal frame, 5-guide rail, 6-base, 7-vibration isolator, 8-electromagnetic throttle valve, 9-elastic film, 10-piston cover, 11-clapboard, 12-acceleration sensor, 13-movable iron core, 14-spring; 15-valve cover, 16-pressure relief hole, 17-main valve core, 18-valve body, 19-signal feedback device and 20-solenoid coil.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Referring to fig. 1 to 5, the double-air-chamber air cushion vibration isolation semi-active control device in one embodiment of the present invention includes a machine table 1, a base 6, a vibration isolator 7 and a fuzzy controller 3; the machine table 1 is arranged on the base 6, and the vibration isolator 7 is arranged between the machine table 1 and the base 6;
the vibration isolator 7 comprises a cavity, an elastic film 9, a piston cover 10, a partition plate 11 and an electromagnetic throttle valve 8; the partition plate 11 is arranged in the cavity and divides the inner cavity of the cavity into an upper air chamber and a lower air chamber; the elastic film 9 is arranged in the upper air chamber, the piston cover 10 is arranged at the top of the cavity, and the electromagnetic throttle valve 8 is respectively connected with the upper air chamber and the lower air chamber;
a sensor is arranged on the machine table, and the fuzzy controller 3 is respectively connected with the sensor and the electromagnetic throttle valve 8; the sensor is used for detecting the vibration of the machine table and transmitting signals to the fuzzy controller 3, and the fuzzy controller 3 controls the electromagnetic throttle valve 8 to adjust the air quantity in the upper air chamber and the lower air chamber according to the detected signals.
Further, the elastic film 9 is a rubber film; the action mode is that an air source is input into the vibration isolator to enable the rubber film to float, the piston cover above the rubber film is supported, and the vibration isolation effect can be achieved by placing the instrument equipment on the piston cover. The vibration isolator utilizes the partition board in the figure to divide the inner cavity into an upper air chamber and a lower air chamber, and a throttle valve is arranged between the two air chambers and used for controlling the air flow of the two air chambers so as to change the damping.
Further, a panel 2 and a bracket are arranged on the machine table 1; guide rails 5 are arranged on two sides of the panel 2; the support sets up on the guide rail, arranges in the top of panel, the support slides back and forth on board 1 along guide rail 5.
Further, the support is a portal frame 4, and the fuzzy controller 3 is arranged on the support; the panel is arranged on the machine table, the double-air-chamber vibration isolators are positioned below the machine table and are totally arranged in 6 numbers, and the gantry moves on the guide rail and is used for moving precise instruments on the machine table and performing fixed-point operation.
Further, the sensor is an acceleration sensor 12; a low-pass filter and a proportional integrator are sequentially connected between the input end of the fuzzy controller 3 and the acceleration sensor 12; the output of the fuzzy controller 3 is connected with the electromagnetic throttle valve 8.
Further, the fuzzy controller controls input of different voltage signals to change the valve port area of the electromagnetic throttle valve 8, and the voltage signal range is 0-5V.
A vibration damping control method adopting the double-air-chamber air cushion vibration isolation semi-active control device comprises the following steps:
1) setting the controller as a fuzzy controller with two inputs and one output, and determining a fuzzy control rule, a membership function and a de-fuzzy rule of the fuzzy controller;
2) the fuzzy controller 3 detects a vibration speed signal and a vibration acceleration signal of the machine platform through a sensor, and respectively serves as a speed input variable quantity and an acceleration input variable quantity of the fuzzy controller;
3) converting the speed input variable quantity and the acceleration input variable quantity into a speed fuzzy variable quantity and an acceleration fuzzy variable quantity respectively through corresponding membership functions, and deriving a voltage fuzzy output quantity through the two fuzzy variable quantities according to a fuzzy control rule;
4) determining a value with the most representative function from the voltage fuzzy output quantity according to the fuzzy solving rule and the corresponding membership function, namely the voltage value output to the electromagnetic throttle valve 8 by the fuzzy controller;
5) the electromagnetic throttle valve 8 changes the opening size of the electromagnetic throttle valve according to the voltage value to control the gas flow in the upper air chamber and the lower air chamber, the change of the gas flow changes the damping of the vibration isolator 7, reduces the vibration of the machine table 1 and isolates the high-frequency vibration of the floor.
Further, in the step 1), the two inputs are respectively a vibration speed variation and a vibration acceleration variation detected by the sensor, and the output is a voltage output to the electromagnetic throttle valve by the fuzzy controller and used for controlling the size of the opening of the electromagnetic throttle valve.
Further, the step 1) further comprises the following steps: two input variable quantities and one output variable quantity of the fuzzy controller are respectively set as a speed variable quantity, an acceleration variable quantity and a voltage variable quantity, membership fuzzy subsets and membership functions of the speed variable quantity, the acceleration variable quantity and the voltage variable quantity are respectively set as { very small, medium, large and very large }, { small, medium, large and very large } and { very small, medium, large and very large } according to physical meanings of all parameters, and the membership functions are all triangular membership functions.
Further, the triangular membership function of the acceleration variation is: a fuzzy system is established by 5 levels in the range of [0.5,11] to represent { small, medium, large }, and the simulation result is shown in FIG. 6 (a).
Further, the triangular membership function of the velocity variation is: a fuzzy system is established by 5 levels in the range of [0,3.2] to represent { small, medium, large }, and the simulation result is shown in FIG. 6 (b).
Further, the triangular membership function of the voltage variation is: a fuzzy system is established with 5 levels in the range of [1.8,3.0] to represent { small, medium, large }, and the simulation results are shown in FIG. 6 (c).
Further, in step 1) and step 4), the fuzzy control rule is that an expression for defuzzifying the output fuzzy result according to the center average value method is as follows:
Figure BDA0002204683570000061
wherein y is the output quantity of the fuzzy controller; bi represents the ith fuzzy output subset; h (B)i') is the membership value of the ith control rule; p is a radical ofiCorresponding to the centre point of the membership function of the ith control ruleThe value is obtained.
Further, the fuzzy control rules in the steps 1) and 3) are as follows:
when the acceleration fuzzy variable is very small and the speed fuzzy variable is very small or small, the fuzzy output quantity is VS; when the acceleration fuzzy variable is small, and the speed fuzzy variable is medium, large or very large, the fuzzy output quantity is M;
when the acceleration fuzzy variable is small and the speed fuzzy variable is very small or small, the fuzzy output quantity is S; when the acceleration fuzzy variable is small and the speed fuzzy variable is medium, the fuzzy output quantity is M; when the acceleration fuzzy variable is small and the speed fuzzy variable is large or very large, the fuzzy output quantity is B;
when the acceleration fuzzy variable is medium, and the speed fuzzy variable is small, small or medium, the fuzzy output quantity is M; when the acceleration fuzzy variable is medium and the speed fuzzy variable is large or very large, the fuzzy output quantity is B;
when the acceleration fuzzy variable is large and the speed fuzzy variable is very small, the fuzzy output quantity is M; when the acceleration fuzzy variable is large, the speed fuzzy variable is small or medium, the fuzzy output quantity is B; when the acceleration fuzzy variable is large and the speed fuzzy variable is large or very large, the fuzzy output quantity is VB; when the acceleration fuzzy variable is very large and the speed fuzzy variable is very small, medium, large or very large, the fuzzy output quantity is VB;
VS, S, M, B, VB correspond to fuzzy output quanta set { small, medium, large }, fuzzy control rules are shown in Table 1,
Figure BDA0002204683570000062
TABLE 1
In one embodiment of the invention, the working principle of the invention is as follows:
as shown in fig. 3, the present invention is a semi-active control method and device architecture diagram for double air chamber air cushion vibration isolation based on fuzzy control, the control system mainly comprises an acceleration sensor, a proportional integrator, a low pass filter, a fuzzy controller, an electromagnetic valve, a double air chamber air cushion vibration isolator, a gantry, a platform, and a guide rail. The vibration signal of the machine is converted into acceleration and speed signals through a proportional integrator, then the noise of the signals is filtered by a low-pass filter circuit, the signals are input into a fuzzy controller, and finally a proper voltage is output through a fuzzy control arithmetic unit to change the opening size of an electromagnetic valve so as to control the air flow between the double air chambers, so that the double air chamber air cushion vibration isolator achieves the effect of changing the damping. The double-air-chamber air cushion vibration isolator and the electromagnetic valve are used, the opening size of the valve is changed by combining a fuzzy control rule to control the air flow between the double air chambers, and the aim of adjusting the damping coefficient is achieved, so that the vibration of the machine table is reduced.
As shown in fig. 1, which is a schematic structural diagram of a vibration damping device of a precision instrument machine, the vibration damping device is composed of a machine 1, a panel 2, a fuzzy controller 3, a gantry 4, a guide rail 5, a base 6 and a vibration isolator 7. The panel is arranged on the machine table, the double-air-chamber vibration isolators are positioned below the machine table and are totally arranged in 6 numbers, and the gantry moves on the guide rail and is used for moving precise instruments on the machine table and performing fixed-point operation.
As shown in fig. 2, the diagram is a schematic diagram of the double-air-chamber air cushion vibration isolator, and the vibration isolator is composed of an electromagnetic valve 8, a rubber film 9, a piston cover 10 and a partition plate 11. The action mode is that an air source is input into the vibration isolator to enable the rubber film to float, the piston cover above the rubber film is supported, and the vibration isolation effect can be achieved by placing the instrument equipment on the piston cover. The vibration isolator utilizes the partition board in the figure to divide the inner cavity into an upper air chamber and a lower air chamber, and a throttle valve is arranged between the two air chambers and used for controlling the air flow of the two air chambers so as to change the damping.
1) Full closing of the electromagnetic throttle valve: the vibration isolator belongs to a single-air-chamber vibration isolator, when vibration is generated above the piston cover, the upper air chamber acts as if the spring deformed by pressure suddenly releases the reaction after external force, and the transient response on the piston cover can be eliminated in a longer time, so that the damping of the vibration isolator is minimum at the moment; 2) opening an electromagnetic throttle valve: the gas of the double air chambers is communicated, when vibration is generated, transient response still occurs on the piston cover, but the process time is shorter than that when the electromagnetic throttle valve is fully closed, because when vibration is generated, part of the gas in the upper air chamber flows to the lower air chamber, so that the vibration is alleviated, and the damping of the vibration isolator is larger than that when the electromagnetic throttle valve is fully closed. According to the description of the two cases, when the opening of the electromagnetic throttle valve is larger within a specific range, the damping of the vibration isolator is larger, but if the opening is beyond the specific range, the double-air-chamber air cushion vibration isolator loses the function of the double air chambers and becomes a single-air-chamber vibration isolator like the first case. The above description is illustrative of the effect of a source of turbulence generated from above the isolator; the third situation is the influence when the disturbance source is transmitted from the floor to the upper, 3) the influence of the size of the opening of the electromagnetic throttle valve on the vibration of the isolation floor, in the high-frequency part, because the change of the vibration is fast, the gas in the vibration isolator can not react timely, and can not flow in the double air chambers fast, so when the opening of the valve is changed, the vibration isolation of the high frequency does not have obvious difference, the principle of the low-frequency part is similar to that of the first situation, because the change of the low-frequency vibration is slow, when the upper air chamber is disturbed, the internal pressure can change, so that the gas is about to flow in the lower air chamber, at the moment, if the opening of the electromagnetic throttle valve is small, the low-frequency vibration can be easily transmitted to the equipment on the piston cover because the pressure of the upper air chamber can. When the opening of the electromagnetic throttle valve is large, the low-frequency vibration is less likely to be transmitted to the device on the piston cap because the pressure of the upper air chamber is relieved.
As shown in fig. 4, the structure of the solenoid valve is schematically illustrated, and the solenoid valve is composed of a solenoid 20, a plunger 13, a spring 14, a bonnet 15, a pressure relief hole 16, a main valve element 17, a valve body 18, and a signal feedback device 19. The area of the valve port is changed by different input voltage signals, and the range of the voltage signals is from 0V to 5V. Since the solenoid valve requires a large current for operation, a voltage signal output from the controller needs to be amplified by a power amplifier circuit and then input to the solenoid valve.
As shown in fig. 5, for the fuzzy controller architecture, the control method adopts a two-channel input/one-channel output fuzzy control method, where the input signals are vibration acceleration and velocity, respectively. After the control algorithm is determined, the fuzzy control rule is realized in C language. The fuzzy controller comprises the following design steps:
1) defining input and output variables: the input signal is the vibration acceleration and speed signal of the system, and the output is the voltage for controlling the opening size of the electromagnetic throttle valve.
2) Fuzzification: the precise quantity of the input is converted into a certain fuzzy variable expressed by a membership function, and the detected input quantity is used as a condition in a fuzzy control rule, so that the fuzzy control rule is used for reasoning.
3) And (3) decision logic reasoning: the decision logic reasoning is to calculate and reason the input physical quantity according to the fuzzy control rule made in advance and by using the fuzzy mathematic theory to obtain a qualitative quantity expressed by language, and the result has only one determined output range, namely the fuzzy output quantity, and the table 1 is the control rule table of the control system.
4) Defuzzification: since the fuzzy output is only a range, a value which is most representative of the function must be determined from the range value, and the fuzzy output is used as the real output to execute the control step. The method for defuzzification has a plurality of methods, such as a gravity center method, a center average value method, a maximum value average method and the like, and the method for defuzzification by using the center average value method is as shown in an expression:
Figure BDA0002204683570000081
in the formula: y-represents the output of the fuzzy controller;
h(B’i) -membership value of the ith control rule;
pi-membership function centre point correspondence value for ith control rule.
Fig. 6 shows the membership functions of the different control signals, wherein fig. 6(a) is the membership function of the acceleration signal, fig. 6(b) is the membership function of the velocity signal, and fig. 6(c) is the membership function of the output voltage signal. The precise quantity of the input is converted into a certain fuzzy variable expressed by a membership function, and the detected input quantity is used as a condition in a fuzzy control rule, so that the fuzzy control rule is used for reasoning.
In summary, a semi-active control device for vibration isolation of a dual-air-chamber air cushion and a fuzzy control method thereof mainly utilize semi-active control based on fuzzy rules to solve the vibration problem of a precision instrument machine. The control system mainly comprises an acceleration sensor, a proportional integrator, a low-pass filter, a fuzzy controller, an electromagnetic valve, a double-air-chamber air cushion vibration isolator, a gantry, a platform and a guide rail. The vibration signal of the machine is converted into acceleration and speed signals through the proportional integrator, then the noise of the signals is filtered through the low-pass filter circuit, then the signals are input into the fuzzy controller, and finally the appropriate voltage is output through the fuzzy control arithmetic unit to change the opening size of the electromagnetic valve so as to control the air flow between the double air chambers, so that the damping of the air cushion vibration isolator with the double air chambers is changed, and the effects of reducing the vibration of the machine and isolating the high-frequency vibration of the floor are achieved.
The above is only a preferred embodiment of the present invention, and certainly, the scope of the present invention should not be limited thereby, and therefore, the present invention is not limited by the scope of the claims.

Claims (10)

1. A double-air-chamber air cushion vibration isolation semi-active control device is characterized by comprising a machine table (1), a base (6), a vibration isolator (7) and a fuzzy controller (3); the machine table (1) is arranged on the base (6), and the vibration isolator (7) is arranged between the machine table (1) and the base (6);
the vibration isolator (7) comprises a cavity, a piston cover (10), a partition plate (11) and an electromagnetic throttle valve (8); the partition plate (11) is arranged in the cavity and divides the inner cavity of the cavity into an upper air chamber and a lower air chamber; the piston cover (10) is arranged at the top of the cavity, and the electromagnetic throttle valve (8) is respectively connected with the upper air chamber and the lower air chamber;
a sensor is arranged on the machine table, and the fuzzy controller (3) is respectively connected with the sensor and the electromagnetic throttle valve (8); the sensor is used for detecting the vibration of the machine table and transmitting signals to the fuzzy controller (3), and the fuzzy controller (3) controls the electromagnetic throttle valve (8) to adjust the air quantity in the upper air chamber and the lower air chamber according to the detected signals.
2. The double-air-chamber air cushion vibration isolation semi-active control device is characterized in that a panel (2) and a bracket are arranged on the machine table (1); guide rails (5) are arranged on two sides of the panel (2); the support sets up on the guide rail, arranges in the top of panel, the support slides back and forth on board (1) along guide rail (5).
3. The dual air chamber air cushion vibration isolation semi-active control device of claim 2, wherein an elastic membrane is disposed within the upper air chamber.
4. The double air chamber air cushion vibration isolation semi-active control device according to claim 1, wherein said sensor is an acceleration sensor (12); a low-pass filter and a proportional integrator are sequentially connected between the input end of the fuzzy controller (3) and the acceleration sensor (12); the output end of the fuzzy controller (3) is connected with the electromagnetic throttle valve (8).
5. The semi-active control device for vibration isolation of air cushion with double air chambers as claimed in claim 1, wherein the support is a gantry (4), the fuzzy controller (3) is arranged on the support, the fuzzy controller controls input of different voltage signals to change the valve port area of the electromagnetic throttle valve (8), and the voltage signal range is 0-5V.
6. A vibration damping fuzzy control method adopting the double-air-chamber air cushion vibration isolation semi-active control device as claimed in claim 1, which is characterized by comprising the following steps:
1) setting the controller as a fuzzy controller with two inputs and one output, and determining a fuzzy control rule, a membership function and a de-fuzzy rule of the fuzzy controller;
2) the fuzzy controller (3) detects a vibration speed signal and a vibration acceleration signal of the machine platform through a sensor, and the vibration speed signal and the vibration acceleration signal are respectively used as a speed input variable quantity and an acceleration input variable quantity of the fuzzy controller;
3) converting the speed input variable quantity and the acceleration input variable quantity into a speed fuzzy variable quantity and an acceleration fuzzy variable quantity respectively through corresponding membership functions, and deriving a voltage fuzzy output quantity through the two fuzzy variable quantities according to a fuzzy control rule;
4) determining a value from the voltage fuzzy output quantity according to a fuzzy solving rule, namely a voltage value output to the electromagnetic throttle valve (8) by the fuzzy controller;
5) the electromagnetic throttle valve (8) changes the opening size of the electromagnetic throttle valve according to the voltage value so as to control the gas flow in the upper air chamber and the lower air chamber, the damping of the vibration isolator (7) is changed due to the change of the gas flow, the vibration of the machine table (1) is reduced, and the high-frequency vibration of the floor is isolated.
7. The vibration damping fuzzy control method according to claim 6, wherein in step 1), two inputs are respectively the vibration speed variation and the vibration acceleration variation of the machine detected by the sensor, and one output is the voltage output by the fuzzy controller to the electromagnetic throttle valve for controlling the size of the opening of the electromagnetic throttle valve.
8. The vibration damping fuzzy control method according to claim 7, characterized in that said step 1) further comprises the steps of: the two input variable quantities and one output variable quantity are respectively set as a speed variable quantity, an acceleration variable quantity and a voltage variable quantity, membership fuzzy subsets and membership functions of the speed variable quantity, the acceleration variable quantity and the voltage variable quantity are respectively set as { very small, medium, large, very large }, { very small, medium, large, very large } and { very small, medium, large, very large }, according to physical meanings of all parameters, and the membership functions are all triangular membership functions.
9. The vibration damping fuzzy control method according to claim 8, characterized in that in step 1) and step 4), the fuzzy control rule is that the expression for defuzzifying the output fuzzy result according to the center average value method is as follows:
Figure FDA0002204683560000021
wherein y is the output quantity of the fuzzy controller; bi represents the ith fuzzy output subset; h (B'i) Is the membership value of the ith control rule; p is a radical ofiAnd the corresponding value of the central point of the membership function of the ith control rule is obtained.
10. The vibration damping fuzzy control method according to claim 8, characterized in that the fuzzy control rules in steps 1) and 3) are:
when the acceleration fuzzy variable is very small, and the speed fuzzy variable is very small or small, the voltage fuzzy output quantity is VS; when the acceleration fuzzy variable is small, and the speed fuzzy variable is medium, large or very large, the voltage fuzzy output quantity is M;
when the acceleration fuzzy variable is small and the speed fuzzy variable is very small or small, the voltage fuzzy output quantity is S; when the acceleration fuzzy variable is small and the speed fuzzy variable is medium, the voltage fuzzy output quantity is M; when the acceleration fuzzy variable is small and the speed fuzzy variable is large or very large, the voltage fuzzy output quantity is B;
when the acceleration fuzzy variable is medium, and the speed fuzzy variable is small, small or medium, the voltage fuzzy output quantity is M; when the acceleration fuzzy variable is medium and the speed fuzzy variable is large or very large, the voltage fuzzy output quantity is B;
when the acceleration fuzzy variable is large and the speed fuzzy variable is small, the voltage fuzzy output quantity is M; when the acceleration fuzzy variable is large, the speed fuzzy variable is small or medium, the voltage fuzzy output quantity is B; when the acceleration fuzzy variable is large and the speed fuzzy variable is large or very large, the voltage fuzzy output quantity is VB; when the acceleration fuzzy variable is large, the voltage fuzzy output quantity is VB;
VS, S, M, B, VB correspond to the voltage fuzzy output quanta set { very small, medium, large, very large }, respectively.
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201116605Y (en) * 2007-11-15 2008-09-17 罗福军 Remote signal feedback solenoid valve

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Publication number Priority date Publication date Assignee Title
CN201116605Y (en) * 2007-11-15 2008-09-17 罗福军 Remote signal feedback solenoid valve

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