CN110632761A - Partially coherent beam splitter, working method and optical device - Google Patents

Partially coherent beam splitter, working method and optical device Download PDF

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CN110632761A
CN110632761A CN201910847358.0A CN201910847358A CN110632761A CN 110632761 A CN110632761 A CN 110632761A CN 201910847358 A CN201910847358 A CN 201910847358A CN 110632761 A CN110632761 A CN 110632761A
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CN110632761B (en
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刘欣
马普娟
刘永雷
高雅茹
梁春豪
赵曰峰
蔡阳健
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Shandong Normal University
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Abstract

本公开提供了一种部分相干光束分束器、工作方法及光学装置,包括第一透镜、第二透镜和相位板,所述第一透镜和第二透镜构成光学4f系统,所述相位板设于第一透镜和第二透镜的中间位置,通过调节相位板的参数实现对分束子光束的数量、分布形式和子光束间距的控制;本公开能够对任意入射部分相干光束进行灵活分束,采用的设备简单,成本低,易搭建,产生的分束光束质量高,可适用于功率较大的入射光,在工业、科研和国防军事等领域有着广阔的应用前景。

The present disclosure provides a partially coherent beam splitter, a working method, and an optical device, including a first lens, a second lens, and a phase plate, the first lens and the second lens constitute an optical 4f system, and the phase plate is set In the middle position between the first lens and the second lens, the number, distribution form and sub-beam spacing of the split sub-beams can be controlled by adjusting the parameters of the phase plate; this disclosure can flexibly split any incident partial coherent beams, using the The equipment is simple, the cost is low, and it is easy to build. The quality of the split beam produced is high, and it can be applied to the incident light with high power. It has broad application prospects in the fields of industry, scientific research, national defense and military affairs.

Description

一种部分相干光束分束器、工作方法及光学装置Partially coherent beam splitter, working method and optical device

技术领域technical field

本公开涉及光学装置技术领域,特别涉及一种部分相干光束分束器、工作方法及光学装置。The present disclosure relates to the technical field of optical devices, in particular to a partially coherent beam splitter, a working method and an optical device.

背景技术Background technique

本部分的陈述仅仅是提供了与本公开相关的背景技术,并不必然构成现有技术。The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.

光束分束器(Beam Splitter,BS)是实验室最基础器件,最常见的BS是由两个三角形棱镜经聚酯,环氧树脂或聚氨酯类粘合剂胶合在一起的立方晶体,可以将一束光分成两束光。此类光束分束器一般分为两种:一种是偏振相关型光束分束器(PBS),这种分束器将入射光束分为透射光束和反射光束,且出射的两者光束偏振方向和传输方向都相互垂直,最为常见的PBS有尼科尔棱镜、格兰棱镜、渥拉斯顿棱镜等。另外一种是偏振无关型光束分束器,其仍由两个三角形棱镜粘合而成,在接触面镀有金属材料薄膜,通过控制膜厚度使得以45°入射并且不被涂层吸收的光发生部分透射和部分反射,可将入射光束分为两束传输方向相互垂直的光束。The beam splitter (Beam Splitter, BS) is the most basic device in the laboratory. The most common BS is a cubic crystal that is glued together by two triangular prisms through polyester, epoxy resin or polyurethane adhesives. The beam of light is split into two beams. This type of beam splitter is generally divided into two types: one is the polarization-dependent beam splitter (PBS), which divides the incident beam into a transmitted beam and a reflected beam, and the polarization directions of the outgoing beams And the transmission direction are perpendicular to each other, the most common PBS are Nicol prism, Glan prism, Wollaston prism and so on. The other is a polarization-independent beam splitter, which is still bonded by two triangular prisms, and the contact surface is coated with a thin film of metal material. By controlling the thickness of the film, the light incident at 45° and not absorbed by the coating Partial transmission and partial reflection occur, and the incident beam can be split into two beams whose transmission directions are perpendicular to each other.

在自然界中所有真实存在的光束,其振幅必然存在一定的涨落,且光的频谱具有一定的宽度,这将导致理想化的完全相干光和完全非相干光都不真实存在,因此目前所接触的所有光束严格来说都称之为部分相干光束,其相干性介于完全相干和完全非相干之间。研究结果表明:部分相干光束相比完全相干光束在许多实际应用中更具有独特的优势,比如部分相干光束在复杂环境传输过程中具有抗扰动效果;相干性的降低将会导致光束更均匀,这在材料热处理等方面有着重要的应用。此外,通过对部分相干光束光源相干度调控,可实现对光束的传输性质调节,这在光通讯、微粒捕获、成像等方面有着重要的应用。All the real light beams in nature must have certain fluctuations in their amplitude, and the light spectrum has a certain width, which will lead to the fact that idealized completely coherent light and completely incoherent light do not really exist, so the current contact Strictly speaking, all beams are called partially coherent beams, whose coherence is between fully coherent and completely incoherent. The research results show that: compared with fully coherent beams, partially coherent beams have unique advantages in many practical applications. For example, partially coherent beams have anti-disturbance effects during transmission in complex environments; the reduction of coherence will lead to more uniform beams. It has important applications in the heat treatment of materials. In addition, by adjusting the coherence of the partially coherent beam source, the transmission properties of the beam can be adjusted, which has important applications in optical communication, particle capture, imaging, etc.

本公开发明人在研究中发现,目前现有的BS普遍存在以下问题:(1)对入射光束只能分为两束,无法调控分束数量和分布形式;(2)随着激光束在各个领域的应用,阵列(多个)光束在共焦显微成像、多粒子捕获、光通讯多路技术、实时三维成像、人体血液流速测量等方面有着重要的应用,然而,目前的分束器分束后的两束光束传输方向只能正交,致使光路结构不紧凑,无法满足分束光束的数量、分布形式和间隔的控制需求。The inventors of the present disclosure found in the research that the following problems generally exist in the existing BS: (1) the incident beam can only be divided into two beams, and the number and distribution of the beams cannot be controlled; (2) as the laser beam In the field of application, array (multiple) beams have important applications in confocal microscopic imaging, multi-particle capture, optical communication multiplex technology, real-time three-dimensional imaging, human blood flow velocity measurement, etc. However, the current beam splitter after beam splitting The transmission directions of the two beams can only be orthogonal, resulting in an uncompact optical path structure and unable to meet the control requirements for the number, distribution and spacing of the split beams.

发明内容Contents of the invention

为了解决现有技术的不足,本公开提供了一种部分相干光束分束器、工作方法及光学装置,其结构简单,可对任意部分相干光束进行分束,并且分束的数量、分布形式和间距皆可灵活调控。In order to solve the deficiencies of the prior art, the present disclosure provides a partially coherent beam splitter, a working method and an optical device, which have a simple structure and can split any partially coherent beam, and the number, distribution and The spacing can be flexibly adjusted.

为了实现上述目的,本公开采用如下技术方案:In order to achieve the above purpose, the present disclosure adopts the following technical solutions:

第一方面,本公开提供了一种部分相干光束分束器;In a first aspect, the present disclosure provides a partially coherent beam splitter;

一种部分相干光束分束器,包括第一透镜、第二透镜和相位板,所述第一透镜和第二透镜构成光学4f系统,所述相位板设于第一透镜和第二透镜的中间位置,通过调节相位板的参数实现对分束子光束的数量、分布形式和子光束间距的控制。A partially coherent beam splitter comprising a first lens, a second lens and a phase plate, the first lens and the second lens constitute an optical 4f system, and the phase plate is arranged in the middle of the first lens and the second lens By adjusting the parameters of the phase plate, the number, distribution and spacing of sub-beams can be controlled.

作为可能的一些实现方式,所述第一透镜和第二透镜的焦距均为f,所述第一透镜的前焦面处为入射光源面,所述第二透镜的后焦面为接收面。As some possible implementation manners, the focal lengths of the first lens and the second lens are both f, the front focal plane of the first lens is an incident light source plane, and the rear focal plane of the second lens is a receiving plane.

作为进一步的限定,入射光源面处任意部分相干光束的交叉密度函数为W(r1,r2),此光束经过第一透镜、相位板和第二透镜后,在第二透镜的接收面处的交叉谱密度函数为:As a further limitation, the cross density function of any partially coherent beam at the incident light source surface is W(r 1 , r 2 ), after the beam passes through the first lens, the phase plate and the second lens, it is The cross spectral density function of is:

W(ρ12)=∫W(r1,r2)h*(r11)h(r22)d2r1d2r2 W(ρ 12 )=∫W(r 1 ,r 2 )h * (r 11 )h(r 22 )d 2 r 1 d 2 r 2

其中矢量r1=(x1,y1)、r2=(x2,y2)和ρ1=(ρx1y1)、ρ2=(ρx2y2)分别表示入射光源面和接收面的任意两点的矢量坐标,∫∫d2r1d2r2表示对被积函数的多重积分,h(r11)和h(r22)为该光学系统的响应函数,*代表复共轭。The vectors r 1 =(x 1 ,y 1 ), r 2 =(x 2 ,y 2 ) and ρ 1 =(ρ x1y1 ), ρ 2 =(ρ x2y2 ) represent the incident light source surface respectively and the vector coordinates of any two points on the receiving surface, ∫∫d 2 r 1 d 2 r 2 represents the multiple integral of the integrand, h(r 11 ) and h(r 22 ) are the optical The response function of the system, * stands for complex conjugate.

作为更进一步的限定,所述第一透镜、相位板和第二透镜组成的光学系统的响应函数为:As a further limitation, the response function of the optical system composed of the first lens, the phase plate and the second lens is:

k=2π/λ为波数,λ为入射光源的波长,ξ=(ξxy)表示相位板所在频面处的矢量坐标,P(ξ)为相位板所对应的相位函数。k=2π/λ is the wave number, λ is the wavelength of the incident light source, ξ=(ξ xy ) represents the vector coordinates at the frequency plane where the phase plate is located, and P(ξ) is the phase function corresponding to the phase plate.

作为更进一步的限定,所述相位板的相位函数为:As a further limitation, the phase function of the phase plate is:

Figure BDA0002195679300000032
Figure BDA0002195679300000032

其中,i为虚数符号,满足i2=-1,an、bn和M,N为该相位板的参数。Wherein, i is an imaginary number symbol, satisfying i 2 =-1, a n , b n and M, and N is a parameter of the phase plate.

通过调节常数an和bn取值的大小实现对分束的子光束间距的调控,N和M分别为分束后横向和纵向的子光束数量,在接收面得到的光束为光强和相干度均为N×M的阵列分布。By adjusting the values of the constants a n and b n , the spacing of the split sub-beams can be adjusted. N and M are the number of horizontal and vertical sub-beams after beam splitting, and the beams obtained at the receiving surface are the light intensity and coherence The degrees are distributed in an N×M array.

作为更进一步的限定,将相位板的相位函数和光学系统的响应函数相结合,得到光学系统的具体响应函数为:As a further limitation, combining the phase function of the phase plate with the response function of the optical system, the specific response function of the optical system is obtained as:

Figure BDA0002195679300000041
Figure BDA0002195679300000041

其中δ为狄拉克函数。where δ is the Dirac function.

作为更进一步的限定,将相位板的相位函数、光学系统的响应函数和第二透镜的接收面处的交叉谱密度函数相结合,利用δ函数的抽样性质,得到第二透镜的接收面处的实际交叉谱密度函数为:As a further limitation, the phase function of the phase plate, the response function of the optical system and the cross spectral density function at the receiving surface of the second lens are combined, and the sampling property of the delta function is used to obtain the The actual cross-spectral density function is:

Figure BDA0002195679300000042
Figure BDA0002195679300000042

作为更进一步的限定,计算得到各分束子光束的光强和相干度;As a further limitation, calculate the light intensity and coherence of each sub-beam;

其中令ρ1=ρ2=ρ得到ρ点处光强为:Among them, let ρ 12 =ρ to obtain the light intensity at point ρ as:

I(ρ)=W(ρ,ρ)I(ρ)=W(ρ,ρ)

ρ1和ρ2两点之间的相干度为:The degree of coherence between two points ρ 1 and ρ 2 is:

Figure BDA0002195679300000043
Figure BDA0002195679300000043

第二方面,本公开提供了一种部分相干光束分束器的工作方法,利用本公开所述的部分相干光束分束器,步骤如下:In the second aspect, the present disclosure provides a working method of a partially coherent beam splitter, using the partially coherent beam splitter described in the present disclosure, the steps are as follows:

通过第一透镜、相位板和第二透镜建立部分相干光束分束器;establishing a partially coherent beam splitter through a first lens, a phase plate, and a second lens;

通过设定相位板的相位函数中的参数N和M确定分束后横向、纵向的子光束数量以及子光束的分布形式;By setting the parameters N and M in the phase function of the phase plate to determine the number of sub-beams in the horizontal and vertical directions and the distribution form of the sub-beams after beam splitting;

在N和M参数确定后,通过调节常数an和bn取值的大小实现对分束的子光束间距的控制。After the N and M parameters are determined, the control of the sub-beam spacing of the beam splitting is realized by adjusting the values of the constants a n and b n .

第三方面,本公开提供了一种光学装置,包括本公开所述的部分相干光束分束器。In a third aspect, the present disclosure provides an optical device, including the partially coherent beam splitter described in the present disclosure.

与现有技术相比,本公开的有益效果是:Compared with the prior art, the beneficial effects of the present disclosure are:

1、本公开所述的部分相干光束灵活分束装器能够对任意入射部分相干光束进行灵活分束,通过改变相位板的参数来调控分束的数量、分布形式和分布间距。1. The partially coherent beam flexible beam splitter described in this disclosure can flexibly split any incident partially coherent beam, and adjust the number, distribution form and distribution distance of the beams by changing the parameters of the phase plate.

2、本公开所述的部分相干光束灵活分束装器采用的设备简单,成本低,易搭建,产生的分束光束质量高,可适用于功率较大的入射光,在工业、科研和国防军事等领域有着广阔的应用前景。2. The partial coherent beam flexible beam splitter described in this disclosure adopts simple equipment, low cost, easy to build, and the quality of the generated beam split is high, and can be applied to incident light with relatively high power. It is used in industry, scientific research and national defense military and other fields have broad application prospects.

附图说明Description of drawings

图1为本公开实施例1所述的部分相干光束分束器的结构示意图。FIG. 1 is a schematic structural diagram of a partially coherent beam splitter according to Embodiment 1 of the present disclosure.

图2(a)和图2(b)分别为高斯谢尔模光束在入射光源平面的光强分布图和相干度分布图.Figure 2(a) and Figure 2(b) are the light intensity distribution diagram and coherence distribution diagram of the Gaussian Shell mode beam at the incident light source plane, respectively.

图3(a1)为本公开实施例1中N=M=3时相位板的相位分布图。FIG. 3( a1 ) is a phase distribution diagram of the phase plate when N=M=3 in Embodiment 1 of the present disclosure.

图3(b1)和图3(c1)分别为本公开实施例1中N=M=3时在接收面得到的光束的光强分布图和相干度分布图。FIG. 3( b1 ) and FIG. 3( c1 ) are respectively the light intensity distribution diagram and the coherence distribution diagram of the light beam obtained on the receiving surface when N=M=3 in Embodiment 1 of the present disclosure.

图3(a2)为本公开实施例1中N=5,M=3,a1=-2×105m-1,a2=-105m-1,a3=0m-1,a4=105m-1,a5=2×105m-1,b1=-105m-1,b2=0m-1,b3=105m-1时相位板的相位分布图。Figure 3(a2) shows N=5, M=3, a 1 =-2×10 5 m -1 , a 2 =-10 5 m -1 , a 3 =0m -1 , a in Example 1 of the present disclosure. Phase distribution of the phase plate when 4 = 10 5 m -1 , a 5 = 2×10 5 m -1 , b 1 = -10 5 m -1 , b 2 = 0m -1 , b 3 = 10 5 m -1 picture.

图3(a3)为本公开实施例1中N=5,M=5,a1=b1=-2×105m-1,a2=b2=-105m-1,a3=b3=0m-1,a4=b4=105m-1,a5=b5=2×105m-1时相位板的相位分布图。Figure 3(a3) shows N=5, M=5, a 1 =b1=-2×10 5 m -1 , a 2 =b2=-10 5 m -1 , a 3 =b3 in Example 1 of the present disclosure =0m -1 , a 4 =b4=10 5 m -1 , a 5 =b5=2×10 5 m -1 phase distribution diagram of the phase plate.

图3(b2)和图(c2)为本公开实施例1中N=5,M=3,a1=-2×105m-1,a2=-105m-1,a3=0m-1,a4=105m-1,a5=2×105m-1,b1=-105m-1,b2=0m-1,b3=105m-1时在接收面得到的光束的光强分布图和相干度分布图。Figure 3(b2) and Figure (c2) are N=5, M=3, a 1 =-2×10 5 m -1 , a 2 =-10 5 m -1 , a 3 = 0m -1 , a 4 = 10 5 m -1 , a 5 = 2×10 5 m -1 , b 1 = -10 5 m -1 , b 2 = 0m -1 , b 3 = 10 5 m -1 The light intensity distribution diagram and the coherence distribution diagram of the light beam obtained on the receiving surface.

图3(b3)和图(c3)为本公开实施例1中N=5,M=5,a1=b1=-2×105m-1,a2=b2=-105m-1,a3=b3=0m-1,a4=b4=105m-1,a5=b5=2×105m-1时在接收面得到的光束的光强分布和相干度分布。Figure 3(b3) and Figure (c3) show N=5, M=5, a 1 =b1=-2×10 5 m -1 , a 2 =b2=-10 5 m -1 in Example 1 of the present disclosure , a 3 =b3=0m -1 , a 4 =b4=10 5 m -1 , a 5 =b5=2×10 5 m -1 the light intensity distribution and coherence distribution of the light beam obtained on the receiving surface.

图4(a)和图4(b)分别为本公开实施例1中高斯谢尔模光束经分束器分束后在接收面的光强分布图和相干度分布图。Fig. 4(a) and Fig. 4(b) are respectively the light intensity distribution diagram and the coherence distribution diagram of the Gaussian Schell mode beam on the receiving surface after being split by the beam splitter in Embodiment 1 of the present disclosure.

图5(a1)和图5(b1)为本公开实施例1中的部分相干优雅厄米高斯光束的光强分布图和相干度分布图。Fig. 5(a1) and Fig. 5(b1) are the light intensity distribution diagram and the coherence distribution diagram of the partially coherent elegant Hermegaussian beam in Embodiment 1 of the present disclosure.

图5(a2)和图5(b2)为本公开实施例1中的厄米高斯关联谢尔模光束的光强分布和相干度分布图。Fig. 5(a2) and Fig. 5(b2) are diagrams of light intensity distribution and coherence distribution of the Hermitian-Gaussian correlated Sher mode beam in Embodiment 1 of the present disclosure.

图6(a1)和图6(b1)分别为本公开实施例1中的部分相干优雅厄米高斯光束经分束器分束后的光强分布图和相干度分布图。Fig. 6(a1) and Fig. 6(b1) are the light intensity distribution diagram and the coherence distribution diagram of the partially coherent elegant Hermitian Gaussian beam split by the beam splitter in Embodiment 1 of the present disclosure, respectively.

图6(a2)和图6(b2)分别为本公开实施例1中的厄米高斯关联谢尔模光束经分束器分束后的光强分布图和相干度分布图。Fig. 6(a2) and Fig. 6(b2) are respectively the light intensity distribution diagram and the coherence distribution diagram of the Hermitian-Gaussian correlated Sher mode beam split by the beam splitter in Embodiment 1 of the present disclosure.

具体实施方式Detailed ways

应该指出,以下详细说明都是例示性的,旨在对本公开提供进一步的说明。除非另有指明,本文使用的所有技术和科学术语具有与本公开所属技术领域的普通技术人员通常理解的相同含义。It should be noted that the following detailed description is exemplary and intended to provide further explanation of the present disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs.

需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本公开的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terminology used herein is only for describing specific embodiments, and is not intended to limit the exemplary embodiments according to the present disclosure. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and/or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and/or combinations thereof.

实施例1:Example 1:

如图1所示,本公开实施例1提供了一种部分相干光束分束器,包括第一透镜、第二透镜和相位板,所述第一透镜和第二透镜构成光学4f系统,所述相位板设于第一透镜和第二透镜的中间位置,通过调节相位板的参数实现对分束子光束的数量、分布形式和子光束间距的控制。As shown in FIG. 1 , Embodiment 1 of the present disclosure provides a partially coherent beam splitter, including a first lens, a second lens, and a phase plate, the first lens and the second lens constitute an optical 4f system, and the The phase plate is arranged in the middle of the first lens and the second lens, and the number, distribution form and spacing of the sub-beams of the split beams can be controlled by adjusting the parameters of the phase plate.

所述第一透镜和第二透镜的焦距均为f,所述第一透镜的前焦面处为入射光源面,所述第二透镜的后焦面为接收面。The focal lengths of the first lens and the second lens are both f, the front focal plane of the first lens is an incident light source plane, and the rear focal plane of the second lens is a receiving plane.

在空间-频域中,部分相干光束的二阶统计特性可由交叉谱密度函数来描述,入射光源面处任意部分相干光束的交叉密度函数为W(r1,r2),此光束经过第一透镜、相位板和第二透镜后,在第二透镜的接收面处的交叉谱密度函数为:In the space-frequency domain, the second-order statistical properties of partially coherent beams can be described by the cross spectral density function. The cross density function of any partially coherent beam at the incident light source surface is W(r 1 ,r 2 ). After the lens, the phase plate and the second lens, the cross spectral density function at the receiving surface of the second lens is:

W(ρ12)=∫W(r1,r2)h*(r11)h(r22)d2r1d2r2 (1)W(ρ 12 )=∫W(r 1 ,r 2 )h * (r 11 )h(r 22 )d 2 r 1 d 2 r 2 (1)

其中矢量r1=(x1,y1)、r2=(x2,y2)和ρ1=(ρx1y1)、ρ2=(ρx2y2)分别表示入射光源面和接收面的任意两点的矢量坐标,∫∫d2r1d2r2表示对被积函数的多重积分,h(r11)和h(r22)为该光学系统的响应函数,*代表复共轭。The vectors r 1 =(x 1 ,y 1 ), r 2 =(x 2 ,y 2 ) and ρ 1 =(ρ x1y1 ), ρ 2 =(ρ x2y2 ) represent the incident light source surface respectively and the vector coordinates of any two points on the receiving surface, ∫∫d 2 r 1 d 2 r 2 represents the multiple integral of the integrand, h(r 11 ) and h(r 22 ) are the optical The response function of the system, * stands for complex conjugate.

所述第一透镜、相位板和第二透镜组成的光学系统的响应函数可描述为:The response function of the optical system composed of the first lens, phase plate and second lens can be described as:

其中,k=2π/λ为波数,λ为入射光源的波长,ξ=(ξxy)表示相位板所在频面处的矢量坐标,P(ξ)为相位板所对应的相位函数。Among them, k=2π/λ is the wave number, λ is the wavelength of the incident light source, ξ=(ξ xy ) indicates the vector coordinates of the phase plate at the frequency plane, and P(ξ) is the phase function corresponding to the phase plate.

在这里为了实现分束的效果,定义:所述相位板的相位函数为:In order to realize the beam splitting effect here, define: the phase function of described phase plate is:

Figure BDA0002195679300000081
Figure BDA0002195679300000081

其中,i为虚数符号,满足i2=-1,an、bn和M,N为该相位板的参数,通过调节常数an和bn取值的大小实现对分束的子光束间距的调控,N和M分别为分束后横向和纵向的子光束数量,在接收面得到的光束为光强和相干度均为N×M的阵列分布。Among them, i is an imaginary number symbol, satisfying i 2 =-1, a n , b n and M, N is the parameter of the phase plate, and the sub-beam spacing of the beam splitting is realized by adjusting the values of the constants a n and b n N and M are respectively the number of horizontal and vertical sub-beams after beam splitting, and the beams obtained on the receiving surface are distributed in an array with both light intensity and coherence of N×M.

将相位板的相位函数(公式3)和光学系统的响应函数(公式2)相结合,得到光学系统的具体响应函数为:Combining the phase function of the phase plate (Formula 3) with the response function of the optical system (Formula 2), the specific response function of the optical system is obtained as:

Figure BDA0002195679300000082
Figure BDA0002195679300000082

其中δ为狄拉克函数。where δ is the Dirac function.

将相位板的相位函数(公式3)、光学系统的响应函数(公式2)和第二透镜的接收面处的交叉谱密度函数(公式1)相结合,利用δ函数的抽样性质,得到第二透镜的接收面处的实际交叉谱密度函数为:Combining the phase function of the phase plate (Equation 3), the response function of the optical system (Equation 2) and the cross-spectral density function (Equation 1) at the receiving surface of the second lens, using the sampling property of the delta function, the second The actual cross-spectral density function at the receiving face of the lens is:

Figure BDA0002195679300000091
Figure BDA0002195679300000091

通过接收面处的实际交叉谱密度函数(公式5),计算得到各分束子光束的光强和相干度;By the actual cross spectral density function (formula 5) at the receiving surface, the light intensity and coherence of each sub-beam sub-beam are calculated;

其中令ρ1=ρ2=ρ得到ρ点处的光强为:Among them, let ρ 12 =ρ to obtain the light intensity at point ρ as:

I(ρ)=W(ρ,ρ) (6)I(ρ)=W(ρ,ρ) (6)

ρ1和ρ2两点之间的相干度为:The degree of coherence between two points ρ 1 and ρ 2 is:

Figure BDA0002195679300000092
Figure BDA0002195679300000092

下面举例进行说明:The following example illustrates:

对于入射光束选取为波长λ=632nm的高斯谢尔模(GSM)激光束,其交叉谱密度为:For the incident beam selected as a Gaussian Schell mode (GSM) laser beam with a wavelength of λ=632nm, the cross spectral density is:

其中光斑宽度ω0=0.5mm,相干宽度σ0=0.5mm。图2(a)和图2(b)分别为高斯谢尔模光束在入射源平面的光强分布图和相干度分布图。此外薄透镜的焦距为f=400mm。而对于相位板所对应的相位函数(见公式(3)),取N=M=3,a1=b1=-105m-1,a2=b2=0m-1,a3=b3=105m-1,其相位分布图为图3(a1)。Wherein, the spot width ω 0 =0.5 mm, and the coherence width σ 0 =0.5 mm. Figure 2(a) and Figure 2(b) are the light intensity distribution diagram and coherence distribution diagram of the Gaussian Shell mode beam at the incident source plane, respectively. Also the focal length of the thin lens is f=400mm. As for the phase function corresponding to the phase plate (see formula (3)), N=M=3, a 1 =b 1 =-10 5 m -1 , a 2 =b 2 =0m -1 , a 3 = b 3 =10 5 m -1 , and its phase distribution is shown in Fig. 3(a1).

该高斯谢尔模光束通过本实施例所述的分束器后,在接收面得到光强和相干度均为3×3的阵列分布,其光强分布为图3(b1),相干度分布图为图3(c1),分别与图2(a)和(b)对照发现,分束后的每个光束依旧是独立的高斯谢尔模光束,因此本实施例所述的分束器确实能够对入射光进行分束。After the Gaussian Schell mode beam passes through the beam splitter described in this embodiment, an array distribution of 3×3 light intensity and coherence is obtained on the receiving surface, and the light intensity distribution is shown in Figure 3 (b1), and the coherence distribution is shown in Figure 3(b1). Fig. 3(c1), compared with Fig. 2(a) and (b) respectively, it is found that each beam after beam splitting is still an independent Gaussian Schell mode beam, so the beam splitter described in this embodiment can indeed correct the incident light Perform beam splitting.

另外,分别改变相位板的参数为N=5,M=3,a1=-2×105m-1,a2=-105m-1,a3=0m-1,a4=105m-1,a5=2×105m-1,b1=-105m-1,b2=0m-1,b3=105m-1和N=5,M=5,a1=b1=-2×105m-1,a2=b2=-105m-1,a3=b3=0m-1,a4=b4=105m-1,a5=b5=2×105m-1,其他参数都不变,相位分布图分别为图3(a2)和图3(a3),在接收面处分别得到5×3的阵列光束和5×5的阵列光束,其光强分布图和相干度分布图分别为图(b2)、图(b3)和图(c2)、图(c3)。In addition, the parameters of the phase plate are respectively changed to N=5, M=3, a 1 =-2×10 5 m -1 , a 2 =-10 5 m -1 , a 3 =0m -1 , a 4 =10 5 m -1 , a 5 =2×10 5 m -1 , b 1 =-10 5 m -1 , b 2 =0m -1 , b 3 =10 5 m -1 and N=5, M=5, a 1 =b1=-2×10 5 m -1 , a 2 =b2=-10 5 m -1 , a 3 =b3=0m -1 , a 4 =b4=10 5 m -1 , a 5 =b5 =2×10 5 m -1 , other parameters remain unchanged, the phase distribution diagrams are shown in Fig. 3(a2) and Fig. 3(a3), and a 5×3 array beam and a 5×5 array are respectively obtained at the receiving surface The light beam, its light intensity distribution diagram and coherence degree distribution diagram are Fig. (b2), Fig. (b3) and Fig. (c2), Fig. (c3) respectively.

由此可见,本实施例所述的分束器能够通过调相位板参数N和M来控制分束光束的数量和分布形式。It can be seen that the beam splitter described in this embodiment can control the number and distribution form of the split beams by adjusting the phase plate parameters N and M.

接着,对N=M=3的相位板改变其参数an和bn分别为:a1=b1=-105m-1,a2=b2=0,a3=b3=2×105m-1,图4(a)和图4(b)分别为高斯谢尔模光束经本实施例所述的分束器分束后在接收面的光强分布图和相干度分布图,从图中可以看出,分束光束光强和相干度的横向分布间距出现了变化,经测量光束(1,1)与光束(1,2)间隔距离d12为8mm,而光束(1,2)与光束(1,3)间隔距离d23为4mm。因此,本实施例所述的分束器可以通过调相位板参数an和bn来分别调控横向和纵向子光束间距。Next, change the parameters a n and b n of the phase plate with N=M=3 as: a 1 =b 1 =-10 5 m -1 , a 2 =b 2 =0, a 3 =b 3 =2 ×10 5 m -1 , Figure 4(a) and Figure 4(b) are respectively the light intensity distribution diagram and the coherence distribution diagram of the Gaussian Shell mode beam on the receiving surface after being split by the beam splitter described in this embodiment, As can be seen from the figure, the lateral distribution spacing of the light intensity and coherence of the split beams has changed, and the distance d 12 between the measured beams (1, 1) and the beams (1, 2) is 8mm, and the beams (1, 2) 2) The distance d 23 from the beam (1, 3) is 4mm. Therefore, the beam splitter described in this embodiment can adjust the transverse and longitudinal sub-beam spacings respectively by adjusting the phase plate parameters a n and b n .

为了验证该分束装置对任意部分相干光束都可实现灵活分束,选择结构更加复杂的光束作为入射光束,分别选取为部分相干优雅厄米高斯光束(光强和相干度分别见图5(a1)和图5(b1))和厄米高斯关联谢尔模光束(光强和相干度分别见图5(a2)和图5(b2)),其中,部分相干优雅厄米高斯光束的交叉谱密度函数为:In order to verify that the beam splitting device can achieve flexible beam splitting for any partially coherent beam, a beam with a more complex structure is selected as the incident beam, which is respectively selected as a partially coherent elegant Hermegaussian beam (the light intensity and coherence are shown in Fig. 5(a1 ) and Figure 5(b1)) and Hermitian-Gaussian correlated Sher mode beams (intensity and coherence are shown in Figure 5(a2) and Figure 5(b2) respectively), where the cross-spectral density function of a partially coherent elegant Hermitian-Gaussian beam for:

Figure BDA0002195679300000111
Figure BDA0002195679300000111

部分相干厄米高斯关联谢尔模光束的交叉谱密度函数为:The cross-spectral density function of a partially coherent Hermitian-Gaussian correlated Sher mode beam is:

Figure BDA0002195679300000112
Figure BDA0002195679300000112

其中Hn表示n阶厄米多项式,在这里,选取n=m=2。此外,这两者入射光束的波长、光斑宽度和相干宽度与高斯谢尔模光束相应参数取值相同,薄透镜焦距仍选取f=400mm。相位板参数的选取与图3(a1)参数选取相同。Wherein H n represents an n-order Hermitian polynomial, and here, n=m=2 is selected. In addition, the wavelength, spot width and coherence width of the two incident beams are the same as the corresponding parameters of the Gaussian Schell mode beam, and the focal length of the thin lens is still selected as f=400mm. The selection of phase plate parameters is the same as that in Figure 3(a1).

上述复杂激光束经该分束装置分束后,其在接收面光强分布图和相干度分布图如图6所示,其中,图6(a1)和图6(b1)分别为部分相干优雅厄米高斯光束经本实施例所述的分束器分束后的光强分布图和相干度分布,图6(a2)和图6(b2)分别为厄米高斯关联谢尔模光束经本实施例所述的分束器分束后的光强分布图和相干度分布图,通过与图5的对照可以看出,本实施例所述的分束器的确可以对复杂激光束进行灵活分束。After the above-mentioned complex laser beam is split by the beam splitting device, its light intensity distribution diagram and coherence distribution diagram on the receiving surface are shown in Figure 6, where Figure 6(a1) and Figure 6(b1) are partial coherence elegant The light intensity distribution diagram and coherence distribution of the Hermitian-Gaussian beam after being split by the beam splitter described in this embodiment, Fig. 6 (a2) and Fig. 6 (b2) respectively show the Hermitian-Gaussian correlation Sher mode beam passed through this embodiment The light intensity distribution diagram and the coherence distribution diagram of the beam splitter after beam splitting can be seen from the comparison with FIG. 5 that the beam splitter described in this embodiment can indeed flexibly split complex laser beams.

综上所述,本实施例所述的部分相干光束灵活分束器能够对任意入射部分相干光束进行灵活分束,通过改变相位板的参数来调控分束的数量、分布形式和分布间距,并且本装置采用的设备简单,成本低,易搭建,产生的分束光束质量高,可适用于功率较大的入射光,因此对于工业、科研和国防军事等领域有着广阔的应用前景。In summary, the partially coherent beam flexible beam splitter described in this embodiment can flexibly split any incident partially coherent beam, and adjust the number, distribution form and distribution distance of the beam by changing the parameters of the phase plate, and The equipment used in this device is simple, low in cost, easy to build, and the quality of the split beam generated is high, which can be applied to incident light with high power, so it has broad application prospects in the fields of industry, scientific research, national defense and military affairs.

实施例2:Example 2:

本公开实施例2提供了一种部分相干光束分束器的工作方法,利用本公开实施例1所述的部分相干光束分束器,步骤如下:Embodiment 2 of the present disclosure provides a working method of a partially coherent beam splitter. Using the partially coherent beam splitter described in Embodiment 1 of the present disclosure, the steps are as follows:

通过第一透镜、相位板和第二透镜建立部分相干光束分束器;establishing a partially coherent beam splitter through a first lens, a phase plate, and a second lens;

通过设定相位板的相位函数中的参数N和M确定分束后横向、纵向的子光束数量以及子光束的分布形式;By setting the parameters N and M in the phase function of the phase plate to determine the number of sub-beams in the horizontal and vertical directions and the distribution form of the sub-beams after beam splitting;

在N和M参数确定后,通过调节常数an和bn取值的大小实现对分束的子光束间距的控制。After the N and M parameters are determined, the control of the sub-beam spacing of the beam splitting is realized by adjusting the values of the constants a n and b n .

实施例3:Example 3:

本公开实施例3提供了一种光学装置,包括本公开实施例1所述的部分相干光束分束器。Embodiment 3 of the present disclosure provides an optical device, including the partially coherent beam splitter described in Embodiment 1 of the present disclosure.

以上所述仅为本公开的优选实施例而已,并不用于限制本公开,对于本领域的技术人员来说,本公开可以有各种更改和变化。凡在本公开的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本公开的保护范围之内。The above descriptions are only preferred embodiments of the present disclosure, and are not intended to limit the present disclosure. For those skilled in the art, the present disclosure may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.

Claims (10)

1. The partial dry beam splitter is characterized by comprising a first lens, a second lens and a phase plate, wherein the first lens and the second lens form an optical 4f system, the phase plate is arranged in the middle position of the first lens and the second lens, and the quantity, the distribution form and the sub-beam distance of the split sub-beams are controlled by adjusting the parameters of the phase plate.
2. The partially coherent beam splitter of claim 1, wherein the first and second lenses each have a focal length f, the first lens having a front focal plane that is an incident light source plane and the second lens having a back focal plane that is a receiving plane.
3. The partially coherent beam splitter of claim 2, wherein the cross-over density function of any partially coherent beam at the plane of the incident light source is W (r)1,r2) After the light beam passes through the first lens, the phase plate and the second lens, the cross spectral density function at the receiving surface of the second lens is as follows:
W(ρ12)=∫W(r1,r2)h*(r11)h(r22)d2r1d2r2
wherein the vector r1=(x1,y1)、r2=(x2,y2) And ρ1=(ρx1y1)、ρ2=(ρx2y2) Denotes the vector coordinates of any two points of the incident light source surface and the receiving surface, respectively, [ integral ] d2r1d2r2Representing multiple integrals, h (r), of an integrand11) And h (r)22) The response function of the optical system represents the complex conjugate.
4. The partially coherent beam splitter of claim 3 wherein the response function of the optical system of the first lens, the phase plate and the second lens is:
Figure FDA0002195679290000011
k 2 pi/lambda is wave number, lambda is wavelength of incident light source, xi is xixy) And P (xi) is a phase function corresponding to the phase plate.
5. The partially coherent beam splitter of claim 4, wherein the phase plate has a phase function of:
Figure FDA0002195679290000021
wherein i is an imaginary symbol satisfying i2=-1,an、bnAnd M, N are parameters of the phase plate.
By adjusting the constant anAnd bnThe adjustment and control of the sub-beam distance of the beam splitting are realized by the value size, N and M are the number of the sub-beams in the transverse direction and the longitudinal direction of the beam splitting respectively, and the light beams obtained at the receiving surface are in array distribution with the light intensity and the coherence degree of NxM.
6. The partially coherent beam splitter of claim 5, wherein combining the phase function of the phase plate with the response function of the optical system results in a specific response function of the optical system that is:
where δ is the dirac function.
7. The partially coherent beam splitter of claim 6, wherein the phase function of the phase plate, the response function of the optical system, and the cross spectral density function at the receiving face of the second lens are combined to obtain an actual cross spectral density function at the receiving face of the second lens using a sampling property of the delta function as:
Figure FDA0002195679290000023
8. the partially coherent beam splitter of claim 7 in which the intensity and coherence of each split sub-beam is calculated;
let ρ be1=ρ2The light intensity at the ρ point is obtained as ρ:
I(ρ)=W(ρ,ρ)
ρ1and ρ2The degree of coherence between them is:
Figure FDA0002195679290000031
9. a method of operating a partially coherent beam splitter, using a partially coherent beam splitter as claimed in any one of claims 5 to 8, comprising the steps of:
creating a partially coherent beam splitter by a first lens, a phase plate and a second lens;
determining the number of transverse and longitudinal sub-beams after beam splitting and the distribution form of the sub-beams by setting parameters N and M in a phase function of the phase plate;
after the N and M parameters are determined, the constant a is adjustednAnd bnThe value size realizes the control of the sub-beam spacing of the beam splitting.
10. An optical device comprising a partially coherent beam splitter according to any one of claims 1 to 8.
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CN102323678A (en) * 2011-07-29 2012-01-18 哈尔滨工业大学 Method and device for real-time accurate transformation of arbitrary wavefront complex amplitude without speckle based on pure phase liquid crystal optical phased array
US20130070251A1 (en) * 2011-09-16 2013-03-21 University Of Massachusetts Systems and Methods of Dual-Plane Digital Holographic Microscopy
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CN106444048A (en) * 2016-09-06 2017-02-22 苏州大学 Shaping method and shaping system of Gaussian Sherrer mode light beam
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