CN110632696A - Compact beam deflector and preparation method thereof - Google Patents

Compact beam deflector and preparation method thereof Download PDF

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Publication number
CN110632696A
CN110632696A CN201910890914.2A CN201910890914A CN110632696A CN 110632696 A CN110632696 A CN 110632696A CN 201910890914 A CN201910890914 A CN 201910890914A CN 110632696 A CN110632696 A CN 110632696A
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liquid crystal
film
substrate
polarization grating
orientation
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穆全全
王启东
彭增辉
刘永刚
宣丽
鲁兴海
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3016Polarising elements involving passive liquid crystal elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3083Birefringent or phase retarding elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133784Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Polarising Elements (AREA)

Abstract

A compact beam deflector and a preparation method thereof relate to the technical field of non-mechanical beam deflection and solve the problems of simple structure, matching degree of refractive indexes between interfaces and the problem of improvement in energy utilization rate of a beam deflection device. The light beam deflector comprises a liquid crystal wave plate, a liquid crystal polarization grating film and a liquid crystal layer, wherein the liquid crystal wave plate comprises a first substrate and a second substrate, and the liquid crystal layer and the liquid crystal polarization grating film are both positioned between the first substrate and the second substrate. The method comprises the following steps: preparing a first photo-alignment film on the first ITO conductive film, spin-coating a reactive liquid crystal, and irradiating and curing with nitrogen and ultraviolet light to obtain a liquid crystal polarization grating film; manufacturing a first orientation film on the liquid crystal polarization grating film; and manufacturing a second orientation film on the second ITO conductive film, and pressing the first substrate and the second substrate in an anti-parallel mode to prepare a liquid crystal layer. The invention has simple structure and small number of reflecting interfaces, and improves the matching degree of refractive indexes between the interfaces and the energy utilization rate of the light beam deflection device.

Description

Compact beam deflector and preparation method thereof
Technical Field
The invention relates to the technical field of non-mechanical light beam deflection, in particular to a compact light beam deflector and a preparation method thereof.
Background
The liquid crystal polarization grating is a novel light beam deflection device, based on the principle of geometric phase modulation, which can deflect circularly polarized light to +1 order or-1 order with nearly 100% diffraction efficiency, the direction of deflection depending on the polarization state of the incident light. According to the working mode classification, the liquid crystal polarization grating is divided into an active liquid crystal polarization grating and a passive liquid crystal polarization grating: the active liquid crystal polarization grating has a structure similar to that of a liquid crystal wave plate, can be electrically controlled, and light beams can directly penetrate (zero order); on the contrary, the passive liquid crystal polarization grating has a simple structure, cannot be electrically controlled, and cannot directly transmit light beams (without zero order). In order to realize the dynamic light beam regulation and control of the passive liquid crystal polarization grating, the passive liquid crystal polarization grating and the liquid crystal wave plate are combined for use, and the polarization state of incident light is modulated through the electric control liquid crystal wave plate, so that the light beam incident on the passive liquid crystal polarization grating is controlled to deflect to +1 level or-1 level, and the dynamic electric control light beam deflection is realized.
Currently, to achieve the above functions, there are two main ways: the first is that the liquid crystal wave plate and the liquid crystal polarization grating film are completely independent, the light beam passes through the liquid crystal wave plate and the liquid crystal polarization grating film respectively, and the dynamic adjustment of the light beam is realized by adjusting the liquid crystal wave plate; the second method is to directly spin-coat the outer side of the liquid crystal wave plate substrate to prepare the liquid crystal polarization grating film, and the method has a simpler structure than the first method and reduces the number of reflecting interfaces. The structural simplification, the matching degree of the refractive index between the interfaces, and the energy utilization of the beam deflection device of the above two methods still need to be improved.
Disclosure of Invention
In order to solve the above problems, the present invention provides a compact beam deflector and a method of manufacturing the same.
The technical scheme adopted by the invention for solving the technical problem is as follows:
the utility model provides a compact beam deflector, includes liquid crystal wave plate, liquid crystal polarization grating film and liquid crystal layer, the liquid crystal wave plate includes first base plate and second base plate, and the liquid crystal layer is located between first base plate and the second base plate, and liquid crystal polarization grating film is located between first base plate and the second base plate.
A method of making a compact beam deflector comprising the steps of:
plating a first ITO conductive film on a first substrate, spin-coating a photosensitive material on the first ITO conductive film, curing the photosensitive material at a high temperature, exposing the cured photosensitive material to enable the photosensitive material to generate a photocrosslinking reaction, and recording an exposed pattern to obtain a first photo-alignment film;
secondly, spin-coating reactive liquid crystal on the first photo-alignment film, irradiating and curing the spin-coated reactive liquid crystal by using ultraviolet light under the nitrogen protection environment to obtain a liquid crystal polarization grating film, wherein the spin-coating times and the spin-coating rotating speed are determined according to the thickness of the liquid crystal polarization grating film;
plating a second ITO conductive film on a second substrate;
step four, spin-coating an orientation agent on the liquid crystal polarization grating film, curing the orientation agent at high temperature, and orienting the cured orientation agent to obtain a first orientation film; spin-coating an orientation agent on the second ITO conductive film, curing the orientation agent at a high temperature, and orienting the cured orientation agent to obtain a second orientation film;
and fifthly, placing the first substrate and the second substrate in parallel, placing the first orientation film and the second orientation film in opposite directions, pressing into a liquid crystal box, filling liquid crystal between the first orientation film and the second orientation film in the liquid crystal box to obtain a liquid crystal layer, sealing the liquid crystal box to obtain the compact beam deflector, and completing the preparation.
The invention has the beneficial effects that:
the compact light beam deflector is characterized in that the liquid crystal polarization grating film is manufactured on the inner side of the liquid crystal wave plate substrate, the compact light beam deflector is simple in structure, the number of reflecting interfaces is small, the matching degree of the refractive indexes between the interfaces is high, the Fresnel reflection loss is small, the matching degree of the refractive indexes between the interfaces can be greatly improved, the energy utilization rate of a light beam deflection device is obviously improved, and the dynamic adjustment of light beams can be conveniently and quickly realized. The liquid crystal polarization grating film prepared by the preparation method has clear fringe profile, high contrast and few defects.
Drawings
Fig. 1 is a block diagram of a compact beam deflector of the present invention.
FIG. 2 is a diagram showing the continuous variation of liquid crystal molecules in a liquid crystal polarization grating film of a compact beam deflector according to the present invention within one period.
FIG. 3 is a polarization microscope topography of a liquid crystal polarization grating film of a compact beam deflector of the present invention.
FIG. 4 is a diagram illustrating the diffraction effect of a compact beam deflector according to the present invention.
In the figure: 1. the liquid crystal display panel comprises a first substrate, 2, a first ITO conductive film, 3, a first photo-alignment film, 4, a liquid crystal polarization grating film, 5, a first alignment film, 6, a liquid crystal layer, 7, a second alignment film, 8, a second ITO conductive film, 9 and a second substrate.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
A compact beam deflector comprises a liquid crystal wave plate, a liquid crystal polarization grating film 4 and a liquid crystal layer 6, wherein the liquid crystal wave plate comprises a first substrate 1 and a second substrate 9, the liquid crystal layer 6 is located between the first substrate 1 and the second substrate 9, and the liquid crystal polarization grating film 4 is located between the first substrate 1 and the second substrate 9. The liquid crystal wave plate, the liquid crystal polarization grating film 4 and the liquid crystal layer 6 can be integrated inside one liquid crystal box. The liquid crystal wave plate is used for modulating the polarization state of incident light. The liquid crystal polarization grating film 4 is used for realizing light beam deflection and finally realizing dynamic electric control light beam deflection. The thickness d of the liquid crystal polarization grating film 4 satisfies Δ nd ═ λ/2, where: Δ n is the birefringence of the liquid crystal molecules, λ is the wavelength of the incident light, and the thickness of the liquid crystal polarization grating film 4 satisfies the half-wave condition. One compact beam deflector configuration is shown in fig. 1.
The liquid crystal molecules in the liquid crystal polarization grating film 4 are periodically arranged along the plane where the first substrate 1 is located, the optical axis of the liquid crystal molecules continuously changes in one period, and the following relational expression is satisfied:
Figure BDA0002208728180000031
whereinRepresents the director of the liquid crystal molecules at the x position and Λ represents the period of the polarization grating of the liquid crystal polarization grating film 4. The liquid crystal molecules of the liquid crystal polarization grating film 4 continuously change in one period as shown in fig. 2.
The liquid crystal wave plate further comprises a first ITO conductive film 2, a first photo-alignment film 3, a first alignment film 5, a second ITO conductive film 8 and a second alignment film 7. The first substrate 1, the first ITO conductive film 2, the first light-operated orientation film 3, the liquid crystal polarization grating film 4, the first orientation film 5, the liquid crystal layer 6, the second orientation film 7, the second ITO conductive film 8 and the second substrate 9 are sequentially arranged from top to bottom. The liquid crystal molecules in the liquid crystal polarization grating film 4 are periodically arranged along the lower surface of the first substrate 1. First and second substrates 1 and 9: for supporting a compact beam deflector; the first substrate 1 is parallel to the second substrate 9, substrates on two sides of the liquid crystal wave plate (i.e. the first substrate 1 and the second substrate 9) are arranged in an anti-parallel manner, and the first substrate 1 and the second substrate 9 can both adopt quartz glass substrates, sodium glass substrates, boron glass substrates or lead glass substrates. First and second ITO conductive films 2 and 8: the liquid crystal wave plate is driven. First and second alignment films 5 and 7: the molecular orientation of the liquid crystal wave plate is realized; the first alignment film 5 and the second alignment film 7 are both rubbing alignment films, or the first alignment film 5 and the second alignment film 7 are both photo-alignment films. A photoalignment film: after laser irradiation, a photocrosslinking reaction occurs to induce the orientation of liquid crystal polymer molecules to obtain the liquid crystal polarization grating film 4. Liquid crystal polarization grating film 4: the liquid crystal polymer molecules are oriented and then cured by ultraviolet light to prepare the film. The liquid crystal layer 6 may employ nematic liquid crystal or dual-frequency liquid crystal.
The liquid crystal wave plate is controlled by voltage, the phase delay amount of the liquid crystal wave plate is switched between 0 and pi/2, when high voltage is applied, the phase delay amount of the liquid crystal wave plate is 0, and when no voltage or low voltage is applied, the phase delay amount of the liquid crystal wave plate is pi/2.
A method for making a compact beam deflector, comprising the steps of:
1. preparation of liquid Crystal polarization Grating film 4
Firstly, sequentially cleaning a first substrate 1 by using acetone, ethanol and ultrapure water, after drying, evaporating a first ITO conductive film 2 on one side of the first substrate 1, wherein the thickness of the first ITO conductive film 2 is about 20nm, then spin-coating a photosensitive material SD1 on the first ITO conductive film 2, the thickness of the photosensitive material SD1 is about 80nm, and curing the photosensitive material at a high temperature (curing the photosensitive material at 120 ℃).
Exposing the cured photosensitive material to make the photosensitive material generate a photocrosslinking reaction and record an exposure pattern to obtain a first photoalignment film 3; and (3) exposing the first substrate 1 by using 405nm laser as a light source and using a double-beam interference light path, and continuously irradiating the first substrate 1, the first ITO conductive film 2 and the cured photosensitive material for 10min to fully perform a photo-crosslinking reaction on the photosensitive material and record an exposure pattern to obtain the first photoalignment film 3.
And (2) spin-coating reactive liquid crystal on the first photo-alignment film 3, namely spin-coating reactive liquid crystal ROF on the irradiated photo-alignment glass substrate, irradiating and curing the spin-coated reactive liquid crystal for 5min by using full-band ultraviolet light under a nitrogen protection environment, wherein the spin-coating frequency and the spin-coating rotating speed are determined according to the thickness of the liquid crystal polarization grating film 4, and the spin-coating is repeated for three times according to the 532nm laser half-wave condition in the embodiment to obtain the liquid crystal polarization grating film 4.
And sequentially cleaning the second substrate 9 by using acetone, ethanol and ultrapure water respectively, and evaporating a second ITO conductive thin film 8 on one side of the second substrate 9 after drying, wherein the thickness of the second ITO conductive thin film 8 is about 20 nm.
2. Preparation of liquid crystal cell
And cleaning the first substrate 1 with the liquid crystal polarization grating film 4 again by using ultrapure water, then spin-coating an orientation agent on the liquid crystal polarization grating film 4, wherein the orientation agent is a friction orientation agent, curing the orientation agent at a high temperature of 230 ℃, and then performing friction orientation on the cured orientation agent under a friction machine to obtain the first orientation film 5.
The second substrate 9 is subjected to the same process, an alignment agent is spin-coated on the second ITO conductive film 8, the alignment agent is cured at a high temperature of 230 ℃, and then the cured alignment agent is subjected to rubbing alignment in a rubbing machine, so that a second alignment film 7 is obtained. Then, frame glue is manufactured, 5-micrometer gap spacers are sprayed, the first substrate 1 and the second substrate 9 are placed in an antiparallel mode, namely the first substrate 1 is parallel to the second substrate 9, the first orientation film 5 and the second orientation film 7 are placed in an opposite mode, the first substrate 1 corresponds to the second substrate 9, as shown in fig. 1, the surface of the first orientation film 5 on the first substrate 1 faces downwards, the surface of the second orientation film 7 on the second substrate 9 faces upwards, the lower surface of the first orientation film 5 corresponds to the upper surface of the second orientation film 7, curing is carried out at high temperature, and the cured orientation agent is oriented; and placing the first substrate 1 and the second substrate 9 in parallel, placing the first orientation film 5 and the second orientation film 7 in opposite directions, pressing into a liquid crystal box, filling liquid crystal between the first orientation film 5 and the second orientation film 7 in the liquid crystal box to obtain a liquid crystal layer 6, and then sealing the liquid crystal box to obtain the compact beam deflector, thus completing the preparation.
The compact light beam deflector is characterized in that the liquid crystal polarization grating film 4 is manufactured on the inner side of the liquid crystal wave plate substrate, the compact light beam deflector is simple in structure, the number of reflecting interfaces is small, the matching degree of the refractive indexes between the interfaces is high, the Fresnel reflection loss is small, the matching degree of the refractive indexes between the interfaces can be greatly improved, the energy utilization rate of a light beam deflection device is remarkably improved, and the dynamic adjustment of light beams can be conveniently and rapidly realized.

Claims (10)

1. The utility model provides a compactification beam deflector, characterized by, includes liquid crystal wave plate, liquid crystal polarization grating film (4) and liquid crystal layer (6), the liquid crystal wave plate includes first base plate (1) and second base plate (9), and liquid crystal layer (6) are located between first base plate (1) and second base plate (9), and liquid crystal polarization grating film (4) are located between first base plate (1) and second base plate (9).
2. A compact beam deflector according to claim 1, wherein the thickness d of the liquid crystal polarization grating film (4) satisfies Δ nd ═ λ/2, where: Δ n is the birefringence of the liquid crystal molecules, and λ is the wavelength of the incident light.
3. A compact beam deflector according to claim 1, wherein the liquid crystal waveplate, the liquid crystal polarization grating film (4) and the liquid crystal layer (6) can be integrated inside one liquid crystal cell.
4. A compact beam deflector according to claim 1, characterized in that the liquid crystal layer (6) is a nematic liquid crystal or a dual frequency liquid crystal.
5. The compact beam deflector of claim 1, wherein the liquid crystal waveplate further comprises a first ITO conductive film (2), a first photo-alignment film (3), a first alignment film (5), a second ITO conductive film (8), and a second alignment film (7), and the first substrate (1), the first ITO conductive film (2), the first photo-alignment film (3), the liquid crystal polarization grating film (4), the first alignment film (5), the liquid crystal layer (6), the second alignment film (7), the second ITO conductive film (8), and the second substrate (9) are sequentially disposed from top to bottom.
6. A compact beam deflector according to claim 5, wherein the first (5) and second (7) orientation films are both rubbed orientation films or both photoalignment films.
7. A compact beam deflector as claimed in claim 1, characterized in that the first substrate (1) is parallel to the second substrate (9).
8. A compact beam deflector according to claim 1, wherein the liquid crystal molecules in the liquid crystal polarization grating film (4) are periodically arranged along the plane of the first substrate (1), the optical axes of the liquid crystal molecules continuously change within a period, and the liquid crystal molecules satisfy the following relationship:
Figure FDA0002208728170000011
wherein
Figure FDA0002208728170000012
Represents the director of the liquid crystal molecules at the x position, and Λ represents the period of the polarization grating of the liquid crystal polarization grating film (4).
9. A method of manufacturing a compact beam deflector as claimed in any one of claims 1 to 8, comprising the steps of:
step one, plating a first ITO conductive film (2) on a first substrate (1), spinning and coating a photosensitive material on the first ITO conductive film (2), curing the photosensitive material at a high temperature, exposing the cured photosensitive material to enable the photosensitive material to generate a photocrosslinking reaction and record an exposure pattern, and obtaining a first photoalignment film (3);
secondly, spin-coating reactive liquid crystal on the first photo-alignment film (3), irradiating and curing the spin-coated reactive liquid crystal by using ultraviolet light under the nitrogen protection environment to obtain a liquid crystal polarization grating film (4), wherein the spin-coating times and the spin-coating rotating speed are determined according to the thickness of the liquid crystal polarization grating film (4);
plating a second ITO conductive film (8) on a second substrate (9);
step four, spin-coating an orientation agent on the liquid crystal polarization grating film (4), curing the orientation agent at a high temperature, and orienting the cured orientation agent to obtain a first orientation film (5); spin-coating an orientation agent on the second ITO conductive film (8), curing the orientation agent at high temperature, and orienting the cured orientation agent to obtain a second orientation film (7);
and fifthly, placing the first substrate (1) and the second substrate (9) in parallel, placing the first orientation film (5) and the second orientation film (7) in opposite directions, pressing into a liquid crystal box, filling liquid crystal between the first orientation film (5) and the second orientation film (7) in the liquid crystal box to obtain a liquid crystal layer (6), sealing the liquid crystal box to obtain the compact beam deflector, and completing the preparation.
10. The method of claim 9, wherein the photosensitive material in the first step has a thickness of 80nm, the temperature for curing the photosensitive material is 120 ℃, and the exposing the cured photosensitive material comprises: exposing the cured photosensitive material by using 405nm laser as a light source and using a double-beam interference light path, and continuously irradiating the cured photosensitive material for 10min to enable the photosensitive material to generate a photo-crosslinking reaction and record an exposure pattern; and the curing time in the second step is 5 min.
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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN113176554A (en) * 2021-04-29 2021-07-27 中国科学院长春光学精密机械与物理研究所 Light spot array generating structure and laser radar structure

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CN109375426A (en) * 2018-12-14 2019-02-22 中国科学院长春光学精密机械与物理研究所 A kind of unilateral orientation active liquid crystal polarization grating structure and preparation method thereof
CN109407420A (en) * 2018-10-24 2019-03-01 上海无线电设备研究所 A kind of Terahertz blue phase liquid crystal grating and preparation method thereof
CN208737174U (en) * 2018-09-04 2019-04-12 洛伦兹(北京)科技有限公司 Compound liquid-crystal device for light beam deflection
CN110068945A (en) * 2019-05-10 2019-07-30 中国科学院长春光学精密机械与物理研究所 A kind of reflective compound liquid-crystal polarization grating and preparation method thereof

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Publication number Priority date Publication date Assignee Title
CN102246089A (en) * 2008-10-09 2011-11-16 北卡罗莱纳州立大学 Polarization-independent liquid crystal display devices including multiple polarization grating arrangements and related devices
CN208737174U (en) * 2018-09-04 2019-04-12 洛伦兹(北京)科技有限公司 Compound liquid-crystal device for light beam deflection
CN109407420A (en) * 2018-10-24 2019-03-01 上海无线电设备研究所 A kind of Terahertz blue phase liquid crystal grating and preparation method thereof
CN109375426A (en) * 2018-12-14 2019-02-22 中国科学院长春光学精密机械与物理研究所 A kind of unilateral orientation active liquid crystal polarization grating structure and preparation method thereof
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113176554A (en) * 2021-04-29 2021-07-27 中国科学院长春光学精密机械与物理研究所 Light spot array generating structure and laser radar structure
CN113176554B (en) * 2021-04-29 2024-05-17 中国科学院长春光学精密机械与物理研究所 Light spot array generation structure and laser radar structure

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