CN110616411A - PVD vacuum coating process and coated workpiece - Google Patents
PVD vacuum coating process and coated workpiece Download PDFInfo
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- CN110616411A CN110616411A CN201910899775.XA CN201910899775A CN110616411A CN 110616411 A CN110616411 A CN 110616411A CN 201910899775 A CN201910899775 A CN 201910899775A CN 110616411 A CN110616411 A CN 110616411A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a PVD vacuum coating process, which comprises the following steps: the method comprises the following steps: treating the surface of the base material; wiping and cleaning the surface of the base material, and performing oil removal and dust removal treatment; the tidiness and the dryness of the base material are ensured; step two: drying the base material; coating oil on the surface of the base material, and then drying at the temperature of 60-70 ℃ for 2 hours; step three: coating; placing the substrate in the vacuum coating furnace, vacuumizing the vacuum coating furnace by a vacuumizing device, and starting coating by the vacuum coating furnace after the vacuum degree meets the requirement; step four: cleaning; putting the workpiece subjected to film coating into an ultrasonic cleaning device for cleaning; step five: drying; and drying and packaging the cleaned workpiece.
Description
Technical Field
The invention belongs to the technical field of PVD vacuum coating, and particularly relates to a PVD vacuum coating process and a coated workpiece.
Background
The vacuum coating is an important aspect in the vacuum application field, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on an object to be coated is called vacuum coating.
The existing PVD vacuum coating process has the following defects: in the process of coating the workpiece, the workpiece is hung on a workpiece hanger to carry out spray coating, and in order to ensure that all workpieces can be coated uniformly at present, a fixed coating nozzle is arranged on the inner wall of a vacuum coating furnace body, and the coating is not uniform, so that a local workpiece film layer is unqualified; the working environment of personnel in a factory is greatly influenced by noise generated by vibration of the vacuum air pump for vacuumizing during operation, and the internal stress of the vacuum tank connected with the vacuum air pump is difficult to eliminate due to extrusion of atmospheric pressure for a long time, so that the vacuum tank is easy to burst; at present, the cutter is manually placed into a cleaning pool of an ultrasonic cleaning machine, the cutter is sharp, the speed is slow when people take and drag for the cutter, and the risk of hurting people exists.
Disclosure of Invention
The invention aims to provide a PVD vacuum coating process and a coated workpiece, which solve the problems in the background technology.
In order to solve the technical problem, the invention aims to realize that:
a PVD vacuum coating process comprises the following steps:
the method comprises the following steps: treating the surface of the base material; wiping and cleaning the surface of the base material, and performing oil removal and dust removal treatment; the tidiness and the dryness of the base material are ensured;
step two: drying the base material; coating oil on the surface of the base material, and then drying at the temperature of 60-70 ℃ for 2 hours;
step three: coating; placing the substrate in the vacuum coating furnace, vacuumizing the vacuum coating furnace by a vacuumizing device, and starting coating by the vacuum coating furnace after the vacuum degree meets the requirement;
step four: cleaning; putting the workpiece subjected to film coating into an ultrasonic cleaning device for cleaning;
step five: drying; and drying and packaging the cleaned workpiece.
On the basis of the above scheme and as a preferable scheme of the scheme: the vacuum coating furnace comprises a vacuum coating furnace body 1, supporting legs 2 are fixedly welded on two sides of the lower surface of the vacuum coating furnace body 1, an annular up-and-down moving pipe 3 is movably arranged in the vacuum coating furnace body 1, a plurality of coating nozzles 4 are uniformly distributed on the inner wall of an inner ring of the annular up-and-down moving pipe 3, a plurality of uniformly distributed pulleys 5 are fixed on the surface of an outer ring of the annular up-and-down moving pipe 3, an electric telescopic rod 6 is vertically and fixedly installed at the bottom of the inner wall of the vacuum coating furnace body 1, the upper part of the telescopic end of the electric telescopic rod 6 is fixedly connected with the lower surface of the annular up-and-down moving pipe 3, a film material threaded joint 7 is installed on one side above the vacuum coating furnace body 1, a one-way valve 8 is connected below the film material threaded joint 7 and positioned in the vacuum coating furnace, an air evacuation pipe 10 is fixed on the inner bottom wall of the support leg 2, the air evacuation pipe 10 is communicated with an air pump 11 arranged on the outer side surface of the vacuum coating furnace body 1 through a pipeline, and a plurality of cutter hangers 13 are vertically and fixedly welded in the vacuum coating furnace body 1; a filter screen is fixedly arranged in the film material threaded joint 7, and the filter screen is detachably arranged in a channel of the film material threaded joint 7; at least four pulleys 5 are arranged on the surface of the annular up-down moving pipe 3, vertical strip-shaped grooves with the number consistent with that of the pulleys 5 are formed in the inner wall of the vacuum coating furnace body 1, and the pulleys 5 are clamped in the vertical strip-shaped grooves in a rolling mode; a plurality of crossed support frames 12 are uniformly arranged in the channel of the extension tube 9, and the distance between any two crossed support frames 12 is three centimeters; the electric telescopic rods 6 are arranged in a group of two, and the two electric telescopic rods 6 are centrosymmetric about a vertical central axis of the vacuum coating furnace body 1; the tool hangers 13 are all disposed in the inner ring passage of the annular up-down moving pipe 3.
On the basis of the above scheme and as a preferable scheme of the scheme: the vacuumizing device comprises a substrate 01, an outer housing 02 is mounted above the substrate 01, a vacuum air pump 03 is fixedly mounted on the upper surface of the substrate 01, one side of the vacuum air pump 03 is communicated with a vacuum tank 04, the upper part of the vacuum tank 04 is connected with a vacuum tank inlet 05 through a pipeline, an air outlet seat of the vacuum air pump 03 is communicated with an air outlet 06 through a pipeline, a pressure gauge 07 is arranged on the upper surface of the outer housing 02, a detection end of the pressure gauge 07 is hermetically inserted into the vacuum tank 04, a plurality of internal stress eliminating assemblies 08 are fixedly welded on the surfaces of two sides of the vacuum tank 04, a plurality of silencing tubes 09 are fixedly arranged on the surface of the inner wall of the outer housing 02, each internal stress eliminating assembly 08 comprises a rectangular hollow column, a spring 081 is fixedly welded on the inner wall far away from the vacuum tank 04 in the rectangular hollow; the lower surface of the base plate 01 is fixedly welded with a bottom plate 010 through a connecting rod, and a plurality of traveling wheels 011 are fixedly installed on the lower surface of the bottom plate 010; electric telescopic rods 012 are fixed on two sides of the lower surface of the base plate 01 above the bottom plate 010, grooves are formed in two sides of the lower surface of the bottom plate 010, and floor attaching plates 013 are fixedly welded after telescopic ends of the electric telescopic rods 012 penetrate through the grooves in the bottom plate 010; pulleys are fixedly welded on two end faces of the floor tile 013, and the wheel faces of the pulleys are in rolling fit with the inner side walls of the grooves; the connecting rod is located in the middle of the upper surface of the bottom plate 010, and the electric telescopic rods 012 on the two sides above the bottom plate 010 are symmetrical with respect to the connecting rod; the surface of the muffling pipe 09 is provided with a plurality of through holes which are uniformly distributed, and the muffling structure is arranged in the muffling pipe 09.
On the basis of the above scheme and as a preferable scheme of the scheme: the ultrasonic cleaning device comprises a workbench 001, an L-shaped rotating arm 002 is rotatably arranged on the upper surface of the workbench 001, a loading disc 003 to be cleaned is arranged on the left side of the upper surface of the workbench 001, an ultrasonic cleaning machine 004, a hollow drying basket 005 and a finished product loading disc 006 are sequentially arranged on the right side of the L-shaped rotating arm 002 on the upper surface of the workbench 001, a servo motor 007 is arranged at the lower end of a vertical rod of the L-shaped rotating arm 002 below the workbench 001, an output shaft of the servo motor 007 is connected with the L-shaped rotating arm 002 through a coupler, a hollow groove is formed in a cross rod part of the L-shaped rotating arm 002, a horizontal limiting slide rod 008 is fixedly arranged in the hollow groove, a slider 009 is movably arranged on the horizontal limiting slide rod 008, a winding machine 0010 is fixedly arranged on both sides of the upper surface of the cross rod part of the L-shaped rotating arm 002, and both sides of the slider 009 are, an electric telescopic rod 0011 is connected below the sliding block 009, an electromagnet sucking disc 0012 is fixedly connected below the telescopic end of the electric telescopic rod 0011, and a central processor 0013 is arranged inside a vertical rod of the L-shaped rotating arm 002; an electric heating device 0014 is arranged on the lower surface of the workbench 001 and below the hollow drying basket 005, and a blower 0015 is further arranged below the electric heating device 0014; the upper surface and the lower surface of the workbench 001 are provided with a plurality of communicated air holes which are all positioned right above the electric heating device 0014; an elastic foam pad 0016 is attached to the bottom in a cleaning pool of the ultrasonic cleaning machine 004; the inner walls of the two sides of the hollow groove are connected with fixed pulleys through connecting strips, and pull ropes on the two sides of the sliding block 009 pass through the fixed pulleys on the two sides respectively and then are connected with output shafts of the winding machines 0010 on the two sides; central processing unit 0013 keeps electric connection through flexible electric wire and electric telescopic handle 0011 and electro-magnet sucking disc 0012 to central processing unit 0013 all keeps electric connection through built-in circuit and ultrasonic cleaner 004, servo motor 007, rolling machine 0010, electro-thermal device 0014 and air-blower 0015.
A coated workpiece is produced by the PVD vacuum coating process.
Compared with the prior art, the invention has the outstanding and beneficial technical effects that:
1. the coating nozzle carries out evaporation sputtering coating on a cutter hung on a cutter hanging frame arranged in an inner ring channel of the annular up-and-down moving pipe, and an electric telescopic rod vertically and fixedly arranged at the bottom of the inner wall of the vacuum coating furnace body enables the annular up-and-down moving pipe to move up and down through expansion and contraction, so that all the cutters can be uniformly coated;
2. move about the pipe surface about with the annular and be provided with the pulley to set up the vertical bar groove unanimous with pulley quantity at vacuum coating furnace body inner wall, locate vertical bar groove with pulley roll card, can also effectively reduce the consume when stable.
3. The surface of the inner wall of the outer housing is fixedly provided with the plurality of muffler pipes, so that noise can be absorbed and effectively reduced, the noise generated by the vacuum air pump in the working process cannot interfere with workers in a factory, and the working environment is improved;
4. the spring is fixedly welded on the inner wall, far away from the vacuum tank, of the rectangular hollow column, the ball is fixedly welded at one end of the spring and is in a vibrating state during the operation of the whole device, and therefore the ball can continuously hit the surface of the vacuum tank, the internal stress of the vacuum tank is eliminated in a hitting physical mode, and the bursting risk is reduced.
5. The cutter is adsorbed by the magnetic state of the on-off state of the electromagnet, the cutter does not need to be placed and fished manually, the risk of scratching the skin when the cutter is fished is avoided, and the working efficiency is obviously improved by automatically cleaning the cutter;
6. the electric heating device works to enable ambient air to be rapidly heated, the air blower mounted below the electric heating device dries the cutter stored in the basket through the air vents in the workbench for hot air to carry out rapid drying, and drying efficiency is improved.
Drawings
FIG. 1 is a schematic view of the vacuum coating furnace according to the present invention.
FIG. 2 is a schematic top view of the up-down moving pipe.
Fig. 3 is a schematic view of a cross support frame structure on a telescopic pipe.
Fig. 4 is a schematic structural diagram of the vacuum extractor of the present invention.
Fig. 5 is an enlarged structure diagram of a region a in fig. 4.
Fig. 6 is an enlarged structural view of an area B in fig. 4.
FIG. 7 is a schematic view of the ultrasonic cleaning apparatus according to the present invention.
Fig. 8 is an enlarged structure diagram of the area C in fig. 7.
FIG. 9 is a schematic top view of the ultrasonic cleaning apparatus of the present invention.
Reference numerals: 1. a vacuum coating furnace body; 2. supporting legs; 3. an annular up-and-down moving pipe; 4. coating a film spray head; 5. a pulley; 6. an electric telescopic rod; 7. a film material threaded joint; 8. a one-way valve; 9. a telescopic pipe; 10. An air evacuation tube; 11. an air pump; 12. a cross bracing frame; 13. a tool hanger;
01. a substrate; 02. an outer casing; 03. a vacuum air pump; 04. a vacuum tank; 05. an inlet of a vacuum tank; 06. A gas discharge port; 07. a pressure gauge; 08. an internal stress relief assembly; 081. a spring; 082. knocking the ball; 09. A muffler pipe; 010. a base plate; 011. a traveling wheel; 012. an electric telescopic rod; 013. pasting a floor;
001. a work table; 002. an L-shaped rotating arm; 003. a carrying plate to be cleaned; 004. an ultrasonic cleaning machine; 005. Hollowing out the airing basket; 006. a finished product carrying tray; 007. a servo motor; 008. a horizontal limiting slide bar; 009. A slider; 0010. a winding machine; 0011. an electric telescopic rod; 0012. an electromagnet chuck; 0013. a central processing unit; 0014. an electric heating device; 0015. a blower; 0016. an elastic foam pad.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present invention without any creative effort belong to the protection scope of the present invention;
the embodiment provides a PVD vacuum coating process, which comprises the following steps:
the method comprises the following steps: treating the surface of the base material; wiping and cleaning the surface of the base material, and performing oil removal and dust removal treatment; the tidiness and the dryness of the base material are ensured;
step two: drying the base material; coating oil on the surface of the base material, and then drying at the temperature of 60-70 ℃ for 2 hours;
step three: coating; placing the substrate in the vacuum coating furnace, vacuumizing the vacuum coating furnace by a vacuumizing device, and starting coating by the vacuum coating furnace after the vacuum degree meets the requirement;
the invention provides a vacuum coating furnace as shown in figures 1-3, which comprises a vacuum coating furnace body 1 as shown in figure 1, wherein supporting legs 2 are fixedly welded on two sides of the lower surface of the vacuum coating furnace body 1, an annular up-and-down moving pipe 3 movably arranged in the vacuum coating furnace body 1 can move up and down, the annular up-and-down moving pipe 3 is hollow, a film material threaded joint 7 is installed on one side above the vacuum coating furnace body 1, the film material threaded joint 7 is connected into a device for conveying liquid high-pressure film materials, a check valve 8 is connected below the film material threaded joint 7 and positioned in the vacuum coating furnace body 1, the check valve 8 can prevent backflow, and the check valve 8 conveys liquid high-pressure grinding materials into the annular up-and-down moving pipe 3 through a telescopic pipe 9;
an air evacuation pipe 10 is fixed on the inner bottom wall of the support leg 2, the air evacuation pipe 10 is communicated with an air suction pump 11 arranged on the outer surface of the vacuum coating furnace body 1 through a pipeline, the air suction pump 11 sucks air into the vacuum coating furnace body 1 through the air evacuation pipe 10 to achieve a negative pressure state, and a plurality of cutter hangers 13 are fixedly welded in the vacuum coating furnace body 1 vertically to hang cutters to be coated;
as shown in fig. 2, a plurality of coating nozzles 4 are uniformly installed on the inner wall of the inner ring of the annular up-down moving pipe 3, four pulleys 5 are arranged on the surface of the annular up-down moving pipe 3, vertical strip-shaped grooves with the number consistent with that of the pulleys 5 are formed in the inner wall of the vacuum coating furnace body 1, and the pulleys 5 are rotatably clamped in the vertical strip-shaped grooves, so that loss can be effectively reduced while stability is achieved;
the coating nozzle 4 carries out evaporation sputtering coating on a cutter hung on a cutter hanger 13 arranged in an inner ring channel of the annular up-down moving pipe 3, an electric telescopic rod 6 vertically and fixedly installed at the bottom of the inner wall of the vacuum coating furnace body 1 enables the annular up-down moving pipe 3 to move up and down through expansion, so that all the cutters can be uniformly coated, wherein the electric telescopic rods 6 are arranged into two parts, and the two electric telescopic rods 6 are centrosymmetric about a vertical central axis of the vacuum coating furnace body 1, so that the up-down movement stress of the annular up-down moving pipe 3 is uniform;
according to another embodiment of the present invention, as shown in fig. 3, a plurality of cross supports 12 are uniformly arranged in the passage of the extension tube 9, and the distance between any two cross supports 12 is three centimeters, so that the extension tube 9 can be more durable and sturdy.
Wherein fixed mounting is provided with the filter screen in membrane material screwed joint 7, and the impurity in the liquid high pressure membrane material of filter screen can the separation is with the detachable installation of filter screen in membrane material screwed joint 7's passageway, the maintenance in the later stage of being convenient for.
This practical theory of operation:
the equipment for connecting the film material threaded joint 7 into the conveying liquid high-pressure film material is characterized in that a one-way valve 8 is connected to the position, below the film material threaded joint 7, inside the vacuum coating furnace body 1, of the one-way valve 8, the counter flow can be prevented, the one-way valve 8 conveys the liquid high-pressure film material to the annular up-and-down moving pipe 3 through a telescopic pipe 9, a coating nozzle 4 carries out evaporation sputtering coating on a cutter hung on a cutter hanging frame 13 arranged in an inner ring channel of the annular up-and-down moving pipe 3, and an electric telescopic rod 6 of the vertical fixed installation at the bottom of the inner wall of the vacuum coating furnace body 1 enables the annular up-and-down moving pipe 3 to move up.
The invention provides a vacuumizing device as shown in figures 4-6, which comprises a substrate 01, an outer cover shell 02 is arranged above the substrate 01, a vacuum air pump 03 is fixedly arranged on the upper surface of the substrate 01, the vacuum air pump 03 firstly sucks air in a vacuum tank 04 with one side communicated with the upper surface of the substrate 04 when working, a vacuum tank inlet 05 of the vacuum tank 04 is hermetically communicated with an external large vacuum chamber for vacuum coating, the pressure state of the vacuum tank 04 can reflect the pressure state of the large vacuum chamber, a detection end of a pressure gauge 07 is hermetically inserted into the vacuum tank 04, and real-time data can be checked through the pressure gauge 07.
Wherein the air outlet seat of vacuum air pump 03 passes through gas discharge port 06 with gas discharge external world, can vibrate when vacuum air pump 03 works, the inner wall fixed surface of housing 02 is provided with a plurality of muffler pipe 09 and can absorb and effectually fall the noise, muffler pipe 09's surface is provided with the even through-hole of a plurality of distributions, muffler pipe 09's inside is provided with noise cancelling structure, the noise is effectively fallen the noise in the noise cancelling structure of muffler pipe 09 inside, noise cancelling structure adopts the structure of aperture muffler among the prior art.
The surface of the two sides of the vacuum tank 04 is fixedly welded with a plurality of internal stress eliminating assemblies 08, the outside of each internal stress eliminating assembly 08 is a rectangular hollow column, the inner wall of the rectangular hollow column far away from the vacuum tank 04 is fixedly welded with a spring 081, one end of the spring 081 is fixedly welded with a ball 082, and the whole device is in a vibrating state during working, so that the ball 082 can continuously impact the surface of the vacuum tank 04, and the internal stress of the vacuum tank 04 is eliminated in a physical impacting mode.
According to another embodiment of the present invention, a bottom plate 010 is fixedly welded to the lower surface of the base plate 01 through a connecting rod, and a traveling wheel 011 is fixedly installed on the lower surface of the bottom plate 010 for convenient movement of the device.
Further, be located the top both sides installation electric telescopic handle 012 of bottom plate 010 at the lower surface of base plate 01, extension through the flexible end of electric telescopic handle 012 is laminated with the wainscot 013 of its tip with ground, the connecting rod is located the upper surface position between two parties of bottom plate 010, the electric telescopic handle 012 of bottom plate 010 top both sides is symmetrical about the connecting rod, thereby support whole device, make it stably difficult to remove, when needs remove, shrink through electric telescopic handle 012 and carry out the resultation to the wainscot 013 in the recess that the bottom plate 010 lower surface was seted up.
Pulleys are fixedly welded on two end faces of the floor tile 013, the wheel faces of the pulleys are in rolling fit with the inner side walls of the grooves, and friction loss is reduced in the process that the floor tile 013 enters and exits the grooves.
This practical theory of operation:
when the vacuum air pump 03 works, the vacuum air pump can vibrate to generate strong noise, the surface of the inner wall of the outer housing 02 is fixedly provided with a plurality of silencing pipes 09 which can absorb and effectively reduce the noise, the surface of each silencing pipe 09 is provided with a plurality of through holes which are uniformly distributed, a silencing structure is arranged inside each silencing pipe 09, the silencing structure adopts a structure of a small-hole silencer in the prior art, the noise is effectively reduced in the silencing structure inside each silencing pipe 09, the surfaces of the two sides of the vacuum tank 04 are fixedly welded with a plurality of internal stress eliminating assemblies 08, the external part of each internal stress eliminating assembly 08 is a rectangular hollow column, the inner wall of the rectangular hollow column, far away from the vacuum tank 04, is fixedly welded with a spring 081, one end of the spring 081 is fixedly welded with a collision ball 082, the whole device is in a vibrating state during working, and then the collision ball 082 can continuously hit the surface of the, the internal stress of the vacuum tank 04 is eliminated by a physical way of striking.
Step four: cleaning; putting the workpiece subjected to film coating into an ultrasonic cleaning device for cleaning;
the invention provides an ultrasonic cleaning device as shown in figures 7-9, which comprises a workbench 001, wherein an output shaft of a servo motor 007 arranged below the workbench 001 is connected with an L-shaped rotating arm 002 through a coupler, and the output shaft of the servo motor 007 controls the L-shaped rotating arm 002 to rotate;
the inside hollow groove that has seted up of horizontal pole part of L type rocking arm 002, fixed mounting has horizontal spacing slide bar 008 in the hollow groove, activity setting can gliding sliding block 009 on horizontal spacing slide bar 008, the both sides inner wall of hollow groove all is connected with the fixed pulley through the connecting strip, the stay cord of sliding block 009 both sides passes respectively behind the fixed pulley of both sides and is connected with the output shaft of both sides rolling machine 0010, the output shaft of L type rocking arm left side rolling machine 0010 rotates, its stay cord of connecting then stimulates sliding block 009 and moves left, the output shaft of L type rocking arm right side rolling machine 0010 rotates, its stay cord of connecting then stimulates sliding block 009 and moves right.
Wherein the below at sliding block 009 is connected with electric telescopic handle 0011, and electric telescopic handle 0011's the flexible electro-magnet sucking disc 0012 that holds the below has the characteristics of circular telegram has magnetism outage nonmagnetic nature.
The central processing unit 0013 is electrically connected with the electric telescopic rod 0011 and the electromagnet sucker 0012 through a telescopic wire, the central processing unit 0013 is electrically connected with the ultrasonic cleaning machine 004, the servo motor 007, the winding machine 0010, the electric heating device 0014 and the air blower 0015 through built-in circuits, instructions are transmitted through a control panel, and under the overall arrangement processing of the central processing unit 0013, the L-shaped rotating arm 002 rotates to the position above the left object carrying plate 003 to be cleaned;
then the position of an electric telescopic rod 0011 is adjusted through a winding machine 0010, an electromagnet sucking disc 0012 is located above the electric telescopic rod 0011, the electric telescopic rod 0011 is extended downwards conveniently to enable the electromagnet sucking disc 0012 to descend slowly, when the electromagnet sucking disc 0012 descends to a certain position, the electromagnet sucking disc 0012 is electrified to be magnetic, a cutter in a carrier disc 003 to be cleaned can be adsorbed, then the cutter is lifted and turned, the cutter is placed above a cleaning pool of an ultrasonic cleaning machine 004, the electromagnet sucking disc 0012 is powered off, the cutter falls into the cleaning pool to be cleaned by ultrasonic, after cleaning is finished, the cutter is adsorbed by the electromagnet sucking disc 0012 and placed in a hollow drying basket 005 to be dried, and after the cleaning is finished, the cutter is placed in a finished carrier disc according to the same operation;
according to another embodiment of the invention, an electric heating device 0014 is arranged at a corresponding position below the hollow drying basket 005 on the lower surface of the workbench 001, the electric heating device 0014 works to rapidly heat ambient air, and a blower 0015 arranged below the electric heating device 0014 rapidly dries the cutter stored in the hollow drying basket 5 through a vent hole on the workbench 1, so that the drying efficiency is improved.
Bottom laminating sets up elastic foam pad 0016 in ultrasonic cleaner 004's washing pond, when the cutter dropped, can not destroy the inner wall that washs the pond.
This practical theory of operation:
the instruction is transmitted by the control panel, under the overall process of the central processing unit 0013, the L-shaped rotating arm 002 rotates to the upper part of the object carrying plate 003 to be cleaned on the left side, then the position of the electric telescopic rod 0011 is adjusted through a winding machine 0010, so that the electromagnet sucking disc 0012 is positioned above the electric telescopic rod 0011, the electric telescopic rod 0011 extends downwards along with the hand to enable the electromagnet sucking disc 0012 to descend slowly, when the electromagnet sucking disc 0012 descends to a certain position, the electromagnet 0012 is electrified to have magnetism, so that the cutter in the object carrying disc 003 to be cleaned can be adsorbed, then, the cutter is lifted and turned, the cutter is placed above a cleaning pool of the ultrasonic cleaning machine 004, cut off the power supply to electromagnet sucking disc 0012, the cutter drops and carries out ultrasonic cleaning in wasing the pond, and the back rethread electromagnet sucking disc 0012 that finishes washs adsorbs to place it in fretwork dries basket 5 and dries it, puts in finished product year thing dish according to same operation again after accomplishing.
Step five: drying; and drying and packaging the cleaned workpiece.
A coated workpiece produced by the PDV vacuum coating process is characterized in that a vacuum-pumping device is used for carrying out vacuum-pumping treatment on a vacuum coating furnace, the coated workpiece is coated in the vacuum coating furnace, and after coating is finished, the coated workpiece is placed in an ultrasonic cleaning device for cleaning; the film-coated workpiece comprises a knife, fork and spoon of tableware, a door handle and the like.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like, refer to orientations or positional relationships that are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships that the products of the present invention are conventionally placed in use, or the orientations or positional relationships that are conventionally understood by those skilled in the art, and are used for convenience in describing and simplifying the description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated.
The above embodiments are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby, so: all equivalent changes made according to the structure, shape and principle of the invention are covered by the protection scope of the invention.
Claims (5)
1. A PVD vacuum coating process is characterized in that: the method comprises the following steps:
the method comprises the following steps: treating the surface of the base material; wiping and cleaning the surface of the base material, and performing oil removal and dust removal treatment; the tidiness and the dryness of the base material are ensured;
step two: drying the base material; coating oil on the surface of the base material, and then drying at the temperature of 60-70 ℃ for 2 hours;
step three: coating; placing the substrate in the vacuum coating furnace, vacuumizing the vacuum coating furnace by a vacuumizing device, and starting coating by the vacuum coating furnace after the vacuum degree meets the requirement;
step four: cleaning; putting the workpiece subjected to film coating into an ultrasonic cleaning device for cleaning;
step five: drying; and drying and packaging the cleaned workpiece.
2. A PVD vacuum coating process according to claim 1, characterized by: the vacuum coating furnace comprises a vacuum coating furnace body (1), supporting legs (2) are fixedly welded on two sides of the lower surface of the vacuum coating furnace body (1), an annular up-and-down moving pipe (3) is movably arranged in the vacuum coating furnace body (1), a plurality of coating nozzles (4) are uniformly distributed on the inner wall of an inner ring of the annular up-and-down moving pipe (3), a plurality of pulleys (5) which are uniformly distributed are fixed on the surface of an outer ring of the annular up-and-down moving pipe (3), an electric telescopic rod (6) is vertically and fixedly installed at the bottom of the inner wall of the vacuum coating furnace body (1), the upper part of the electric telescopic rod (6) is fixedly connected with the lower surface of the annular up-and-down moving pipe (3), a film material threaded joint (7) is installed on one side of the upper part of the vacuum coating furnace body (1), and a check valve (8), the one-way valve (8) is communicated with an air inlet on the surface of the annular up-and-down moving pipe (3) in a sealing way through a telescopic pipe (9), an air evacuation pipe (10) is fixed on the inner bottom wall of the supporting leg (2), the air evacuation pipe (10) is communicated with an air suction pump (11) arranged on the outer side surface of the vacuum coating furnace body (1) through a pipeline, and a plurality of cutter hangers (13) are vertically and fixedly welded in the vacuum coating furnace body (1); a filter screen is fixedly arranged in the film material threaded joint (7), and the filter screen is detachably arranged in a channel of the film material threaded joint (7); at least four pulleys (5) are arranged on the surface of the annular up-and-down moving pipe (3), vertical strip-shaped grooves with the number consistent with that of the pulleys (5) are formed in the inner wall of the vacuum coating furnace body (1), and the pulleys (5) are clamped in the vertical strip-shaped grooves in a rolling mode; a plurality of crossed support frames (12) are uniformly arranged in the channel of the extension tube (9), and the distance between any two crossed support frames (12) is three centimeters; the number of the electric telescopic rods (6) is two, and the two electric telescopic rods (6) are centrosymmetric about a vertical central axis of the vacuum coating furnace body (1); the cutter hangers (13) are all arranged in the inner ring channel of the annular up-and-down moving pipe (3).
3. A PVD vacuum coating process according to claim 01, characterized by: the vacuumizing device comprises a substrate (01), an outer housing (02) is installed above the substrate (01), a vacuum air pump (03) is fixedly installed on the upper surface of the substrate (01), one side of the vacuum air pump (03) is communicated with a vacuum tank (04), the upper side of the vacuum tank (04) is connected with a vacuum tank inlet (05) through a pipeline, an air outlet seat of the vacuum air pump (03) is communicated with an air outlet (06) through a pipeline, a pressure gauge (07) is arranged on the upper surface of the outer housing (02), a detection end of the pressure gauge (07) is hermetically inserted into the vacuum tank (04), a plurality of internal stress eliminating assemblies (08) are fixedly welded on the surfaces of two sides of the vacuum tank (04), a plurality of internal stress eliminating pipes (09) are fixedly arranged on the surface of the inner wall of the outer housing (02), each internal stress eliminating assembly (08) comprises a rectangular hollow column, a spring (081) is fixedly welded on, a striking ball (082) is fixedly welded at one end of the spring (081); the lower surface of the base plate (01) is fixedly welded with a bottom plate (010) through a connecting rod, and a plurality of traveling wheels (011) are fixedly installed on the lower surface of the bottom plate (010); electric telescopic rods (012) are fixed on two sides of the lower surface of the base plate (01) above the bottom plate (010), grooves are formed in two sides of the lower surface of the bottom plate (010), and a floor pasting plate (013) is fixedly welded after the telescopic ends of the electric telescopic rods (012) penetrate through the grooves in the bottom plate (010); pulleys are fixedly welded on two end faces of the floor pasting board (013), and the wheel faces of the pulleys are in rolling fit with the inner side walls of the grooves; the connecting rod is positioned in the middle of the upper surface of the bottom plate (010), and the electric telescopic rods (012) on the two sides above the bottom plate (010) are symmetrical relative to the connecting rod; the surface of the muffling tube (09) is provided with a plurality of uniformly distributed through holes, and the muffling structure is arranged inside the muffling tube (09).
4. A PVD vacuum coating process according to claim 1, characterized by: the ultrasonic cleaning device comprises a workbench (001), an L-shaped rotating arm (002) is rotatably arranged on the upper surface of the workbench (001), an object carrying disc (003) to be cleaned is arranged on the left side of the upper surface of the workbench (001), an ultrasonic cleaning machine (004), a hollow drying basket (005) and a finished product carrying disc (006) are sequentially arranged on the upper surface of the workbench (001) close to the right side of the L-shaped rotating arm (002), a servo motor (007) is arranged at the lower end of a vertical rod of the L-shaped rotating arm (002) below the workbench (001), an output shaft of the servo motor (007) is connected with the L-shaped rotating arm (002) through a coupler, a hollow groove is formed in the transverse rod part of the L-shaped rotating arm (002), a horizontal limiting sliding rod (008) is fixedly arranged in the hollow groove, a sliding block (009) is movably slid on the horizontal limiting sliding rod (008), winding machines (0010) are fixedly arranged on two sides of the upper surface of the transverse rod, two sides of a sliding block (009) are respectively connected with output shafts of two-side winding machines (0010) through pull ropes, an electric telescopic rod (0011) is connected below the sliding block (009), an electromagnet sucking disc (0012) is fixedly connected below the telescopic end of the electric telescopic rod (0011), and a central processor (0013) is arranged inside a vertical rod of an L-shaped rotating arm (002); an electric heating device (0014) is arranged on the lower surface of the workbench (001) and is positioned at a corresponding position below the hollowed airing basket (005), and an air blower (0015) is further arranged below the electric heating device (0014); the upper surface and the lower surface of the workbench (001) are provided with a plurality of communicated air holes, and the air holes are all positioned right above the electric heating device (0014); an elastic foam pad (0016) is attached to the bottom in a cleaning pool of the ultrasonic cleaning machine (004); the inner walls of the two sides of the hollow groove are connected with fixed pulleys through connecting strips, and pull ropes on the two sides of the sliding block (009) respectively penetrate through the fixed pulleys on the two sides and then are connected with output shafts of winding machines (0010) on the two sides; central processing unit (0013) keeps electric connection through flexible electric wire and electric telescopic handle (0011) and electro-magnet sucking disc (0012) to central processing unit (0013) all keeps electric connection through built-in circuit and ultrasonic cleaner (004), servo motor (007), rolling machine (0010), electric heating device (0014) and air-blower (0015).
5. A coated workpiece, characterized in that: produced by a PVD vacuum coating process according to claim 1.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111235541A (en) * | 2020-03-16 | 2020-06-05 | 湖南六方晶科技有限责任公司 | Cutter rotating stand for preparing metal oxide coating by PVD (physical vapor deposition) method |
| CN112013137A (en) * | 2020-08-11 | 2020-12-01 | 武汉摩擦力信息技术有限公司 | High vacuum one-way valve |
| CN113445001A (en) * | 2021-07-02 | 2021-09-28 | 扬州市普锐泰新材料有限公司 | Wear-resistant noise-reducing composite PVD coating process for engine valve |
| CN113652653A (en) * | 2021-07-22 | 2021-11-16 | 深圳源国光子通信有限公司 | Method for coating cavity surface of semiconductor laser |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201470638U (en) * | 2009-09-02 | 2010-05-19 | 深圳市科达超声自动化设备有限公司 | Cleaning machine before vacuum coating |
| CN101857949A (en) * | 2010-06-24 | 2010-10-13 | 吴睿恩 | PVD vacuum ion plating method |
| CN102585157A (en) * | 2012-03-13 | 2012-07-18 | 广东深展实业有限公司 | Ultraviolet light polymerization polyfunctionality polyurethane acrylate vacuum coating surface coating resin |
-
2019
- 2019-09-23 CN CN201910899775.XA patent/CN110616411B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201470638U (en) * | 2009-09-02 | 2010-05-19 | 深圳市科达超声自动化设备有限公司 | Cleaning machine before vacuum coating |
| CN101857949A (en) * | 2010-06-24 | 2010-10-13 | 吴睿恩 | PVD vacuum ion plating method |
| CN102585157A (en) * | 2012-03-13 | 2012-07-18 | 广东深展实业有限公司 | Ultraviolet light polymerization polyfunctionality polyurethane acrylate vacuum coating surface coating resin |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111235541A (en) * | 2020-03-16 | 2020-06-05 | 湖南六方晶科技有限责任公司 | Cutter rotating stand for preparing metal oxide coating by PVD (physical vapor deposition) method |
| CN111235541B (en) * | 2020-03-16 | 2022-10-14 | 湖南六方晶科技有限责任公司 | Cutter rotating stand for preparing metal oxide coating by PVD (physical vapor deposition) method |
| CN112013137A (en) * | 2020-08-11 | 2020-12-01 | 武汉摩擦力信息技术有限公司 | High vacuum one-way valve |
| CN112013137B (en) * | 2020-08-11 | 2022-05-13 | 武汉摩擦力信息技术有限公司 | High vacuum one-way valve |
| CN113445001A (en) * | 2021-07-02 | 2021-09-28 | 扬州市普锐泰新材料有限公司 | Wear-resistant noise-reducing composite PVD coating process for engine valve |
| CN113652653A (en) * | 2021-07-22 | 2021-11-16 | 深圳源国光子通信有限公司 | Method for coating cavity surface of semiconductor laser |
| CN115572953A (en) * | 2022-10-24 | 2023-01-06 | 苏州思萃热控材料科技有限公司 | Magnetron sputtering device for diamond metal-based high-thermal-conductivity composite material |
| CN115572953B (en) * | 2022-10-24 | 2024-04-26 | 苏州思萃热控材料科技有限公司 | Magnetron sputtering device for diamond metal-based high-heat-conductivity composite material |
| CN117026196A (en) * | 2023-10-08 | 2023-11-10 | 泰州市长宏钛金科技有限公司 | Loading clamping tool for PVD coating |
| CN117026196B (en) * | 2023-10-08 | 2023-12-05 | 泰州市长宏钛金科技有限公司 | Loading clamping tool for PVD coating |
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