CN110608802A - Micro-channel plate solar blind ultraviolet band spectral sensitivity measuring device and method - Google Patents
Micro-channel plate solar blind ultraviolet band spectral sensitivity measuring device and method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
- G01J2001/161—Ratio method, i.e. Im/Ir
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Abstract
The invention discloses a micro-channel plate solar blind ultraviolet band spectral sensitivity measuring device and method. The device comprises an ultraviolet lamp, a monochromator, a diaphragm, an ultraviolet window, an ultraviolet cathode, MCP1, MCP2, an ammeter, a collector, a test power supply and a vacuum chamber. During measurement, an ultraviolet lamp emits ultraviolet light, the ultraviolet light is changed into monochromatic ultraviolet light through a monochromator, the monochromatic light passes through an ultraviolet window after passing through a diaphragm and enters a vacuum chamber, then the monochromatic light penetrates through an ultraviolet cathode window and reaches a gold film, the gold film is excited to emit photoelectrons, the photoelectrons move towards MCP1 under the action of an electric field and are subjected to MCP1 photoelectric conversion to generate photoelectrons, and the photoelectrons are subjected to cascade multiplication of MCP1 and MCP2 to output anode current. The invention respectively measures the anode current of the ultraviolet cathode and the anode current of the test sample, and obtains the spectral sensitivity of the solar blind ultraviolet band through calculation. The invention is beneficial to promoting the wide and deep application of the MCP ultraviolet imaging device in solar blind ultraviolet bands.
Description
Technical Field
The invention belongs to the field of vacuum photoelectric imaging devices, and particularly relates to a device and a method for measuring solar blind ultraviolet band spectral sensitivity of a microchannel plate.
Background
A microchannel Plate (MCP) is a large area array of Channel electron multipliers, which are made up of numerous hollow channels. Electrons entering the channel from the input end of the MCP are subjected to secondary electron multiplication in the channel, and then electrons multiplied by thousands or even ten thousand times are output from the output end, so that the multiplication of the number of the electrons is realized. Each channel of the MCP corresponds to a pixel, and thus the MCP is an electron multiplying imaging device.
The MCP has a function of performing photoelectric conversion on an ultraviolet image in addition to a function of electron multiplication imaging. By utilizing the photoelectric conversion characteristic of the MCP, an ultraviolet light image incident on an input end of the MCP can be converted into an electronic image, and the electronic image is subjected to MCP multiplication, fluorescent screen conversion, CDD receiving, display and the like, so that the imaging of the ultraviolet light image is finally realized.
Typical MCP uv imaging device structures include an input window, an MCP, a phosphor screen, a light cone, a CCD, and a display. The input window is used for transmitting ultraviolet light and is also used for vacuum sealing, because the MCP needs to work in a vacuum state; the light cone is used for transmitting an optical image generated by the fluorescent screen to a photosensitive surface of the CCD device; the CCD device is used for imaging again; the display is used for displaying and amplifying images. The MCP ultraviolet imaging device used on the ground adopts a quartz window or a sapphire window and a magnesium fluoride window, but the MCP ultraviolet imaging device used in the space does not need an input window.
Although the MCP ultraviolet imaging device has wider application in the solar blind ultraviolet band theoretically, due to the lack of a measuring device and a measuring method for scientifically measuring the spectral sensitivity of the MCP ultraviolet imaging device in the solar blind ultraviolet band, the research on the MCP photoelectric conversion in the industry is not sufficient, and the wide and deep application of the MCP ultraviolet imaging device in the solar blind ultraviolet band is limited.
Disclosure of Invention
Aiming at the technical problem, the invention provides a device and a method for measuring solar blind ultraviolet band spectral sensitivity of a microchannel plate, which aim to solve the problem of measuring solar blind ultraviolet band spectral sensitivity of MCP and strive to promote wide and deep application of MCP ultraviolet imaging devices in solar blind ultraviolet bands.
The device for measuring the solar blind ultraviolet band spectral sensitivity of the microchannel plate comprises: an ultraviolet lamp, a monochromator, a diaphragm, an ultraviolet window, an ultraviolet cathode, MCP1, MCP2, an ammeter, a collector, a test power supply and a vacuum chamber. Wherein, the ultraviolet lamp plays a role of providing ultraviolet light; the monochromator functions to provide monochromatic light; the diaphragm plays a role in limiting ultraviolet light beams and blocking stray light; the ultraviolet window plays the roles of transmitting ultraviolet light and vacuum sealing; the ultraviolet cathode plays a role in photoelectric conversion; MCP1 is a test sample and plays a role in photoelectric conversion; MCP2 acts as a current re-amplifier; the ammeter plays a role in measuring the anode current; the collector plays a role in collecting anode current; the test power supply plays a role in supplying power to the ultraviolet cathode, the MCP1, the MCP2 and the collector, establishes low-to-high potentials among the ultraviolet cathode, the input end of the MCP1, the output end of the MCP2 and the collector, provides an electric field for photoelectron motion emitted by the ultraviolet cathode, and simultaneously provides required working current for the ultraviolet cathode, the MCP1, the MCP2 and the collector; the test power supply comprises 4 paths of outputs including V1, V2, V3 and V4, and the outputs are respectively connected with the ultraviolet cathode, the input end of the MCP1, the output end of the MCP2 and the collector; the output voltage of the V1 is grounded, and the output voltages of the V2, the V3 and the V4 are adjustable; the vacuum chamber functions to provide vacuum measurement conditions.
Further, the ultraviolet cathode comprises an ultraviolet cathode clamp, an ultraviolet cathode window and a gold film, the ultraviolet cathode clamp plays a role in installation, the ultraviolet cathode window and the gold film and conduction of the gold film, and the ultraviolet cathode window plays a role in supporting the gold film; the gold film realizes photoelectric conversion.
The device also comprises a manipulator which plays a role in moving the ultraviolet cathode clamp.
Also included is an MCP test fixture that functions to mount MCP1 and MCP2 and to turn on MCP1 inputs and MCP2 outputs, respectively.
The ultraviolet lamp power supply is used for supplying power to the ultraviolet lamp.
The vacuum wire leading column plays a role in conducting current inside and outside the vacuum chamber.
The working process of the micro-channel plate solar blind ultraviolet band spectral sensitivity measuring device provided by the invention is as follows:
the ultraviolet lamp emits ultraviolet light, the ultraviolet light is converted into monochromatic ultraviolet light through the monochromator, the monochromatic light passes through the ultraviolet window after passing through the diaphragm and enters the vacuum chamber, then the monochromatic light penetrates through the ultraviolet cathode window to reach the gold film, the gold film is excited to emit photoelectrons, the photoelectrons move towards MCP1 under the action of an electric field and are subjected to photoelectric conversion through MCP1 to generate the photoelectrons, the photoelectrons are multiplied through cascade connection of MCP1 and MCP2, anode current with high enough output intensity is output, the current is collected by the collector and finally flows back to a working power supply, and a complete loop is formed.
The method for measuring the solar blind ultraviolet band spectral sensitivity of the microchannel plate comprises the following steps:
1) preparation phase
Opening the vacuum chamber, and installing an ultraviolet cathode (comprising an ultraviolet cathode window and a gold film) on the cathode test fixture; during installation, one end of the gold film of the ultraviolet cathode is opposite to the MCP1, and one end of the ultraviolet cathode window is opposite to the ultraviolet lamp;
then mounting MCP1 and MCP2 on the MCP test fixture; MCP2 is the same type as MCP 1; when the MCP is installed, two pieces of MCP are stacked together in sequence, namely the output end of the MCP1 is attached to the input end of the MCP2, so that the input end of the MCP1 is over against the ultraviolet cathode, and the output end of the MCP2 is over against the collector;
after the ultraviolet cathode and the MCP are installed, closing the vacuum chamber and starting a vacuum pump;
when the vacuum degree of the vacuum chamber reaches the requirement, starting to perform the next step;
2) MCP aging Process
First removing the monochromator from the optical path of the test device;
then, turning on a power supply of the ultraviolet lamp to enable the ultraviolet lamp to work normally;
then the test power supply is turned on, and each path of output voltage of the test power supply is adjusted to a proper voltage value;
when the ultraviolet cathode emits photoelectrons, the MCP1, the MCP2 and the collector work normally, current display is checked from an ammeter, and when the current is stable, aging is finished;
3) anode current testing process of ultraviolet cathode
The process is the anode current I of the ultraviolet cathode1(lambda) test, I1(λ) is the anodic current corresponding to the ultraviolet cathode photoemission at wavelength λ;
firstly, setting the wavelength of output radiation of a monochromator as lambda;
then adjusting the output voltage of each path of the test power supply to a proper voltage value;
when the ultraviolet cathode, the MCP1, the MCP2 and the collector normally work and an ammeter presents a stable current value, the current is I1(λ);
4) Anode current testing process of test sample
The procedure is that the anode current I of the test sample MCP12(lambda) test, I2(λ) is the anode current corresponding to the photoemission of MCP1 at wavelength λ;
firstly, removing the light path of the ultraviolet cathode by using a manipulator;
then adjusting the output voltage of each path of the test power supply to a proper voltage value;
when the ammeter shows a stable current value after the MCP1, the MCP2 and the collector work normally, the current is I2(λ);
5) Calculating spectral sensitivity
The spectral sensitivity R (λ) of MCP1 was calculated according to the following formula:
in the formula: r (λ) is the spectral sensitivity of the MCP at wavelength λ, R0(λ) is the spectral response of the ultraviolet cathode at wavelength λ.
The testing principle of the device and the method for measuring the solar-blind ultraviolet band spectral sensitivity of the microchannel plate takes the spectral sensitivity of an ultraviolet cathode (gold film cathode) as reference, and amplifies photocurrent emitted by MCP1 by using cascade multiplication of two-stage MCP, thereby measuring the spectral sensitivity of MCP 1. The reason why two MCPs are used for cascade multiplication to amplify photocurrent is that MCP1 has low spectral sensitivity and generates a low photocurrent. In order to improve the measurement accuracy of the photocurrent, a two-stage MCP multiplication mode is adopted for current amplification.
The device and the method for measuring solar blind ultraviolet band spectral sensitivity of the microchannel plate have the beneficial effects that:
due to the fact that spectral sensitivity data of the MCP in the solar blind ultraviolet band are obtained, people can know the photoelectric effect characteristics of the MCP in the solar blind ultraviolet band, and the MCP solar blind ultraviolet detector is greatly popularized and applied in the aspects of ultraviolet radiation intensity calibration, fingerprint identification, ultraviolet communication and the like.
Drawings
FIG. 1 is a schematic diagram of the composition of an MCP ultraviolet imaging device in the prior art
Fig. 2 is a schematic diagram of a micro-channel plate solar blind ultraviolet band spectral sensitivity measuring device and a measuring method of the invention, wherein: 1. an input window; 2. an ultraviolet light image; 3. MCP; 4. outputting an electronic image; 5. a fluorescent screen; 6. a light cone; 7. a CCD device; 8. a display; 9. an ultraviolet lamp; 10. an ultraviolet lamp power supply; 11. a monochromator; 12. a diaphragm; 13. an ultraviolet light window; 14. ultraviolet light; 15. an ultraviolet cathode clamp; 16-1, ultraviolet cathode window; 16-2, gold film; 17. a manipulator; 18. photoelectrons; 19. MCP test fixture; 20-1, MCP 1; 20-2, MCP1 input; 20-3, an output of MCP 1; 21-1, MCP 2; 21-2, MCP2 input; 21-3, MCP2 output end; 22. anode current; 23. a collector; 24. a vacuum lead post; 25. a vacuum chamber; 26. an ammeter; 27. and testing the power supply.
Detailed Description
For the sake of simplicity, the following description will only use MCP spectral sensitivity measuring 260nm wavelength as a specific embodiment to describe in detail the micro-channel plate solar blind ultraviolet band spectral sensitivity measuring device and measuring method of the present invention, and as a person skilled in the art should understand that in the specific implementation, as long as the selected ultraviolet lamp and monochromator can cover the solar blind ultraviolet band, the measurement in the band can be realized and all have the same technical effect.
As shown in fig. 2, in the present embodiment:
the ultraviolet lamp was a laser pumped gas discharge lamp, model EQ-99X, manufactured by ENEREGTIQ corporation, usa.
The monochromator is a grating monochromator with the model of Omni-lambda-300, and the manufacturer is Beijing Tourglan optical instrument Limited.
The size of the diaphragm is phi 17 mm.
The ultraviolet cathode is manufactured by Beijing high-energy physical research and has the model number of AU-1.
The ultraviolet window is a quartz window, the model is CF50, and the diameter is phi 50 mm.
The ultraviolet cathode clamp, the MCP test clamp and the vacuum chamber are made of 304# stainless steel and are special self-made devices, wherein the size of an inner cavity of the vacuum chamber is phi 150mm multiplied by 200 mm.
The manipulator is a traditional bellows vacuum manipulator.
The vacuum lead post is a traditional ceramic insulation vacuum lead post.
The collection plate was a stainless steel plate with dimensions phi 18mm x 0.5 mm.
The ammeter is a KEITHLEY Pico-ampere meter with the model of 6487 and the manufacturer is Tektronix company in America.
The test power supply comprises 4 paths of outputs including V1, V2, V3 and V4, and the outputs are respectively connected with the ultraviolet cathode (gold film), the input end of the MCP1, the output end of the MCP2 and the collector. With the V1 output connected to ground; the output potential of the V2 is adjustable, the maximum potential is 100V, and the maximum current is 10 muA; the output potential of the V3 is adjustable, the maximum potential is 1700V, and the maximum current is 10 muA; the output potential of the V4 is adjustable, the maximum output is 1750V, and the maximum current is 10 muA.
Table 1 monochromator and ultraviolet cathode setup requirements and test power supply voltage value setup table in test process
In table 1: "x" indicates removal, "√ indicates addition and opening, and the voltage settings of V2, V3, and V4 are allowed to be set within a range of ± 10%.
The vacuum chamber functions to provide vacuum measurement conditions; the vacuum of the vacuum chamber is obtained by means of a vacuum aggregate of a conventional turbomolecular pump in combination with a mechanical pump.
The specific measurement method comprises the following steps:
1) preparation phase
The vacuum chamber was opened and the uv cathode was mounted on the cathode test fixture.
The ultraviolet cathode window is a fused quartz window, the diameter of the ultraviolet cathode window is phi 20mm, the thickness of the ultraviolet cathode window is 1mm, and the thickness of the gold film is 5 nm.
During installation, one end of the gold film of the ultraviolet cathode is opposite to the MCP1, and one end of the ultraviolet cathode window is opposite to the ultraviolet lamp.
MCP1 and MCP2 were then mounted on the MCP test fixture.
MCP used by a phi 18mm super-second-generation image intensifier is adopted as MCP, the diameter is phi 25mm, the thickness is 0.3mm, the aperture is phi 6 mu m, the model is phi 25/6-BM, and the manufacturer is North night vision technology corporation.
When the MCP is installed, the output end of the MCP1 and the input end of the MCP2 are stacked together, so that the input end of the MCP1 faces the ultraviolet cathode, and the output end of the MCP2 faces the collector.
After the ultraviolet cathode and the MCP are installed, the vacuum chamber is closed, and the vacuum pump is started to pump vacuum.
After 1.5 hours, the vacuum of the vacuum chamber reached 2.6X 10-5And (4) supporting, wherein the preparation phase is completed.
2) MCP aging Process
The monochromator is removed from the light path of the tester as shown in fig. 2.
And turning on the power supply of the gas discharge lamp to enable the gas discharge lamp to work normally.
And (3) turning on the test power supply, and respectively adjusting the output voltage of the test power supply according to the test power supply voltage value setting requirements of table 1 to enable the ultraviolet cathode, the MCP1, the MCP2 and the collector to normally work.
After 12 hours, the anode current stabilized to 7.3 μ A, at which point the aging process was complete, and the test power was turned off.
3) Anode current testing process of ultraviolet cathode
The monochromator was moved back into the optical path of the test apparatus and the output radiation wavelength of the monochromator was set to 260 nm.
Respectively adjusting the output voltage of the test power supply according to the test power supply voltage value setting requirements of Table 1 to ensure that the ultraviolet cathode, the MCP1, the MCP2 and the collector normally work, wherein the current value in the ammeter is 141nA at the moment, and the value is I1(260nm)。
And after the test is finished, the test power supply is turned off.
4) Anode current testing process of test sample
The ultraviolet cathode is removed from the optical path by a robot.
The wavelength of the output radiation of the monochromator was kept at 260 nm.
The test power supply output voltages are adjusted respectively according to the test power supply voltage value setting requirements of table 1.
After MCP1, MCP2 and the collector work normally, the current value in the ammeter is 124nA, and the value is I2(260nm)。
And after the test is finished, the test power supply is turned off.
5) Calculating spectral sensitivity
The spectral sensitivity R (λ) of MCP1 was calculated according to the following formula:
in the formula: r (λ) is the spectral sensitivity of the MCP at wavelength λ, R0(λ) is the spectral response of the ultraviolet cathode at wavelength λ.
R used in calculation0The (260nm) value was 1.34. mu.A/W, which was calibrated and supplied by the manufacturer of the UV cathode.
R (260nm) ═ 1.34 × (124 ÷ 141) ═ 1.18 μ a/W (2-digit decimal fraction retained).
Therefore, the spectral sensitivity R (260nm) of the test sample MCP1 was calculated to be 1.18 μ a/W at λ ═ 260 nm.
Claims (8)
1. The utility model provides a micro-channel plate solar blind ultraviolet band spectral sensitivity measuring device which characterized in that: comprises an ultraviolet lamp, a monochromator, a diaphragm, an ultraviolet window, an ultraviolet cathode, MCP1, MCP2, an ammeter, a collector, a test power supply and a vacuum chamber;
wherein: the ultraviolet lamp plays a role of providing ultraviolet light;
the monochromator functions to provide monochromatic light;
the diaphragm plays a role in limiting ultraviolet light beams and blocking stray light;
the ultraviolet window plays a role in transmitting ultraviolet light and performing vacuum sealing;
the ultraviolet cathode plays a role in photoelectric conversion;
the MCP1 is a test sample and plays a role in photoelectric conversion;
the MCP2 acts as a current re-amplifier;
the ammeter plays a role in measuring the anode current;
the test power supply plays a role in supplying power to the ultraviolet cathode, the MCP1, the MCP2 and the collector, establishes low-to-high potentials among the ultraviolet cathode, the input end of the MCP1, the output end of the MCP2 and the collector, provides an electric field for photoelectron motion emitted by the ultraviolet cathode, and simultaneously provides required working current for the ultraviolet cathode, the MCP1, the MCP2 and the collector;
the test power supply comprises 4 paths of outputs including V1, V2, V3 and V4, and the outputs are respectively connected with the ultraviolet cathode, the input end of the MCP1, the output end of the MCP2 and the collector; the output voltage of the V1 is grounded, and the output voltages of the V2, the V3 and the V4 are adjustable; the vacuum chamber functions to provide vacuum measurement conditions.
2. The spectral sensitivity measurement apparatus of claim 1, wherein:
the ultraviolet cathode comprises an ultraviolet cathode clamp, an ultraviolet cathode window and a gold film;
the ultraviolet cathode clamp plays a role in installation, an ultraviolet cathode window and a gold film and conducts the gold film;
the ultraviolet cathode window plays a role in supporting the gold film;
the gold film realizes photoelectric conversion.
3. The spectral sensitivity measurement apparatus according to claim 1 or 2, wherein:
the device also comprises a manipulator which plays a role in moving the ultraviolet cathode clamp.
4. The spectral sensitivity measurement apparatus according to claim 1 or 2, wherein:
also included is an MCP test fixture that functions to mount MCP1 and MCP2 and to turn on MCP1 inputs and MCP2 outputs, respectively.
5. The spectral sensitivity measurement apparatus according to claim 1 or 2, wherein:
the ultraviolet lamp power supply is used for supplying power to the ultraviolet lamp.
6. The spectral sensitivity measurement apparatus according to claim 1 or 2, wherein:
the vacuum wire leading column plays a role in conducting current inside and outside the vacuum chamber.
7. A method for measuring solar blind ultraviolet band spectral sensitivity of a microchannel plate is characterized by comprising the following steps:
1) preparation phase
Opening the vacuum chamber, and installing an ultraviolet cathode (comprising an ultraviolet cathode window and a gold film) on the cathode test fixture; during installation, one end of the gold film of the ultraviolet cathode is opposite to the MCP1, and one end of the ultraviolet cathode window is opposite to the ultraviolet lamp;
then mounting MCP1 and MCP2 on the MCP test fixture; MCP2 is the same type as MCP 1; when the MCP is installed, two pieces of MCP are stacked together in sequence, namely the output end of the MCP1 is attached to the input end of the MCP2, so that the input end of the MCP1 is over against the ultraviolet cathode, and the output end of the MCP2 is over against the collector;
after the ultraviolet cathode and the MCP are installed, closing the vacuum chamber and starting a vacuum pump;
when the vacuum degree of the vacuum chamber reaches the requirement, starting to perform the next step;
2) MCP aging Process
First removing the monochromator from the optical path of the test device;
then, turning on a power supply of the ultraviolet lamp to enable the ultraviolet lamp to work normally;
then the test power supply is turned on, and each path of output voltage of the test power supply is adjusted to a proper voltage value;
when the ultraviolet cathode emits photoelectrons, the MCP1, the MCP2 and the collector work normally, current display is checked from an ammeter, and when the current is stable, aging is finished;
3) anode current testing process of ultraviolet cathode
The process is the anode current I of the ultraviolet cathode1(lambda) test, I1(λ) is the anodic current corresponding to the ultraviolet cathode photoemission at wavelength λ;
firstly, setting the wavelength of output radiation of a monochromator as lambda;
then adjusting the output voltage of each path of the test power supply to a proper voltage value;
when the ultraviolet cathode, the MCP1, the MCP2 and the collector normally work and an ammeter presents a stable current value, the current is I1(λ);
4) Anode current testing process of test sample
The procedure is that the anode current I of the test sample MCP12(lambda) test, I2(λ) is the anode current corresponding to the photoemission of MCP1 at wavelength λ;
firstly, removing the light path of the ultraviolet cathode by using a manipulator;
then adjusting the output voltage of each path of the test power supply to a proper voltage value;
when the ammeter shows a stable current value after the MCP1, the MCP2 and the collector work normally, the current is I2(λ);
5) Calculating spectral sensitivity
The spectral sensitivity R (λ) of MCP1 was calculated according to the following formula:
in the formula: r (λ) is the spectral sensitivity of the MCP at wavelength λ, R0(λ) is the spectral response of the ultraviolet cathode at wavelength λ.
8. The method for measuring spectral sensitivity of claim 7, wherein the output voltage values of the test power supplies for each test run are in accordance with the table:
The setting is performed.
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