CN110607507A - Target binding detection system, target binding detection device and method - Google Patents
Target binding detection system, target binding detection device and method Download PDFInfo
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- CN110607507A CN110607507A CN201910675532.8A CN201910675532A CN110607507A CN 110607507 A CN110607507 A CN 110607507A CN 201910675532 A CN201910675532 A CN 201910675532A CN 110607507 A CN110607507 A CN 110607507A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F22/00—Methods or apparatus for measuring volume of fluids or fluent solid material, not otherwise provided for
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Abstract
The invention discloses a target binding detection system, a device and a method, wherein the device comprises a control unit, a conveying control unit and an anti-overflow unit, wherein the conveying control unit and the anti-overflow unit are connected with the control unit; the conveying control unit responds to a binding control instruction sent by the control unit to control the conveying device to convey the liquid binding material into the filling cavity from bottom to top; the anti-overflow unit detects whether the liquid level of the liquid binding material filled into the filling cavity rises to the plane of the highest target material, and generates an anti-overflow signal when the liquid level rises to the plane of the highest target material, so that the control unit responds to the anti-overflow signal to control the conveying control unit to stop driving the conveying device to convey the liquid binding material into the filling cavity. According to the invention, the binding material is introduced from bottom to top, so that the filling is uniform, and the waste of the binding filling material and the target pollution caused by the overflow of the filling liquid can be prevented while ensuring the sufficient binding.
Description
Technical Field
The invention relates to a target binding detection system, a target binding detection device and a target binding detection method.
Background
The target material is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering system, multi-arc ion plating system or other types of film coating systems under proper process conditions. There are two general types of targets: the utilization rate of the planar target and the rotary target is only 20-30%, so the rotary target gradually becomes a mainstream product in the industrial coating industry.
When the magnetron sputtering coating target is used, the target and a back tube need to be bound to meet the installation, electric conduction and heat dissipation requirements of production equipment, and indium or tin is used as a binding material in the most common binding method at present. Therefore, the binding technique of the target and the back tube becomes a key technique, and directly influences the normal use of the target.
In the process of binding the rotary target material and the back tube, the back tube is mostly vertically placed in the prior art, the tubular target material is sleeved on the stainless steel back tube from top to bottom, the stainless steel back tube and the single-section target material are heated, the melted binding material is respectively coated on the outer surface of the stainless steel back tube and the inner surface of the target material, then the stainless steel back tube and the single-section target material are heated in sections, the melted liquid binding material is filled into a gap between the target material and the stainless steel back tube, and then the stainless steel back tube and the target material are cooled to achieve the purpose of welding the target material and the stainless steel back tube into a whole. Repeating the steps, and welding a section of target material on the stainless steel back tube.
This method has the following disadvantages: (1) the binding between the rotary target and the back tube is the contact welding of the whole annular surface, so that bubbles and looseness are easily generated, and the efficiency of the back tube is reduced and even falls off; (2) the binding of the rotary target generally takes the rotary target and a back tube as a mould, and a metal layer which needs to be cast and molded between the target and the back tube is taken as a connecting layer, so that the longer the length of the rotary target is, the thinner the tube wall is, the more difficult the casting uniformity is to control, the lower the binding welding rate is, and the longer the binding of some targets is, the deformation can also occur; (3) generally, in order to ensure that the whole annular surface of the rotary target and the back tube is welded in a contact manner as much as possible, the binding material is continuously cast and overflows after reaching the highest target plane, so that the binding material is wasted, and the liquid overflows to pollute the target.
Disclosure of Invention
The invention aims to provide a target binding detection system, a target binding detection device and a target binding detection method, which can bind rotary targets, are suitable for rotary targets with various lengths, have good binding effect and solve the problems in the prior art.
In order to solve the technical problems, the invention adopts a technical scheme that: the target binding detection device is used for carrying out target binding detection on target binding equipment, the target binding equipment comprises a base, a back tube vertically fixed on the base and a conveying device fixedly connected to the base, and the back tube is used for sleeving at least one section of rotary target; the device comprises: a control unit; the conveying control unit is connected with the control unit and used for responding to a binding control instruction sent by the control unit to control the conveying device to convey the liquid binding material into the filling cavity from bottom to top; the filling cavity is a cavity formed between the back tube and a target material sleeved on the back tube; the anti-overflow unit is connected with the control unit and is used for detecting whether the liquid level of the liquid binding material filled into the filling cavity rises to the plane of the highest target material; and generating an anti-overflow signal when the liquid level rises to the highest target plane, and transmitting the anti-overflow signal to the control unit, so that the control unit responds to the anti-overflow signal to control the transmission control unit to stop driving the transmission device to transmit the liquid binding material to the filling cavity.
Wherein the overflow preventing unit includes: a first electrode disposed at the bottom of the filling cavity, and a second electrode disposed at the top of the filling cavity; wherein the top of the filling cavity is the highest target plane.
Wherein the control unit includes: the controller is connected with the anti-overflow unit and the conveying control unit; the calculation module is connected with the controller and is used for calculating the volume of the liquid binding material conveyed by the conveying device when the overflow preventing unit generates the overflow preventing signal so as to calculate the ratio of the input amount of the liquid binding material to the required amount of the filling cavity; and the judging module is connected between the controller and the calculating module and used for judging whether the ratio obtained by the calculating module meets the preset filling rate.
Wherein, still include temperature control unit, include: the sensor is connected with the controller and used for detecting the temperature of the liquid binding material in different areas; and the heating device is connected between the controller and the sensor and used for responding to a control instruction of the controller to heat or cool the liquid binding materials in different areas.
The number of the sensors is multiple, and the sensors are respectively arranged corresponding to a filling cavity area formed by each section of target material and the back tube; the number of the heating devices is multiple, and the heating devices are respectively arranged corresponding to the area where each section of the target material is located.
When the judging module determines that the ratio meets the preset filling rate, a trigger signal is generated, and the controller responds to the trigger signal to control the heating device to cool the liquid binding material.
In order to solve the technical problems, the invention adopts a technical scheme that: the target binding detection method is applied to the target binding detection device and comprises the following steps: generating a binding control instruction to control the conveying control device to drive the conveying device to convey the liquid binding material into the filling cavity from bottom to top; detecting whether an anti-overflow unit generates an anti-overflow signal; wherein the overflow prevention signal is generated by the overflow prevention unit when the overflow prevention unit detects that the liquid binding material rises to the highest target plane; and when the overflow preventing signal is generated, controlling the conveying control unit to stop driving the conveying device to convey the liquid binding material into the filling cavity in response to the overflow preventing signal.
Wherein the method further comprises: calculating the volume of the liquid binding material which is conveyed by the conveying device so as to calculate the ratio of the input amount of the liquid binding material to the required amount of the filling cavity; and judging whether the ratio accords with a preset filling rate.
Wherein the method further comprises: and when the ratio is determined to meet the preset filling rate, controlling a heating device to cool the liquid binding material.
In order to solve the technical problems, the invention adopts a technical scheme that: the target binding detection system comprises the target binding detection device and the target binding equipment, wherein the target binding equipment comprises a base, a back pipe vertically fixed on the base and a conveying device fixedly connected on the base, and the back pipe is used for sleeving at least one section of rotary target.
The conveying device comprises a material conveying pipeline and is communicated with a filling cavity formed between the back pipe and the rotary target sleeved on the back pipe, and liquid binding material is input into the filling cavity through the conveying pipeline by the conveying device in response to the driving of the conveying control unit, so that the binding material is filled into the filling cavity from bottom to top.
The target binding equipment further comprises a centering device arranged between two adjacent sections of rotary targets, wherein the centering device comprises a semicircular left fixing part and a semicircular right fixing part, and the left fixing part and the right fixing part are locked through a fastener so as to be sleeved on the back tube; wherein the left fixing part and the right fixing part both comprise an inner clamping ring and an outer clamping seat; the inner clamping ring is arranged on the inner circular surface of the outer clamping seat and comprises an inner circular convex surface and an inner circular concave surface; the inner circle surface of the outer clamping seat and the inner circle convex surface are concentric circles; when the left fixing part and the right fixing part are locked, the inner circle convex surface is attached to the surface of the back tube, a gap is formed between the inner circle concave surface and the surface of the back tube, and the inner circle surface of the outer clamping seat and the back tube form a concentric circle.
A sealing element is further arranged between two adjacent sections of the rotary target material, is in a ring shape and is sleeved on the back pipe; the left fixing part and the right fixing part comprise sealing element clamping grooves which are arranged on the inner circular surface of the outer clamping seat; when the left fixing part and the right fixing part are locked, the sealing element clamping groove of the left fixing part and the sealing element clamping groove of the right fixing part form an annular clamping groove to accommodate the sealing element.
The target binding equipment further comprises a pressurizing device which is in contact with the rotating target positioned at the uppermost end.
The invention has the beneficial effects that: different from the situation of the prior art, the target binding detection system, the target binding detection device and the target binding detection method provided by the invention avoid binding defects such as bubbles in a binding mode from bottom to top, and when the overflow prevention unit detects that the filling cavity is full of the liquid binding material, the conveying device is triggered to stop conveying the liquid binding material; the control unit judges whether the filling rate requirement is met according to the required quantity ratio of the liquid binding material conveyed by the conveying device and the filling cavity, so that the waste of the binding filling material and the target pollution caused by the overflow of the filling liquid are prevented while the binding is ensured to be full.
Drawings
Fig. 1 is a schematic structural diagram of a target binding detection system according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a target binding apparatus according to an embodiment of the present invention;
FIG. 3 is an enlarged exploded view of portion A of FIG. 2;
FIG. 4 is an exploded view of the centering device according to an embodiment of the present invention;
FIG. 5 is a top view and an enlarged schematic view of portion B of the centering device in an embodiment of the present invention;
FIG. 6 is a side cross-sectional view of a centering device in an embodiment of the present invention;
fig. 7 is a schematic perspective view of a target binding apparatus according to another embodiment of the present invention;
fig. 8 is an enlarged sectional view of a portion a shown in fig. 2;
fig. 9 is a schematic structural diagram of a target binding detection apparatus according to an embodiment of the present invention;
fig. 10 is a schematic flowchart of a target binding detection method according to a first embodiment of the invention;
fig. 11 is a schematic flowchart of a target binding detection method according to a second embodiment of the invention;
fig. 12 is a schematic flowchart of a target binding detection method according to a third embodiment of the invention; .
Detailed Description
In order to facilitate an understanding of the invention, the invention is described in more detail below with reference to the accompanying drawings and detailed description.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Fig. 1 is a schematic structural diagram of a target binding detection system according to an embodiment of the present invention. The system 100 includes a target binding device 10 and a target binding detection device 30, where the target binding device 10 is used for binding a target, and the target binding detection device 30 is used for detecting a target binding result of the target binding device 10.
Specifically, referring to fig. 2, which is a schematic structural diagram of a target binding apparatus according to an embodiment of the present invention, the target binding apparatus 10 includes:
a base 11;
a back tube 12 vertically fixed on the base 11; the rotary target 14 is sleeved on the back tube 12; wherein, the multiple sections of the rotary target materials 14 can be sleeved on the back tube 12 according to the requirement; therefore, the multiple sections of the rotary target 14 can be bound with the backing tube 12 at the same time, and the length can be flexibly selected.
The conveying device 13 is fixedly connected with the base 11; further, a material conveying pipeline 130 of the conveying device 13 is communicated with the filling cavity 120 formed between the back tube 12 and the rotary target 14 sleeved on the back tube 12, and the conveying device 13 is used for conveying liquid binding material from the conveying pipeline 130 to the filling cavity 120, so that the binding material is filled into the filling cavity 120 from bottom to top;
the centering device 15 is arranged between two adjacent sections of the rotary target materials 14 and is used for adjusting the concentricity of the rotary target materials 14 and the back tube 12;
referring to fig. 3, specifically, the centering device 15 includes a left fixing part 151 and a right fixing part 152 having a semicircular shape, and is fastened by a fastening member 153 to be fitted over the back tube 12.
Further, referring to fig. 4, 5 and 6, the left fixing member 151 includes an inner collar 1511, a seal member slot 1512 and an outer seat 1513. Wherein, the inner clamp 1511 is disposed at an inner circumferential surface of the outer clamp 1513. The inner race 1511 has an inner side edge in a zigzag shape in a plan view, and specifically, the inner race 1511 includes an inner circular convex surface 1511a and an inner circular concave surface 1511 b. When the left fixing part 151 and the right fixing part 152 are locked, the inner circular convex surface 1511a is adapted to fit the surface of the back tube 12, and the inner circular concave surface 1511b forms a gap with the surface of the back tube 12 for filling the binding material.
The right fixing member 152 includes an inner ring 1521, a sealing element slot 1522 and an outer seat 1513, and the structure thereof is the same as the inner ring 1511, the sealing element slot 1512 and the outer seat 1513 of the left fixing member 151, and the directions thereof are opposite to each other, which is not described herein.
The inner circular surface of the outer chuck 1513 and the inner circular convex surface 1511a are concentric circles, and when the left fixing member 151 and the right fixing member 152 are locked, the inner circular surface of the outer chuck 1513 and the backing tube 12 form a concentric circle, and the rotary target 14 is placed in the concentric circle region, so as to ensure the concentricity of the rotary target 14 and the backing tube 12.
Further, a sealing element 140 is disposed between each two sections of the rotary target 14, and the sealing element 140 is annular and is sleeved on the back tube 12.
Correspondingly, the sealing element clamping groove 1522 is arranged on the inner circumferential surface of the outer clamping seat 1513, and when the left fixing part 151 and the right fixing part 152 are locked, the sealing element clamping grooves 1512 and 1522 form an annular clamping groove for accommodating the sealing element 140.
Referring to fig. 7, which is a schematic perspective view of a target binding apparatus according to another embodiment of the present invention, the target binding apparatus 20 further includes a pressurizing device 26 for providing a pressure required for the sealing element 240 (not shown) to be effective, so as to ensure sealing; specifically, the pressurizing device 260 directly contacts with the uppermost rotary target 24, applies pressure to the axial direction of the rotary target 24, each section of the target 24 directly contacts with the sealing element 240, and the pressurizing device 26 provides the pressure required for the sealing element 240 to be effective, so that the sealing element 240 is deformed to achieve sealing.
Further, the number of the rotary targets 14 is set as required, the rotary targets are sleeved on the back tube 12, and a centering device 15 is arranged between two adjacent sections of the rotary targets 14, so that the concentricity of each section of the rotary target 14 and the back tube 12 can be kept.
Referring to fig. 8, during the binding process between the rotary target 14 and the backing tube 12, the liquid binding material is fed into the filling chamber 120 from the base 11 by the conveying device 13, and the binding material is filled into the filling chamber 120 from bottom to top.
Because the liquid binding material is a high-density and viscous metal solution, the liquid adding mode from top to bottom easily causes air to be wrapped by the solution, and finally binding defects occur; however, in the present application, the bottom-up filling method ensures a uniform and smooth injection of the liquid binding material.
Further, as the liquid binding material passes through the connecting sections of the different sections of the rotating target 14, the liquid binding material is poured upward through the gap formed by the inner circular concave surface and the backing tube.
Further, it is ensured by the centering device 15 that the rotating target 14 remains concentric with the backing tube 12 to ensure that the binding material is filled uniformly in all directions around the backing tube 12.
As described above, in the target binding apparatus provided in the embodiment of the present invention, multiple sections of the rotary targets can be sleeved on the backing tube as needed, the centering device is disposed between two adjacent sections of the rotary targets to ensure that the rotary targets and the backing tube maintain concentricity, and the conveying device conveys the binding material from bottom to top into the filling cavity between the backing tube and the rotary targets. Therefore, the target binding equipment can be flexibly adjusted according to the material and the specification of the target, is suitable for the rotary target with any length and any diameter, and has good universality; meanwhile, the concentricity of the target and the back tube can be ensured, and the technical scheme of introducing the binding material from bottom to top ensures uniform filling and no bubbles so as to achieve good binding effect; furthermore, binding of multiple target sections can be carried out simultaneously, and binding efficiency is effectively improved.
Further, please refer to fig. 9, which is a schematic structural diagram of a target binding detection apparatus according to an embodiment of the present invention. In the present embodiment, the target binding detection device 30 is used for performing target binding detection on the target binding apparatus 10 described above. In other embodiments, the target binding detection apparatus 30 may also be used for detecting target binding of other vertically bound target binding apparatuses.
Specifically, the target binding detection apparatus 30 includes:
a control unit 31;
the conveying control unit 32 is connected with the control unit 31 and is used for responding to a binding control instruction of the control unit 31 and controlling the conveying device 13 to convey the liquid binding material from bottom to top to the filling cavity 120 formed between the back tube 12 and the target 14 sleeved on the back tube; as mentioned above, the conveying device 13 is fixed on the base 11 of the target binding apparatus 10, and the backing tube 12 is vertically fixed on the base 11 and is used for sleeving at least one section of the rotary target 14;
an overflow preventing unit 33 connected to the control unit 31 for detecting whether the liquid level of the liquid binding material filled into the filling chamber 120 rises to the level of the highest target 14; and generating an anti-overflow signal when the liquid level of the liquid binding material rises to the highest target 14 level, and transmitting the anti-overflow signal to the control unit 31; the control unit 31 controls the conveying control unit 32 to stop driving the conveying device 13 to convey the liquid binding material into the filling chamber 120 in response to the overflow preventing signal;
specifically, the overflow preventing unit 33 includes: a first electrode 331 disposed at the bottom of the filling chamber 120, and a second electrode 332 disposed at the top of the filling chamber 120; the top of the filling chamber 120 is a plane of the uppermost target 14 (the highest target), and is hereinafter referred to as a "target top plane".
Before the liquid binding material is conveyed to the filling cavity 120, the cavity of the filling cavity 120 is air, and the first electrode 331 and the second electrode 332 cannot conduct electricity; because the filled liquid binding material is molten metal and is a good conductor, when the liquid binding material is filled in the filling cavity 120 and the highest liquid level reaches the target top surface, the first electrode 331 and the second electrode 332 are conducted, so that an anti-overflow signal is generated; the control unit 31 can stop filling the liquid binding material after the overflow preventing unit 33 detects that the liquid binding material rises to the target top surface, thereby preventing waste of the binding material and target contamination caused by overflow of the liquid binding material while ensuring sufficient binding.
Further, the control unit 31 includes:
a controller 311 connected to the overflow preventing unit 33 and the conveyance control unit 32;
a calculating module 312, connected to the controller 311, for calculating the volume of the liquid binding material that has been conveyed by the conveying device 13 when the overflow preventing unit 33 generates the overflow preventing signal, so as to calculate the ratio of the input amount of the liquid binding material to the required amount of the filling chamber 120; the required amount of the filling chamber 120 is determined according to the number of the targets bound, and the volume of the cavity formed by each section of the target and the backing tube can also be calculated and determined, so that the required amount of the filling chamber 120 is pre-recorded in the buffer memory of the controller 311.
And a judging module 313, connected between the calculating module 312 and the controller 311, for judging whether the ratio meets a preset filling rate.
Specifically, the binding is sufficient, that is, the volume percentage of the filling cavity to be filled is covered by the liquid binding material after the filling; according to different requirements, the filling rate is generally required to be 95% -98%. The binding mode from bottom to top avoids the binding defects such as bubbles generated during filling and ensures the binding effect; on the other hand, through the cooperative work of the arranged anti-overflow unit 33 and the calculation module 312, after the anti-overflow signal is triggered, whether the ratio of the input amount of the liquid binding material to the required amount of the target space (filling cavity) meets the preset filling rate is calculated, so as to judge whether the binding is sufficient.
In this embodiment, the target binding detection apparatus 30 further includes a temperature control unit 34 connected to the control unit 31, and specifically includes:
a sensor 341, connected to the controller 311, for detecting the temperature of the liquid binding material; specifically, the number of the sensors 341 is set to be plural, and the sensors are respectively set corresponding to different areas to detect the temperatures of the liquid binding material in the different areas, in this embodiment, the liquid binding material in the different areas refers to: the sensor 341 is disposed in the region of the filling cavity 120 formed by the different target sections 14 corresponding to the backing tube 12, and accordingly, may correspond to the region where each target section 14 is located.
The heating device 342 is connected between the controller 311 and the sensor 341 and is used for heating or cooling the liquid binding material in different areas in response to a control command of the controller 311; in the present embodiment, a heating device 342 is disposed corresponding to the region where the different sections of the target 14 are located, and is used for heating or cooling the corresponding region.
By arranging the temperature control unit 34, the sensor 341 samples the temperature of the liquid binding material in different areas, and the heating device 342 works in cooperation with the temperature condition, so that the temperature of the liquid binding material in a specific area is prevented from being too high or too low; after the liquid binding material is filled, the liquid binding material needs to be cooled to solidify, so that the sensor 341 can also guide the heating device 342 to work by sampling the temperature according to different requirements of different binding materials, and heat or cool the corresponding area, thereby avoiding the liquid binding material from being cooled too fast or too slow.
Referring to fig. 10, a target binding detection method according to an embodiment of the invention is shown. In the present embodiment, the target binding detection method is applied to the target binding detection device 30 described above, and detects the binding result of the target binding device 10. The target binding detection method comprises the following steps:
step S40, generating a binding control instruction to control the conveying control device to drive the conveying device to convey the liquid binding material into the filling cavity from bottom to top;
step S41, detecting whether the anti-overflow unit generates an anti-overflow signal; wherein the overflow prevention signal is generated by the overflow prevention unit when the overflow prevention unit detects that the liquid binding material rises to the highest target plane; if yes, go to step S42; otherwise, return to step S40;
and step S42, when the overflow preventing signal is generated, controlling the conveying control unit to stop driving the conveying device to convey the liquid binding material into the filling cavity in response to the overflow preventing signal.
Referring to fig. 11, further, the method further includes:
step S53, calculating the volume of the liquid binding material which is already conveyed by the conveying device so as to calculate the ratio of the input amount of the liquid binding material to the required amount of the filling cavity;
step S54, judging whether the ratio accords with a preset filling rate; if so, ending the process, and waiting for the cooling of the liquid binding material to finish the target binding. Otherwise, the current binding result is recorded, and it is determined whether to return to step S50 to re-execute the binding, if necessary.
Please refer to the corresponding text part shown in fig. 10 for further steps, which is not described herein.
Referring to fig. 12, in the present embodiment, when it is determined that the ratio meets the predetermined filling ratio, the method further includes:
and step S65, controlling the heating device to cool the liquid binding material.
Please refer to the corresponding text part shown in fig. 11 for further steps, which is not described herein.
According to the target binding detection system, the target binding detection device and the detection method, when the overflow prevention unit detects that the filling cavity is full of the liquid binding material, the conveying device is triggered to stop conveying the liquid binding material; the control unit judges whether the filling rate requirement is met according to the required quantity ratio of the liquid binding material conveyed by the conveying device and the filling cavity, so that the waste of the binding filling material and the target pollution caused by the overflow of the filling liquid are prevented while the binding is ensured to be full.
It should be noted that the description of the present invention and the accompanying drawings illustrate preferred embodiments of the present invention, but the present invention may be embodied in many different forms and is not limited to the embodiments described in the present specification, which are provided as additional limitations to the present invention, and the present invention is provided for understanding the present disclosure more fully. Furthermore, the above-mentioned technical features are combined with each other to form various embodiments which are not listed above, and all of them are regarded as the scope of the present invention described in the specification; further, modifications and variations will occur to those skilled in the art in light of the foregoing description, and it is intended to cover all such modifications and variations as fall within the true spirit and scope of the invention as defined by the appended claims.
Claims (14)
1. A target binding detection device is used for carrying out target binding detection on target binding equipment, and is characterized in that the target binding equipment comprises a base, a back tube vertically fixed on the base and a conveying device fixedly connected to the base, wherein the back tube is used for sleeving at least one section of rotary target; the device comprises:
a control unit;
the conveying control unit is connected with the control unit and used for responding to a binding control instruction sent by the control unit to control the conveying device to convey the liquid binding material into the filling cavity from bottom to top; the filling cavity is a cavity formed between the back tube and a target material sleeved on the back tube;
the anti-overflow unit is connected with the control unit and is used for detecting whether the liquid level of the liquid binding material filled into the filling cavity rises to the plane of the highest target material; and generating an anti-overflow signal when the liquid level rises to the highest target plane, and transmitting the anti-overflow signal to the control unit, so that the control unit responds to the anti-overflow signal to control the transmission control unit to stop driving the transmission device to transmit the liquid binding material to the filling cavity.
2. The target binding detection apparatus of claim 1, wherein the anti-overflow unit comprises: a first electrode disposed at the bottom of the filling cavity, and a second electrode disposed at the top of the filling cavity; wherein the top of the filling cavity is the highest target plane.
3. The target binding detection apparatus of claim 2, wherein the control unit comprises:
the controller is connected with the anti-overflow unit and the conveying control unit;
the calculation module is connected with the controller and is used for calculating the volume of the liquid binding material conveyed by the conveying device when the overflow preventing unit generates the overflow preventing signal so as to calculate the ratio of the input amount of the liquid binding material to the required amount of the filling cavity;
and the judging module is connected between the controller and the calculating module and used for judging whether the ratio obtained by the calculating module meets the preset filling rate.
4. The target binding detection apparatus of claim 3, further comprising a temperature control unit comprising:
the sensor is connected with the controller and used for detecting the temperature of the liquid binding material in different areas;
and the heating device is connected between the controller and the sensor and used for responding to a control instruction of the controller to heat or cool the liquid binding materials in different areas.
5. The target binding detection device according to claim 4, wherein the number of the sensors is plural, and the sensors are respectively arranged corresponding to a filling cavity region formed by each section of the target and the back tube;
the number of the heating devices is multiple, and the heating devices are respectively arranged corresponding to the area where each section of the target material is located.
6. The target binding detection apparatus according to claim 4, wherein a trigger signal is generated when the determination module determines that the ratio satisfies the predetermined filling rate, and the controller controls the heating apparatus to cool down the liquid binding material in response to the trigger signal.
7. A target binding detection method applied to the target binding detection device according to any one of claims 1 to 6, comprising:
generating a binding control instruction to control the conveying control device to drive the conveying device to convey the liquid binding material into the filling cavity from bottom to top;
detecting whether an anti-overflow unit generates an anti-overflow signal; wherein the overflow prevention signal is generated by the overflow prevention unit when the overflow prevention unit detects that the liquid binding material rises to the highest target plane;
and when the overflow preventing signal is generated, controlling the conveying control unit to stop driving the conveying device to convey the liquid binding material into the filling cavity in response to the overflow preventing signal.
8. The target binding detection method of claim 7, further comprising:
calculating the volume of the liquid binding material which is conveyed by the conveying device so as to calculate the ratio of the input amount of the liquid binding material to the required amount of the filling cavity;
and judging whether the ratio accords with a preset filling rate.
9. The target binding detection method of claim 8, further comprising:
and when the ratio is determined to meet the preset filling rate, controlling a heating device to cool the liquid binding material.
10. A target binding detection system, comprising the target binding detection device according to any one of claims 1 to 6 and a target binding apparatus, wherein the target binding apparatus comprises a base, a back tube vertically fixed on the base, and a conveying device fixedly connected to the base, and the back tube is used for sleeving at least one section of rotary target.
11. The target binding detection system of claim 10, wherein the conveying device comprises a material conveying pipeline, and the material conveying pipeline is communicated with a filling cavity formed between the back tube and the rotary target sleeved on the back tube, and the conveying device is driven by a conveying control unit to convey liquid binding material into the filling cavity through the conveying pipeline, so that the binding material is filled into the filling cavity from bottom to top.
12. The target binding detection system of claim 10, wherein the target binding apparatus further comprises a centering device disposed between two adjacent sections of the rotary target, the centering device comprising a semicircular left fixing part and a semicircular right fixing part, the left fixing part and the right fixing part being locked by a fastener so as to be sleeved on the back tube; wherein the left fixing part and the right fixing part both comprise an inner clamping ring and an outer clamping seat; the inner clamping ring is arranged on the inner circular surface of the outer clamping seat and comprises an inner circular convex surface and an inner circular concave surface; the inner circle surface of the outer clamping seat and the inner circle convex surface are concentric circles;
when the left fixing part and the right fixing part are locked, the inner circle convex surface is attached to the surface of the back tube, a gap is formed between the inner circle concave surface and the surface of the back tube, and the inner circle surface of the outer clamping seat and the back tube form a concentric circle.
13. The target binding detection system of claim 12, wherein a sealing element is further disposed between two adjacent sections of the rotary target, and the sealing element is annular and is disposed on the back tube;
the left fixing part and the right fixing part comprise sealing element clamping grooves which are arranged on the inner circular surface of the outer clamping seat; when the left fixing part and the right fixing part are locked, the sealing element clamping groove of the left fixing part and the sealing element clamping groove of the right fixing part form an annular clamping groove to accommodate the sealing element.
14. The target binding detection system of claim 13, wherein the target binding apparatus further comprises a pressurizing device in contact with the uppermost rotating target.
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