CN1105911C - Humidity sensitive element and mfg. method therefor - Google Patents
Humidity sensitive element and mfg. method therefor Download PDFInfo
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- CN1105911C CN1105911C CN98115259.7A CN98115259A CN1105911C CN 1105911 C CN1105911 C CN 1105911C CN 98115259 A CN98115259 A CN 98115259A CN 1105911 C CN1105911 C CN 1105911C
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- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
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Abstract
According to the chart, a hydrophilic polymer material such as polyvinyl alcohol is formed into a porous film (301). A film (holding film) (303) made from a hydrophobic polymer material such as polyvinyl acetate is formed on the inner walls of a large number of pores (302) formed in the porous film (301). Lithium chloride (304) is held in these pores (302).
Description
The present invention relates to be used to humidity sensing element of measuring humidity or dew point and preparation method thereof.
Usually, atmospheric humidity is counted as influencing the very important factor of air quality.Need in a lot of fields to measure and control absolute humidity, for example indoor humidity control is such as the control of the humidity in the thermal treatments such as carbonization and tempering, the humidity conciliation of high furnace ventilation and the moisture measurement and the adjusting of warehouse, shop and breadboard closed container.Recently, the control of the humidity of semiconductor production factory has become very important, also more and more needs this technology in the growth control of crops.On the other hand, since the purpose more relevant with life, for example forecast of the laundry except that weather forecast, and the dew point that also more and more needs to carry out weather condition is measured.In order to satisfy these needs, use several absolute humidity measuring methods usually.
As a kind of absolute humidity measuring method, utilize the lithium chloride dew point hygrometer of lithium chloride (LiCl)-hygroscopy to measure dewpoint temperature, this lithium chloride dew point hygrometer is that the conductivity by lithium chloride changes along with absorbing moisture, and the steam pressure of lithium chloride aqueous solution changes along with temperature variation and measures.The humidity sensing element of this instrument is made like this, promptly uses lithium chloride aqueous solution impregnated glass fiber bar, and two parallel thin plain conductors are spirally coiled on the converted top behind the dipping as electrode.When being added in interchange (AC) voltage on two electrodes, between the two poles of the earth, produce electric current, improve solution temperature.Simultaneously, the water evaporates in the aqueous solution makes solution saturated, thereby begins to separate out the lithium chloride crystal.When crystal began to separate out, the resistance of aqueous solution is extremely acute to be strengthened, and electric current reduces, and stops temperature to rise like this.Therefore, keep and the corresponding temperature of ambient water steam pressure.If the ambient water steam pressure descends, then because the water evaporates in the aqueous solution is separated out crystal, temperature can further descend.On the other hand, if the ambient water steam pressure rises, absorb moisture so that destroy state of saturation, electric current increases, and simultaneous temperature rises.In this manner, the temperature of lithium chloride saturated aqueous solution is held so that with ambient water steam pressure balance.If know this equilibrium temperature, then can calculate dewpoint temperature.
Yet if the humidity sensing element of this lithium chloride dew point hygrometer is placed for a long time in the air of extra high temperature and high humility, lithium chloride is very fast by wash-out, can the grievous injury instrument performance.Therefore need to be serviced and handle, periodically replenish lithium chloride simultaneously.
As mentioned above, if this element of traditional lithium chloride dew point hygrometer is placed in the air of high-temperature high humility for a long time, then can produce following result.The lithium chloride that just has strong hygroscopy absorbs airborne water vapor and is dissolved in the water vapor of absorption the formation aqueous solution.Usually, pass to electric current and raise solution temperature so that transpiring moisture.Yet if the temperature and humidity of atmosphere is too high, this water evaporates can not be satisfactory, thus the density loss of lithium chloride aqueous solution.Therefore, mobile undue increase of lithium chloride aqueous solution, and flow out the glass fibre bar that comprises solution.In case the lithium chloride aqueous solution flows out, lithium chloride amount used in the humidity sensing element reduces, and this will increase the resistance of considerable moisture value, therefore, no longer can carry out accurate measurement of humidity.
Therefore, must safeguard like this and handle usually: promptly, make lithium chloride keep predetermined concentration by such as periodically replenishing lithium chloride.This processing is pretty troublesome.
The present invention will solve above-mentioned traditional problem exactly, and its purpose is to make humidity sensing element steady operation for a long time.
For achieving the above object, humidity sensing element according to the present invention comprises functional membrane, this film be arranged on suprabasil pair of electrodes and join; Temperature measuring equipment with the temperature that is used for the measurement function film, wherein said functional membrane has cell texture, by water wettability and comprise that first polymeric material of many fine pores makes, also comprise storage films, described storage films is formed on the inwall of each micropore, made by hydrophobic second polymeric material, electrolytic salt is stored in the described micropore.
Thus, electrolytic salt is limited in a plurality of micropores hydrophilic group being arranged in the micropore.Simultaneously, moisture can freely enter and stay electrolytic salt where.
In addition, the method of making humidity sensing element of the present invention be a kind of making comprise be arranged on the functional membrane that the contacted mode of suprabasil pair of electrodes is made, with the method for the humidity sensing element of the temperature measuring equipment that is used for the measurement function film temperature, wherein said functional membrane forms as follows.Just, hydrophilic first polymeric material is dissolved in has polarity and can dissolving in first solvent of first polymeric material, form basic solution.The hydrophobic organic material of diffusion forms emulsion in basic solution, and described organic material is not dissolved in first solvent.The organic material polymerization of spreading in emulsion with the droplet form forms suspension, and the particle of second polymeric material spreads in basic solution.Described second polymeric material is obtained by the organic material polymerization, and has hydrophobicity.Applying described suspending liquid formation by the presumptive area in described substrate films.Moisture during the part removal is filmed is so that place described surface of filming to some particles.Described filming immersed described second polymeric material of dissolving in second solvent, and described second solvent does not dissolve first polymeric material and dissolves second polymeric material.Be porous structure by making to film, on the formed inwall of the film of making by second polymeric material, form perforated membrane with big metering-orifice.Perforated membrane is immersed in the aqueous solution of electrolytic salt,, thereby the electrolytic salt storage is loaded in the micropore that constitutes perforated membrane so that flood perforated membrane with the aqueous solution of electrolytic salt.
Like this, the film of being made by first polymeric material has porous structure, and electrolytic salt is stored in many holes of porous structure.
Fig. 1 is the partial structurtes sectional view of the humidity sensing element of expression one embodiment of the invention;
Fig. 2 is the part-structure planimetric map of the humidity sensing element of expression one embodiment of the invention;
Fig. 3 is the sectional view of presentation function membrane portions structure;
Fig. 4 is the process chart that the functional membrane method is made in expression;
Fig. 5 A to 5C is the synoptic diagram of functions film production method.
Describe one embodiment of the invention below with reference to the accompanying drawings in detail.
Fig. 1 and Fig. 2 illustrate the structure according to humidity sensing element of the present invention.
In this humidity sensing element, a pair of comb electrode 102 is formed on the middle body of aluminium substrate 101 upper surfaces.Functional membrane 103 is formed cover pair of electrodes basically.This functional membrane 103 is used as the aluminum chloride aqueous solution dipping of electrolytic salt.Well heater 104 and temperature sensor 105 are buried central authorities in substrate 101, and temperature sensor 105 is used to measure base reservoir temperature.These well heaters 104 and temperature sensor 105 be arranged on pair of electrodes 102 below. Splicing ear 107a and 107b are formed on the end of the pair of electrodes 102 that is positioned in the substrate 101.And terminal 108a and 108b and 109a and 109b are formed in the substrate 101, and terminal 108a and 108b are used for providing power supply to well heater 104, and terminal 109a is connected temperature sensor 105 with 109b. Galvanized wire 111a, 111b, 112a, 112b, 113a and 113b link to each other with these terminals by electrically conducting adhesive or solder flux.These galvanized wires link to each other with computing machine (all not shown) with power supply.
What should illustrate is that the material of substrate 101 also can be a pottery.
As substrate 101, can use for example 6 * 50 millimeters, the aluminium substrate of 2 millimeters thick.In Fig. 2, for convenience of description, represent narrower part with magnification ratio.Pair of electrodes 102 is to adopt known printed wire technology to form, and width is 0.15 millimeter, and between the tooth is about 0.10 millimeter apart from d.
Described temperature sensor 105 be characterized as 25 Ω ± 20% (23 ℃ time) and T.C.R.4,440ppm/ ℃ (23 to 800 ℃), the parameter of described well heater is DC12V and 500 ± 50 ℃.
Introduce functional membrane 103 below in detail.As shown in Figure 3, the functional membrane 103 of the present embodiment is by the hydrophilic polymers material perforated membrane 301 made of polyvinyl alcohol (PVA) for example.And, by hydrophobic polymeric material for example the film (storage films) 303 made of polyvinyl acetate be formed on the inwall of big metering-orifice 302, hole 302 is formed on the film 301.Also this film 303 can be thought of as the potpourri of water wettability and hydrophobic polymer material.By using film 303 can increase the intensity of film 301.
When with the described perforated membrane 301 of the lithium chloride aqueous solution dipping hydrophilic polymer material with predetermined concentration, lithium chloride is stored in and forms functional membrane 103 in the hole 302.
As mentioned above, in functional membrane 103, on the hydrophilic polymer material film, form a large amount of meticulous holes in the porous mode.Therefore, aqueous solution can be stored in these meticulous holes, and from this hole, not flow out.In addition, on the inwall in described hole, form the hydrophobic polymer material film.Can prevent hydrophilic polymer material like this by wash-out, although aqueous solution is stored in these holes.
Therefore, the lithium chloride aqueous solution is stored in the porous structure hole of functional membrane 103, and does not flow out from these holes; This lithium chloride aqueous solution of described functional membrane 103 usefulness was flooded.
In actual use, the lithium chloride aqueous solution that stores in the porous structure hole of functional membrane 103 is to be used by following state, and promptly moisture wherein reduces to the degree of separating out lithium chloride.If make this functional membrane 103 place high-temperature, high humidity atmosphere for a long time, the moisture in the porous structure hole of lithium chloride absorption function film 103.Therefore, be stored in the density loss of the aqueous solution in these holes, and reduced viscosity like this.Even the lithium chloride concentration of aqueous solution that stores descends, because as mentioned above, the basis of functional membrane 103 is made by hydrophilic polymer material, and has hydrophilic group on the surface of described film, so the lithium chloride aqueous solution also can store.
The size in the hole of the porous structure of formation functional membrane 103 can be roughly 0.01 to 1 micron.If the size in hole is worth less than these, then form loose structure, in fact can not form porous, the film of also no longer can the water solution impregnation making by hydrophilic polymer material.On the other hand, if the size in hole is too big, also no longer can make the hydrophilic polymer material film.
Have again,, when keeping porous structure, can not obtain stabilising membrane if the film thickness of functional membrane 103 is too little.If the thickness of film is too big, water vapor or moisture are not easy to soak into whole film.Reduce the response speed of humidity sensing element like this, produce hysteresis phenomenon.Therefore, the ideal thickness of functional membrane 103 is 0.1 to 20 micron.
The method of making functional membrane 103 is described below.
As the example of hydrophilic polymer material and hydrophobic polymer material this method is described with polyvinyl alcohol (PVA) and polyvinyl acetate respectively.
Shown in the process flow diagram of Fig. 4, in step 400, vinyl acetate is sneaked in the aqueous solution of polyvinyl alcohol (PVA) the preparation emulsion.
In step 401, make the vinyl acetate polyisocyanate polyaddition when stirring described mixed solution.In polymerization process, also can add the inhibitor that stops copolymerization, make polyvinyl alcohol (PVA) and vinyl acetate that copolymerization not take place.
In step 402, film in the presumptive area of intended substrate with polyvinyl alcohol water solution (suspending liquid), the vinyl acetate polyisocyanate polyaddition forms polyvinyl acetate in described aqueous solution.Heating is arrived described dried coating film to a certain degree about 50 ℃.As shown in Figure 2, Yu Ding electrode cable is formed in this substrate.
In step 403, immerse in solvent such as the acetone filming, make the polyvinyl acetate in filming be eluted to a certain degree (the wash-out ratio is 55 to 75%), thereby form the polyvinyl alcohol film of porous.
Simultaneously, in step 404, lithium chloride is dissolved in water, preparation has the lithium chloride aqueous solution of predetermined concentration.
In step 405, filming of processing in the step 403 is immersed in the lithium chloride aqueous solution of preparation in the step 404.With this, film (porous PVA film) with lithium chloride aqueous solution dipping, on this film, be formed with big metering-orifice.
As the result of above-mentioned processing procedure, in substrate, form apertured polymeric film (functional membrane), lithium chloride is stored in the polyvinyl alcohol (PVA) in this film, is formed with big metering-orifice, makes the humidity sensing element (step 406) that adopts lithium chloride like this.
Describe the formation of polyvinyl alcohol film porous structure below in detail.
At first, vinyl acetate is added in the aqueous solution of polyvinyl alcohol (PVA), the potpourri that fully stirs gained makes the vinyl acetate diffusion, thus the preparation emulsion.In preparation process, also can add predetermined emulsifying agent.Otherwise perhaps, make the vinyl acetate diffusion by the ultraviolet light wave irradiation.Hope can reduce the size of vinyl acetate drop by using ultraviolet light wave.
In emulsion, add initiators for polymerization, the gained material is heated to predetermined temperature makes the vinyl acetate polyisocyanate polyaddition.The result produces suspending liquid, and the molecule of polyvinyl acetate is diffused in the aqueous solution of polyvinyl alcohol (PVA).
Shown in Fig. 5 A, be coated in the surface of intended substrate 501 with this suspending liquid.Thus, the molecule 503 of polyvinyl acetate is diffused in the polyvinyl alcohol film 502 in the substrate 501.
When this dried coating film to a certain degree so that when reducing the volume of polyvinyl alcohol film 502, shown in Fig. 5 B, the molecule 503 of some polyvinyl acetate is exposed to the surface of polyvinyl alcohol film.
The film of this state is immersed in the acetone with substrate 501, keep one period schedule time.Owing to have only polyvinyl acetate to be eluted in the acetone, particle 503 becomes empty.Just as shown in the 5C, form porous state (porous structure) on the polyvinyl alcohol film in the substrate 501 502, wherein, the storage films 503a that is formed by polyvinyl acetate is formed on the inwall of micropore 504.
The amount that is mixed into the vinyl acetate in the polyvinyl alcohol water solution approximately is: polyvinyl alcohol (PVA): vinyl acetate=1: 10 to 3: 10 (part by weight).If the amount of vinyl alcohol composition very little, then can not form rete.If the amount of vinyl acetate composition less than the said components ratio, just can not obtain desired porous structure.Just, if the component ratio of vinyl acetate increases, the then size in the hole that can form increase, thus feasiblely can not form rete.On the other hand, if the component ratio of vinyl acetate is reduced, then the size in the hole that can form reduces.If further reduce the vinyl acetate components in proportions again, the number in the hole that will form also descends.Therefore, can not obtain porous structure.When the blending ratio of vinyl acetate is approximately polyvinyl alcohol (PVA): during ethanol vinyl acetate=1: 10 to 3: 10 (part by weight), the size in each hole of the porous structure that can form is about 0.01 to 1 micron.
Have, if immerse the overlong time of wash-out polyvinyl acetate in the acetone, then polyvinyl acetate can be fully by wash-out again.Just, if the excessive wash-out of polyvinyl acetate then forms the polyvinyl acetate storage films, hardly so can not obtain water proofing property on the inwall in a plurality of holes of porous polyethylene alcohol film 502.On the other hand,, in the polyvinyl acetate particle, enough holes can not be formed, so that porous structure can not be obtained if elution amount very little.Therefore just like above-mentioned, the elution amount of polyvinyl acetate is the wash-out ratio with 55 to 75% approximately preferably.Porous structure forms later blending ratio and is preferably polyvinyl alcohol (PVA): polyvinyl acetate=6: 5 to 6: 27.
Yet when polyvinyl alcohol (PVA) porous film strength when for example waterproof ability can more or less be sacrificed some, as the wash-out ratio, the elution amount of polyvinyl acetate also can surpass 75%.
In the above embodiments, polyvinyl alcohol (PVA) is used as hydrophilic polymer material.Yet, also can use natural polymer, the derivant of example gel, bassora gum, starch, methylcellulose, CMC (carboxymethyl cellulose) or natural polymer and synthetic polymer, for example PVA, incomplete saponification PVA, another kind of ethenol copolymer, perhaps polyacrylate.
Hydrophobic polymer material also is not limited to polyvinyl acetate (vinyl acetate).For example: also can use polystyrene (styrene), many vinyl chloride (dichloroethylene) or tygon benzene (divinylbenzene).
In addition, electrolytic salt is not limited to lithium chloride, also can use some other salts, for example lime chloride.Yet lithium chloride is one of the strongest mineral compound of water absorptivity, and the steam pressure of lithium chloride aqueous solution for example lime chloride is relatively low than other salt.And the solidifying point of aqueous solution is also low.In addition, lithium chloride also has an advantage, is exactly to be very easy to handle.
As mentioned above, humidity sensing element of the present invention is a kind of like this humidity sensing element, and it comprises the functional membrane that links to each other with the pair of electrodes that is formed on substrate; With the temperature measuring equipment that is used for the measurement function film temperature, wherein said functional membrane forms porous structure by hydrophilic first polymeric material, comprises a large amount of micropores.This humidity sensing element also comprises the storage films of the inwall that is formed at described hole, and this storage films is formed by hydrophobic second polymeric material, and electrolytic salt stores and is in the described hole.
Therefore, make electrolytic salt be limited in having hydrophilic group in the described micropore in a large amount of micropores.Simultaneously, moisture can freely enter and stay the part that electrolytic salt exists.Just, even when electrolytic salt absorbs moisture formation aqueous solution, can prevent that also this aqueous solution from flowing out from functional membrane.Therefore, humidity sensing element of the present invention can be in for a long time steady operation.
In addition, in the method for making humidity sensing element according to the present invention, functional membrane forms as follows.Just: form basic solution in first solvent that has polarity and can dissolve first polymeric material by first polymeric material with water-wet behavior is dissolved in, diffusion hydrophobicity organic material in basic solution, form emulsion, described hydrophobicity organic material is not dissolved in first solvent.The described organic material polymerization of spreading in emulsion with the drop form forms suspending liquid, in described suspending liquid, the particle of second polymeric material spreads in basic solution, and described second polymeric material is obtained by the organic material copolymerization, and has hydrophobic property.With described suspending liquid at the presumptive area of the described substrate formation rete of filming.Moisture in the rete is partly removed, so that some particles exposures are the surface of rete.Immerse in second solvent filming, make the dissolving of second polymeric material, described second solvent does not dissolve first polymeric material and dissolves second polymeric material, with this, be presented on the porous structure that has a large amount of holes on the film formed inwall of making by second polymeric material and form perforated membrane by making to film.Described perforated membrane is immersed in the electrolytic brine solution, flood described perforated membrane, thereby electrolytic salt is stored in the hole that constitutes perforated membrane with the aqueous solution of described electrolytic salt.
Just, the rete that uses first polymeric material to make has porous structure, and described electrolytic salt is stored in a plurality of holes of described porous structure.Because first polymkeric substance is hydrophilic, so even when electrolytic salt absorbs moisture formation aqueous solution, this solution also can be held.Thus, prevent that electrolytic salt from flowing out from functional membrane.With this, humidity sensing element of the present invention is steady operation for a long time.
Claims (12)
1, a kind of humidity sensing element, comprise one be arranged between substrate (101) and a pair of comb electrode (102) and and their each functional membranes (103) that contacts and make; With the temperature measuring equipment (105) that is used to measure described functional membrane (103) temperature that forms in described substrate, described functional membrane is characterised in that the combination of following each several part:
A porous structure is made by first polymeric material with water-wet behavior, and comprises a large amount of micropore (302);
A storage films (303), it is formed on the inwall of described micropore (302), is made by second polymeric material with hydrophobic property; With
Be stored in the electrolytic salt in the described hole (302).
2, humidity sensing element as claimed in claim 1, the average pore size that wherein constitutes the described micropore (302) of described porous structure is 0.01 to 3 micron.
3, humidity sensing element as claimed in claim 1, the thickness of wherein said functional membrane (103) are 0.1 to 20 micron.
4, humidity sensing element as claimed in claim 1, the weight ratio of constituents of wherein said first polymeric material and described second polymeric material is 6: 5 to 6: 27.
5, humidity sensing element as claimed in claim 1, wherein said first polymeric material is a polyvinyl alcohol (PVA).
6, humidity sensing element as claimed in claim 1, wherein said second polymeric material is a polyvinyl acetate.
7, a kind of method of making humidity sensing element as claimed in claim 1, described humidity sensing element comprises: one be arranged between substrate (101) and a pair of comb electrode (102) and and functional membrane (103) of their each formation that contacts; The temperature measuring equipment (105) that is used to measure described functional membrane (103) temperature with forming in described substrate is characterized in that:
Form described functional membrane by following step:
The first step is dissolved in hydrophilic first polymeric material and has polarity and dissolving in first solvent of described first polymeric material, forms basic solution (step 400);
In second step, the hydrophobic organic material of diffusion forms emulsion in described basic solution, and described organic material is insoluble to described first solvent (step 400);
The 3rd step, be diffused in described organic material polymerization in the described emulsion with the drop form, form suspending liquid, the particle of second polymeric material is spread in the described basic solution in described suspending liquid, described second polymeric material is obtained by described organic material polymerization, and has hydrophobicity (step 401);
In the 4th step, form film (step 402) in the presumptive area coating of described substrate with described suspending liquid;
In the 5th step, part is removed the moisture in described the filming, and makes some particles be exposed to described surface (step 402) of filming;
The 6th step: described filming is immersed in second solvent, dissolve described second polymeric material, described second solvent does not dissolve described first polymeric material and dissolves described second polymeric material, thereby by making described filming become the porous structure that on the film formed inwall of making by described second polymeric material, has a large amount of micropores and form perforated membrane (step 403);
The 7th step was immersed in described perforated membrane in the aqueous solution of electrolytic salt, with the described perforated membrane of described electrolytic brine solution impregnation, thereby stored described electrolytic salt (step 404,405,406) in the described micropore that constitutes described perforated membrane.
8, the method for making humidity sensing element as claimed in claim 7, wherein in second step, as the weight ratio of constituents example, described first polymeric material in the described emulsion and the component ratio of described organic material are 1: 10 to 3: 10.
9, the method for making humidity sensing element as claimed in claim 7, wherein said first solvent is a water.
10, the method for making humidity sensing element as claimed in claim 7, wherein said first polymeric material is a polyvinyl alcohol (PVA).
11, the method for making humidity sensing element as claimed in claim 7, wherein said organic material is a vinyl acetate.
12, the method for making humidity sensing element as claimed in claim 7 in the 3rd step, by adding inhibitor, makes the described material polymerization that has, and this inhibitor stops described first polymeric material and described organic material copolymerization.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP114683/1997 | 1997-05-02 | ||
| JP11468397 | 1997-05-02 | ||
| JP114683/97 | 1997-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1201145A CN1201145A (en) | 1998-12-09 |
| CN1105911C true CN1105911C (en) | 2003-04-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN98115259.7A Expired - Fee Related CN1105911C (en) | 1997-05-02 | 1998-04-30 | Humidity sensitive element and mfg. method therefor |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US6126312A (en) |
| EP (1) | EP0875752A1 (en) |
| CN (1) | CN1105911C (en) |
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| EP1262767B1 (en) * | 2001-05-31 | 2011-02-16 | Ngk Spark Plug Co., Ltd | Humidity sensor |
| US6842018B2 (en) * | 2002-05-08 | 2005-01-11 | Mcintosh Robert B. | Planar capacitive transducer |
| DE10260149A1 (en) | 2002-12-20 | 2004-07-01 | BSH Bosch und Siemens Hausgeräte GmbH | Device for determining the conductivity of laundry, clothes dryer and method for preventing layer formation on electrodes |
| US7059170B2 (en) * | 2004-02-27 | 2006-06-13 | Nielsen-Kellerman, Inc. | Method and apparatus for measuring relative humidity of a mixture |
| US7773835B2 (en) * | 2004-07-23 | 2010-08-10 | Arcelik Anonim Sirketi | Coating material and fiber optic sensor in which this coating material is used |
| WO2007098774A1 (en) * | 2006-02-22 | 2007-09-07 | Testo Ag | Gas sensor and method for its production |
| DE102006053689A1 (en) * | 2006-11-13 | 2008-05-15 | Vishay Bccomponents Beyschlag Gmbh | sensor arrangement |
| EP2494344A1 (en) * | 2009-10-30 | 2012-09-05 | Peter Hagl | Humidity sensor |
| CN102539429A (en) * | 2010-12-31 | 2012-07-04 | 财团法人工业技术研究院 | Temperature indication card and manufacture method thereof |
| DE102014200060A1 (en) * | 2013-08-28 | 2015-03-19 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Sensor element and sensor with a corresponding sensor element |
| CN104062321B (en) * | 2014-07-08 | 2016-08-24 | 苏州纳格光电科技有限公司 | Functional areas are latticed semiconductor gas sensor |
| CN104483453A (en) * | 2014-12-23 | 2015-04-01 | 安徽助成信息科技有限公司 | Manufacturing technology of lithium chloride humidity sensitive element |
| US10921300B2 (en) * | 2018-10-15 | 2021-02-16 | Microsoft Technology Licensing, Llc | Internal server air quality station |
| WO2020166616A1 (en) * | 2019-02-15 | 2020-08-20 | 国立研究開発法人産業技術総合研究所 | Humidity-sensitive composite material and humidity sensor |
| CN114397361B (en) * | 2021-02-23 | 2024-05-24 | 北京理工大学 | Preparation method of green polymer material for humidity sensor |
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1998
- 1998-04-30 EP EP98107983A patent/EP0875752A1/en not_active Withdrawn
- 1998-04-30 CN CN98115259.7A patent/CN1105911C/en not_active Expired - Fee Related
- 1998-05-01 US US09/071,280 patent/US6126312A/en not_active Expired - Lifetime
-
2000
- 2000-08-17 US US09/641,608 patent/US6428717B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0875752A1 (en) | 1998-11-04 |
| CN1201145A (en) | 1998-12-09 |
| US6126312A (en) | 2000-10-03 |
| US6428717B1 (en) | 2002-08-06 |
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