CN110579827A - method for adjusting azimuth angle of grating graver - Google Patents
method for adjusting azimuth angle of grating graver Download PDFInfo
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- CN110579827A CN110579827A CN201910887109.4A CN201910887109A CN110579827A CN 110579827 A CN110579827 A CN 110579827A CN 201910887109 A CN201910887109 A CN 201910887109A CN 110579827 A CN110579827 A CN 110579827A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
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Abstract
The application discloses a method for adjusting an azimuth angle of a grating ruling tool, which comprises the following steps: scribing lines on the substrate by using a grating ruling tool; scanning the scribed lines by using a topography scanner to obtain a cross-sectional view of the scribed lines; calculating a first ridge area at the first ridge and a second ridge area at the second ridge adjacent to the depression of the score line according to the sectional view; obtaining the current azimuth angle of the grating ruling tool according to the relation table among the first bump area, the second bump area, the bump area and the azimuth angle of the grating ruling tool; and judging whether the current azimuth angle meets the azimuth angle requirement of the grating ruling tool, and if not, adjusting the azimuth angle of the grating ruling tool. According to the technical scheme, the current azimuth angle of the grating ruling tool is obtained quantitatively through the first bump area, the second bump area and the relation table, the azimuth angle of the grating ruling tool is adjusted according to the current azimuth angle, accuracy of judgment and adjustment of the azimuth angle of the grating ruling tool is improved, and efficiency of adjustment of the azimuth angle of the grating ruling tool is improved.
Description
Technical Field
The application relates to the technical field of grating manufacturing, in particular to a method for adjusting an azimuth angle of a grating ruling tool.
background
In the grating manufacturing process, a grating is often obtained by extruding and polishing a film layer on a grating substrate plated with a metal film layer by using a grating ruling tool, wherein structural parameters and adjustment parameters of the grating ruling tool affect the groove shape of the grating, and further affect performance indexes of ruled gratings, so that the parameters need to be judged and adjusted to reduce the influence on the grating. The adjustment parameters of the grating ruling tool mainly comprise an azimuth angle, an orientation angle and a pitch angle, and the adjustment precision of the angles can directly influence the quality of the grating.
currently, the azimuth angle of the grating ruling tool is generally determined and adjusted by the following method: the method comprises the steps of scribing two scribed lines with a certain interval on a grating substrate, pressing edge types of a plurality of grating ruling knives between the two scribed lines, scribing a plurality of scribed lines, manually observing the relationship between the edge types of the grating ruling knives and the two scribed lines under a microscope to judge whether the azimuth angle meets the requirement, if not, adjusting the azimuth angle of the grating ruling knives, and then repeatedly executing the process until the azimuth angle meets the requirement. In the above process, since the azimuth angle is determined by artificially performing the shaping observation through the microscope to determine whether the azimuth angle meets the requirement, an observation error inevitably exists, so that the accuracy of determining the azimuth angle of the grating ruling tool is reduced, and accordingly, the accuracy of the adjusted azimuth angle of the grating ruling tool may be reduced, and the quality of the finally prepared grating is reduced. In addition, since the azimuth angle is not determined accurately, the steps of scribing, determining and adjusting are required to be performed repeatedly, thereby reducing the efficiency of adjusting the azimuth angle of the grating ruling tool.
In summary, how to improve the accuracy of determining and adjusting the azimuth angle of the grating ruling tool and improve the efficiency of adjusting the azimuth angle of the grating ruling tool is a technical problem to be solved urgently by those skilled in the art.
Disclosure of Invention
in view of this, an object of the present application is to provide a method for adjusting an azimuth angle of a grating ruling tool, which is used to improve the accuracy of determining and adjusting the azimuth angle of the grating ruling tool and facilitate improving the efficiency of adjusting the azimuth angle of the grating ruling tool.
in order to achieve the above purpose, the present application provides the following technical solutions:
A method of adjusting an azimuth angle of a grating ruling tool, comprising:
Adjusting the azimuth angle of a grating ruling tool in advance according to the azimuth angle requirement of the grating ruling tool, installing the grating ruling tool in a scribing machine, and scribing lines on a substrate by using the grating ruling tool;
scanning the scribed line by using a topography scanner to obtain a cross-sectional view of the scribed line;
calculating a first ridge area at a first ridge and a second ridge area at a second ridge adjacent to the valley of the scribed line from the cross-sectional view;
Comparing the first raised area and the second raised area with a relation table between the raised area and the azimuth angle of the grating ruling tool, which is established in advance, and obtaining the current azimuth angle of the grating ruling tool through the relation table;
And judging whether the current azimuth angle meets the azimuth angle requirement of the grating ruling tool, if not, adjusting the azimuth angle of the grating ruling tool according to the current azimuth angle and the azimuth angle requirement of the grating ruling tool, and returning to execute the step of ruling lines on the substrate by using the grating ruling tool until the current azimuth angle meets the azimuth angle requirement of the grating ruling tool.
preferably, calculating a first ridge area at a first ridge adjacent to the valley of the score line and a second ridge area at a second ridge from the cross-sectional view comprises:
Respectively fitting the contour shape of the first bump and the contour shape of the second bump according to the cross-sectional view to obtain a first curve function corresponding to the first bump and a second curve function corresponding to the second bump;
The first protrusion area is obtained by the first curve function, and the second protrusion area is obtained by the second curve function.
Preferably, a relation table between the bump area and the azimuth angle of the grating ruling tool is established in advance, and the relation table comprises the following steps:
presetting a plurality of different grating ruling tool azimuth angles;
Acquiring a theoretical grating groove shape corresponding to each azimuth angle of the grating ruling tool;
calculating the raised areas on two sides of the theoretical grating groove shape according to the theoretical grating groove shape;
and establishing the relation table by utilizing the azimuth angle of the grating ruling tool and the bump area corresponding to the azimuth angle of the grating ruling tool.
preferably, the step length of the azimuth angle of the grating ruling tool is a preset division value.
Preferably, scribing a scribe line on a substrate using the grating scriber, comprises:
scribing alternative scribed lines at different positions of the substrate by using the grating ruling tool;
scanning the reticle with a topography scanner, comprising:
respectively scanning the alternative scribed lines at different positions by using the topography scanner to obtain alternative sectional views corresponding to each alternative scribed line;
and selecting one alternative cross section with the best outline shape from the alternative cross sections as the cross section.
Preferably, the scanning the alternative reticle at different positions by the topography scanner includes:
And scanning the alternative scribed lines of the preset section by using the topography scanner.
Preferably, the topography scanner is an atomic force microscope or a scanning electron microscope.
The application provides a method for adjusting an azimuth angle of a grating ruling tool, which comprises the following steps: adjusting the azimuth angle of the grating ruling tool in advance according to the azimuth angle requirement of the grating ruling tool, installing the grating ruling tool in a scribing machine, and scribing lines on the substrate by using the grating ruling tool; scanning the scribed line by using a topography scanner to obtain a cross-sectional view of the scribed line; calculating a first ridge area at the first ridge and a second ridge area at the second ridge adjacent to the depression of the score line according to the sectional view; comparing the first bump area and the second bump area with a relation table between the pre-established bump area and the azimuth angle of the grating ruling tool, and obtaining the current azimuth angle of the grating ruling tool through the relation table; and judging whether the current azimuth angle meets the azimuth angle requirement of the grating ruling tool, if not, adjusting the azimuth angle of the grating ruling tool according to the current azimuth angle and the azimuth angle requirement of the grating ruling tool, and returning to execute the step of ruling lines on the substrate by using the grating ruling tool until the current azimuth angle meets the azimuth angle requirement of the grating ruling tool.
According to the technical scheme, the scribed line formed by scribing the grating ruling tool on the substrate is scanned to obtain the cross-sectional view of the scribed line, the first bump area and the second bump area on the two sides of the scribed line are calculated through the cross-sectional view, the current azimuth angle of the grating ruling tool is quantitatively obtained through the relation table between the bump areas and the azimuth angle of the grating ruling tool, then whether the obtained current azimuth angle meets the azimuth angle requirement of the grating ruling tool or not can be judged, and the scribing step is returned to when the obtained current azimuth angle does not meet the requirement. In addition, the current azimuth angle can be used as a reference to quantitatively adjust the size and the direction of the azimuth angle of the grating ruling tool, and the azimuth angle is judged and adjusted without pressing edges and scribing a plurality of lines by the grating ruling tool, so that the adjustment efficiency of the azimuth angle of the grating ruling tool can be improved conveniently.
drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
fig. 1 is a flowchart of a method for adjusting an azimuth angle of a grating ruling tool according to an embodiment of the present disclosure;
Fig. 2 is a cross-sectional view of a reticle obtained by scanning provided in an embodiment of the present application.
Detailed Description
the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1 and fig. 2, in which fig. 1 shows a flowchart of a method for adjusting an azimuth angle of a grating ruling tool according to an embodiment of the present disclosure, and fig. 2 shows a cross-sectional view of a scribe line obtained by scanning according to an embodiment of the present disclosure. The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application can comprise the following steps:
s11: adjusting the azimuth angle of the grating ruling tool in advance according to the azimuth angle requirement of the grating ruling tool, installing the grating ruling tool in a scribing machine, and scribing lines on the substrate by using the grating ruling tool.
Preliminarily adjusting the azimuth angle of the grating ruling tool according to the azimuth angle requirement of the grating ruling tool in advance, then installing the grating ruling tool with the adjusted azimuth angle in a scribing machine, and scribing a scribing line A on the substrate by using the grating ruling tool through the scribing machine.
In order to make the adjustment of the azimuth angle of the grating ruling tool closer to the real application environment of the grating ruling tool and improve the accuracy of the judgment and adjustment of the azimuth angle of the grating ruling tool, a film layer (specifically, a metal film layer) for preparing a grating can be arranged on the substrate, so that the grating ruling tool can scribe lines a on the film layer of the substrate.
S12: and scanning the scribed line by using a topography scanner to obtain a cross-sectional view of the scribed line.
Considering that the size of the scribe line a formed by the grating ruling tool is relatively small, in order to facilitate accurately obtaining the size of the scribe line a and accurately obtaining the current azimuth angle of the grating ruling tool, the scribe line a may be scanned by using a topography scanner to obtain a cross-sectional view of the scribe line a.
S13: the area of the first ridge at the first ridge and the area of the second ridge at the second ridge adjacent to the depression of the score line are calculated from the cross-sectional view.
after the cross-sectional view of the scribe line a is obtained by scanning, a first ridge area AS at a first ridge adjacent to a depression of the scribe line a (i.e., the deepest portion of the scribe line a) and a second ridge area BS at a second ridge connected to the depression of the scribe line a may be calculated from the cross-sectional view of the scribe line a, that is, ridge areas rising upward on both sides of the scribe line a may be calculated, respectively.
S14: and comparing the first bump area and the second bump area with a pre-established relation table between the bump area and the azimuth angle of the grating ruling tool, and obtaining the current azimuth angle of the grating ruling tool through the relation table.
And comparing the calculated first bump area AS and second bump area BS with a pre-established relation table between the bump area and the azimuth angle of the grating ruling tool, and obtaining the current azimuth angle of the grating ruling tool through the relation table. The relation table comprises a plurality of different grating ruling tool azimuth angles and a bump area corresponding to each grating ruling tool azimuth angle.
the current azimuth angle of the grating ruling tool can be obtained quantitatively through the relation table, and compared with the method that the azimuth angle of the grating ruling tool is obtained roughly through microscope observation at present, the method and the device for obtaining the azimuth angle of the grating ruling tool can improve the accuracy and the precision of obtaining the azimuth angle of the grating ruling tool.
S15: and judging whether the current azimuth meets the azimuth requirement of the grating ruling tool, if so, finishing the judgment and adjustment of the current azimuth of the grating ruling tool, and if not, executing the step S16.
S16: and adjusting the azimuth angle of the grating ruling tool according to the current azimuth angle and the azimuth angle requirement of the grating ruling tool, and returning to execute the step of ruling lines on the substrate by using the grating ruling tool until the current azimuth angle meets the azimuth angle requirement of the grating ruling tool.
After the current azimuth angle of the grating ruling tool is obtained, whether the current azimuth angle meets the azimuth angle requirement of the grating ruling tool or not is judged, if yes, the current azimuth angle of the grating ruling tool meets the azimuth angle requirement of the grating ruling tool, and at the moment, the grating ruling tool in the current state can participate in the scribing of a grating film layer and the preparation of a grating, so that a grating with high quality can be obtained; if not, it is indicated that the current azimuth angle of the grating ruling tool does not meet the azimuth angle requirement of the grating ruling tool, at this time, the azimuth angle of the grating ruling tool may be quantitatively adjusted (specifically, the offset direction of the grating ruling tool, the offset size of the azimuth angle, and the like) according to the current azimuth angle of the grating ruling tool and the azimuth angle requirement of the grating ruling tool, and then, the step S11 may be returned to be executed to scribe a scribe line a on the substrate by using the grating ruling tool and subsequent related steps until the current azimuth angle of the grating ruling tool meets the azimuth angle requirement of the grating ruling tool.
since the quantized current azimuth angle of the grating ruling tool can be obtained through the relation table, the method and the device can accurately determine the degree of adjustment of the azimuth angle of the grating ruling tool according to the current azimuth angle of the grating ruling tool (namely, the azimuth angle of the grating ruling tool can be accurately adjusted), so that the grating ruling tool can accurately meet the requirement of the azimuth angle of the grating ruling tool, and therefore compared with the existing method that the azimuth angle of the grating ruling tool cannot be accurately obtained, the method and the device can improve the accuracy and efficiency of adjustment of the azimuth angle of the grating ruling tool, and therefore the quality of gratings manufactured by the grating ruling tool can be improved. In addition, because the judgment and adjustment of the azimuth angle of the grating ruling tool are realized without pressing the edge of the grating ruling tool and ruling a plurality of lines, the efficiency of judging and adjusting the azimuth angle of the grating ruling tool can be improved.
according to the technical scheme, the scribed line formed by scribing the grating ruling tool on the substrate is scanned to obtain the cross-sectional view of the scribed line, the first bump area and the second bump area on the two sides of the scribed line are calculated through the cross-sectional view, the current azimuth angle of the grating ruling tool is quantitatively obtained through the relation table between the bump areas and the azimuth angle of the grating ruling tool, then whether the obtained current azimuth angle meets the azimuth angle requirement of the grating ruling tool or not can be judged, and the scribing step is returned to when the obtained current azimuth angle does not meet the requirement. In addition, the current azimuth angle can be used as a reference to quantitatively adjust the size and the direction of the azimuth angle of the grating ruling tool, and the azimuth angle is judged and adjusted without pressing edges and scribing a plurality of lines by the grating ruling tool, so that the adjustment efficiency of the azimuth angle of the grating ruling tool can be improved conveniently.
The method for adjusting the azimuth angle of the grating ruling tool according to the embodiment of the application, which calculates the area of a first bump at a first bump adjacent to a depression of a ruled line and the area of a second bump at a second bump according to a cross-sectional view, may include:
Respectively fitting the contour shape of the first bump and the contour shape of the second bump according to the cross-sectional diagram to obtain a first curve function corresponding to the first bump and a second curve function corresponding to the second bump;
and obtaining a first bump area through the first curve function, and obtaining a second bump area through the second curve function.
The first bump area and the second bump area may be calculated specifically as follows:
And respectively fitting the contour shape of the first bulge and the contour shape of the second bulge on two sides of the groove of the scribed line according to the cross-sectional diagram to obtain a first curve function corresponding to the first bulge and a second curve function corresponding to the second bulge, then integrating the first curve function to obtain the area of the first bulge, and integrating the second curve function to obtain the area of the second bulge.
the method for obtaining the curve through fitting and obtaining the raised area through the curve can improve the accuracy and precision of obtaining the raised area, so that the accuracy and precision of the obtained current azimuth angle of the grating ruling tool can be improved.
The contour shape of the first bump and the contour shape of the second bump may be fitted by least square fitting or the like to obtain a first curve and a second curve correspondingly.
The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application, which pre-establishes a relation table between the bump area and the azimuth angle of the grating ruling tool, may include:
presetting a plurality of different grating ruling tool azimuth angles;
Acquiring a theoretical grating groove shape corresponding to each azimuth angle of the grating ruling tool;
calculating the bulging areas of two sides of the theoretical grating groove according to the theoretical grating groove;
And establishing a relation table by utilizing the azimuth angle of the grating ruling tool and the bump area corresponding to the azimuth angle of the grating ruling tool.
the specific process of establishing the relation table between the bump area and the azimuth angle of the grating ruling tool in advance comprises the following steps:
presetting a plurality of different grating ruling tool azimuth angles, acquiring theoretical grating grooves corresponding to the grating ruling tool azimuth angles according to the orientation and the state of the grating ruling tool corresponding to each grating ruling tool azimuth angle, calculating the bulge areas on two sides of each theoretical grating groove through the theoretical grating grooves, and establishing a relation table through the grating ruling tool azimuth angles and the calculated bulge areas corresponding to the grating ruling tool azimuth angles.
According to the method for adjusting the azimuth angle of the grating ruling tool, the step length of the azimuth angle of the grating ruling tool can be a preset division value.
In the established relation table between the raised area and the azimuth angle of the grating ruling tool, the step length of the azimuth angle of the grating ruling tool can be a preset division value, namely the difference value between the azimuth angles of two adjacent grating ruling tools can be the preset division value, so that the precision and the accuracy of the current azimuth angle of the grating ruling tool obtained according to the relation table are improved, the accuracy of adjusting the azimuth angle of the grating ruling tool is improved, and the quality of the finally prepared grating is improved.
the preset division value can be specifically 2', and of course, the preset division value can also be adjusted according to the situation of a division line formed by the grating ruling tool, and the specific numerical value of the preset division value is not limited in any way in the application.
The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application, which uses the grating ruling tool to scribe lines on the substrate, can include:
Scribing alternative scribed lines at different positions of the substrate by using a grating ruling tool;
Scanning the reticle with the topography scanner may include:
Respectively scanning the alternative scribed lines at different positions by using a topography scanner to obtain alternative sectional views corresponding to each alternative scribed line;
And selecting one alternative cross section with the best profile shape from the alternative cross sections as the cross section.
The alternative scribed lines can be scribed at different positions of the substrate by using the grating scribing tool to obtain a plurality of alternative scribed lines, correspondingly, when the topography scanner is used for scanning, the alternative scribed lines at different positions can be respectively scanned by using the topography scanner to obtain alternative cross-sectional views corresponding to each alternative scribed line, and one alternative cross-sectional view with the best profile shape (specifically, the profile shape is continuous and is more obvious) is selected from the multiple alternative cross-sectional views as a cross-sectional view to calculate the first bump area and the second bump area.
by the aid of the method, the quality of the finally acquired cross-sectional view can be improved, and therefore the calculation accuracy and the calculation accuracy of the first bump area and the second bump area can be improved.
The method for adjusting the azimuth angle of the grating ruling tool provided by the embodiment of the application utilizes the topography scanner to scan the alternative ruling lines at different positions respectively, and can include:
And scanning the alternative scribed lines of the preset section by using a topography scanner.
In order to improve the adjustment efficiency of the azimuth angle of the grating ruling tool, the alternative ruled lines of the preset section can be scanned by using a topography scanner instead of the alternative ruled lines of the whole section.
The preset section can be set according to the quality of the alternative scribed lines, so that a cross-sectional view with high quality can be obtained.
According to the method for adjusting the azimuth angle of the grating ruling tool, the morphology scanner can be an atomic force microscope or a scanning electron microscope.
The topography scanner for scanning the scribed lines or the alternative scribed lines may specifically be an atomic force microscope or a scanning electron microscope to obtain a cross-sectional view with a relatively high resolution, thereby facilitating to improve the accuracy and precision of obtaining the first bump area and the second bump area.
it is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include elements inherent in the list. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element. In addition, parts of the above technical solutions provided in the embodiments of the present application, which are consistent with the implementation principles of corresponding technical solutions in the prior art, are not described in detail so as to avoid redundant description.
the previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A method for adjusting the azimuth angle of a grating ruling tool is characterized by comprising the following steps:
Adjusting the azimuth angle of a grating ruling tool in advance according to the azimuth angle requirement of the grating ruling tool, installing the grating ruling tool in a scribing machine, and scribing lines on a substrate by using the grating ruling tool;
scanning the scribed line by using a topography scanner to obtain a cross-sectional view of the scribed line;
calculating a first ridge area at a first ridge and a second ridge area at a second ridge adjacent to the valley of the scribed line from the cross-sectional view;
comparing the first raised area and the second raised area with a relation table between the raised area and the azimuth angle of the grating ruling tool, which is established in advance, and obtaining the current azimuth angle of the grating ruling tool through the relation table;
And judging whether the current azimuth angle meets the azimuth angle requirement of the grating ruling tool, if not, adjusting the azimuth angle of the grating ruling tool according to the current azimuth angle and the azimuth angle requirement of the grating ruling tool, and returning to execute the step of ruling lines on the substrate by using the grating ruling tool until the current azimuth angle meets the azimuth angle requirement of the grating ruling tool.
2. The method of claim 1, wherein calculating a first ridge area at a first ridge adjacent to a valley of the reticle, a second ridge area at a second ridge from the cross-sectional view comprises:
Respectively fitting the contour shape of the first bump and the contour shape of the second bump according to the cross-sectional view to obtain a first curve function corresponding to the first bump and a second curve function corresponding to the second bump;
The first protrusion area is obtained by the first curve function, and the second protrusion area is obtained by the second curve function.
3. the method of claim 1, wherein pre-establishing a relationship table between land area and grating ruling tool azimuth comprises:
presetting a plurality of different grating ruling tool azimuth angles;
Acquiring a theoretical grating groove shape corresponding to each azimuth angle of the grating ruling tool;
calculating the raised areas on two sides of the theoretical grating groove shape according to the theoretical grating groove shape;
and establishing the relation table by utilizing the azimuth angle of the grating ruling tool and the bump area corresponding to the azimuth angle of the grating ruling tool.
4. the method according to claim 3, wherein the step size of the azimuth angle of the grating ruling tool is a preset division value.
5. The method of claim 1, wherein scribing a scribe line on a substrate with the grating scribe tool comprises:
Scribing alternative scribed lines at different positions of the substrate by using the grating ruling tool;
Scanning the reticle with a topography scanner, comprising:
respectively scanning the alternative scribed lines at different positions by using the topography scanner to obtain alternative sectional views corresponding to each alternative scribed line;
And selecting one alternative cross section with the best outline shape from the alternative cross sections as the cross section.
6. The method of claim 5, wherein scanning the alternative reticle at different positions with the topography scanner comprises:
and scanning the alternative scribed lines of the preset section by using the topography scanner.
7. The method of claim 6, wherein the topography scanner is an atomic force microscope or a scanning electron microscope.
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