CN110566814A - Pipeline valve box and groove type wet processing equipment - Google Patents

Pipeline valve box and groove type wet processing equipment Download PDF

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Publication number
CN110566814A
CN110566814A CN201910910635.8A CN201910910635A CN110566814A CN 110566814 A CN110566814 A CN 110566814A CN 201910910635 A CN201910910635 A CN 201910910635A CN 110566814 A CN110566814 A CN 110566814A
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CN
China
Prior art keywords
pipeline
box body
valve
branch
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910910635.8A
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Chinese (zh)
Inventor
左国军
王靖
万红朝
余兴梅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changzhou Jiejiachuang Precision Machinery Co Ltd
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Changzhou Jiejiachuang Precision Machinery Co Ltd
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Application filed by Changzhou Jiejiachuang Precision Machinery Co Ltd filed Critical Changzhou Jiejiachuang Precision Machinery Co Ltd
Priority to CN201910910635.8A priority Critical patent/CN110566814A/en
Publication of CN110566814A publication Critical patent/CN110566814A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/08—Pipe-line systems for liquids or viscous products
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00—Arrangements for supervising or controlling working operations
    • F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D5/00—Protection or supervision of installations
    • F17D5/02—Preventing, monitoring, or locating loss
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Water Supply & Treatment (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)

Abstract

The invention provides a pipeline valve box and a groove type wet processing device, wherein the pipeline valve box comprises: a conduit including at least one feed conduit, each feed conduit communicating with at least one branch conduit; a manual valve provided on the supply pipe; the pneumatic valve is arranged on the branch pipeline; and a box body which is covered on the supply pipeline and the branch pipeline, wherein the manual valve and the pneumatic valve are positioned in the box body. The pipeline valve box disclosed by the invention carries out unified packaging management on the manual valve and the pneumatic valve which are used for controlling the opening of the supply pipeline and the branch pipeline, is convenient to close the supply pipeline and the branch pipeline in time when a liquid leakage phenomenon occurs, carries out maintenance, reduces harm caused by liquid leakage, prevents the continuous liquid leakage, and is convenient to maintain in time so as to ensure that the production and the processing are carried out smoothly.

Description

Pipeline valve box and groove type wet processing equipment
Technical Field
The invention relates to the field of medicament supply, in particular to a pipeline valve box and a groove type wet processing device.
Background
in the fields of chemical engineering, mechanical equipment manufacturing, mineral resource utilization and the like, the medicament supply is generally needed in the processing technology, but in the traditional medicament supply, a pure water pipeline and a medicament pipeline are arranged together, the valve arrangement for controlling the pure water pipeline and the medicament pipeline is dispersed, and the management is inconvenient. For example, in a tank type cleaning device and a tank type wet processing device for solar silicon wafers, liquid medicine needs to be conveyed to each process tank, peripheral liquid medicine is connected to a liquid medicine tank through a pipeline, a liquid medicine pipeline before the solar silicon wafers is mixed with a pure water pipeline, the liquid medicine pipeline is open, liquid medicine valves are distributed and dispersed, when liquid leakage occurs, the liquid medicine valves dispersed in the process need to be closed one by one, and operation is inconvenient; the pipeline cannot be closed in time, and the liquid leakage phenomenon cannot be stopped in time, so that the maintenance speed is slow, and the smooth production is influenced; the leakage amount is more, the environment is polluted, the waste of the medicament is caused, and even the toxic and harmful medicament easily causes harm to operators.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art.
To this end, a first aspect of the invention provides a manifold.
The invention provides a trough type wet processing device in a second aspect.
in view of the above, according to a first aspect of the present invention, there is provided a pipeline valve box, comprising: a conduit including at least one feed conduit, each feed conduit communicating with at least one branch conduit; a manual valve provided on the supply pipe; the pneumatic valve is arranged on the branch pipeline; and the box body is covered on the supply pipeline and the branch pipeline, and the manual valve and the pneumatic valve are positioned in the box body.
According to the invention, through the arrangement of the pipeline, the manual valve, the pneumatic valve and the box body, the supply pipeline and the branch pipeline are arranged in the box body, the manual valve is arranged on the supply pipeline, the pneumatic valve is arranged on the branch pipeline, the manual valve and the pneumatic valve which control the supply pipeline and the branch pipeline to be opened are uniformly packaged and managed, when a liquid leakage phenomenon occurs, the supply pipeline and the branch pipeline are conveniently closed in time for maintenance, and the damage caused by the liquid leakage is reduced. Further, through the setting of manual valve, when the leakage appears in lateral conduit or supply line, can directly close all lateral conduits that communicate in this supply line through closing the manual valve on the supply line, further improve the speed that the pipeline was closed, prevent going on continuously of leakage, reduce the leakage harm, be convenient for in time maintain be convenient for produce the smooth going on of processing.
Still further, the supply line that sets up in the box can all be used for supplying with the medicament, and pure water supply line sets up in the box outside, realizes supplying with the water route with the medicament in the technology and supplies the isolation setting, and when the feed line or the lateral conduit that are located in the box appeared the weeping, operating personnel can directly judge the weeping to be the medicament, reduces operating personnel and in the case of unclear the weeping kind the risk of dealing with the weeping by the acid-base liquid medicine spattering in a trade, makes the maintenance and the maintenance of feed line and lateral conduit safer.
in addition, according to the pipeline valve box in the above technical solution provided by the present invention, the following additional technical features may also be provided:
in the above technical solution, further, the pipeline valve box further includes: and the leakage detection switch is arranged at least one of the branch pipeline, the supply pipeline and the box body.
In the technical scheme, due to the fact that leakage is sporadic in the production process, a professional can not be set to observe whether leakage occurs in the pipeline, and leakage cannot be found by the technology. The leakage detection switch in the technical scheme can be arranged on the pipeline walls of the branch pipeline and the supply pipeline and also can be arranged on the side wall or the bottom plate of the box body, when leakage occurs in the pipeline, the leakage detection switch can be timely known to remind an operator to timely treat the leakage, the leakage finding speed is further increased, and the leakage phenomenon can be stopped as soon as possible.
In any of the above technical solutions, further, the pipeline valve box further includes: the controller is connected with the leakage detection switch; and the alarm is connected with the controller.
In this technical scheme, through the setting of controller and alarm, when the controller learns that weeping detection switch detects the weeping phenomenon, the control alarm was reported to the police, and the mode of reporting to the police through the alarm reminds the operating personnel in time to maintain the weeping pipeline, and further weeping pipeline maintenance speed prevents going on continuously of weeping, reduces the weeping harm, and the in time maintenance of being convenient for goes on smoothly of the production and processing of being convenient for.
In any of the above technical solutions, further, the box body includes: a box body; the top plate is hinged to the top of the box body, and the branch pipeline extends out of the box body through a gap between the box body and the top plate; the bottom plate is connected with the box body and is positioned at the bottom of the box body; the pipeline fixing plate is used for fixing the supply pipeline and the branch pipeline on the inner wall of the box body; and the observation window is arranged on the box body.
In the technical scheme, the box body comprises a box body, a top plate and a bottom plate, and when liquid leakage occurs in the pipeline, the liquid leakage can be dropped into the box body, so that the liquid leakage can be prevented from overflowing; the branch pipeline extends out of the box body through a gap between the box body and the top plate, and the branch pipeline still drops into the box body when liquid leakage occurs in the branch pipeline in a mode of extending out from the top of the box body, so that the leakage can be prevented from overflowing, and harm to people or the environment caused by the leakage is avoided; through the setting of observation window, be convenient for observe the operating condition of box interior pipeline, manual valve and pneumatic valve, if the problem can in time discover.
In any of the above technical solutions, further, the pipeline valve box further includes: the adapter is arranged at the inlet end of the supply pipeline and the outlet end of the branch pipeline.
In this technical scheme, the weeping can take place generally in the switching department or the valve department of pipeline, sets up the switching mouth at the entry end of supply line and the exit end of lateral conduit, and the switching mouth is located the box equally, all sets up switching department and the valve that send the weeping easily in the liquid medicine supply process in the box, encapsulates in unison easy leak point, and the unified management improves weeping pipeline maintenance speed when the weeping takes place, and the in time maintenance of being convenient for goes on smoothly of the production and processing of being convenient for.
In any of the above technical solutions, further, the pipeline valve box further includes: and the medicament type label is arranged on the branch pipeline and/or the inner wall of the box body.
In this technical scheme, through the setting of medicament kind label, can discover the kind of weeping as early as possible when taking place the weeping, on the one hand, the operation personnel can dress corresponding protective device and prevent that the medicament from causing harm to the human body, and on the other hand can carry out innocent treatment to the weeping to corresponding chemical substance of puting in to the box to the weeping kind, reduces the harm that the weeping caused.
in any of the above technical solutions, further, the pipeline valve box further includes: the waterway supply pipeline is arranged outside the box body; wherein the supply conduit and the branch conduit are medicament supply conduits.
In this technical scheme, through waterway pipeline's setting to carry pure water in the production technology, set up in the box outside and the separation of medicament supply line sets up, when feed line or lateral duct that are located the box appear the weeping, operating personnel can directly judge the weeping and be the medicament, reduce operating personnel and go to deal with the risk that the weeping was spattered by the acid-base liquid medicine under the condition of unclear weeping kind, make the maintenance and the maintenance of feed line and lateral duct safer.
According to the second aspect of the present invention, there is also provided a tank type wet processing apparatus, comprising:
the pipeline valve box that any above-mentioned technical scheme provided.
The trough type wet processing equipment provided by the second aspect of the invention has all the beneficial effects of the pipeline valve box because the pipeline valve box provided by any one of the technical schemes is included.
In addition, according to the trough-type wet processing equipment in the above technical solution provided by the present invention, the following additional technical features may also be provided:
In the above technical solution, further, the tank type wet processing apparatus further includes: the pipeline valve box is arranged on one side of the treatment tank, and a branch pipeline of the pipeline valve box is communicated to the treatment tank.
in this embodiment, the chemical is supplied into the treatment tank through the branch pipe, and the workpiece is treated by the treatment tank.
Specifically, the treatment tank may be any tank body capable of performing wet treatment on the supply, such as an acid washing tank, a water washing tank, an alkali washing tank, a wet plating tank, and the like.
In any one of the above embodiments, the processing tank may be a plurality of processing tanks, and at least one of the plurality of processing tanks may be a cleaning tank.
in this technical scheme, wash the work piece through the setting of washing tank, supply the washing liquid to the washing tank through the branch pipeline.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
the above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic view of the internal structure of a piping cage according to one embodiment of the present invention;
FIG. 2 is a side view of the internal structure of the plumbing valve box of the embodiment of FIG. 1;
FIG. 3 is a top view of the internal structure of the piping cage of the embodiment shown in FIG. 1;
FIG. 4 is a perspective view of the internal structure of the plumbing valve box of the embodiment of FIG. 1;
FIG. 5 is a schematic structural view of a tank wet processing apparatus according to an embodiment of the present invention;
FIG. 6 is a front view of the trough wet processing apparatus of the embodiment shown in FIG. 5;
Fig. 7 is a schematic structural view of a tank type wet processing apparatus according to another embodiment of the present invention.
wherein, the correspondence between the reference numbers and the part names in fig. 1 to 7 is:
2 supply pipe, 4 branch pipe, 6 manual valve, 8 pneumatic valves, 10 boxes, 12 box bodies, 14 top plates, 16 bottom plates, 18 observation windows, 20 switching ports, 22 medicament type labels, 24 pipe fixing plates, 26 brackets and 28 processing tanks.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced otherwise than as specifically described herein, and thus the scope of the present invention is not limited by the specific embodiments disclosed below.
A pipe valve box and a groove-type wet processing apparatus provided according to some embodiments of the present invention will be described below with reference to fig. 1 to 7.
example one
As shown in fig. 1 to 4, a first embodiment of the present invention provides a pipe valve box including: a pipeline, a manual valve 6, an air-operated valve 8 and a box body 10.
Wherein the pipeline comprises at least one feed pipeline 2, each feed pipeline 2 is communicated with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the air-operated valve 8 is arranged on the branch pipe 4; the tank 10 is covered with the supply pipe 2 and the branch pipe 4, and the manual valve 6 and the air-operated valve 8 are located in the tank 10.
According to the invention, the supply pipeline 2 and the branch pipeline 4 are arranged in the box body 10 through the arrangement of the pipeline, the manual valve 6, the pneumatic valve 8 and the box body 10, the manual valve 6 is arranged on the supply pipeline 2, the pneumatic valve 8 is arranged on the branch pipeline 4, the manual valve 6 and the pneumatic valve 8 for controlling the supply pipeline and the branch pipeline to be opened are packaged and managed in a unified way, when a liquid leakage phenomenon occurs, the supply pipeline 2 and the branch pipeline 4 can be closed in time for maintenance, and the damage caused by the liquid leakage is reduced. Further, through the setting of manual valve 6, when the leakage appears in lateral conduit 4 or supply line 2, can directly close all lateral conduits 4 that communicate in this supply line 2 through closing manual valve 6 on the supply line 2, further improve the speed that the pipeline was closed, prevent going on continuously of leakage, reduce the weeping harm, be convenient for in time maintain be convenient for produce the going on smoothly of processing.
Specifically, the supply pipeline 2 arranged in the box body 10 is used for supplying the medicament, the pure water supply pipeline is arranged outside the box body 10, the medicament supply and waterway supply in the process are isolated, when the supply pipeline 2 or the branch pipeline 4 in the box body 10 leaks, an operator can directly judge that the leaked liquid is the medicament, the risk that the operator treats the leaked liquid and is splashed by the acid-base liquid medicament under the condition that the type of the leaked liquid is not clear is reduced, and the maintenance and the repair of the supply pipeline 2 and the branch pipeline 4 are safer.
Example two
As shown in fig. 1 to 4, a first embodiment of the present invention provides a pipe valve box including: a pipeline, a manual valve 6, an air-operated valve 8 and a box body 10.
Wherein the pipeline comprises at least one feed pipeline 2, each feed pipeline 2 is communicated with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the air-operated valve 8 is arranged on the branch pipe 4; the tank 10 is covered with the supply pipe 2 and the branch pipe 4, and the manual valve 6 and the air-operated valve 8 are located in the tank 10.
Further, the pipeline valve box further comprises: and a leakage detection switch provided at least one of the branch pipe 4, the supply pipe 2, and the tank 10.
In the embodiment, due to the sporadic liquid leakage in the production process, a professional can not be set to observe whether the liquid leakage phenomenon occurs in the pipeline, and the liquid leakage can not be found by the technology. The liquid leakage detection switch in the technical scheme can be arranged on the pipeline walls of the branch pipeline 4 and the supply pipeline 2, and also can be arranged on the side wall or the bottom plate 16 of the box body 10, when liquid leakage occurs in the pipeline, the liquid leakage detection switch can be timely known to remind an operator of timely processing, the speed of finding liquid leakage is further improved, and the liquid leakage phenomenon can be stopped as soon as possible.
Further, the pipeline valve box further comprises: the controller is connected with the leakage detection switch; and the alarm is connected with the controller.
in this embodiment, through the setting of controller and alarm, when the controller learns that weeping detection switch detects the weeping phenomenon, the control alarm was reported to the police, and the mode of reporting to the police through the alarm reminds the operating personnel in time to maintain the weeping pipeline, and further weeping pipeline maintenance speed prevents going on continuously of weeping, reduces the weeping harm, is convenient for in time maintain the smooth of being convenient for production and processing and goes on.
EXAMPLE III
As shown in fig. 1 to 7, a first embodiment of the present invention provides a pipe valve box including: a pipeline, a manual valve 6, an air-operated valve 8 and a box body 10.
Wherein the pipeline comprises at least one feed pipeline 2, each feed pipeline 2 is communicated with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the air-operated valve 8 is arranged on the branch pipe 4; the tank 10 is covered with the supply pipe 2 and the branch pipe 4, and the manual valve 6 and the air-operated valve 8 are located in the tank 10.
further, as shown in fig. 5, the case 10 includes: a case body 12; the top plate 14 is hinged to the top of the box body 12, and the branch pipeline 4 extends out of the box body 12 through a gap between the box body 12 and the top plate 14; a bottom plate 16 connected to the case body 12 and located at the bottom of the case body 12; a pipe fixing plate 24, through which the supply pipe 2 and the branch pipe 4 are fixed to the inner wall of the box body 12; and an observation window 18 provided in the case body 12.
in this embodiment, the box 10 includes a box body 12, a top plate 14 and a bottom plate 16, and when liquid leakage occurs in the pipeline, the liquid will drip into the box 10, so as to prevent the leakage liquid from overflowing; the branch pipelines 4 extend out of the box body 12 through a gap between the box body 12 and the top plate 14, the branch pipelines 4 extend out of the top of the box body 10, and when liquid leakage occurs to the branch pipelines 4, the branch pipelines still drop into the box body 10 to prevent the liquid leakage from overflowing, so that the liquid leakage is prevented from harming people or the environment; through the arrangement of the observation window 18, the working states of the pipeline, the manual valve 6 and the pneumatic valve 8 in the box body 10 can be observed conveniently, and if problems occur, the problems can be found in time.
Further, the pipeline valve box further comprises: the adapter 20 is provided at the inlet end of the supply line 2 and the outlet end of the branch line 4.
In this embodiment, the weeping usually will take place at the switching department or the valve department of pipeline, sets up switching mouth 20 at the entry end of supply line 2 and the exit end of lateral conduit 4, and switching mouth 20 is located box 10 equally, all sets up switching department and the valve that the weeping was sent easily in the liquid medicine supply process in box 10, encapsulates in unison easy leak point, and the unified management improves weeping pipeline maintenance speed when the weeping takes place, and the in time maintenance is convenient for go on smoothly of the production and processing of being convenient for.
Further, the pipeline valve box further comprises: the medicine type label 22, the medicine type label 22 is provided on the inner wall of the branch pipe 4 and/or the case 10.
in this embodiment, the type of the leaked liquid can be found as soon as possible by setting the chemical type tag 22, so that on one hand, the operator can wear a corresponding protective tool to prevent the chemical from causing harm to the human body, and on the other hand, the operator can put a corresponding chemical into the box body 10 according to the type of the leaked liquid to perform harmless treatment on the leaked liquid, thereby reducing the harm caused by the leaked liquid.
Further, the pipeline valve box further comprises: a waterway supply pipe arranged outside the case 10; the supply line 2 and the branch line 4 are medicine supply lines.
In this embodiment, through the setting of waterway pipeline for the pure water of production technology, set up in the outside of box 10 and the separation setting of medicament supply line, when feed line 2 or lateral conduit 4 that are located in box 10 appear the weeping, operating personnel can directly judge that the weeping is the medicament, reduces operating personnel and in case of unclear the weeping kind the risk of dealing with the weeping and being splashed by acid-base liquid medicine, makes the maintenance and the maintenance of feed line 2 and lateral conduit 4 safer.
example four
As shown in fig. 1 to 7, a first embodiment of the present invention provides a tank type wet processing apparatus including:
any one of the above embodiments provides a manifold.
The trough type wet processing equipment provided by the second aspect of the invention has all the beneficial effects of the pipeline valve box because the pipeline valve box provided by any one of the technical schemes is included.
EXAMPLE five
As shown in fig. 1 to 7, a first embodiment of the present invention provides a tank type wet processing apparatus including:
Any one of the above embodiments provides a manifold.
further, the trough-type wet processing equipment further comprises: a processing tank 28, a pipeline valve box is arranged at one side of the processing tank 28, and a branch pipeline 4 of the pipeline valve box is communicated to the processing tank 28.
In this embodiment, the chemical is fed into the processing bath 28 through the branch pipe 4, and the workpiece is processed through the processing bath 28.
Specifically, the treatment tank 28 may be any tank body capable of performing wet treatment on the supply, such as an acid washing tank, a water washing tank, an alkali washing tank, a wet plating tank, and the like.
Further, the processing bath 28 is plural, and at least one of the plural processing baths 28 is a cleaning bath.
In this embodiment, the workpiece is cleaned by the provision of the cleaning tank, and the cleaning liquid is supplied to the cleaning tank through the branch pipe 4.
Further, as shown in fig. 7, the manifold valve housing may be disposed on a bracket 26.
Through the setting of support 26, can make pipeline valve case fixed more firm, reduce the weeping probability, the medicament is carried safelyr.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
As shown in fig. 1 to 7, the piping valve box of this embodiment includes: the device comprises a pipeline, a manual valve 6, an air-operated valve 8, a box body 10, a liquid leakage detection switch, an alarm, a controller and a water path supply pipeline.
wherein the pipeline comprises at least one feed pipeline 2, each feed pipeline 2 is communicated with at least one branch pipeline 4; the manual valve 6 is arranged on the supply pipeline 2; the air-operated valve 8 is arranged on the branch pipe 4; the tank 10 is covered with the supply pipe 2 and the branch pipe 4, and the manual valve 6 and the air-operated valve 8 are located in the tank 10. In order to centralize the liquid medicine valve and facilitate the management of operators, a liquid leakage detection switch is arranged at least one position of the branch pipeline 4, the supply pipeline 2 and the box body 10, and a controller is connected with the liquid leakage detection switch; and the alarm is connected with the controller.
The supply line 2 and the branch line 4 are medicine supply lines, and the water path supply line is provided outside the casing 10.
This embodiment makes things convenient for the operation personnel to observe and manage the liquid medicine valve of setting on the pipeline, and emergency can close the pipeline the very first time, avoids appearing the weeping and causes bigger accident.
The embodiment separates all medicament supply pipelines of the equipment from other electrical and mechanical elements and water path supply pipelines through the box body 10 and carries out closed management, when leakage occurs, other elements cannot be corroded, a leakage detection switch is arranged in the box body 10, and when leakage occurs, an alarm is given out at the first time.
the embodiment rearranges the original disordered pipelines without complication, so that the conventional pipeline layout is clear at a glance.
The pipeline valve box of the embodiment can be assembled outside the equipment, and the traditional installation process is broken through (in the traditional technology, the valve and the pipeline are installed on the sealing plate only by completing plate milling and welding on the sealing plate of the equipment), so that the equipment manufacturing time is saved.
As shown in fig. 1 to 7, the pipeline valve box supply of the embodiment is applied to a trough type cleaning device and a wet processing device of solar silicon wafers, a manual valve 6 is arranged on the pipeline, the manual valve 6 controls the opening and closing of all branch pipelines 4 of the supply pipeline 2, and all manual valves 6 can be closed at the first time when an emergency occurs, so that the pipeline is closed; be provided with pneumatic valve 8 on the lateral conduit 4, pneumatic valve 8 is through the closed of the switching control each technology groove pipeline of control lateral conduit 4, and pneumatic valve 8 can be connected to each technology groove of slot type cleaning equipment and wet process treatment equipment through whole PFA pipe and reduce the weeping risk. The box body 10, the supply pipeline 2 and the branch pipelines 4 are all provided with leakage detection switches, so that when leakage occurs, an alarm is given in time, and the operation personnel can handle the leakage in time conveniently.
in the description of the present invention, the terms "plurality" or "a plurality" refer to two or more, and unless otherwise specifically limited, the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention; the terms "connected," "mounted," "secured," and the like are to be construed broadly and include, for example, fixed connections, removable connections, or integral connections; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A manifold, comprising:
A conduit including at least one feed conduit, each feed conduit communicating with at least one branch conduit;
a manual valve provided on the supply pipe;
The pneumatic valve is arranged on the branch pipeline;
And a box body which is covered on the supply pipeline and the branch pipeline, wherein the manual valve and the pneumatic valve are positioned in the box body.
2. the piping cage of claim 1, further comprising:
And a leakage detection switch provided at least one of the branch pipe, the supply pipe, and the tank.
3. The piping cage of claim 2, further comprising:
The controller is connected with the leakage detection switch;
and the alarm is connected with the controller.
4. The manifold valve manifold of claim 1, wherein the manifold body comprises:
a box body;
The top plate is hinged to the top of the box body, and the branch pipeline extends out of the box body through a gap between the box body and the top plate;
The bottom plate is connected with the box body and is positioned at the bottom of the box body;
The pipeline fixing plate is used for fixing the supply pipeline and the branch pipeline on the inner wall of the box body;
And the observation window is arranged on the box body.
5. The piping cage of claim 1, further comprising:
the adapter ports are arranged at the inlet end of the supply pipeline and the outlet end of the branch pipeline.
6. The piping cage of claim 1, further comprising:
A medicine kind label provided on an inner wall of the branch pipe and/or the case.
7. The piping cage of claim 6, further comprising:
A waterway supply pipeline arranged outside the box body;
Wherein the supply conduit and the branch conduit are medicament supply conduits.
8. a slot-type wet processing apparatus, comprising:
The piping cage of any of claims 1-7.
9. The wet trough processing apparatus of claim 8, further comprising:
The pipeline valve box is arranged on one side of the processing tank, and a branch pipeline of the pipeline valve box is communicated to the processing tank.
10. The wet trough treatment plant according to claim 9,
the processing tank is a plurality of, and at least one of a plurality of processing tanks is the washing tank.
CN201910910635.8A 2019-09-25 2019-09-25 Pipeline valve box and groove type wet processing equipment Pending CN110566814A (en)

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CN106449488A (en) * 2016-11-23 2017-02-22 上海华力微电子有限公司 Method for controlling slot type wet washing equipment
CN206234617U (en) * 2016-11-18 2017-06-09 红板（江西）有限公司 A kind of circuit board plant production line automatic drain care device
CN107316828A (en) * 2017-06-29 2017-11-03 王晨珏 A kind of efficient diode pickling device
CN107851567A (en) * 2015-08-18 2018-03-27 株式会社斯库林集团 Substrate board treatment and substrate processing method using same
CN207621454U (en) * 2017-12-04 2018-07-17 昆山羚羊机电安装有限公司 A kind of organic chemicals supply system clack box
CN207621425U (en) * 2017-12-04 2018-07-17 昆山羚羊机电安装有限公司 A kind of soda acid chemicals supply system clack box
WO2018155054A1 (en) * 2017-02-27 2018-08-30 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing device and substrate processing method
CN208846091U (en) * 2018-08-22 2019-05-10 衢州市鼎盛化工科技有限公司 A kind of pump valve case apparatus promoting security protection
CN210624168U (en) * 2019-09-25 2020-05-26 常州捷佳创精密机械有限公司 Pipeline valve box and groove type wet processing equipment

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202812315U (en) * 2012-09-11 2013-03-20 冠礼控制科技（上海）有限公司 Valve case for chemical supply system
CN203189802U (en) * 2013-01-18 2013-09-11 和淞科技股份有限公司 Liquid valve box
CN203255960U (en) * 2013-05-14 2013-10-30 北京中和芯化学科技有限公司 Automatic chemical liquid supply equipment
CN105719987A (en) * 2014-11-17 2016-06-29 力晶科技股份有限公司 Control valve module and leak detection monitoring system
CN107851567A (en) * 2015-08-18 2018-03-27 株式会社斯库林集团 Substrate board treatment and substrate processing method using same
CN206234617U (en) * 2016-11-18 2017-06-09 红板（江西）有限公司 A kind of circuit board plant production line automatic drain care device
CN106449488A (en) * 2016-11-23 2017-02-22 上海华力微电子有限公司 Method for controlling slot type wet washing equipment
WO2018155054A1 (en) * 2017-02-27 2018-08-30 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing device and substrate processing method
CN107316828A (en) * 2017-06-29 2017-11-03 王晨珏 A kind of efficient diode pickling device
CN207621425U (en) * 2017-12-04 2018-07-17 昆山羚羊机电安装有限公司 A kind of soda acid chemicals supply system clack box
CN207621454U (en) * 2017-12-04 2018-07-17 昆山羚羊机电安装有限公司 A kind of organic chemicals supply system clack box
CN208846091U (en) * 2018-08-22 2019-05-10 衢州市鼎盛化工科技有限公司 A kind of pump valve case apparatus promoting security protection
CN210624168U (en) * 2019-09-25 2020-05-26 常州捷佳创精密机械有限公司 Pipeline valve box and groove type wet processing equipment

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