CN110563020B

CN110563020B - High efficiency tombarthite fluorination stove

Info

Publication number: CN110563020B
Application number: CN201910933084.7A
Authority: CN
Inventors: 邓健
Original assignee: Ganzhou Chengbo Technology Services Co ltd
Current assignee: Ganzhou Chengbo Technology Services Co ltd
Priority date: 2019-09-29
Filing date: 2019-09-29
Publication date: 2022-03-11
Anticipated expiration: 2039-09-29
Also published as: CN110563020A

Abstract

The invention relates to the field of rare earth fluorination equipment, in particular to a high-efficiency rare earth fluorination furnace, which comprises a furnace body and a material rack, a fluorination cavity is arranged inside the furnace body, a heat preservation layer, a heating layer and a fireproof layer are sequentially arranged between the furnace body and the fluorination cavity, a convex edge surrounding the inlet of the fluorination cavity is arranged at the inlet of the fluorination cavity on the upper end surface of the furnace body, a furnace cover sealing the fluorination cavity through the matching of a sealing mechanism and the convex edge is arranged above the furnace body, the convex edge is provided with a sealing groove surrounding the upper end surface of the convex edge, the lower end surface of the furnace cover is provided with a sealing ring mutually assembled with the sealing groove, a bracket is fixed on one side of the furnace body, a fixed pipe is vertically fixed above the bracket, one end of the fixed pipe is connected with an air purification device through an air pump, fluoridize the intracavity portion and keep away from the one end of fluoridizing the chamber entry and be fixed with the air-out dish, it still inclines to be equipped with a plurality of fans to fluoridize II top both sides in the intracavity portion hold-in range. The utilization rate of rare earth fluorination efficiency and hydrogen fluoride can be improved through the device.

Description

High efficiency tombarthite fluorination stove

[ technical field ] A method for producing a semiconductor device

The invention relates to the field of rare earth fluorination equipment, in particular to a high-efficiency rare earth fluorination furnace.

[ background of the invention ]

At present, the preparation method of rare earth fluoride mainly comprises a wet fluorination process, a dry fluorination process and a gas fluorination process. The gas fluorination method is to directly fluorinate HF and rare earth oxide at high temperature. The hydrogen fluoride gas has strong corrosivity at high temperature, so the rare earth oxide cannot be directly heated in a furnace pipe of a closed fluorination furnace, and the conventional vertical and horizontal fluorination furnaces place an iron-chromium-aluminum alloy resistance wire serving as a heating element between the inner wall of the fluorination furnace and an insulating layer in a special-shaped brick to indirectly heat the rare earth oxide in the furnace. Present vertical and horizontal fluoridation stove business turn over material, move waste gas collection cover and bell process and lean on manual operation in a large number, etc.) intensity of labour is big, work efficiency is low, factor of safety is low scheduling problem, and current fluoridation stove is cask form generally, place the charging tray that is equipped with the tombarthite in the bucket, hydrogen fluoride gas gets into the fluoridation stove from the fluoridation stove bottom, discharge into purifier through the gas collecting channel at fluoridation stove top in, there is the clearance between gas collecting channel and the fluoridation stove, lead to the waste gas after fluoridizing can't get into in the purifier completely, cause air pollution easily, and under the highly limited condition, cask form fluoridation stove only can vertically place the material frame, hydrogen fluoride gas directly rises the back and discharges from gas collecting channel, lead to hydrogen fluoride gas low-usage.

The invention is provided for overcoming the defects of the prior art.

[ summary of the invention ]

The invention aims to overcome the defects of the prior art and provide the high-efficiency rare earth fluorination furnace, a plurality of material frames can be placed in the horizontal direction under the condition of a certain height, hydrogen fluoride gas is discharged into the purification device after passing through the material frames, and the utilization rate of the hydrogen fluoride gas is high.

The invention can be realized by the following technical scheme:

the invention discloses a high-efficiency rare earth fluorination furnace, which comprises a furnace body and a material frame, wherein a fluorination cavity is arranged in the furnace body, a heat preservation layer, a heating layer and a fireproof layer are sequentially arranged between the furnace body and the fluorination cavity, a convex edge surrounding the inlet of the fluorination cavity is arranged at the inlet of the fluorination cavity on the upper end surface of the furnace body, a furnace cover sealing the fluorination cavity through a sealing mechanism and the convex edge in a matching manner is arranged above the furnace body, a sealing groove surrounding the upper end surface of the convex edge is arranged on the convex edge, a sealing ring mutually assembled with the sealing groove is arranged on the lower end surface of the furnace cover, a bracket is fixed on one side of the furnace body, a fixed pipe is vertically fixed above the bracket, one end of the fixed pipe is connected with an air purification device through an air pump, a slide pipe with the upper end extending into the fixed pipe and being in sliding connection with the fixed pipe is arranged at the other end of the fixed pipe, and the tail end of the slide pipe is connected with the upper end surface of the furnace cover through a corrugated expansion joint in a sealing manner, the support is also fixedly provided with a screw rod I, the screw rod I is connected with the output end of a motor III, the screw rod I is also provided with a slide block in threaded connection with the screw rod I, the slide block is fixedly connected with the slide pipe, a screw rod II and a screw rod III are vertically fixed in the fluorination cavity, the screw rod II and the screw rod III are driven by the motor I to rotate, a support block in threaded connection with the screw rod II and the screw rod III is further fixed between the screw rod II and the screw rod III, a support rod penetrating into a fixed cylinder on the material frame is further arranged on the support block, a synchronous belt II is transversely fixed in the fluorination cavity and driven by a stepping motor, push blocks for pushing the material frame are uniformly distributed on the synchronous belt II, a fixed hole is arranged on the synchronous belt II, a fixed rod matched with the fixed hole is arranged at the bottom of the material frame, and support plates are fixed in the fluorination cavities at two sides of the synchronous belt II, wheels are fixed on two sides of the lower portion of the material frame, an air outlet disc is fixed at one end, far away from an inlet of the fluorination cavity, the air outlet disc is connected with an external hydrogen fluoride gas tank through an air inlet pipe, and a plurality of fans are obliquely arranged on two sides of the upper portion of the synchronous belt II in the fluorination cavity. Placing a material frame containing rare earth on a supporting block, supporting the material frame through a supporting rod, starting a motor I, driving a screw rod II and a screw rod III to rotate by the motor I, driving the supporting block to descend by the rotation of the screw rod II and the screw rod III, driving the material frame to descend by the supporting rod, when the material frame descends to be in contact with a synchronous belt II, contacting a push block with the edge of the material frame, extending a fixed rod into a fixed hole, stopping the motor I after a wheel below the material frame is in contact with the supporting plate, starting a stepping motor, starting the synchronous belt II, driving the push block on the synchronous belt II to push the material frame to move, separating the material frame from the supporting rod, taking the material frame out of the position right below an inlet of a fluorination cavity by the synchronous belt II, stopping the stepping motor, starting the motor I again, reversely rotating the screw rod II and the screw rod III, returning the supporting block on the screw rod II and the screw rod III to an initial position, placing the material frame on the supporting block again, placing the material frame in the fluorination cavity, the support rod stops in a fixed cylinder of the last material frame, the motor III starts, the screw rod I rotates, the screw rod I drives the sliding block to descend, the sliding block drives the sliding pipe to descend, the sliding pipe drives the furnace cover to descend, the furnace cover descends to a designated position, the motor III stops, the sealing ring enters the sealing groove, the sealing mechanism fixes the furnace cover and the convex edge, hydrogen fluoride gas is introduced into the fluorine chamber through the air inlet pipe, the hydrogen fluoride gas is discharged into the purification device through the fixed pipe after passing through the plurality of horizontally placed material frames and is purified, the material frames are blown through the plurality of fans which are obliquely arranged, the hydrogen fluoride gas forms vortex in the fluorine chamber, the staying time of the hydrogen fluoride gas in the fluorine chamber is prolonged, the speed of the hydrogen fluoride can be increased, the hydrogen fluoride gas can more easily enter the interior of the rare earth, the utilization rate of the hydrogen fluoride gas can be effectively improved, and the fluorination efficiency of the rare earth can be improved, after the fluorination is finished, a motor III is started, a screw rod I rotates, the screw rod I drives a sliding block to ascend, the sliding block drives a sliding pipe to ascend, the sliding pipe drives a furnace cover to ascend, after the sliding pipe ascends to a certain height, the motor III stops, the motor I starts, a screw rod II rotates with the screw rod III to drive a supporting block to ascend, a supporting rod drives a material frame to ascend, the material frame ascends to be separated from the furnace body, the material frame is taken down from the supporting block, the motor I starts, the screw rod II rotates with the screw rod III to drive the supporting block to descend, the supporting block drives the supporting rod to descend to a fixed cylinder position, the motor I stops, the stepping motor starts, a synchronous belt II rotates in the reverse direction of the original direction, the synchronous belt II drives the material frame to move, the supporting rod extends into the fixed cylinder to be fixed, the stepping motor stops, the motor I starts to drive the material frame to ascend, after a plurality of times, all the material frames can be effectively transported out from the furnace body, the furnace cover and the sliding pipe are connected through the corrugated expansion joint, so that the furnace cover can also move up and down after the sliding pipe is fixed by the sliding block, and a sealing ring on the furnace cover enters the convex edge sealing groove.

Preferably, sealing mechanism contains fixes at protruding along week side sealed piece I, the bell is equipped with sealed piece II with sealed piece I corresponding position, be fixed with on sealed piece II pass sealed piece II and with sealed piece II threaded connection's screw rod, be equipped with the screw hole that uses with aforementioned screw rod cooperation on the sealed piece I, be fixed with the carousel on the screw rod up end, carousel up end one side is fixed with the handle. The bell and protruding edge are fixed the back, through the rotatory carousel of handle, the carousel drives the screw rod and rotates, and the screw rod enters into the screwed hole of sealed piece I, and is fixed bell and protruding edge totally enclosed through the screw rod, and the bell is fixed with protruding edge totally enclosed, and the waste gas that produces when tombarthite fluoridizes can be discharged totally and purify in the purifier, can effectively avoid the waste gas after fluoridizing to reveal the polluted environment.

Preferably, the material frame contains the frame, be fixed with a plurality of charging trays of ageing treating rare earth fluoride on the frame, the frame both sides are fixed with the solid fixed cylinder that supplies the bracing piece to penetrate, the bracing piece passes through fixed establishment and solid fixed cylinder reciprocal anchorage, the frame bottom still is fixed with the wheel that the fixed backup pad cooperation of fluorination intracavity portion was used. The material frame is fixed after putting into and fluoridizing the intracavity back and contacting through wheel and backup pad, and when hold-in range II drove the material frame and removes, the wheel rolled in the backup pad, and is fixed with the material frame through the wheel, and the wheel rolls when the material frame removed, can effectively reduce the frictional force between material frame and the backup pad, and when avoiding the material frame to remove, the tombarthite was dropped by the vibrations.

Preferably, fixed establishment contains the spacing groove of setting at the bracing piece up end, the spacing inslot is fixed with the gag lever post, be equipped with the gag lever post top on the gag lever post penetrate and with gag lever post sliding connection's stopper, the stopper top is the hemisphere, the spacing inslot of stopper below still is equipped with the spring, be equipped with the stopper cooperation on the solid fixed cylinder and use the fixed slot. When the bracing piece got into a fixed section of thick bamboo, a fixed section of thick bamboo edge contact stopper and extrusion stopper, the stopper entered into the spacing inslot portion, and in the bracing piece slided into a fixed section of thick bamboo, when fixed slot was put through the stopper on the fixed section of thick bamboo, the spring replied natural state, released the stopper from the spacing inslot, and the stopper upper end was fixed with the material frame in entering into the fixed slot.

Preferably, a driven tooth is fixed below the screw rod II, a driving tooth is arranged on the screw rod III corresponding to the driven tooth, the driving tooth is connected with the driven tooth through a synchronous belt I, and the screw rod III is connected with the output end of a motor I. Drive lead screw II and III synchronous rotations of lead screw through hold-in range I, can guarantee that the supporting shoe steadily descends, can be effectual with the steady synchronous belt II of placing of material frame on.

Preferably, the motor I is connected with the screw rod III through a speed reducer. Through the reduction gear can effectively reduce I rotational speed of motor, can effectively reduce the slew velocity of lead screw II and lead screw III, further guarantee the steady rising or the decline of material frame, can effectively avoid the vibrations of tombarthite to lead to tombarthite to drop out the material frame on the material frame.

Preferably, air holes are uniformly distributed in the air outlet disc, a cavity structure is arranged in the air outlet disc, and the air inlet pipe is connected with the air holes through the cavity structure in the air outlet disc. The hydrogen fluoride gas enters into the fluorination cavity through the air inlet hole of the air outlet disc, so that the hydrogen fluoride gas can be stably filled in the whole fluorination cavity.

Compared with the prior art, the invention has the following advantages:

1. the material shelf for storing rare earth can be automatically placed in the fluorination cavity through the device, and the material shelf can be automatically transported away from the furnace body through the device after rare earth fluorination is completed, so that the labor cost is greatly reduced, and the labor intensity is reduced.

2. After the material frame is placed, the furnace cover is driven to descend through the motor III, manual conveying of the furnace cover is not needed, labor cost is further reduced, and labor intensity is reduced.

3. After the bell descends, the sealing washer assembles each other with the seal groove, and rethread sealing mechanism is with the bell with protruding edge sealed fixed completely, can avoid fluoridizing waste gas to enter into purifier through the bell completely in, can effectively avoid fluoridizing the waste gas polluted environment after.

4. Can be effectual with the steady intracavity of fluoridizing of placing of a plurality of material framves through motor I, lead screw II, lead screw III, step motor and hold-in range II.

5. After the hydrogen fluoride gas entered into the fluorination chamber, rethread bell discharge furnace body behind the material frame that a plurality of horizontal directions were placed, during same height, hydrogen fluoride gas in this device was arranged to purifier by the bell after through the material frame in, can effectively improve hydrogen fluoride's utilization ratio to only need once to heat and just can fluorinate more tombarthites, further saving the energy.

6. Rare earth is bloied on the material frame through a plurality of fans that the slope set up, makes hydrogen fluoride gas form the vortex, has prolonged hydrogen fluoride gas residence time in the furnace body to can effectively give hydrogen fluoride gas the speed that gets into the tombarthite direction through the fan, make hydrogen fluoride gas enter into tombarthite more easily inside, improve tombarthite fluoridation speed, further improvement hydrogen fluoride's utilization ratio and energy saving.

[ description of the drawings ]

The following detailed description of embodiments of the invention is provided in conjunction with the appended drawings, in which:

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a front view of the present invention;

FIG. 3 is a sectional view of the structure at B-B in FIG. 2;

FIG. 4 is a front view of FIG. 3;

FIG. 5 is a cross-sectional view of the structure at C-C in FIG. 2;

FIG. 6 is a schematic view of an assembly structure of the material rack, a screw rod II and a screw rod III;

FIG. 7 is a schematic view of an assembly structure of the material rack, a screw rod II and a screw rod III;

FIG. 8 is a cross-sectional view of the securing mechanism of FIG. 6;

FIG. 9 is a cross-sectional view taken at A of FIG. 8;

in the figure: 1. a furnace body; 2. an air inlet pipe; 3. a convex edge; 4. a sealing mechanism; 401. a sealing block I; 402. a sealing block II; 403. a screw; 404. a turntable; 405. a handle; 406. a sealing groove; 407. a seal ring; 5. a material rack; 501. a frame; 502. a material tray; 503. a fixed cylinder; 504. a wheel; 6. a furnace cover; 7. a bellows joint; 8. a slide pipe; 9. a fixed tube; 10. a slider; 11. a screw rod I; 12. a support; 13. a support block; 14. a screw rod II; 15. a screw mandrel III; 16. a motor I; 17. a speed reducer; 18. a driving tooth; 19. a synchronous belt I; 20. a support bar; 21. a fixing mechanism; 211. fixing grooves; 212. a limiting groove; 213. a spring; 214. a limiting rod; 215. a limiting block; 22. a driven tooth; 23. a stepping motor; 24. a synchronous belt II; 25. a push block; 26. a fixing hole; 27. fixing the rod; 28. a fan; 29. an air outlet plate; 30. a heat-insulating layer; 31. a heating layer; 32. a fire barrier layer; 33. a motor III; 34. a support plate;

[ detailed description ] embodiments

The embodiments of the present invention will be described in detail below with reference to the accompanying drawings:

as shown in figures 1 to 9, the invention discloses a high-efficiency rare earth fluorination furnace, which comprises a furnace body 1 and a material frame 5, wherein a fluorination cavity is arranged in the furnace body 1, a heat insulation layer 30, a heating layer 31 and a fireproof layer 32 are sequentially arranged between the furnace body 1 and the fluorination cavity, a convex edge 3 surrounding the inlet of the fluorination cavity is arranged at the inlet of the fluorination cavity on the upper end surface of the furnace body 1, a furnace cover 6 sealing the fluorination cavity by matching with the convex edge 3 through a sealing mechanism 4 is arranged above the furnace body 1, a sealing groove 406 surrounding the upper end surface of the convex edge 3 is arranged on the convex edge 3, a sealing ring 407 mutually assembled with the sealing groove 406 is arranged on the lower end surface of the furnace cover 6, a bracket 12 is fixed on one side of the furnace body 1, a fixed pipe 9 is vertically fixed above the bracket 12, one end of the fixed pipe 9 is connected with an air purification device (not shown) through an air pump (not shown in the figure), a sliding pipe 8 extending into the fixed pipe 9 at the upper end and connected with the fixed pipe 9 in a sliding way is arranged on the other end of the fixed pipe 9, the tail end of a sliding pipe 8 is connected with the upper end face of a furnace cover 6 in a sealing way through a corrugated expansion joint 7, a screw rod I11 is further fixed on a support 12, the screw rod I11 is connected with the output end of a motor III 33, a slide block 10 in threaded connection with the screw rod I11 is further arranged on the screw rod I11, the slide block 10 is fixedly connected with the sliding pipe 8, a screw rod II 14 and a screw rod III 15 are further vertically fixed inside a fluorination cavity, the screw rod II 14 and the screw rod III 15 are driven by a motor I16 to rotate, a support block 13 in threaded connection with the screw rod II 14 and the screw rod III 15 is further fixed between the screw rod II 14 and the screw rod III 15, a support rod 20 penetrating through a fixed cylinder 503 on a material rack 5 is further arranged on the support block 13, a synchronous belt II 24 is transversely fixed in the fluorination cavity, the synchronous belt II 24 is driven by a stepping motor 23, push blocks 25 for pushing the material rack 5 are uniformly distributed on the synchronous belt II 24, a fixed hole 26 is arranged on the synchronous belt II 24, a fixed rod 27 matched with the fixed hole 26 is arranged at the bottom of the material rack 5, the intracavity of fluoridizing of hold-in range II 24 both sides all is fixed with backup pad 34, and 5 below both sides of material frame are fixed with wheel 504, and the intracavity portion of fluoridizing is kept away from the one end of fluoridizing the chamber entry and is fixed with air-out dish 29, and air-out dish 29 links to each other with external hydrogen fluoride gas jar through intake pipe 2, and II 24 top both sides of hold-in range of intracavity portion of fluoridizing still the slope are equipped with a plurality of fans 28. Placing a material frame 5 containing rare earth on a supporting block 13, supporting the material frame 5 through a supporting rod 20, starting a motor I16, driving a screw II 14 and a screw III 15 to rotate by the motor I16, driving the supporting block 13 to descend by the screw II 14 and the screw III 15, driving the material frame 5 to descend by the supporting rod 20, when the material frame 5 descends to be in contact with a synchronous belt II 24, contacting a push block 25 with the edge of the material frame 5, extending a fixed rod 27 into a fixed hole 26, stopping the motor I16 after a wheel 504 below the material frame 5 is in contact with a supporting plate 34, starting a stepping motor 23, starting the synchronous belt II 24, driving the push block 25 on the synchronous belt II 24 to push the material frame 5 to move, separating the material frame 5 from the supporting rod 20, driving the material frame 5 to be away from the position right below a fluorination cavity inlet by the synchronous belt II 24, stopping the stepping motor 23, starting the motor I16 again, reversely rotating the screw II 14 and the screw III 15, the screw II 14 and the screw III 15 are provided with a support block 13 to return to the initial position, the material frame 5 is placed on the support block 13 again, after a plurality of material frames 5 are placed in the fluorination cavity, the support rod 20 stays in a fixed cylinder 503 of the last material frame 5, the motor III 33 is started, the screw I11 rotates, the screw I11 drives the slide block 10 to descend, the slide block 10 drives the slide pipe 8 to descend, the slide pipe 8 drives the furnace cover 6 to descend, the furnace cover 6 descends to a designated position, the motor III 33 stops, the sealing ring 407 enters the sealing groove 406, the sealing mechanism 4 fixes the furnace cover 6 and the convex edge 3, hydrogen fluoride gas is introduced into the fluorination cavity through the air inlet pipe 2, the hydrogen fluoride gas is discharged into the purification device through the fixed pipe 18 to be purified after passing through the plurality of horizontally placed material frames 5, and the material frames 5 are blown through the plurality of fans 28 which are obliquely arranged, so that the hydrogen fluoride gas forms vortex in the fluorination cavity, the residence time of the hydrogen fluoride gas in the fluorination cavity is prolonged, the speed of the hydrogen fluoride can be increased, the hydrogen fluoride gas can enter the rare earth more easily, the utilization rate of the hydrogen fluoride gas can be effectively improved, the fluorination efficiency of the rare earth can be improved, after the fluorination is finished, the motor III 33 is started, the screw rod I11 rotates, the screw rod I11 drives the slider 10 to ascend, the slider 10 drives the slide pipe 8 to ascend, the slide pipe 8 drives the furnace cover 6 to ascend, after the slide pipe ascends to a certain height, the motor III 33 stops, the motor I16 is started, the screw rod II 14 and the screw rod III 15 rotate to drive the supporting block 13 to ascend, the supporting rod 20 drives the material frame 5 to ascend, after the material frame 5 ascends to be separated from the furnace body 1, the material frame 5 is taken down from the supporting block 13, the motor I16 is started, the screw rod II 14 and the screw rod III 15 rotate to drive the supporting block 13 to descend, the supporting block 13 drives the supporting rod 20 to descend to be in the position of the fixed cylinder 503, motor I16 stops, and step motor 23 starts, and II 24 and former direction antiport in hold-in range, II 24 drive material frame 5 movements in hold-in range, and bracing piece 20 stretches into the inside fixed back of a fixed section of thick bamboo 503, and step motor 23 stops, and I16 starts to drive material frame 5 and rises, through a lot of backs, can effectually transport out in furnace body 1 all material frames 5.

The sealing mechanism 4 comprises a sealing block I401 fixed on the peripheral side of the convex edge 3, a sealing block II 402 is arranged at the position, corresponding to the sealing block I401, of the furnace cover 6, a screw rod 403 which penetrates through the sealing block II 402 and is in threaded connection with the sealing block II 402 is fixed on the sealing block II 402, a threaded hole used in cooperation with the screw rod 403 is formed in the sealing block I401, a rotary table 404 is fixed on the upper end face of the screw rod 403, and a handle 405 is fixed on one side of the upper end face of the rotary table 404. After bell 6 is fixed with protruding edge 3, through the rotatory carousel 404 of handle 405, carousel 404 drives screw rod 403 and rotates, and screw rod 403 enters into the screwed hole of sealed piece I401, and is fixed bell 6 and protruding edge 3 totally enclosed through screw rod 403, and bell 6 and protruding edge 3 totally enclosed are fixed after, and the waste gas that produces when tombarthite fluoridizes can be discharged totally and purify in the purifier, can effectively avoid the waste gas after fluoridizing to reveal polluted environment.

The material rack 5 comprises a frame 501, a plurality of material trays 502 for storing rare earth fluoride are fixed on the frame 501, fixing cylinders 503 for the support rods 20 to penetrate are fixed on two sides of the frame 501, the support rods 20 are fixed with the fixing cylinders 503 through fixing mechanisms 21, and wheels 504 matched with the support plates 34 fixed in the fluorination cavities are fixed at the bottoms of the frame 501. After the material frame 5 is placed in the fluorination cavity, the material frame 5 is fixed after being contacted with the supporting plate 34 through the wheels 504, when the synchronous belt II 24 drives the material frame 5 to move, the wheels 504 roll on the supporting plate 34, the material frame 5 is fixed through the wheels 504, and the wheels 504 roll when the material frame 5 moves, so that the friction force between the material frame 5 and the supporting plate 34 can be effectively reduced, and the rare earth is prevented from being vibrated and falling when the material frame 5 moves.

Wherein, fixed establishment 21 contains the spacing groove 212 of setting at the bracing piece 20 up end, and spacing inslot 212 internal fixation has a gag lever post 214, is equipped with gag lever post 214 on the gag lever post 214 the top penetrate and with gag lever post 214 sliding connection's stopper 215, and stopper 215 top is the hemisphere, still is equipped with spring 213 in the spacing groove 212 of stopper 215 below, is equipped with stopper 215 cooperation use fixed slot 211 on the fixed cylinder 503. When the supporting rod 20 enters the fixed cylinder 503, the edge of the fixed cylinder 503 contacts the limiting block 215 and extrudes the limiting block 215, the limiting block 215 enters the limiting groove 212, the supporting rod 20 slides into the fixed cylinder 503, when the fixed groove 211 on the fixed cylinder 503 passes through the position of the limiting block 215, the spring 213 returns to a natural state, the limiting block 215 is pushed out from the limiting groove 212, and the upper end of the limiting block 215 enters the fixed groove 211 to fix the material rack 5.

Wherein, the driven tooth 22 is fixed below the screw II 14, the driving tooth 18 is arranged at the position on the screw III 15 corresponding to the driven tooth 22, the driving tooth 18 is connected with the driven tooth 22 through a synchronous belt I19, and the screw III 15 is connected with the output end of a motor I16. Drive II 14 of lead screw and III 15 synchronous rotation of lead screw through hold-in range I19, can guarantee that supporting shoe 13 steadily descends, can be effectual with the steady placing of material frame 5 on hold-in range II 24.

Wherein, motor I16 passes through speed reducer 17 and links to each other with lead screw III 15. Can effectively reduce motor I16 rotational speed through speed reducer 17, can effectively reduce II 14 and III 15's of lead screw slew velocity, further guarantee the steady rising or the decline of material frame 5, can effectively avoid the vibrations of tombarthite to lead to tombarthite to drop out thing work or material rest 5 on the material frame 5.

Wherein, evenly distributed has the wind hole on the air-out dish 29, and air-out dish 29 is inside to be the cavity structure, and intake pipe 2 links to each other with the wind hole through the inside cavity structure of air-out dish 29. The hydrogen fluoride gas enters the fluorination cavity through the upper air hole of the air outlet disc 29, so that the whole fluorination cavity can be stably filled with the hydrogen fluoride gas.

The above description is only a preferred embodiment of the present invention, and it should be noted that a person skilled in the art can make various changes, modifications, substitutions and alterations to the embodiments without departing from the technical principles of the present invention, and such changes, modifications, substitutions and alterations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a high efficiency tombarthite fluorination stove, contains furnace body and material frame, its characterized in that: the furnace body is internally provided with a fluorination cavity, a heat preservation layer, a heating layer and a fireproof layer are sequentially arranged between the furnace body and the fluorination cavity, a convex edge surrounding the inlet of the fluorination cavity is arranged at the inlet of the fluorination cavity on the upper end surface of the furnace body, a furnace cover sealing the fluorination cavity through the matching of a sealing mechanism and the convex edge is arranged above the furnace body, the sealing mechanism comprises a sealing block I fixed on the peripheral side of the convex edge, a sealing block II is arranged at the corresponding position of the furnace cover and the sealing block I, a screw rod penetrating through the sealing block II and in threaded connection with the sealing block II is fixed on the sealing block II, a threaded hole matched with the screw rod for use is arranged on the sealing block I, a turntable is fixed on the upper end surface of the screw rod, a handle is fixed on one side of the upper end surface of the turntable, a sealing groove surrounding the upper end surface of the convex edge is arranged on the convex edge, and a sealing ring mutually assembled with the sealing groove is arranged on the lower end surface of the furnace cover, a support is fixed on one side of the furnace body, a fixed pipe is vertically fixed above the support, one end of the fixed pipe is connected with an air purification device through an air pump, a slide pipe with the upper end extending into the fixed pipe and slidably connected with the fixed pipe is arranged on the other end of the fixed pipe, the tail end of the slide pipe is hermetically connected with the upper end face of the furnace cover through a corrugated expansion joint, a screw rod I is further fixed on the support and connected with the output end of a motor III, a slide block in threaded connection with the screw rod I is further arranged on the screw rod I, the slide block is fixedly connected with the slide pipe, a screw rod II and a screw rod III are further vertically fixed inside the fluorination cavity, the screw rod II and the screw rod III are driven by the motor I to rotate, a support block in threaded connection with the screw rod II and the screw rod III is further fixed between the screw rod II and the screw rod III, and a support rod penetrating into a fixed cylinder on the material frame is further arranged on the support block, a synchronous belt II is transversely fixed in the fluorination cavity and driven by a stepping motor, push blocks for pushing a material rack are uniformly distributed on the synchronous belt II, fixing holes are formed in the synchronous belt II, fixing rods matched with the fixing holes are arranged at the bottom of the material rack, supporting plates are fixed in the fluorination cavity at two sides of the synchronous belt II, the material rack comprises a frame, a plurality of material trays for containing rare earth to be fluorinated are fixed on the frame, fixing cylinders for the penetration of supporting rods are fixed at two sides of the frame, the supporting rods are mutually fixed with the fixing cylinders through fixing mechanisms, wheels matched with the supporting plates fixed at the inner parts of the fluorination cavities are fixed at the bottom of the frame, the fixing mechanisms comprise limiting grooves arranged at the upper end surfaces of the supporting rods, limiting rods are fixed in the limiting grooves, and limiting blocks which are provided with the tops of the limiting rods and are penetrated in and are connected with the tops of the limiting rods in a sliding manner are arranged on the limiting rods, the stopper top is the hemisphere, the spacing inslot of stopper below still is equipped with the spring, it uses the fixed slot to be equipped with the stopper cooperation on the solid fixed cylinder, the intracavity portion of fluoridizing is kept away from the one end of fluoridizing the chamber entry and is fixed with the air-out dish, the air-out dish passes through the intake pipe and links to each other with external hydrogen fluoride gas jar, it is equipped with a plurality of fans still to incline to fluoridize II top both sides in the intracavity portion hold-in range.

2. The high efficiency rare earth fluorination furnace of claim 1, wherein: and a driven tooth is fixed below the screw rod II, a driving tooth is arranged on the screw rod III corresponding to the driven tooth, the driving tooth is connected with the driven tooth through a synchronous belt I, and the screw rod III is connected with the output end of a motor I.

3. The high efficiency rare earth fluorination furnace of claim 2, wherein: the motor I is connected with the screw rod III through a speed reducer.

4. The high efficiency rare earth fluorination furnace of claim 1, wherein: the air outlet disc is uniformly distributed with air holes, the air outlet disc is internally provided with a cavity structure, and the air inlet pipe is connected with the air holes through the cavity structure inside the air outlet disc.