CN110535402B - Method for controlling rotating electric machine - Google Patents
Method for controlling rotating electric machine Download PDFInfo
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- CN110535402B CN110535402B CN201910120302.5A CN201910120302A CN110535402B CN 110535402 B CN110535402 B CN 110535402B CN 201910120302 A CN201910120302 A CN 201910120302A CN 110535402 B CN110535402 B CN 110535402B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P29/00—Arrangements for regulating or controlling electric motors, appropriate for both AC and DC motors
- H02P29/10—Arrangements for regulating or controlling electric motors, appropriate for both AC and DC motors for preventing overspeed or under speed
Abstract
The invention discloses a control method of a rotating motor, which is used for controlling the rotating motor in a machine rotating device of semiconductor equipment, and comprises the following steps: a speed setting step, which is used for setting a target rotating speed before executing a process menu and judging whether the speed setting is successful or not by acquiring the rotating speed fed back by the rotating motor in real time; a rotation speed maintaining step for maintaining the rotation speed of the rotating motor in the process of executing the process menu; and a speed reduction and original point returning step, which is used for reducing the speed of the rotating motor and returning to the original point after the execution of the process menu is finished, and judging whether the rotating motor returns to the original point successfully or not by acquiring the feedback state of the rotating motor in real time and detecting whether the rotating motor is at the original point position or not. According to the invention, in the speed setting step before the process menu starts and the speed reduction returning step after the process menu is finished, closed-loop control is adopted for the rotating motor, so that the control command of the rotating motor is successfully executed, and the control of the rotating motor is safer, more reliable and more stable.
Description
Technical Field
The present invention relates to the field of semiconductor devices, and in particular, to a method for controlling a rotating electric machine.
Background
A semiconductor apparatus for silicon epitaxy generally comprises a process chamber 1, a heating device 2, a tray 3, an exhaust device 4, a gas inlet device 5 and a rotary lifting device 6, as shown in particular in fig. 1. The rotary lifting device 6 drives the tray 3 to rotate and lift, and the tray 3 is matched with a manipulator to take and place the wafer, so that the tray 3 keeps certain rotation in the process, has important influence on the process performance and is an important component of semiconductor equipment.
The rotary lifting device 6 typically comprises a rotary motor, a lifting cylinder arrangement. In order to stabilize the process performance, the rotating motor needs to be maintained at a stable rotating speed during the process, and the lifting structure needs to be maintained at a stable height. If the rotating speed of the rotating motor fluctuates to a certain degree, the process performance and the repeatability thereof are directly influenced, so that the control of the rotating motor is very important in machine control software of the semiconductor equipment.
The maintenance control part of the rotating motor in the machine station control software interface mainly comprises speed setting, starting rotation, speed reduction and returning to an original point and a rotating emergency stop button. The function of each button is as follows:
the speed setting button is used for issuing a specified rotating speed, the starting rotating button is used for enabling the rotating motor to rotate freely, the rotating emergency stop button is used for enabling the rotating motor to stop rotating immediately, and the speed reducing and returning to the original point button is used for finding the original point according to the rotating speed and the mode which are configured in the rotating motor.
The rotating motor can rotate freely when the process menu starts, gradually increases to a specified rotating speed according to a specified speed, the rotating speed is kept all the time during the process menu execution, and the speed is gradually reduced and the origin is found according to the specified speed after the process menu execution is finished.
The problems existing in the prior art are that:
1. the rotating motor rotation control part adopts open loop control, is only responsible for issuing commands, does not ensure the execution result of the commands, and comprises the steps that the rotating speed cannot be successfully set after being issued in the speed setting step, and the rotating motor cannot be ensured to finally stay at the original point position after being issued in the original point step;
2. in the sudden stop step, if the current rotating speed is higher, the inertia can cause abrasion to the connecting device, the service life of the device is shortened, and even the tray can be directly deviated from a fixed position to cause larger damage;
3. in the process of executing the process menu, the rotating motor may cause an emergency stop due to the abnormality of the machine or the rotating motor, but the process is always performed, the rotating motor does not rotate actually, and no alarm is given to prompt a user, so that wafers involved in the subsequent work become waste wafers, and the normal use, process debugging and normal mass production of the machine are directly influenced.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Disclosure of Invention
The invention aims to provide a control method of a rotating motor, which aims to overcome the problems in the prior art, ensure that the control of the rotating motor is more accurate and safer, and avoid the influence of the rotating speed change of the rotating motor on the process performance and cavity devices in the process.
The control method of a rotating electrical machine according to the present invention is a method for controlling a rotating electrical machine in a table rotating apparatus of a semiconductor device, including:
step S1, setting a target rotating speed before executing the process menu, and judging whether the speed setting is successful or not by acquiring the rotating speed fed back by the rotating motor in real time;
step S2, maintaining the rotating speed of the rotating motor in the process of executing the process menu;
and step S3, after the execution of the process menu is finished, the rotating motor is decelerated and returns to the original point, and whether the rotating motor returns to the original point is judged successfully by acquiring the feedback state of the rotating motor in real time and detecting whether the rotating motor is located at the original point position.
Preferably, the step S1 includes:
issuing the target rotating speed to the rotating motor, and acquiring the rotating speed fed back by the rotating motor in real time;
and determining whether the speed setting of the rotating motor is successful by judging whether the rotating speed fed back by the rotating motor is within the tolerance range of the target rotating speed within a first set time.
Preferably, the step S2 includes:
and when the rotating speed fed back by the rotating motor reaches the target rotating speed, starting rotating speed monitoring, and when the fed-back rotating speed is not within the tolerance range of the target rotating speed, stopping the process and giving an alarm to a user.
Preferably, the step S3 includes:
issuing a speed reduction return origin instruction to the rotating motor, and acquiring an execution state fed back by the rotating motor in real time;
judging whether the rotating motor completes a speed reduction instruction or not according to the acquired execution state fed back by the rotating motor within a second set time;
and when the state fed back by the rotating motor is finished, detecting whether the rotating motor is in the original point position or not so as to judge whether the rotating motor returns to the original point successfully or not.
Preferably, the control method of the rotating electric machine further includes:
When an emergency stop instruction is received, judging whether the current rotating speed of the rotating motor meets an emergency stop condition, if so, issuing the stop instruction to the rotating motor, otherwise, controlling the rotating motor to circularly reduce the rotating speed to a specified rotating speed, and then issuing the stop instruction to the rotating motor.
Preferably, the determining whether the current rotation speed of the rotating electrical machine meets an emergency stop condition specifically includes:
acquiring the deceleration rate of the rotating motor, acquiring the rotating speed fed back by the rotating motor in real time, and calculating the deceleration cycle number based on the fed-back rotating speed and the deceleration rate;
when the speed reduction cycle number is less than or equal to 1, or the speed reduction cycle number is greater than 1 and the fed-back rotating speed minus the speed reduction rate is within the rotating speed range of safe stop, sending a stop instruction to the rotating motor; otherwise, the speed is reduced at the speed reduction rate, and the cycle number is reduced by 1 after the rotating speed is stable, and then judgment is carried out.
Preferably, the number of deceleration cycles C is calculated by the following formula:
C＝[vfeedback/vSpeed reduction] (1)
Wherein v isFeedbackIndicating the speed of rotation, v, of the rotary machine feedbackSpeed reductionIndicates the rate of deceleration [ alpha ], ]]Indicating rounding.
Preferably, the tolerance range of the target speed is calculated based on a target rotation speed and a tolerance obtained from a configuration file of the rotating electric machine.
Preferably, the step S1 further includes:
and if the speed setting of the rotating motor is unsuccessful, giving an alarm to a user.
Preferably, the step S3 further includes:
when the state fed back by the rotating motor is unfinished within a second set time, sending an alarm to a user; and when the rotating motor is not in the original position, giving an alarm to a user.
According to the invention, closed-loop control is adopted for the rotating motor before the process menu is executed and after the process menu is executed, so that the control command of the rotating motor is successfully executed, and the control of the rotating motor is safer, more reliable and more stable.
Furthermore, the rotating speed of the rotating motor is monitored in real time before the execution of the process menu is finished, so that the influence of the speed change of the rotating motor on the process performance and the chamber is avoided; and by slowing down the speed of the rotating motor to a stop during the execution of the process menu, the negative effects caused by the sudden stop of the rotation are avoided.
The method of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.
Fig. 1 shows a structural diagram of a conventional semiconductor apparatus;
fig. 2 shows a flowchart of a control method of a rotating electric machine according to an exemplary embodiment of the present invention;
fig. 3 shows a flowchart of a rotating electrical machine speed setting step according to an exemplary embodiment of the present invention;
FIG. 4 shows a flowchart of a rotating machine de-speeding back to origin step according to an exemplary embodiment of the present invention;
FIG. 5 shows a flow diagram of a rotation stop sub-step according to an exemplary embodiment of the present invention;
FIG. 6 shows a flow chart of operation for a rotating machine during a process;
fig. 7 shows a flow chart of the rotational speed monitoring.
Description of the main reference numerals:
1. the device comprises a process chamber, 2, a heating device, 3, a tray, 4, an exhaust device, 5, an air inlet device, 6 and a rotary lifting device.
Detailed Description
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Fig. 2 shows a flowchart of a control method of a rotating electric machine according to an exemplary embodiment of the present invention. As shown in fig. 2, the control of the rotating electric machine mainly includes steps S1, S2, S3.
Step S1 is a speed setting step for setting a target rotation speed before executing a process menu, and determining whether the speed setting is successful by acquiring the rotation speed fed back by the rotating electrical machine in real time.
Specifically, in step S1, the target rotation speed is issued to the rotating electrical machine, and the rotation speed fed back by the rotating electrical machine is obtained in real time; whether the speed setting of the rotating motor is successful is determined by judging whether the rotating speed fed back by the rotating motor is within the tolerance range of the target rotating speed within the first set time.
Before the target rotating speed is not issued, the rotating motor is in an original point static state, and after the rotating motor receives the issued target rotating speed, the rotating motor performs speed increasing according to a specified speed.
By acquiring the rotating speed fed back by the rotating motor in real time, namely the actual rotating speed, and comparing the fed back rotating speed with the target rotating speed, whether the rotating motor reaches the target rotating speed within the first set time can be determined. The first setting time may be set according to the target rotation speed and the designated speed increase rate.
Whether the rotating electrical machine has reached the target rotational speed may be determined by whether the rotational speed of the rotating electrical machine is within a tolerance range of the target rotational speed. If the rotating speed of the rotating motor is within the tolerance range of the target motor, it can be judged that the rotating motor reaches the target rotating speed at the moment. The tolerance of the target rotational speed may be obtained from a configuration file of the rotating electric machine or may be set by itself. The tolerance range is calculated by the target rotation speed ± tolerance.
And when the fed-back rotating speed does not fall within the tolerance range of the target motor within the first set time, namely the speed setting of the rotating motor is unsuccessful, giving an alarm to a user to prompt the user that the speed setting fails.
In one example, the flow chart of the speed setting step is shown in FIG. 3, and includes steps S11-S15.
In step S11, the target rotation speed is issued to the rotating electrical machine, and the rotation speed fed back by the rotating electrical machine is acquired in real time.
In step S12, the tolerance of the target rotation speed is acquired from the profile of the rotating electrical machine.
In step S13, a tolerance range of the target rotation speed is calculated.
In step S14, it is determined whether the rotation speed fed back within the first set time is within the tolerance range of the target rotation speed. If yes, ending; if not, step S15 is executed.
In step S15, a warning is given to the user to indicate that the speed setting has failed.
Step S2 is a maintain rotational speed step for maintaining the rotational speed of the rotary motor during execution of the process recipe. In step S2, the rotating electrical machine is controlled to rotate at a steady speed.
Step S3 is a speed reduction return to origin step, which is configured to reduce the speed of the rotating electrical machine and return to the origin after the execution of the process menu is completed, and determine whether the returning of the rotating electrical machine to the origin is successful by acquiring a feedback state of the rotating electrical machine in real time and detecting whether the rotating electrical machine is at the origin position.
Specifically, in step S3, a return to origin command is issued to the rotating electrical machine, and the state fed back by the rotating electrical machine is acquired in real time, and it is determined whether the returning to the origin of the rotating electrical machine is successful by determining whether the state fed back within the second set time is complete (Done) and detecting whether the rotating electrical machine is in the origin position.
Before the deceleration return to the origin command is not issued, the rotating electrical machine is in a state of rotating at a stable speed. The deceleration return origin command comprises a deceleration command and a return origin point. Firstly, a speed reduction command is issued, and after the rotating motor receives the speed reduction command, the rotating motor starts to reduce the speed according to a specified speed. The speed reduction rate can be obtained from a configuration file or can be set by the user. And after the speed reduction is finished, the rotating motor is static, then an original point returning instruction is issued, and after the rotating motor receives the issued original point returning instruction, the rotating motor returns to the original point position at a fixed speed.
By acquiring the feedback state of the rotating electrical machine in real time, namely the actual state, it is first determined whether the actual state is complete (Done) within the second set time, namely, whether the execution of the rotating electrical machine is complete within the second set time. If the execution is not finished, an alarm is sent to the user to prompt the user that the movement is overtime, and the rotating motor is stopped rotating; and if the rotating motor is judged to have finished the action execution within the second set time, detecting whether the rotating motor is in the original position or not through the position sensor. And if the rotating motor is detected not to be in the original point position, sending an alarm to the user to prompt the user that the returning to the original point fails.
In one example, the flowchart of the step of decelerating to return to the origin is shown in FIG. 4, and includes steps S31-S35.
In step S31, a speed-down return-to-origin command is issued to the rotating electrical machine, and the state of the rotating electrical machine feedback is acquired in real time.
In step S32, it is determined whether the state of feedback is complete within the second set time. If not, executing step S33; if so, step S34 is performed.
In step S33, an alarm is issued to the user, prompting the user to timeout the movement.
In step S34, it is detected whether the rotary electric machine is already at the origin position. If yes, ending; if not, step S35 is executed.
In step S35, an alarm is issued to the user, prompting the user to fail to return to the origin.
The maintain rotational speed step S2 may include a rotation stop sub-step S20. The rotation stop sub-step S20 may be entered by manually pressing a stop button.
In the rotation sub-step S20, the deceleration rate of the rotating electrical machine is first acquired and the rotation speed fed back by the rotating electrical machine is acquired in real time, and the number of deceleration cycles is calculated based on the fed-back rotation speed and the deceleration rate.
The speed reduction rate can be obtained from a configuration file of the rotating motor and can also be set by the user; the rotating speed fed back by the rotating motor is the current rotating speed of the rotating motor. The number of speed reduction cycles can be set as the result of rounding the fed-back rotating speed divided by the speed reduction rate, namely, the calculation is carried out through a formula (1);
C＝[vfeedback/vSpeed reduction] (1)
Wherein C represents the number of deceleration cycles, vFeedbackIndicating the speed of rotation, v, of the rotary machine feedbackSpeed reductionIndicates the rate of deceleration [ alpha ], ]]Indicating rounding.
When the number of the speed reduction circulation times is less than or equal to 1, namely the current rotating speed is less than or equal to the speed reduction rate, the current rotating speed just pressed down the stop button is indicated to reach the scram condition, and a stop command can be directly issued to stop the rotating motor.
When the number of speed reduction cycles is greater than 1, that is, the current rotation speed is greater than the speed reduction rate, first, a sub-target rotation speed is calculated (the sub-target rotation speed is equal to the current rotation speed-the speed reduction rate), and then, whether the sub-target rotation speed is within the rotation speed range of the safe stop is judged. The safe stop speed range can be obtained from a configuration file of the rotating electric machine, for example, the safe stop speed range is set to be less than 0.6 based on values in the configuration file, or can be set by itself.
If the sub-target rotating speed is within the rotating speed range of safe stop, a stop command is issued to stop the rotating motor from rotating; and if the sub-target rotating speed is not in the rotating speed range of safe stop, issuing the sub-target rotating speed to the rotating motor, enabling the rotating motor to rotate in an excessive way at the sub-target rotating speed, waiting for a specified time, such as 1 second, reducing the cycle number by 1 after the rotating speed of the rotating motor is stabilized, and then performing the next speed reduction cycle until the current speed reduction cycle number is less than or equal to 1.
Through the mode, the motor is allowed to stop suddenly only when the current cycle number is less than or equal to 1 or the sub-target rotating speed is within the rotating speed range of safe stop, otherwise, the speed is reduced according to the specified speed reduction rate, and slow speed reduction can be realized.
When the current rotational speed of the rotating electric machine has reached a level at which stopping of the motor does not cause adverse effects, the motor is stopped from rotating. Judging whether the operation of the rotating motor is finished once again according to the fed back current state of the rotating motor within a second set time, and if so, finishing; if not, an alarm is sent to the user to prompt the user to stop the failure.
In one example, a flowchart of the rotation stop sub-step is shown in FIG. 5, and includes steps S21-S29.
In step S21, the deceleration rate of the rotating electrical machine is acquired, the rotation speed fed back by the rotating electrical machine is acquired in real time, and the number of deceleration cycles is calculated. And the speed reduction cycle number is [ current rotating speed/speed reduction rate ].
In step S22, it is determined whether the number of speed reduction cycles is greater than 1. If yes, go to step S23; if not, step S27 is executed.
In step S23, a sub-target rotational speed is calculated. The sub-target speed is the current speed-the down speed.
In step S24, it is determined whether or not the sub-target rotational speed is within the rotational speed range for safe stop. If yes, go to step S25; if not, step S27 is executed.
In step S25, the sub-target rotation speed is issued to the motor to be rotated, and X seconds are waited for. I.e. wait for the rotating machine to rotate steadily at the sub-target speed.
In step S26, the number of speed reduction cycles is reduced by 1.
In step S27, a stop command is issued to the rotating electric machine.
In step S28, it is determined whether the state of feedback is complete within the second set time. If yes, ending; if not, an alarm is sent to the user to prompt the user to stop the failure.
The control method of the rotating electrical machine may further include starting the rotation speed monitoring when the rotation speed fed back by the rotating electrical machine reaches the target rotation speed before the execution of the process menu is finished. When the feedback rotating speed is not within the tolerance range of the target rotating speed, stopping the process and giving an alarm to a user; the rotational speed monitoring is switched off after the execution of the process step is finished.
In one example, the operational flow for the rotating electrical machine during the process is shown in FIG. 6, including steps S41-S47.
In step S41, the rotating electrical machine is gradually increased in speed at a predetermined rotation speed.
In step S42, the rotating electric machine reaches the target rotation speed.
In step S43, the rotational speed monitoring is turned on. And when the fed-back rotating speed is not within the tolerance range of the target rotating speed, stopping the process and giving an alarm to a user.
In step S44, a process menu is executed.
In step S45, the rotational speed monitoring is stopped.
In step S46, the rotating electrical machine is gradually decelerated at a predetermined rotation speed.
In step S47, the rotating electrical machine is stopped and returned to the origin.
In one example, the rotational speed monitoring flow is shown in fig. 7, and includes steps S431 to S437.
In step S431, it is determined whether the rotation speed monitoring is on, if yes, step S432 is executed; if not, the process is ended.
In step S432, the rotation speed fed back by the rotating electrical machine is acquired.
In step S433, a target rotation speed is acquired from the configuration file.
In step S434, the tolerance of the target rotational speed is acquired from the configuration file.
In step S435, a standard rotation speed for monitoring determination is calculated. The standard rotational speed is the target rotational speed tolerance.
In step S436, it is determined whether the fed-back rotation speed is greater than the standard rotation speed. If yes, returning to step S431 to re-execute all steps; if not, an alarm is given to the user and the process is immediately stopped.
Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (8)
1. A method for controlling a rotating machine in a table rotating apparatus of a semiconductor device, comprising:
step S1, setting a target rotating speed before executing the process menu, and judging whether the speed setting is successful or not by acquiring the rotating speed fed back by the rotating motor in real time;
step S2, maintaining the rotating speed of the rotating motor in the process of executing the process menu;
step S3, after the execution of the process menu is finished, the rotating motor is decelerated and returns to the original point, and whether the rotating motor returns to the original point is judged successfully by acquiring the feedback state of the rotating motor in real time and detecting whether the rotating motor is at the original point position;
when an emergency stop instruction is received, judging whether the current rotating speed of the rotating motor meets an emergency stop condition, if so, issuing a stop instruction to the rotating motor, otherwise, controlling the rotating motor to circularly reduce the rotating speed to a specified rotating speed, and then issuing the stop instruction to the rotating motor;
judging whether the current rotating speed of the rotating motor meets an emergency stop condition, and specifically comprising the following steps of:
acquiring the speed reduction rate of the rotating motor, acquiring the rotating speed fed back by the rotating motor in real time, and calculating the speed reduction cycle number based on the fed rotating speed and the speed reduction rate;
When the speed reduction cycle number is less than or equal to 1, or the speed reduction cycle number is greater than 1 and the fed-back rotating speed minus the speed reduction rate is within the rotating speed range of safe stop, sending a stop instruction to the rotating motor; otherwise, the speed is reduced at the speed reduction rate, and the cycle number is reduced by 1 after the rotating speed is stable, and then judgment is carried out.
2. The control method of the rotary electric machine according to claim 1, wherein the step S1 includes:
issuing the target rotating speed to the rotating motor, and acquiring the rotating speed fed back by the rotating motor in real time;
and determining whether the speed setting of the rotating motor is successful by judging whether the rotating speed fed back by the rotating motor is within the tolerance range of the target rotating speed within a first set time.
3. The control method of the rotary electric machine according to claim 1, wherein the step S2 includes:
and when the rotating speed fed back by the rotating motor reaches the target rotating speed, starting rotating speed monitoring, and when the fed-back rotating speed is not within the tolerance range of the target rotating speed, stopping the process and giving an alarm to a user.
4. The control method of the rotary electric machine according to claim 1, wherein the step S3 includes:
Issuing a speed reduction return origin instruction to the rotating motor, and acquiring an execution state fed back by the rotating motor in real time;
judging whether the rotating motor completes a speed reduction instruction or not according to the acquired execution state fed back by the rotating motor within a second set time;
and when the state fed back by the rotating motor is finished, detecting whether the rotating motor is in the original point position or not so as to judge whether the rotating motor returns to the original point successfully or not.
5. The control method of a rotating electrical machine according to claim 1, wherein the number of speed reduction cycles C is calculated by the following formula:
C=[vfeedback/vSpeed reduction] （1）
Wherein v isFeedbackIndicating the speed of rotation, v, of the rotary machine feedbackSpeed reductionIndicates the rate of deceleration [ alpha ], ]]Indicating a rounding.
6. The control method of a rotating electric machine according to claim 2, characterized in that the tolerance range of the target speed is calculated based on a target rotation speed and a tolerance obtained from a configuration file of the rotating electric machine.
7. The control method of the rotary electric machine according to claim 2, wherein the step S1 further includes:
and if the speed setting of the rotating motor is unsuccessful, giving an alarm to a user.
8. The control method of the rotary electric machine according to claim 4, wherein the step S3 further includes:
when the state fed back by the rotating motor is unfinished within a second set time, sending an alarm to a user; and when the rotating motor is not in the original position, giving an alarm to a user.
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