CN110530970A - A kind of glass substrate edge defect detecting device - Google Patents
A kind of glass substrate edge defect detecting device Download PDFInfo
- Publication number
- CN110530970A CN110530970A CN201910639602.4A CN201910639602A CN110530970A CN 110530970 A CN110530970 A CN 110530970A CN 201910639602 A CN201910639602 A CN 201910639602A CN 110530970 A CN110530970 A CN 110530970A
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- glass substrate
- driving mechanism
- controller
- transmitting device
- defect detecting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/27—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the material relative to a stationary sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
- G01N2291/0232—Glass, ceramics, concrete or stone
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention relates to glass substrate defect detecting technique fields, in particular to a kind of glass substrate edge defect detecting device, by the way that driving mechanism is arranged in the top of transmitting device, ultrasonic unit is set in driving mechanism and ultrasonic unit is slidably connected with driving mechanism, it can be when glass substrate be moved to immediately below driving mechanism, controller control driving mechanism uniform motion is to drive ultrasonic unit at the uniform velocity to move in driving mechanism, during uniform motion, ultrasonic unit emits ultrasonic signal to glass baseplate surface and at the same time receiving the reflected sonic signals being reflected back from glass baseplate surface, defect existing for glass substrate edge is detected in moving process to realize, convenient for finding glass substrate quality problems in advance, follow-up process is avoided fragmentation danger occur.
Description
Technical field
The present invention relates to glass substrate defect detecting technique field, in particular to a kind of glass substrate edge defects detection dress
It sets.
Background technique
Organic Light Emitting Diode (Organic Light-emitting diode, referred to as OLED), organic light-emitting diodes
Pipe is the display technology of a new generation, and panel includes glass substrate and cover board, and in current vacuum evaporation processing procedure, glass substrate is first
It is cleaned by film forming cleaning machine, is finally cut with cover board encapsulation then in turn through drying room, ultraviolet light, vapor deposition cavity and be cleaved into display surface
Plate, wherein glass substrate closely need to be attached to substrate with mask plate pressing in vapor deposition cavity in order to which material passes through mask plate
Target area, but when glass substrate edge is if there is the defects of crackle or tiny notch, easily due to the pressing with mask plate
Rupture, entire processing procedure needs to stop clearing up fragmentation at this time, and strong influence procedure for producing causes apparent economic loss.Mesh
Before, glass substrate is only by the Safety check-up of full wafer glass substrate before entering film forming cleaning machine, and there is no for edge
The detection means of crackle, and in general, by the non-destructive testing technology of radiographic techniques or non-ultrasonic power, detect
Less than these crackles, needed when necessary by manual inspection, but often minimum naked eyes are difficult to discover the blind crack at these edges, but
The integrality of board structure can greatly be influenced.
Summary of the invention
The technical problems to be solved by the present invention are: providing a kind of detection dress for being able to detect glass substrate edge defect
It sets.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention are as follows:
A kind of glass substrate edge defect detecting device, including glass substrate, transmitting device, driving mechanism and controller；
The driving mechanism is located above the transmitting device and, the driving mechanism arranged in parallel with transmitting device
It is equipped with ultrasonic unit and the ultrasonic unit is slidably connected with the driving mechanism, the glass substrate is placed on described
On transmitting device；
The controller is electrically connected with the transmitting device and driving mechanism respectively, and the controller is configured as control and passes
Defeated device and driving mechanism movement, move to immediately below driving mechanism when recognizing the glass substrate by transmitting device
When, the controller control transmitting device stop motion and control driving mechanism start uniform motion and ultrasonic wave are driven to fill
Uniform motion is set, ultrasonic unit emits ultrasonic signal to glass baseplate surface and at the same time receiving from glass during the motion
The reflected sonic signals that glass substrate surface is reflected back carry out defects detection with the edge to glass substrate and obtain corresponding detection knot
Fruit.
The beneficial effects of the present invention are:
By the way that driving mechanism is arranged in the top of transmitting device, ultrasonic unit is set in driving mechanism and ultrasonic wave fills
It sets and is slidably connected with driving mechanism, can be when glass substrate be moved to immediately below driving mechanism, controller controls driving mechanism
Uniform motion is to drive ultrasonic unit at the uniform velocity to move in driving mechanism, during uniform motion, ultrasonic unit hair
Ultrasonic signal is penetrated to glass baseplate surface and at the same time receiving the reflected sonic signals being reflected back from glass baseplate surface, thus
Realization detects defect existing for glass substrate edge in moving process, convenient for finding that glass substrate quality is asked in advance
Topic, avoids follow-up process from fragmentation danger occur, and the detection device of this programme design can be detected accurately into before film forming cleaning machine
The edge quality defect of glass substrate, solves current equipment and can only detect fragmentation glass substrate that asking for edge defect cannot be detected
Topic, is also avoided that low by the labour and accuracy of artificial detection, improves process efficiency and reliability.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of glass substrate edge defect detecting device according to the present invention；
Fig. 2 is a kind of structural schematic diagram of the driving mechanism of glass substrate edge defect detecting device according to the present invention；
Label declaration:
1, glass substrate；
2, driving mechanism；201, first baffle；202, second baffle；203, screw rod；204, motor；205, sliding block；206,
Gag lever post；
3, ultrasonic unit；
4, roller shaft；
5, conveying roller.
Specific embodiment
To explain the technical content, the achieved purpose and the effect of the present invention in detail, below in conjunction with embodiment and cooperate attached
Figure is explained.
The most critical design of the present invention is: by the way that driving mechanism is arranged in the top of transmitting device, in driving mechanism
Ultrasonic unit is set and ultrasonic unit is slidably connected with driving mechanism, it can be in the case where glass substrate be moved to driving mechanism just
Fang Shi, controller control driving mechanism uniform motion is to drive ultrasonic unit at the uniform velocity to move in driving mechanism, at the uniform velocity
In motion process, ultrasonic unit emits ultrasonic signal to glass baseplate surface and at the same time receiving anti-from glass baseplate surface
The reflected sonic signals being emitted back towards detect defect existing for glass substrate edge in moving process to realize.
Referring to Fig.1 and 2, technical solution provided by the invention:
A kind of glass substrate edge defect detecting device, including glass substrate, transmitting device, driving mechanism and controller；
The driving mechanism is located above the transmitting device and, the driving mechanism arranged in parallel with transmitting device
It is equipped with ultrasonic unit and the ultrasonic unit is slidably connected with the driving mechanism, the glass substrate is placed on described
On transmitting device；
The controller is electrically connected with the transmitting device and driving mechanism respectively, and the controller is configured as control and passes
Defeated device and driving mechanism movement, move to immediately below driving mechanism when recognizing the glass substrate by transmitting device
When, the controller control transmitting device stop motion and control driving mechanism start uniform motion and ultrasonic wave are driven to fill
Uniform motion is set, ultrasonic unit emits ultrasonic signal to glass baseplate surface and at the same time receiving from glass during the motion
The reflected sonic signals that glass substrate surface is reflected back carry out defects detection with the edge to glass substrate and obtain corresponding detection knot
Fruit.
As can be seen from the above description, the beneficial effects of the present invention are:
By the way that driving mechanism is arranged in the top of transmitting device, ultrasonic unit is set in driving mechanism and ultrasonic wave fills
It sets and is slidably connected with driving mechanism, can be when glass substrate be moved to immediately below driving mechanism, controller controls driving mechanism
Uniform motion is to drive ultrasonic unit at the uniform velocity to move in driving mechanism, during uniform motion, ultrasonic unit hair
Ultrasonic signal is penetrated to glass baseplate surface and at the same time receiving the reflected sonic signals being reflected back from glass baseplate surface, thus
Realization detects defect existing for glass substrate edge in moving process, convenient for finding that glass substrate quality is asked in advance
Topic, avoids follow-up process from fragmentation danger occur, and the detection device of this programme design can be detected accurately into before film forming cleaning machine
The edge quality defect of glass substrate, solves current equipment and can only detect fragmentation glass substrate that asking for edge defect cannot be detected
Topic, is also avoided that low by the labour and accuracy of artificial detection, improves process efficiency and reliability.
Further, the quantity of the driving mechanism be four groups, driving mechanism described in four groups respectively with the glass substrate
Four edges be correspondingly arranged.
Seen from the above description, four groups of driving mechanisms are set and are separately positioned on the correspondence position of the four edges of glass substrate
It sets, can guarantee that defect existing for the four edges to glass substrate all detects, improve the accuracy of edge defect detection.
Further, the shape of the glass substrate is square, and the quantity of the controller is 1.
Seen from the above description, when the shape of glass substrate is square, the four edges equal length of glass substrate is corresponding
Driving mechanism length be also it is the same, ultrasonic unit in the distance that driving mechanism move be also it is the same, need to be by same
One controller control driving mechanism is with identical speed uniform motion.
Further, the shape of the glass substrate is rectangle, and the quantity of the controller is 2, and respectively the
One controller and second controller, driving mechanism movement above two long sides of first controller control glass substrate and
Control transmitting device movement, the driving mechanism movement above two short sides of the second controller control glass substrate.
Seen from the above description, when the shape of glass substrate is rectangle, the four edges length of glass substrate is unequal,
It being controlled respectively by the way that two controllers are arranged, the first controller controls the edge defect situation of two long sides of glass substrate, the
Two controllers control the edge defect situation of two short sides of glass substrate, to realize the defect inspection at four edges of glass substrate
It surveys.
Further, the driving mechanism includes frame, screw rod and motor, and the motor is electrically connected with place's controller
It connects；
The frame includes pedestal, and first baffle and second baffle are respectively equipped on the opposite end of the pedestal, described
Motor is fixed on first baffle and the output shaft of motor passes through first baffle, one end of the screw rod and the motor
Output shaft is fixedly connected, and the other end of the screw rod and second baffle are rotatablely connected, and sliding block and described is arranged on the screw rod
Sliding block is connect with the wire rod thread, and gag lever post, the slide block set are fixedly installed between the first baffle and second baffle
It is located at the outer wall of gag lever post and is slidably connected with the gag lever post, the ultrasonic unit is fixedly connected with the sliding block and direction
The glass substrate.
Further, infrared transmitter is additionally provided on the opposite end of the pedestal, the sliding block is equipped with infrared receiver
Device establishes communication relations, the infrared transmitter and infrared remote receiver between the infrared remote receiver and the infrared transmitter
It is electrically connected with the controller.
As can be seen from the above description, by the way that setting and infrared hair on infrared transmitter and sliding block is arranged in the opposite end of pedestal
Emitter establishes the infrared remote receiver of communication relations, and infrared transmitter and infrared remote receiver are electrically connected with the controller, and can guarantee
Ultrasonic unit stops when moving to terminal from initial position, when next glass substrate arrives, then at the beginning of moving back from terminal
Beginning position is reaching so that detecting a piece of glass substrate only needs the ultrasonic unit in driving mechanism to move once along track
Loss is reduced while to testing goal.
Further, the transmitting device includes transmission mechanism and positioning mechanism, and the transmission mechanism is configured as loading
Glass substrate simultaneously transmits glass substrate, and the positioning mechanism is configured as moving to drive from initial position in glass substrate
Positioning is clamped to glass substrate when immediately below motivation structure；
The transmitting device includes a plurality of perpendicular to transmission direction and spaced roller shaft, on every roller shaft
It is equipped at intervals with multiple conveying rollers for abutting with substrate.
It further, further include processor and display；
The processor is configured to after the reflected sonic signals being reflected back from glass baseplate surface are converted into electric signal
Display is sent to show in the form of waveform.
As can be seen from the above description, the reflected sonic signals being reflected back from glass baseplate surface are converted into electric signal by processor
It is sent to display afterwards to show in the form of waveform, by the wave figure on viewing screen, operator can be quickly and reliably
Confirm the integrality of glass substrate.
Referring to Fig.1 and 2, the embodiment of the present invention one are as follows:
A kind of 1 edge defect detection device of glass substrate, including glass substrate 1, transmitting device, driving mechanism 2 and control
Device；
The driving mechanism 2 is located above the transmitting device and, the driving machine arranged in parallel with transmitting device
Structure 2 is equipped with ultrasonic unit 3 and the ultrasonic unit 3 is slidably connected with the driving mechanism 2, and the glass substrate 1 is put
It sets on the transmitting device；
The controller is electrically connected with the transmitting device and driving mechanism 2 respectively, and the controller is configured as controlling
Transmitting device and driving mechanism 2 move, and are moving to driving mechanism 2 just by transmitting device when recognizing the glass substrate 1
When lower section, the controller control transmitting device stop motion and control driving mechanism 2 start uniform motion and drive super
3 uniform motion of acoustic wave device, ultrasonic unit 3 emits ultrasonic signal to 1 surface of glass substrate and same during the motion
When receive from 1 surface reflection of glass substrate return reflected sonic signals with to glass substrate 1 edge carry out defects detection obtain
Corresponding testing result.
The quantity of the driving mechanism 2 is four groups, four with the glass substrate 1 respectively of driving mechanism 2 described in four groups
While being correspondingly arranged.
The shape of the glass substrate 1 is square, and the quantity of the controller is 1.
The shape of the glass substrate 1 is rectangle, and the quantity of the controller is 2, and respectively the first controller
And second controller, first controller control the movement of driving mechanism 2 and control biography above two long sides of glass substrate 1
Defeated device movement, the second controller control the driving mechanism 2 above two short sides of glass substrate 1 and move.
The driving mechanism 2 includes frame, screw rod 203 and motor 204, and the motor 204 is electrically connected with place's controller
It connects；
The frame includes pedestal, and first baffle 201 and second baffle are respectively equipped on the opposite end of the pedestal
202, the motor 204 is fixed on first baffle 201 and the output shaft of motor 204 passes through first baffle 201, the silk
One end of bar 203 is fixedly connected with the output shaft of the motor 204, and the other end and second baffle 202 of the screw rod 203 rotate
It connects, is arranged with sliding block 205 on the screw rod 203 and the sliding block 205 is threadedly coupled with the screw rod 203, the first gear
Be fixedly installed gag lever post 206 between plate 201 and second baffle 202, the sliding block 205 be set in the outer wall of gag lever post 206 and
It is slidably connected with the gag lever post 206, the ultrasonic unit 3 is fixedly connected with the sliding block 205 and towards the glass
Substrate 1.
The distance that the sliding block 205 moves on screw rod 203 and the size at four edges of glass substrate 1 match, In
It can existing defects within the scope of the 0-5nm at 1 edge of glass substrate.
Infrared transmitter is additionally provided on the opposite end of the pedestal, the sliding block 205 is equipped with infrared remote receiver, described
Establish communication relations between infrared remote receiver and the infrared transmitter, the infrared transmitter and infrared remote receiver with it is described
Controller electrical connection.
The transmitting device includes transmission mechanism and positioning mechanism, and the transmission mechanism is configured as loading glass substrate 1
And glass substrate 1 is transmitted, the positioning mechanism is configured as moving to driving mechanism from initial position in glass substrate 1
Positioning is clamped to glass substrate 1 when 2 underface；
The transmitting device includes a plurality of perpendicular to transmission direction and spaced roller shaft 4, every roller shaft 4
On be equipped at intervals with multiple conveying rollers 5 for abutting with substrate.
It further include processor and display；
The processor is configured to after electric signal being converted into from the reflected sonic signals that 1 surface reflection of glass substrate is returned
Display is sent to show in the form of waveform.
If the edge of glass substrate 1 is intact, the reflected sonic signals returned through 1 surface reflection of glass substrate are at
Reason device be converted into electric signal, by display display generate waveform should be it is foreseeable, be in shape it is continuous and smooth,
But when there are, due to can additionally return to back wave, waveform will appear sudden when the defects of crackle or notch at glass substrate 1 edge
Wave crest, trough or sawtooth pattern waveform, operator can according to waveform confirm substrate integrality, meanwhile, can be according to these arteries and veins
Waveform is rushed to determine whether substrate existing defects, then provide alarm signal.
In conclusion a kind of glass substrate edge defect detecting device provided by the invention, by the upper of transmitting device
Side's setting driving mechanism, is arranged ultrasonic unit in driving mechanism and ultrasonic unit is slidably connected with driving mechanism, can
When glass substrate is moved to immediately below driving mechanism, controller control driving mechanism uniform motion is to drive ultrasonic unit
It is at the uniform velocity moved in driving mechanism, during uniform motion, ultrasonic unit emits ultrasonic signal to glass baseplate surface
And at the same time the reflected sonic signals being reflected back from glass baseplate surface are received, to realize in moving process to glass substrate
Defect existing for edge is detected, and convenient for finding glass substrate quality problems in advance, follow-up process is avoided fragmentation danger occur,
The detection device of this programme design can accurately detect the edge quality defect into film forming cleaning machine front glass substrate, solve mesh
Preceding equipment can only detect the problem of fragmentation glass substrate cannot detect edge defect, be also avoided that by artificial detection labour and
Accuracy is low, improves process efficiency and reliability.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalents made by bright specification and accompanying drawing content are applied directly or indirectly in relevant technical field, similarly include
In scope of patent protection of the invention.
Claims (8)
1. a kind of glass substrate edge defect detecting device, which is characterized in that including glass substrate, transmitting device, driving mechanism
And controller；
The driving mechanism is above the transmitting device and arranged in parallel with transmitting device, sets in the driving mechanism
There is ultrasonic unit and the ultrasonic unit is slidably connected with the driving mechanism, the glass substrate is placed on the transmission
On device；
The controller is electrically connected with the transmitting device and driving mechanism respectively, and the controller is configured as control transmission dress
It sets and is moved with driving mechanism, when recognizing the glass substrate when moving to immediately below driving mechanism by transmitting device, institute
It states controller control transmitting device stop motion and control driving mechanism starts uniform motion and drives ultrasonic unit even
Speed movement, ultrasonic unit emits ultrasonic signal to glass baseplate surface and at the same time receiving from glass base during the motion
The reflected sonic signals that plate surface is reflected back carry out defects detection with the edge to glass substrate and obtain corresponding testing result.
2. glass substrate edge defect detecting device according to claim 1, which is characterized in that the number of the driving mechanism
Amount is four groups, and four edges of the driving mechanism described in four groups respectively with the glass substrate are correspondingly arranged.
3. glass substrate edge defect detecting device according to claim 2, which is characterized in that the shape of the glass substrate
Shape is square, and the quantity of the controller is 1.
4. glass substrate edge defect detecting device according to claim 2, which is characterized in that the shape of the glass substrate
Shape is rectangle, and the quantity of the controller is 2, and respectively the first controller and second controller, first control
Device controls driving mechanism movement and control transmitting device movement above two long sides of glass substrate, the second controller control
Driving mechanism movement above two short sides of glass substrate processed.
5. glass substrate edge defect detecting device according to claim 1, which is characterized in that the driving mechanism includes
Frame, screw rod and motor, the motor are electrically connected with place's controller；
The frame includes pedestal, and first baffle and second baffle, the motor are respectively equipped on the opposite end of the pedestal
It is fixed on first baffle and the output shaft of motor passes through first baffle, the output of one end of the screw rod and the motor
Axis is fixedly connected, and the other end and second baffle of the screw rod are rotatablely connected, and is arranged with sliding block and the sliding block on the screw rod
It is connect with the wire rod thread, gag lever post is fixedly installed between the first baffle and second baffle, the sliding block is set in
It the outer wall of gag lever post and is slidably connected with the gag lever post, the ultrasonic unit is fixedly connected with the sliding block and towards described
Glass substrate.
6. glass substrate edge defect detecting device according to claim 5, which is characterized in that opposite the two of the pedestal
Infrared transmitter is additionally provided on end, the sliding block is equipped with infrared remote receiver, the infrared remote receiver and the infrared transmitter
Between establish communication relations, the infrared transmitter and infrared remote receiver are electrically connected with the controller.
7. glass substrate edge defect detecting device according to claim 1, which is characterized in that the transmitting device includes
Transmission mechanism and positioning mechanism, the transmission mechanism is configured as loading glass substrate and transmit to glass substrate, described
Positioning mechanism is configured as being clamped glass substrate when glass substrate moves to immediately below driving mechanism from initial position
Positioning；
The transmitting device includes a plurality of perpendicular to transmission direction and spaced roller shaft, on every roller shaft between
Every equipped with multiple conveying rollers for being abutted with substrate.
8. glass substrate edge defect detecting device according to claim 1, which is characterized in that further include processor and aobvious
Show device；
The processor is configured to being sent after the reflected sonic signals being reflected back from glass baseplate surface are converted into electric signal
It is shown in the form of waveform to display.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910639602.4A CN110530970A (en) | 2019-07-16 | 2019-07-16 | A kind of glass substrate edge defect detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910639602.4A CN110530970A (en) | 2019-07-16 | 2019-07-16 | A kind of glass substrate edge defect detecting device |
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| Publication Number | Publication Date |
|---|---|
| CN110530970A true CN110530970A (en) | 2019-12-03 |
Family
ID=68660300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910639602.4A Pending CN110530970A (en) | 2019-07-16 | 2019-07-16 | A kind of glass substrate edge defect detecting device |
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| Country | Link |
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| CN (1) | CN110530970A (en) |
Cited By (2)
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| CN112362002A (en) * | 2020-10-23 | 2021-02-12 | 中旗(湖北)新材料有限公司 | Quartz stone plate detection device and method |
| CN114018184A (en) * | 2021-10-26 | 2022-02-08 | 珠海格力电器股份有限公司 | Ceramic chip fragmentation detection system, method and device and related equipment |
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| CN112362002A (en) * | 2020-10-23 | 2021-02-12 | 中旗(湖北)新材料有限公司 | Quartz stone plate detection device and method |
| CN114018184A (en) * | 2021-10-26 | 2022-02-08 | 珠海格力电器股份有限公司 | Ceramic chip fragmentation detection system, method and device and related equipment |
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Application publication date: 20191203 |
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| RJ01 | Rejection of invention patent application after publication |