CN110517941B - X-ray tube anode assembly - Google Patents

X-ray tube anode assembly Download PDF

Info

Publication number
CN110517941B
CN110517941B CN201910740121.2A CN201910740121A CN110517941B CN 110517941 B CN110517941 B CN 110517941B CN 201910740121 A CN201910740121 A CN 201910740121A CN 110517941 B CN110517941 B CN 110517941B
Authority
CN
China
Prior art keywords
anode
silver
kovar
ring
anode assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910740121.2A
Other languages
Chinese (zh)
Other versions
CN110517941A (en
Inventor
张纯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wenzhou Chengtai Electronic Co ltd
Original Assignee
Wenzhou Chengtai Electronic Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wenzhou Chengtai Electronic Co ltd filed Critical Wenzhou Chengtai Electronic Co ltd
Priority to CN201910740121.2A priority Critical patent/CN110517941B/en
Publication of CN110517941A publication Critical patent/CN110517941A/en
Application granted granted Critical
Publication of CN110517941B publication Critical patent/CN110517941B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/165—Vessels; Containers; Shields associated therewith joining connectors to the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/42—Measurement or testing during manufacture

Abstract

The invention relates to an X-ray tube anode assembly which comprises an anode cap, an anode body, an anode kovar ring, kovar connecting glass and an isolating cover, wherein the kovar connecting glass and the anode kovar ring are integrally arranged, the isolating cover and the anode kovar ring are integrally welded on the anode body in a welding mode, and the isolating cover is made of kovar materials.

Description

X-ray tube anode assembly
Technical Field
The invention relates to the field of new energy, in particular to a method for preventing secondary electrons from puncturing a glass bulb of an X-ray tube and a manufacturing process thereof.
Background
With the continuous progress of science and technology, the application of X-rays is more and more extensive, mainly including medical treatment, security inspection and industrial flaw detection, and the quality requirement of an X-ray tube is higher and higher along with the X-ray tube. x-ray tubes typically include an anode, a cathode, and a glass envelope. When the X-ray tube works, electrons moving at high speed bombard a target surface to generate a large amount of secondary electrons, part of the secondary electrons bombard the welding position of the glass shell and the anode Kovar ring, and the glass shell is bombarded by secondary current, so that the glass shell is broken down and the X-ray tube is damaged. In order to prevent the reduction of secondary electron bombardment on the glass envelope at the welding position of the anode hairring in the X-ray design, the general process comprises the following two ways: and pressing an R rib at the position of the glass bulb at the position of the anode kovar ring welding position. However, because the relative precision of the glass parts is low, the glass thickness is easily uneven during processing, so that the R rib position is not accurate due to deviation, cathode and anode sealing, interelectrode distance and the like when the rib position of the glass tube is pressed, and the damage of secondary electron bombardment to the glass shell cannot be effectively prevented. The second method comprises the following steps: the lower part of the anode head is pressurized and riveted with the isolation cover, but the isolation cover in the pressurizing process of the lower part of the anode head has poor connection effect due to riveting, and the isolation cover falls off and loosens due to high temperature during anode exhaust. Therefore, the reliability of the two methods is relatively insufficient, and the yield of the X-ray tube is directly influenced.
Disclosure of Invention
In order to overcome the technical defects, the invention provides a method for preventing secondary electrons from puncturing an X-ray tube and a manufacturing process thereof. The anode assembly comprises an anode cap, an anode body, an anode kovar ring and a shielding case, wherein the shielding case is welded on the anode body in a welding mode and integrally welded with the anode kovar ring, and the shielding case is made of kovar materials.
After the structure is adopted, the isolating cover is made of kovar materials and is integrally welded with the anode kovar ring, the isolating cover can effectively block bombardment of secondary electrons, and the kovar materials consistent with the kovar ring are adopted, so that the isolating cover is good in consistency and reliable in structure.
As a further improvement of the invention, silver-copper solder is arranged at the position, close to the anode cap, of the inner ring of the isolation cover and is welded and formed with the anode body through the silver-copper solder, silver-copper solder is arranged at the position, close to the anode body, of the inner ring of the anode kovar ring, and the anode kovar ring is welded and formed with the anode body through the silver-copper solder.
After having adopted above-mentioned structure, the mode that adopts silver-colored welding not only the technology mature, adopts silver-colored copper solder moreover between cage and the positive pole kovar ring, and silver-colored copper solder and kovar material looks adaptation to can be used to the welding action between two materials. The welding mode replaces the traditional riveting connection mode, and the technical problem that the isolation cover is easy to fall off during air exhaust is solved.
As a further improvement of the invention, the process method comprises the following steps: checking whether each standard of the anode assembly to be manufactured meets the processing specification, and performing the second step: respectively manufacturing silver copper solder rings at the inner diameter ring position of the anode kovar ring and the inner diameter ring position of the isolation cover, and filling silver copper solder rings into an inner hole of the anode kovar ring and an inner hole of the isolation cover, wherein the fourth step is that: aligning the center of the anode body and the center of the anode cap with each other and assembling the anode body into the anode cap, step five, mounting the anode kovar ring in the step three into the anode corresponding mounting position to jointly form an anode assembly weldment, step six, placing the mounted anode assembly weldment into a glass bell jar, step seven, opening a silver welding table low vacuum valve to vacuumize the glass bell jar, closing the low vacuum valve after confirming no air leakage, opening a high vacuum valve to vacuumize the glass bell jar to 5 x 10-3And a step eight: heating the anode assembly weldment to 400 ℃ from normal temperature to heat the anode assembly weldment to reddish, and carrying out the ninth step: raising the temperature of the anode assembly weldment from 400 ℃ to 740 ℃, and performing the step ten: preserving heat at 740 ℃ for five minutes, and performing the eleventh step: raising the temperature in the silver welding table from 740 ℃ to 800 ℃, and step twelve, keeping the temperature of the anode assembly weldment at 800 DEG CAnd C, two minutes at the temperature of two minutes, step thirteen, and taking out the anode assembly weldment after cooling.
After the process method is adopted, the vacuum silver soldering technology is a mature manufacturing process, the welding effect is good and the implementation is easy for the welding between the anode kovar ring and the isolation cover, the main process steps are divided into two major items including early-stage assembly and later-stage vacuum silver soldering, the early-stage assembly mainly comprises the step of respectively placing silver-copper welding flux into the anode kovar ring and the isolation cover so as to be used for mutually and integrally welding the silver-copper welding flux and the anode body, and the silver-copper welding flux can enable the welding connection effect to be optimal when being placed at the inner diameter ring and the inner diameter hole in the experimental process. In the eighth step, the heating temperature of the silver soldering station is firstly increased to 400 ℃ from normal temperature, the heating temperature is mainly used for removing moisture in the glass cover, so that water particles are prevented from impacting the anode assembly under a high-pressure state to cause damage, and the anode assembly can be burnt to be reddish in the process. The ninth step and the eleventh step are mainly to burn the anode assembly to red, the temperature inside and outside the anode assembly can be fully consistent due to the arrangement of the heat preservation time, and the eleventh step and the twelfth step have the effects that the silver-copper solder can be fully heated and melted to enable corresponding parts to be welded and formed due to the fact that the melting point of the silver-copper solder is 780 ℃ and the heating temperature is 800 ℃.
Drawings
FIG. 1 is a schematic view of the assembly of the present patent;
Detailed Description
As shown in FIG. 1, the anode assembly comprises an anode cap 1, an anode body 2, an anode kovar ring 3 and a shielding case 4, wherein the shielding case 4 is integrally welded on the anode body with the anode kovar ring 3 in a welding manner, and the shielding case 4 is made of kovar material. Adopt cage 4 to be kovar material and with positive pole kovar ring 3 integrated weld shaping, cage 4 not only can effectively block the bombardment of secondary electron, owing to adopt the kovar material unanimous with the kovar ring moreover, the uniformity is good, the structure is reliable. The position of the inner ring of the isolation cover 4, which is close to the anode cap, is provided with silver-copper solder 5, the silver-copper solder 5 is welded and formed with the anode body through the silver-copper solder 5, the position of the inner ring of the anode kovar ring 3, which is close to the anode body, is provided with the silver-copper solder 5, and the anode kovar ring 3 is welded and formed with the anode body through the silver-copper solder. The mode of adopting silver-soldering not only the technology is mature, adopt silver-copper solder moreover between cage and the positive pole kovar ring, silver-copper solder and kovar material looks adaptation to can be used to the welding effect between two materials. The welding mode replaces the traditional riveting connection mode, and the technical problem that the isolation cover is easy to fall off during air exhaust is solved.
The process method comprises the following steps: checking whether each standard of the anode assembly to be manufactured meets the processing specification, and performing the second step: respectively manufacturing silver copper solder rings at the inner diameter ring position of the anode kovar ring and the inner diameter ring position of the isolation cover, and filling silver copper solder rings into an inner hole of the anode kovar ring and an inner hole of the isolation cover, wherein the fourth step is that: aligning the center of the anode body and the center of the anode cap with each other and assembling the anode body into the anode cap, step five, mounting the anode kovar ring in the step three into the anode corresponding mounting position to jointly form an anode assembly weldment, step six, placing the mounted anode assembly weldment into a glass bell jar, step seven, opening a silver welding table low vacuum valve to vacuumize the glass bell jar, closing the low vacuum valve after confirming no air leakage, opening a high vacuum valve to vacuumize the glass bell jar to 5 x 10-3And a step eight: heating the anode assembly weldment to 400 ℃ from normal temperature to heat the anode assembly weldment to reddish, and carrying out the ninth step: raising the temperature of the anode assembly weldment from 400 ℃ to 740 ℃, and performing the step ten: preserving heat at 740 ℃ for five minutes, and performing the eleventh step: and (4) raising the temperature in the silver soldering station from 740 ℃ to 800 ℃, step twelve, maintaining the temperature of the anode assembly weldment at 800 ℃ for two minutes, step thirteen, and taking out the anode assembly weldment after cooling. The vacuum silver soldering technology is a mature manufacturing process, the technology is adopted for welding between the anode kovar ring and the isolation cover, the welding effect is good, the implementation is easy, the main process steps are divided into two major items, the early-stage assembly and the later-stage vacuum silver soldering are included, the early-stage assembly mainly comprises the steps of respectively placing silver-copper solder into the anode kovar ring and the isolation cover so as to be used for mutual integral welding of the silver-copper solder and the anode body, the silver-copper solder is found in the experimental process and placed at the inner diameter ring and the inner diameter ringThe welded connection effect can be optimized when the inner hole is arranged. In the eighth step, the heating temperature of the silver soldering station is firstly increased to 400 ℃ from normal temperature, the heating temperature is mainly used for removing moisture in the glass cover, so that water particles are prevented from impacting the anode assembly under a high-pressure state to cause damage, and the anode assembly can be burnt to be reddish in the process. The ninth step and the eleventh step are mainly to burn the anode assembly to red, the temperature inside and outside the anode assembly can be fully consistent due to the arrangement of the heat preservation time, and the eleventh step and the twelfth step have the effects that the silver-copper solder can be fully heated and melted to enable corresponding parts to be welded and formed due to the fact that the melting point of the silver-copper solder is 780 ℃ and the heating temperature is 800 ℃.

Claims (5)

  1. An X-ray tube anode assembly, X-ray tube anode assembly includes anode cap, positive pole body, positive pole kovar ring, kovar with the integrative kovar that sets up of positive pole kovar ring connect glass to and cage, its characterized in that: the isolation hood is integrally welded on the anode body through a welding mode and the anode kovar ring, the isolation hood is made of kovar materials, silver-copper welding materials are arranged at the position, close to the anode cap, of the inner ring of the isolation hood and are welded and formed with the anode body through the silver-copper welding materials, silver-copper welding materials are arranged at the position, close to the anode body, of the inner ring of the anode kovar ring, silver-copper welding materials are arranged at the position, close to the anode body, of the anode kovar ring, and the anode kovar ring is welded and formed with the anode body through the silver-copper welding materials, and the process method for manufacturing the X-ray tube anode assembly comprises the following steps: checking whether the anode assembly to be manufactured meets the processing specification or not, and performing the second step: respectively manufacturing silver copper solder rings at the inner diameter ring position of the anode kovar ring and the inner diameter ring position of the isolation cover, and filling silver copper solder rings into an inner hole of the anode kovar ring and an inner hole of the isolation cover, wherein the fourth step is that: aligning the center of the anode body and the center of the anode cap with each other and assembling the anode body into the anode cap, step five, mounting the anode kovar ring in the step three into the anode corresponding mounting position to jointly form an anode assembly weldment, step six, placing the mounted anode assembly weldment into a glass bell jar, step seven, opening a silver welding table low vacuum valve to vacuumize the glass bell jar, closing the low vacuum valve after confirming no air leakage, opening a high vacuum valve to vacuumize the glass bell jar to 5 x 10-3Step (2)Eighthly: heating the anode assembly weldment to 400 ℃ from normal temperature to heat the anode assembly weldment to reddish, and carrying out the ninth step: raising the temperature of the anode assembly weldment from 400 ℃ to 740 ℃, and performing the step ten: preserving heat at 740 ℃ for five minutes, and performing the eleventh step: and (4) raising the temperature in the silver soldering station from 740 ℃ to 800 ℃, step twelve, maintaining the temperature of the anode assembly weldment at 800 ℃ for two minutes, step thirteen, and taking out the anode assembly weldment after cooling.
  2. 2. The X-ray tube anode assembly of claim 1, wherein: the heating time in step eight was 12 minutes.
  3. 3. The X-ray tube anode assembly of claim 1, wherein: the heating time in step nine was 15 minutes.
  4. 4. The X-ray tube anode assembly of claim 1, wherein: the heating time for step eleven was 5 minutes.
  5. 5. The X-ray tube anode assembly of claim 1, wherein: the cooling time for step thirteen was 40 minutes.
CN201910740121.2A 2019-08-12 2019-08-12 X-ray tube anode assembly Active CN110517941B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910740121.2A CN110517941B (en) 2019-08-12 2019-08-12 X-ray tube anode assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910740121.2A CN110517941B (en) 2019-08-12 2019-08-12 X-ray tube anode assembly

Publications (2)

Publication Number Publication Date
CN110517941A CN110517941A (en) 2019-11-29
CN110517941B true CN110517941B (en) 2021-08-03

Family

ID=68624529

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910740121.2A Active CN110517941B (en) 2019-08-12 2019-08-12 X-ray tube anode assembly

Country Status (1)

Country Link
CN (1) CN110517941B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB556031A (en) * 1942-06-05 1943-09-16 Gen Electric Improvements in electronic discharge devices such as x-ray tubes
CN2746516Y (en) * 2004-10-26 2005-12-14 王建军 Firmed environmental protection fixed anode X-ray tube
CN203218217U (en) * 2013-03-20 2013-09-25 杭州凯龙医疗器械有限公司 Micro-focus X ray tube with lateral beryllium window
CN204905207U (en) * 2015-08-26 2015-12-23 温州市康源电子有限公司 Powerful fixed anode X -ray tube of little focus
CN108109893A (en) * 2018-02-05 2018-06-01 公安部第研究所 One kind can cut down stem grid-controlled X-ray tube

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB556031A (en) * 1942-06-05 1943-09-16 Gen Electric Improvements in electronic discharge devices such as x-ray tubes
CN2746516Y (en) * 2004-10-26 2005-12-14 王建军 Firmed environmental protection fixed anode X-ray tube
CN203218217U (en) * 2013-03-20 2013-09-25 杭州凯龙医疗器械有限公司 Micro-focus X ray tube with lateral beryllium window
CN204905207U (en) * 2015-08-26 2015-12-23 温州市康源电子有限公司 Powerful fixed anode X -ray tube of little focus
CN108109893A (en) * 2018-02-05 2018-06-01 公安部第研究所 One kind can cut down stem grid-controlled X-ray tube

Also Published As

Publication number Publication date
CN110517941A (en) 2019-11-29

Similar Documents

Publication Publication Date Title
CN102951594B (en) Tube shell for vacuum package of micro-optical-electronic-mechanic system and manufacture method thereof
CN104091787A (en) Metallic packaging shell and manufacturing technology thereof
CN104889519B (en) A kind of manufacture method of metal-ceramic X-ray tube
CN109243948A (en) A kind of high stability CT bulb
US2504504A (en) Manufacture of the envelopes of electron discharge and other evacuated devices
CN110517941B (en) X-ray tube anode assembly
US2402029A (en) Electron device and method of manufacture
CN114999872A (en) X-ray tube packaging process and packaging equipment thereof
CN102522343B (en) Microcomponent vacuum packaging exhaust device and method
US2568460A (en) Method of fabricating sealed envelopes
US2748067A (en) Processing plated parts
CN115148562A (en) Firing process and firing equipment for X-ray tube
CN208570520U (en) A kind of medical X-ray tube of high efficiency and heat radiation ripple ceramic structure
CN108129037B (en) Molybdenum-glass sealing insulator sealing method
CN103056506B (en) Vacuum electron beam welding method of NbTi/Cu superconduction composite sheath
CN114083102B (en) Fuel target and welding method thereof
CN105575744B (en) A kind of preparation method of carbon nanometer cold cathode X-ray tube
US2164910A (en) Electronic discharge tube
CN101390181A (en) Furnace-made feedthrough featuring wrap-around glass-to-metal seal
CN215295407U (en) Corrugated device with exhaust function
CN105161464A (en) Radiation-proof metal package housing
CN205645749U (en) Be used in high withstand voltage inflatable collector on travelling wave tube
CN201478251U (en) Suction tube-free magnetic control tube core
CN116978762B (en) Pocket welding method for anode assembly
CN205959942U (en) Negative pole stem stem subassembly and X -ray tube

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant