CN110487455A - A kind of method that light auxiliary improves strain gauge sensitivity - Google Patents
A kind of method that light auxiliary improves strain gauge sensitivity Download PDFInfo
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- CN110487455A CN110487455A CN201910723638.0A CN201910723638A CN110487455A CN 110487455 A CN110487455 A CN 110487455A CN 201910723638 A CN201910723638 A CN 201910723638A CN 110487455 A CN110487455 A CN 110487455A
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- dimensional material
- strain gauge
- light source
- stress
- sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A kind of method for assisting improving strain gauge sensitivity the present invention relates to light, belongs to sensor field.The present invention occurs that the strain gauge based on two-dimensional material while electrical properties change by illumination by stress influence using light auxiliary law；Illumination is as booster action, additional carrier is injected for two-dimensional material, it is allowed to when being generated deformation by stress, the additional carriers of the injection can effectively adjust the height of effective Schottky barrier between electrode and two-dimensional material, to achieve the purpose that improve strain gauge spirit lightness.Stress makes two-dimensional material, and deformation occurs, this band structure that will lead to the two-dimensional material changes and the change of the Schottky barrier between the two-dimensional material and the conductive electrode of contact；Light auxiliary law can inject additional carrier for two-dimensional material, and this process also will receive the influence of stress；Using light auxiliary law, two kinds of stress responses can be superimposed, to improve the sensitivity of strain gauge.
Description
Technical field
The present invention relates to the method in strain gauge field and light injection carrier, in particular to a kind of light auxiliary, which improves, answers
The method of force snesor sensitivity, belongs to sensor field.
Background technique
Strain gauge (strain sensor) is to measure a kind of sensor strained caused by object receiving force deformation.
The most traditional is the strain gauge of resistance-strain chip, and the deformation that it can produce stress on mechanical component is converted into electricity
The variation of resistance, by the calibration of resistance and deformation, it can be learnt that stress that mechanical component is subject to or deformation.
But the sensitivity of traditional strain gauge is usually lower, such as the sensitivity of the strain gauge based on metal
(gauge factor, GF) is generally in 1~5 range.And the light-assistant method of the application is used, it can make to be based on two-dimensional material
The sensitivity of strain gauge greatly improve, such as we make SnS in the lab2The stress sensitivity of material improves 50
Times, making GF is more than 1000.
The method that light auxiliary improves strain gauge sensitivity changes two mainly using the principle of light injection carrier
It ties up the carrier concentration of material itself and adjusts the height of two-dimensional material and interelectrode contact berrier, and the deformation that stress generates
This process can equally be had an impact, thus increase the sensitivity of strain gauge by additional response factor, it is final to show
For the raising of strain gauge sensitivity.
Summary of the invention
The purpose of the present invention is to solve the prior arts there is a problem of that sensitivity is low, provides a kind of light auxiliary and improves and answers
The method of force snesor sensitivity.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of method that light auxiliary improves strain gauge sensitivity, using light auxiliary law: making answering based on two-dimensional material
Force snesor occurs while electrical properties change by stress influence by illumination；Illumination makes electricity as booster action
The amplitude that property changes increases, to achieve the purpose that improve strain gauge spirit lightness.
Specific physical principle are as follows: stress makes two-dimensional material, and deformation occurs, this will lead to the band structure of the two-dimensional material
Change, be reflected as the carrier concentration of the two-dimensional material change and the two-dimensional material and contact conduction electricity
The change of the Schottky barrier of interpolar；Light auxiliary law can inject additional carrier for two-dimensional material, and this process also can be by
To the influence of stress；Using light auxiliary law, two kinds of stress responses can be superimposed, to improve strain gauge
Sensitivity.
Using the above method prepare highly sensitive strain gauge, comprising: two-dimensional material, flexible substrate, conductive electrode,
Conducting wire and light source；The two-dimensional material is placed in flexible substrate, and the conductive electrode is placed in two-dimensional material and flexible substrate；
With light source lighting two-dimensional material part；The connecting wire on conductive electrode facilitates entire sensor in access electronic system.
The two-dimensional material refers to that (herein referring to thickness) in one dimension is in the material of nanoscale range.Such as
But do not limit only these, comprising: SnS2、SnS、SnSe2、SnSe、GaSe、GeSe、WS2、WSe2、MoS2、MoSe2、VS2、
VSe2、PtS2、PtSe2With graphene etc..
The flexible substrate is the substrate for carrying told two-dimensional material, and pliability is adjustable parameter, should be according to most
The stress scene of whole intended application is different, and using the higher material of pliability, such as but what is do not limited is organic elastomer plastics；Or
Person uses the lower material of pliability, such as but not limit be memory metal elasticity steel.
The construction conductive electrode refers to using any means, forms conductive electrode, partially cover and be connected to described two
It ties up on material, such as but what is do not limited have, and photoetching process forms after template and plates one layer of metal with coating machine.
The conductive electrode, told material ends or multiterminal can be connected by referring to, so facilitate by told material connect into
In electronic system.The material of the conductive electrode is adjustable parameter, different from the contact berrier of told material according to different materials,
Select metal, alloy or other conductive materials for being most suitable for strain gauge.
The link conducting wire, referring to has the function of that sensor chain can be accessed to the part in electronic system, it is not necessary to
There is conducting wire, as long as sensor has access in electronic system.
The electronic system refers to and measures stress using the strain gauge, is biased, and reads analysis feedback letter
Number electronic system.
The light source, be refer to luminous device, such as but do not limit, can be LED light source, laser light source, glimmering
Radiant etc., and wavelength, intensity of illumination, frequency and whether continuous etc., are adjustable parameter, should specifically regard the two-dimensional material and
The material of conductive electrode selects.
Detailed description of the invention
Fig. 1 is step 1, is shifted in two-dimensional material to flexible substrate；
Fig. 2 is step 2, is having one side structure conductive electrode of two-dimensional material；
Fig. 3 is step 3, is accessed sensor in electronic system by conducting wire；
Fig. 4 is step 4, with light source illumination two-dimensional material；
Fig. 5 is the simple 3-D view that light assists strain gauge；
Fig. 6 is the simple lateral plan that light assists strain gauge；
Fig. 7 is the deformed state for the 5 kinds of sensors enumerated；
Fig. 8 is the schematic illustration that light auxiliary improves strain gauge；
Fig. 9 is the experiment test cases of embodiment；Scheming A is sample under dark condition, and electric current becomes increase with time for deformation
Change curve synoptic diagram；Scheming B is the sample under illumination condition, deformation current curve schematic diagram increase with time；Figure C is ratio
Compared with the difference schematic diagram of sample sensitivity GF under dark and illumination.
Specific embodiment
To keep the purposes, technical schemes and advantages of the invention implemented clearer, below in conjunction in example of the present invention
The scheme in invention example is further described in more detail in attached drawing.In the accompanying drawings, same or similar symbol indicates identical
Or similar element or the element with same or similar function.Described example is the example of a part of the invention, and
The example being not all of.
It is exemplary below with reference to the example of attached drawing description, it is intended to be used to explain the present invention, and should not be understood as
Limitation of the invention.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
It is lower to obtain every other embodiment, it shall fall within the protection scope of the present invention, the embodiment of the present invention is carried out with reference to the accompanying drawing
It is described in detail.
In the description of the present invention, it is to be understood that, term " medium ", " reduction ", " low-level ", " higher level ",
Orientation, position or the Degree of Accord Relation of knowledge such as " reduced levels ", " larger ", " substantially " and " superposition " are based on the figure
Orientation, position or Degree of Accord Relation, are merely for convenience of description of the present invention and simplification of the description, rather than indication or suggestion meaning
Device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to this hair
The limitation of bright protection scope.
Embodiment 1
A kind of method that light auxiliary improves strain gauge sensitivity, as shown in Figure 5,6, using light auxiliary law: making to be based on
The strain gauge of two-dimensional material is being occurred to receive illumination while electrical properties change by stress influence；Illumination is as auxiliary
Effect injects additional carrier for two-dimensional material, and the amplitude for changing electrical properties increases, to reach raising stress sensing
The purpose of device spirit lightness.
Using the above method prepare highly sensitive strain gauge, comprising: two-dimensional material, flexible substrate, conductive electrode,
Conducting wire and light source；The two-dimensional material is placed in flexible substrate, the conductive electrode be placed in two-dimensional material and flexible substrate it
Between；With light source lighting two-dimensional material part；The connecting wire on conductive electrode makes entire sensor facilitate access electronic system
In.
The working method of the high sensitivity strain gauge is as follows:
As shown in Fig. 1, a piece of two-dimensional material is transferred in a piece of flexible substrate, is exemplified as here by operating procedure 1
SnS2Material is transferred on PDMS substrate.
As shown in Fig. 2, operating procedure 2 make mask in two-dimensional material, are first formed with the method that ultraviolet light etches
Suitable mask, then with the method for vacuum evaporation, plate one layer of Ti metal and layer of Au metal in mask side, then use acetone
Alcohol washes fall mask, form the conductive electrode of needs.For simple illustration in figure, 2 hold-carrying electrodes are shown only, it is more complicated
Electrode structure can also be used.
As shown in Fig. 3, operating procedure 3 are connected strain gauge in electronic system with conducting wire, convenient device
It uses, particular bias voltage can be applied by being connected to the smooth aiding sensors with conducting wire, and in the instrument of reading flow overcurrent.
As shown in Fig. 4, operating procedure 4 provide fill-in light to two-dimensional material part with light source and shine, inject photoproduction current-carrying
Son makes the electric property of material itself change, and improves stress sensitive degree, prepares for stress sensing.With 400nm wavelength,
10mW/cm2Energy density light, illumination SnS2Material part greatly improves the electric current for flowing through the material.
As shown in Fig. 7,5 kinds of basic deformation modes of light auxiliary strain gauge, 5 kinds of forms can all give the stress
Sensor brings stress.Left side is the simple side view that the light assists strain gauge, and it is larger only to depict volume
Flexible substrate part, default two-dimensional material in the top of the flexible substrate.In the right deformation mode from top to bottom such as figure
Described by text.
As shown in Fig. 8, assist improving the simple declaration of strain gauge sensitivity principle, two-dimensional material two about light
When pole applies certain bias voltage, the electric current for flowing through told two-dimensional material is in a medium level, when by stress,
The electric current can be reduced to a low-level, this is the basic principle of traditional strain gauge；When the two-dimensional material is by light
When according to auxiliary, initial current of the two-dimensional material itself can be improved to a higher level, when by stress, electric current
A reduced levels can be dropped to.Because having had more light injection in realization principle of the method than traditional strain gauge of light auxiliary to carry
The relationship of stream and stress, therefore, the method assisted using light has additionally been superimposed response of the light action to stress, can mentioned
The sensitivity of high stress sensor.
As shown in Fig. 9, test material SnS2, scheme in A to be the sample under dark condition, deformation is increase with time
Reach 3.123% current curve from 0, according to calculating it is found that under dark state, the sensitivity of this sample only 20.6；
Scheming B is the sample under illumination condition, and deformation reaches 2.031% current curve from 0 increase with time, can according to calculating
Know, under illumination conditions, the sensitivity of this sample is up to 960.1；Scheming C is to compare the SnS2Sample under dark and illumination,
The difference of sensitivity GF, it is known that sensitivity is exaggerated 48 times by illumination.
Above-described specific descriptions have carried out further specifically the purpose of invention, technical scheme and beneficial effects
It is bright, it should be understood that the above is only a specific embodiment of the present invention, the protection model being not intended to limit the present invention
It encloses, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention
Protection scope within.
Claims (9)
1. a kind of method that light auxiliary improves strain gauge sensitivity, it is characterised in that: use light auxiliary law: making based on two dimension
The strain gauge of material is being occurred to receive illumination while electrical properties change by stress influence；Illumination is made as auxiliary
With injecting additional carrier for two-dimensional material, be allowed to when being generated deformation by stress, the additional carriers of the injection
The height of effective Schottky barrier between electrode and two-dimensional material can be effectively adjusted, so that it is bright to reach raising strain gauge spirit
The purpose of degree.
2. using the highly sensitive strain gauge of the method as described in claim 1 preparation, it is characterised in that: include: two dimension
Material, flexible substrate, conductive electrode, conducting wire and light source；The two-dimensional material is placed in flexible substrate, and the conductive electrode is set
Between two-dimensional material and flexible substrate；With light source lighting two-dimensional material part；The connecting wire on conductive electrode makes entirely to pass
Sensor facilitates in access electronic system.
3. the method as described in claim 1, it is characterised in that: the two-dimensional material includes: SnS2、SnS、SnSe2、SnSe、
GaSe、GeSe、WS2、WSe2、MoS2、MoSe2、VS2、VSe2、PtS2、PtSe2And graphene.
4. the method as described in claim 1, it is characterised in that: the light source includes: LED light source, laser light source, fluorescence light
Source.
5. sensor as claimed in claim 2, it is characterised in that: the flexible substrate includes organic elastoplastic or memory
Metallic elastic steel.
6. sensor as claimed in claim 2, it is characterised in that: the building method of the conductive electrode includes: photoetching process shape
One layer of metal is plated with coating machine at after template.
7. sensor as claimed in claim 2, it is characterised in that: the conductive electrode includes: metal or alloy.
8. sensor as claimed in claim 2, it is characterised in that: the light source includes: LED light source, laser light source, fluorescence light
Source.
9. sensor as claimed in claim 2, it is characterised in that: the two-dimensional material includes: SnS2、SnS、SnSe2、SnSe、
GaSe、GeSe、WS2、WSe2、MoS2、MoSe2、VS2、VSe2、PtS2、PtSe2And graphene.
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Application publication date: 20191122 |