CN110487396A - A kind of laser energy detector and its detection method - Google Patents
A kind of laser energy detector and its detection method Download PDFInfo
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- CN110487396A CN110487396A CN201910671104.8A CN201910671104A CN110487396A CN 110487396 A CN110487396 A CN 110487396A CN 201910671104 A CN201910671104 A CN 201910671104A CN 110487396 A CN110487396 A CN 110487396A
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- 238000001514 detection method Methods 0.000 title claims abstract description 22
- 238000012544 monitoring process Methods 0.000 claims abstract description 35
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- 230000008033 biological extinction Effects 0.000 claims description 5
- 230000001154 acute effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 18
- 230000010287 polarization Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 5
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- 230000002238 attenuated effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
Abstract
The invention discloses a kind of laser energy detector and its detection method, laser energy detectors, comprising: transmitting unit, for exporting the laser of fixed energies；Attenuation units, the laser for exporting to the transmitting unit decay and the laser after output attenuatoin, and the attenuation units are relative to the transmitting unit movably to adjust the energy of the laser after the decaying；Monitoring unit, for carrying out energy monitoring to the laser after decaying.Using the present invention, by the way that attenuation units are arranged, the original laser that attenuation units can export transmitting unit is controllable to decay, so as to simulate the laser with different-energy density, achieve the purpose that energy density continuously adjustable, thus, it is possible to the accuracy and reliability that avoid the quality due to the laser effect laser for changing transmitting unit output, guarantee detection effect, and the component of whole device is easy, easy to accomplish.
Description
Technical field
The present invention relates to laser acquisition fields more particularly to a kind of laser energy detectors and its detection method.
Background technique
With the development of laser technique, laser all obtains relatively broad application in numerous areas, especially certain
The laser light source of a little wave bands is played an important role in laser acquisition fields.Due to the energy density of laser output laser beam
Change with the variation of laser transmission range, causes the effect of laser acquisition that difference is presented also with the increase of distance.Therefore,
To the laser acquisition effect under assessment different distance, need at different distances to detect laser, but in practical operation
It is not only time-consuming and laborious in this way in the process, but also realize difficulty.
In the related technology, by continuously adjusting the index (especially laser energy) of laser, to simulate different detection ranges
Under the conditions of laser feature.However the experiment has found that as laser initially exports the variation of energy, laser beam quality also with
Variation, this will affect the accuracy of the Effect on Detecting of laser.
Summary of the invention
The embodiment of the present invention provides a kind of laser energy detector and its detection method, leads in the prior art to solve
Cross the problems such as accuracy is low, reliability is low present in analogue technique monitoring laser feature.
The embodiment of the present invention provides a kind of laser energy detector, comprising:
Transmitting unit, for exporting the laser of fixed energies；
Attenuation units, the laser for exporting to the transmitting unit decay and the laser after output attenuatoin, described
Attenuation units are relative to the transmitting unit movably to adjust the energy of the laser after the decaying；
Monitoring unit, for carrying out energy monitoring to the laser after decaying.
According to some embodiments of the present invention, the attenuation units, comprising:
Polariscope, the polariscope and the transmitting unit interval are arranged, in the polariscope and the transmitting unit
Angle between mandrel line is adjustable；
After the laser light incident to the polariscope of transmitting unit output, a part is another by the polarizer reflective
It is exported after partially passing through the polariscope as the laser after decaying.
In some embodiments of the invention, the polariscope can be around the center axis thereof of the transmitting unit.
In some embodiments of the invention, the attenuation units, further includes:
Energy harvester, for collecting the laser after the polarizer reflective.
Further, the energy harvester is open at one end, the closed tubular structure of the other end, and the collection of energy
The inner wall of device has bulge-structure.
Further, the inner wall of the energy harvester is equipped with extinction part.
According to some embodiments of the present invention, the monitoring unit, comprising:
Spectroscope, the spectroscope are located at side of the attenuation units far from the transmitting unit and single with the decaying
Member interval is arranged, and after the laser light incident to the spectroscope after the decaying, a part is reflected by the spectroscope, another part
Across the spectroscope；
Detector, for being detected to the laser after spectroscope reflection.
In some embodiments of the invention, the angle between the spectroscope and the central axis of the transmitting unit is solid
Determine constant and is acute angle.
The embodiment of the present invention also provides a kind of detection method of laser energy detector, the laser energy detector
For laser energy detector as described above, the detection method includes:
Start the transmitting unit；
The relative position of the attenuation units Yu the transmitting unit is adjusted, so that after the decaying of attenuation units output
Laser be preset value；
Read monitoring unit energy value detected.
According to some embodiments of the present invention, the relative position for adjusting the attenuation units and the transmitting unit,
Include:
The transmitting unit is rotated, to change the folder between the central axis of the transmitting unit and the attenuation units
Angle.
Using the embodiment of the present invention, by the way that attenuation units are arranged, attenuation units can be exported transmitting unit original sharp
Light is controllable to decay, and so as to simulate the laser with different-energy density, reaching energy density can continuously be adjusted
The purpose of section, thus, it is possible to avoid the quality due to the laser effect laser for changing transmitting unit output, guarantee detection effect
Accuracy and reliability, and the component of whole device is easy, easy to accomplish.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And it can be implemented in accordance with the contents of the specification, and in order to allow above and other objects of the present invention, feature and advantage can
It is clearer and more comprehensible, the followings are specific embodiments of the present invention.
Detailed description of the invention
By reading the following detailed description of the preferred embodiment, various other advantages and benefits are common for this field
Technical staff will become clear.The drawings are only for the purpose of illustrating a preferred embodiment, and is not considered as to the present invention
Limitation.And throughout the drawings, the same reference numbers will be used to refer to the same parts.In the accompanying drawings:
Fig. 1 is the structural schematic diagram of laser energy detector in the embodiment of the present invention；
Fig. 2 is the flow chart of the detection method of laser energy detector in the embodiment of the present invention.
Appended drawing reference:
Laser energy detector 100,
Transmitting unit 1,
Attenuation units 2, polariscope 21, energy harvester 22,
Monitoring unit 3, spectroscope 31, detector 32.
Specific embodiment
Exemplary embodiments of the present disclosure are described in more detail below with reference to accompanying drawings.Although showing the disclosure in attached drawing
Exemplary embodiment, it being understood, however, that may be realized in various forms the disclosure without should be by embodiments set forth here
It is limited.On the contrary, these embodiments are provided to facilitate a more thoroughly understanding of the present invention, and can be by the scope of the present disclosure
It is fully disclosed to those skilled in the art.
The propagation path of laser is in radioactivity, i.e. propagation path is remoter, and it is bigger that laser is formed by hot spot, and energy is certain
In the case where, the energy density of laser and the area of hot spot are in inverse ratio.The energy density of the laser Effect on Detecting phase with laser again
It closes, therefore, to the laser acquisition effect under assessment different distance, needs at different distances to detect laser.However,
Realization at different distances detects laser stringenter to environmental requirement, is difficult to realize in the actual operation process, and
It is time-consuming and laborious, detection effect is also bad.
Therefore, in the related technology, usually by continuously adjusting the energy of laser, to be simulated in certain short distance
Different size of hot spot realizes the simulation to laser acquisition effect.But it finds in the actual operation process, it is initial to change laser
Output energy also will cause the variation of laser beam quality, and the quality of laser beam influences the Effect on Detecting of laser.
In consideration of it, the embodiment of the present invention proposes a kind of laser energy detector 100, the laser energy detector 100
By exporting the laser of fixed energies, carrying out regulatable continuous decaying to it again, to reach the effect that laser energy continuously adjusts
Fruit, to realize the simulation to the laser of different distance.
Specifically, as shown in Figure 1, laser energy detector 100 includes: that transmitting unit 1, attenuation units 2 and monitoring are single
Member 3.Wherein, transmitting unit 1 is used to export the laser of fixed energies, to ensure that output laser has stable quality.Decaying is single
Laser of the member 2 for decay to the laser that transmitting unit 1 exports and after output attenuatoin, it is critical that, attenuation units 2 are opposite
It is movable in transmitting unit 1, so as to adjust the energy from the laser after the decaying that attenuation units 2 export.Monitoring unit 3 is then used
In to the laser progress energy monitoring after decaying.
Laser with fixed energies can export the laser of different-energy after the decaying of attenuation units 2, and incident
To monitoring unit 3, continuously adjusting for laser energy is may be implemented in transmitting unit 1 and the cooperation of attenuation units 2, so that
Monitoring unit 3 can detecte with different energy laser.And since the distance of transmitting unit 1 and monitoring unit 3 is to maintain
Constant, the laser-formed spot size for being incident to monitoring unit 3 is also fixed and invariable, and therefore, is incident to monitoring unit 3
The energy density of laser be the variation with energy and change that the spy to laser can be realized in the energy by detecting laser
Survey the assessment of effect.
Using the laser energy detector 100 of above-described embodiment, the laser that transmitting unit 1 exports can be not only ensured
The stability of quality can also realize continuously adjusting for laser energy, so as to simulate the spy of the laser under different distance
Sign realizes the detection to the laser acquisition effect under different distance, and whole device structure is simple, it is convenient to realize, and can ensure
The accuracy and reliability of Effect on Detecting.
On the basis of the above embodiments, the present invention is it is further proposed that each variant embodiment, it should be noted that
In order to make description briefly, the difference with above-described embodiment is only described in each variant embodiment.
As shown in Figure 1, according to some embodiments of the present invention, attenuation units 2 may include polariscope 21.Polariscope 21 with
The setting of the interval of transmitting unit 1, the angle between polariscope 21 and the central axis of transmitting unit 1 is adjustable." hair mentioned herein
Penetrate the central axis of unit 1 " it can be understood as the central axis of the laser beam that transmitting unit 1 is exported.In addition, it is necessary to pay attention to
It is, since polariscope 21 is decayed for the laser of the output to transmitting unit 1, it is understood, therefore, that in laser
Transmission direction on, polariscope 21 is located at the downstream of transmitting unit 1.
After the laser light incident to polariscope 21 that transmitting unit 1 exports, a part is reflected by polariscope 21, and another part passes through
As the laser output after decaying after polariscope 21.It is understood that the laser reflected at polariscope 21 can be managed
Solution is the laser of decaying, and the laser that can only pass through polariscope 21 just can be from the output of attenuation units 2 to monitoring unit 3.
It in this embodiment, can by adjusting the angle of the central axis (or laser beam) of polariscope 21 and transmitting unit 1
To realize the adjusting to the laser energy for passing through polariscope 21.
In some embodiments of the invention, polariscope 21 can be around the center axis thereof of transmitting unit 1.
As shown in Figure 1, in some embodiments of the invention, attenuation units 2 can also include: energy harvester 22, energy
Amount collector 22 is used to collect the laser after the reflection of polariscope 21.It is understood that swashing after the reflection of polariscope 21
Light can enter energy harvester 22, which can be collected (such as consumption) by energy harvester 22.As a result, may be used
It is single to enter monitoring to avoid the laser (can be understood as being attenuated unit 2 attenuate fraction of laser light) reflected away by polariscope 21
Member 3 forms monitoring unit 3 and interferes, and so as to ensure the detection accuracy of monitoring unit 3, improves the working performance of device.
Further, energy harvester 22 can be open at one end, the closed tubular structure of the other end, and energy harvester
22 inner wall has bulge-structure.It is understood that the inner wall of energy harvester 22 be it is rough, for example, energy
The inner wall for measuring collector 22 can be sandblasting oxide side.Energy harvester 22 can be understood as a container, by polariscope 21
Laser after reflection can enter in energy harvester 22 from the open end of energy harvester 22, and by energy harvester 22
It is consumed after the had bulge-structure multiple reflections of wall surface.
Further, the inner wall of energy harvester 22 can be equipped with extinction part.For example, in some examples of the invention
In, extinction part is coated on the inner wall of energy harvester 22.As a result, extinction part can to enter energy harvester 22 laser into
Row absorbs, to improve the depletion efficiency of laser in energy harvester 22.
As shown in Figure 1, according to some embodiments of the present invention, monitoring unit 3 may include: spectroscope 31 and detector
32.Spectroscope 31, which is located at side of the attenuation units 2 far from transmitting unit 1 and is spaced with attenuation units 2, to be arranged.It is understood that
It is that spectroscope 31 is located at the two sides of attenuation units 2, and transmitting unit 1, attenuation units 2 and spectroscope 31 with transmitting unit 1
In any two be spaced apart.
Laser after the decaying of attenuation units 2 can be incident to spectroscope 31, and a part is split the reflection of mirror 31, another
Partially pass through spectroscope 31.Detector 32 is then detected for the laser after reflecting spectroscope 31.Across spectroscope 31
Laser is then used for laser acquisition function.
Be incident to the energy of the laser of spectroscope 31 be it is certain, by spectroscope 31 reflect laser energy with pass through point
Ratio between laser energy the two of light microscopic 31 be it is fixed, after the spectroscope 31 detected by detector 32 reflects
Laser energy, the energy of the laser across spectroscope 31 can be extrapolated.
In some embodiments of the invention, the angle between spectroscope 31 and the central axis of transmitting unit 1 is fixed not
Become and into acute angle.
In some embodiments of the invention, the center of polariscope 21 and the center of spectroscope 31 are respectively positioned on transmitting unit 1
Central axis on.
According to some embodiments of the present invention, attenuation units 2 can be multiple, multiple attenuation units 2 transmitting unit 1 with
It is successively intervally arranged between monitoring unit 3.Thus, it is possible to improve the regulating power to laser energy.
Slab laser 100 according to an embodiment of the present invention is described in detail with a specific embodiment referring to Fig. 1.
It is worth understanding, it is described below to be merely illustrative, rather than to concrete restriction of the invention.It is all using of the invention
Similar structure and its similar variation, should all be included in protection scope of the present invention.
As shown in Figure 1, the laser energy detector of the embodiment of the present invention includes: transmitting unit 1, attenuation units 2 and prison
Survey unit 3.Transmitting unit 1 can launch linearly polarized laser, in the direction of propagation for the linearly polarized laser that transmitting unit 1 is launched
On, attenuation units 2, monitoring unit 3 are successively spaced setting.
As shown in Figure 1, attenuation units 2 include polariscope 21 and energy harvester 22.The linear polarization that transmitting unit 1 emits swashs
Light can be incident to polariscope 21, swash being divided into two bunch polarization after the optical effect of polariscope 21 (such as reflection, transmission)
Light beam splitting.Polariscope 21 may be mounted in the actuator with rotation function, can drive polariscope 21 by the actuator
Exist using the first linearly polarized laser beam splitting as axis or with the intersecting lens of the plane of polarization of the first polarization laser beam splitting and 21 mirror surface of polariscope
Vertical line on mirror surface is axis rotation.
It should be noted that the specific configuration for actuator is not construed as limiting, as long as can be realized the rotation of polariscope 21
Movement.For example, actuator may include motor, the output shaft of motor is connect with polariscope 21, to drive polariscope 21 to rotate.
Since polariscope 21 can rotate, pass through the energy of the adjustable two bunch polarization laser beam splitting of rotatory polarization mirror 21
Ratio.First linearly polarized laser beam splitting is propagated after the transmission of polariscope 21, and the second linearly polarized laser beam splitting is reflected through polariscope 21
After propagate, energy harvester 22 along the second linearly polarized laser beam splitting the direction of propagation be arranged, the second linearly polarized laser beam splitting enter
Its energy is absorbed after energy harvester 22.
As shown in Figure 1, monitoring unit 3 includes spectroscope 31 and detector 32, spectroscope 31 is along the first linearly polarized laser point
The direction of propagation of beam is arranged, and the first linearly polarized laser beam splitting is divided into two beam laser beams, first laser beam warp after spectroscope 31
It crosses after spectroscope 31 transmits and propagates, second laser beam is propagated after the reflection of spectroscope 31, and detector 32 is along second laser beam
Direction of propagation setting, the reflectivity and transmissivity of spectroscope 31 is fixed value, passes through 32 pairs of detector light splitting of monitoring unit 3
The reflected beams (i.e. second laser beam) of mirror 31 carry out energy detection, can extrapolate the transmitted light beam (i.e. first of spectroscope 31
Light beam) laser energy, realize to the real-time monitoring of the laser energy after overregulating.Spectroscope 31 is to the saturating of second laser beam
Rate is crossed not less than 80%.
Transmitting unit 1 is transferred to attenuation units 2 after launching linearly polarized laser, and the polariscope 21 of attenuation units 2 is inclined by line
Vibration laser is divided into two bundles linearly polarized laser beam splitting by certain energy proportion, wherein the second linearly polarized laser beam splitting enters energy receipts
Storage 22, the first linearly polarized laser beam splitting are transferred to monitoring unit 3, and the spectroscope of monitoring unit 3 divides the first linearly polarized laser
Beam is divided into two fixed beam laser beams of energy proportion, and wherein first laser beam is used for laser acquisition, and second laser beam propagates to spy
Device 32 is surveyed, detector 32 can measure the energy of second laser beam, the energy of first laser beam is extrapolated with this value.
Laser energy detector according to an embodiment of the present invention, due to transmitting unit 1 export linearly polarized laser it is inclined
Polarization state is constant, and attenuation units 2 are rotatable, therefore, linearly polarized light can be made through attenuation units 2 by rotating attenuation units 2
Consecutive variations occur for the laser energy after polariscope 21, are continuously adjusted with realizing to laser energy, single due to only rotating decaying
Member 2, therefore, laser energy adjusting deice is simple, and adjustment process is simple and efficient；Moreover, the linearly polarized laser that transmitting unit 1 exports
In the part that is attenuated collected by energy harvester 22, detection process can be generated to avoid this fraction of laser light dry
It disturbs.In addition, the laser beam after energy adjustment propagates to the spectroscope 31 of monitoring unit 3, due to the reflectivity of spectroscope 31
It is fixed value with transmissivity, therefore carries out energy spy by the reflected beams of the detector 32 of monitoring unit 3 to spectroscope 31
It surveys, the laser energy of the transmitted light beam of spectroscope 31 can be extrapolated, realize the real-time prison to the laser energy after overregulating
It surveys.
It should be noted that the foregoing is only a preferred embodiment of the present invention, it is not intended to restrict the invention, it is right
For those skilled in the art, the invention may be variously modified and varied.All within the spirits and principles of the present invention,
Any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
As shown in Fig. 2, the embodiment of the present invention also provides a kind of detection method of laser energy detector, the laser energy
Amount detection device is set to laser energy detector as described above, and the detection method includes:
S101 starts transmitting unit；
S102 adjusts the relative position of attenuation units and transmitting unit, so that the laser after the decaying of attenuation units output
For preset value；
S103 reads monitoring unit energy value detected.
Using the embodiment of the present invention, by adjusting the relative position of attenuation units and transmitting unit, attenuation units can be right
The original laser of transmitting unit output is controllable to decay, so as to simulate the laser with different-energy density,
Achieve the purpose that energy density continuously adjustable, thus, it is possible to avoid the laser effect laser due to changing transmitting unit output
Quality, guarantee the accuracy and reliability of detection effect, and the component of whole device is easy, easy to accomplish.
According to some embodiments of the present invention, the relative position of attenuation units and transmitting unit is adjusted, comprising:
Transmitting unit is rotated, to change the angle between the central axis of transmitting unit and attenuation units.
It should be noted that in the description of this specification, reference term " one embodiment ", " is shown " some embodiments "
The description of meaning property embodiment ", " example ", " specific example " or " some examples " etc. means that the embodiment or example is combined to describe
Particular features, structures, materials, or characteristics be included at least one embodiment or example of the invention.In this specification
In, schematic expression of the above terms may not refer to the same embodiment or example.Moreover, the specific features of description,
Structure, material or feature can be combined in any suitable manner in any one or more of the embodiments or examples.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: not
A variety of change, modification, replacement and modification can be carried out to these embodiments in the case where being detached from the principle of the present invention and objective, this
The range of invention is defined by the claims and their equivalents.
Claims (10)
1. a kind of laser energy detector characterized by comprising
Transmitting unit, for exporting the laser of fixed energies；
Attenuation units, the laser for exporting to the transmitting unit decay and the laser after output attenuatoin, the decaying
Unit is relative to the transmitting unit movably to adjust the energy of the laser after the decaying；
Monitoring unit, for carrying out energy monitoring to the laser after decaying.
2. device as described in claim 1, which is characterized in that the attenuation units, comprising:
Polariscope, the polariscope and the transmitting unit interval are arranged, the central axis of the polariscope and the transmitting unit
Angle between line is adjustable；
After the laser light incident to the polariscope of the transmitting unit output, a part is by the polarizer reflective, another part
It is exported after the polariscope as the laser after the decaying.
3. device as claimed in claim 2, which is characterized in that the polariscope can turn around the central axis of the transmitting unit
It is dynamic.
4. device as claimed in claim 2, which is characterized in that the attenuation units, further includes:
Energy harvester, for collecting the laser after the polarizer reflective.
5. device as claimed in claim 4, which is characterized in that the energy harvester is open at one end, the other end is closed
Tubular structure, and the inner wall of the energy harvester has bulge-structure.
6. device as claimed in claim 5, which is characterized in that the inner wall of the energy harvester is equipped with extinction part.
7. device as described in claim 1, which is characterized in that the monitoring unit, comprising:
Spectroscope, the spectroscope are located at side of the attenuation units far from the transmitting unit and between the attenuation units
After laser light incident to the spectroscope after setting, the decaying, a part is reflected by the spectroscope, and another part passes through
The spectroscope；
Detector, for being detected to the laser after spectroscope reflection.
8. device as claimed in claim 7, which is characterized in that between the spectroscope and the central axis of the transmitting unit
Angle immobilize and for acute angle.
9. a kind of detection method of laser energy detector, which is characterized in that the laser energy detector is such as right
It is required that laser energy detector described in any one of 1-8, the detection method include:
Start the transmitting unit；
The relative position of the attenuation units Yu the transmitting unit is adjusted, so that swashing after the decaying of attenuation units output
Light is preset value；
Read monitoring unit energy value detected.
10. method as claimed in claim 9, which is characterized in that described to adjust the attenuation units and the transmitting unit
Relative position, comprising:
The transmitting unit is rotated, to change the angle between the central axis of the transmitting unit and the attenuation units.
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| CN201910671104.8A CN110487396B (en) | 2019-07-24 | 2019-07-24 | Laser energy detection device and detection method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111037126A (en) * | 2019-12-24 | 2020-04-21 | 英特尔产品（成都）有限公司 | Device and method for detecting laser quality |
| CN113252317A (en) * | 2021-06-02 | 2021-08-13 | 柯泰光芯(常州)测试技术有限公司 | System and method for testing light effect of extremely-short light pulse |
| CN114879356A (en) * | 2022-04-13 | 2022-08-09 | 同济大学 | Laser continuously adjustable attenuation method and device based on optical film performance |
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| CN109186755A (en) * | 2018-08-20 | 2019-01-11 | 北京国科世纪激光技术有限公司 | A kind of energy of lasers monitoring device |
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| CN102928076A (en) * | 2012-11-26 | 2013-02-13 | 核工业理化工程研究院 | Laser real-time power monitoring device and monitoring method free from influence of polarization degree |
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| CN111037126A (en) * | 2019-12-24 | 2020-04-21 | 英特尔产品（成都）有限公司 | Device and method for detecting laser quality |
| CN113252317A (en) * | 2021-06-02 | 2021-08-13 | 柯泰光芯(常州)测试技术有限公司 | System and method for testing light effect of extremely-short light pulse |
| CN113252317B (en) * | 2021-06-02 | 2021-11-12 | 柯泰光芯(常州)测试技术有限公司 | System and method for testing light effect of extremely-short light pulse |
| CN114879356A (en) * | 2022-04-13 | 2022-08-09 | 同济大学 | Laser continuously adjustable attenuation method and device based on optical film performance |
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