CN110480535A - A kind of asymmetric nano-positioning stage of combination drive - Google Patents
A kind of asymmetric nano-positioning stage of combination drive Download PDFInfo
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- CN110480535A CN110480535A CN201910681447.2A CN201910681447A CN110480535A CN 110480535 A CN110480535 A CN 110480535A CN 201910681447 A CN201910681447 A CN 201910681447A CN 110480535 A CN110480535 A CN 110480535A
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- branch
- compliant
- pair
- universal hinge
- revolute pair
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
Abstract
The invention discloses a kind of asymmetric nano-positioning stage of combination drive, which includes rack, stepper motor, shaft coupling, sliding rail, ball-screw, piezoelectric ceramic actuator, bridge-type displacement amplifier, moving platform and three branches for connecting rolled thread thick stick and moving platform.First branch's macroscopic view drive part, prismatic pair are connect with ball screw, and ball-screw is connect by sliding rail with rack, and universal hinge is connect with moving platform, and prismatic pair is connect with universal hinge by revolute pair；Bridge amplifier is placed between one revolute pair of branch and universal hinge, is driven using piezoelectric ceramic actuator by the microcosmic drive part of the first branch.First branch the first revolute pair of universal hinge is parallel with revolute pair axis, and other two branched layout form is identical as the first branch.The mechanism branched structure is simple, and three branches are identical, and branch's processing is using integration processing, and gapless, precision is high, can meet big stroke and high-precision requirement simultaneously, realizes nanoscale positioning.
Description
Technical field
The present invention is a kind of asymmetric compliant mechanism of combination drive, and macro driving is driven by ball-screw, and micro-move device is by piezoelectricity
Ceramic driving, is related to applied mechanism technical field, more particularly to a kind of with the micro- fixed of the mobile Three Degree Of Freedom of two rotation one
Position mechanism.
Background technique
Mechanics innovation be always machine equipment innovation key and research hotspot, with new and high technology and it is manufacturing quickly
Development, it is micro- in order to adapt to the demand in numerous hard-core technology fields such as aerospace, medical treatment, nuclear energy and IC manufacture, laser manufacture
Location technology is developed.The key technology branch one that micro- location technology is studied as microscopic fields, the direct shadow of development level
Ring the development level for arriving microscopic fields technology.With the continuous miniaturization of research object, requirement of the operating system to positioning accuracy
It is continuously improved.Carry out the research of micro-nano location technology, aerospace, microelectric technique, nanotechnology, accurate machine can be pushed
Tool technology, biomedical skill, laser technology and special processing technology etc. are constantly progressive, therefore micro-nano location technology obtains
It is widely applied.Requirement with the research of microscopic fields to positioning accuracy is continuously improved, while also proposed wanting for big stroke
It asks, the big micro-nano Study of location of stroke, more scientific and technical further hairs will be promoted to develop, while generating huge society
It can benefit and economic benefit.But the requirement of positioning accuracy is also considered while improving micro-nano gauge travel.Cause
It is contradictory for big stroke and high-precision, it is therefore desirable to seek a kind of effective method and solve the problems, such as this.
Summary of the invention
Based on background above, the present invention provides a kind of compliant parallel mechanism of macro/micro- double drive unsymmetric structure, the machines
Structure has big stroke simultaneously, and high-precision feature can be effectively solved the lance between the big stroke of micro-positioning and high-precision
Shield provides patent information and technical support for domestic enterprise and research institution.
To achieve the above object, the technical solution adopted by the present invention is a kind of asymmetric nano-positioning stage of combination drive, should
Asymmetric nano-positioning stage has the mobile three degree of freedom of two rotation one, and macro movement is driven by stepper motor connection roller bearing screw rod
Dynamic, microscopic motion is driven by piezoelectric ceramic actuator, which can be realized nanoscale positioning, simultaneously
Meet the requirement of large stroke and high precision.
The asymmetric nano-positioning stage includes rack (D1), stepper motor (D2), shaft coupling (D3), sliding rail (D4), ball
Lead screw (D5), piezoelectric ceramic actuator (D6), moving platform (D7) and connection rolled thread thick stick (D5) and three points of moving platform (D7)
Branch, three branches are respectively the first branch (L1), the second branch (L2), third branch (L3).
(L1) mechanism, first branch is universal including the first compliant translational joint (P11), the first compliant rotational secondary (R11), flexibility
Cut with scissors the first revolute pair (U11) and flexible the second revolute pair of universal hinge (U12)；
(L2) mechanism, second branch includes that the second prismatic pair (P21), the second compliant rotational are secondary (R21), flexible universal hinge the
One revolute pair (U21) and the second revolute pair of universal hinge (U22)；
Third branch (L3) includes third prismatic pair (P31), third compliant rotational secondary (R31), flexible universal first turn of hinge
Dynamic pair (U31) and flexible the second revolute pair of universal hinge (U32).
The first compliant translational joint (P11) in first branch (L1) is connect with ball-screw (D4), and roller screw (D5) is logical
It crosses sliding rail (D4) to connect with rack (D1), the first compliant rotational pair (R11) is connect with the first compliant translational joint (P11), flexibility ten thousand
It is attached to hinge the first revolute pair (U11) with moving platform (D7), flexible the second revolute pair of universal hinge (U12) and flexible universal hinge
First revolute pair (U11) connection；First compliant rotational pair (R11) is parallel with flexible universal hinge the first revolute pair (U11) axis.
The second compliant translational joint (P21) in second branch (L2) is connect with roller bearing screw rod (D5), and roller screw (D5) is logical
It crosses sliding rail (D4) to connect with rack (D1), the second compliant rotational pair (R21) is connect with the second compliant translational joint (P21), flexibility ten thousand
Be attached to the first compliant rotational of hinge secondary (U21) with moving platform (D7), flexible universal hinge the second compliant rotational pair (U22) with it is soft
Property the first revolute pair of universal hinge (U21) connect, the second compliant rotational pair (R21) and flexible universal hinge the first revolute pair (U21) axis
Line is parallel.
Third compliant translational joint (P31) in third branch (L3) is connect with roller bearing screw rod (D5), and roller screw (D5) is logical
It crosses sliding rail (D4) to connect with rack (D1), third compliant rotational secondary (R31) is connect with the first compliant translational joint (P31), flexibility ten thousand
It is attached to hinge the first turns auxiliary shaft (U31) with moving platform (D7), flexible the second revolute pair of universal hinge (U32) and flexibility are universal
Cut with scissors the first turns auxiliary shaft (U31) connection, third compliant rotational secondary (R31) and flexible universal hinge the first turns auxiliary shaft (U31) axis
In parallel.
Compared with prior art, the invention has the following advantages that
1, the mechanism branched structure is simple, and three branches are identical, and branch's processing is using integration processing, gapless, essence
Degree is high；
2, the compliant mechanism can meet big stroke and high-precision requirement simultaneously, can be realized nanoscale positioning；
3, mechanism tool can meet on moving direction simultaneously and determine there are two an one-movement-freedom-degree kinetic property is rotated
Positioning on position and rotation direction, has a good application prospect；
Detailed description of the invention
Fig. 1 is the overall schematic of the asymmetric nano-positioning stage of combination drive.
In figure: D1, rack D2, stepper motor D3, shaft coupling D4, sliding rail D5, ball screw D6, piezoelectric ceramics drive
Dynamic device D7, moving platform L1, one L2 of branch, two L3 of branch, three P11 of branch, first movement secondary R11, the first revolute pair
U11, the first revolute pair U12 of the universal hinge of branch one, the second revolute pair P21 of the universal hinge of branch one, the second prismatic pair R21,
Second revolute pair U21, the first revolute pair U22 of the universal hinge of branch two, the second revolute pair P31 of the universal hinge of branch two, third
The second rotation of prismatic pair R31, third revolute pair U31, the first revolute pair U32 of the universal hinge of branch three, the universal hinge of branch three
It is secondary.
Specific embodiment
As shown in Figure 1, the mechanism includes rack (D1), stepper motor (D2), shaft coupling (D3), sliding rail (D4), ball wire
Thick stick (D5), piezoelectric ceramic actuator (D6), moving platform (D7) and connection ball-screw (D5) and three points of moving platform (D8)
Branch, three branches include the first branch (L1), the second branch (L2), third branch (L3).
First branch (L1) includes the first compliant translational joint (P11), the first compliant rotational pair (R11), one flexibility ten thousand of branch
To the first revolute pair (U11) of hinge, the second revolute pair (U12) of the flexible universal hinge of branch one；First compliant translational joint (P11) with
Ball-screw (D5) connection, ball-screw (D5) are connect by sliding rail (D4) with rack (D1), and sliding rail (D4) and rack (D1) are even
It connects, the first revolute pair (U12) of the flexible universal hinge of branch one is connect with moving platform, the second revolute pair of the flexible universal hinge of branch one
(U11) connect with the first revolute pair (U12) of branch one flexible universal hinge, one flexibility of the first compliant translational joint (P11) and branch
The first revolute pair (U11) of universal hinge by the first compliant rotational secondary (R11) connection, wherein the first compliant rotational pair (R11) with
The first revolute pair (U11) axis of the flexible universal hinge of branch one is parallel；
Second branch (L2) includes the second compliant translational joint (P21), the second compliant rotational pair (R21), two flexibility ten thousand of branch
To the first revolute pair (U11) of hinge, the second revolute pair (U12) of the flexible universal hinge of branch two；Second compliant translational joint (P21) with
Ball-screw (D5) connection, ball-screw (D5) are connect by sliding rail (D4) with rack (D1), and the of the two universal hinge of flexibility of branch
Two compliant rotationals pair (U22) is connect with moving platform, the second revolute pair (U22) and two flexibility ten thousand of branch of the flexible universal hinge of branch two
It is connected to the first revolute pair (U21) of hinge, the second compliant translational joint (P21) and branch two the first revolute pair of flexible universal hinge
(U21) it is connected by the second compliant rotational secondary (R21), wherein the flexible universal hinge of the second compliant rotational pair (R21) and branch two
First revolute pair (U21) axis is parallel；
Third branch (L3) includes third compliant translational joint (P31), third compliant rotational pair (R31), three flexibility ten thousand of branch
To the first revolute pair (U11) of hinge, the second revolute pair (U12) of the flexible universal hinge of branch three；Third compliant translational joint (P31) with
Ball-screw (D5) connection, ball-screw (D5) are connect by sliding rail (D4) with rack (D1), and the of the three universal hinge of flexibility of branch
Two revolute pairs (U32) are connect with moving platform, the flexible universal hinge of the second revolute pair (U32) and branch three of the flexible universal hinge of branch three
The first revolute pair (U31) connection, flexible the first revolute pair of universal hinge (U31) of third prismatic pair (P31) and branch three passes through the
Three compliant rotationals pair (R31) connects, wherein the first revolute pair of the flexible universal hinge of third compliant rotational secondary (R31) and branch three
(U31) axis is parallel.
The nano-positioning stage is driven by motor the first compliant translational joint (P11) first, the second compliant translational joint (P21), the
Three compliant translational joints (P31), enable platform to reach certain range, lock each branch's prismatic pair.Then it is driven by piezoelectric ceramics
Dynamic device (D6) drives each branch, and error caused by locating platform compensates when to macro driving, finally realizes big row
The high-precision positioning requirements of journey.
Claims (2)
1. a kind of asymmetric nano-positioning stage of combination drive, it is characterised in that: the asymmetric nano-positioning stage has two rotations one
Mobile three degree of freedom, macro movement are driven by stepper motor connection roller bearing screw rod, and microscopic motion is by piezoelectric ceramic actuator
It is driven；
The asymmetric nano-positioning stage includes rack (D1), stepper motor (D2), shaft coupling (D3), sliding rail (D4), ball-screw
(D5), piezoelectric ceramic actuator (D6), moving platform (D7) and three branches for connecting rolled thread thick stick (D5) and moving platform (D7), three
A branch is respectively the first branch (L1), the second branch (L2), third branch (L3)；
(L1) mechanism, first branch includes the first compliant translational joint (P11), the first compliant rotational secondary (R11), flexible universal hinge the
One revolute pair (U11) and flexible the second revolute pair of universal hinge (U12)；
(L2) mechanism, second branch includes the second prismatic pair (P21), the second compliant rotational pair (R21), flexible universal first turn of hinge
Dynamic pair (U21) and the second revolute pair of universal hinge (U22)；
Third branch (L3) includes third prismatic pair (P31), third compliant rotational secondary (R31), the first revolute pair of flexible universal hinge
(U31) and flexible the second revolute pair of universal hinge (U32)；
The first compliant translational joint (P11) in first branch (L1) is connect with ball-screw (D4), and roller screw (D5) passes through cunning
Rail (D4) is connect with rack (D1), and the first compliant rotational pair (R11) is connect with the first compliant translational joint (P11), flexible universal hinge
First revolute pair (U11) is attached with moving platform (D7), flexible the second revolute pair of universal hinge (U12) and flexible universal hinge first
Revolute pair (U11) connection；First compliant rotational pair (R11) is parallel with flexible universal hinge the first revolute pair (U11) axis；
The second compliant translational joint (P21) in second branch (L2) is connect with roller bearing screw rod (D5), and roller screw (D5) passes through cunning
Rail (D4) is connect with rack (D1), and the second compliant rotational pair (R21) is connect with the second compliant translational joint (P21), flexible universal hinge
First compliant rotational pair (U21) is attached with moving platform (D7), the second compliant rotational of flexible universal hinge secondary (U22) and flexibility ten thousand
To hinge the first revolute pair (U21) connection, the second compliant rotational pair (R21) and flexible universal hinge the first revolute pair (U21) axis are flat
Row；
Third compliant translational joint (P31) in third branch (L3) is connect with roller bearing screw rod (D5), and roller screw (D5) passes through cunning
Rail (D4) is connect with rack (D1), and third compliant rotational secondary (R31) is connect with the first compliant translational joint (P31), flexible universal hinge
First turns auxiliary shaft (U31) is attached with moving platform (D7), flexible the second revolute pair of universal hinge (U32) and flexible universal cuts with scissors the
One turns auxiliary shaft (U31) connection, third compliant rotational secondary (R31) are parallel with flexible universal hinge the first turns auxiliary shaft (U31) axis.
2. the asymmetric nano-positioning stage of a kind of combination drive according to claim 1, it is characterised in that: the nano-positioning stage
It is driven by motor first the first compliant translational joint (P11), the second compliant translational joint (P21), third compliant translational joint (P31) makes
Platform can reach certain range, lock each branch's prismatic pair；Then each branch is carried out by piezoelectric ceramic actuator (D6)
Driving, error caused by locating platform compensates when to macro driving, the final positioning requirements for realizing large stroke and high precision.
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| CN201910681447.2A CN110480535A (en) | 2019-07-26 | 2019-07-26 | A kind of asymmetric nano-positioning stage of combination drive |
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| CN201910681447.2A CN110480535A (en) | 2019-07-26 | 2019-07-26 | A kind of asymmetric nano-positioning stage of combination drive |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111232429A (en) * | 2020-01-17 | 2020-06-05 | 哈尔滨工业大学 | Flexible arm protection device of deflection mirror |
| CN111496765A (en) * | 2020-04-28 | 2020-08-07 | 清华大学 | Spatial two-rotation and one-movement three-degree-of-freedom parallel mechanism |
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| CN111496765A (en) * | 2020-04-28 | 2020-08-07 | 清华大学 | Spatial two-rotation and one-movement three-degree-of-freedom parallel mechanism |
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