CN110470633A - Multi-core fiber grating refractive index responsive type sensor with self-complementary compensation characteristics in situ - Google Patents
Multi-core fiber grating refractive index responsive type sensor with self-complementary compensation characteristics in situ Download PDFInfo
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35383—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using multiple sensor devices using multiplexing techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02042—Multicore optical fibres
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
- G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
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Abstract
The present invention provides a kind of multi-core fiber grating refractive index responsive type sensor with self-complementary compensation characteristics in situ, this sensor includes multi-core optical fiber, multi-core optical fiber includes more fibre cores in covering and covering, fibre core is divided into middle fiber core and peripheral fibre core, and the grating of refractive index periodic variation is carved on every fibre core；Covering outside grating is equipped with groove and the evanscent field of optical fiber is exposed；Plated with sensitive film in groove.Since the core model of peripheral fibre core is exposed to environment, so peripheral fibre core is sensitive to ambient refractive index, while also being influenced by temperature and the multiple of strain；And middle fiber core is not exposed in environment, therefore is not influenced by ambient refractive index, is only influenced by temperature and strain；Peripheral fibre core is compensated by middle fiber core to be able to achieve the self compensation in situ of sensor.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, and in particular to a kind of multi-core optical fiber light with self-complementary compensation characteristics in situ
Grid refractive index responsive type sensor.
Background technique
The precise measurement of ambient refractive index all plays a crucial role in many aspects, for example, in chemical analysis it is right
The monitoring of the detection of various reagents concentration and gas concentration detection and extent of steel corrosion based on variations in refractive index.It is wide at present
The general refractometer used is usually used to the refractive index for detecting some mixed solutions, so that it is determined that liquid solubility out.Simultaneously also
There is a variation of some other technical monitoring ambient refractive index, including Planar laser induced fluorescence, invasive heat label
The technology and methods such as method, interference technique, phase-locked loop ultrasonic wave.However all there is one or more or less and lack in above method
Point: low including measuring resolution, at high price, detecting instrument volume disaster operation, examined personnel's subjective factor influence big etc..
Summary of the invention
The technical problem to be solved by the present invention is providing a kind of multi-core fiber grating refraction with self-complementary compensation characteristics in situ
Rate responsive type sensor can be realized the same light path self compensation of effect on environment factor.
The technical solution taken by the invention to solve the above technical problem are as follows: a kind of with the more of self-complementary compensation characteristics in situ
Core fibre grating refractive index responsive type sensor, it is characterised in that: this sensor includes multi-core optical fiber, and multi-core optical fiber includes covering
With more fibre cores in covering, fibre core is divided into middle fiber core and peripheral fibre core, refractive index periodic change is carved on every fibre core
The grating of change；Covering outside grating is equipped with groove and the evanscent field of optical fiber is exposed；Plated with sensitive film in groove.
According to the above scheme, the peripheral fibre core is in radiation or axial symmetry distribution.
According to the above scheme, after the grating passes through the interference light generated after UV light permeability phase mask plate to hydrogen is carried
Multi-core optical fiber is exposed and is written.
According to the above scheme, the groove is obtained by chemical etching method, physical grinding method or laser burn method.
According to the above scheme, length of the groove on core length direction is 10 ~ 40mm.
According to the above scheme, depth of the groove in multi-core optical fiber cross-wise direction be apart from covering outer surface -5 ~
20um。
According to the above scheme, the sensitive membrane with a thickness of 5 ~ 200nm.
According to the above scheme, the sensitive membrane is refractive index sensitizing type film, gas sensitization type film or corrosion responsive type
Film.
A kind of multi-core fiber grating refractive index responsive type sensor-based system with self-complementary compensation characteristics in situ, it is characterised in that:
This sensor-based system includes light source, splitter, beam splitter, demodulating equipment and the sensor；Wherein, the one of the beam splitter
It holds and is welded together with the multi-core optical fiber of sensor, the other end of beam splitter is equipped with more wire jumpers, and wire jumper respectively corresponds multi-core optical
Every fibre core in fibre；The light that light source issues is transmitted by optical fiber, and the biography is successively reached after splitter and beam splitter
Then sensor reflects, the optical signal of different reflection spectrum peaks is obtained by every wire jumper of beam splitter, by the demodulation
Device demodulation；By the demodulation of the optical grating reflection spectral peak position to middle fiber core and peripheral fibre core, realize to environmental disturbances factor
Auto-compensation.
By above system, the demodulating equipment is spectrometer.
The invention has the benefit that since the core model of peripheral fibre core is exposed to environment, so peripheral fibre core rolls over environment
Rate sensitivity is penetrated, while also being influenced by temperature and the multiple of strain；And middle fiber core is not exposed in environment, therefore not by environment
Refractive index influences, and is only influenced by temperature and strain；Peripheral fibre core is compensated by middle fiber core to be able to achieve the original of sensor
Position self compensation.
Detailed description of the invention
Fig. 1 is the system structure diagram of one embodiment of the invention.
Fig. 2 is the sensor structure schematic diagram of one embodiment of the invention.
Fig. 3 is wave spectrogram of the one embodiment of the invention under different refractivity environment.
Fig. 4 is core of the one embodiment of the invention when the measuring refractive index wavelength shift and refractive index average with other core
Between relationship.
In figure: 1. light sources, 2. demodulating equipments, 3. splitters, 4. beam splitters, 5. sensors, 5.1 sensitive membranes, 5.2 peripheries are fine
Core, 5.3 middle fiber cores, 5.4 gratings, 5.5 coverings.
Specific embodiment
Below with reference to specific example and attached drawing, the present invention will be further described.
The present invention provides a kind of multi-core fiber grating refractive index responsive type sensor with self-complementary compensation characteristics in situ, such as schemes
Shown in 2, this sensor 5 includes multi-core optical fiber, and multi-core optical fiber includes more fibre cores in covering 5.5 and covering 5.5, and fibre core is divided into
Middle fiber core 5.3 and peripheral fibre core 5.2 are carved with the grating 5.4 of refractive index periodic variation on every fibre core；Outside grating 5.4
Covering 5.5 be equipped with groove the evanscent field of optical fiber is exposed；Plated with sensitive film 5.1 in groove.
Multi-core optical fiber of the present invention is the special optical fiber that core number is greater than 1, including seven core fibres, five core fibres, three cores
Optical fiber, two heart optical fiber etc..There is middle fiber core 5.3 in centre, around there is peripheral fibre core 5.2, wherein peripheral fibre core 5.2 is in radiation or axis
It is symmetrical.
Sensor production method described in the present embodiment includes the following steps:
Step 1: the multi-core optical fiber after carrying hydrogen being exposed by the interference light generated after UV light permeability phase mask plate, write-in folding
The periodically variable grating 5.4 of rate is penetrated, each fibre core of multi-core optical fiber successfully writes grating 5.4 processed after overexposure.
Step 2: the evanscent field of multi-core optical fiber is exposed by surface micro-fabrication technology, method mainly includes chemistry
Etching method (such as HF acid), physical grinding method and laser burn method.Depth of the obtained groove in multi-core optical fiber cross-wise direction
For apart from -5 ~ 20um of covering outer surface, the sensitivity of sensor is related to depth；Length of the groove on core length direction is
10~40mm。
Step 3: being put into evaporator, make after the multi-core optical fiber in step 2 after micro Process is cleaned with deionized water
Micro Process region (i.e. in groove) plates one layer of sensitive membrane 5.1.In the present embodiment, the sensitive membrane 5.1 with a thickness of 5 ~
200nm, the thickness of sensitive membrane 5.1 and the sensitivity of sensor are related.External environment changes the change that can cause sensitive membrane refractive index
Change, sensitive membrane 5.1 includes refractive index sensitizing type film, such as graphene film；Gas sensitization type film, including Pt metal and Pt are closed
Gold thin film；And corrosion responsive type film, such as Fe-C film.
Finally, by after plated film multi-core fiber grating take out, by manual optical fiber splicer by multi-core fiber grating with
The beam splitter matched is welding together.After multi-core optical fiber and matched beam splitter welding, should by the corresponding channel number of each fibre core, with
Wire jumper connects, convenient for test.
The present invention also provides a kind of multi-core fiber grating refractive index responsive type sensor-based system with self-complementary compensation characteristics in situ,
As shown in Figure 1, this sensor-based system includes light source 1, splitter 3, beam splitter 4, demodulating equipment 2 and the sensor 5；Wherein,
One end of the beam splitter 4 and the multi-core optical fiber of sensor 5 are welded together, and the other end of beam splitter 4 is equipped with more wire jumpers,
Wire jumper respectively corresponds every fibre core in multi-core optical fiber；The light that light source 1 issues is transmitted by optical fiber, successively passes through 3 He of splitter
The sensor 5 is reached after beam splitter 4, then reflects, different reflection spectral peaks are obtained by every wire jumper of beam splitter 4
The optical signal of value is demodulated by the demodulating equipment 2；Pass through the solution of the optical grating reflection spectral peak position to middle fiber core and peripheral fibre core
It adjusts, realizes the auto-compensation to environmental disturbances factor.In the present embodiment, the demodulating equipment is spectrometer.
Wherein each fibre core of sensor 5 is 1 channel, therefore can generate multiple reflectance spectrums.Due to peripheral fibre core
5.2 core model is exposed to environment, so peripheral fibre core 5.2 is sensitive to ambient refractive index, of course simultaneously also by temperature and strain
Multiple influence.And middle fiber core 5.3 is not exposed in environment, therefore is not influenced by ambient refractive index, only by temperature and strain
Influence, peripheral fibre core 5.2 is compensated to be able to achieve the self compensation of sensor original position by middle fiber core 5.3.
Multiple periphery fibre cores 5.2 and 5.3 design feature of middle fiber core possessed by the present invention make it possess original position certainly
The multiple advantages such as compensatory, stability, repeatability, micromation, low cost, high feasibility and easy preparation.
Embodiment one:
The present embodiment provides a kind of multi-core fiber grating refractive index responsive type hydrogen gas sensors with self-complementary compensation characteristics in situ, originally
The sensitive membrane of embodiment is Pt metal film, and the refractive index of Pt metal film is effected by environmental factors.The present embodiment uses
Multi-core optical fiber be seven core fibres, micro Process processing mode be with 20% HF acid corrosion.
The specific operation method is as follows for the present embodiment,
Seven core fibres after overloading hydrogen for taking one section of long 50cm, peel the coat of 2 cm of interlude off with light line tweezer, use fixture
Seven core fibres are fixed on laser front end, seven core fibres after removing coat are exposed using phase mask plate method, write cloth processed
Glug grating.Wherein seven core fibre diameters, 150 um, 4.1 um of core diameter, 41.5 um of core spacing.300 Hz of laser frequency, energy
20 mJ are measured, the time for exposure is 5 s.
Seven core fibres after having made Bragg grating, the HF corrosion of 20 % will be write and remove coating 30 min of layer region, after corrosion
Area fiber diameter 100um.
After seven core fibres after corrosion are cleaned and dried with deionized water, it is placed in magnetic control sputtering vacuum coating machine, sputtering one
Layer Pt film, 50 W of power, 10 nm of thickness, as hydrogen sensitive film.
Seven core fibres after taking out plating Pt film, seven core fibres, wherein one end passes through bonding machine and seven core fibre beam splitters
Carry out welding.The other end of beam splitter is divided into seven channels with wire jumper, respectively corresponds seven fibre cores of seven core fibres.
In the optical fiber hydrogen sensor-based system provided in this embodiment realized using the sensor, light source is 1550 nm's
SLED light source, demodulating equipment are spectrometer, and splitter is three-dB coupler, and beam splitter is seven channel beam splitters.Therefore 7 can be generated
A reflection peak, respectively the reflection spectrum peak 1 of middle fiber core grating, reflection spectrum peak 2, the peak value 3, peak value of peripheral fibre core grating
4, peak value 5, peak value 6, peak value 7.Wherein peak value 1 is unrelated with hydrogen sensitive film refractive index does not include density of hydrogen information, as ginseng
It examines peak and comes compensatory light and external environment variation bring peak position variation influence；Peak value 2, peak value 3, peak value 4, peak value 5, peak value 6,
Peak value 7 is not only related with light source and external environment variation, also changes with hydrogen sensitive film refractive index constant amplitude, thus as sensing peak
Film refractive index variation bring is caused to influence to detect extraneous hydrogen.By to intermediate core and peripheral core optical grating reflection spectral peak position
Demodulation, to realize to the auto-compensation of environmental disturbances factor.
Fig. 3 is wave spectrogram of the present embodiment sensor under different refractivity environment.It is seen that with refractive index
Increase, occur wave spectrum drift the phenomenon that, to embody the sensitivity of this sensor refractive index in data.
Fig. 4 is the pass between core and other core of the sensor when measuring refractive index average wavelength shift and refractive index
System, it can be seen from the figure that the wavelength shift of other core increases with the increase of refractive index in quadratic function form, and core
Wavelength shift hardly follows variations in refractive index and changes and close to zero.The core pair hereby based on other core refractive index sensitivity
Refractive index is insensitive, and the two is all sensitive to temperature linearity, it can be achieved that the self compensation in situ sensed.
Embodiment two:
Sensitive membrane in embodiment one is changed to graphene film and is covered on region of seven core fibres after HF acid corrosion, then it can shape
At a kind of sensitizing type multi-core fiber grating index sensor with self-complementary compensation characteristics in situ.Its principle is to cover graphene
In region of seven core fibres after HF acid corrosion, graphene can be derived the optical signal transmitted in optical fiber, to increase
Optical field distribution around big optical fiber, finally improves the sensitivity of sensor.
Embodiment three:
Surface micro-fabrication mode in embodiment one is changed to process annular groove with femtosecond laser by 20% HF corrosion, then same shape
At a kind of multi-core fiber grating refractive index responsive type hydrogen gas sensor with self-complementary compensation characteristics in situ.The original of femtosecond laser processing
Reason is similarly exposed optical fiber periphery fibre core surface Shu and dies field.The shape and area of the groove of processing and the sensitivity of sensor have
It closes.
Above embodiments are merely to illustrate design philosophy and feature of the invention, and its object is to make technology in the art
Personnel can understand the content of the present invention and implement it accordingly, and protection scope of the present invention is not limited to the above embodiments.So it is all according to
It is within the scope of the present invention according to equivalent variations made by disclosed principle, mentality of designing or modification.
Claims (10)
1. a kind of multi-core fiber grating refractive index responsive type sensor with self-complementary compensation characteristics in situ, it is characterised in that: this biography
Sensor includes multi-core optical fiber, and multi-core optical fiber includes more fibre cores in covering and covering, and fibre core is divided into middle fiber core and periphery is fine
Core is carved with the grating of refractive index periodic variation on every fibre core；Covering outside grating is equipped with groove and makes suddenly dying for optical fiber
Field is exposed；Plated with sensitive film in groove.
2. sensor according to claim 1, it is characterised in that: the peripheral fibre core is in radiation or axial symmetry distribution.
3. sensor according to claim 1, it is characterised in that: the grating passes through UV light permeability phase mask plate
The interference light generated afterwards exposes the multi-core optical fiber after carrying hydrogen and is written.
4. sensor according to claim 1, it is characterised in that: the groove passes through chemical etching method, physical grinding
Method or laser burn method obtain.
5. sensor according to claim 1 or 4, it is characterised in that: length of the groove on core length direction
Degree is 10 ~ 40mm.
6. sensor according to claim 1 or 4, it is characterised in that: the groove is in multi-core optical fiber cross-wise direction
Depth be apart from -5 ~ 20um of covering outer surface.
7. sensor according to claim 1, it is characterised in that: the sensitive membrane with a thickness of 5 ~ 200nm.
8. sensor according to claim 1, it is characterised in that: the sensitive membrane is refractive index sensitizing type film, gas
Body responsive type film or corrosion responsive type film.
9. a kind of multi-core fiber grating refractive index responsive type sensor-based system with self-complementary compensation characteristics in situ, it is characterised in that: this
Sensor-based system includes sensor described in any one of light source, splitter, beam splitter, demodulating equipment and claim 1 to 8；
Wherein, one end of the beam splitter and the multi-core optical fiber of sensor are welded together, and the other end of beam splitter is equipped with more jumps
Line, wire jumper respectively correspond every fibre core in multi-core optical fiber；Light source issue light by optical fiber transmit, successively by splitter with
The sensor is reached after beam splitter, then reflects, different reflection spectrum peaks are obtained by every wire jumper of beam splitter
Optical signal, demodulated by the demodulating equipment；By the demodulation of the optical grating reflection spectral peak position to middle fiber core and peripheral fibre core,
Realize the auto-compensation to environmental disturbances factor.
10. sensor-based system according to claim 9, it is characterised in that: the demodulating equipment is spectrometer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910770577.3A CN110470633B (en) | 2019-08-20 | 2019-08-20 | Multi-core fiber grating refractive index sensitive sensor with in-situ self-compensation characteristic |
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| CN201910770577.3A CN110470633B (en) | 2019-08-20 | 2019-08-20 | Multi-core fiber grating refractive index sensitive sensor with in-situ self-compensation characteristic |
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| CN110470633A true CN110470633A (en) | 2019-11-19 |
| CN110470633B CN110470633B (en) | 2022-07-19 |
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| CN201910770577.3A Active CN110470633B (en) | 2019-08-20 | 2019-08-20 | Multi-core fiber grating refractive index sensitive sensor with in-situ self-compensation characteristic |
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