CN110460246A - A kind of radio-frequency power supply - Google Patents
A kind of radio-frequency power supply Download PDFInfo
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- CN110460246A CN110460246A CN201910844168.3A CN201910844168A CN110460246A CN 110460246 A CN110460246 A CN 110460246A CN 201910844168 A CN201910844168 A CN 201910844168A CN 110460246 A CN110460246 A CN 110460246A
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- 238000005070 sampling Methods 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims description 25
- 230000009977 dual effect Effects 0.000 claims description 24
- 238000005057 refrigeration Methods 0.000 claims description 24
- 238000001914 filtration Methods 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/12—Arrangements for reducing harmonics from ac input or output
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33507—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
- H02M3/33515—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters with digital control
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0003—Details of control, feedback or regulation circuits
- H02M1/0009—Devices or circuits for detecting current in a converter
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0003—Details of control, feedback or regulation circuits
- H02M1/0012—Control circuits using digital or numerical techniques
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0048—Circuits or arrangements for reducing losses
- H02M1/0054—Transistor switching losses
- H02M1/0058—Transistor switching losses by employing soft switching techniques, i.e. commutation of transistors when applied voltage is zero or when current flow is zero
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inverter Devices (AREA)
Abstract
The invention discloses a kind of radio-frequency power supplies, in the radio-frequency power supply, when the radio frequency alternating current to power adjustment and impedance matching module output is acquired, fully take into account influence of the environment temperature to sampling, to be provided with constant temperature sample circuit, environment temperature locating for it is maintained in preset temperature range by constant temperature sample circuit, and acquire radio frequency alternating current, so as to the subsequent radio frequency alternating current according to radio frequency alternating current adjustment output to load, to minimize or even avoid influence of the environment temperature to radio frequency alternating current, improve the acquisition precision of radio frequency alternating current, also improve the precision of the out-put supply of radio-frequency power supply, reduce the adjustment time of the out-put supply of radio-frequency power supply.
Description
Technical field
The present invention relates to radio-frequency power supply technical fields, more particularly to a kind of radio-frequency power supply.
Background technique
Radio-frequency power supply is generally used for the application fields such as plasma cleaning and general industry plated film.In view of radio-frequency power supply
Load is free plasma, and power demand also changes at any time, in order to meet the power demand of load, to radio frequency
During the out-put supply adjustment of power supply, it is related to the acquisition to the output voltage and radio-frequency current of radio-frequency power supply, existing skill
In art to radio-frequency power supply output voltage and radio-frequency current be acquired when, some devices such as amplifier etc. in sample circuit
When environment temperature locating for sample circuit changes, quiescent point can also change, so that amplifier is defeated
Outlet voltage deviation original value and float up and down, cause the distortion of sampled signal, reduce the essence of the out-put supply of radio-frequency power supply
Degree, extends the adjustment time of the out-put supply of radio-frequency power supply.
Summary of the invention
The object of the present invention is to provide a kind of radio-frequency power supplies, improve the acquisition precision of radio frequency alternating current, also improve and penetrate
The precision of the out-put supply of frequency power reduces the adjustment time of the out-put supply of radio-frequency power supply.
In order to solve the above technical problems, the present invention provides a kind of radio-frequency power supplies, comprising:
For converting alternating current to the rectification module of radio frequency direct current；
Respectively with the rectification module and load connection, for the control according to first processor to the radio frequency direct current
Inversion, power adjustment and impedance matching are carried out, radio frequency alternating current is obtained and is exported to the power adjustment of load and impedance matching mould
Block；
It is connect with the output end of the power adjustment and impedance matching module, for itself local environment temperature to be maintained at
Preset temperature range is interior and acquires the constant temperature sample circuit of the radio frequency alternating current；
First processing being connect respectively with the power adjustment and impedance matching module and the constant temperature sample circuit
Device is used for power adjustment and impedance matching module according to the radio-frequency alternating current electric control.
Preferably, the constant temperature sample circuit includes:
For acquiring the voltage sample module of radio frequency alternating voltage；
For acquiring the current sampling module of radio frequency alternating current；
For acquiring the temperature sensor of itself local environment temperature；
Heating module and refrigeration module；
Respectively with the voltage sample module, the current sample mould, the temperature sensor, the heating module and institute
The second processor for stating refrigeration module connection, for by controlling the heating module and the refrigeration module for the environment temperature
Degree is maintained in preset temperature range and exports the radio frequency alternating voltage and the radio frequency alternating current.
Preferably, the heating module includes:
The first switch that control terminal is connect with the second processor；
Heating device and the first power supply, the heating device, the first power supply and the first switch constitute series loop.
Preferably, the refrigeration module includes:
The second switch that control terminal is connect with the second processor；
Refrigeration device and second source, the refrigeration device, the second source and second switch composition are connected back
Road.
Preferably, the voltage sample module includes:
For acquiring the voltage sensor of radio frequency alternating voltage；
The low-pass filter connecting with the voltage sensor is more than for filtering out the frequency in the radio frequency alternating voltage
The high fdrequency component of 1/2 sample frequency；
The attenuator being connect with the low-pass filter, for filtered radio frequency alternating current to be decayed to single-turn Dual module
Input signal process range in；
The single-turn Dual module being connect with the attenuator, for the radio-frequency alternating current signal after decaying by single-ended signal
Be converted to difference mode signal；
The ADC connecting respectively with the single-turn Dual module and the second processor is used for the difference mode signal by mould
Analog quantity is converted to digital quantity.
Preferably, the current sampling module includes:
For acquiring the current sensor of radio frequency alternating current；
The low-pass filter connecting with the current sensor is more than for filtering out the frequency in the radio frequency alternating current
The high fdrequency component of 1/2 sample frequency；
The attenuator being connect with the low-pass filter, for filtered radio frequency alternating current to be decayed to single-turn Dual module
Input signal process range in；
The single-turn Dual module being connect with the attenuator, for the radio-frequency alternating current signal after decaying by single-ended signal
Be converted to difference mode signal；
The ADC connecting respectively with the single-turn Dual module and the second processor is used for the difference mode signal by mould
Analog quantity is converted to digital quantity.
Preferably, the rectification module is PFC rectification module.
Preferably, the power adjustment and impedance matching module include DC/DC soft switch full bridge circuit, HFRF power
Circuit, high frequency drive circuit and the accessory power supply being connect with the first processor；
The DC/DC soft switch full bridge circuit is connect with the rectification module, for dropping to the radio frequency direct current
Pressure；
The HFRF power circuit includes:
First inductance, the first end of first inductance are connect with the output plus terminal of the DC/DC soft switch full bridge circuit；
The first end of third switch, third switch is connect with the second end of first inductance, second end with it is described
The output negative terminal of DC/DC soft switch full bridge circuit connects；
With the Z converter that connect of first end of third switch, for will be by the radio frequency after inversion and power adjustment
The impedance of alternating current is converted to 12.5 Ω by 2 Ω；
The Lumped-Wilkinson converter being connect with the Z converter, for by the impedance of the radio frequency alternating current
50 Ω are converted to by 12.5 Ω；
The high frequency drive circuit includes:
The first end of second inductance, second inductance is connect with the output plus terminal of the accessory power supply；
4th switch, it is described 4th switch first end connect with the second end of second inductance, second end with it is described
The output negative terminal of accessory power supply connects, and control terminal is connect with the first processor；
Input terminal is connect with the first end of the 4th switch, the LC that output end is connect with the control terminal that the third switchs
Resonance circuit is switched for being converted to high-frequency driving signal and exporting to the third output voltage of the accessory power supply；
The first processor is used to switch by the control DC/DC soft switch full bridge circuit, described first, is described
Accessory power supply carries out power adjustment, and the radio frequency alternating current with the radio frequency alternating current of the first end output switched to the third
Frequency it is equal with the frequency of the high-frequency driving signal, impedance be 2 Ω.
Preferably, the radio-frequency power supply further include:
The filter circuit connecting with the power adjustment and impedance matching module is high for carrying out to the radio frequency alternating current
Subharmonic filters out processing.
The present invention provides a kind of radio-frequency power supply, in the radio-frequency power supply, to power adjustment and impedance matching module output
Radio frequency alternating current when being acquired, fully take into account influence of the environment temperature to sampling, to be provided with constant temperature sample circuit,
Environment temperature locating for it is maintained in preset temperature range by constant temperature sample circuit, and acquires radio frequency alternating current, so as to subsequent
According to the radio frequency alternating current of radio frequency alternating current adjustment output to load, to minimize or even avoid environment temperature to penetrating
The influence of frequency alternating current improves the acquisition precision of radio frequency alternating current, also improves the precision of the out-put supply of radio-frequency power supply, subtracts
The adjustment time of the out-put supply of radio-frequency power supply is lacked.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to institute in the prior art and embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is a kind of structural schematic diagram of radio-frequency power supply provided by the invention；
Fig. 2 is a kind of structural schematic diagram of constant temperature sample circuit provided by the invention；
Fig. 3 is the structural schematic diagram of a kind of power adjustment and impedance matching module provided by the invention.
Specific embodiment
Core of the invention is to provide a kind of radio-frequency power supply, improves the acquisition precision of radio frequency alternating current, also improves and penetrate
The precision of the out-put supply of frequency power reduces the adjustment time of the out-put supply of radio-frequency power supply.
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
Fig. 1 is please referred to, Fig. 1 is a kind of structural schematic diagram of radio-frequency power supply provided by the invention, which includes:
For converting alternating current to the rectification module 1 of radio frequency direct current；
In view of the power demand of the load of radio-frequency power supply may be to change at any time, it is therefore desirable to the master of radio-frequency power supply
The alternating current of power supply output carries out power adjustment, and the alternating current that rectification module 1 exports is converted to radio frequency direct current first.
As a kind of preferred embodiment, rectification module 1 is PFC (Power Factor Correction, power factor
Correction) rectification module 1.
In view of usually selecting EMI (Electro Magnetic Compatibility, electromagnetic compatibility in the prior art
Property) rectification circuit rectifies alternating current, but the loss of EMI rectification circuit is high, reduce overall efficiency.The present embodiment is selected
PFC rectification module 1 rectifies alternating current, can correct power factor, increase power factor, usually up to 98% with
On, the loss of switching process is reduced, and DC voltage ripple is small after rectification output.Certainly, rectification module 1 here can be with
For other kinds of rectification module 1, the application does not limit particularly herein.
Radio frequency direct current is carried out with rectification module 1 and load connection, for the control according to first processor 4 respectively inverse
Change, power adjustment and impedance matching obtain radio frequency alternating current and export to the power adjustment and impedance matching module 2 of load；
Power adjustment and impedance matching module 2, can be according to the controls pair of first processor 4 after receiving radio frequency direct current
Radio frequency direct current carries out inversion processing, and radio frequency direct current is converted to radio frequency alternating current；Can also function be carried out to radio frequency alternating current
Rate adjusts (power of radio frequency alternating current adjusted is usually more much larger than the power of radio frequency direct current), to meet the dynamic of load
Power demand；Can also impedance matching be carried out to radio frequency alternating current, so that the impedance of radio frequency alternating current meets the impedance of radio-frequency power supply
It is required that.
It is connect with the output end of power adjustment and impedance matching module 2, for itself local environment temperature to be maintained at pre-
If temperature range is interior and acquires the constant temperature sample circuit 3 of radio frequency alternating current；
To realize control to power adjustment and impedance matching module 2, need to the radio frequency alternating current of output to load into
Row acquisition, the acquisition precision of sample circuit in the prior art is easy to be affected by the ambient temperature, to cause sampled signal
Distortion.
In the application, sample circuit is constant temperature sample circuit 3, itself local environment temperature can be maintained at preset temperature
The acquisition of radio frequency alternating current is carried out again after in range, to ensure that the acquisition precision of radio frequency alternating current.Specifically, in environment temperature
When degree increases, constant temperature sample circuit 3 can cool down to environment temperature, and environment temperature is adjusted to preset temperature range,
When environment temperature reduces, constant temperature sample circuit 3 can heat up to environment temperature, and environment temperature is adjusted to preset temperature
In range.
The application does not limit preset temperature range here particularly, can be by constant temperature sample circuit 3
The suitable temperature range of Sampling device be determined, the application do not limit particularly herein.
The first processor 4 connecting respectively with power adjustment and impedance matching module 2 and constant temperature sample circuit 3 is used for root
According to radio-frequency alternating current electric control power adjustment and impedance matching module 2.
Specifically, the application is it is considered that when the demand power of load changes, the radio-frequency alternating current of the input terminal of load
Electricity can also change, and be based on this, first processor 4, can be according to acquisition after receiving the radio frequency alternating current of acquisition
Radio frequency alternating current goes to control power adjustment and impedance matching module 2, full to adjust the radio frequency alternating current of output to load
The power demand loaded enough.
In addition, first processor 4 here can with but be not only limited to DSP (Digital Signal Processing, letter
Number digitized processing) processor, compared with CPU, the current handling capacity of dsp processor is stronger, and speed is faster, it can be ensured that penetrates
Frequency power has the up to closed loop of 10KHz quickly to adjust.
To sum up, radio-frequency power supply provided by the invention, in the radio frequency alternating current to power adjustment and the output of impedance matching module 2
When being acquired, influence of the environment temperature to sampling is fully taken into account, so that it is provided with constant temperature sample circuit 3, constant temperature sampling electricity
Environment temperature locating for it is maintained in preset temperature range by road 3, and acquires radio frequency alternating current, so as to subsequent according to the radio frequency
Alternating current adjustment output is to the radio frequency alternating current loaded, to minimize or even avoid environment temperature to radio frequency alternating current
It influences, improves the acquisition precision of radio frequency alternating current, also improve the precision of the out-put supply of radio-frequency power supply, reduce radio frequency electrical
The adjustment time of the out-put supply in source.
On the basis of the above embodiments:
As a kind of preferred embodiment, constant temperature sample circuit 3 includes:
For acquiring the voltage sample module 31 of radio frequency alternating voltage；
For acquiring the current sampling module 32 of radio frequency alternating current；
For acquiring the temperature sensor 33 of itself local environment temperature；
Heating module 34 and refrigeration module 35；
Connect respectively with voltage sample module 31, current sample mould, temperature sensor 33, heating module 34 and refrigeration module 35
The second processor 36 connect, for environment temperature to be maintained at preset temperature model by control heating module 34 and refrigeration module 35
In enclosing and export radio frequency alternating voltage and radio frequency alternating current.
Specifically, referring to figure 2., Fig. 2 is a kind of structural schematic diagram of constant temperature sample circuit provided by the invention.
Constant temperature sample circuit 3 includes voltage sample module 31, current sampling module 32, temperature sensor 33, heating module
34, refrigeration module 35 and second processor 36, voltage sample module 31 is for acquiring radio frequency alternating voltage, current sampling module 32
For acquiring radio frequency alternating current, temperature sensor 33 is used to acquire environment temperature locating for second processor 36 itself, and second
Whether processor 36 judges environment temperature in preset temperature range after the environment temperature for receiving the acquisition of temperature sensor 33
It is interior, if environment temperature is less than the lower threshold of preset temperature range, illustrate that environment temperature is lower at this time, second processor 36
Control heating module 34 is heated, and temperature is promoted in preset temperature range, if environment temperature is greater than preset temperature
The upper limit threshold of range then illustrates that environment temperature is higher at this time, and second processor 36 controls refrigeration module 35 and freezes, will
Temperature is reduced in preset temperature range, and environment temperature can be maintained in preset temperature range by this kind of mode, thus
Reduce influence of the environment temperature to voltage sample module 31 and current sampling module 32, improves the acquisition essence of radio frequency alternating current
Degree, also improves the precision of the out-put supply of radio-frequency power supply, reduces the adjustment time of the out-put supply of radio-frequency power supply.By ring
When border temperature is maintained in preset temperature range, second processor 36 exports radio frequency alternating voltage and radio frequency alternating current flow to first
Processor 4.
Here temperature sensor 33 can be thermocouple sensor or thermal resistance sensor or be other kinds of
Temperature sensor 33, the application do not limit particularly herein.In addition, second processor 36 here can with but be not only limited to
FPGA (Field Programmable Gate Array, field programmable gate array), FPGA have processing speed fast,
Programmable advantage.
As a kind of preferred embodiment, heating module 34 includes:
The first switch that control terminal is connect with second processor 36；
Heating device and the first power supply, heating device, the first power supply and first switch constitute series loop.
When second processor 36 determines that environment temperature is less than the lower threshold of preset temperature range, then illustrate environment at this time
Temperature is lower, and second processor 36 controls heating module 34 and heated, and specifically, second processor 36 controls first switch and closes
It closes, heating device obtains electric at this time, generates heat, and then improve environment temperature locating for constant temperature sample circuit 3.Determining environment temperature
When degree is increased to preset temperature range, control first switch is disconnected, and stops heating.Here heating device can with but be not only limited to
Resistance wire, first switch can with but be not only limited to metal-oxide-semiconductor.Heating module 34 provided in this embodiment is being realized to environment temperature liter
On the basis of temperature, structure is simple and at low cost.
As a kind of preferred embodiment, refrigeration module 35 includes:
The second switch that control terminal is connect with second processor 36；
Refrigeration device and second source, refrigeration device, second source and second switch constitute series loop.
When second processor 36 determines that environment temperature is higher than the upper limit threshold of preset temperature range, then illustrate environment at this time
Temperature is higher, and second processor 36 controls refrigeration module 35 and freezes, and specifically, second processor 36 controls second switch and closes
It closes, refrigeration device obtains electric at this time, freezes, and then reduce environment temperature locating for constant temperature sample circuit 3.Determining environment temperature
When degree is reduced to preset temperature range, control second switch is disconnected, and stops refrigeration.Here refrigeration device can with but be not only limited to
Fan, second switch can with but be not only limited to metal-oxide-semiconductor.Refrigeration module 35 provided in this embodiment is being realized to environment temperature cooling
On the basis of, structure is simple and at low cost.
As a kind of preferred embodiment, voltage sample module 31 includes:
For acquiring the voltage sensor of radio frequency alternating voltage；
The low-pass filter connecting with voltage sensor is more than 1/2 sampling for filtering out the frequency in radio frequency alternating voltage
The high fdrequency component of frequency；
The attenuator being connect with low-pass filter, for filtered radio frequency alternating current to be decayed to the defeated of single-turn Dual module
Enter within the scope of signal processing；
The single-turn Dual module being connect with attenuator, for the radio-frequency alternating current signal after decaying to be converted to difference by single-ended signal
Mould signal；
The ADC being connect respectively with single-turn Dual module and second processor 36, for being converted to difference mode signal by analog quantity
Digital quantity.
In order to further increase the collected signal accuracy of voltage sample module 31, in the application, voltage sample module 31
Including voltage sensor, low-pass filter, attenuator, single-turn Dual module and ADC, specifically, voltage sensor is used to acquire to penetrate
Frequency alternating voltage, low-pass filter is for by the high-frequency signal in radio frequency alternating voltage, (specially frequency is more than 1/2 sample frequency
High fdrequency component) filter out, attenuator is used to decaying to filtered radio frequency alternating voltage into the input signal of single-turn Dual module
In process range, the radio frequency alternating voltage after decaying is converted to difference mode signal by single-ended signal by single-turn Dual module, so that ADC will
Radio frequency alternating voltage is converted to digital quantity by analog quantity.As it can be seen that the application carries out low pass filtered to collected radio frequency alternating voltage
Wave, and by the way of digital collection, the acquisition precision of radio frequency alternating voltage is further improved, radio-frequency power supply is also improved
The precision of out-put supply.
As a kind of preferred embodiment, current sampling module 32 includes:
For acquiring the current sensor of radio frequency alternating current；
The low-pass filter connecting with current sensor is more than 1/2 sampling for filtering out the frequency in radio frequency alternating current
The high fdrequency component of frequency；
The attenuator being connect with low-pass filter, for filtered radio frequency alternating current to be decayed to the defeated of single-turn Dual module
Enter within the scope of signal processing；
The single-turn Dual module being connect with attenuator, for the radio-frequency alternating current signal after decaying to be converted to difference by single-ended signal
Mould signal；
The ADC being connect respectively with single-turn Dual module and second processor 36, for being converted to difference mode signal by analog quantity
Digital quantity.
In order to further increase the collected signal accuracy of voltage sample module 31, in the application, voltage sample module
31 include current sensor, low-pass filter, attenuator, single-turn Dual module and ADC, and specifically, current sensor is used to acquire
Radio frequency alternating current, low-pass filter is for by the high-frequency signal in radio frequency alternating current, (specially frequency is more than 1/2 sampling frequency
The high fdrequency component of rate) it filters out, the input that attenuator is used to decay to filtered radio frequency alternating current single-turn Dual module is believed
In number process range, the radio frequency alternating current after decaying is converted to difference mode signal by single-ended signal by single-turn Dual module, so as to ADC
Radio frequency alternating current is converted into digital quantity by analog quantity.As it can be seen that the application carries out low pass to collected radio frequency alternating current
Filtering, and by the way of digital collection, the acquisition precision of radio frequency alternating current is further improved, radio-frequency power supply is also improved
Out-put supply precision.
As a kind of preferred embodiment, power adjustment and impedance matching module 2 include DC/DC soft switch full bridge circuit,
HFRF power circuit 22, high frequency drive circuit 23 and the accessory power supply 24 being connect with first processor 4；
DC/DC soft switch full bridge circuit is connect with rectification module 1, for being depressured to radio frequency direct current；
HFRF power circuit 22 includes:
First inductance L1, the first end of the first inductance L1 are connect with the output plus terminal of DC/DC soft switch full bridge circuit；
Third switch K3, the first end of third switch K3 are connect with the second end of the first inductance L1, and second end is soft with DC/DC
The output negative terminal of switch full bridge circuit connects；
The Z converter 221 being connect with the first end of third switch K3, for will be by the radio frequency after inversion and power adjustment
The impedance of alternating current is converted to 12.5 Ω by 2 Ω；
The Lumped-Wilkinson converter 222 being connect with Z converter 221, for by the impedance of radio frequency alternating current by
12.5 Ω are converted to 50 Ω；
High frequency drive circuit 23 includes:
Second inductance L2, the first end of the second inductance L2 are connect with the output plus terminal of accessory power supply 24；
4th switch K4, the first end of the 4th switch K4 are connect with the second end of the second inductance L2, second end and auxiliary electricity
The output negative terminal in source 24 connects, and control terminal is connect with first processor 4；
Input terminal is connect with the first end of the 4th switch K4, the LC resonance that output end is connect with the control terminal of third switch K3
Circuit, for the output voltage of accessory power supply 24 to be converted to high-frequency driving signal and is exported to third switch K3；
First processor 4 is used for through control DC/DC soft switch full bridge circuit, the first switch, accessory power supply 24 with right
The radio frequency alternating current of the first end output of third switch K3 carries out power adjustment, and the frequency of radio frequency alternating current and high-frequency drive are believed
Number frequency it is equal, impedance be 2 Ω.
Referring to figure 3., Fig. 3 is the structural schematic diagram of a kind of power adjustment and impedance matching module provided by the invention.
The workspace of the power adjustment and 2 kinds of impedance matching module, third switch K3 and the 4th switch K4 include amplification region,
Saturation region and cut-off region.
Specifically, accessory power supply 24 is the adjustable DC linear power supply of a 0-24V, bandwidth be 20kHz (fast reaction,
It is fast to adjust), first processor 4 by adjust the amplitude (i.e. the size of the input amplitude of high frequency drive circuit 23) of accessory power supply 24 with
And the 4th switch K4 turn-on and turn-off so that it is that 0-18V changes adjustable, frequency that high frequency drive circuit 23, which generates peak-to-peak value,
It is fixed as the sinusoidal signal of 13.56MHz, but in view of the power of the sinusoidal signal is smaller, load can not be driven, therefore, is needed
HFRF power circuit 22 is wanted to carry out power amplification.In addition, the driving signal of the 4th switch K4 is a fixed frequency, it is fixed
The driving signal of duty ratio, specifically, the driving signal are normal switching frequency k hertz of grades, the side that duty ratio is 50%
Wave.
After obtaining sinusoidal signal, driving signal of the sinusoidal signal as third switch K3 is realized to DC/DC Sofe Switch
The power amplification of the output voltage of full-bridge circuit.Specifically, the output voltage of DC/DC soft switch full bridge circuit is as high frequency power
The input voltage of radio circuit, first processor 4 realize HFRF power by the control to DC/DC soft switch full bridge circuit
The input of circuit 22 changes (slow reaction, slow to adjust) between 2-50V.Sinusoidal signal when controlling third switch K3,
The third switch K3 most of the time works in amplification region, although being worked once in a while in saturation region, does not also have to the output of radio-frequency power supply
It influences, because what it wanted herein is fast reaction and power.So there are some waves after saturation in the workspace of third switch K3
Shape distortion does not influence, as long as power reaches demand and impedance reaches demand.
By sinusoidal signal to the control of third switch K3 so that the radio frequency direct current that DC/DC soft switch full bridge circuit exports
Being converted to 13.56MHz, powerful radio frequency alternating current and its impedance is 2 Ω (by the voltage and current for adjusting radio frequency alternating current
Realize), the impedance of radio frequency alternating current is then converted to by 2 Ω by 12.5 Ω by Z converter 221, then pass through Lumped-
12.5 Europe are converted to 50 Europe by Wilkinson converter 222, radio-frequency power needed for finally obtaining load.
To sum up, power adjustment and impedance matching module 2 provided by the present application, which realizes, is precisely controlled radio frequency direct current,
It ensure that the dynamic power demand and impedance requirements of load.
In addition, the application uses DC/DC soft switch full bridge circuit, with the DC/DC hard switching generallyd use in the prior art
Full-bridge circuit is compared, and be can be realized no-voltage turn-on and turn-off when being depressured to radio frequency direct current, is reduced switching loss.
As a kind of preferred embodiment, radio-frequency power supply further include:
The filter circuit being connect with power adjustment and impedance matching module 2, for carrying out higher hamonic wave to radio frequency alternating current
Filter out processing.
The application is also provided with filter circuit after power adjustment and impedance matching module 2, is used to radio frequency alternating current
In higher hamonic wave filter out, and then further improve output to load radio frequency alternating current it is pure, improve the control of load
Precision processed.
It further include the external controlled interface circuit being connect with first processor 4, the outer null interface as a kind of preferred embodiment
Circuit can satisfy DeviceNET, Ethernet, Profibus, RS485, RS232, the connection of the equipment such as Analog.
The deposit of data, buffer logic can be arranged in the external controlled interface circuit；It is able to carry out the conversion of information format, such as
Serial and concurrent conversion；It can coordinate both first processor 4 and peripheral hardware in the type of information and the difference of level；Also have
Address decoding and equipment selection function.
It should be noted that in the present specification, relational terms such as first and second and the like are used merely to one
A entity or operation with another entity or operate distinguish, without necessarily requiring or implying these entities or operation it
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant are intended to
Cover non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or setting
Standby intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in the process, method, article or apparatus that includes the element.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (9)
1. a kind of radio-frequency power supply characterized by comprising
For converting alternating current to the rectification module of radio frequency direct current；
Respectively with the rectification module and load connection, for being carried out according to the control of first processor to the radio frequency direct current
Inversion, power adjustment and impedance matching obtain radio frequency alternating current and export to the power adjustment and impedance matching module of load；
It is connect with the output end of the power adjustment and impedance matching module, for itself local environment temperature to be maintained at default
Temperature range is interior and acquires the constant temperature sample circuit of the radio frequency alternating current；
The first processor connecting respectively with the power adjustment and impedance matching module and the constant temperature sample circuit is used
In power adjustment and impedance matching module according to the radio-frequency alternating current electric control.
2. radio-frequency power supply as described in claim 1, which is characterized in that the constant temperature sample circuit includes:
For acquiring the voltage sample module of radio frequency alternating voltage；
For acquiring the current sampling module of radio frequency alternating current；
For acquiring the temperature sensor of itself local environment temperature；
Heating module and refrigeration module；
Respectively with the voltage sample module, the current sample mould, the temperature sensor, the heating module and the system
The second processor of cold module connection, for being protected the environment temperature by controlling the heating module and the refrigeration module
It holds in preset temperature range and exports the radio frequency alternating voltage and the radio frequency alternating current.
3. radio-frequency power supply as claimed in claim 2, which is characterized in that the heating module includes:
The first switch that control terminal is connect with the second processor；
Heating device and the first power supply, the heating device, the first power supply and the first switch constitute series loop.
4. radio-frequency power supply as claimed in claim 2, which is characterized in that the refrigeration module includes:
The second switch that control terminal is connect with the second processor；
Refrigeration device and second source, the refrigeration device, the second source and the second switch constitute series loop.
5. radio-frequency power supply as claimed in claim 2, which is characterized in that the voltage sample module includes:
For acquiring the voltage sensor of radio frequency alternating voltage；
The low-pass filter connecting with the voltage sensor is more than 1/2 for filtering out the frequency in the radio frequency alternating voltage
The high fdrequency component of sample frequency；
The attenuator being connect with the low-pass filter, for filtered radio frequency alternating current to be decayed to the defeated of single-turn Dual module
Enter within the scope of signal processing；
The single-turn Dual module being connect with the attenuator, for converting the radio-frequency alternating current signal after decaying by single-ended signal
For difference mode signal；
The ADC connecting respectively with the single-turn Dual module and the second processor is used for the difference mode signal by analog quantity
Be converted to digital quantity.
6. radio-frequency power supply as claimed in claim 2, which is characterized in that the current sampling module includes:
For acquiring the current sensor of radio frequency alternating current；
The low-pass filter connecting with the current sensor is more than 1/2 for filtering out the frequency in the radio frequency alternating current
The high fdrequency component of sample frequency；
The attenuator being connect with the low-pass filter, for filtered radio frequency alternating current to be decayed to the defeated of single-turn Dual module
Enter within the scope of signal processing；
The single-turn Dual module being connect with the attenuator, for converting the radio-frequency alternating current signal after decaying by single-ended signal
For difference mode signal；
The ADC connecting respectively with the single-turn Dual module and the second processor is used for the difference mode signal by analog quantity
Be converted to digital quantity.
7. radio-frequency power supply as described in claim 1, which is characterized in that the rectification module is PFC rectification module.
8. radio-frequency power supply as described in any one of claim 1 to 7, which is characterized in that the power adjustment and impedance matching mould
Block includes DC/DC soft switch full bridge circuit, HFRF power circuit, high frequency drive circuit and connect with the first processor
Accessory power supply；
The DC/DC soft switch full bridge circuit is connect with the rectification module, for being depressured to the radio frequency direct current；
The HFRF power circuit includes:
First inductance, the first end of first inductance are connect with the output plus terminal of the DC/DC soft switch full bridge circuit；
The first end of third switch, the third switch is connect with the second end of first inductance, second end and the DC/DC
The output negative terminal of soft switch full bridge circuit connects；
With the Z converter that connect of first end of third switch, for will be by the radio-frequency alternating current after inversion and power adjustment
The impedance of electricity is converted to 12.5 Ω by 2 Ω；
The Lumped-Wilkinson converter being connect with the Z converter, for by the impedance of the radio frequency alternating current by
12.5 Ω are converted to 50 Ω；
The high frequency drive circuit includes:
The first end of second inductance, second inductance is connect with the output plus terminal of the accessory power supply；
The first end of 4th switch, the 4th switch is connect with the second end of second inductance, second end and the auxiliary
The output negative terminal of power supply connects, and control terminal is connect with the first processor；
Input terminal is connect with the first end of the 4th switch, the LC resonance that output end is connect with the control terminal that the third switchs
Circuit is switched for being converted to high-frequency driving signal and exporting to the third output voltage of the accessory power supply；
The first processor is used for by controlling the DC/DC soft switch full bridge circuit, first switch, the auxiliary
Power supply carries out power adjustment, and the frequency of the radio frequency alternating current with the radio frequency alternating current of the first end output switched to the third
Rate is equal with the frequency of the high-frequency driving signal, and impedance is 2 Ω.
9. radio-frequency power supply as claimed in claim 8, which is characterized in that the radio-frequency power supply further include:
The filter circuit being connect with the power adjustment and impedance matching module, it is humorous for carrying out high order to the radio frequency alternating current
Wave filters out processing.
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| CN201910844168.3A CN110460246A (en) | 2019-09-06 | 2019-09-06 | A kind of radio-frequency power supply |
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| CN201910844168.3A CN110460246A (en) | 2019-09-06 | 2019-09-06 | A kind of radio-frequency power supply |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110456136A (en) * | 2019-09-06 | 2019-11-15 | 深圳市百世达半导体设备有限公司 | A kind of radio frequency matching network and radio-frequency power system |
| CN114448387A (en) * | 2021-12-28 | 2022-05-06 | 深圳市恒运昌真空技术有限公司 | Method for adjusting impedance matching and impedance matching circuit |
| CN114641098A (en) * | 2022-03-17 | 2022-06-17 | 湖北中烟工业有限责任公司 | Impedance matching method and device for radio frequency heating smoking set and electronic equipment |
| CN117439031A (en) * | 2023-12-21 | 2024-01-23 | 深圳市瀚强科技股份有限公司 | Radio frequency power supply protection circuit and wireless communication equipment |
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Effective date of registration: 20211224 Address after: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Applicant after: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. Address before: 518102 13D, block D, Central Avenue, intersection of Xixiang Avenue and Baoyuan Road, Laodong community, Xixiang street, Bao'an District, Shenzhen, Guangdong Applicant before: Shenzhen BAISHIDA Semiconductor Equipment Co.,Ltd. Applicant before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. |
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Inventor after: Yue Weiping Inventor before: Yue Weiping Inventor before: Zhang Guidong |