CN110456208A - A kind of evaluation method and readable storage medium storing program for executing of the distribution of piezoelectric vibrator electrology characteristic - Google Patents
A kind of evaluation method and readable storage medium storing program for executing of the distribution of piezoelectric vibrator electrology characteristic Download PDFInfo
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- CN110456208A CN110456208A CN201910864401.4A CN201910864401A CN110456208A CN 110456208 A CN110456208 A CN 110456208A CN 201910864401 A CN201910864401 A CN 201910864401A CN 110456208 A CN110456208 A CN 110456208A
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Abstract
The invention discloses a kind of evaluation methods of piezoelectric vibrator electrology characteristic distribution, including 1) using electrode overlay area as symmetrical centre, carry out unit to instance model and symmetrically divide；2) building and the matched sample equivalent circuit of division result；3) it is based on sample equivalent circuit, calculates the electrology characteristic distribution of position to be measured, if electrology characteristic distribution is unsatisfactory for expected precision, adjustment unit quantity goes to step 2, otherwise, terminates this method.Also disclose corresponding and readable storage medium storing program for executing.The present invention is symmetrically divided using electrode overlay area as symmetrical centre, to sample, constructs sample equivalent circuit, the electrology characteristic distribution of position to be measured is calculated by equivalent circuit, process is simple, and computational efficiency is high, and the accurate estimation of electrology characteristic distribution can be carried out for the electrodeless region of piezoelectric vibrator.
Description
Technical field
The present invention relates to the evaluation methods and readable storage medium storing program for executing of a kind of distribution of piezoelectric vibrator electrology characteristic, belong to piezoelectricity vibration
Sub- technical field.
Background technique
Piezoelectric vibrator is most basic piezoelectric unit, after applying alternating electric field to it, can pass through electromechanical Coupling
The elastic vibration of various mode is inspired in piezoelectrics, wherein k31Mode of oscillation is most basic one of mode of oscillation, is being pressed
It is had a wide range of applications in motor-driven cylinder (including supersonic motor).Currently, the electrology characteristic for piezoelectric vibrator is distributed research
It is mainly realized by the voltage in measuring electrode, this method is limited in that: can only be to being covered with electrode in piezoelectric vibrator
Region studied, but under some applications, piezoelectric vibrator also includes electrodeless region, this will lead to can not be to its electricity
Characteristic is learned comprehensively to be analyzed.
Summary of the invention
The present invention provides the evaluation methods and readable storage medium storing program for executing of a kind of distribution of piezoelectric vibrator electrology characteristic, solve back
The problem of being disclosed in scape technology.
In order to solve the above-mentioned technical problem, the technical scheme adopted by the invention is that:
A kind of evaluation method of piezoelectric vibrator electrology characteristic distribution, including,
1) using electrode overlay area as symmetrical centre, unit is carried out to instance model and is symmetrically divided；
2) building and the matched sample equivalent circuit of division result；
3) be based on sample equivalent circuit, calculate position to be measured electrology characteristic distribution, if electrology characteristic distribution be unsatisfactory for it is pre-
Phase precision, adjustment unit quantity go to step 2, otherwise, terminate this method.
Before division, sample parameters are first acquired, construct instance model；Sample parameters include length, width, thickness, close
Degree, capacitor, resonant frequency, antiresonant frequency, dielectric constant, submissive coefficient, electromechanical coupling factor and piezoelectric modulus；
Dielectric constant, submissive coefficient, electromechanical coupling factor and piezoelectric modulus calculation formula be,
Wherein, C0For capacitor, l is length, and w is width, and t is thickness, and ρ is density, fAFor resonant frequency, fBFor antiresonance
Frequency,For dielectric constant, ε0For permittivity of vacuum,WithSubmissive coefficient respectively under sustained field and constant potential shifting,
k31For electromechanical coupling factor, d31For piezoelectric modulus.
Sample equivalent circuit include central electrode overlay area equivalent circuit, the side equivalent circuit comprising position to be measured,
Side equivalent circuit not comprising position to be measured；
Side equivalent circuit comprising position to be measured includes that N number of constant potential moves unit equivalent circuit and the equivalent electricity in position to be measured
Road；Wherein, N number of constant potential moves unit equivalent circuit and equivalent circuit mechanical side in position to be measured series connection, and series circuit is simultaneously connected to
Heart electrode overlay area equivalent circuit mechanical side both ends, central electrode overlay area equivalent circuit electrical side input voltage are to be measured
Position equivalent circuit electrical side output voltage；
Side equivalent circuit not comprising position to be measured includes that N+1 constant potential moves unit equivalent circuit；Wherein, N+1
Constant potential moves the series connection of unit equivalent circuit, and series circuit is simultaneously connected to central electrode overlay area equivalent circuit mechanical side both ends.
Central electrode overlay area equivalent circuit includes equivalent impedanceEquivalent impedanceEquivalent impedanceTransformation
Device and capacitor
CapacitorBoth ends and be connected to transformer primary side both ends, capacitorBoth ends input voltage；
Equivalent impedanceOne end connection do not include position to be measured side equivalent circuit, equivalent impedanceThe other end
It is separately connected equivalent impedanceAnd equivalent impedanceOne end, equivalent impedanceOther end connection comprising position to be measured
Side equivalent circuit, equivalent impedanceThe other end connect transformer secondary one end, the other end of transformer secondary is separately connected
Side equivalent circuit not comprising position to be measured and the side equivalent circuit comprising position to be measured.
The formula of each parameter is in the equivalent circuit of central electrode overlay area,
Wherein, l0For the length of center electrode overlay area, w is width, and t is thickness, and ρ is density,For under sustained field
Submissive coefficient,For dielectric constant, d31And d33For dependent piezoelectric coefficient, v is velocity of wave, and k is wave number, and n is transformer voltage ratio.
Position equivalent circuit to be measured includes equivalent impedanceEquivalent impedanceEquivalent impedanceTransformer and capacitor
CapacitorBoth ends and be connected to transformer primary side both ends, capacitorBoth ends output voltage；
Equivalent impedanceOne end be separately connected equivalent impedanceAnd equivalent impedanceOne end, equivalent impedance's
The other end connects transformer secondary one end；
If position equivalent circuit to be measured is located at i-th and i+1 constant potential moves between unit equivalent circuit, equivalent impedanceThe other end connect i-th constant potential and move unit equivalent circuit, equivalent impedanceThe other end connect i+1 constant potential
Unit equivalent circuit is moved, the other end of transformer secondary is separately connected i-th and i+1 constant potential moves unit equivalent circuit；
If position equivalent circuit to be measured is located at central electrode overlay area equivalent circuit and the 1st constant potential shifting unit is equivalent
Between circuit, equivalent impedanceThe other end connect central electrode overlay area equivalent circuit, equivalent impedanceThe other end
It connects the 1st constant potential and moves unit equivalent circuit, it is equivalent that the other end of transformer secondary is separately connected central electrode overlay area
Circuit and the 1st constant potential move unit equivalent circuit；
It is moved after unit equivalent circuit if position equivalent circuit to be measured is located at n-th constant potential, equivalent impedanceIt is another
End connection n-th constant potential moves unit equivalent circuit, equivalent impedanceThe other end connection transformer secondary the other end, become
The other end on depressor pair side is also connected with n-th constant potential and moves unit equivalent circuit.
The formula of each parameter is in the equivalent circuit of position to be measured,
Wherein, lmFor the length of position to be measured, w is width, and t is thickness, and ρ is density,For the submissive system under sustained field
Number,For dielectric constant, d31And d33For dependent piezoelectric coefficient, v is velocity of wave, and k is wave number, and n is transformer voltage ratio.
All constant potentials shifting unit equivalent circuit structures are consistent, including equivalent impedanceEquivalent impedanceWith equivalent resistance
It is anti-J1 ∈ [1, N] or j1 ∈ [1, N+1], N and N+1 are respectively that central electrode overlay area two sides constant potential moves unit number
Amount；
If j1 ≠ N or j1 ≠ N+1, equivalent impedanceOne end be separately connected equivalent impedanceAnd equivalent impedance's
One end；If j1=1, equivalent impedanceThe other end connect central electrode overlay area equivalent circuit, equivalent impedance's
The other end connects the 2nd constant potential and moves unit equivalent circuit, equivalent impedanceThe other end be separately connected the central electrode area of coverage
Domain equivalent circuit and the 2nd constant potential move unit equivalent circuit；If j1 ≠ 1, equivalent impedanceThe other end connect jth 1-1
A constant potential moves unit equivalent circuit, equivalent impedanceOther end connection jth 1+1 constant potential shifting unit equivalent circuit, etc.
Imitate impedanceThe other end be separately connected 1+1 constant potential shifting unit equivalent circuit of jth -1 and jth；
If j1=N or j1=N+1, equivalent impedanceOne end connection jth 1-1 constant potential shifting unit equivalent circuit, etc.
Imitate impedanceThe other end be separately connected equivalent impedanceAnd equivalent impedanceOne end, equivalent impedanceThe other end point
It Lian Jie not 1-1 constant potential shifting unit equivalent circuit of jth and equivalent impedanceThe other end.
The formula of each parameter is in constant potential shifting unit equivalent circuit,
Wherein, lj1The length of unit is moved for 1 constant potential of jth,Submissive coefficient under moving for constant potential, ω is angular frequency
Rate, vDFor velocity of wave, kDFor wave number, ρ is density, and w is width, and t is thickness.
A kind of readable storage medium storing program for executing storing one or more programs, one or more of programs include instruction, described
It instructs when executed by a computing apparatus, so that the evaluation method for calculating equipment and executing the distribution of piezoelectric vibrator electrology characteristic.
Advantageous effects of the invention: the present invention using electrode overlay area as symmetrical centre, carries out sample symmetrical
It divides, constructs sample equivalent circuit, be distributed by the electrology characteristic that equivalent circuit calculates position to be measured, process is simple, calculates effect
Rate is high, and the accurate estimation of electrology characteristic distribution can be carried out for electrodeless region.
Detailed description of the invention
Fig. 1 is the flow chart of method；
Fig. 2 is the structural schematic diagram of sample；
Fig. 3 is sample unilateral side equivalent circuit diagram；
Fig. 4 is voltage's distribiuting of the sample under resonant frequency along its length.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.Following embodiment is only used for clearly illustrating the present invention
Technical solution, and not intended to limit the protection scope of the present invention.
As shown in Figure 1, a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution, comprising the following steps:
Step 1, sample parameters are acquired, instance model is constructed.
Sample is as shown in Fig. 2, include piezoelectric vibrator, in the top and bottom center adhesive electrode of piezoelectric vibrator, sample ginseng
Number includes basic parameter and characterisitic parameter.
Wherein basic parameter includes length, width, thickness, density, capacitor, resonant frequency, antiresonant frequency；Characterisitic parameter
Including dielectric constant, submissive coefficient, electromechanical coupling factor and piezoelectric modulus, the calculation formula of characterisitic parameter is as follows:
Wherein, C0For capacitor, l is length, and w is width, and t is thickness, and ρ is density, fAFor resonant frequency, fBFor antiresonance
Frequency,For dielectric constant, ε0For permittivity of vacuum,WithSubmissive coefficient respectively under sustained field and constant potential shifting,
k31For electromechanical coupling factor, d31For piezoelectric modulus.
Step 2, using electrode overlay area as symmetrical centre, unit is carried out to instance model and is symmetrically divided；I.e. along length side
It is divided into N+1 unit to by the piezoelectric vibrator on the left of symmetrical centre, the piezoelectric vibrator on the right side of symmetrical centre is divided into N+1 unit,
The unit in left side and the unit on right side are symmetrical two-by-two, and wherein the unit of side one is the unit comprising position to be measured, remaining element
Move unit for constant potential, therefore side includes that N+1 constant potential moves unit, the other side include N number of constant potential shifting unit and 1 to
Survey position units.
Step 3, building and the matched sample equivalent circuit of division result.
As shown in figure 3, giving the structure comprising position side to be measured, sample equivalent circuit includes the central electrode area of coverage
Domain equivalent circuit, the side equivalent circuit comprising position to be measured, the side equivalent circuit not comprising position to be measured.Comprising to location
The side equivalent circuit set includes that N number of constant potential moves unit equivalent circuit and position equivalent circuit to be measured；Wherein, N number of constant potential
Move unit equivalent circuit and equivalent circuit mechanical side in position to be measured series connection, series circuit and to be connected to central electrode overlay area equivalent
Circuitry mechanical side both ends, central electrode overlay area equivalent circuit electrical side input voltage, equivalent circuit electrical side in position to be measured
Output voltage.Side equivalent circuit not comprising position to be measured includes that N+1 constant potential moves unit equivalent circuit；Wherein, N+1
Constant potential moves the series connection of unit equivalent circuit, and series circuit is simultaneously connected to central electrode overlay area equivalent circuit mechanical side both ends.
Physical circuit is as follows:
Central electrode overlay area equivalent circuit includes equivalent impedanceEquivalent impedanceEquivalent impedanceTransformation
Device and capacitor
CapacitorBoth ends and be connected to transformer primary side both ends, capacitorBoth ends input voltage；Equivalent impedance's
One end connection does not include the side equivalent circuit of position to be measured, equivalent impedanceThe other end be separately connected equivalent impedanceWith
Equivalent impedanceOne end, equivalent impedanceThe other end connection include position to be measured side equivalent circuit, equivalent impedanceThe other end connect transformer secondary one end, the other end of transformer secondary is separately connected the side not comprising position to be measured
Equivalent circuit and side equivalent circuit comprising position to be measured.
The formula of each parameter in the equivalent circuit of central electrode overlay area:
Wherein, l0For the length of center electrode overlay area, w is width, and t is thickness, and ρ is density,For under sustained field
Submissive coefficient,For dielectric constant, d31And d33For dependent piezoelectric coefficient, v is velocity of wave, and k is wave number, and n is transformer voltage ratio.
Position equivalent circuit to be measured includes equivalent impedanceEquivalent impedanceEquivalent impedanceTransformer and capacitor
CapacitorBoth ends and be connected to transformer primary side both ends, capacitorBoth ends output voltage；Equivalent impedance's
One end is separately connected equivalent impedanceAnd equivalent impedanceOne end, equivalent impedanceThe other end connect transformer secondary
One end.
If position equivalent circuit to be measured is located at i-th and i+1 constant potential moves between unit equivalent circuit, equivalent impedanceThe other end connect i-th constant potential and move unit equivalent circuit, equivalent impedanceThe other end connect i+1 constant potential
Unit equivalent circuit is moved, the other end of transformer secondary is separately connected i-th and i+1 constant potential moves unit equivalent circuit.
If position equivalent circuit to be measured is located at central electrode overlay area equivalent circuit and the 1st constant potential shifting unit is equivalent
Between circuit, equivalent impedanceThe other end connect central electrode overlay area equivalent circuit, equivalent impedanceThe other end
It connects the 1st constant potential and moves unit equivalent circuit, it is equivalent that the other end of transformer secondary is separately connected central electrode overlay area
Circuit and the 1st constant potential move unit equivalent circuit.
It is moved after unit equivalent circuit if position equivalent circuit to be measured is located at n-th constant potential, equivalent impedanceIt is another
End connection n-th constant potential moves unit equivalent circuit, equivalent impedanceThe other end connection transformer secondary the other end, become
The other end on depressor pair side is also connected with n-th constant potential and moves unit equivalent circuit.
The formula of each parameter in the equivalent circuit of position to be measured:
Wherein, lmFor the length of position to be measured, w is width, and t is thickness, and ρ is density,For the submissive system under sustained field
Number,For dielectric constant, d31And d33For dependent piezoelectric coefficient, v is velocity of wave, and k is wave number, and n is transformer voltage ratio.
All constant potentials shifting unit equivalent circuit structures are consistent, including equivalent impedanceEquivalent impedanceWith equivalent resistance
It is anti-J1 ∈ [1, N] or j1 ∈ [1, N+1], N and N+1 are respectively that central electrode overlay area two sides constant potential moves unit number
Amount.
If j1 ≠ N or j1 ≠ N+1, equivalent impedanceOne end be separately connected equivalent impedanceAnd equivalent impedance's
One end；If j1=1, equivalent impedanceThe other end connect central electrode overlay area equivalent circuit, equivalent impedance's
The other end connects the 2nd constant potential and moves unit equivalent circuit, equivalent impedanceThe other end be separately connected the central electrode area of coverage
Domain equivalent circuit and the 2nd constant potential move unit equivalent circuit；If j1 ≠ 1, equivalent impedanceThe other end connect jth 1-1
A constant potential moves unit equivalent circuit, equivalent impedanceOther end connection jth 1+1 constant potential shifting unit equivalent circuit, etc.
Imitate impedanceThe other end be separately connected 1+1 constant potential shifting unit equivalent circuit of jth -1 and jth.
If j1=N or j1=N+1, equivalent impedanceOne end connection jth 1-1 constant potential shifting unit equivalent circuit, etc.
Imitate impedanceThe other end be separately connected equivalent impedanceAnd equivalent impedanceOne end, equivalent impedanceThe other end point
It Lian Jie not 1-1 constant potential shifting unit equivalent circuit of jth and equivalent impedanceThe other end.
Constant potential moves the formula of each parameter in unit equivalent circuit:
Wherein, lj1The length of unit is moved for 1 constant potential of jth,Submissive coefficient under moving for constant potential, ω is angular frequency
Rate, vDFor velocity of wave, kDFor wave number, ρ is density, and w is width, and t is thickness.
Step 4, it is based on sample equivalent circuit, calculates the electrology characteristic distribution of position to be measured, if electrology characteristic distribution is discontented
The expected precision of foot, (P is adjusting step in figure, is more than or equal to 1), goes to step for adjustment unit quantity, usually adding unit quantity
Rapid 2, otherwise, terminate this method.
By taking following piezoelectric vibrator as an example: length l is 40mm, and width w is 5mm, and thickness t is 1mm, density p 8080kg/
m3, capacitor C0It is 1.9 × 10-9F, resonant frequency fAFor 42.43kHz, antiresonant frequency fBFor 42.29kHz, dielectric constantFor
9.5×10-9F/m, submissive coefficientIt is 11.7 × 10-12m2/ N, submissive coefficientIt is 10.6 × 10-12m2/ N, electromechanical coupling
Number k31It is 0.31, piezoelectric coefficient d31It is -103 × 10-12C/N can get if the value of N is 20 such as Fig. 4 institute according to the above method
Voltage's distribiuting under the different location along its length shown.
The above method is symmetrically divided using electrode overlay area as symmetrical centre, to sample, constructs sample equivalent circuit,
The electrology characteristic distribution of position to be measured is calculated by equivalent circuit, process is simple, and computational efficiency is high, can be directed to electrodeless region
Carry out the accurate estimation of electrology characteristic distribution.
A kind of estimating system of piezoelectric vibrator electrology characteristic distribution, including,
Instance model constructs module: acquisition sample parameters construct instance model.
Division module: using electrode overlay area as symmetrical centre, unit is carried out to instance model and is symmetrically divided.
Equivalent circuit constructs module: building and the matched sample equivalent circuit of division result.
Computing module: being based on sample equivalent circuit, calculates the electrology characteristic distribution of position to be measured, if electrology characteristic distribution is not
Meet expected precision, adjustment unit quantity goes to equivalent circuit building module, otherwise, terminates electrology characteristic distribution estimation.
A kind of computer readable storage medium storing one or more programs, one or more of programs include referring to
Enable, described instruction when executed by a computing apparatus so that it is described calculate equipment execute piezoelectric vibrator electrology characteristic distribution estimation
Method.
A kind of calculating equipment, including one or more processors, memory and one or more program, one of them or
Multiple programs store in the memory and are configured as being executed by one or more of processors, one or more of
Program includes the instruction for executing the evaluation method of piezoelectric vibrator electrology characteristic distribution.
It should be understood by those skilled in the art that, embodiments herein can provide as method, system or computer program
Product.Therefore, complete hardware embodiment, complete software embodiment or reality combining software and hardware aspects can be used in the application
Apply the form of example.Moreover, it wherein includes the computer of computer usable program code that the application, which can be used in one or more,
The computer program implemented in usable storage medium (including but not limited to magnetic disk storage, CD-ROM, optical memory etc.) produces
The form of product.
The application is referring to method, the process of equipment (system) and computer program product according to the embodiment of the present application
Figure and/or block diagram describe.It should be understood that every one stream in flowchart and/or the block diagram can be realized by computer program instructions
The combination of process and/or box in journey and/or box and flowchart and/or the block diagram.It can provide these computer programs
Instruct the processor of general purpose computer, special purpose computer, Embedded Processor or other programmable data processing devices to produce
A raw machine, so that being generated by the instruction that computer or the processor of other programmable data processing devices execute for real
The device for the function of being specified in present one or more flows of the flowchart and/or one or more blocks of the block diagram.
These computer program instructions, which may also be stored in, is able to guide computer or other programmable data processing devices with spy
Determine in the computer-readable memory that mode works, so that it includes referring to that instruction stored in the computer readable memory, which generates,
Enable the manufacture of device, the command device realize in one box of one or more flows of the flowchart and/or block diagram or
The function of being specified in multiple boxes.
These computer program instructions also can be loaded onto a computer or other programmable data processing device, so that counting
Series of operation steps are executed on calculation machine or other programmable devices to generate computer implemented processing, thus in computer or
The instruction executed on other programmable devices is provided for realizing in one or more flows of the flowchart and/or block diagram one
The step of function of being specified in a box or multiple boxes.
The above is only the embodiment of the present invention, are not intended to restrict the invention, all in the spirit and principles in the present invention
Within, any modification, equivalent substitution, improvement and etc. done, be all contained in apply pending scope of the presently claimed invention it
It is interior.
Claims (10)
1. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution, it is characterised in that: including,
1) using electrode overlay area as symmetrical centre, unit is carried out to instance model and is symmetrically divided；
2) building and the matched sample equivalent circuit of division result；
3) it is based on sample equivalent circuit, calculates the electrology characteristic distribution of position to be measured, if electrology characteristic distribution is unsatisfactory for expected essence
Degree, adjustment unit quantity go to step 2, otherwise, terminate this method.
2. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 1, it is characterised in that: dividing
Before, sample parameters are first acquired, instance model is constructed；Sample parameters include length, width, thickness, density, capacitor, resonance frequency
Rate, antiresonant frequency, dielectric constant, submissive coefficient, electromechanical coupling factor and piezoelectric modulus；
Dielectric constant, submissive coefficient, electromechanical coupling factor and piezoelectric modulus calculation formula be,
Wherein, C0For capacitor, l is length, and w is width, and t is thickness, and ρ is density, fAFor resonant frequency, fBFor antiresonant frequency,For dielectric constant, ε0For permittivity of vacuum,WithSubmissive coefficient respectively under sustained field and constant potential shifting, k31For
Electromechanical coupling factor, d31For piezoelectric modulus.
3. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 1, it is characterised in that: sample etc.
Effect circuit includes central electrode overlay area equivalent circuit, the side equivalent circuit comprising position to be measured, does not include position to be measured
Side equivalent circuit；
Side equivalent circuit comprising position to be measured includes that N number of constant potential moves unit equivalent circuit and position equivalent circuit to be measured；
Wherein, N number of constant potential moves unit equivalent circuit and equivalent circuit mechanical side in position to be measured series connection, and series circuit is simultaneously connected to middle electrocardio
Pole overlay area equivalent circuit mechanical side both ends, central electrode overlay area equivalent circuit electrical side input voltage, position to be measured
Equivalent circuit electrical side output voltage；
Side equivalent circuit not comprising position to be measured includes that N+1 constant potential moves unit equivalent circuit；Wherein, N+1 permanent electricity
The series connection of displacement unit equivalent circuit, series circuit are simultaneously connected to central electrode overlay area equivalent circuit mechanical side both ends.
4. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 3, it is characterised in that: middle electrocardio
Pole overlay area equivalent circuit includes equivalent impedanceEquivalent impedanceEquivalent impedanceTransformer and capacitor
CapacitorBoth ends and be connected to transformer primary side both ends, capacitorBoth ends input voltage；
Equivalent impedanceOne end connection do not include position to be measured side equivalent circuit, equivalent impedanceThe other end difference
Connect equivalent impedanceAnd equivalent impedanceOne end, equivalent impedanceThe other end connection include position to be measured side
Equivalent circuit, equivalent impedanceThe other end connect transformer secondary one end, the other end of transformer secondary, which is separately connected, not to be wrapped
Side equivalent circuit containing position to be measured and the side equivalent circuit comprising position to be measured.
5. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 4, it is characterised in that: middle electrocardio
The formula of each parameter is in the equivalent circuit of pole overlay area,
Wherein, l0For the length of center electrode overlay area, w is width, and t is thickness, and ρ is density,It is soft under sustained field
Suitable coefficient,For dielectric constant, d31And d33For dependent piezoelectric coefficient, v is velocity of wave, and k is wave number, and n is transformer voltage ratio.
6. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 3, it is characterised in that: to location
Setting equivalent circuit includes equivalent impedanceEquivalent impedanceEquivalent impedanceTransformer and capacitor
CapacitorBoth ends and be connected to transformer primary side both ends, capacitorBoth ends output voltage；
Equivalent impedanceOne end be separately connected equivalent impedanceAnd equivalent impedanceOne end, equivalent impedanceIt is another
End connection transformer secondary one end；
If position equivalent circuit to be measured is located at i-th and i+1 constant potential moves between unit equivalent circuit, equivalent impedance's
The other end connects i-th of constant potential and moves unit equivalent circuit, equivalent impedanceThe other end connection i+1 constant potential move singly
First equivalent circuit, the other end of transformer secondary is separately connected i-th and i+1 constant potential moves unit equivalent circuit；
If position equivalent circuit to be measured is located at central electrode overlay area equivalent circuit and the 1st constant potential moves unit equivalent circuit
Between, equivalent impedanceThe other end connect central electrode overlay area equivalent circuit, equivalent impedanceThe other end connection
1st constant potential moves unit equivalent circuit, and the other end of transformer secondary is separately connected central electrode overlay area equivalent circuit
Unit equivalent circuit is moved with the 1st constant potential；
It is moved after unit equivalent circuit if position equivalent circuit to be measured is located at n-th constant potential, equivalent impedanceThe other end connect
It connects n-th constant potential and moves unit equivalent circuit, equivalent impedanceThe other end connection transformer secondary the other end, transformer
The other end on secondary side is also connected with n-th constant potential and moves unit equivalent circuit.
7. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 6, it is characterised in that: to location
The formula of each parameter is in the equivalent circuit set,
Wherein, lmFor the length of position to be measured, w is width, and t is thickness, and ρ is density,For the submissive coefficient under sustained field,
For dielectric constant, d31And d33For dependent piezoelectric coefficient, v is velocity of wave, and k is wave number, and n is transformer voltage ratio.
8. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 3, it is characterised in that: Suo Youheng
Dielectric displacement unit equivalent circuit structure is consistent, including equivalent impedanceEquivalent impedanceAnd equivalent impedancej1∈[1,
N] or j1 ∈ [1, N+1], N and N+1 be respectively that central electrode overlay area two sides constant potential moves element number；
If j1 ≠ N or j1 ≠ N+1, equivalent impedanceOne end be separately connected equivalent impedanceAnd equivalent impedanceOne end；
If j1=1, equivalent impedanceThe other end connect central electrode overlay area equivalent circuit, equivalent impedanceThe other end
It connects the 2nd constant potential and moves unit equivalent circuit, equivalent impedanceThe other end to be separately connected central electrode overlay area equivalent
Circuit and the 2nd constant potential move unit equivalent circuit；If j1 ≠ 1, equivalent impedanceOther end connection jth 1-1 it is permanent electric
Displacement unit equivalent circuit, equivalent impedanceOther end connection jth 1+1 constant potential shifting unit equivalent circuit, equivalent impedanceThe other end be separately connected 1+1 constant potential shifting unit equivalent circuit of jth -1 and jth；
If j1=N or j1=N+1, equivalent impedanceOne end connection jth 1-1 constant potential shifting unit equivalent circuit, equivalent resistance
It is anti-The other end be separately connected equivalent impedanceAnd equivalent impedanceOne end, equivalent impedanceThe other end connect respectively
It connects 1-1 constant potential of jth and moves unit equivalent circuit and equivalent impedanceThe other end.
9. a kind of evaluation method of piezoelectric vibrator electrology characteristic distribution according to claim 8, it is characterised in that: constant potential
The formula of each parameter is in shifting unit equivalent circuit,
Wherein, lj1The length of unit is moved for 1 constant potential of jth,Submissive coefficient under moving for constant potential, ω is angular frequency, vD
For velocity of wave, kDFor wave number, ρ is density, and w is width, and t is thickness.
10. a kind of readable storage medium storing program for executing for storing one or more programs, it is characterised in that: one or more of programs include
Instruction, described instruction when executed by a computing apparatus so that the calculatings equipment execution according to claim 1 to side described in 9
Method either in method.
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