CN110455361A - Thermal gas flowmeter and its application - Google Patents
Thermal gas flowmeter and its application Download PDFInfo
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- CN110455361A CN110455361A CN201810428315.4A CN201810428315A CN110455361A CN 110455361 A CN110455361 A CN 110455361A CN 201810428315 A CN201810428315 A CN 201810428315A CN 110455361 A CN110455361 A CN 110455361A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
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Abstract
The present invention relates to a kind of thermal gas flowmeter and its applications, mainly solve the problems, such as that measurement accuracy is poor in the prior art, is influenced by installation operating condition.The present invention is by using a kind of thermal gas flowmeter, including aviation plug, circuit case, PCB circuit, gas flow shell, MEMS hardware system, gas flow, MEMS hardware system includes MEMS sensing chip, signal processing module, A/D conversion module, Micro-processor MCV, signal output module, MEMS chip is embedded in gas flow inner wall, and with PCB circuit connection, PCB circuit is placed in circuit case, and it is connect with aviation plug, gas flow is that the technical solution of Venturi tube structure preferably solves the above problem, it can be used in low leakage sealed service check.
Description
Technical field
The present invention relates to a kind of thermal gas flowmeter and its applications.
Background technique
The measurement of flow plays critically important effect in industrial processes, daily life, in oil product pin
Field is sold, with the popularization of oil-gas recovery device, the flow measurement for recycling oil gas is had become for a urgent problem to be solved.By
It is narrow in fuel charger inner space, and it is mounted with the equipment such as fluid flowmeter, filter, self priming pump, vacuum pump, and gas station is existing
Field condition rather harsh may contain condensation oil liquid and impurity in gas recovery, it is therefore desirable to which sensor has small in size, anti-blocking
The features such as plug, not vibrated operating condition influence.
Based on principles above and current flowmeter technology, thermal flowmeter is measured as a kind of by heat exchange relationship
The instrument of flow has the peculiar advantage in oil gas fields of measurement.Thermal flowmeter does not have movable part, no choked flow piece, pressure
Lose very little, reliable performance, no blocking risk.In conjunction with MEMS (MEMS) technology, surveyed by micro sensing chip
Temperature can effectively reduce flowmeter volume.
It mainly include Roots type flowmeter, thermal flowmeter, whirlpool currently used for all kinds of flowmeters of gas station oil gas flow measurement
Street flowmeter etc., all kinds of flowmeters different disadvantage in use.Roots type flowmeter volume is big, easily blocks, hot type stream
Measurement error is big after flowmeter transducer probe contacts condense oil liquid, and vortex-shedding meter is big by vibration influence.Therefore current oil gas
Fields of measurement need it is a kind of by installation operating condition influenced flowmeter that is small and can accurately measuring.
ZL201210203309.1 provides a kind of gas Roots flow meter, which passes through pressure difference seat detection stream meter
Entrance and exit pressure difference opens by-pass collar if blocking occurs, gas is not passed through flow to judge whether flowmeter blocks
Meter is delivered directly to downstream, and issues alarm signal and staff is reminded to safeguard flowmeter.The patent is only for Roots's flow
It counts susceptible to plugging feature and develops a set of device for warning blocking, there is no inherently solve blockage problem.And after blocking
Gas is transported to downstream by by-pass collar, can not measure to gas before safeguarding flowmeter.
With the fast development of MEMS technology, having production, small size, low cost, batch micro operations, stability is good, power consumption
Application of the heat type gas flow sensor of the features such as low in more areas is also possibly realized, in conjunction with the scene of oil gas fields of measurement
The technical advantage of demand and MEMS, the invention proposes a kind of novel thermal gas flowmeters.
Summary of the invention
The first technical problem to be solved by the present invention is that measurement accuracy is poor in the prior art, is influenced by installation operating condition
The problem of, a kind of new thermal gas flowmeter is provided, has the advantages that measurement accuracy is high, it is small to be influenced by installation operating condition.This hair
The two of bright technical problem to be solved are to provide one kind and corresponding thermal gas flowmeter one of the technical issues of solution
Application.
One of in order to solve the above problem, The technical solution adopted by the invention is as follows: a kind of thermal gas flowmeter, including boat
Blind plug, circuit case, PCB circuit, gas flow shell, MEMS hardware system, gas flow, MEMS hardware system include
MEMS sensing chip, signal processing module, A/D conversion module, Micro-processor MCV, signal output module, MEMS chip are embedded in gas
Body runner inner wall, and with PCB circuit connection, PCB circuit is placed in circuit case, and is connect with aviation plug, and gas flow is
Venturi tube structure.
In above-mentioned technical proposal, it is preferable that aviation plug is used to be powered to PCB circuit and transmit with data.
In above-mentioned technical proposal, it is preferable that PCB circuit integration heat source circuit, bridge circuit, signal adjustment circuit, micro-control
Device processed, communication module etc..Realize reading, conversion and the transmission of MEMS chip data.
In above-mentioned technical proposal, it is preferable that MEMS sensing chip integrates heat source unit and temperature measuring unit, heat source unit convection current
The gas medium crossed is heated, and temperature measuring unit measures the temperature field locally redistributed, and to fluid measurement temperature
Degree carries out temperature compensation calibration.
In above-mentioned technical proposal, it is preferable that MEMS sensing chip is measured in gas process and passed back by signal processing module
Sampled analog value is handled, and is controlled in the input range of A/D converter, through A/D converter treated digital quantity
Incoming Micro-processor MCV.
In above-mentioned technical proposal, it is preferable that Micro-processor MCV obtains instantaneous flow, accumulative stream by tabling look-up and calculating
Amount, temperature parameter.
In above-mentioned technical proposal, it is preferable that signal output module is according to user equipment needs, output digit signals and simulation
Signal.
In above-mentioned technical proposal, it is preferable that MEMS chip using solid construction design, improve chip impact resistance and
Shake-proof ability, chip surface coats high thermal conductivity material, and carries out Passivation Treatment, avoids chip and physical contact between media, mentions
Its high reliability.
In above-mentioned technical proposal, it is preferable that gas flow uses Venturi tube structure, improves flow velocity, shape by local contraction
Effectively anti-blocking at front and back pressure difference, the diameter ratio of throat and caliber is 0.65-0.75.
In above-mentioned technical proposal, it is preferable that be isolated between circuit case and gas flow shell using sealing structure, avoid phase
It mutually influences, shell and connector use overall structure, and flowmeter connector is connected using the form of screw thread or flange with front and back pipeline section
It connects, connection procedure is not necessarily to specific installation direction.
In order to solve the above problem two, The technical solution adopted by the invention is as follows: a kind of application of thermal gas flowmeter,
For in gas flow measurement.
The present invention aiming at the problem that current oil throughput fields of measurement lacks and is applicable in flowmeter, provide it is a kind of it is small in size,
Crushing is small, thermal flowmeter without blocking risk measures precision height, pacified suitable for the gasmetry in petroleum vapor recovery field
It is small to fill operating condition influence, achieves preferable technical effect.
Detailed description of the invention
Fig. 1 hardware system figure.
Fig. 2 flowmeter structure figure.
In Fig. 2,1 aviation plug, 2 circuit cases, 3 PCB circuits, 4 gas flow shells, 5 MEMS hardware systems, 6 gas
Body runner.
The present invention will be further described below by way of examples, but is not limited only to the present embodiment.
Specific embodiment
[embodiment 1]
A kind of thermal gas flowmeter, as shown in Fig. 2, outside including aviation plug, circuit case, PCB circuit, gas flow
Shell, MEMS hardware system, gas flow；As shown in Figure 1, MEMS hardware system include MEMS sensing chip, signal processing module,
A/D conversion module, Micro-processor MCV, signal output module.
MEMS chip is embedded in gas flow inner wall, and with PCB circuit connection, PCB circuit is placed in circuit case, and with boat
Blind plug connection, gas flow is Venturi tube structure.
Aviation plug is used to be powered to PCB circuit and transmit with data.
PCB circuit integration heat source circuit, bridge circuit, signal adjustment circuit, microcontroller, communication module etc..It realizes
Reading, conversion and the transmission of MEMS chip data.
MEMS sensing chip integrates heat source unit and temperature measuring unit, heat source unit heat the gas medium flowed through,
Temperature measuring unit measures the temperature field locally redistributed, and carries out temperature compensation calibration to fluid measurement temperature.
MEMS sensing chip is measured the sampled analog value passed back in gas process and handled by signal processing module, by it
Control is passed to Micro-processor MCV in the input range of A/D converter, through A/D converter treated digital quantity.
Micro-processor MCV obtains instantaneous flow, integrated flow, temperature parameter by tabling look-up and calculating.
Signal output module is according to user equipment needs, output digit signals and analog signal.
MEMS chip is designed using solid construction, improves the impact resistance and shake-proof ability of chip, chip surface coating
High thermal conductivity material, and Passivation Treatment is carried out, chip and physical contact between media are avoided, its reliability is improved.
Gas flow uses Venturi tube structure, improves flow velocity by local contraction, forms front and back pressure difference, effective anti-blocking, larynx
The diameter of portion and caliber ratio is 0.65.
It is isolated between circuit case and gas flow shell using sealing structure, avoids influencing each other, shell and connector uses
Overall structure, flowmeter connector are attached using the form of screw thread or flange with front and back pipeline section, and connection procedure is without specific
Installation direction.
[embodiment 2]
A kind of thermal gas flowmeter, as shown in Fig. 2, outside including aviation plug, circuit case, PCB circuit, gas flow
Shell, MEMS hardware system, gas flow；As shown in Figure 1, MEMS hardware system include MEMS sensing chip, signal processing module,
A/D conversion module, Micro-processor MCV, signal output module.
MEMS chip is embedded in gas flow inner wall, and with PCB circuit connection, PCB circuit is placed in circuit case, and with boat
Blind plug connection, gas flow is Venturi tube structure.
Aviation plug is used to be powered to PCB circuit and transmit with data.
PCB circuit integration heat source circuit, bridge circuit, signal adjustment circuit, microcontroller, communication module etc..It realizes
Reading, conversion and the transmission of MEMS chip data.
MEMS sensing chip integrates heat source unit and temperature measuring unit, heat source unit heat the gas medium flowed through,
Temperature measuring unit measures the temperature field locally redistributed, and carries out temperature compensation calibration to fluid measurement temperature.
MEMS sensing chip is measured the sampled analog value passed back in gas process and handled by signal processing module, by it
Control is passed to Micro-processor MCV in the input range of A/D converter, through A/D converter treated digital quantity.
Micro-processor MCV obtains instantaneous flow, integrated flow, temperature parameter by tabling look-up and calculating.
Signal output module is according to user equipment needs, output digit signals and analog signal.
MEMS chip is designed using solid construction, improves the impact resistance and shake-proof ability of chip, chip surface coating
High thermal conductivity material, and Passivation Treatment is carried out, chip and physical contact between media are avoided, its reliability is improved.
Gas flow uses Venturi tube structure, improves flow velocity by local contraction, forms front and back pressure difference, effective anti-blocking, larynx
The diameter of portion and caliber ratio is 0.75.
It is isolated between circuit case and gas flow shell using sealing structure, avoids influencing each other, shell and connector uses
Overall structure, flowmeter connector are attached using the form of screw thread or flange with front and back pipeline section, and connection procedure is without specific
Installation direction.
[embodiment 3]
A kind of thermal gas flowmeter, as shown in Fig. 2, outside including aviation plug, circuit case, PCB circuit, gas flow
Shell, MEMS hardware system, gas flow；As shown in Figure 1, MEMS hardware system include MEMS sensing chip, signal processing module,
A/D conversion module, Micro-processor MCV, signal output module.
MEMS chip is embedded in gas flow inner wall, and with PCB circuit connection, PCB circuit is placed in circuit case, and with boat
Blind plug connection, gas flow is Venturi tube structure.
Aviation plug is used to be powered to PCB circuit and transmit with data.
PCB circuit integration heat source circuit, bridge circuit, signal adjustment circuit, microcontroller, communication module etc..It realizes
Reading, conversion and the transmission of MEMS chip data.
MEMS sensing chip integrates heat source unit and temperature measuring unit, heat source unit heat the gas medium flowed through,
Temperature measuring unit measures the temperature field locally redistributed, and carries out temperature compensation calibration to fluid measurement temperature.
MEMS sensing chip is measured the sampled analog value passed back in gas process and handled by signal processing module, by it
Control is passed to Micro-processor MCV in the input range of A/D converter, through A/D converter treated digital quantity.
Micro-processor MCV obtains instantaneous flow, integrated flow, temperature parameter by tabling look-up and calculating.
Signal output module is according to user equipment needs, output digit signals and analog signal.
MEMS chip is designed using solid construction, improves the impact resistance and shake-proof ability of chip, chip surface coating
High thermal conductivity material, and Passivation Treatment is carried out, chip and physical contact between media are avoided, its reliability is improved.
Gas flow uses Venturi tube structure, improves flow velocity by local contraction, forms front and back pressure difference, effective anti-blocking, larynx
The diameter of portion and caliber ratio is 0.68.
It is isolated between circuit case and gas flow shell using sealing structure, avoids influencing each other, shell and connector uses
Overall structure, flowmeter connector are attached using the form of screw thread or flange with front and back pipeline section, and connection procedure is without specific
Installation direction.
[embodiment 4]
A kind of thermal gas flowmeter, as shown in Fig. 2, outside including aviation plug, circuit case, PCB circuit, gas flow
Shell, MEMS hardware system, gas flow；As shown in Figure 1, MEMS hardware system include MEMS sensing chip, signal processing module,
A/D conversion module, Micro-processor MCV, signal output module.
MEMS chip is embedded in gas flow inner wall, and with PCB circuit connection, PCB circuit is placed in circuit case, and with boat
Blind plug connection, gas flow is Venturi tube structure.
Aviation plug is used to be powered to PCB circuit and transmit with data.
PCB circuit integration heat source circuit, bridge circuit, signal adjustment circuit, microcontroller, communication module etc..It realizes
Reading, conversion and the transmission of MEMS chip data.
MEMS sensing chip integrates heat source unit and temperature measuring unit, heat source unit heat the gas medium flowed through,
Temperature measuring unit measures the temperature field locally redistributed, and carries out temperature compensation calibration to fluid measurement temperature.
MEMS sensing chip is measured the sampled analog value passed back in gas process and handled by signal processing module, by it
Control is passed to Micro-processor MCV in the input range of A/D converter, through A/D converter treated digital quantity.
Micro-processor MCV obtains instantaneous flow, integrated flow, temperature parameter by tabling look-up and calculating.
Signal output module is according to user equipment needs, output digit signals and analog signal.
MEMS chip is designed using solid construction, improves the impact resistance and shake-proof ability of chip, chip surface coating
High thermal conductivity material, and Passivation Treatment is carried out, chip and physical contact between media are avoided, its reliability is improved.
Gas flow uses Venturi tube structure, improves flow velocity by local contraction, forms front and back pressure difference, effective anti-blocking, larynx
The diameter of portion and caliber ratio is 0.7.
It is isolated between circuit case and gas flow shell using sealing structure, avoids influencing each other, shell and connector uses
Overall structure, flowmeter connector are attached using the form of screw thread or flange with front and back pipeline section, and connection procedure is without specific
Installation direction.
[embodiment 5]
Thermal gas flowmeter described in embodiment 1 is used for the measurement of gas station's oil recovery throughput,
When thermal gas flowmeter is applied to gas station oil gas recycling flow detection, it is series on gas circuit copper pipe, installation position
It sets between refueling line and oil-gas recovery vacuum pump, flowmeter is connect and sealed with gas circuit copper pipe by threaded sleeve.
When fuel charger refuels, the oil-gas recovery vacuum pump operating of gas circuit forms vacuum, refueling nozzle gas circuit valve in pump head side
Door is opened, and oil gas enters underground utilities through equipment such as refueling nozzle, refueling line, thermal gas flowmeter, vacuum pumps.
When gas flows through thermal gas flowmeter, the temperature measuring unit of MEMS chip measures fluid temperature (F.T.), heat source list
Member heats gas coming through, and is measured by temperature measuring unit to gas temperature after heating, and keeping heating front and back Δ T is perseverance
Definite value has taken away heat since gas flows through heat source unit, to have kept Δ T is constant just to need to compensate electrical power, the electrical power with
Gas mass flow is directly proportional, in prediction on such basis gas flow rate.
According to field measurement data, it is compared with proving flowmeter:
| Proving flowmeter m3/h | 2.46 | 3.49 | 5.50 | 5.83 |
| Thermal flowmeter m3/h | 2.52 | 3.42 | 5.56 | 5.77 |
| Error | 2.4% | - 2.0% | 1.1% | - 1.0% |
[comparative example]
The flowmeter for being currently used for petroleum vapor recovery gas dosing is usually Roots type flowmeter, and Roots type flowmeter is as a kind of body
Product formula flowmeter is fluid to be continuously divided by mechanical measurement unit single known volume fractiion, according to gradually
The number for being full of and discharging the partial volume carrys out measuring flow volume total amount.Its measuring principle determine Roots type flowmeter volume compared with
Greatly, heavier mass, installation needs to be fixed by the bracket in fuel charger.And it is mounted with that self priming pump, oil gas return in fuel charger at present
The equipment such as pump, metered flow meter, filter core are received, installation space is very narrow, and Roots type flowmeter can not pacify for the fuel charger of part
Dress.In addition Roots type flowmeter by waist wheel combine closely and rotation is measured, often inhaled in petroleum vapor recovery gas circuit copper pipe
Enter solid particle magazine, being blended in will cause the stuck of waist wheel in cold oil, block gas circuit.
Obviously, small in size, crushing is small, without blocking risk using thermal flowmeter of the present invention, it is suitable for petroleum vapor recovery field
Gasmetry, measurement precision is high, it is small to be influenced by installation operating condition, achieves preferable technical effect.
Claims (10)
1. a kind of thermal gas flowmeter, including aviation plug, circuit case, PCB circuit, gas flow shell, MEMS hardware
System, gas flow, MEMS hardware system include MEMS sensing chip, signal processing module, A/D conversion module, microprocessor
MCU, signal output module, MEMS chip are embedded in gas flow inner wall, and with PCB circuit connection, PCB circuit is placed in circuit case
It is interior, and connect with aviation plug, gas flow is Venturi tube structure.
2. thermal gas flowmeter according to claim 1, it is characterised in that aviation plug to PCB circuit for being powered
It is transmitted with data.
3. thermal gas flowmeter according to claim 1, it is characterised in that PCB circuit integration heat source circuit, bridge circuit,
Signal adjustment circuit, microcontroller, communication module etc..Realize reading, conversion and the transmission of MEMS chip data.
4. thermal gas flowmeter according to claim 1, it is characterised in that MEMS sensing chip integrates heat source unit and survey
Warm unit, heat source unit heat the gas medium flowed through, and temperature measuring unit surveys the temperature field locally redistributed
Amount, and temperature compensation calibration is carried out to fluid measurement temperature.
5. thermal gas flowmeter according to claim 1, it is characterised in that signal processing module surveys MEMS sensing chip
The sampled analog value passed back in amount gas process is handled, and is controlled in the input range of A/D converter, is turned through A/D
Parallel operation treated digital quantity is passed to Micro-processor MCV.
6. thermal gas flowmeter according to claim 1, it is characterised in that Micro-processor MCV is obtained by tabling look-up and calculating
To instantaneous flow, integrated flow, temperature parameter.
7. thermal gas flowmeter according to claim 1, it is characterised in that signal output module according to user equipment needs,
Output digit signals and analog signal.
8. thermal gas flowmeter according to claim 1, it is characterised in that MEMS chip is designed using solid construction, is improved
The impact resistance and shake-proof ability of chip, chip surface coats high thermal conductivity material, and carries out Passivation Treatment, avoids chip
With physical contact between media, its reliability is improved.
9. thermal gas flowmeter according to claim 1, it is characterised in that gas flow uses Venturi tube structure, passes through office
Portion, which is shunk, improves flow velocity, forms front and back pressure difference, and effectively anti-blocking, the diameter ratio of throat and caliber is 0.65-0.75；Circuit case with
It is isolated between gas flow shell using sealing structure, avoids influencing each other, shell and connector uses overall structure, flowmeter connector
It is attached using the form of screw thread or flange and front and back pipeline section, connection procedure is not necessarily to specific installation direction.
10. a kind of application of claim 1~9 thermal gas flowmeter, in gas flow measurement.
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| CN201810428315.4A CN110455361A (en) | 2018-05-07 | 2018-05-07 | Thermal gas flowmeter and its application |
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| CN201810428315.4A CN110455361A (en) | 2018-05-07 | 2018-05-07 | Thermal gas flowmeter and its application |
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Cited By (3)
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| CN111795730A (en) * | 2020-07-29 | 2020-10-20 | 矽翔微机电(杭州)有限公司 | Gas thermal mass flowmeter |
| CN114754834A (en) * | 2022-05-24 | 2022-07-15 | 华侨大学 | Constant-power thermal liquid mass flowmeter |
| CN114754834B (en) * | 2022-05-24 | 2024-07-02 | 华侨大学 | Constant-power thermal liquid mass flowmeter |
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