CN110449401A - A kind of etch cleaning machine - Google Patents
A kind of etch cleaning machine Download PDFInfo
- Publication number
- CN110449401A CN110449401A CN201910854255.7A CN201910854255A CN110449401A CN 110449401 A CN110449401 A CN 110449401A CN 201910854255 A CN201910854255 A CN 201910854255A CN 110449401 A CN110449401 A CN 110449401A
- Authority
- CN
- China
- Prior art keywords
- wall
- pond
- cleaning machine
- link block
- etch cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 47
- 238000005530 etching Methods 0.000 claims abstract description 27
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 abstract description 5
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 27
- 238000010586 diagram Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000000505 pernicious effect Effects 0.000 description 2
- 230000005526 G1 to G0 transition Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
Abstract
The invention discloses a kind of etch cleaning machines, belong to etch cleaning machine technical field.A kind of etch cleaning machine, including fixed frame, the inner wall of the fixed frame has been respectively fixedly connected with the first pond and the second pond, the output end of the first motor is connected with driving gear by rotation axis, the outer wall of the rotation axis is also rotatably connected to link block, the outer wall of the link block is connected with connecting plate, the connecting plate is equipped with shrinkage pool, the driven gear being meshed with driving gear is rotatably connected in the shrinkage pool, the connecting plate is connected with baffle by ring flange far from one end of link block, the baffle inner wall is connected with gag lever post, etching product ontology is connected on the gag lever post, the output end of second motor is fixedly linked with link block；The present invention can make the cleaning effect of etching product more preferable, and reduce artificial waste and labor intensity, improve safety and working efficiency.
Description
Technical field
The present invention relates to etch cleaning machine technical field more particularly to a kind of etch cleaning machines.
Background technique
Etching product can remain the impurity such as ink, water stain and chemical reagent after the etch is completed, on surface, if not in time
And thoroughly wash, it will cause discoloration, the corrosion of etching product, seriously affect the quality of etching product, it is traditional, in etching product erosion
It is usually all directly manually to launch etching product in service sink to clean after the completion of quarter, it again will etching after the completion of to be cleaned
Product manually take out, and have both caused artificial waste, and safety is poor, and cleaning effect is bad, therefore, a kind of etch cleaning machine
It is extremely important.
Summary of the invention
The purpose of the present invention is to solve problems of the prior art, and a kind of etch cleaning machine proposed.
To achieve the goals above, present invention employs following technical solutions:
A kind of etch cleaning machine, including fixed frame, the inner wall of the fixed frame have been respectively fixedly connected with the first pond and
The two sides outer wall in two ponds, first pond and the second pond is connected separately with first motor and the second motor, and described first
The output end of motor is connected with driving gear by rotation axis, and the outer wall of the rotation axis is also rotatably connected to link block, described
The outer wall of link block is connected with connecting plate, and the connecting plate is equipped with shrinkage pool, is rotatably connected in the shrinkage pool and driving gear
The driven gear being meshed, the one end of the connecting plate far from link block are connected with baffle, the baffle inner wall by ring flange
It is connected with gag lever post, etching product ontology, the output end and link block stationary phase of second motor are connected on the gag lever post
Even.
Preferably, the shrinkage pool is equipped with 4-8, and is rotatably connected to connecting shaft in each shrinkage pool, described driven
Gear is fixedly connected on the outer wall of connecting shaft, and the outer wall of the connecting shaft is also connected with limit plate.
Preferably, the outer wall of the connecting plate is equipped with circular hole, and the ring flange is connected in circular hole by fixing axle, described
Gag lever post is connected with baffle by screw.
Preferably, the outer wall of the gag lever post is equipped with arc groove, and the etching product ontology is connected in arc groove, and described
Circular Plate is also connected in gag lever post.
Preferably, it is connected with the first connector at the top of first pond and the second pond, first connector
Roof has been bolted to connection the second connector, and the outer wall of second connector is connected with speed reducer, the speed reducer
It is connected to the output end of first motor, the bottom in first pond and the second pond is respectively connected with outlet pipe, and described first
The groove matched with connecting plate is equipped on pond and the second pond.
Preferably, first sleeve is connected between the second connector and link block, the driving gear is connected to first set
In cylinder, the inner wall of the link block is also connected with second sleeve.
Preferably, the outer wall of the fixed frame is connected with fixed plate, window is equipped in the fixed plate, and described solid
The outer wall of fixed board is also connected with observation platform.
Compared with prior art, the present invention provides a kind of etch cleaning machine, have it is following the utility model has the advantages that
1, the etch cleaning machine makes to etch in use, etching product ontology is placed in the arc groove on gag lever post first
Gag lever post and baffle, are then connected by screw to by product ontology stable connection, baffle and connecting plate can be made convenient by ring flange
Disassembly, is then injected separately into cleaning solution and clear water into the first pond and the second pond respectively, is firstly placed to etching product ontology
Cleaning, then starts first motor in cleaning solution, accelerates first motor by speed reducer, to drive the driving tooth of output end
Wheel rotation, driving gear then will drive the driven gear rotation being engaged with, so that it is driven flapper, to make on gag lever post
Etching product ontology high speed rotation, so that the ink for etching product body outer wall and other chemical reagent be washed, and connect
Plate, which is equipped with multiple shrinkage pools, matches it from different driven gears so as to be connected to ring flange in different shrinkage pools,
To facilitate the height of regulating fender, after the completion of cleaning, starting the second motor, the second motor can then transfer link block rotation, from
And turned to baffle and etching product ontology in the first pond by connecting plate, then start first motor, makes etching product ontology
High speed rotation is rinsed the etching remaining impurity of product body outer wall using clear water, to keep cleaning effect more preferable, and passes through
Outlet pipe can facilitate, and water flow and cleaning solution are discharged, and the outer wall of fixed frame is equipped with fixed plate, and user can be by fixed plate
Window and observation platform observation cleaning situation, avoid in cleaning process generate pernicious gas cause damages to staff.
It is not directed to part in the device to be the same as those in the prior art or can be realized by using the prior art, the present invention can make
The cleaning effect of etching product is more preferable, and reduces artificial waste and labor intensity, improves safety and working efficiency.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram one of etch cleaning machine entirety proposed by the present invention；
Fig. 2 is a kind of structural schematic diagram two of etch cleaning machine entirety proposed by the present invention；
Fig. 3 is a kind of structural schematic diagram of etch cleaning motor spindle proposed by the present invention；
Fig. 4 is a kind of structural schematic diagram one in the first pond of etch cleaning machine and the second pond proposed by the present invention；
Fig. 5 is a kind of structural schematic diagram two in the first pond of etch cleaning machine and the second pond proposed by the present invention；
Fig. 6 is the structural schematic diagram inside a kind of etch cleaning machine proposed by the present invention；
Fig. 7 is a kind of structural schematic diagram of etch cleaning machine connecting plate proposed by the present invention；
Fig. 8 is a kind of structural schematic diagram of etch cleaning machine driven gear proposed by the present invention.
In figure: 1, fixed frame；101, fixed plate；102, window；103, observation platform；2, the first pond；201, groove；3,
Second pond；4, outlet pipe；5, the first connector；501, the second connector；502, first sleeve；503, second sleeve；504,
Link block；505, connecting plate；5051, shrinkage pool；5052, driven gear；5053, connecting shaft；5054, limit plate；506, driving tooth
Wheel；6, first motor；601, speed reducer；7, baffle；701, Circular Plate；702, gag lever post；703, ring flange；704, product sheet is etched
Body.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.
In the description of the present invention, it is to be understood that, term " on ", "lower", "front", "rear", "left", "right", "top",
The orientation or positional relationship of the instructions such as "bottom", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, merely to just
In description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with
Specific orientation construction and operation, therefore be not considered as limiting the invention.
Referring to Fig.1-8, a kind of etch cleaning machine, including fixed frame 1, the inner wall of fixed frame 1 have been respectively fixedly connected with first
The two sides outer wall in pond 2 and the second pond 3, the first pond 2 and the second pond 3 is connected separately with first motor 6 and the second motor,
The output end of first motor 6 is connected with driving gear 506 by rotation axis, and the outer wall of rotation axis is also rotatably connected to link block
504, the outer wall of link block 504 is connected with connecting plate 505, and connecting plate 505 is equipped with shrinkage pool 5051, rotation connection in shrinkage pool 5051
There is the driven gear 5052 being meshed with driving gear 506, connecting plate 505 passes through ring flange 703 far from one end of link block 504
It is connected with baffle 7,7 inner wall of baffle is connected with gag lever post 702, and etching product ontology 704, the second motor are connected on gag lever post 702
Output end be fixedly linked with link block 504.
Shrinkage pool 5051 is equipped with 4-8, and connecting shaft 5053 is rotatably connected in each shrinkage pool 5051, driven gear 5052
It is fixedly connected on the outer wall of connecting shaft 5053, and the outer wall of connecting shaft 5053 is also connected with limit plate 5054.
The outer wall of connecting plate 505 is equipped with circular hole, and ring flange 703 is connected in circular hole by fixing axle, gag lever post 702 and gear
Plate 7 is connected by screw.
The outer wall of gag lever post 702 is equipped with arc groove, and etching product ontology 704 is connected in arc groove, and in gag lever post 702 also
It is connected with Circular Plate 701.
The top in the first pond 2 and the second pond 3 is connected with the first connector 5, and the roof of the first connector 5 passes through bolt
It is fixedly connected with the second connector 501, the outer wall of the second connector 501 is connected with speed reducer 601, and speed reducer 601 is connected to
The bottom in the output end of one motor 6, the first pond 2 and the second pond 3 is respectively connected with outlet pipe 4, and the first pond 2 and the second water
The groove 201 matched with connecting plate 505 is equipped on pond 3.
First sleeve 502 is connected between second connector 501 and link block 504, driving gear 506 is connected to first set
In cylinder 502, the inner wall of link block 504 is also connected with second sleeve 503.
The outer wall of fixed frame 1 is connected with fixed plate 101, is equipped with window 102 in fixed plate 101, and fixed plate 101
Outer wall is also connected with observation platform 103.
In the present invention, in use, etching product ontology 704 is placed in the arc groove on gag lever post 702 first, make to etch
Gag lever post 702 and baffle 7, are then connected by screw to by 704 stable connection of product ontology, by ring flange 703 can make baffle 7 with
Connecting plate 505 is easy to disassemble, is then injected separately into cleaning solution and clear water into the first pond 2 and the second pond 3 respectively, makes to etch
Product ontology 704 is firstly placed to cleaning in cleaning solution, then starts first motor 6, accelerates first motor 6 by speed reducer 601,
To drive the driving gear 506 of output end to rotate, driving gear 506 then will drive 5052 turns of driven gear be engaged with
It is dynamic, make it that baffle 7 be driven to rotate, to make 704 high speed rotation of etching product ontology on gag lever post 702, so that product sheet will be etched
The ink of 704 outer wall of body and other chemical reagent wash, and connecting plate 505 is equipped with multiple shrinkage pools 5051, so as to make
Ring flange 703 is connected in different shrinkage pools 5051, matches it from different driven gears 5052, so that adjustment be facilitated to keep off
The height of plate 7 after the completion of cleaning, starts the second motor, the second motor can then transfer the rotation of link block 504, to pass through connection
Plate 505 turns to baffle 7 and etching product ontology 704 in first pond 2, then starts first motor 6, makes etching product ontology
704 high speed rotations are rinsed the etching remaining impurity of 704 outer wall of product ontology using clear water, thus keep cleaning effect more preferable,
And can be facilitated by outlet pipe 4 and water flow and cleaning solution are discharged, and the outer wall of fixed frame 1 is equipped with fixed plate 101, user can lead to
The window 102 and the observation cleaning situation of observation platform 103 in fixed plate 101 are crossed, avoids generating pernicious gas pair in cleaning process
Staff causes damages.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (7)
1. a kind of etch cleaning machine, including fixed frame (1), which is characterized in that the inner wall of the fixed frame (1) is respectively fixedly connected with
There are the first pond (2) and the second pond (3), the two sides outer wall of first pond (2) and the second pond (3) is connected separately with
The output end of one motor (6) and the second motor, the first motor (6) is connected with driving gear (506) by rotation axis, described
The outer wall of rotation axis is also rotatably connected to link block (504), and the outer wall of the link block (504) is connected with connecting plate (505), institute
Connecting plate (505) are stated equipped with shrinkage pool (5051), interior be rotatably connected to of the shrinkage pool (5051) is meshed with driving gear (506)
Driven gear (5052), the one end of the connecting plate (505) far from link block (504) is connected with gear by ring flange (703)
Plate (7), baffle (7) inner wall are connected with gag lever post (702), are connected with etching product ontology on the gag lever post (702)
(704), the output end of second motor is fixedly linked with link block (504).
2. a kind of etch cleaning machine according to claim 1, which is characterized in that the shrinkage pool (5051) is a equipped with 4-8, and
It is rotatably connected to connecting shaft (5053) in each shrinkage pool (5051), the driven gear (5052) is fixedly connected on connection
The outer wall of axis (5053), and the outer wall of the connecting shaft (5053) is also connected with limit plate (5054).
3. a kind of etch cleaning machine according to claim 2, which is characterized in that the outer wall of the connecting plate (505) is equipped with
Circular hole, the ring flange (703) are connected in circular hole by fixing axle, and the gag lever post (702) passes through screw phase with baffle (7)
Even.
4. a kind of etch cleaning machine according to claim 3, which is characterized in that the outer wall of the gag lever post (702) is equipped with
Arc groove, the etching product ontology (704) are connected in arc groove, and are also connected with Circular Plate in the gag lever post (702)
(701)。
5. a kind of etch cleaning machine according to claim 1, which is characterized in that first pond (2) and the second pond
(3) it is connected at the top of the first connector (5), the roof of first connector (5) has been bolted to connection the second company
The outer wall of fitting (501), second connector (501) is connected with speed reducer (601), and the speed reducer (601) is connected to
The bottom of the output end of one motor (6), first pond (2) and the second pond (3) is respectively connected with outlet pipe (4), and described
The groove (201) matched with connecting plate (505) is equipped on first pond (2) and the second pond (3).
6. a kind of etch cleaning machine according to claim 5, which is characterized in that the second connector (501) and link block
(504) it is connected between first sleeve (502), the driving gear (506) is connected in first sleeve (502), the connection
The inner wall of block (504) is also connected with second sleeve (503).
7. a kind of etch cleaning machine according to claim 5, which is characterized in that the outer wall of the fixed frame (1) is connected with
Fixed plate (101) is equipped with window (102) on the fixed plate (101), and the outer wall of the fixed plate (101) is also connected with
There are observation platform (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910854255.7A CN110449401A (en) | 2019-09-10 | 2019-09-10 | A kind of etch cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910854255.7A CN110449401A (en) | 2019-09-10 | 2019-09-10 | A kind of etch cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110449401A true CN110449401A (en) | 2019-11-15 |
Family
ID=68491534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910854255.7A Pending CN110449401A (en) | 2019-09-10 | 2019-09-10 | A kind of etch cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110449401A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326475A (en) * | 1992-05-15 | 1993-12-10 | Nippon Steel Corp | Wafer holder for cleaning and etching |
| KR19990020234U (en) * | 1997-11-25 | 1999-06-15 | 구본준 | Semiconductor Wafer Cleaning Equipment |
| JP2003068697A (en) * | 2001-08-22 | 2003-03-07 | Sony Corp | Automatic substrate-cleaning apparatus |
| KR100687296B1 (en) * | 2005-12-27 | 2007-02-27 | 한국기계연구원 | Rotation type wafer carrier and cleaning apparatus with the same |
| CN103834948A (en) * | 2014-03-08 | 2014-06-04 | 山东高唐杰盛半导体科技有限公司 | Double-tank groove etching machine |
| KR20180060059A (en) * | 2016-11-28 | 2018-06-07 | 에스케이실트론 주식회사 | Apparatus for wafer cleaning |
| CN210546682U (en) * | 2019-09-10 | 2020-05-19 | 徐松 | Etching cleaning machine |
-
2019
- 2019-09-10 CN CN201910854255.7A patent/CN110449401A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326475A (en) * | 1992-05-15 | 1993-12-10 | Nippon Steel Corp | Wafer holder for cleaning and etching |
| KR19990020234U (en) * | 1997-11-25 | 1999-06-15 | 구본준 | Semiconductor Wafer Cleaning Equipment |
| JP2003068697A (en) * | 2001-08-22 | 2003-03-07 | Sony Corp | Automatic substrate-cleaning apparatus |
| KR100687296B1 (en) * | 2005-12-27 | 2007-02-27 | 한국기계연구원 | Rotation type wafer carrier and cleaning apparatus with the same |
| CN103834948A (en) * | 2014-03-08 | 2014-06-04 | 山东高唐杰盛半导体科技有限公司 | Double-tank groove etching machine |
| KR20180060059A (en) * | 2016-11-28 | 2018-06-07 | 에스케이실트론 주식회사 | Apparatus for wafer cleaning |
| CN210546682U (en) * | 2019-09-10 | 2020-05-19 | 徐松 | Etching cleaning machine |
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