CN110439334A - A kind of clean room - Google Patents

A kind of clean room Download PDF

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Publication number
CN110439334A
CN110439334A CN201910745928.5A CN201910745928A CN110439334A CN 110439334 A CN110439334 A CN 110439334A CN 201910745928 A CN201910745928 A CN 201910745928A CN 110439334 A CN110439334 A CN 110439334A
Authority
CN
China
Prior art keywords
fresh air
air
workshop
area
computer room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910745928.5A
Other languages
Chinese (zh)
Inventor
阎冬
肖红梅
李鹏
王威
王江标
李拨
张颖
金爽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SY Technology Engineering and Construction Co Ltd
Original Assignee
SY Technology Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SY Technology Engineering and Construction Co Ltd filed Critical SY Technology Engineering and Construction Co Ltd
Priority to CN201910745928.5A priority Critical patent/CN110439334A/en
Publication of CN110439334A publication Critical patent/CN110439334A/en
Pending legal-status Critical Current

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Classifications

    • EFIXED CONSTRUCTIONS
    • E04BUILDING
    • E04HBUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H1/00Buildings or groups of buildings for dwelling or office purposes; General layout, e.g. modular co-ordination or staggered storeys
    • E04H1/12Small buildings or other erections for limited occupation, erected in the open air or arranged in buildings, e.g. kiosks, waiting shelters for bus stops or for filling stations, roofs for railway platforms, watchmen's huts or dressing cubicles
    • E04H1/1277Shelters for decontamination
    • EFIXED CONSTRUCTIONS
    • E04BUILDING
    • E04HBUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00Buildings or groups of buildings for industrial or agricultural purposes
    • E04H5/02Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02Ducting arrangements
    • F24F13/0227Ducting arrangements using parts of the building, e.g. air ducts inside the floor, walls or ceiling of a building
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00Ventilation
    • F24F7/04Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/08Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with separate ducts for supplied and exhausted air with provisions for reversal of the input and output systems

Abstract

The present invention relates to cleaning production technology fields, disclose a kind of clean room, the clean room includes workshop ontology, fresh air conditioner computer room is equipped in the structural elements space in workshop bodies top region, and one or more fresh air handining unit is equipped in fresh air conditioner computer room, fresh air handining unit is used to provide fresh air for clean chamber region;Workshop ontology is equipped with fresh air inlet, and fresh air inlet is connected to fresh air conditioner computer room.In above-described embodiment, by fresh air conditioner computer room being arranged in the structural elements space of workshop bodies top, to support area to save a large amount of available spaces, and, when fresh air handining unit is that core toilet blows, air supply pipeline is without pass through core clean area and supports the firewall between area, and air-line system is simple, and system resistance is small.

Description

A kind of clean room
Technical field
The present invention relates to cleaning production technology field more particularly to a kind of clean rooms.
Background technique
Semiconductor production, flat-panel monitor production, opto-electronic device production of electronics industry etc. require to use clean life Environment is produced, fan filter unit+dry calibration coil pipe+fresh air handining unit air cleaning and conditioning system is generallyd use, wherein is new Wind air-conditioner set provides the air by filtering, temperature and humidity processing into toilet, controls indoor relative humidity and supplement work The air draft of skill equipment and positive pressure air quantity.
The prior art, which generallys use, arranges fresh air handining unit in the support area of toilet's unilateral or bilateral, needs supporting The fresh air conditioner computer room of large area is arranged in area, thereby increases the area for supporting area, and occupies and support area largely available Space.
Summary of the invention
The present invention provides a kind of clean room, to solve fresh air conditioner computer room in the prior art occupy support area it is a large amount of The problem of available space.
The embodiment of the invention provides a kind of clean room, which includes workshop ontology, workshop ontology top It is equipped with fresh air conditioner computer room in the structural elements space in portion region, and is equipped with one or more fresh air in the fresh air conditioner computer room Air-conditioner set, the fresh air handining unit are used to provide fresh air for the intrinsic clean chamber region of the workshop;
The workshop ontology is equipped with fresh air inlet, and the fresh air inlet is connected to the fresh air conditioner computer room.
In above-described embodiment, on the one hand, empty by the structural elements that fresh air handining unit is arranged in workshop bodies top In, so as to avoid in the fresh air conditioner computer room of the support area of clean room setting large area, area is being supported to save greatly Measure available space;On the other hand, the space of workshop bodies top is taken full advantage of, also, when fresh air handining unit is core When heart toilet blows, air supply pipeline is without pass through core clean area and supports the firewall between area, and air-line system is simple, System resistance is small.
Optionally, the structural elements is steel roof truss, girder steel or beams of concrete.
Optionally, the fresh air inlet is located on the top roofing of the workshop ontology, and is equipped at the fresh air inlet New air compartment, the wall of the new air compartment are equipped with Rainproof louver window, are equipped with stormproof louvre in the Rainproof louver window.Stormproof louvre It can either guarantee the requirement of ventilation, meanwhile, and can effectively prevent rainwater and enter the room.
Optionally, core toilet is equipped in the workshop ontology, the fresh air handining unit will be new by air supply pipeline Wind is sent to the air-supply region of the core toilet.Air supply pipeline is without pass through core clean area and supports the fire prevention between area Wall, air-line system is simple, and system resistance is small.
It optionally, further include air-supply even case, and each fresh air handining unit is connected to the air-supply even case, the fresh air is empty The fresh air for adjusting unit to provide collects and is transported to by air supply pipeline the air-supply of the core toilet in the air-supply even case Region.
Optionally, it is equipped in the workshop ontology and supports area, be equipped with end bay toilet in the support area.Fresh air air conditioner for machine Room is after supporting area to move into the structural elements space in workshop bodies top region, to support area to save a large amount of available skies Between, then the area that end bay toilet expands clear production area is set in support area, improves the effective rate of utilization of workshop.
Detailed description of the invention
Fig. 1 is the organigram of clean room provided in an embodiment of the present invention.
Appended drawing reference:
Interlayer on 10- core toilet 101-
Interlayer 103- return air passageway under 102-
20- assists station 30- steel roof truss
40- fresh air conditioner computer room 50- fresh air handining unit
The new air compartment 70- end bay toilet 60-
80- air supply pipeline
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention is made into one with reference to the accompanying drawing Step describes in detail, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments. Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts all Other embodiments shall fall within the protection scope of the present invention.
The embodiment of the invention provides a kind of clean rooms, by being arranged fresh air conditioner computer room in workshop bodies top area In the structural elements space in domain, thus supporting area to save a large amount of available spaces.
Specifically, the clean room includes workshop ontology, it is equipped in the structural elements space in workshop bodies top region new Wind Air Conditioning Facilities, and one or more fresh air handining unit is equipped in fresh air conditioner computer room, fresh air handining unit is used to be workshop Intrinsic cleaning chamber region provides fresh air;
Workshop ontology is equipped with fresh air inlet, and fresh air inlet is connected to fresh air conditioner computer room.
In above-described embodiment, on the one hand, by the way that fresh air handining unit is arranged in structural elements space, so as to avoid In the fresh air conditioner computer room of the support area of clean room setting large area, area is being supported to save a large amount of available spaces;Separately On the one hand, the space of workshop bodies top is taken full advantage of, also, when fresh air handining unit is that core toilet blows, is sent Air pipe line is without pass through core clean area and supports the firewall between area, and air-line system is simple, and system resistance is small.
In order to more be apparent from the structure of clean room provided in an embodiment of the present invention, carried out now in conjunction with attached drawing detailed Description.
As shown in Figure 1, the clean room includes workshop ontology, it is equipped in workshop ontology and supports area and clear production area, Wherein, support that being equipped with substation, gas station etc. in area assists station 20, for providing power and auxiliary branch for clear production area It holds;Toilet is equipped in clear production area, the storage and processing etc. of toilet for workpiece to be added operate, therefore in the space Cleaniliness classs it is more demanding;It is additionally provided with fresh air conditioner computer room 40 in the workshop ontology, is equipped with one in fresh air conditioner computer room 40 Platform or more fresh air handining units 50, air delivery of the fresh air handining unit 50 for will be handled by filtering, temperature and humidity to factory The intrinsic clean chamber region in room.The prior art, which is generallyd use, is arranged in the auxiliary station supported in area for fresh air conditioner computer room 40 On 20, the area for being located at and supporting the non-process production area in area is increased in this way, occupies a large amount of available spaces, this reality It applies in example, in order to overcome the above problems, as shown in Figure 1, fresh air conditioner computer room 40 is disposed in workshop bodies top region Structural elements space in, and on workshop ontology be equipped with fresh air inlet, be connected to fresh air inlet with fresh air conditioner computer room 40, factory Sheet external air in room is entered in fresh air conditioner computer room 40 by fresh air inlet, is sent to after the processing of fresh air handining unit 50 Clean area.In this way, by being arranged fresh air conditioner computer room 40 in structural elements space, on the one hand, reduce to be located at and support The area of non-process production area in area, and area is being supported to save a large amount of available spaces and on the other hand make full use of The space of workshop bodies top, also, after fresh air conditioner computer room 40 is arranged in structural elements space, reduce technology The roofing area of interlayer 101, reduces roofing inleakage, is conducive to relative humidity control and energy conservation in workshop.
When specific setting, structural elements can be steel roof truss, girder steel or beams of concrete, or, or other can be with Place the bearing structure of fresh air conditioner computer room 40.In a specific embodiment, as shown in Figure 1, structural elements is that setting exists The steel roof truss 30 of workshop bodies top, fresh air conditioner computer room 40 are arranged in steel roof truss 30, make the inside of steel roof truss 30 empty in this way Between be fully used, improve utilization rate;Also, it is provided with access path in steel roof truss 30, in order to fresh air air conditioner for machine The equipment such as group 50 being moved in and overhauling.
It continues to refer to figure 1, fresh air inlet is located on the top roofing of workshop ontology, so as to avoid in the wall of workshop ontology It punches on face and influences elevation of building beauty;Also, new air compartment 60 is equipped at fresh air inlet, new air compartment 60 includes being arranged in surrounding Wall and roof with wall cooperation, the wall of new air compartment 60 be equipped with Rainproof louver window, be equipped in Rainproof louver window anti- Rain blinds, stormproof louvre can either guarantee the requirement of ventilation, meanwhile, and can effectively prevent rainwater and enter the room.
Core toilet 10 is equipped in workshop ontology, and be equipped be located at 10 top of core toilet upper interlayer 101, Lower interlayer 102 positioned at 10 bottom of core toilet and the two sides positioned at core toilet 10 are simultaneously connected to upper interlayer 101 and lower interlayer 102 return air passageway 103;The fresh air volume of core cleaning chamber region is big, and by fresh air conditioner computer room 40 After being arranged in steel roof truss 30, air supply pipeline can directly be extended to the blow zones of core toilet 10 by fresh air conditioner computer room 40 Domain shortens the length of air supply pipeline, also, since air supply pipeline is anti-between area and core clean area without pass through supporting Wall with flues, therefore, it is not necessary to fire resisting damper be installed in air supply pipeline, to reduce the resistance of pipeline.Specifically, fresh air handining unit 50 provide fresh airs can be transported to by air supply pipeline in upper interlayer 101, in upper interlayer 101, fresh air with follow Ring air-flow is arranged on the sucking of the fan filter unit on 10 furred ceiling of core toilet after being mixed, after being filtered, being pressurizeed It is sent into core toilet 10;Alternatively, the fresh air that fresh air handining unit 50 provides can be transported to return air folder by air supply pipeline In road 103, as shown in Figure 1, to be transported to core clean by left and right two-way air supply pipeline 80 for the fresh air that provides of fresh air handining unit 50 In the return air passageway 103 of 10 two sides of clean room, in every side return air passageway 103, fresh air and the circulation from lower interlayer 102 Air-flow is mixed, and mixed airflow, which continues up, to be flowed into interlayer 101, in upper interlayer 101, gaseous mixture Stream is arranged on the sucking of the fan filter unit on 10 furred ceiling of core toilet, and core toilet is sent into after being filtered, being pressurizeed In 10.
It further, further include air-supply even case, and each fresh air handining unit 50 is connected to air-supply even case, fresh air air conditioner for machine The fresh air that group 50 provides collects and is transported to by air supply pipeline the air-supply region of core toilet 10 in air-supply even case.Specifically When setting, air-supply even case can be arranged in steel roof truss 30, also can be set on the furred ceiling of core toilet 10.
In addition, reducing and supporting in area after fresh air conditioner computer room 40 is arranged in the intrinsic steel roof truss 30 of workshop Construction area has saved initial cost;Alternatively, since fresh air conditioner computer room 40 is being supported to save a large amount of available skies in area Between, then end bay toilet 70 can be set in space in this section, as shown in Figure 1, end bay toilet 70 is located at auxiliary station 20 On, fresh air can be transported to the air-supply region of end bay toilet by fresh air handining unit 50 by air supply pipeline.End bay toilet 70 take full advantage of this segment space for supporting to be saved in area by fresh air conditioner computer room 40, expand and carry out the clean of technique production The area in net area, improves the effective rate of utilization of workshop.
By above description as can be seen that in the embodiment of the present invention, by being arranged fresh air conditioner computer room in workshop ontology In the structural elements space at top, thus supporting area to save a large amount of available spaces, also, work as fresh air handining unit When blowing for core toilet, air supply pipeline is without pass through core clean area and supports the firewall between area, air-line system Simply, system resistance is small.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies Within, then the present invention is also intended to include these modifications and variations.

Claims (6)

1. a kind of clean room, which is characterized in that including workshop ontology, the structural elements space in workshop bodies top region It is interior to be equipped with fresh air conditioner computer room, and one or more fresh air handining unit is equipped in the fresh air conditioner computer room, the fresh air is empty It adjusts unit to be used for and provides fresh air for the intrinsic clean chamber region of the workshop;
The workshop ontology is equipped with fresh air inlet, and the fresh air inlet is connected to the fresh air conditioner computer room.
2. clean room as described in claim 1, which is characterized in that the structural elements is steel roof truss, girder steel or concrete Beam.
3. clean room as described in claim 1, which is characterized in that the fresh air inlet is located at the top of the workshop ontology On roofing, and new air compartment is equipped at the fresh air inlet, the wall of the new air compartment is equipped with Rainproof louver window, the rain-proof hundred Stormproof louvre is equipped in leaf window.
4. clean room as described in claim 1, which is characterized in that core toilet is equipped in the workshop ontology, it is described Fresh air handining unit is sent fresh air to the air-supply region of the core toilet by air supply pipeline.
5. clean room as claimed in claim 4, which is characterized in that further include air-supply even case, and each fresh air handining unit It is connected to the air-supply even case, the fresh air that the fresh air handining unit provides is collected in the air-supply even case and passes through air supply tube Road is transported to the air-supply region of the core toilet.
6. clean room as described in claim 1, which is characterized in that be equipped in the workshop ontology and support area, the support End bay toilet is equipped in area.
CN201910745928.5A 2019-08-13 2019-08-13 A kind of clean room Pending CN110439334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910745928.5A CN110439334A (en) 2019-08-13 2019-08-13 A kind of clean room

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Application Number Priority Date Filing Date Title
CN201910745928.5A CN110439334A (en) 2019-08-13 2019-08-13 A kind of clean room

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113606689A (en) * 2020-04-16 2021-11-05 株式会社青木房屋企画公司 Pressurization type heat exchange ventilation type house

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5752985A (en) * 1996-09-24 1998-05-19 Mitsubishi Denki Kabushiki Kaisha Clean room having an air conditioning system
JP2002147812A (en) * 2000-11-10 2002-05-22 Sanki Eng Co Ltd Air-conditioning system for cleanroom
CN1731032A (en) * 2005-08-22 2006-02-08 无锡华润微电子有限公司 Flow pattern of air conditioning and purifying system in cleaning room
CN204006436U (en) * 2014-06-26 2014-12-10 江阴江化微电子材料股份有限公司 Cleaning shop
CN208042332U (en) * 2018-03-21 2018-11-02 上海奥宣净化科技有限公司 Cleaning shop and electronic workshop system of processing
CN210713996U (en) * 2019-08-13 2020-06-09 世源科技工程有限公司 Clean factory building

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5752985A (en) * 1996-09-24 1998-05-19 Mitsubishi Denki Kabushiki Kaisha Clean room having an air conditioning system
JP2002147812A (en) * 2000-11-10 2002-05-22 Sanki Eng Co Ltd Air-conditioning system for cleanroom
CN1731032A (en) * 2005-08-22 2006-02-08 无锡华润微电子有限公司 Flow pattern of air conditioning and purifying system in cleaning room
CN204006436U (en) * 2014-06-26 2014-12-10 江阴江化微电子材料股份有限公司 Cleaning shop
CN208042332U (en) * 2018-03-21 2018-11-02 上海奥宣净化科技有限公司 Cleaning shop and electronic workshop system of processing
CN210713996U (en) * 2019-08-13 2020-06-09 世源科技工程有限公司 Clean factory building

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113606689A (en) * 2020-04-16 2021-11-05 株式会社青木房屋企画公司 Pressurization type heat exchange ventilation type house

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