CN110408931A - A kind of thermal barrier coating and preparation method thereof with the long-life - Google Patents

A kind of thermal barrier coating and preparation method thereof with the long-life Download PDF

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Publication number
CN110408931A
CN110408931A CN201910821322.5A CN201910821322A CN110408931A CN 110408931 A CN110408931 A CN 110408931A CN 201910821322 A CN201910821322 A CN 201910821322A CN 110408931 A CN110408931 A CN 110408931A
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layer
adhesive layer
layers
matrix
thermal barrier
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CN201910821322.5A
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CN110408931B (en
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王东生
周杏花
朱坤锋
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Tongling University
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Tongling University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/073—Metallic material containing MCrAl or MCrAlY alloys, where M is nickel, cobalt or iron, with or without non-metal elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C23C14/5813—Thermal treatment using lasers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/08—Metallic material containing only metal elements
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18—After-treatment
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    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/024—Anodisation under pulsed or modulated current or potential
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    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
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    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/026—Anodisation with spark discharge
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    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
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    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electrochemistry (AREA)
  • Ceramic Engineering (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Thermal Sciences (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

The present invention relates to a kind of thermal barrier coating and preparation method thereof with the long-life, adhesive layer and ceramic topcoats including being set to matrix surface, diffusion barrier layer is additionally provided between the adhesive layer and matrix, the diffusion barrier layer is Zr layers/ZrN layers diffusion barrier layer being superimposed, and the surface that the diffusion barrier layer is contacted with matrix and adhesive layer is Zr layers；The ceramic topcoats and the adhesive layer time are additionally provided with pre-oxidation layer, and the pre-oxidation layer is continuous fine and close α-Al2O3Layer.The present invention prepares multilayer diffusion barrier layer and α-Al in two interfaces of double-layer structure thermal barrier coating matrix/adhesive layer and adhesive layer/ceramic topcoats respectively2O3Layer is pre-oxidized, can effectively slow down matrix/tie-layer interface metallic element counterdiffusion and adhesive layer/ceramic topcoats interface TGO speed of growth during high-temperature service, to improve the anti-long term high temperature performance of double-layer structure thermal barrier coating and prolong its service life.

Description

A kind of thermal barrier coating and preparation method thereof with the long-life
Technical field
The invention belongs to Thermal Barrier Coating Technologies fields, and in particular to a kind of with the thermal barrier coating of long-life and its preparation side Method.
Background technique
It is many close in order to reduce the fuel consumption of the following space flight and aviation engine, raising thrust/mass ratio and service life Spending the advanced material that low, Toughness is good, elevated temperature strength is high will be widely used, while various functional coatings will be answered extensively With wherein thermal barrier coating (Thermal Barrier Coatings, TBCs) plays raising engine operating temperature very heavy The effect wanted.Since preparation process is simple, double-layer structure thermal barrier coating becomes the structure type that thermal barrier coating mainly uses, wherein The surface layer of double-layer structure thermal barrier coating is ceramic thermal barrier layer, and middle layer is metal bonding coating.
Two interfaces of matrix/adhesive layer and adhesive layer/ceramic topcoats of double-layer structure thermal barrier coating are entire thermal barrier coatings Weak link, and influence thermal barrier coating service life key point.Thermal barrier coating higher than 1000 DEG C at a temperature of take When labour, the oxidation of adhesive layer and matrix/tie-layer interface metallic element counterdiffusion rate are obviously increased, and will lead to thermal barrier coating Premature failure.In addition with the extension of coating active time at high temperature, adhesive layer/ceramic topcoats interface thermally grown oxide Object (TGO, Thermally Grown Oxide) is constantly grown, and TGO deforms or even crackle, is eventually led to coating and is integrally sent out Raw destructive peeling, loses protective effect.Therefore, it develops and designs and is a kind of by controlling adhesive layer/ceramic topcoats interface TGO Growth hinders adhesive layer oxidation and matrix/tie-layer interface metallic element counterdiffusion and then extends thermal barrier coating in hot environment Under service life thermal barrier coating have important economy, society and realistic meaning.
Summary of the invention
The object of the invention is that solve the above-mentioned problems and to provide a kind of structure simple, design a kind of reasonable tool There is the thermal barrier coating and preparation method thereof of long-life.
The present invention through the following technical solutions to achieve the above objectives:
A kind of thermal barrier coating with the long-life, adhesive layer and ceramic topcoats including being set to matrix surface are described viscous Diffusion barrier layer is additionally provided between knot layer and matrix, the diffusion barrier layer is Zr layers/ZrN layers diffusion barrier being superimposed Layer, the surface that the diffusion barrier layer is contacted with matrix and adhesive layer is Zr layers；
The ceramic topcoats and the adhesive layer time are additionally provided with pre-oxidation layer, and the pre-oxidation layer is continuous fine and close α-Al2O3Layer.
As a further optimization solution of the present invention, the adhesive layer is the bonding of MCrAlY or PtNiAl material preparation Layer, the M in the MCrAlY is Ni or Co element, with a thickness of 50-200 μm.
As a further optimization solution of the present invention, described Zr layers with a thickness of 0.25-1 μm, and ZrN layers with a thickness of 1-4 μm.
As a further optimization solution of the present invention, the ceramic topcoats are ZrO2And Y2O3Mixed-powder ceramic topcoats, Middle Y2O3Shared mass percent be 7%, the ceramic topcoats with a thickness of 50-1000 μm.
As a further optimization solution of the present invention, the α-Al2O3Layer with a thickness of 5-10 μm.
A kind of preparation method of the thermal barrier coating with the long-life as described in any of the above-described, comprising the following steps:
Step S1: matrix surface after the pre-treatment prepares Zr layers/ZrN layers diffusion barrier layer being superimposed
Pretreated matrix is put into the vacuum chamber of arc ion plating apparatus, under vacuum and protective atmosphere, sputtering is clear After washing 10-20min, discontinuous is filled with reaction gas N2, at Zr layers and ZrN layers of matrix surface alternating deposit；
Step S2: adhesive layer is prepared in diffusion barrier layer surface
With thermal spraying, arc ion plating, magnetron sputtering or electro beam physics vapour deposition method in diffusion barrier layer surface system Standby adhesive layer, and spray painting Darkening process is carried out to its surface；
Step S3: laser remolten processing is carried out to the adhesive layer after Darkening process
Step S4: pre-oxidation layer is prepared in tie layer surface
α-Al is prepared in tie layer surface with micro-arc oxidation2O3Pre-oxidize layer；
Step S5: the preparation of ceramic topcoats
In pre-oxidation layer surface preparation ceramic topcoats, final obtain has length for thermal spraying or electro beam physics vapour deposition method The thermal barrier coating in service life.
As a further optimization solution of the present invention, the pretreatment operation of matrix is polishing in the step S1, acetone surpasses Sound wave cleaning, dehydrated alcohol dehydration and drying；Use Zr for target, Ar in arc ion plating apparatus2For working gas, N2It is anti- Answer gas, in depositing operation, operating pressure 1-2Pa, working gas flow is 30-50cm3·min-1, deposit anti-at ZrN layers Answering gas flow is 60-100cm3·min-1, arc current 60-100A, bias 20-300V, sink by 300-350 DEG C of depositing temperature The time of Zr layers of product is 7.5-30min, and the time of Zr layers of deposition is 30-120min.
As a further optimization solution of the present invention, laser remolten technological parameter is that laser power is in the step S3 500-2000W, spot diameter 2-5mm, laser scanning speed 300-1000mmmin-1, and Ar is blown when remelting2Protection is molten Pond, Ar2Flow is 5-10Lmin-1。
As a further optimization solution of the present invention, in the step S4 when differential arc oxidation, power supply used is pulse direct current Power supply, electrolyte are that concentration is 8-12gL-1Na2SiO3, current density 8-12Adm-2, frequency 3000-8000Hz, Duty ratio is 40%-60%, time 5-10min.
The beneficial effects of the present invention are:
1) present invention distinguishes in two interfaces of double-layer structure thermal barrier coating matrix/adhesive layer and adhesive layer/ceramic topcoats Prepare multilayer diffusion barrier layer and α-Al2O3Layer is pre-oxidized, matrix/bonding stratum boundary during high-temperature service can be effectively slowed down Face metallic element counterdiffusion and adhesive layer/ceramic topcoats interface TGO speed of growth, so that it is anti-to improve double-layer structure thermal barrier coating Long term high temperature performance simultaneously prolongs its service life；
2) present invention prepares Zr layers/ZrN layers using matrix/tie-layer interface that arc ions are plated in thermal barrier coating and alternately expands Barrier layer is dissipated, not only the Zr layer Yu matrix and adhesive layer at diffusion barrier layer both ends have good associativity, but also ceramic multilayer expands Dissipating barrier layer has the effect of preferably blocking elements diffusion；
3) present invention carries out laser remolten processing to the adhesive layer of preparation, low based on Al density, in laser re-melting process Al will float to molten bath top, will form that relative superiority or inferiority in Al content is low in remelted layer, the gradient distribution of the high Al content in surface, simultaneously The tiny rapid remelting tissue of crystal grain is formed, the formation for pre-oxidizing layer is conducive to；
4) pre-oxidation Al prepared by the present invention2O3Ceramic layer not only has good adhesiveness with adhesive layer, but also can be effective Slow down the oxidation and adhesive layer/ceramic topcoats interface TGO speed of growth of adhesive layer；
5) the configuration of the present invention is simple, stability is high, and design rationally, is easy to implement.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of thermal barrier coating of the invention.
In figure: 1, matrix；2, diffusion barrier layer；3, adhesive layer；4, layer is pre-oxidized；5, ceramic topcoats.
Specific embodiment
The application is described in further detail with reference to the accompanying drawing, it is necessary to it is indicated herein to be, implement in detail below Mode is served only for that the application is further detailed, and should not be understood as the limitation to the application protection scope, the field Technical staff can make some nonessential modifications and adaptations to the application according to above-mentioned application content.
Embodiment 1
As shown in Figure 1, a kind of thermal barrier coating with the long-life, adhesive layer 3 and ceramics including being set to 1 surface of matrix Surface layer 5, the adhesive layer 3 are the adhesive layer 3 of MCrAlY or PtNiAl material preparation, and the M in the MCrAlY is Ni or Co member Element, with a thickness of 50-200 μm；Diffusion barrier layer 2, the diffusion barrier layer 2 are additionally provided between the adhesive layer 3 and matrix 1 The diffusion barrier layer 2 being superimposed for Zr layers/ZrN layers, wherein Zr layers with a thickness of 0.25-1 μm, ZrN layers with a thickness of 1-4 μm, institute Stating the surface that diffusion barrier layer 2 is contacted with matrix 1 and adhesive layer 3 is Zr layers.
The ceramic topcoats 5 are ZrO2And Y2O3Mixed-powder ceramic topcoats 5, wherein Y2O3Shared mass percent is 7%, the ceramic topcoats 5 with a thickness of 50-1000 μm；The ceramic topcoats 5 are additionally provided with pre- oxygen with 3 time of adhesive layer Change layer 4, the pre-oxidation layer 4 is continuous fine and close α-Al2O3Layer, with a thickness of 5-10 μm.
A kind of preparation method of the thermal barrier coating with the long-life described above, comprising the following steps:
Step S1: 1 surface of matrix after the pre-treatment prepares Zr layers/ZrN layers diffusion barrier layer 2 being superimposed
Pretreated matrix 1 is put into the vacuum chamber of arc ion plating apparatus, under vacuum and protective atmosphere, sputtering is clear After washing 10-20min, interruption pours reaction gas N2, alternating deposit Zr layer of 1 surface of matrix and ZrN layers；
Step S2: adhesive layer 3 is prepared on 2 surface of diffusion barrier layer
With thermal spraying, arc ion plating, magnetron sputtering or electro beam physics vapour deposition method in 2 surface system of diffusion barrier layer Standby adhesive layer 3, and spray painting Darkening process is carried out to its surface；
Step S3: laser remolten processing is carried out to the adhesive layer 3 after Darkening process
Step S4: pre-oxidation layer 4 is prepared on 3 surface of adhesive layer
α-Al is prepared on 3 surface of adhesive layer with micro-arc oxidation2O3Pre-oxidize layer 4；
Step S5: the preparation of ceramic topcoats 5
Thermal spraying or electro beam physics vapour deposition method are finally had in pre-oxidation 4 surface of layer preparation ceramic topcoats 5 The thermal barrier coating of long-life.
It should be noted that in the step S1 pretreatment operation of matrix 1 be polishing, it is acetone ultrasonic cleaning, anhydrous Ethanol dehydration and drying；Use Zr for target, Ar in arc ion plating apparatus2For working gas, N2For reaction gas, work is deposited In skill, operating pressure 1-2Pa, working gas flow is 30-50cm3·min-1, reaction gas flow is when depositing ZrN layers 60-100cm3·min-1, arc current 60-100A, bias 20-300V, 300-350 DEG C of depositing temperature, the time of Zr layers of deposition For 7.5-30min, the time of Zr layers of deposition is 30-120min；Laser remolten technological parameter is laser power in the step S3 For 500-2000W, spot diameter 2-5mm, laser scanning speed 300-1000mmmin-1, and Ar is blown when remelting2Protection Molten bath, Ar2Flow is 5-10Lmin-1；In the step S4 when differential arc oxidation, power supply used is pulse dc power, electrolysis Liquid is that concentration is 8-12gL-1Na2SiO3, current density 8-12Adm-2, frequency 3000-8000Hz, duty ratio is 40%-60%, time 5-10min.
Embodiment 2
A kind of thermal barrier coating with the long-life, preparation method includes the following steps:
Step S1: nickel base superalloy K405 matrix 1 is polished, acetone ultrasonic cleaning, dehydrated alcohol dehydration and Drying and processing；Respectively with Zr, Ar of purity 99.99%2And N2It, will be by pretreatment as target, working gas and reaction gas Matrix 1 be put into MIP-8-800 type arc ion plating apparatus vacuum chamber, be evacuated to 6 × 10-3Pa is then charged with work gas Body to vacuum degree is 3Pa, then uses Ar+Sputter clean matrix 110min is carried out, discontinuous is filled with reaction gas, realizes Zr layers/ZrN Layer alternating deposit；Deposition process parameters are as follows: operating pressure 2Pa, working gas flow are 30cm3·min-1, deposit anti-when ZrN Answering gas flow is 60cm3·min-1, arc current 60A, bias 80V, 300 DEG C of depositing temperature, Zr layers, ZrN layers of sedimentation time It is followed successively by 15min and 60min, deposits single layer Zr with a thickness of 0.25 μm, ZrN is 1 μm, forms Zr/ZrN/Zr diffusion barrier layer 2；
Step S2: on 2 surface of diffusion barrier layer using the 3710 type atmospheric plasmas spray of U.S.'s Praxair company production Painting system sprays MCrAlY adhesive layer 3, and by mass percentage, MCrAlY powder is Ni-20Co-18Cr-15Al-2Y2O3, spray Apply technological parameter such as the following table 1；
Step S3: carrying out spray painting melanism to adhesive layer 3, and laser remolten processing, laser remolten technique ginseng are then carried out to it Number is that laser power is 950W, spot diameter 3mm, laser scanning speed 600mmmin-1, when remelting blows Ar2Protection is molten Pond, to prevent the oxidation of adhesive layer 3, Ar2Flow is 10Lmin-1, low based on Al density, Al will be floated in laser re-melting process Molten bath top, will form that relative superiority or inferiority in Al content is low, and it is thin to be formed simultaneously crystal grain for the gradient distribution of the high Al content in surface in remelted layer Small rapid remelting tissue；
Step S4: the adhesive layer 3 through laser remolten is carried out at differential arc oxidation on MA-120A type is microarc oxidation equipment provided Reason, using pulse dc power, electrolyte sodium metasilicate (Na2SiO3) concentration be 8gL-1, current density 8Adm-2, frequency For 3000Hz, duty ratio 40%, time 5min controls the continuous densification α-Al of generation2O3Pre-oxidizing 4 thickness of layer is about 5 μm；
Step S5: 3710 type air plasma sprayings of U.S.'s Praxair company production are used on pre-oxidation 4 surface of layer System sprays ZrO2-Y2O3Ceramic topcoats 5, ZrO2-Y2O3Powder is ZrO by mass percentage2- 7%Y2O3, spraying process ginseng Number such as table 1, it is final to obtain the thermal barrier coating sample with the long-life.
Table 1: air plasma spraying MCrAlY technological parameter
Technological parameter MCrAlY ZrO2- 7%Y2O3
Electric current/A 710 920
Voltage/V 42 42
Main gas, Ar/PSI 65 45
Auxiliary gas, He/PSI 115 150
Carrier gas, Ar/PSI 45 45
Powder feeding rate/(rmin-1) 2 3
Spray distance/mm 110 100
Spray gun movement speed/(mms-1) 100 100
Coating layer thickness/μm 100 350
Embodiment 3
A kind of thermal barrier coating with the long-life, preparation method includes the following steps:
Step S1: 1 surface of Crystal Nickel-based Superalloy TMS75 matrix is polished, acetone ultrasonic cleaning, dehydrated alcohol take off Water and drying and processing；Respectively with Zr, Ar of purity 99.99%2And N2It, will be by pre- as target, working gas and reaction gas The matrix 1 of processing is put into MIP-8-800 type arc ion plating apparatus vacuum chamber, is evacuated to 6 × 10-3Pa is then charged with work Making gas to vacuum degree is 3Pa, then uses Ar+Sputter clean matrix 110min is carried out, discontinuous is filled with reaction gas, realizes Zr Layer/ZrN layers of alternating deposit；Deposition process parameters are as follows: operating pressure 2Pa, working gas flow are 40cm3·min-1, deposition Reaction gas flow is 80cm when ZrN3·min-1, arc current 80A, bias 150V, 350 DEG C of depositing temperature, Zr layers, ZrN layers Sedimentation time is followed successively by 30min and 120min, deposits single layer Zr with a thickness of 1 μm, and ZrN is 4 μm, forms Zr/ZrN/Zr diffusion resistance Barrier 2；
Step S2: viscous using ZDP-1700 type vacuum plasma spray coating equipment spraying MCrAlY on 2 surface of diffusion barrier layer Layer 3 is tied, by mass percentage, MCrAlY powder is Ni-25Cr-5Al-0.5Y, vacuumizes before spraying, is filled with argon gas, to be painted It applies room pressure and reaches 4 × 103Pa-5×103The plasma arc that ignites when Pa starts to spray, spraying parameter such as the following table 2；
Step S3: carrying out spray painting melanism to adhesive layer 3, and laser remolten processing, laser remolten technique ginseng are then carried out to it Number is that laser power is 800W, spot diameter 3mm, laser scanning speed 500mmmin-1, when remelting blows Ar2Protection is molten Pond, to prevent the oxidation of adhesive layer 3, Ar2Flow is 10Lmin-1, low based on Al density, Al will be floated in laser re-melting process Molten bath top, will form that relative superiority or inferiority in Al content is low, and it is thin to be formed simultaneously crystal grain for the gradient distribution of the high Al content in surface in remelted layer Small rapid remelting tissue；
Step S4: the adhesive layer 3 through laser remolten is carried out at differential arc oxidation on MA-120A type is microarc oxidation equipment provided Reason, using pulse dc power, electrolyte sodium metasilicate (Na2SiO3) concentration be 8gL-1, current density 8Adm-2, frequency For 3000Hz, duty ratio 40%, time 5min controls the continuous densification α-Al of generation2O3Pre-oxidizing 4 thickness of layer is about 8 μm；
Step S5: it is produced on pre-oxidation 4 surface of layer using Ukraine bar institute of welding electron beam international technology center Model UE-204 multifunction electronic beam Pvd equipment prepare ZrO2-Y2O3Ceramic topcoats 5, with a thickness of 100 μ M, ZrO2-Y2O3Powder is ZrO by mass percentage2- 7%Y2O3, it is 20kV, electron beam current in beam voltage For 2A, 1 electric current of heated substrate is 0.1A, and vacuum chamber pressure is under the sedimentary condition of 10-3Pa, and final obtain has the long-life Thermal barrier coating sample.
Table 2: vacuum plasma spray coating MCrAlY technological parameter
Plasma power/kW 48
Electric current/A 650
Spray chamber pressure/Pa 8×103
Argon flow/(Lmin-1) 65
Hydrogen flowing quantity/(Lmin-1) 115
Powder feeding rate/(gmin-1) 50
Spray distance/mm 300
Coating layer thickness/μm 100
Embodiment 4
A kind of thermal barrier coating with the long-life, preparation method includes the following steps:
Step S1: nickel base superalloy K405 matrix 1 is polished, acetone ultrasonic cleaning, dehydrated alcohol dehydration and Drying and processing；Respectively with Zr, Ar of purity 99.99%2And N2It, will be by pretreatment as target, working gas and reaction gas Matrix 1 be put into MIP-8-800 type arc ion plating apparatus vacuum chamber, be evacuated to 6 × 10-3Pa is then charged with work gas Body to vacuum degree is 3Pa, then uses Ar+Sputter clean matrix 110min is carried out, discontinuous is filled with reaction gas, realizes Zr layers/ZrN Layer alternating deposit；Deposition process parameters are as follows: operating pressure 1Pa, working gas flow are 50cm3·min-1, deposit anti-when ZrN Answering gas flow is 100cm3·min-1, arc current 100A, bias 300V, 350 DEG C of depositing temperature, when Zr layers, ZrN layers of deposition Between be followed successively by 30min and 120min, deposit single layer Zr with a thickness of 0.5 μm, ZrN is 2 μm, forms Zr/ZrN/Zr diffusion barrier layer 2；
Step S2: on 2 surface of diffusion barrier layer using the 3710 type atmospheric plasmas spray of U.S.'s Praxair company production Painting system sprays MCrAlY adhesive layer 3, and by mass percentage, MCrAlY powder is Ni-20Co-18Cr-15Al-2Y2O3, spray Apply technological parameter such as the following table 1；
Step S3: carrying out spray painting melanism to adhesive layer 3, and laser remolten processing, laser remolten technique ginseng are then carried out to it Number is that laser power is 950W, spot diameter 3mm, laser scanning speed 600mmmin-1, when remelting blows Ar2Protection is molten Pond, to prevent the oxidation of adhesive layer 3, Ar2Flow is 10Lmin-1, low based on Al density, Al will be floated in laser re-melting process Molten bath top, will form that relative superiority or inferiority in Al content is low, and it is thin to be formed simultaneously crystal grain for the gradient distribution of the high Al content in surface in remelted layer Small rapid remelting tissue；
Step S4: the adhesive layer 3 through laser remolten is carried out at differential arc oxidation on MA-120A type is microarc oxidation equipment provided Reason, using pulse dc power, electrolyte sodium metasilicate (Na2SiO3) concentration be 8gL-1, current density 8Adm-2, frequency For 3000Hz, duty ratio 40%, time 5min controls the continuous densification α-Al of generation2O3Pre-oxidizing 4 thickness of layer is about 5 μm；
Step S5: 3710 type air plasma sprayings of U.S.'s Praxair company production are used on pre-oxidation 4 surface of layer System sprays ZrO2-Y2O3Ceramic topcoats 5, ZrO2-Y2O3Powder is ZrO by mass percentage2- 7%Y2O3, spraying process ginseng Number is identical as table 1, final to obtain the thermal barrier coating sample with the long-life.
Comparative example 1
A kind of thermal expansion coating, preparation method includes the following steps:
Step S1: 1 surface of Crystal Nickel-based Superalloy TMS75 matrix is polished, acetone ultrasonic cleaning, dehydrated alcohol take off Water and drying and processing；
Step S2: MCrAlY adhesive layer 3 is sprayed using ZDP-1700 type vacuum plasma spray coating equipment in matrix surface, is pressed Mass percent meter, MCrAlY powder are Ni-25Cr-5Al-0.5Y, vacuumize before spraying, are filled with argon gas, intraventricular pressure to be sprayed Power reaches 4 × 103Pa-5×103The plasma arc that ignites when Pa starts to spray；
Step S3: in tie layer surface using the type of Ukraine bar institute of welding electron beam international technology center production Number for UE-204 multifunction electronic beam Pvd equipment prepare ZrO2-Y2O3Ceramic topcoats 5, ZrO2-Y2O3Powder presses matter Percentages are measured, are ZrO2- 7%Y2O3, it is 20kV, electron beam current 2A, 1 electric current of heated substrate in beam voltage For 0.1A, vacuum chamber pressure is final acquisition thermal barrier coating sample under the sedimentary condition of 10-3Pa.
The thermal barrier coating that embodiment 3 and comparative example 1 are obtained after 1150 DEG C of high-temperature oxydation 100h, intercepts embodiment respectively With the section of comparative example thermal barrier coating, through observation shows that, for the thermal barrier coating of comparative example, embodiment 3 obtains heat Rise by coating after high-temperature oxydation, pre-oxidizes layer 4 and the interface of adhesive layer 3 and ceramic topcoats 5 is clear, uniform, smooth, it is thermally grown Oxide (TGO) slow growth, in addition the element counterdiffusion of adhesive layer 3 and matrix 1 is effectively blocked by diffusion barrier layer 2, bonding Without apparent diffusion region between layer 3 and matrix 1.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention Protect range.

Claims (9)

1. a kind of thermal barrier coating with the long-life, adhesive layer (3) and ceramic topcoats (5) including being set to matrix (1) surface, It is characterized by: being additionally provided with diffusion barrier layer (2) between the adhesive layer (3) and matrix (1), the diffusion barrier layer (2) The diffusion barrier layer (2) being superimposed for Zr layers/ZrN layers, the diffusion barrier layer (2) contact with matrix (1) and adhesive layer (3) Surface be Zr layers；
The ceramic topcoats (5) and the adhesive layer (3) time are additionally provided with pre-oxidation layer (4), and the pre-oxidation layer (4) is to connect Continue fine and close α-Al2O3Layer.
2. a kind of thermal barrier coating with the long-life according to claim 1, it is characterised in that: the adhesive layer (3) is The adhesive layer (3) of MCrAlY or PtNiAl material preparation, the M in the MCrAlY is Ni or Co element, with a thickness of 50-200 μ m。
3. a kind of thermal barrier coating with the long-life according to claim 1, it is characterised in that: described Zr layers with a thickness of 0.25-1 μm, ZrN layers with a thickness of 1-4 μm.
4. a kind of thermal barrier coating with the long-life according to claim 1, it is characterised in that: the ceramic topcoats (5) For ZrO2And Y2O3Mixed-powder ceramic topcoats (5), wherein Y2O3Shared mass percent is 7%, the ceramic topcoats (5) With a thickness of 50-1000 μm.
5. a kind of thermal barrier coating with the long-life according to claim 1, it is characterised in that: the α-Al2O3The thickness of layer Degree is 5-10 μm.
6. a kind of preparation method of -5 any thermal barrier coatings with the long-life according to claim 1, which is characterized in that The following steps are included:
Step S1: matrix (1) surface after the pre-treatment prepares Zr layers/ZrN layers diffusion barrier layer (2) being superimposed
Pretreated matrix (1) is put into the vacuum chamber of arc ion plating apparatus, under vacuum and protective atmosphere, sputter clean After 10-20min, discontinuous is filled with reaction gas N2, alternating deposit Zr layers of matrix (1) surface and ZrN layers；
Step S2: adhesive layer (3) are prepared on diffusion barrier layer (2) surface
It is prepared with thermal spraying, arc ion plating, magnetron sputtering or electro beam physics vapour deposition method on diffusion barrier layer (2) surface Adhesive layer (3), and spray painting Darkening process is carried out to its surface；
Step S3: laser remolten processing is carried out to the adhesive layer (3) after Darkening process
Step S4: pre-oxidation layer (4) is prepared on adhesive layer (3) surface
α-Al is prepared on adhesive layer (3) surface with micro-arc oxidation2O3It pre-oxidizes layer (4)；
Step S5: the preparation of ceramic topcoats (5)
Thermal spraying or electro beam physics vapour deposition method are finally had in pre-oxidation layer (4) surface preparation ceramic topcoats (5) The thermal barrier coating of long-life.
7. a kind of preparation method of thermal barrier coating with the long-life according to claim 6, it is characterised in that: the step The pretreatment operation of matrix (1) is polishing, the dehydration of acetone ultrasonic cleaning, dehydrated alcohol and drying in rapid S1；Arc ion plating Use Zr for target, Ar in equipment2For working gas, N2For reaction gas, in depositing operation, operating pressure 1-2Pa, work Gas flow is 30-50cm3·min-1, reaction gas flow is 60-100cm when depositing ZrN layers3·min-1, arc current 60- 100A, bias 20-300V, 300-350 DEG C of depositing temperature, the time of Zr layers of deposition is 7.5-30min, the time of Zr layers of deposition For 30-120min.
8. a kind of preparation method of thermal barrier coating with the long-life according to claim 6, it is characterised in that: the step It is 500-2000W that laser remolten technological parameter, which is laser power, in rapid S3, spot diameter 2-5mm, and laser scanning speed is 300-1000mm·min-1, and Ar is blown when remelting2Protect molten bath, Ar2Flow is 5-10Lmin-1。
9. a kind of preparation method of thermal barrier coating with the long-life according to claim 6, it is characterised in that: the step In rapid S4 when differential arc oxidation, power supply used is pulse dc power, and electrolyte is that concentration is 8-12gL-1Na2SiO3, electric current Density is 8-12Adm-2, frequency 3000-8000Hz, duty ratio 40%-60%, time 5-10min.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112301402A (en) * 2020-11-02 2021-02-02 东北大学 Novel magnesium alloy thermal barrier coating and preparation method thereof
CN112941454A (en) * 2021-01-28 2021-06-11 南京工程学院 Laser remelting post-treatment method for preparing high-temperature oxidation corrosion resistant MCrAlY coating by supersonic flame thermal spraying
CN115094395A (en) * 2022-08-23 2022-09-23 北京辰融科技有限责任公司 Deposition method of leaf disc high-temperature-resistant coating
CN115354279A (en) * 2022-08-24 2022-11-18 西安电子科技大学 Diffusion shielding layer applied between single crystal nickel-based alloy and surface thermal barrier coating and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101298199A (en) * 2007-04-30 2008-11-05 联合工艺公司 Multi-layered thermal barrier coating
US20110111190A1 (en) * 2009-11-11 2011-05-12 Southwest Research Institute Method For Applying A Diffusion Barrier Interlayer For High Temperature Components
CN102925841A (en) * 2012-11-07 2013-02-13 天津大学 Ceramic thermal barrier coating with allitic diffusion layer bonding layer and preparation method thereof
CN105463453A (en) * 2015-11-25 2016-04-06 沈阳黎明航空发动机(集团)有限责任公司 Thermal barrier coating with stable interface and manufacturing method of thermal barrier coating
CN111560584A (en) * 2020-05-22 2020-08-21 江苏大学 High-performance thermal barrier coating of aero-engine blade and multi-process combined preparation method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101298199A (en) * 2007-04-30 2008-11-05 联合工艺公司 Multi-layered thermal barrier coating
US20110111190A1 (en) * 2009-11-11 2011-05-12 Southwest Research Institute Method For Applying A Diffusion Barrier Interlayer For High Temperature Components
CN102925841A (en) * 2012-11-07 2013-02-13 天津大学 Ceramic thermal barrier coating with allitic diffusion layer bonding layer and preparation method thereof
CN105463453A (en) * 2015-11-25 2016-04-06 沈阳黎明航空发动机(集团)有限责任公司 Thermal barrier coating with stable interface and manufacturing method of thermal barrier coating
CN111560584A (en) * 2020-05-22 2020-08-21 江苏大学 High-performance thermal barrier coating of aero-engine blade and multi-process combined preparation method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
蔡妍等: ""热障涂层金属元素扩散阻挡层研究进展"", 《材料工程》, no. 9, pages 92 - 96 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112301402A (en) * 2020-11-02 2021-02-02 东北大学 Novel magnesium alloy thermal barrier coating and preparation method thereof
CN112941454A (en) * 2021-01-28 2021-06-11 南京工程学院 Laser remelting post-treatment method for preparing high-temperature oxidation corrosion resistant MCrAlY coating by supersonic flame thermal spraying
CN115094395A (en) * 2022-08-23 2022-09-23 北京辰融科技有限责任公司 Deposition method of leaf disc high-temperature-resistant coating
CN115354279A (en) * 2022-08-24 2022-11-18 西安电子科技大学 Diffusion shielding layer applied between single crystal nickel-based alloy and surface thermal barrier coating and preparation method thereof
CN115354279B (en) * 2022-08-24 2023-11-17 西安电子科技大学 Diffusion shielding layer applied between monocrystal nickel-based alloy and surface thermal barrier coating and preparation method thereof

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