CN110408903A - Tool surface multi-component multi-layer coating production - Google Patents
Tool surface multi-component multi-layer coating production Download PDFInfo
- Publication number
- CN110408903A CN110408903A CN201910871461.9A CN201910871461A CN110408903A CN 110408903 A CN110408903 A CN 110408903A CN 201910871461 A CN201910871461 A CN 201910871461A CN 110408903 A CN110408903 A CN 110408903A
- Authority
- CN
- China
- Prior art keywords
- coating
- target
- tool surface
- coated
- transition zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
Abstract
The invention discloses a kind of preparation methods of tool surface coating comprising following steps: (1) being uniformly mixed the titanium powder of given proportion and aluminium powder, TiAl target is made；(2) the Cr target and Si target of purity 99.99% are prepared；(3) it polished the tool surface after cleaning, polished, ultrasonic cleaning processing；(4) three target as sputter tool surface of magnetron sputtering technique is used；(5) cooling a period of time (preventing coating oxidation from cracking) takes out cutter under vacuum chamber；(6) coating prepared by preparation method according to the present invention have hardness height, high abrasion, it is anti-oxidant and self it is pollution-free.
Description
Technical field
The present invention relates to a kind of multi-component multi-layer cutter coats, belong to machining field.
Background technique
The fast development of metal cutting technology is significant on the promotion of manufacturing technology or even entire manufacturing industry level influence, with
The appearance of the new processes such as the development of metal cutting, especially high-speed cutting, high-efficient cutting, DRY CUTTING and hard machining, it is right
Metal cutting process cutter proposes higher technical requirements.Currently, for the cutter of cutting metal, there are wearabilities, heat-resisting
Property, the not high feature such as inoxidizability seriously affects cutting-tool's used life.It is comprehensive that the appearance of cutter coat improves cutter
Performance, but cutter coat the problems such as there are the binding force of coating and matrix is poor, and oxidation resistance is poor at present.The hair of cutter coat
Exhibition develops to laminated coating again from single coating to multi-element coating.Cutting-Tool Coating Technology has chemical vapor sedimentation, object respectively
Qi-regulating is as sedimentation, thermal spraying, collosol and gel etc., and meteorological precipitating prepares coating is best in quality.Magnetron sputtering technique (physics
Meteorology precipitating): target abnormal glow discharge in thin ar gas environment generates plasma, in sputtered substrate.Sputter coating
Feature is that stable deposition rate, reproducible, even compact, adhesive force are good, and plated film theoretical density can reach 98%.
Summary of the invention
The purpose of the present invention is to provide one kind to have wear-resisting, anti-oxidant, and self free of contamination tool surface coating
Preparation method.
(1) titanium powder of given proportion and aluminium powder are uniformly mixed and are prepared into target (2) to the tool surface after cleaning
It is polished, polishing treatment, ultrasonic cleaning；(3) use magnetron sputtering technique by plasma sputtering on the surface of cutter；
(4) cutter cooling a period of time in vacuum chamber prevents coating oxidation from cracking；Preparation method according to claim 1,
It is characterized in that, prepares purity 99.99%TiAl target (Ti:Al=40:60at%), prepare Cr the and Si target of purity 99.99%；Magnetic
It is 2.5x10 that control splash-proofing sputtering process parameter, which is vacuum degree,-3Pa, operating air pressure 0.4pa；Target-substrate distance is 18cm；TiAl target as sputter function
Rate is 90W, and Cr, Si sputtering power are 45W；Sputtering sequence: Cr (DC) target sputtering 10min is opened；It is passed through nitrogen simultaneously, every
15min alternately open TiAl(RF) and Si(DC) target sputter 60min；Open simultaneously all target sputtering 180min；Substrate temperature 200
℃；Substrate bias: -50v；Gas flow ratio Ar:N2=30:20sccm；Matrix velocity of rotation is 20r/min.
Binder course improves painting-base junction resultant force in prepares coating, and transition zone can effectively improve the synthesis of entire coating
Performance, theca externa generate Al in high temperature and high speed friction environment2O3, (Cr, Al) is formed with a part of Cr element2O3It prevents inside
Oxidation, improves oxidation resistance；Cr and N forms CrN, and CrN coating has good high temperature resistant, wear-resistant, corrosion-resistant, adhesion
Property, the advantages that friction factor is lower；Si element is with Si3N4Amorphous phase form is coated on TiAlN crystal boundary, on the one hand plays refinement
Coated grains size improves the effect of coating hardness, on the other hand can also improve the thermal stability of coating.Si, Cr, N are formed
SiCrN, SiCrN have good wear resistance, and have certain lubricating action；It is polynary relative to single TiAlN coating
Laminated coating is enhanced in terms of comprehensive performance, extends cutting-tool's used life, improves processing quality.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.In figure, 1- matrix；2- binder course；The compound transition zone of 3-；4- theca externa.
Specific implementation
The present invention provides a kind of cutter with TiAlSiCrN coating, including tool matrix 1,1 surface of cutter body is coated with
Binder course 2,2 surface of binder course are coated with transition zone 3, and 3 surface of transition zone covers theca externa 4.Binder course 2 is Cr coating, transition
Layer 3 is TiAlCrN, SiCrN alternate coatings, and theca externa 4 is TiAISiCrN coating.Total coating thickness is 4~5 μm.
The cutter that TiAlSiCrN coating is had provided in above-mentioned technical proposal, in production, 1, tool matrix sand paper
Polishing, polishing, acetone ultrasonic cleaning 20min；2, target, matrix are put into vacuum chamber, open mechanical pump, molecular pump is evacuated to
4.1×10-4Pa；3, argon gas (99.999%) is passed through to 0.4pa, is added back bias voltage -400V, is cleaned target time 25min；4, it opens straight
Galvanic electricity source heated substrate is to 200 DEG C of temperature；5, preparation Cr is combined layer by layer: argon flow 30sccm, target power 45w, time
10min, controlling vacuum chamber operating air pressure with gate valve by regulation gas cylinder is that 0.4pa is constant；6, transition zone is prepared: every
15min alternately opens TiAl, Si target, time 60min, is passed through nitrogen (99.999%) (nitrogen flow 10sccm), adjusts simultaneously
It is that 0.4pa is constant that gas cylinder, which is controlled, with gate valve control vacuum chamber operating air pressure, gas flow ratio Ar:N2=30:20sccm, 7, opening
All targets, operating air pressure is constant, plated film time 180min.8, vacuum cooled, taking-up sample (five hours cooling or more).It keeps
It is all constant that matrix velocity of rotation remains the other conditions such as 20r/min, bias -50V.To which cutter coat, coating layer thickness 4 be made
~5um measures hardness 40GPa using hardness-testing device, measures film layer and cutter binding force 75N, identical test using scratching instrument
Under the conditions of compared using friction wear testing machine whether there is or not coated cutting tool wear volume, wearing depth, have coated cutting tool wear volume
Smaller, wearing depth is more shallow.Above-mentioned experiment condition can upper and lower slight fluctuation.
Claims (4)
1. a kind of hard alloy cutter preparation with TiAlSiCrN coating includes the polishing of matrix sand paper, polishing machine polishing, ultrasound
Wave cleaning, drying and processing-target, matrix are put into magnetron sputtering vacuum chamber-vacuum chamber-target as sputter cleaning-painting
Layer preparation-vacuum cooled-is come out of the stove.
2. according to claim 1, which is characterized in that the tool matrix outer surface is coated with binder course, the binder course
Outside is coated with transition zone, and theca externa is coated on the outside of the transition zone, and the binder course is Cr coating, and plated film time is
10min。
3. according to claim 1, which is characterized in that the transition zone is TiAlCrN, SiCrN coating, and plated film time is
60min replaces primary every 15min.
4. theca externa is TiAlSiCrN according to claim 1, which is characterized in that plated film time 180min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910871461.9A CN110408903A (en) | 2019-09-16 | 2019-09-16 | Tool surface multi-component multi-layer coating production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910871461.9A CN110408903A (en) | 2019-09-16 | 2019-09-16 | Tool surface multi-component multi-layer coating production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110408903A true CN110408903A (en) | 2019-11-05 |
Family
ID=68370553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910871461.9A Pending CN110408903A (en) | 2019-09-16 | 2019-09-16 | Tool surface multi-component multi-layer coating production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110408903A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150269A (en) * | 2021-12-07 | 2022-03-08 | 四川真锐晶甲科技有限公司 | Cutting tool coating and method of making same |
| CN114311963A (en) * | 2021-12-24 | 2022-04-12 | 西安理工大学 | Textured wear-resistant doctor blade of gravure printing machine and preparation method |
| CN116695062A (en) * | 2023-05-09 | 2023-09-05 | 东莞市普拉提纳米科技有限公司 | High-entropy composite cutter coating for cutting stainless steel and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008049455A (en) * | 2006-08-25 | 2008-03-06 | Mitsubishi Materials Corp | Surface coated cutting tool having hard coating layer showing superior chipping resistance and wear resistance |
| CN103789723A (en) * | 2014-01-24 | 2014-05-14 | 四川大学 | Cr/CrN/(Ti, Al, Si, Cr)N composite hard coating and preparation method thereof |
| CN104662195A (en) * | 2012-09-28 | 2015-05-27 | 瓦尔特公开股份有限公司 | Tool with TiAlCrSiN PVD coating |
| CN105112858A (en) * | 2015-08-31 | 2015-12-02 | 科汇纳米技术（深圳）有限公司 | Nano composite cutting tool coating of multilayer structure |
| CN105839054A (en) * | 2016-05-24 | 2016-08-10 | 上海都浩真空镀膜技术有限公司 | CrAlTiSiN cutter protective coating and preparation method thereof |
-
2019
- 2019-09-16 CN CN201910871461.9A patent/CN110408903A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008049455A (en) * | 2006-08-25 | 2008-03-06 | Mitsubishi Materials Corp | Surface coated cutting tool having hard coating layer showing superior chipping resistance and wear resistance |
| CN104662195A (en) * | 2012-09-28 | 2015-05-27 | 瓦尔特公开股份有限公司 | Tool with TiAlCrSiN PVD coating |
| CN103789723A (en) * | 2014-01-24 | 2014-05-14 | 四川大学 | Cr/CrN/(Ti, Al, Si, Cr)N composite hard coating and preparation method thereof |
| CN105112858A (en) * | 2015-08-31 | 2015-12-02 | 科汇纳米技术（深圳）有限公司 | Nano composite cutting tool coating of multilayer structure |
| CN105839054A (en) * | 2016-05-24 | 2016-08-10 | 上海都浩真空镀膜技术有限公司 | CrAlTiSiN cutter protective coating and preparation method thereof |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150269A (en) * | 2021-12-07 | 2022-03-08 | 四川真锐晶甲科技有限公司 | Cutting tool coating and method of making same |
| CN114150269B (en) * | 2021-12-07 | 2024-03-15 | 四川真锐晶甲科技有限公司 | Cutting tool coating and method of making the same |
| CN114311963A (en) * | 2021-12-24 | 2022-04-12 | 西安理工大学 | Textured wear-resistant doctor blade of gravure printing machine and preparation method |
| CN116695062A (en) * | 2023-05-09 | 2023-09-05 | 东莞市普拉提纳米科技有限公司 | High-entropy composite cutter coating for cutting stainless steel and preparation method thereof |
| CN116695062B (en) * | 2023-05-09 | 2024-01-23 | 东莞市普拉提纳米科技有限公司 | High-entropy composite cutter coating for cutting stainless steel and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107130222B (en) | High-power impulse magnetron sputtering CrAlSiN nano-composite coating and preparation method thereof | |
| CN106086806B (en) | A kind of AlTiCrN high-temperature wear resistant coating and preparation method thereof | |
| CN103668095B (en) | A kind of high power pulse plasma enhancing combined magnetic-controlled sputter deposition apparatus and using method thereof | |
| CN104789933B (en) | A kind of nano-composite coating and its deposition process | |
| CN110408903A (en) | Tool surface multi-component multi-layer coating production | |
| CN104131256B (en) | Multilayer nanometer composite cutting tool coating and preparation method thereof | |
| CN108220880A (en) | A kind of high rigidity high corrosion-resistant high-entropy alloy nitride coatings and preparation method thereof | |
| CN104928638A (en) | AlCrSiN-based multilayer nanometer composite cutter coating layer and preparation method thereof | |
| CN105908126B (en) | The AlTiN composite coatings and preparation method of a kind of high Al content | |
| CN103212729B (en) | A kind of have NC cutting tool of CrAlTiN superlattice coating and preparation method thereof | |
| CN104325738B (en) | A kind of hard coat of cold rolling disc flying shear and preparation method thereof | |
| CN110004409B (en) | CrAlN nano gradient coating with high hardness and high binding force and preparation process thereof | |
| Cao et al. | Sand erosion resistance improvement and damage mechanism of TiAlN coating via the bias-graded voltage in FCVA deposition | |
| CN108251797A (en) | A kind of titanium alloy cutting cutter TiAlN/CrN laminated coatings and preparation method thereof | |
| CN108342705A (en) | The preparation method of Ta base high-temperature protection coatings with self-healing function | |
| CN109402564A (en) | A kind of AlCrSiN and AlCrSiON double-layer nanometer composite coating and preparation method thereof | |
| CN103774096A (en) | Preparation method for anti-oxidation composite hard coating | |
| CN107190233A (en) | A kind of preparation technology of the Si dopen Nano composite coatings with ultrahigh hardness | |
| CN105316634A (en) | Preparation method for Cr-B-C-N nanocomposite film | |
| CN108977775A (en) | A kind of TiAlSiN coated cutting tool preparation process | |
| Vereschaka et al. | Investigation of the structure and phase composition of the microdroplets formed during the deposition of PVD coatings | |
| CN106868450A (en) | A kind of utilization modulates the method that high-power impulse magnetron sputtering prepares AlTiN hard coats | |
| Hong et al. | Influence of annealing temperature on microstructure evolution of TiAlSiN coating and its tribological behavior against Ti6Al4V alloys | |
| Grigoriev et al. | Influence of the tribological properties of the Zr, Hf-(Zr, Hf) N-(Zr, Me, Hf, Al) N coatings (where Me is Mo, Ti, or Cr) with a nanostructured wear-resistant layer on their wear pattern during turning of steel | |
| Dyadyura et al. | Influence of roughness of the substrate on the structure and mechanical properties of TiAlN nanocoating condensed by DCMS |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20191105 |