CN110389020A - The detection method of spatial light modulator - Google Patents
The detection method of spatial light modulator Download PDFInfo
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- CN110389020A CN110389020A CN201810338661.3A CN201810338661A CN110389020A CN 110389020 A CN110389020 A CN 110389020A CN 201810338661 A CN201810338661 A CN 201810338661A CN 110389020 A CN110389020 A CN 110389020A
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Abstract
The present invention relates to a kind of detection methods of spatial light modulator.Described detection method includes the following steps: providing illumination light；Spatial light modulator receives the illumination light and generates image light, and the spatial light modulator includes multiple modulation units；It projects described image light and generates projected image, wherein multiple pixels of the projected image and the multiple modulation unit correspond；It shoots the projected image and generates shooting image；And the misalignment angle of multiple modulation units according to spatial light modulator described in the shooting image analysis.
Description
Technical field
The present invention relates to a kind of detection methods of spatial light modulator.
Background technique
Existing optical projection system generally comprises light supply apparatus, spatial light modulator (such as LCOS spatial light modulator or the space DMD
Optical modulator) and projection lens, the light supply apparatus injection such as redgreenblue light, the spatial light modulator is according to picture number
Image modulation, the image that the projection lens exports the spatial light modulator are carried out according to the light issued to the light supply apparatus
Light is projected to show projected image, however, there may be the lower situations of contrast for existing optical projection system, it is necessary to change
It is kind.
In optical projection system, spatial light modulator directly determines the picture effect of projection as signal modulation element.At present
Common spatial light modulator is LCD and DMD, each in spatial light modulator from the working principle of spatial light modulator
A microstructure unit such as liquid crystal or minitype reflector correspond to a pixel on screen, and control circuit is by controlling each knot
Structure unit modulates the display content of each pixel to the transmitance of illumination light or reflectivity, so that loaded and displayed is entirely drawn
Face information.When quality problems occurs in spatial light modulator, it has an impact the brightness of projected picture and color, specific manifestation
For brightness is relatively low, the uniform uneven color of brightness disproportionation.When spatial light modulator is due to (such as liquid that goes wrong on material or structure
There is large error in brilliant material transmitance and microreflection specular reflectivity) when, it is shown via the image that spatial light modulator is modulated
It just will appear whole luminance errors, to occur showing the phenomenon that brightness of image is relatively low.Each picture in spatial light modulator
The response results of the relatively same driving signal of the corresponding structural unit of vegetarian refreshments be extremely difficult to it is completely the same, when certain structural units
Response results error it is larger when the structural unit corresponding pixel display it is abnormal, the display of this pixel magnitude is abnormal with regard to table
It is now the uniform uneven color phenomenon of brightness disproportionation of display picture.
However in the production process of projection device, lacks effective means always and the quality of spatial light modulator is made
Detection.After the completion of equipment production, it could find that spatial light modulator with the presence or absence of problem, is needed if there is problem in test process
Projection device is dismantled, spatial light modulator is replaced by production line.Wherein, as shown in Figure 1, Fig. 1 is according to display frame problem
Reason flow chart is searched, the brightness reduction and the impure phenomenon of color in larger range caused by spatial light modulator tend to refer to
To multiple devices, for determine the reason of causing error be spatial light modulator need on it is each there may be the device of influence into
Row detection, process is cumbersome and spends many unnecessary costs of labor.Under normal circumstances, cause the brightness and face of pixel magnitude
The device of color non-uniform phenomenon is spatial light modulator.In spatial light modulator modulation unit and display picture pixel one by one
Corresponding, as current display resolution is higher and higher, the quantity of the modulation unit of spatial light modulator reaches millions of or ten million
More than, therefore, the consistency that each modulation unit modulates illumination light is difficult to ensure in the preparation process of modulator.So when out
When existing brightness and uneven color phenomenon, the reliability of projection device is difficult to ensure only by replacement spatial light modulator.
In addition, requiring increasingly with the development of projection display technique the brightness of projected picture, color and contrast
It is high.Currently, the etendue of laser light source or laser fluorescence mixing light source is smaller than bulb source, so projection lens can be with
Smaller aperture collects projected light beam, while reducing the loss of diverging light energy and the influence of stray light, improves shadowgraph
The brightness and contrast in face becomes the Main way of current shadow casting technique's development.But as etendue reduces, camera lens is received
Angular reduces therewith, also has a certain impact to the obvious degree of brightness and uneven color phenomenon.Wherein, using LCD as
In the case where spatial light modulator, shots light situation is as shown in Fig. 2, liquid crystal light valve indicates display to the transmitance of illumination light
The brightness of corresponding pixel points on picture, when there is error in liquid crystal transmitance corresponding standard value, shots to light go out therewith
Existing deviation, the deviation is insensitive to etendue, i.e. the basic indifference of etendue difference brightness irregularities phenomenon.But
Since lens aperture becomes smaller, the contrast level parameter of projected picture is promoted.It is different in the case where using DMD as spatial light modulator
The camera lens of etendue receives light principle as shown in figure 3, when using DMD as spatial light modulator, the deflection angle of minitype reflector
Angle value indicates the bright dark of display picture corresponding pixel points, when certain error α occurs in mirror deflecting angle corresponding standard value, spreads out
2 α of irradiating light beam corresponding deflection, meanwhile, the movement of diffracted beam so that there is difference in the loss of shots different wavelengths of light, so
When camera lens receive angular it is small when, it is more sensitive to this error, i.e., etendue it is small in the case where brightness and uneven color phenomenon
It becomes apparent from.Therefore, spatial light modulator is detected in the production process of projection device, caused by understanding spatial light modulator
Brightness and uneven color phenomenon degree have critically important practicability.
Even more important problem is, as DMD flip angle is promoted to ± 17 ° from ± 12 °, the light that DMD can be accommodated
Beam angle degree becomes larger.But big flip angle means the F number (i.e. F#) of camera lens to become smaller therewith, (i.e. the angle of departure of camera lens then becomes
Greatly), the projector contrast (about 600) therefore using LED as light source is very poor.Using laser or laser fluorescence as the projection of light source
It illuminates angular and can accomplish smaller (i.e. the angle of departure is smaller) when equipment uses the DMD of same specification, and camera lens F number can be with
Do big, therefore higher contrast (about 3500) can be obtained.When pixel modulated process certain in spatial light modulator
When occurring abnormal, the projection device of non-laser light source (light bulb or LED) is since contrast is low, for the exception of these pixel grades
Phenomenon is insensitive, it is believed that spatial light modulator is working properly；And contrast is very in the optical projection system of laser or laser fluorescence
Height, the exception of certain pixels will lead to more apparent picture non-uniform phenomenon, i.e. spatial light modulator does not meet product
Demand.Therefore, for the optical projection system of high contrast, the method for proposing reliable detection spatial light modulator has extremely important
Meaning.
Summary of the invention
In order to which brightness caused by solution space optical modulator and/or uneven color phenomenon degree, the present invention provide a kind of sky
Between optical modulator detection method.
A kind of detection method of spatial light modulator comprising following steps:
Illumination light is provided；
Spatial light modulator receives the illumination light and generates image light, and the spatial light modulator includes that multiple modulation are single
Member；
It projects described image light and generates projected image, wherein multiple pixels of the projected image and the multiple modulation
Unit corresponds；
It shoots the projected image and generates shooting image；And
The misalignment angle of multiple modulation units according to spatial light modulator described in the shooting image analysis.
Compared to the prior art, in the detection method, by shooting and analyzing described in the spatial light modulator modulation
The shooting image for the projected image that illumination light generates, can know the angle of deviation of multiple modulation units of the spatial light modulator
Degree, to understand brightness caused by the spatial light modulator and/or uneven color phenomenon degree, and then can determine the sky
Between optical modulator whether can be used or be applicable in which kind of optical projection system, reach the mesh effectively used the spatial light modulator
's.
Detailed description of the invention
Fig. 1 is to search reason flow chart according to display frame problem.
Fig. 2 be using LCD as spatial light modulator in the case where shots light situation schematic diagram.
Fig. 3 be using DMD as spatial light modulator in the case where different etendues camera lens receive light principle signal
Figure.
Fig. 4 is the flow chart of the detection method of spatial light modulator of the present invention.
Fig. 5 is the structural schematic diagram using the detection device of detection method shown in Fig. 4.
Fig. 6 is the brief process and schematic illustration of pretreated step.
Fig. 7 is the specific logical flow diagram of detection method.
Fig. 8 is the process and schematic illustration that non-uniform phenomenon is judged using detection device shown in Fig. 5.
Fig. 9 and Figure 10 is the image illumination distribution schematic diagram obtained according to the shooting image of two kinds of embodiments.
Figure 11 be using detection device shown in Fig. 5 filming apparatus resolution ratio be less than the projected image resolution ratio when
Process and schematic illustration.
Main element symbol description
Detection device 100
Light source 101
Lighting system 102
Spatial light modulator 103
Projection lens 104
Screen 105
Filming apparatus 106
Data processing equipment 107
Step S1-S5
The present invention that the following detailed description will be further explained with reference to the above drawings.
Specific embodiment
The method that the device of detection spatial light modulator proposed by the present invention uses can be used in laser fluorescence projection device
The detection of spatial light modulator on production line, by the detection to spatial light modulator reduce projection device go wrong it is several
Rate improves the reliability of projection products.
Fig. 4 and Fig. 5 is please referred to, Fig. 4 is the flow chart of the detection method of spatial light modulator of the present invention, and Fig. 5 is using Fig. 4
Shown in detection method detection device 100 structural schematic diagram.The detection device 100 includes light source 101, lighting system
102, spatial light modulator 103, projection lens 104, screen 105, filming apparatus 106 and data processing equipment 107.
Detection method includes the following steps the S1-S5.
Step S1, provides illumination light.Wherein, the light source 101 is for issuing light source light.The lighting system 102 is located at
In the optical path of the light source light, for the light source light to be converted to the illumination light.It is appreciated that the light source 101 can be with
For laser light source, such as blue laser light source.In one embodiment, the lighting system 102 may include Wavelength converter,
Relay lens, dodging device etc., the Wavelength converter can be colour wheel, a part of indigo plant issued for receiving the light source
Color laser simultaneously generates stimulated light (such as red fluorescence and green fluorescence or yellow fluorescence), the blue laser of another part and described
Stimulated light is provided to the spatial light modulator 103 collectively as the illumination light.In one embodiment, the light source packet
Include blue, red and green three colors laser light source when, the lighting system can not also include Wavelength converter, but can be with
Including optical elements such as relay lens, dodging devices, the blue, red and green three color laser as the illumination light and by
It is provided to the spatial light modulator 103.
Step S2, the spatial light modulator 103 receive the illumination light and generate image light, the spatial light modulator
103 include multiple modulation units.Specifically, the spatial light modulator 103 is located in the optical path where the illumination light, thus
It receives the illumination light and generates image light, it will be understood that when the spatial light modulator is dmd chip, the modulation unit is
DMD micro mirror.
Step S3, projection described image light generate projected image, wherein multiple pixels of the projected image with it is described
Multiple modulation units correspond.Specifically, the projection lens 104 is used for the figure issued to the spatial light modulator 103
As light carries out projection to generate the projected image on the screen 105.
Step S4 shoots the projected image and generates shooting image.Wherein, the filming apparatus 106 is described for shooting
Projected image generates the shooting image, and the filming apparatus 106 can be CCD camera.It is appreciated that due to CCD camera
Resolution ratio can than the light source 101, the lighting system 102, the spatial light modulator 103, the projection lens 104 and
The optical projection system high resolution that the screen 105 is constituted, therefore by each in the available projected image of the shooting image
The brightness value and color tristimulus values of a pixel.
Step S5, the angle of deviation of multiple modulation units according to spatial light modulator 103 described in the shooting image analysis
Degree.Specifically, the data processing equipment 107 is used to receive the shooting image, and according to described in the shooting image analysis
The quality of projected image, to obtain the misalignment angle of multiple modulation units of the spatial light modulator 103.At the data
Reason device 107 can be the computer program (instruction) that is stored in a storage medium and can run on a processor, such as eventually
End control program etc., certainly can also be including other hardware components, such as screen, key, communication device etc., herein no longer
It repeats.Wherein, the storage medium can be hard disk, memory, plug-in type hard disk, intelligent memory card (Smart Media Card,
SMC), secure digital (Secure Digital, SD) block, flash card (Flash Card), at least one disk storage device part,
Flush memory device or other volatile solid-state storage device parts are not limited with above-mentioned.The processor can be central processing list
First (Central Processing Unit, CPU), can also be other general processors, digital signal processor (Digital
Signal Processor, DSP), specific integrated circuit (Application Specific Integrated Circuit,
ASIC), ready-made programmable gate array (Field-Programmable Gate Array, FPGA) or other programmable logic
Device, discrete gate or transistor logic, discrete hardware components etc., and be not limited with above-mentioned.
It is appreciated that the detection method further includes the step of the installation spatial light modulator 103 before step S2
Suddenly what is carried out and before installing the spatial light modulator 103 carries out pretreated step to the illumination light.
Specifically, referring to Fig. 6, Fig. 6 is the process and schematic illustration of the pretreated step.It is described pretreated
Step the following steps are included:
The illumination light is received using 104 pairs of the projection lens to project；
It is shot using the image that the filming apparatus 106 projects the illumination light；
The image projected to the illumination light of the shooting carries out uniformity detection.Specifically, institute can be used
It states the image that data processing equipment 107 or naked eyes project the illumination light of the shooting and carries out uniformity detection.
If the image that the illumination light of the shooting is projected is uniformly, to carry out the installation spatial light modulator
103 and subsequent step S2-S5, if the image that the illumination light of the shooting is projected be it is non-uniform, replace sending
The light source 101 of the illumination light, the illumination light to optical element (such as described lighting system 102 between the projected image
In optical element: lens, dodging device etc.；Projection lens 104；Or projection screen 105) and the filming apparatus 106 in
At least one, until the image that the illumination light is projected is uniform.
It is appreciated that the purpose of above-mentioned pretreated step is to guarantee that the spatial light modulator 103 receives
Illumination light is the uniform and described projection lens 104 and/or filming apparatus will not have and impact to the detection method
Defect.When found after the pretreated step illumination light be it is uniform, then can carry out that the spatial light is installed
The step of modulator 103, thus step S2-S5 described in further progress.If being limited by experiment condition uniformly to be shone
Mingguang City, then can recorde each pixel of projection illumination light illumination and color tristimulus values for step S5 data processing point
It is used in analysis.
Further, in one embodiment, in the step S5, if judging the space according to the shooting image
103 existing defects of optical modulator (misalignment angle and/or illumination of such as a certain number of modulation units are more than predetermined value), then judge
The testing result of the spatial light modulator 103 is unqualified；If according to the shooting under the projection lens 104 of current F number
Image judge the testing result of the spatial light modulator for it is qualified (misalignment angles of such as a certain number of modulation units and/or
Illumination is in predetermined range), then the detection method further include: adjust the F number or the different F of replacement of the projection lens 104
Several projection lens 104, and each step S1-S5 of the detection method is repeated, so that judgement is different from the sky under F number again
Between the testing result of optical modulator 103 whether be qualified.Wherein, the F number of the adjustment projection lens 104 or replacement are different
In the step of projection lens 104 of F number, the F number is gradually increased.Specifically, according to above-mentioned steps, the tool of the detection method
Body logic flow can be as shown in Figure 7.It is appreciated that term F number represents the F-number of camera lens, be usually denoted as F#, as F3.5,
F5.6 etc., specifically, the F number of a camera lens are equal to the ratio of the focal length f ' of the camera lens and the diaphragm diameter D of the camera lens, i.e.,
F '/D, therefore, F number, that is, projection lens 104 F-number of the projection lens 104, and it is equal to the projection lens 104
Focal length and the projection lens 104 diaphragm diameter ratio.
Further, in above-mentioned steps, mainly not in view of the F number of projection lens used in different optical projection systems
Together, for guarantee testing result can accurate judgement spatial light modulator 103 to be measured whether meet optical projection system requirement, detecting
Such case is judged using the imaging of projection lens 104 (i.e. acquisition projected image) of F number smaller (such as F#1.7) first in journey
Under 106 shooting picture of filming apparatus whether there is problem, if picture uniformly if prove spatial light modulator 103 receive angular
It can work normally in the case where (i.e. launch angle is larger) greatly.Under the premise of herein, the projection of F number larger (such as F#3.5) is replaced
Camera lens 104 reuses detection system imaging, and then detection imaging picture whether there is picture element flaw.If replacing projection lens
Occur more apparent picture element flaw (i.e. testing result be underproof ask money) after 104, then proves that angular is smaller (to be emitted receiving
Angle is larger) in the case where spatial light modulator 103 be unsatisfactory for optical projection system requirement.
Further, for different optical projection systems, the deflection angle of the modulation unit of acceptable spatial light modulator 103
Deviate standard value size have differences, in one embodiment, the modulation unit of quantitative analysis spatial light modulator 103 it is inclined
The detection method that declinate degree uses may comprise steps of:
The illumination light with parallel illuminating bundle is provided using the light source 101 and the lighting system 102；
The projection lens 104 of the F number or the different F numbers of replacement that adjust the projection lens 104 to the projected image extremely
A few pixel is completely dimmed；And
Image taking, and foundation are carried out using the projected image dimmed at least one described pixel of filming apparatus 106
At least one pixel corresponding at least one described in the shooting image analysis of the dimmed projected image of at least one described pixel
The misalignment angle of a modulation unit.
Specifically, in the step of misalignment angle of the modulation unit of above-mentioned quantitative analysis spatial light modulator 103, the photograph
The light radiation field L for the described image light that Mingguang City is formed after multiple modulation units via the spatial light modulator 103 and each
Space Angle α, β of the corresponding diffracted beam of modulation unit meets following formula:
L(α,β-β0)=0, α2+β2≥1。
Wherein, in above-mentioned formula, β0For incidence angle, λ is the wavelength of light, and the limit of integration of Space Angle α, β is given by F number
Out, above formula obtains the wavelength X and Space Angle α, β integral to the relationship f of each pixel brightness and Space Angle
(α, β)；When deviation (Δ α, Δ β) occurs in the deflection angle of a modulation unit, diffracted beam Space Angle α, β is relative to normal
There are an angle translational movements for value, then pixel brightness corresponding for the modulation unit for deviation occur and Space Angle are closed
System just becomes f (α+Δ α, β+Δ β), brings measure data fitting into and obtains the value of Δ α and Δ β, then the modulation unit is inclined
Poor compound angle δ is expressed as cos δ=cos Δ α cos Δ β.
In another embodiment, the detection method can also include: according to the shooting image and fixed using reflection
Rule calculates the step of flip angle of multiple modulation units of the spatial light modulator.
It is appreciated that the detection method can be used for the detection of the spatial light modulator on projection device production line, and
It and include: the efficiency and spatial light tune of spatial light modulator to the parameter for also needing to pay close attention in the detection process of spatial light modulator
Device processed causes the degree of non-uniform phenomenon.It is how further right to the detection device 100 and its detection method used below
103 efficiency of spatial light modulator, brightness irregularities phenomenon, uneven color phenomenon and use different resolution filming apparatus 106
The concrete scheme step of detection be illustrated.
(1) to the detection of 103 efficiency of spatial light modulator
It is appreciated that the pretreated step can also include: to be projected to the illumination light of the shooting
The step of original luminance and color tristimulus values of each pixel of image are recorded and according to described in the shooting
The image that illumination light is projected obtains the original luminance of each pixel and calculates the average original luminance I's of all pixels point
Step.Accordingly, to realize the detection to 103 efficiency of spatial light modulator, the detection method can also include by institute
State the following steps of the execution of data processing equipment 107:
The practical illumination of each pixel is obtained according to the shooting image；
The average illumination I' of image all pixels point is shot described in practical luminance calculation according to each pixel；
The efficiency E (%) of the spatial light modulator is calculated according to the average illumination and the average original luminance；
The efficiency E (%) is compared with preset value to judge whether the efficiency of the spatial light modulator is up to standard.
It is appreciated that the average illuminationAnd the efficiency E (%) corresponds with following formula:
Wherein, inFor the practical illumination of any one pixel, N is the quantity of pixel.
Generally, it is contemplated illumination light, illumination light hot spot can be received entirely to for guarantee spatial light modulator 103
Size is slightly larger than 103 size of spatial light modulator, and the efficiency of spatial light modulator 103 is about 60%/0.85=70.6% at this time,
When be calculated the efficiency of detected space optical modulator 103 lower than under this numerical value and the biggish situation of difference (as lower than 50%,
Can specifically be set according to actual needs), it is believed that 103 quality dissatisfaction of detected space optical modulator, the i.e. testing result of efficiency
It is unqualified.
(2) to the detection of the 103 brightness irregularities phenomenon of spatial light modulator
In general, the non-uniform phenomenon of projected image picture caused by the spatial light modulator 103 is shown as certain
The display of pixel is abnormal.The process of non-uniform phenomenon is judged using the detection device 100 as shown in figure 8, not installing described
When spatial light modulator 103, image that the pretreated step has projected the illumination light of the shooting
The original luminance and color tristimulus values of each pixel carry out being recorded as detecting 103 brightness irregularities of spatial light modulator
Phenomenon；After installing spatial light modulator 103 to be measured in the detection device 100, projected image is obtained on the screen, is then led to
Cross that filming apparatus 106 obtains the Illumination Distribution of image and the color tristimulus values of each pixel judge by spatial light modulator
The uniform uneven color phenomenon of brightness disproportionation caused by 103.
Specifically, the detection method can also include the following steps executed by the data processing equipment 107:
The practical illumination and/or color tristimulus values of each pixel are obtained according to the shooting image；
According to each pixel practical illumination and/or color tristimulus values come calculate pixel abnormal point number M,
The obvious degree C (%) of pixel abnormal point distribution density and/or single pixel abnormal point；And
According to the obvious of the number M of the pixel abnormal point, pixel abnormal point distribution density and/or single pixel abnormal point
Degree judges whether the projected picture of the spatial light modulator meets the requirement of uniformity, wherein the single pixel is different
The obvious degree of normal point C (%) meets following formula:
ikIt is the practical brightness value of each pixel, N is the quantity of pixel, and μ is the average illumination of all pixels point.
In one embodiment, according to it is described shooting image obtain image illumination distribution schematic diagram as shown in figure 9, due to
There is error, perspective view to the modulation of illumination light in structural unit in the spatial light modulator 103 corresponding to certain pixels
As will therefore generate the random pixel abnormal point in some positions.The brightness uniformity for having had an impact image of pixel abnormal point
Property.The degree of brightness irregularities phenomenon is embodied in the following aspects: the number M of pixel abnormal point, the distribution of pixel abnormal point are close
The obvious degree of degree and single pixel abnormal point.The obvious degree C (%) of pixel abnormal point is asked with the brightness value of all pixels point
The ratio of root mean square and average value is taken to be measured and (calculate the formula of C (%)).
According to above-mentioned it is found that the bigger pixel abnormal point of C value is more obvious.When the obvious degree of single pixel abnormal point is smaller can
In the case where ignoring, the number of pixel abnormal point generates main influence to brightness irregularities phenomenon.Assuming that entirely throwing
The number of pixel abnormal point is required to be limited within m in shadow picture, as M > m, it is believed that brightness irregularities degree is obvious, is unsatisfactory for
Optical projection system requirement.As M < m, the distribution density of extraordinary image vegetarian refreshments is to influence the principal element of brightness irregularities phenomenon.Such as Fig. 9
It is shown, when pixel abnormal point is distributed relative distribution, in the case where in multiple set of pixels, it is believed that brightness irregularities phenomenon
It is unobvious, meet optical projection system requirement.As shown in Figure 10, when pixel abnormal point, which is distributed, to be concentrated, it is believed that brightness irregularities degree
Obviously, it is unsatisfactory for optical projection system requirement.
(3) to the detection of the 103 uneven color phenomenon of spatial light modulator
It is appreciated that the spatial light modulator 103 causes the uneven color phenomenon degree of projected image to be difficult to pass through
Directly observation is judged, the color tristimulus values (X of each pixel can be obtained according to the shooting imagek, Yk, Zk), and count
Calculate the uneven color degree of projected image.Specifically, the detection method is further comprising the steps of:
Color tristimulus values (X according to each pixelk, Yk, Zk) chromaticity coordinates (x of each pixel is calculatedk, yk),
Chromaticity coordinates (the xk, yk) meet following formula:
Compare the chromaticity coordinates difference of adjacent pixels to judge that the color homogeneity of the spatial light modulator meets the requirements.
(4) detection of different resolution filming apparatus 106 is used
In the step S4 of the detection method, when the resolution ratio of the filming apparatus 106 is less than the projected image
When resolution ratio, the different zones that the filming apparatus shoots the projected image at least twice can be used, to described at least two
The image of secondary shooting carries out image synthesis to generate the shooting image.
Specifically, with the continuous development of shadow casting technique, the resolution ratio of projected image is higher and higher, it is difficult to guarantee always
The high resolution of the filming apparatus 106 is in projected image resolution ratio.As shown in figure 11, when 106 resolution ratio of filming apparatus
When less than projection device, repeatedly shooting projected image different location local message can be taken, and close by image real time transfer
At the overall picture method of projected image, then measured on the basis of above embodiments each pixel of projected image illumination and
Color tristimulus values, and judge whether spatial light modulator to be measured meets optical projection system requirement.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (13)
1. a kind of detection method of spatial light modulator, it is characterised in that: the detection method includes
Illumination light is provided；
Spatial light modulator receives the illumination light and generates image light, and the spatial light modulator includes multiple modulation units；
It projects described image light and generates projected image, wherein multiple pixels of the projected image and the multiple modulation unit
It corresponds；
It shoots the projected image and generates shooting image；And
The misalignment angle of multiple modulation units according to spatial light modulator described in the shooting image analysis.
2. the detection method of spatial light modulator as described in claim 1, it is characterised in that: the projection described image light produces
In the step of raw projected image, the image light that the spatial light modulator issues project generating by projection lens
The projected image, the projection lens has current F number, described according to spatial light modulator described in the shooting image analysis
Multiple modulation units misalignment angle the step of in, if according under the projection lens of current F number the shooting image judgement
The testing result of the spatial light modulator is qualification, the then detection method further include: adjust the projection lens F number or
The projection lens of different F numbers is replaced, and repeats each step of the detection method, thus described in judgement is different under F number again
Whether the testing result of spatial light modulator is qualified, wherein the F number or the different F numbers of replacement of the adjustment projection lens
Projection lens the step of in, the F number is gradually increased.
3. the detection method of spatial light modulator as claimed in claim 2, it is characterised in that: the detection method further include:
The illumination light for having parallel illuminating bundle is provided；
It adjusts the F number of the projection lens or replaces the projection lens of different F numbers at least one pixel of the projected image
Point is completely dimmed；And
At least one pixel described in the shooting image analysis of the projected image dimmed according at least one described pixel is corresponding
At least one modulation unit misalignment angle.
4. the detection method of spatial light modulator as claimed in claim 3, it is characterised in that: the illumination light is via the sky
Between optical modulator multiple modulation units after the light radiation field L diffraction corresponding with each modulation unit of described image light that is formed
Space Angle α, β of light beam meets following formula:
L(α,β-β0)=0, α2+β2≥1；
Wherein, β0For incidence angle, λ is the wavelength of light, and the limit of integration of Space Angle α, β is provided by F number, by above formula pair
The wavelength X and Space Angle α, β integral obtain the relationship f (α, β) of each pixel brightness and Space Angle；
When deviation (Δ α, Δ β) occurs in the deflection angle of a modulation unit, diffracted beam Space Angle α, β is relative to normal value
There are an angle translational movements, then pixel brightness corresponding for the modulation unit for deviation occur and space angular dependence
Just become f (α+Δ α, β+Δ β), brings measure data fitting into and obtain the value of Δ α and Δ β, then the deviation of the modulation unit
Compound angle δ is expressed as cos δ=cos Δ α cos Δ β.
5. the detection method of spatial light modulator as described in claim 1, it is characterised in that: the detection method includes:
The flip angle of multiple modulation units of the spatial light modulator is calculated according to the shooting image and using reflection law
Degree.
6. the detection method of spatial light modulator as described in claim 1, it is characterised in that: the detection method further include
The spatial light modulator receives the step of the installation spatial light modulator before the step of illumination light generation image light
Suddenly.
7. the detection method of spatial light modulator as claimed in claim 6, it is characterised in that: the detection method further include
What is carried out before installing the spatial light modulator carries out pretreated step, the pretreated step packet to the illumination light
Include following steps:
The illumination light is received to be projected；
The image projected to the illumination light is shot；
The image projected to the illumination light of the shooting carries out uniformity detection, if the illumination light of the shooting
The image projected be it is uniform, then the installation spatial light modulator and subsequent step are carried out, if the shooting
The image that the illumination light is projected be it is non-uniform, then replace the light source for issuing the illumination light, the illumination light to institute
At least one of optical element and the filming apparatus between projected image are stated, until the figure that the illumination light is projected
It seem uniform.
8. the detection method of spatial light modulator as claimed in claim 6, it is characterised in that: the detection method further include
What is carried out before installing the spatial light modulator carries out pretreated step, the pretreated step packet to the illumination light
Include following steps:
The illumination light is received to be projected；
The image projected to the illumination light is shot；
The original luminance of each pixel of the image projected to the illumination light of the shooting records；And
The image that the illumination light according to the shooting is projected obtains the original luminance of each pixel and calculates all
The average original luminance of pixel
9. the detection method of spatial light modulator as claimed in claim 8, it is characterised in that: the detection method further include:
The practical illumination of each pixel is obtained according to the shooting image；
The average illumination of image all pixels point is shot described in practical luminance calculation according to each pixel
The efficiency E (%) of the spatial light modulator, the effect are calculated according to the average illumination and the average original luminance
Rate E (%) meets following formula:
The efficiency E (%) is compared with preset value to judge whether the efficiency of the spatial light modulator is up to standard.
10. the detection method of spatial light modulator as described in claim 1, it is characterised in that: the detection method further include:
The practical illumination and/or color tristimulus values of each pixel are obtained according to the shooting image；
Practical illumination and/or color tristimulus values according to each pixel calculate number M, the pixel of pixel abnormal point
The obvious degree C (%) of abnormal point distribution density and/or single pixel abnormal point；And
According to the number M of the pixel abnormal point, the obvious degree of pixel abnormal point distribution density and/or single pixel abnormal point
Judge whether the projected picture of the spatial light modulator meets the requirement of uniformity,
Wherein, the obvious degree of the single pixel abnormal point C (%) meets following formula
ikIt is the practical brightness value of each pixel, N is the quantity of pixel, and μ is the average illumination of all pixels point.
11. the detection method of spatial light modulator as claimed in claim 10, it is characterised in that: the detection method is also wrapped
It includes:
Color tristimulus values (X according to each pixelk, Yk, Zk) chromaticity coordinates (x of each pixel is calculatedk, yk), it is described
Chromaticity coordinates (xk, yk) meet following formula:
Compare the chromaticity coordinates difference of adjacent pixels to judge that the color homogeneity of the spatial light modulator meets the requirements.
12. the detection method of spatial light modulator as described in claim 1, it is characterised in that: shoot the projected image and produce
In the step of raw shooting image, described image is shot using filming apparatus, when the resolution ratio of the filming apparatus is less than the throwing
When the resolution ratio of shadow image, shoot the different zones of the projected image at least twice using the filming apparatus, to it is described extremely
Few image shot twice carries out image synthesis to generate the shooting image.
13. the detection method of spatial light modulator as described in claim 1, it is characterised in that: the spatial light modulator is
Dmd chip, the modulation unit are DMD micro mirror.
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