CN110380695A - Auto-excitation type full solid-sate radio frequency power supply - Google Patents
Auto-excitation type full solid-sate radio frequency power supply Download PDFInfo
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- CN110380695A CN110380695A CN201810333581.9A CN201810333581A CN110380695A CN 110380695 A CN110380695 A CN 110380695A CN 201810333581 A CN201810333581 A CN 201810333581A CN 110380695 A CN110380695 A CN 110380695A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/52—Circuit arrangements for protecting such amplifiers
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Abstract
The invention discloses a kind of auto-excitation type full solid-sate radio frequency power supplies, including radio-frequency signal generator, rf power amplifier circuit, power supply line, controller and precision power detector, precision power detector includes phase-comparison circuit, and detection rf power amplifier circuit is exported to the incident power of load and reflection power；Radio-frequency signal generator will adjust the frequency of its output power signal according to incident power and reflection power, so that rf power amplifier circuit, which is exported to the reflection power of load, is less than the 1% of incident power, controller adjusts the voltage that power supply line is applied to rf power amplifier circuit according to incident power and reflection power.The present invention can be realized the detection of high-precision radio-frequency power, and detection range is wide, and precision consistency is good, and dead zone is small, can real-time guard rf power amplifier circuit, avoid damage from failing.
Description
Technical field
The present invention relates to radio-frequency power supplies, more particularly, to a kind of auto-excitation type full solid-sate radio frequency power supply.
Background technique
Radio-frequency power supply is the device for generating rf power signal, belongs to ICP (Inductance Coupled
Plasma, inductively coupled plasma body) mass spectrograph and ICP spectrometer core component, all generation plasmas carry out materials
The instrument of analysis requires radio-frequency power supply and provides energy.
According to the difference of energisation mode, radio-frequency power supply is divided into auto-excitation type radio-frequency power supply and independent-excited radio-frequency power supply；However, nothing
By the radio-frequency power supply of the radio-frequency power supply or independent-excited that are auto-excitation type, basic composition part include radio-frequency signal generator,
Rf power amplifier circuit and power supply line；It is entirely penetrated the difference is that auto-excitation type radio-frequency power supply is directly incorporated using load
Frequency power amplification circuit changes the frequency of radiofrequency signal according to the voltage change in load to realize maximum power output extremely
Load is exceedingly fast due to its adjustment speed and causes to wear without machinery rotation, at present by the ICP mass spectrograph of international mainstream and ICP light
Spectrometer is widely used.
But since auto-excitation type radio-frequency power supply in the prior art does not configure radio frequency power detector, so can not be quasi-
Really know the radio-frequency power situation applied to present load, theoretical calculation can only be carried out by the experiment effect in later period, this
It will influence whether the real-time guard of rf power amplifier circuit, under especially high-power use, if reflection power is excessive,
Possible moment will directly puncture radio-frequency power amplifying transistor, cause irreversible damage.
Currently, high-acruracy survey is the inevitable requirement of ICP mass spectrograph and ICP spectrometer, and detection accuracy requires also to get over
Come higher, more stringent requirements are proposed for this output power to auto-excitation type full solid-sate radio frequency power supply, i.e. the fluctuation model of output power
Enclosing should be sufficiently small.For the output power of radio-frequency power supply, radio-frequency power detects whether accurate most important.
Summary of the invention
It penetrates the technical problem to be solved by the invention is to provide a kind of auto-excitation type with precision power detector is all solid state
Frequency power, the radio-frequency power supply can be realized high-precision radio-frequency power detection, and detection range is wide, and precision consistency is good, and dead zone is small,
Can real-time guard rf power amplifier circuit, avoid damage fail.
In order to solve the above-mentioned technical problems, the present invention provides a kind of auto-excitation type full solid-sate radio frequency power supply, the auto-excitation types
Full solid-sate radio frequency power supply includes radio-frequency signal generator, rf power amplifier circuit, power supply line, controller and smart power inspection
Survey device, the precision power detector be electrically connected respectively the radio-frequency signal generator, the rf power amplifier circuit and
The controller, the precision power detector detect the rf power amplifier circuit and export to the radio-frequency power shape of load
Condition, the radio-frequency power situation includes incident power and reflection power；The radio-frequency signal generator will be according to the precision
The incident power and the reflection power that power detector detects adjust the frequency of its output power signal, so that
The rf power amplifier circuit, which is exported to the reflection power of load, is less than the 1% of the incident power, the controller
According to from the precision power detector the incident power and the reflection power it is electrical with the controller to adjust
The power supply line of connection is applied to the voltage of the rf power amplifier circuit；
Wherein, the precision power detector includes phase-comparison circuit, voltage transformer, current transformer, accurate inspection
Wave module and microcontroller, the microcontroller are integrated with analog-digital converter and microprocessing unit, the voltage transformer and institute
Current transformer is stated to be connected with the accurate detection module respectively, the accurate detection module include add circuit, subtraction circuit,
Rectification circuit and filter amplification circuit, the add circuit is by the signal from the voltage transformer and the current transformer
Add operation is carried out, the subtraction circuit will carry out subtraction fortune from the signal of the voltage transformer and the current transformer
It calculates, the add circuit and the subtraction circuit are connected with the rectification circuit respectively, and the rectification circuit connects the filtering
Amplifying circuit, the filter amplification circuit are connected with the microcontroller, and the phase-comparison circuit is mutual with the voltage respectively
Sensor, the current transformer, the microcontroller are connected, to the letter from the voltage transformer and the current transformer
Number phase bit comparison is carried out, and phase comparison result is sent to the microcontroller.
Further, the present invention also has a characteristic that the accurate detection module further includes variable connector, the multichannel
The input terminal of switch is separately connected the output end of the add circuit and the output end of the subtraction circuit, the variable connector root
According to the instruction of the microcontroller, the output signal of the add circuit and the output signal of the subtraction circuit are transmitted respectively
To the rectification circuit.
Further, the present invention also has a characteristic that the rectification circuit includes rectification operational amplifier and the first inspection
Wave diode, the anode of first detector diode connect the inverting input terminal of the rectification operational amplifier, and described first
The cathode of detector diode connects the output end of the rectification operational amplifier, the output end of the rectification operational amplifier and institute
It states and is also connected with the second detector diode between the input terminal of filter amplification circuit.
Further, the present invention also has a characteristic that the level of the normal phase input end of the rectification operational amplifier is small
In 0.01 volt.
Further, the present invention also has a characteristic that first detector diode and second detector diode
For the Schottky diode of low conducting voltage.
Further, the present invention also has a characteristic that the rectification operational amplifier is high speed operation amplifier, bandwidth
Greater than 1GHz.
Further, the present invention also has a characteristic that the filter amplification circuit is by operational amplifier, resistance and electricity
Hold the first-order filtering amplifying circuit constituted.
Further, the present invention also has a characteristic that the filter amplification circuit is by operational amplifier, resistance and electricity
Hold the second-order filter amplifying circuit constituted.
Further, the present invention also have a characteristic that the input resistance of the rectification operational amplifier, be connected to it is described
The resistance of the resistance of feedback resistance and the filter amplification circuit between the inverting input terminal and output end of rectification operational amplifier
Value is configured according to the gain and input range of the accurate detection module.
Compared with prior art, the invention has the following advantages that
Carry out real-time detection radio-frequency power since auto-excitation type full solid-sate radio frequency power supply of the present invention is configured with precision power detector
Amplifying circuit is exported to the radio-frequency power situation of load, according to detected incident power and reflection power, so that radio frequency is believed
Number generator adjusts the frequency of its output signal, and controller adjustment power supply line is exported to rf power amplifier circuit
Voltage, thus realize meet by maximum power output to while load, protect rf power amplifier circuit in real time, keep away
Exempt from damage failure.
Detailed description of the invention
Fig. 1 is the theory of constitution block diagram of auto-excitation type full solid-sate radio frequency power supply of the present invention；
Fig. 2 is the functional block diagram of the precision power detector of radio-frequency power supply of the present invention；
Fig. 3 is the schematic diagram of the first embodiment of the accurate detection module of precision power detector of the invention；
Fig. 4 is the schematic diagram of second of embodiment of the accurate detection module of precision power detector of the invention；
Fig. 5 is the electricity of the rectification circuit of accurate detection module of the invention and the first embodiment of filter amplification circuit
Road schematic diagram；
Fig. 6 is the electricity of the rectification circuit of accurate detection module of the invention and second of embodiment of filter amplification circuit
Road schematic diagram；
Fig. 7 is the electricity of the rectification circuit of accurate detection module of the invention and the third embodiment of filter amplification circuit
Road schematic diagram.
Specific embodiment
In order to understand the present invention in depth, with reference to the accompanying drawing and specific embodiment the present invention is described in detail.
As shown in Figure 1, the present invention provides a kind of auto-excitation type full solid-sate radio frequency power supply, including radio-frequency signal generator, penetrate
Frequency power amplification circuit, power supply line, controller and precision power detector, in addition, this radio-frequency power supply further includes man-machine interface
Interface etc..
Wherein, precision power detector is electrically connected radio-frequency signal generator, rf power amplifier circuit and control respectively
Device, precision power detector use directional radio-frequency power detection structure, and detection rf power amplifier circuit is exported to load
Radio-frequency power situation, radio-frequency power situation include incident power and reflection power；Radio-frequency signal generator is according to smart power
The incident power and reflection power that detector detects adjust the frequency of its output power signal, so that radio-frequency power amplifies
The reflection power of circuit output to load is less than the 1% of incident power.Controller and power supply line are electrically connected, and according to next
The electricity that power supply line is applied to rf power amplifier circuit is controlled from the incident power of precision power detector and reflection power
Pressure.
As shown in Fig. 2, precision power detector of the invention includes phase-comparison circuit, voltage transformer, Current Mutual Inductance
Device, accurate detection module and microcontroller, voltage transformer and current transformer are connected with accurate detection module respectively, precision inspection
Wave module connects microcontroller.Phase-comparison circuit is connected with voltage transformer, current transformer, microcontroller respectively, to next
Phase bit comparison is carried out from the signal of voltage transformer and current transformer, i.e., to the load voltage signal detected by voltage transformer
Phase bit comparison is carried out with the load current signal detected by current transformer, and phase comparison result is sent to microcontroller
Device, auxiliary microcontroller judge whether currently detected radio-frequency power state is correct.For example, when load voltage signal and load
When the phase of current signal is identical or phase difference is less than 5 degree, load may indicate that in substantially pure resistance state, if detecting at this time
Reflection power numerical value be 0 or very little, then may determine that reflection power numerical value detected is correct, incident power numerical value is also just
Really, the power detection deviation because of caused by calibration of power null offset and Scalar Decoupling algorithm is avoided, to improve radio-frequency power
The accuracy of detection.Phase-comparison circuit includes shaping circuit, flip and flop generator and counter etc..Voltage transformer can be adopted
Used in the RF signal input end of precision power detector, a mutual inductor in parallel is constituted over the ground, and turn ratio is according to accurate detection
The gain of module determines, the scheme of capacitive divider can also be used.Current transformer can be used in precision power detector
The mutual inductor of directly connecting between RF signal input end and output end is constituted, and turn ratio is according to the increasing of accurate detection module
Benefit determines.Microcontroller is integrated with analog-digital converter and microprocessing unit, and in some applications, this microcontroller can be monolithic
The single-chip microcontroller of machine, preferably C8051F series.
As shown in figure 3, accurate detection module includes add circuit, subtraction circuit, rectification circuit and filter amplification circuit, add
Signal from voltage transformer and current transformer is carried out add operation by method circuit, and the result of add operation is generally used for table
It levies incident power (otherwise referred to as forward power), subtraction circuit carries out the signal from voltage transformer and current transformer
Subtraction, the result of subtraction are generally used for characterization reflection power (otherwise referred to as backward power), add circuit and subtract
Method circuit is connected with rectification circuit respectively, and rectification circuit connects filter amplification circuit, and filter amplification circuit is connected with microcontroller.
In embodiment shown in Fig. 4, accurate detection module further includes variable connector, the input terminal difference of variable connector
The output end of add circuit and the output end of subtraction circuit are connected, which will add respectively according to the instruction of microcontroller
The output signal of method circuit and the output signal of subtraction circuit are exported from the output end of variable connector to rectification circuit.With Fig. 3 institute
The embodiment shown is compared, and Fig. 4 saves device, reduce costs only with a rectification circuit and filter amplification circuit.
Fig. 5 indicates the rectification circuit of accurate detection module of the invention and the first embodiment of filter amplification circuit,
Rectification circuit mainly includes rectification operational amplifier U1 and the first detector diode D1, the second detector diode D2, the first detection
The inverting input terminal of the anode connection rectification operational amplifier U1 of diode D1, the cathode of the first detector diode D1 connect rectification
The output end and filter and amplification of rectification operational amplifier U1 is arranged in the output end of operational amplifier U1, the second detector diode D2
Between the input terminal of circuit.
First detector diode D1 and the second detector diode D2 can be the Schottky diode of low conducting voltage, preferred type
Number be IN5711 diode.Rectification operational amplifier is high speed operation amplifier, and band is wider than 1GHz, preferably texas,U.S instrument
The bandwidth of device company is high speed operation amplifier OPA657, the first detector diode D1, the second detector diode D2 of 1.6GHz
Dynamic characteristic it is related to rectification operational amplifier U1, IV curve zero crossing, detection range becomes larger, and dead zone is small, detection dynamic model
It encloses greatly, precision consistency is good.
The normal phase input end of rectification operational amplifier U1 is provided with the resistance R1 and R2 of partial pressure access, the impedance of resistance R1
At least 1000 times of the impedance height of specific resistance R2, guarantee the level of the normal phase input end of rectification operational amplifier less than 0.01 volt,
Substantially zeroed current potential.
The inverting input terminal of rectification operational amplifier U1 is provided with input resistance R3, the resistance value of input resistance R3 is preferably
50 ohm, be conducive to the impedance matching of radiofrequency signal, this is because the characteristic of radio-frequency transmission line used in semiconductor equipment
Impedance is 50 ohm.It is additionally provided with feedback resistance R6 between the inverting input terminal and output end of rectification operational amplifier U1,
The resistance value of feedback resistance R6 is determined according to the gain of accurate detection module and input range.In the defeated of rectification operational amplifier U1
Output resistance R7 is provided between outlet and the anode of detector diode D2.
Filter amplification circuit is mainly made of operational amplifier, resistance and capacitor, the positive terminal connection of operational amplifier U2
The other end of input resistance R9 and capacitor C1, resistance R9 are separately connected the output end of rectification circuit, and (i.e. detector diode D2's is negative
Pole) and ground resistance R8, capacitor C1 ground connection, between the inverting input terminal and output end of operational amplifier U2 be equipped with resistance R10,
The resistance value of R11, these resistance can be determined according to the gain of accurate detection module and input range, thus constituted first-order filtering and put
Big circuit, finally output can be by the analog signals for the characterization incident power or reflection power that microcontroller is handled.
Fig. 6 indicates the rectification circuit of accurate detection module of the invention and second of embodiment of filter amplification circuit,
Compared with Fig. 5, the embodiment of Fig. 6 is only converted in terms of the input resistance of rectification circuit, using resistance R3, R4 and R5
T-network is constituted, original single input resistance R3 is substituted, this scheme can be realized the shunting partial pressure when input of big signal,
Reduce in ohmically power loss, rectification operational amplifier is protected, so that the input range for expanding accurate detection module (is schemed
5 illustrated embodiments cannot detect the radiofrequency signal of relatively high power, and Fig. 6 illustrated embodiment can detecte), these resistance
Respective resistance values are determined according to the gain of accurate detection module and input range.
Fig. 7 indicates the rectification circuit of accurate detection module of the invention and the third embodiment of filter amplification circuit,
Compared with Fig. 6, first-order filtering amplifying circuit is transformed to second-order filter amplifying circuit by the embodiment of Fig. 7, and this mode is advantageous
In filtering more harmonic waves, to guarantee that the analog-digital converter in microcontroller obtains (the i.e. expression incidence of more accurate numerical value
The numerical value of power and reflection power) so as to the further calculation process of microprocessing unit.
Compared with prior art, the invention has the following advantages that
A, carry out real-time detection radio frequency function since auto-excitation type full solid-sate radio frequency power supply of the present invention is configured with precision power detector
Rate amplifying circuit is exported to the radio-frequency power situation of load, according to detected incident power and reflection power, so that radio frequency
Signal generator adjusts the frequency of its output signal, and controller adjustment power supply line is exported to radio-frequency power and amplifies electricity
The voltage on road is meeting maximum power output to while load to realize, is protecting rf power amplifier circuit in real time,
Damage is avoided to fail；
It B, can using the phase-comparison circuit since the precision power detector in the present invention includes phase-comparison circuit
To avoid the power detection deviation because of caused by calibration of power null offset and Scalar Decoupling algorithm, guarantee radio-frequency power detection
Accuracy；
C, the precision power detector in the present invention uses accurate detection module, so that the dynamic characteristic of detector diode
It is related to rectification operational amplifier, IV curve zero crossing, therefore detection range becomes larger, dead zone is small, and detection dynamic range is big, precision
Consistency is good；
D, since the detector diode in the present invention uses the Schottky diode of low conducting voltage, rectification operational amplifier
Using the operational amplifier of the high band width of high speed, it is ensured that the half-wave of radiofrequency signal is undistorted, and detection accuracy is high.
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects
It is described in detail, it should be understood that being not limited to this hair the foregoing is merely a specific embodiment of the invention
Bright, all within essence of the invention and basic principle, any modification, equivalent substitution, improvement and etc. done should be included in this
Within the protection scope of invention.
Claims (9)
1. a kind of auto-excitation type full solid-sate radio frequency power supply, the auto-excitation type full solid-sate radio frequency power supply includes radio-frequency signal generator, penetrates
Frequency power amplification circuit, power supply line, controller, it is characterised in that: it further include having precision power detector, the smart power
Detector is electrically connected the radio-frequency signal generator, the rf power amplifier circuit and the controller, the essence respectively
Close power detector detects the rf power amplifier circuit and exports to the radio-frequency power situation of load, the radio-frequency power situation
It include incident power and reflection power；The institute that the radio-frequency signal generator will be detected according to the precision power detector
Incident power and the reflection power are stated to adjust the frequency of its output power signal, so that the rf power amplifier circuit
The reflection power of output to load is less than the 1% of the incident power, and the controller is according to from the smart power
The incident power and the reflection power of detector are applied to adjust the power supply line being electrically connected with the controller
Add to the voltage of the rf power amplifier circuit；
Wherein, the precision power detector includes phase-comparison circuit, voltage transformer, current transformer, accurate detection mould
Block and microcontroller, the microcontroller are integrated with analog-digital converter and microprocessing unit, the voltage transformer and the electricity
Current transformer is connected with the accurate detection module respectively, and the precision detection module includes add circuit, subtraction circuit, rectification
Circuit and filter amplification circuit, the add circuit will be carried out from the signal of the voltage transformer and the current transformer
Add operation, the subtraction circuit will carry out subtraction from the signal of the voltage transformer and the current transformer,
The add circuit and the subtraction circuit are connected with the rectification circuit respectively, and the rectification circuit connects the filter and amplification
Circuit, the filter amplification circuit are connected with the microcontroller, the phase-comparison circuit respectively with the voltage transformer,
The current transformer, the microcontroller be connected, to the signal from the voltage transformer and the current transformer into
Row phase bit comparison, and phase comparison result is sent to the microcontroller.
2. auto-excitation type full solid-sate radio frequency power supply according to claim 1, it is characterised in that: the precision detection module is also wrapped
Include variable connector, the input terminal of the variable connector be separately connected the add circuit output end and the subtraction circuit it is defeated
Outlet, the variable connector by the output signal of the add circuit and described subtract respectively according to the instruction of the microcontroller
The output signal of method circuit is transferred to the rectification circuit.
3. auto-excitation type full solid-sate radio frequency power supply according to claim 1 or 2, it is characterised in that: the rectification circuit includes
The anode of rectification operational amplifier and the first detector diode, first detector diode connects the rectification operational amplifier
Inverting input terminal, the cathode of first detector diode connects the output end of the rectification operational amplifier, the rectification
The second detector diode is also connected between the output end of operational amplifier and the input terminal of the filter amplification circuit.
4. auto-excitation type full solid-sate radio frequency power supply according to claim 3, it is characterised in that: the rectification operational amplifier
The level of normal phase input end is less than 0.01 volt.
5. auto-excitation type full solid-sate radio frequency power supply according to claim 4, it is characterised in that: first detector diode and
Second detector diode is the Schottky diode of low conducting voltage.
6. radio-frequency power supply according to claim 5, it is characterised in that: the rectification operational amplifier is high-speed computation amplification
Device, band are wider than 1GHz.
7. auto-excitation type full solid-sate radio frequency power supply according to claim 6, it is characterised in that: the filter amplification circuit be by
The first-order filtering amplifying circuit that operational amplifier, resistance and capacitor are constituted.
8. auto-excitation type full solid-sate radio frequency power supply according to claim 6, it is characterised in that: the filter amplification circuit be by
The second-order filter amplifying circuit that operational amplifier, resistance and capacitor are constituted.
9. auto-excitation type full solid-sate radio frequency power supply according to claim 8, it is characterised in that: the rectification operational amplifier
Input resistance, the feedback resistance being connected between the inverting input terminal and output end of the rectification operational amplifier and the filtering
The resistance value of the resistance of amplifying circuit is configured according to the gain and input range of the accurate detection module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810333581.9A CN110380695A (en) | 2018-04-13 | 2018-04-13 | Auto-excitation type full solid-sate radio frequency power supply |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810333581.9A CN110380695A (en) | 2018-04-13 | 2018-04-13 | Auto-excitation type full solid-sate radio frequency power supply |
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| CN110380695A true CN110380695A (en) | 2019-10-25 |
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| CN201810333581.9A Pending CN110380695A (en) | 2018-04-13 | 2018-04-13 | Auto-excitation type full solid-sate radio frequency power supply |
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Cited By (4)
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| CN113064368A (en) * | 2021-03-18 | 2021-07-02 | 科海技术股份有限公司 | High-power radio frequency power supply system |
| CN115001414A (en) * | 2022-05-09 | 2022-09-02 | 西安北方华创微电子装备有限公司 | Radio frequency power supply |
| RU2784623C1 (en) * | 2022-05-18 | 2022-11-29 | Акционерное общество Центральное конструкторское бюро аппаратостроения | Solid state radio transmission system |
| CN117478164A (en) * | 2023-12-22 | 2024-01-30 | 深圳市瀚强科技股份有限公司 | Radio frequency protection circuit and related device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113064368A (en) * | 2021-03-18 | 2021-07-02 | 科海技术股份有限公司 | High-power radio frequency power supply system |
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| RU2784623C1 (en) * | 2022-05-18 | 2022-11-29 | Акционерное общество Центральное конструкторское бюро аппаратостроения | Solid state radio transmission system |
| CN117478164A (en) * | 2023-12-22 | 2024-01-30 | 深圳市瀚强科技股份有限公司 | Radio frequency protection circuit and related device |
| CN117478164B (en) * | 2023-12-22 | 2024-04-09 | 深圳市瀚强科技股份有限公司 | Radio frequency protection circuit and related device |
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Application publication date: 20191025 |
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| RJ01 | Rejection of invention patent application after publication |