CN110379749A - A kind of quartz boat carrying silicon wafer - Google Patents
A kind of quartz boat carrying silicon wafer Download PDFInfo
- Publication number
- CN110379749A CN110379749A CN201910658327.0A CN201910658327A CN110379749A CN 110379749 A CN110379749 A CN 110379749A CN 201910658327 A CN201910658327 A CN 201910658327A CN 110379749 A CN110379749 A CN 110379749A
- Authority
- CN
- China
- Prior art keywords
- shaped bracket
- group
- end plate
- silicon wafer
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 36
- 239000010703 silicon Substances 0.000 title claims abstract description 36
- 239000010453 quartz Substances 0.000 title claims abstract description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 230000002459 sustained effect Effects 0.000 claims description 43
- 239000012634 fragment Substances 0.000 abstract description 43
- 238000009434 installation Methods 0.000 description 23
- 238000010586 diagram Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Abstract
The invention discloses the quartz boats that one kind can carry silicon wafer, including quartzy main frame body, quartzy main frame body includes side wall and chassis, side wall is surrounded by the end plate that the side frame and a pair of of front and back of a pair of of left and right settings are arranged, this is vertically arranged and is parallel to each other to end plate, this is respectively equipped with the vertical slot inserted for silicon wafer side to side frame, and this cooperates to side frame；Support rod is additionally provided in side wall；It is respectively equipped on the inner sidewall of above-mentioned a pair of end plate: the U-shaped bracket inserted for bearing boom end；This is symmetrical arranged the U-shaped bracket on end plate inner sidewall；Two end-rack of support rod are in a pair of symmetrically arranged U-shaped bracket.The present invention is configured with dismountable support rod to existing quartz boat；When support rod removes, quartz boat can insert row's full wafer, and full wafer is supported by chassis；When support rod is loaded onto, row's fragment can be inserted, fragment is supported by support rod.
Description
Technical field
The present invention relates to the quartz boats that one kind can carry silicon wafer.
Background technique
Quartz boat is the utensil for carrying silicon wafer, and inner space is vertically arranged silicon wafer for inserting, including quartzy main frame body,
Quartzy main frame body includes side wall and chassis, and side wall is surrounded by the end plate that the side frame and a pair of of front and back of a pair of of left and right settings are arranged, should
End plate is vertically arranged and is parallel to each other, this is respectively equipped with the vertical slot inserted for silicon wafer side to side frame, and this is to side frame phase
Mutually cooperation.
With the development of solar battery technology, it is at least two fragments by silicon wafer full slice, sun component can be improved
Efficiency.But existing quartz boat is all to be designed according to the shape of silicon wafer full wafer, therefore fragment needs other independent design stone
Ying Zhou increases the production cost of enterprise.
Summary of the invention
In order to solve defect in the prior art, the present invention provides a kind of quartz boat that can carry silicon wafer, inner space
It is vertically arranged silicon wafer for inserting, including quartzy main frame body, quartzy main frame body includes side wall and chassis, and side wall is by a pair of of left and right settings
The end plate that side frame and a pair of of front and back are arranged surrounds, this is vertically arranged and is parallel to each other to end plate, this is respectively equipped with for silicon wafer side frame
The vertical slot that side inserts, and this cooperates to side frame；
Support rod is additionally provided in the side wall；It is respectively equipped on the inner sidewall of above-mentioned a pair of end plate: being inserted for bearing boom end
U-shaped bracket；This is symmetrical arranged the U-shaped bracket on end plate inner sidewall；Two end-rack of support rod are a pair of symmetrically arranged U-shaped
In bracket.
The present invention is configured with dismountable support rod to existing quartz boat；When support rod removes, quartz boat can insert a row
(silicon wafer) full wafer, full wafer (being vertically arranged) are supported by chassis；When support rod is loaded onto, (two end-rack of support rod are in a pair of symmetrically arranged U
In type bracket), row's fragment (fragment that fragment is above-mentioned full wafer) can be inserted, fragment (being vertically arranged) is supported by support rod.
Preferably, U-shaped bracket setting up and down there are two being set on the inner sidewall of any end plate.The installation site of support rod exists
It is vertical optional, the installation site of support rod can be adjusted, vertically to adapt to the fragment of two kinds of dimensions.
Preferably, the inner sidewall of any end plate is equipped with multiple U-shaped brackets vertically set gradually.The installation position of support rod
Setting vertically may be selected, and can vertically adjust the installation site of support rod, to adapt to the fragment of sizes specification.
Preferably, the inner sidewall of any end plate is equipped with multiple U-shaped brackets vertically set gradually at equal intervals.Support rod
Installation site vertically may be selected, and vertically can equally spaced adjust the installation site of support rod, to adapt to sizes specification
Fragment.
Preferably, the inner sidewall of any end plate is equipped with one group of U-shaped bracket group, and the U-shaped bracket group of the group is U-shaped by least two
Bracket composition, and each U-shaped bracket in same U-shaped bracket group is in sustained height.It is each U-shaped in same U-shaped bracket group
Bracket is in sustained height, installs two or more support rods to sustained height and provides possibility, if sustained height is pacified
Two or more support rods are filled, then two or more support rods of sustained height can be in by this to support same row
Fragment can make the bearing of fragment more reliable.
Preferably, the inner sidewall of any end plate is equipped with two groups of U-shaped bracket groups, this two groups U-shaped bracket groups are setting up and down, respectively
The U-shaped bracket group of group is all made of at least two U-shaped brackets, and each U-shaped bracket in same U-shaped bracket group is in same height
Degree.Two groups of U-shaped bracket groups are setting up and down, and the installation site of support rod may be selected vertically, can vertically adjust support rod
Installation site, to adapt to the fragment of two kinds of dimensions.Each U-shaped bracket in same U-shaped bracket group is in sustained height, gives
Sustained height installs two or more support rods and provides possibility, if sustained height installs two or more bearings
Bar then can be in two or more support rods of sustained height by this to support same row's fragment, can make the bearing of fragment
It is more reliable.
Preferably, the inner sidewall of any end plate is equipped with the U-shaped bracket group of multiple groups, and the U-shaped bracket group of the multiple groups is vertically successively set
It sets, the U-shaped bracket group of each group is all made of at least two U-shaped brackets, and each U-shaped bracket in same U-shaped bracket group is in same
One height.The U-shaped bracket group of multiple groups is vertically set gradually, and the installation site of support rod may be selected vertically, can vertically adjust
The installation site of support rod, to adapt to the fragment of sizes specification.Each U-shaped bracket in same U-shaped bracket group is in same
One height, installs two or more support rods to sustained height and provides possibility, if sustained height installs two or two
It is a with upper support rod, then two or more support rods of sustained height can be in by this to support same row's fragment, can made
The bearing of fragment is more reliable.
Preferably, the inner sidewall of any end plate is equipped with the U-shaped bracket group of multiple groups, and the U-shaped bracket group of the multiple groups is vertically at equal intervals
It sets gradually, the U-shaped bracket group of each group is all made of at least two U-shaped brackets, and each U-shaped bracket in same U-shaped bracket group
In sustained height.The U-shaped bracket group of multiple groups is vertically set gradually at equal intervals, keeps the installation site of support rod vertically optional
It selects, vertically can equally spaced adjust the installation site of support rod, to adapt to the fragment of sizes specification.Same U-shaped bracket group
In each U-shaped bracket be in sustained height, two or more support rods are installed to sustained height and provide possibility, if
Sustained height installs two or more support rods, then can be in by this two or more support rods of sustained height Lai
Same row's fragment is supported, the bearing of fragment can be made more reliable.
Preferably, one group of U-shaped bracket group is assembled to few two support rods on any end plate.I.e. sustained height is installed at least
Two support rods can be at least two support rods of sustained height by this to support same row's fragment, can make the bearing of fragment
It is more reliable.
Preferably, the support rod is channel bar, and channel bar top surface is equipped with the vertical slot that a row inserts for silicon wafer bottom edge, and
Slot on channel bar is matched with the slot on side frame.If support rod selects channel bar, channel bar is equipped with to be inserted for what silicon wafer inserted
Slot can more stably place silicon wafer.
Detailed description of the invention
Fig. 1 and Fig. 2 is the schematic diagram of embodiment 1；
Fig. 3 and Fig. 4 is the schematic diagram of embodiment 2；
Fig. 5 is the schematic diagram of embodiment 3；
Fig. 6 is the schematic diagram of embodiment 4；
Fig. 7 is the schematic diagram of embodiment 5；
Fig. 8 is the schematic diagram of embodiment 6.
Specific embodiment
With reference to the accompanying drawings and examples, further description of the specific embodiments of the present invention.Following embodiment is only
For clearly illustrating technical solution of the present invention, and not intended to limit the protection scope of the present invention.
Embodiment 1
As depicted in figs. 1 and 2, the present invention provides a kind of quartz boat that can carry silicon wafer, and inner space is vertically arranged silicon for inserting
Piece, including quartzy main frame body, quartzy main frame body include side wall 10 and chassis 20, side wall 10 by a pair of of left and right settings 11 He of side frame
The end plate 12 that a pair of of front and back is arranged surrounds, this is vertically arranged and is parallel to each other to end plate 12, this is respectively equipped with for silicon wafer side frame 11
The vertical slot that side inserts, and this cooperates to side frame 11；
Support rod 30 is additionally provided in the side wall 10；It is respectively equipped on the inner sidewall of above-mentioned a pair of end plate 12: for support rod 30
The U-shaped bracket 40 that end inserts；This is symmetrical arranged the U-shaped bracket 40 on 12 inner sidewall of end plate；Two end-rack of support rod 30 exist
In a pair of symmetrically arranged U-shaped bracket 40.
The present invention is configured with dismountable support rod 30 to existing quartz boat；As shown in Figure 1, when support rod 30 removes, stone
Ying Zhouke inserts a row (silicon wafer) full wafer 50, and full wafer 50(is vertically arranged) it is supported by chassis 20；As shown in Fig. 2, when support rod 30 is loaded onto
(two end-rack of support rod 30 are in a pair of symmetrically arranged U-shaped bracket 40), it is above-mentioned whole for can inserting a row fragment 51(fragment 51
The fragment of piece 50), fragment 51(is vertically arranged) supported by support rod 30.
The support rod 30 can choose channel bar, and channel bar top surface is equipped with the vertical slot that a row inserts for silicon wafer bottom edge,
And the slot on channel bar is matched with the slot on side frame 11.If support rod 30 selects channel bar, channel bar is equipped with to be inserted for silicon wafer
The slot put can more stably place fragment.
Embodiment 2
As shown in Figure 3 and Figure 4, on the basis of embodiment 1, difference is:
U-shaped bracket 40 setting up and down there are two being set on the inner sidewall of any end plate 12.The installation site of support rod 30 is vertical
It is upper to may be selected, the installation site of support rod 30 can be adjusted, vertically to adapt to the fragment 52,53 of two kinds of dimensions.
Embodiment 3
As shown in figure 5, on the basis of embodiment 1, difference is:
The inner sidewall of any end plate 12 is equipped with multiple U-shaped brackets 40 vertically set gradually.The installation site of support rod is perpendicular
It may be selected upwards, the installation site of support rod can be adjusted, vertically to adapt to the fragment of sizes specification.
Preferably, the inner sidewall of any end plate 12 is equipped with multiple U-shaped brackets 40 vertically set gradually at equal intervals.Bearing
The installation site of bar vertically may be selected, and can adjust the installation site of support rod, equally spaced vertically to adapt to sizes
The fragment of specification.
Embodiment 4
As shown in fig. 6, on the basis of embodiment 1, difference is:
The inner sidewall of any end plate 12 is equipped with one group of U-shaped bracket group 400, and the U-shaped bracket group 400 of the group is by least two U-shaped supports
Frame 40 forms, and each U-shaped bracket 40 in same U-shaped bracket group 400 is in sustained height.In same U-shaped bracket group 400
Each U-shaped bracket 40 is in sustained height, installs two or more support rods 30 to sustained height and provides possibility, if
Sustained height installs two or more support rods 30, then two or more support rods of sustained height can be in by this
30 support same row's fragment 54, and the bearing of fragment 54 can be made more reliable.
Embodiment 5
As shown in fig. 7, on the basis of embodiment 1, difference is:
The inner sidewall of any end plate 12 is equipped with two groups of U-shaped bracket groups 400, this two groups U-shaped bracket groups 400 are setting up and down, each group U
Type bracket group 400 is all made of at least two U-shaped brackets 40, and each U-shaped bracket 40 in same U-shaped bracket group 400 is in
Sustained height.Two groups of U-shaped bracket groups 400 are setting up and down, and the installation site of support rod may be selected vertically, can vertically adjust
The installation site of support rod, to adapt to the fragment of two kinds of dimensions.At each U-shaped bracket 40 in same U-shaped bracket group 400
In sustained height, two or more support rods are installed to sustained height and provide possibility, if sustained height installs two
Or more than two support rods, then two or more support rods of sustained height can be in by this to support same row's fragment,
The bearing of fragment can be made more reliable.
Embodiment 6
As shown in figure 8, on the basis of embodiment 1, difference is:
The inner sidewall of any end plate 12 is equipped with the U-shaped bracket group 400 of multiple groups, and the U-shaped bracket group 400 of the multiple groups is vertically set gradually,
The U-shaped bracket group 400 of each group is all made of at least two U-shaped brackets 40, and each U-shaped bracket 40 in same U-shaped bracket group 400
In sustained height.The U-shaped bracket group 400 of multiple groups is vertically set gradually, and the installation site of support rod may be selected vertically, can
The installation site of vertical adjustment support rod, to adapt to the fragment of sizes specification.It is each U-shaped in same U-shaped bracket group 400
Bracket 40 is in sustained height, installs two or more support rods to sustained height and provides possibility, if sustained height
Two or more support rods are installed, then two or more support rods that sustained height can be in by this are same to support
Fragment is arranged, the bearing of fragment can be made more reliable.
Preferably, the inner sidewall of any end plate 12 is equipped with the U-shaped bracket group 400 of multiple groups, and the U-shaped bracket group 400 of the multiple groups is perpendicular
To setting gradually at equal intervals, the U-shaped bracket group 400 of each group is all made of at least two U-shaped brackets 40, and same U-shaped bracket group 400
In each U-shaped bracket 40 be in sustained height.The U-shaped bracket group 400 of multiple groups is vertically set gradually at equal intervals, makes the peace of support rod
Holding position vertically may be selected, and vertically can equally spaced adjust the installation site of support rod, to adapt to sizes specification
Fragment.Each U-shaped bracket 40 in same U-shaped bracket group 400 is in sustained height, to sustained height install two or two with
Upper support rod provides possibility, if sustained height installs two or more support rods, can be in sustained height by this
Two or more support rods support same row's fragment, the bearing of fragment can be made more reliable.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (10)
1. one kind can carry the quartz boat of silicon wafer, inner space is vertically arranged silicon wafer for inserting, including quartzy main frame body, and quartz is main
Frame body includes side wall and chassis, and side wall is surrounded by the end plate that the side frame and a pair of of front and back of a pair of of left and right settings are arranged, this is to end plate
It is vertically arranged and is parallel to each other, this is respectively equipped with the vertical slot inserted for silicon wafer side to side frame, and this cooperates to side frame；
It is characterized by:
Support rod is additionally provided in the side wall；It is respectively equipped on the inner sidewall of above-mentioned a pair of end plate: being inserted for bearing boom end
U-shaped bracket；This is symmetrical arranged the U-shaped bracket on end plate inner sidewall；Two end-rack of support rod are a pair of symmetrically arranged U-shaped
In bracket.
2. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the inner sidewall of any end plate is equipped with
Two U-shaped brackets setting up and down.
3. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the inner sidewall of any end plate is equipped with
Multiple U-shaped brackets vertically set gradually.
4. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the inner sidewall of any end plate is equipped with
Multiple U-shaped brackets vertically set gradually at equal intervals.
5. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the inner sidewall of any end plate is equipped with
One group of U-shaped bracket group, the U-shaped bracket group of the group are made of at least two U-shaped brackets, and each U-shaped support in same U-shaped bracket group
Frame is in sustained height.
6. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the inner sidewall of any end plate is equipped with
Two groups of U-shaped bracket groups, this two groups U-shaped bracket groups are setting up and down, and the U-shaped bracket group of each group is all made of at least two U-shaped brackets, and
Each U-shaped bracket in same U-shaped bracket group is in sustained height.
7. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the inner sidewall of any end plate is equipped with
The U-shaped bracket group of multiple groups, the U-shaped bracket group of the multiple groups are vertically set gradually, and the U-shaped bracket group of each group is all by least two U-shaped bracket groups
At, and each U-shaped bracket in same U-shaped bracket group is in sustained height.
8. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the inner sidewall of any end plate is equipped with
The U-shaped bracket group of multiple groups, the U-shaped bracket group of the multiple groups are vertically set gradually at equal intervals, and the U-shaped bracket group of each group is all U-shaped by least two
Bracket composition, and each U-shaped bracket in same U-shaped bracket group is in sustained height.
9. carrying the quartz boat of silicon wafer according to any one of claim 5 to 8, which is characterized in that on any end plate
There is one group of U-shaped bracket group to be assembled to few two support rods.
10. the quartz boat according to claim 1 for carrying silicon wafer, which is characterized in that the support rod is channel bar, channel bar
Top surface is equipped with the vertical slot that a row inserts for silicon wafer bottom edge, and the slot on channel bar is matched with the slot on side frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910658327.0A CN110379749A (en) | 2019-07-21 | 2019-07-21 | A kind of quartz boat carrying silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910658327.0A CN110379749A (en) | 2019-07-21 | 2019-07-21 | A kind of quartz boat carrying silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110379749A true CN110379749A (en) | 2019-10-25 |
Family
ID=68254529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910658327.0A Pending CN110379749A (en) | 2019-07-21 | 2019-07-21 | A kind of quartz boat carrying silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110379749A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090038088A (en) * | 2007-10-15 | 2009-04-20 | (주)스마트에이스 | Wafer cassette |
| KR101048289B1 (en) * | 2010-07-27 | 2011-07-15 | (주)상아프론테크 | Solar wafer cassette |
| CN206742209U (en) * | 2017-03-20 | 2017-12-12 | 苏州阿特斯阳光电力科技有限公司 | A kind of quartz boat |
| CN209929279U (en) * | 2019-07-21 | 2020-01-10 | 常州时创能源科技有限公司 | Quartz boat capable of bearing silicon wafers |
-
2019
- 2019-07-21 CN CN201910658327.0A patent/CN110379749A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090038088A (en) * | 2007-10-15 | 2009-04-20 | (주)스마트에이스 | Wafer cassette |
| KR101048289B1 (en) * | 2010-07-27 | 2011-07-15 | (주)상아프론테크 | Solar wafer cassette |
| CN206742209U (en) * | 2017-03-20 | 2017-12-12 | 苏州阿特斯阳光电力科技有限公司 | A kind of quartz boat |
| CN209929279U (en) * | 2019-07-21 | 2020-01-10 | 常州时创能源科技有限公司 | Quartz boat capable of bearing silicon wafers |
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| CB02 | Change of applicant information |
Address after: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Applicant after: Changzhou Shichuang Energy Co., Ltd Address before: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Applicant before: CHANGZHOU SHICHUANG ENERGY TECHNOLOGY Co.,Ltd. |
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