CN110376885A - The compensation data method and device of motion control - Google Patents
The compensation data method and device of motion control Download PDFInfo
- Publication number
- CN110376885A CN110376885A CN201910601616.7A CN201910601616A CN110376885A CN 110376885 A CN110376885 A CN 110376885A CN 201910601616 A CN201910601616 A CN 201910601616A CN 110376885 A CN110376885 A CN 110376885A
- Authority
- CN
- China
- Prior art keywords
- data
- axis
- electric cam
- motion
- compensated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000009434 installation Methods 0.000 description 5
- 238000004590 computer program Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
- G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/121—Control of position or direction using feedback using synchromachines (selsyns)
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
- Artificial Intelligence (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Evolutionary Computation (AREA)
- Medical Informatics (AREA)
- Software Systems (AREA)
- Control Of Position Or Direction (AREA)
Abstract
This application discloses a kind of compensation data method and devices of motion control, this method includes continuously moving to multiple positions based on kinetic control system control kinematic axis, the theoretical position data corresponding with the multiple position obtained by motion control theory are obtained, the test position data of the axis of motion to the multiple position are measured by the laser interferometer;The curve movement of the electric cam is configured according to the theoretical position data and the test position data, and determines the shaft of the electric cam and the relationship of kinematic axis to be compensated;The electric cam function of starting the motion controller compensates the data of the laser interferometer by the electric cam function of the motion controller, and controls the axis of motion to be compensated to compensated position.It by the above method, can be adapted for the kinetic control system of the controller of having electronic cam function, reduce device cost, and simplify primary control program logic, reduce the consumption of host controller hardware resource.
Description
Technical field
The present invention relates to movement control technology field more particularly to a kind of compensation data method and devices of motion control.
Background technique
In kinetic control system, the sensor for participating in closed-loop is influenced often to reach not by installation accuracy and installation site
To ideal high-precision requirement, for example, in linear motor motion system, in the linear distance of 1m long, although grating scale has 0.1
The resolution ratio of micron, but influenced by installation accuracy and installation site, absolute positioning error is difficult to realize lead to less than 1 micron
Cross laser interferometer data compensate after, in the linear distance of 1m long can be achieved absolute positioning error less than 1 micron.
There are mainly two types of the compensation methodes of traditional laser interferometer data: first is that using band laser interferometer offset data
The motion controller of import feature imported into laser interferometer data file in motion controller, and motion controller realizes essence
Compensation function is spent, master controller is without carrying out compensation data;Second is that laser interferometer data are imported into master controller, when holding
When row location control, compensated position command is sent to movement using the method for interpolation by the program for first passing through master controller in advance
In controller.
But above-mentioned first method, qualified motion controller is fewer, and price is somewhat expensive, causes into
This is higher.The program of above-mentioned second method, master controller is complex, higher to the Capability Requirement of software developer, and
And primary control program needs to carry out a large amount of interpolation, anti-interpolation arithmetic, consumes host controller hardware resource.
Summary of the invention
The embodiment of the present invention provides a kind of compensation data method and device of motion control, can reduce motion controller at
This, can also reduce the consumption of host controller hardware resource.
On the one hand, a kind of compensation data method of motion control is provided, kinetic control system, the motion control are applied to
System includes the motion controller with electric cam function, and the kinetic control system is equipped with laser interferometer, the side
Method includes:
Multiple positions are continuously moved to based on kinetic control system control kinematic axis, acquisition is obtained by motion control theory
Theoretical position data corresponding with the multiple position, the axis of motion is measured to described by the laser interferometer
The test position data of multiple positions;
The curve movement of the electric cam is set according to the theoretical position data and the test position data
It sets, determines the shaft of the electric cam and the relationship of kinematic axis to be compensated;
The data of the laser interferometer are compensated by the electric cam function of the motion controller, and are controlled
The axis of motion to be compensated is to compensated position.
Optionally, it is continuously moved to described based on kinetic control system control kinematic axis in one of the embodiments,
Before multiple positions, the method also includes:
Origin position is returned to based on kinetic control system control kinematic axis operation, by the test position of the laser interferometer
Zeroing data.
Optionally, described according to the theoretical position data and the test position data in one of the embodiments,
The curve movement of the electric cam is configured, comprising:
The test position data are set by the X-axis data of the curve movement of the electric cam;
The theoretical position data are set by the Y-axis data of the curve movement of the electric cam.
Optionally, the shaft of the electric cam includes main shaft and from axis, the determining institute in one of the embodiments,
State the shaft of electric cam and the relationship of kinematic axis to be compensated, comprising:
Imaginary axis or stepping axis are set by the main shaft of the electric cam;
Kinematic axis to be compensated is set by the slave axis of the electric cam.
Optionally, in one of the embodiments, the electric cam function by the motion controller to described
The data of laser interferometer compensate, and control the axis of motion to be compensated to compensated position, comprising:
The motion of main shaft of the electric cam is controlled to target position, then the slave axis of the electric cam moves synchronously, and
And the axis of motion to be compensated is controlled to the compensated position of laser interferometer according to the curve movement of the electric cam
It sets.
On the other hand, a kind of compensation data device of motion control is provided, described device includes:
Data acquisition module, for after kinetic control system continuously moves to multiple positions, acquisition to pass through motion control
The theoretical position data corresponding with the multiple position that theory obtains measure the kinematic axis by the laser interferometer and transport
It moves to the test position data of the multiple position;
Data configuration module is used for according to the theoretical position data and the test position data to the electric cam
Curve movement be configured, and determine the shaft of the electric cam and the relationship of kinematic axis to be compensated;
Compensation data module, for being controlled by the movement after the electric cam function of starting the motion controller
The electric cam function of device processed compensates the data of the laser interferometer, and controls the axis of motion to be compensated
To compensated position.
Optionally, described device in one of the embodiments, further include:
Reset data module swashs for returning to origin position based on kinetic control system control kinematic axis operation by described
The test position zeroing data of optical interferometer.
Optionally, the data configuration module includes curve movement setting unit in one of the embodiments,;
The curve movement setting unit is used to set the survey for the X-axis data of the curve movement of the electric cam
Position data is tried, is also used to set the theoretical position data for the Y-axis data of the curve movement of the electric cam.
Optionally, the data configuration module further includes shaft setting unit in one of the embodiments,;
The shaft setting unit is used to by the main shaft of the electric cam set imaginary axis or stepping axis, be also used to by
The slave axis of the electric cam is set as kinematic axis to be compensated.
Optionally, the compensation data module is also used to control the master of the electric cam in one of the embodiments,
Axis moves to target position, then the slave axis of the electric cam moves synchronously, and according to the curve movement of the electric cam
The axis of motion to be compensated is controlled to the compensated position of laser interferometer.
Implement the embodiment of the present invention, will have the following beneficial effects:
The compensation data method and device of above-mentioned motion control is continuously moved to based on kinetic control system control kinematic axis
Multiple positions obtain the test position that the theoretical position data obtained by motion control theory and laser interferometer measure
Data are configured the curve movement of electric cam according to the theoretical position data and test position data, and electricity are arranged
The relationship of the shaft of sub- cam and kinematic axis to be compensated can be carried out according to data of the electric cam to laser interferometer
Compensation, and the axis of motion to be compensated is controlled to compensated position.By the above method, it can be adapted for having electronic
The kinetic control system of the controller of cam function reduces device cost, and simplifies primary control program logic, reduces master
The consumption of controller hardware resource.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Wherein:
Fig. 1 is the flow chart of the compensation data method of motion control in one embodiment;
Fig. 2 is the curve movement schematic diagram of electric cam in one embodiment;
Fig. 3 is the structural block diagram of the compensation data device of motion control in one embodiment.
Specific embodiment
It is with reference to the accompanying drawings and embodiments, right in order to which the objects, technical solutions and advantages of the application are more clearly understood
The application is further elaborated.It should be appreciated that specific embodiment described herein is only used to explain the application, and
It is not used in restriction the application.
Unless otherwise defined, all technical and scientific terms used herein and the technical field for belonging to the application
The normally understood meaning of technical staff is identical.The term used in the description of the present application is intended merely to description tool herein
The purpose of the embodiment of body, it is not intended that limitation the application.It is appreciated that term " first " used in this application, " second "
Etc. can be used to describe various elements herein, but these elements should not be limited by these terms.These terms are only used to by first
A element and another element are distinguished.For example, in the case where not departing from scope of the present application, first element can be claimed
For second element, and similarly, second element can be known as first element.First element and second element both first device
Part, but it is not same component.
Fig. 1 is the flow chart of the compensation data method of motion control in one embodiment, and this method is applied to motion control
System, the kinetic control system include the motion controller with electric cam function, and motion controller refers to controlling electronic
The nonshared control unit of the method for operation of machine, motion controller are used to instruct scheduled control program, planning in complex condition
It is transformed into desired mechanical movement, realizes the accurate position control of mechanical movement, speed control, Acceleration Control, torque or power
Control;Electric cam refers to a kind of intelligent controller of analog mechanical cam, is simulated using the cam curve of construction
Mechanical cam, to reach the software systems of relative motion between the identical camshaft of mechanical cam system and main shaft.The movement control
System processed is also equipped with laser interferometer, and laser interferometer is referred to using optical maser wavelength as known length, dry using Michelson-
The general length measuring instrument of systematic survey displacement is related to, laser interferometer can be used for the correction work of precision instrument machine or measuring instrument
Make.The compensation data method of motion control provided by the embodiment, can reduce motion controller cost, can also reduce main control
The consumption of device hardware resource.As shown in Figure 1, the compensation data method of the motion control includes the following steps 102~step 106:
Step 102: multiple positions continuously being moved to based on kinetic control system control kinematic axis, acquisition passes through motion control
The theoretical position data corresponding with the multiple position that theory obtains measure the kinematic axis by the laser interferometer and transport
It moves to the test position data of the multiple position.
Specifically, this implementation firstly the need of installation laser interferometer, is then transported described based on kinetic control system control
Moving axis continuously moves to before multiple positions, it is also necessary to origin position is returned to based on kinetic control system control kinematic axis operation,
And by the test position zeroing data of the laser interferometer, to ensure that the offset data of laser interferometer obtains accuracy.
Further, in movement travel, n position is continuously moved based on kinetic control system control kinematic axis, is obtained
The test position that one group of theoretical position data dataY [n] obtained by motion control theory and one group of laser interferometer measure
Data dataX [n] is set, and saves test position data dataX [n] and theoretical position data dataY [n].Namely theoretical position
Data dataY [n] is the movement position value of the kinematic axis gone out by theoretical calculation, and test position data dataX [n] is by laser
The movement position value of the actually measured kinematic axis of interferometer needs the movement by test position data dataX [n] to kinematic axis
Position compensates, to realize the accurate positioning of kinetic control system.
For example, in one embodiment, the test position data dataX [n] and theoretical position data dataY of acquisition
[n] as shown in the table, following table gives the 2-D data of test position data dataX [n] and theoretical position data dataY [n]
Table:
dataX | dataY |
0 | 0 |
10.0022 | 10 |
20.0048 | 20 |
30.0057 | 30 |
40.0076 | 40 |
50.0082 | 50 |
60.01014 | 60 |
70.01162 | 70 |
80.0131 | 80 |
90.01458 | 90 |
100.0161 | 100 |
Step 104: bent to the movement of the electric cam according to the theoretical position data and the test position data
Line is configured, and determines the shaft of the electric cam and the relationship of kinematic axis to be compensated.
Since electric cam is to carry out servo control by the resolving mode of setting by the way that tracing point to be input in driver
System, reaches processing purpose identical with mechanical cam, it is therefore desirable to be configured to the curve movement of electric cam.Electronics is convex
The shaft of wheel includes main shaft and from axis, and electronic cam curve can use a variety of describing modes, distinguish for example, by using two-dimensional table
Main shaft and the value from axis are described, namely describes by data shown in table 1 main shaft of electric cam and the value from axis.
Specifically, being set the X-axis data of the curve movement of electric cam to by the configuration interface for opening electric cam
The Y-axis data of the curve movement of electric cam are set the theoretical position data by the test position data dataX [n]
dataY[n]。
Further, electric cam belong to multi-axial Simultaneous movement, it is this movement be based on main shaft and one or more from
Axis, it is therefore desirable to the shaft of the determination electric cam and the relationship of kinematic axis to be compensated.Wherein kinematic axis to be compensated
Refer to the kinematic axis for needing laser interferometer to compensate in kinetic control system.The present embodiment sets the main shaft of electric cam to
The slave axis of electric cam is set kinematic axis to be compensated by imaginary axis or stepping axis.
For example, the curve movement of electric cam can be illustrated by curve graph as shown in Figure 2.
Step 106: the data of the laser interferometer being mended by the electric cam function of the motion controller
It repays, and controls the axis of motion to be compensated to compensated position.
Specifically, being needed first when control kinematic axis desired in kinetic control system is moved to corresponding compensated position
Kinematic axis operation is controlled by kinetic control system and returns to origin position, then start electric cam function, control electronics is convex
The motion of main shaft of wheel is to target position, then the slave axis of electric cam moves synchronously, and according to the curve movement control of electric cam
Axis of motion to be compensated is made to the compensated position of laser interferometer.
The compensation data method of above-mentioned motion control continuously moves to multiple positions based on kinetic control system control kinematic axis
It sets, obtains the test position data that the theoretical position data obtained by motion control theory and laser interferometer measure,
The curve movement of electric cam is configured according to the theoretical position data and test position data, and electric cam is set
Shaft and kinematic axis to be compensated relationship, can be compensated according to data of the electric cam to laser interferometer,
And the axis of motion to be compensated is controlled to compensated position.By the above method, it can be adapted for having electronic cam
The kinetic control system of the controller of function reduces device cost, and simplifies primary control program logic, reduces main control
The consumption of device hardware resource, while main shaft, according to stepping axis, real time position is believed after compensation can be transmitted by way of pulse
Breath is used for this system external devices.
Based on identical inventive concept, the embodiment of the present application also provides a kind of compensation data devices of motion control, such as
Shown in Fig. 3, the compensation data device of the motion control includes data acquisition module 310, data configuration module 320 and compensation data
Module 330.
Data acquisition module 310 is used for after kinetic control system continuously moves to multiple positions, is obtained through movement control
The theoretical obtained theoretical position data corresponding with the multiple position of system, measure the kinematic axis by the laser interferometer
Move to the test position data of the multiple position.
Data configuration module 320 is used for convex to the electronics according to the theoretical position data and the test position data
The curve movement of wheel is configured, and determines the shaft of the electric cam and the relationship of kinematic axis to be compensated.
Compensation data module 330 is used for the electric cam function by the motion controller to the laser interferometer
Data compensate, and control the axis of motion to be compensated to compensated position.
In one embodiment, the compensation data device of the motion control further includes reset data module (not shown), should
Reset data module is used to return to origin position based on kinetic control system control kinematic axis operation, and by the laser interferometer
Test position zeroing data.
In one embodiment, data configuration module includes curve movement setting unit (not shown), which sets
Unit is set for setting the test position data for the X-axis data of the curve movement of the electric cam, is also used to institute
The Y-axis data for stating the curve movement of electric cam are set as the theoretical position data.
In one embodiment, data configuration module further includes shaft setting unit (not shown), the shaft setting unit
For setting imaginary axis or stepping axis for the main shaft of the electric cam, it is also used to set the slave axis of the electric cam to
Kinematic axis to be compensated.
In one embodiment, compensation data module is also used to control the motion of main shaft of the electric cam to target position
It sets, then the slave axis of the electric cam moves synchronously, and described to be compensated according to the control of the curve movement of the electric cam
Axis of motion to the compensated position of laser interferometer.
The compensation data device of above-mentioned motion control, can be adapted for the motion control of the controller of having electronic cam function
System reduces device cost, and simplifies primary control program logic, reduces the consumption of host controller hardware resource, simultaneously
Main shaft is according to stepping axis, and real-time position information makes for this system external devices after compensation can be transmitted by way of pulse
With.
In the above-described embodiments, can it is all or part of by software, hardware, firmware or any combination thereof come real
It is existing.When being realized using software program, can entirely or partly realize in the form of a computer program product.The computer
Program product includes one or more computer instructions.When loading on computers and executing the computer program instructions, entirely
Portion is partly generated according to process or function described in the embodiment of the present invention.The computer can be general purpose computer, specially
With computer, computer network or other programmable devices.The computer instruction can store in computer-readable storage
In medium, or from a computer readable storage medium to another computer readable storage medium transmit.The computer
Readable storage medium storing program for executing can be any usable medium or include one or more usable medium collection that computer can access
At the data storage devices such as server, data center.The usable medium can be magnetic medium, (for example, floppy disk, hard disk,
Tape), optical medium (for example, DVD) or semiconductor medium (such as solid state hard disk Solid State Disk (SSD)) etc..
The above disclosure is only the preferred embodiments of the present invention, cannot limit the right model of the present invention with this certainly
It encloses, therefore equivalent changes made in accordance with the claims of the present invention, is still within the scope of the present invention.
Claims (10)
1. a kind of compensation data method of motion control, is applied to kinetic control system, the kinetic control system includes having
The motion controller of electric cam function, the kinetic control system are equipped with laser interferometer, which is characterized in that the method
Include:
Continuously move to multiple positions based on kinetic control system control kinematic axis, obtain obtained by motion control theory with
The corresponding theoretical position data in the multiple position measure the axis of motion to the multiple by the laser interferometer
The test position data of position;
The curve movement of the electric cam is configured according to the theoretical position data and the test position data, really
The shaft of the fixed electric cam and the relationship of kinematic axis to be compensated;
The data of the laser interferometer are compensated by the electric cam function of the motion controller, and described in control
Axis of motion to be compensated is to compensated position.
2. the method according to claim 1, wherein described continuous based on kinetic control system control kinematic axis
It moves to before multiple positions, the method also includes:
Origin position is returned to based on kinetic control system control kinematic axis operation, by the test position data of the laser interferometer
Zero.
3. the method according to claim 1, wherein described according to the theoretical position data and the test position
Data are set to be configured the curve movement of the electric cam, comprising:
The test position data are set by the X-axis data of the curve movement of the electric cam;
The theoretical position data are set by the Y-axis data of the curve movement of the electric cam.
4. according to the method described in claim 3, it is characterized in that, the shaft of the electric cam includes main shaft and from axis, institute
State the relationship of the shaft for determining the electric cam and kinematic axis to be compensated, comprising:
Imaginary axis or stepping axis are set by the main shaft of the electric cam;
Kinematic axis to be compensated is set by the slave axis of the electric cam.
5. according to the method described in claim 4, it is characterized in that, the electric cam function by the motion controller
The data of the laser interferometer are compensated, and control the axis of motion to be compensated to compensated position, packet
It includes:
The motion of main shaft of the electric cam is controlled to target position, then the slave axis of the electric cam moves synchronously, and root
The axis of motion to be compensated is controlled to the compensated position of laser interferometer according to the curve movement of the electric cam.
6. a kind of compensation data device of motion control, which is characterized in that described device includes:
Data acquisition module, for after kinetic control system continuously moves to multiple positions, obtaining through motion control theory
Obtained theoretical position data corresponding with the multiple position, measure the axis of motion extremely by the laser interferometer
The test position data of the multiple position;
Data configuration module, for the fortune according to the theoretical position data and the test position data to the electric cam
Moving curve is configured, and determines the shaft of the electric cam and the relationship of kinematic axis to be compensated;
Compensation data module, for the electric cam function by the motion controller to the data of the laser interferometer into
Row compensation, and the axis of motion to be compensated is controlled to compensated position.
7. device according to claim 6, which is characterized in that described device further include:
Reset data module does the laser for returning to origin position based on kinetic control system control kinematic axis operation
The test position zeroing data of interferometer.
8. device according to claim 6, which is characterized in that the data configuration module includes that curve movement setting is single
Member;
The curve movement setting unit is used to set the test position for the X-axis data of the curve movement of the electric cam
Data are set, are also used to set the theoretical position data for the Y-axis data of the curve movement of the electric cam.
9. device according to claim 6, which is characterized in that the data configuration module further includes shaft setting unit;
The shaft setting unit is used to set imaginary axis or stepping axis for the main shaft of the electric cam, and being also used to will be described
The slave axis of electric cam is set as kinematic axis to be compensated.
10. device according to claim 6, which is characterized in that the compensation data module is also used to control the electronics
The motion of main shaft of cam is to target position, then the slave axis of the electric cam moves synchronously, and according to the electric cam
Curve movement controls the axis of motion to be compensated to the compensated position of laser interferometer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910601616.7A CN110376885A (en) | 2019-07-04 | 2019-07-04 | The compensation data method and device of motion control |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910601616.7A CN110376885A (en) | 2019-07-04 | 2019-07-04 | The compensation data method and device of motion control |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110376885A true CN110376885A (en) | 2019-10-25 |
Family
ID=68251946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910601616.7A Pending CN110376885A (en) | 2019-07-04 | 2019-07-04 | The compensation data method and device of motion control |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110376885A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113551600A (en) * | 2021-07-29 | 2021-10-26 | 河北工业大学 | Detection system for path precision of two-dimensional motion platform |
CN114356255A (en) * | 2021-12-31 | 2022-04-15 | 东莞市启思达智能技术有限公司 | Interpolation table application method and system based on printing process |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102650862A (en) * | 2012-05-15 | 2012-08-29 | 深圳市汇川控制技术有限公司 | Electronic cam control system of programmable logic controller and electronic cam control method |
CN107462824A (en) * | 2017-08-07 | 2017-12-12 | 大族激光科技产业集团股份有限公司 | The compensation method of the control method and positioning precision of the kinematic axis of flying probe tester |
CN108732991A (en) * | 2017-04-25 | 2018-11-02 | 深圳市腾盛工业设备有限公司 | A kind of movement axle bearing calibration and device |
CN109787530A (en) * | 2019-01-04 | 2019-05-21 | 深圳市微秒控制技术有限公司 | A kind of linear motor physical accuracy compensation control system and method |
CN109828526A (en) * | 2019-01-18 | 2019-05-31 | 深圳市显控科技股份有限公司 | Electric cam control method and relevant apparatus |
-
2019
- 2019-07-04 CN CN201910601616.7A patent/CN110376885A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102650862A (en) * | 2012-05-15 | 2012-08-29 | 深圳市汇川控制技术有限公司 | Electronic cam control system of programmable logic controller and electronic cam control method |
CN108732991A (en) * | 2017-04-25 | 2018-11-02 | 深圳市腾盛工业设备有限公司 | A kind of movement axle bearing calibration and device |
CN107462824A (en) * | 2017-08-07 | 2017-12-12 | 大族激光科技产业集团股份有限公司 | The compensation method of the control method and positioning precision of the kinematic axis of flying probe tester |
CN109787530A (en) * | 2019-01-04 | 2019-05-21 | 深圳市微秒控制技术有限公司 | A kind of linear motor physical accuracy compensation control system and method |
CN109828526A (en) * | 2019-01-18 | 2019-05-31 | 深圳市显控科技股份有限公司 | Electric cam control method and relevant apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113551600A (en) * | 2021-07-29 | 2021-10-26 | 河北工业大学 | Detection system for path precision of two-dimensional motion platform |
CN114356255A (en) * | 2021-12-31 | 2022-04-15 | 东莞市启思达智能技术有限公司 | Interpolation table application method and system based on printing process |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Ma et al. | Modeling and calibration of high-order joint-dependent kinematic errors for industrial robots | |
CN107421442B (en) | Robot positioning error online compensation method assisted by external measurement | |
JP4660779B2 (en) | Method for evaluating position error of moving device and method for improving moving accuracy based on the evaluation result | |
CN104102226B (en) | Control system and control method | |
CN103143984B (en) | Based on the machine tool error dynamic compensation method of laser tracker | |
CN104596418B (en) | A kind of Multi-arm robots coordinate system is demarcated and precision compensation method | |
Rauf et al. | Experimental results on kinematic calibration of parallel manipulators using a partial pose measurement device | |
JP2009279722A (en) | Machine tool having numerical control device and on-board measuring device | |
Zha et al. | Volumetric error compensation of machine tool using laser tracer and machining verification | |
CN110376885A (en) | The compensation data method and device of motion control | |
CN114102606B (en) | Robot motion information planning method and related device | |
Yang et al. | An RBF neural network approach to geometric error compensation with displacement measurements only | |
Ryll et al. | Towards an intelligent fixturing system with rapid reconfiguration and part positioning | |
Xu et al. | A practical energy modeling method for industrial robots in manufacturing | |
Duan et al. | Multivariate orthogonal polynomial-based positioning error modeling and active compensation of dual-driven feed system | |
CN107486860A (en) | A kind of control method of engineering machinery mechanical arm | |
Liu et al. | Real-time error compensation of a 5-axis machining robot using externally mounted encoder systems | |
Brecher et al. | Volumetric measurement of the transient thermo-elastic machine tool behavior | |
KR20130019282A (en) | Method for calculating position and orientation data of 6 degrees of freedom stage | |
CN116007654A (en) | Error testing method for positioning system | |
Chen et al. | Development of an industrial robot controller with open architecture | |
Comand et al. | One-step fast calibration of an industrial workcell | |
Liu et al. | A line measurement method for geometric error measurement of the vertical machining center | |
Wu et al. | Digital map and probability compensation model for repeated positioning error of feed axis | |
Li et al. | High precision six-degree-of-freedom planar motor control method based on sliding mode control theory |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20220729 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Applicant before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191025 |