CN110376756A - A kind of super-resolution microscopic system based on microballoon film - Google Patents
A kind of super-resolution microscopic system based on microballoon film Download PDFInfo
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- CN110376756A CN110376756A CN201910617252.1A CN201910617252A CN110376756A CN 110376756 A CN110376756 A CN 110376756A CN 201910617252 A CN201910617252 A CN 201910617252A CN 110376756 A CN110376756 A CN 110376756A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
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Abstract
The invention discloses a kind of super-resolution microscopic systems based on microballoon film.On the basis of existing ordinary optical microscope, pass through mature complete thin film preparation process, the fexible film containing microballoon is prepared in advance, three-dimensional manometer console is highly integrated on ordinary optical microscope by the microballoon film prepared, the accurate relative positional relationship for controlling microballoon film and microcobjective and sample.Sample surfaces Asia diffraction limit structural information first passes through the microballoon in film, enters microcobjective afterwards and is imaged, and the microballoon in film can significantly increase the resolution capability of simple microscope, the final super-resolution micrometering for realizing micro-nano structure.The present invention is while realizing microballoon manipulation, moreover it is possible to realize far field large area super-resolution imaging, realize the micro-nano structure measurement of characteristic size 50nm, be expected to substitution conventional microscope and be applied to the various micro-nano detection fields such as material, life science.
Description
Technical field
The invention belongs to the technical fields of optical measurement engineering, and in particular to a kind of super-resolution based on microballoon film is micro-
Mirror system realizes optical ultra-discrimination imaging using the microscope with microballoon film, it is real-time to be mainly used for Nano grade super-resolution
Measurement, including the fields such as material, life science.
Background technique
Typical Representative one of of the optical detective technology as micro-nano detection technique has highly important answer in many fields
With.But due to the presence of optical diffraction limit, the transverse resolution of conventional optical microscope is extremely restricted, and is spread out according to Abbe
Principle is penetrated, optical system highest transverse resolution is only the 1/2 of incident wavelength.Resolution limitations derive from the loss of hidden arrow wave,
It include object fine structure information in hidden arrow wave, intensity decays with range index, therefore exists only near field.How to realize
Super-resolution optical measurement is always one of hot spot and difficulties of scientific circles' concern.
Optical detecting method can be divided into near-field measurement method and far-field measurement method two according to the distance of operating distance
Class.Wherein, near-field measurement method operating distance is extremely short, measurement efficiency is low, significantly limits application in practice.And far field
Super-resolution measurement method has extremely strong operability.Based on the technologies such as total focusing principle combination pupil filtering, hyperoscillating, energy
Transverse resolution is enough promoted, but due to being a measurement method, measurement efficiency is low.And it is based on structure light frequency-domain modulation approach, it can
Large area imaging, but it is limited to measuring principle, transverse resolution is only capable of promoting one times.In order to further enhance imaging resolution,
Various new measurement methods are constantly proposed.Among these, it can be realized higher Imaging Resolution inspired by phenomenon by nature drop,
2011, Wang Zengbo group proposed the super-resolution imaging skill based on medium microsphere on " Nature Communications "
The microballoon of diameter micron dimension in conjunction with conventional microscope, using white light as light source, is realized super-resolution imaging by art.The party
Method has many advantages, such as low cost, high resolution, original in style in numerous far field super-resolution measuring techniques.It is micro- using medium at present
Ball is for measuring many problems that still have: measurement visual field is narrow;Microballoon is directly placed at sample surfaces, can not achieve microballoon
Manipulation, can not obtain optimal imaging quality.Therefore, for the development for promoting micro-nano to detect, the oversubscription based on microballoon film is studied
Distinguish that microscope has a very important significance.
This method manipulates microballoon using film, microballoon is overcome to be directly placed at sample table on existing microscope basis
The shortcomings that face, can get optimal imaging effect, measurement efficiency be improved, to realize that a kind of super-resolution based on microballoon film is micro-
Mirror system.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the present invention provides a kind of super-resolution microscopes based on microballoon film
System, may be implemented high flexibility, super-resolution rapid survey, and measurement accuracy can arrive nanometer scale.
The technical scheme adopted by the invention is that: a kind of super-resolution microscopic system based on microballoon film is thin with microballoon
Film is core, controls microballoon film three-dimensional space position using nanometer console, obtains optimal imaging effect.On this basis,
Using white-light illuminating, super resolution image is obtained.
A kind of super-resolution microscopic system based on microballoon film, the microballoon film prepared are integrated by nanometer console
To on existing microscopic system, sample Asia diffraction limit structural information first passes through the microballoon in film, after by microscope at
Picture obtains super-resolution effect.
Wherein, the manipulation of microballoon is realized using film, the refractive index of film is less than the refractive index of microballoon, and has good
The transparency.
Wherein, workable medium microsphere include refractive index be 1.46 silicon dioxide microsphere, refractive index be 1.59 PS
The titanium dioxide microballoon sphere that barium titanate microballoon that microballoon, refractive index are 1.9, refractive index are 2.2.
Wherein, it is illuminated using white light source, microballoon can collect the more high-frequency informations of object, to obtain oversubscription
It distinguishes effect, obtains when image is clearest being accurate position of focusing.
Wherein, medium microsphere is manipulated using film, is illuminated using white light source, obtain when image is clearest being to adjust
Burnt accurate position, so that super-resolution imaging is realized, while realizing microballoon manipulation, moreover it is possible to realize far field large area oversubscription
It distinguishes imaging, realizes the micro-nano structure measurement of characteristic size 50nm.
A kind of super-resolution microscopic system realization super-resolution optical detection method based on microballoon film, the method includes
Step are as follows:
Step S1: in the film prepared include multiple microballoons, using nanometer console by microballoon thin-film integration to have
Simple microscope on, it is accurate to adjust microballoon film three-dimensional space position;
Step S2: white light source illuminates sample using medium microsphere by microscope;
Step S3: by eyepiece observed image, imaging analysis is carried out, assesses hyperresolution.
Wherein, the thickness of microballoon film should be greater than microsphere diameter, to guarantee good hyperresolution.Workable medium
Microballoon include refractive index be 1.46 silicon dioxide microsphere, refractive index be 1.59 PS microballoon, refractive index be 1.9 barium titanate it is micro-
Ball, the titanium dioxide microballoon sphere that refractive index is 2.2, microsphere diameter range are 5um -200um.
Wherein, illumination use white light source, by microscope illumination sample, workable microscope multiple be 20 times-
100 times are differed, and numerical aperture (NA) range is 0.3-0.9.
The advantages of the present invention over the prior art are that:
(1), the present invention realizes that microballoon flexibly manipulates using film, accurately controls microballoon film position by nanometer console
It sets, realizes optimal imaging, improve detection efficiency.
(2), the present invention can utilize the imaging characteristic of microballoon film, realize super resolution optical measurement.
Detailed description of the invention
Fig. 1 is a kind of flow chart of the super-resolution microscopic system based on microballoon film of the present invention.
Fig. 2 is that the present invention is based on the super-resolution microscopic structure schematic diagrames of microballoon film.Wherein, 1 is eyepiece, and 2 be white light
Light source, 3 be microcobjective, and 4 be microballoon film, and 5 be nanometer console, and 6 be sample to be tested, and 7 be sample stage, and 8 be microscope branch
Seat.
Fig. 3 is the barium titanate microballoon film prepared.
Fig. 4 is the Blu-ray Disc super resolution image that the microscopic based on barium titanate microballoon film arrives.
Specific embodiment
To make the purpose of the present invention, technical solution and advantage are more clearly understood, with reference to the accompanying drawing to the present invention into one
Walk explanation.
As shown in Figures 1 and 2, a kind of super-resolution microscopic system based on microballoon film, can flexibly manipulate microballoon
Super-resolution optical detection is realized in position.The following steps are included:
Step S1: using nanometer console by the microballoon thin-film integration to existing microscopic system prepared, essence
Really control microballoon film position, best microballoon film-object lens relative position of acquisition;
Step S2: white light source illuminates sample using microballoon in film by microscope;
Step S3: imaging analysis is carried out by eyepiece observing samples image by accurate focusing, assesses hyperresolution;
Wherein, in order to obtain the image of high quality, white light source needs that critical illumination, Ke can be used by expanding, collimating
The light illumination modes such as illumination, ring illumination are strangled, to obtain the imaging effect of high contrast, high quality.
Therefore, it is assisted by microballoon film, realizes a kind of super-resolution microscopic system based on microballoon film.
In the present invention, main device includes: eyepiece 1, microcobjective 3, microballoon film 4, nanometer console 5, to test sample
Product 6, white light source 2, sample stage 7, microscope support 8.White light source 2 provides illumination for measuring system, first passes through microcobjective
3, sample to be tested 6 is illuminated using microballoon film 4.Microballoon film 4 is integrated into microscope branch using nanometer console 5
On seat 8, and the relative position of microcobjective 3 Yu microballoon film 4 is adjusted, so that single in 3 optical axis of microcobjective and microballoon film 4
Microballoon center is overlapped, and microballoon shape is high-visible in visual field, both fixed positional relationship, then by sample stage 7 adjust to
The three-dimensional space position of sample 6, the sub- diffraction limit structural information of sample to be tested 6 is collected by microballoon in film, using micro-
Object lens 3, the super resolution image after observation focusing in eyepiece 1.The microcobjective amplification factor used be 20 times -100 times not
Deng, and numerical aperture (NA) range is 0.3-0.9.
A kind of control for being realized microballoon first based on the super-resolution microscopic system of microballoon film of the present invention, is prepared for small
Ball film, followed by can be using nanometer console by bead thin-film integration to existing microscopic system, bead film position
It sets between sample and object lens, three relative position flexibly can accurately be adjusted, and obtain better measurement result.One kind is based on micro-
The super-resolution microscopic system of ball film can fast implement super-resolution measurement, and in white-light illuminating, resolution ratio is reachable
50nm。
Claims (9)
1. a kind of super-resolution microscopic system based on microballoon film, it is characterised in that: the microballoon film prepared passes through nanometer
Console is integrated on existing microscopic system, and sample Asia diffraction limit structural information first passes through the microballoon in film, after
By microscope imaging, super-resolution effect is obtained.
2. a kind of super-resolution microscopic system based on microballoon film according to claim 1, it is characterised in that: utilize thin
Film realizes the manipulation of microballoon, and the refractive index of film is less than the refractive index of microballoon, and has the transparency well.
3. a kind of super-resolution microscopic system based on microballoon film according to claim 1, it is characterised in that: can be used
Medium microsphere include refractive index be 1.46 silicon dioxide microsphere, refractive index be 1.59 PS microballoon, refractive index be 1.9 titanium
Sour barium microballoon, the titanium dioxide microballoon sphere that refractive index is 2.2.
4. a kind of super-resolution microscopic system based on microballoon film according to claim 1, it is characterised in that: utilize white
Radiant is illuminated, and microballoon can collect the more high-frequency informations of object and it is most clear to obtain image to obtain super-resolution effect
It is accurate position of focusing when clear.
5. a kind of super-resolution microscopic system based on microballoon film according to claim 1-4, feature exist
In: medium microsphere is manipulated using film, is illuminated using white light source, obtains when image is clearest being accurate position of focusing
It sets, so that super-resolution imaging is realized, while realizing microballoon manipulation, moreover it is possible to realize far field large area super-resolution imaging, it is real
The micro-nano structure measurement of existing characteristic size 50nm.
6. a kind of super-resolution microscopic system based on microballoon film realizes super-resolution optical detection method, it is characterised in that: should
Method the following steps are included:
Step S1: including multiple microballoons in the film prepared, using nanometer console by microballoon thin-film integration to existing general
It holds high office on micro mirror, accurately adjusts microballoon film three-dimensional space position;
Step S2: white light source illuminates sample using medium microsphere by microscope;
Step S3: by eyepiece observed image, imaging analysis is carried out, assesses hyperresolution.
7. a kind of super-resolution microscopic system based on microballoon film according to claim 6 realizes super-resolution optical detection
Method, it is characterised in that: the thickness of microballoon film should be greater than microsphere diameter, workable to guarantee good hyperresolution
Medium microsphere include refractive index be 1.46 silicon dioxide microsphere, refractive index be 1.59 PS microballoon, refractive index be 1.9 metatitanic acid
Barium microballoon, the titanium dioxide microballoon sphere that refractive index is 2.2, microsphere diameter range are 5um -200um.
8. a kind of super-resolution microscopic system based on microballoon film according to claim 6 realizes super-resolution optical detection
Method, it is characterised in that: illumination uses white light source, and by microscope illumination sample, workable microscope multiple is 20
It differs for-100 times again, and numerical aperture (NA) range is 0.3-0.9.
9. a kind of super-resolution microscopic system based on microballoon film, it is characterised in that: including eyepiece (1), microcobjective (3),
Microballoon film (4), nanometer console (5), sample to be tested (6), white light source (2), sample stage (7) and microscope support (8) are white
Radiant (2) provides illumination for measuring system, first passes through microcobjective (3), using microballoon film (4) to sample to be tested (6)
It is illuminated;Microballoon film (4) is integrated on microscope support (8) using nanometer console (5), and adjusts microcobjective
(3) with the relative position of microballoon film (4) so that single microballoon center weight in microcobjective (3) optical axis and microballoon film (4)
It closes, and microballoon shape is high-visible in visual field, both fixed positional relationship then adjusts sample to be tested (6) by sample stage (7)
Three-dimensional space position, sample to be tested (6) Asia diffraction limit structural information collected by microballoon in film, using microcobjective
(3), the super resolution image after observation focuses from eyepiece (1);The microcobjective amplification factor used be 20 times -100 times not
Deng, and numerical aperture (NA) range is 0.3-0.9.
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US20140355108A1 (en) * | 2012-06-07 | 2014-12-04 | University Of North Carolina At Charlotte | Methods and systems for super-resolution optical imaging using high-index of refraction microspheres and microcylinders |
WO2015025174A1 (en) * | 2013-08-22 | 2015-02-26 | Bangor University | Improvements in and relating to lenses |
CN109269980A (en) * | 2018-10-16 | 2019-01-25 | 中国科学院光电技术研究所 | One kind being based on monochromatic light tweezer medium microsphere high-resolution optical detection method |
CN109828365A (en) * | 2019-02-25 | 2019-05-31 | 南京理工大学 | Mirau type super-resolution interferes microcobjective |
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2019
- 2019-07-10 CN CN201910617252.1A patent/CN110376756A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US20140355108A1 (en) * | 2012-06-07 | 2014-12-04 | University Of North Carolina At Charlotte | Methods and systems for super-resolution optical imaging using high-index of refraction microspheres and microcylinders |
WO2015025174A1 (en) * | 2013-08-22 | 2015-02-26 | Bangor University | Improvements in and relating to lenses |
CN109269980A (en) * | 2018-10-16 | 2019-01-25 | 中国科学院光电技术研究所 | One kind being based on monochromatic light tweezer medium microsphere high-resolution optical detection method |
CN109828365A (en) * | 2019-02-25 | 2019-05-31 | 南京理工大学 | Mirau type super-resolution interferes microcobjective |
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Application publication date: 20191025 |