CN110346073A - Pressure between layers measuring device and method based on metallization film capacitor - Google Patents
Pressure between layers measuring device and method based on metallization film capacitor Download PDFInfo
- Publication number
- CN110346073A CN110346073A CN201910609904.7A CN201910609904A CN110346073A CN 110346073 A CN110346073 A CN 110346073A CN 201910609904 A CN201910609904 A CN 201910609904A CN 110346073 A CN110346073 A CN 110346073A
- Authority
- CN
- China
- Prior art keywords
- foil gauge
- mandrel
- pressure
- layers
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/225—Measuring circuits therefor
- G01L1/2262—Measuring circuits therefor involving simple electrical bridges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
Abstract
The present invention provides a kind of pressure between layers measuring device and method based on metallization film capacitor, the device include: metallization film capacitor, the first foil gauge, the second foil gauge, third foil gauge and the 4th foil gauge, static program-controlled deformeter and processor；Wherein: the first foil gauge and the second foil gauge are connected with each other, and are all set on the mandrel of metallization film capacitor；The sensitive direction of first foil gauge and the sensitive direction of the second foil gauge are mutually perpendicular to, and the sensitive direction of the first foil gauge is axial parallel with mandrel；Third foil gauge and the setting of the 4th foil gauge are in static program-controlled deformeter.Compared to existing measuring device and method, this invention simplifies measuring system and reduce foil gauge usage amount, and improves measurement accuracy.
Description
Technical field
The present invention relates to pressure measurement technique field more particularly to a kind of pressure between layers surveys based on metallization film capacitor
Measure device and method.
Background technique
The energy storage density of metallization film capacitor is much higher compared to traditional oil immersed type capacitor, uses metal film capacitor energy
The electric field energy storage more much bigger than oil immersed type capacitor is realized in limited volume and weight, or in the comparable feelings of energy storage
There is more compact volume and lighter weight under condition, have a extensive future in application fields such as power transmission and distribution, pulse powers, in phase
Replace traditional oil immersed type capacitor when having begun under a part of application scenarios, therefore each capacitor manufacturer attaches great importance to
The research and development of high-performance metal membrane capacitance.Metallization film capacitor generally according to institute's withstanding voltage grade and capacitance value not
Together, it is packed into shell afterwards in series and parallel by several capacitor elements to constitute, therefore the performance of metallization film capacitor largely takes
Certainly in the performance of used capacitor element.The basic structure and winding manufacturing process of capacitor element are as shown in Figures 1 and 2
(1 finger metallization film capacitor element stays side in Fig. 1).
Using thickness be usually several μm have single side (thickness be usually number nm to tens of nm) aluminium-zinc coating as electrode
Two layers of polymers metalized film is stacked, then around the rigid plastics hollow cylinder stick winding number hundred of diameter number mm, length number cm
To thousands of layers, and through metal spraying, welding lead, thermal finalization, impregnating technique process post package in plastic casing to get to one
Complete metallization film capacitor element.
After applying certain voltage on capacitor, the electric weakness in metalized film medium punctures, and forms discharge channel
And localized hyperthermia is generated, the coating electrode substance near breakdown point is evaporated, and then conductive channel resistance increases, discharged without Faville
It holds, insulation voluntarily restores.Referring to Fig. 3 (2 be metallic electrode in Fig. 3, and 3 be metallization removal position), this process is known as gold
The self-healing of categoryization membrane capacitance has a major impact the performance of capacitor.
The energy size and discharge period length discharged in self-healing procedure for evaporation electrode area size and hit
Wear a little nearby dielectric breakdown degree, release reactant property and quantity have very strong relevance, and then influence capacitor
The Key Performance Indicators such as the service life and energy storage density of device element or even entire capacitor.And the pressure size between metallic diaphragm is to certainly
More the energy size and discharge period discharged during has apparent association, therefore the size of metal film pressure between layers again
The performance of capacitor is had a major impact, capacitor is designed, process modification even quality controls such as reliability
In the process, pressure values have important directive significance between definitely understanding the metallic diaphragm in various situations.The pressure between layers value
It can not be by accurately calculating to obtain, it is necessary to which carrying out actual measurement can just know.
The element of metallization film capacitor is formed by metallizing film winding, is closely affixed between metalized film and metalized film
And compacting mutually, and one-shot measurement need to take into account dozens of measurement position.It is surveyed if being directly involved between metalized film by sensor
Pressure between layers are measured, then each measurement point requires pre-buried sensor, greatly increases the complexity of production element, and pre-buried multiple biographies
The geometric dimension of sensor component then sensor element itself inevitably influences whether the stress in entire element between metalized film point
Cloth, therefore, it is difficult to prove effective.And acoustics, electromagnetism or the optical measurement means etc. of non-intervention type, even if can effectively measure, instrument
The costs such as the complexity of cost and measuring system also can be higher, same inconvenient use.Therefore, preferable method only has indirect mode
Mechanics sensor mensuration.
In prior art, the resistance change of measurement foil gauge is used to measure the side of metal film pressure between layers indirectly
Method does not take into account some important errors characteristics, and existing scheme is caused integrally to there is the major defect of 2 aspects.
Defect 1: foil resistance foil gauge is become by wire resistance caused by the deformation behavior under stress
A kind of strain transducer for changing to reflect the change in shape of object that substrate is adhered to.By external force shape is being occurred for wire
When change, since corresponding change occurs for cross-sectional area and resistivity, the all-in resistance of wire also corresponding change, resistance variations
With the relationship of deformation quantity are as follows:
Δ r/r=K ε
Under normal circumstances, foil gauge is measuring Shi Buying by the active force perpendicular to its surface.Because perpendicular to
The active force on foil gauge surface can make wire generate additional deformation, its sectional area, length and resistivity under contention effect
Variation will be accordingly generated, and then the all-in resistance of wire is made to change the deformation variation for not exclusively reflecting its sensitive direction x, referring to
Fig. 4 (4 be solder joint in Fig. 4), but change doped with the undesirable additional deformation under the influence of the active force of vertical direction.
In the prior art scheme, foil gauge real work is in the state for having the very big stress perpendicular to its surface, because
Foil gauge surface is acted on to the extruding aggregation of mandrel for wound metallized film, foil gauge is made to incude its mandrel adhered to
Additional resistance variations error is produced except circumference deformation variation.It is used as the foil gauge of compensation in the program, because surface does not have
Vertical direction stress, therefore can not play the role of compensating the extra resistance deviation that vertical direction stress generates.If not using
The naked core mandrel rod for posting foil gauge compensates, but the completed element made under manufacture craft identical as detected element is used to mend
It repays, then detected element is identical as the vertical direction stress on the foil gauge in compensating element, under original state, but in detected element
Start to remove after metalized film measures, as metalized film is removed, the vertical stress on the foil gauge of detected element is gradually
Reduce, and vertical stress remains unchanged on the foil gauge of compensating element, then this compensation can not prove effective.If synchronous remove is mended
Repay the metalized film of element and detected element, then electric bridge can not measure effective output, change because the resistance of two elements is synchronous, according to
Electrical bridge principle, output voltage U remain 0.Therefore, lack in existing scheme to being produced under the stress perpendicular to foil gauge surface
The correction mechanism of raw error, error exist always, and as the carry out error amount of measurement constantly changes, seriously affect survey
The accuracy of amount.
Defect 2: to make resistance strain gage normal work that must just access electric bridge, then its both ends must apply certain electricity
Pressure, therefore Joule heat can be generated as resistive element foil gauge, wire can generate temperature change because of the Joule heat, and
Temperature change can make wire generate additional expansion or shrinkage deformation, which can also make strain sheet resistance generate additional change
Change and interference measurement.In general, needing to match for tested foil gauge to offset this error generated by strain resistor Joule heat
Corresponding compensating plate is set, the method as employed in prior art.But there are apparent defects for this method.Existing scheme
Middle dummy gauge and tested foil gauge are in different thermal equilibrium states, and it is flat that the direct ingress of air heat dissipation of compensating plate reaches heat
Weighing apparatus, tested piece are then metallized film and press, and reach thermal equilibrium state with metalized film, and as metalized film is stripped, metal
The extrusion stress changed between film and tested piece is gradually reduced, and extrusion stress has an impact to heat conduction, therefore with measurement
Carry out, the thermal equilibrium state of tested piece be in it is continually changing during, static compensating plate cannot reflect tested piece completely
Temperature-compensating state, thus do not prove effective, influence measurement accuracy.
To sum up, prior art does not consider that is considered needed for working normally foil resistance foil gauge asks correctly
Topic, tested foil gauge are in by continually changing vertical direction stress and the changing state of thermal balance, produce volume
Outer, unknown, uncertain, the continually changing extra resistance variable quantity of amplitude, and then generate distortion measurement also therewith
Corresponding error, and this error fails to be compensated and corrected by the dummy gauge in existing scheme, dummy gauge
Fail to play useful effect with compensating element,.
Summary of the invention
In view of this, the present invention provides a kind of pressure between layers measuring device based on metallization film capacitor, with more
Accurately measure the pressure between layers of metallization film capacitor
To achieve the goals above, the present invention uses following scheme:
In an embodiment of the invention, the pressure between layers measuring device based on metallization film capacitor, comprising: metallization
Membrane capacitance, the first foil gauge, the second foil gauge, third foil gauge and the 4th foil gauge, static program-controlled deformeter and processor；
Wherein:
First foil gauge and the second foil gauge are connected with each other, and are all set on the mandrel of metallization film capacitor；First
The sensitive direction of foil gauge and the sensitive direction of the second foil gauge are mutually perpendicular to, the sensitive direction of the first foil gauge and the axis of mandrel
To parallel；
Third foil gauge and the setting of the 4th foil gauge are in static program-controlled deformeter；
One end of first foil gauge connects second foil gauge one end, and one end of third foil gauge connects the one of the 4th foil gauge
End, the other end of the first foil gauge connect the other end of the 4th foil gauge, and the second foil gauge other end connects third foil gauge
The other end；The both ends of power supply in static program-controlled deformeter are connected between the first foil gauge and the 4th foil gauge and second
Between foil gauge and third foil gauge；
First foil gauge and the second foil gauge are identical foil gauge, and third foil gauge is identical answer with the 4th foil gauge
Become piece；
The static program-controlled deformeter of processor connection, mandrel deformation quantity for being obtained according to static program-controlled strain-ga(u)ge measurement and
The elasticity modulus of mandrel calculates the pressure between layers of metalized film.
In an embodiment of the invention, the metallizing film winding number of plies of metallization film capacitor is 500 to 2000 layers.
In an embodiment of the invention, the size of the first foil gauge and the second foil gauge is 36mm × 41mm；Third is answered
Become the size of piece and the 4th foil gauge as 37mm × 43mm.
In an embodiment of the invention, metallization film capacitor is cylindrical body Wound capacitor.
In order to solve the above technical problems, the present invention also provides the pressure between layers being applied to based on metallization film capacitor measurements
The pressure between layers measurement method based on metallization film capacitor of device:
It is measured respectively according to the resistance of the first foil gauge, the second foil gauge, third foil gauge and the 4th foil gauge by metal
Change deformation quantity of the film from the mandrel before and after metallization film capacitor removing；
The pressure between metalized film is calculated according to the elasticity modulus of deformation quantity and mandrel.
In an embodiment of the invention, according to the first foil gauge, the second foil gauge, third foil gauge and the 4th foil gauge
Resistance measure respectively by metalized film from metallization film capacitor removing front and back mandrel deformation quantity, comprising:
According to the first foil gauge and the initial resistance of the second foil gauge, the resistance of third foil gauge and the 4th foil gauge, benefit
It is measured respectively with Huygens's electrical bridge principle and becomes metalized film from the first strain sheet resistance of metallization film capacitor removing front and back
Change amount and the second foil gauge resistance change；
According to the resistance by metalized film from the first foil gauge and the second foil gauge before and after metallization film capacitor removing
Variable quantity calculates the difference because of the resistance change of the first foil gauge and the second foil gauge caused by mandrel deformation；
Mandrel is calculated according to the difference because of the resistance change of the first foil gauge and the second foil gauge caused by mandrel deformation
Deformation quantity.
In an embodiment of the invention, the first foil gauge resistance change includes: because first caused by mandrel deformation
The resistance change of foil gauge, the resistance change generated due to the first foil gauge stress and generated by temperature change first
The resistance change of foil gauge.
In an embodiment of the invention, the second foil gauge resistance change includes: because second caused by mandrel deformation
The resistance change of foil gauge, the resistance change generated due to the second foil gauge stress and generated by temperature change second
The resistance change of foil gauge.
In an embodiment of the invention, the output of static program-controlled deformeter is returned to zero, to obtain the first foil gauge and the
The initial deformation amount of two foil gauges.
In an embodiment of the invention, by metalized film from metallization film capacitor stripping process, each peeling layer
Number is 10 to 100 layers.
Pressure between layers measuring device and measurement method matched with its based on metallization film capacitor of the invention is created
Monolithic vertical double gate area foil resistance foil gauge and matched measuring circuit are devised to property, by outside in the prior art
Element compensation, which is changed into inside detected element, to be compensated, so that the resistance that the pressure and temperature to vertical direction is all extremely sensitive
The extra error resistance change in two grid region of foil gauge subtracts each other, and resultant error is completely canceled out from principle, only
Retain the normal resistance variable quantity generated due to mandrel deformation band dynamic strain piece, (is mended outside so measurement accuracy greatly improves
The mode of repaying cannot compensate the variation of extra resistance caused by the pressure, temperature variation occurred in removing thin-film process, this
Fractional error can not be eliminated).Meanwhile because using monolithic foil gauge progress internal compensation, it is additional used in external compensation
Capacitor element is saved, and measuring system is simplified, and foil gauge quantity used in one element of every detection is reduced from 2
To 1, cost has been saved.Therefore, existing measuring device and method are compared, is answered this invention simplifies measuring system and reducing
Become piece usage amount, and improves measurement accuracy.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.In the accompanying drawings:
Fig. 1 is metallization film capacitor component structure schematic diagram；
Fig. 2 is metallization film capacitor element winding schematic diagram；
Fig. 3 is metal film capacitor self-healing procedure schematic diagram；
Fig. 4 is foil resistance foil gauge schematic diagram；
Fig. 5 is the structural representation of the pressure between layers measuring device based on metallization film capacitor of one embodiment of the invention
Figure；
Fig. 6 is the structural schematic diagram of the vertical double gate area foil resistance foil gauge of one embodiment of the invention；
Fig. 7 is the measuring circuit connection schematic diagram of one embodiment of the invention；
Fig. 8 is the process signal of the pressure between layers measurement method based on metallization film capacitor in the embodiment of the present invention
Figure；
Fig. 9 is the schematic illustration one of the mandrel distortion measurement metalized film interlayer pressure of one embodiment of the invention；
Figure 10 is the schematic illustration two of the mandrel distortion measurement metalized film interlayer pressure of one embodiment of the invention；
Figure 11 is the flow diagram of step 100 in one embodiment of the invention；
Figure 12 is the flow diagram of specific application example of the invention；
Figure 13 is the relationship in specific application example of the invention between metalized film between pressure and the metalized film number of plies
Curve.
Specific embodiment
Understand in order to make the object, technical scheme and advantages of the embodiment of the invention clearer, with reference to the accompanying drawing to this hair
Bright embodiment is described in further details.Here, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, but simultaneously
It is not as a limitation of the invention.
Fig. 5 is the pressure between layers measuring device structural schematic diagram based on metallization film capacitor of one embodiment of the invention.
As shown in figure 5, the measuring device include: metallization film capacitor 1, foil gauge 2, foil gauge 3, foil gauge 4 and foil gauge 5, it is quiet
The program-controlled deformeter 6 of state and processor (not shown)；Wherein:
Foil gauge 2 and foil gauge 3 are connected with each other, and are all set on the mandrel 7 of metallization film capacitor；Foil gauge 2
Sensitive direction and the sensitive direction of foil gauge 3 are mutually perpendicular to, and the sensitive direction of foil gauge 2 is axial parallel with mandrel 7；It can manage
Solution, the sensitive direction of foil gauge 2 and the axial direction of mandrel 7 can also be vertical, as long as guaranteeing foil gauge 2 and foil gauge 3 wherein
A foil gauge sensitive direction and mandrel 7 it is axially vertical, the axial direction of the sensitive direction of another foil gauge and mandrel 7 is flat
Row.In addition, such structure can guarantee that foil gauge 2 and foil gauge 3 are synchronously under the effect of identical vertical direction pressure, and
Temperature equilibrium locating for foil gauge 2 and foil gauge 3 is also completely the same, is in continually changing hang down by foil gauge to eliminate
Directly under the pressure effect of its surface direction, and thermal equilibrium state carries out with test and constantly changes and strain measurement is caused to generate
The problem of additional resistance variations error.
In one embodiment, foil gauge 2 and foil gauge 3 be can integrate as structure as shown in FIG. 6, i.e. vertical double gate area foil
Resistance strain gage, it is to be understood that adopt the structure design, detect foil gauge quantity used in an element from 2
It is reduced to 1, saved cost and is simplified measuring system.
Foil gauge 4 and foil gauge 5 are arranged in static program-controlled deformeter；
Foil gauge 2 and foil gauge 3 are identical foil gauge (at least size is identical with resistance), and foil gauge 4 and foil gauge 5 are
Identical foil gauge (at least size is identical with resistance), foil gauge 2 and 3 can be identical with foil gauge 4 and 5, can not also be identical.
Referring to Fig. 7, one end of foil gauge 2 connects 3 one end of foil gauge, and one end of foil gauge 4 connects one end of foil gauge 5,
The other end of the other end connection foil gauge 5 of foil gauge 2,3 other end of foil gauge connect the other end of foil gauge 4；It is static program-controlled
One end of power supply in deformeter 6 is connected between foil gauge 2 and foil gauge 5, and the other end is connected to foil gauge 3 and strain
Between piece 4；It is understood that using such connection type, so that the pressure and temperature to vertical direction is all extremely sensitive
The extra error resistance change of resistance strain gage, two grid region subtracts each other, to completely cancel out resultant error, only
Retain the normal resistance variable quantity generated due to mandrel deformation band dynamic strain piece, so measurement accuracy greatly improves.In addition, such as
Foil gauge 2 and foil gauge 3 can integrate and then need for structure as shown in FIG. 6 to carry out according to the connection type of dotted line in Fig. 7
Connection.
The static program-controlled deformeter of processor connection, mandrel deformation quantity for being obtained according to static program-controlled strain-ga(u)ge measurement and
The elasticity modulus of mandrel calculates the pressure between layers of metalized film.
In one embodiment, the metallizing film winding number of plies of metallization film capacitor is 500 to 2000 layers.
In one embodiment, the size of foil gauge 2 and foil gauge 3 is 36mm × 41mm；The size of foil gauge 4 and foil gauge 5
For 37mm × 43mm.
In one embodiment, metallization film capacitor is cylindrical body Wound capacitor.
Pressure between layers measuring device based on metallization film capacitor of the invention, it is vertically double creatively to devise monolithic
Outer member in the prior art compensation is changed into tested member by grid region foil resistance foil gauge and matched measuring circuit
It is compensated inside part, so that the volume in resistance strain gage two grid region all extremely sensitive to the pressure and temperature of vertical direction
Outer error resistance variable quantity subtracts each other, and resultant error is completely canceled out from principle, only retains since mandrel deformation drives
Foil gauge and the normal resistance variable quantity generated, so measurement accuracy greatly improves, (external compensation mode cannot be to removing gold
The variation of extra resistance caused by the pressure, temperature variation occurred in categoryization membrane process compensates, this fractional error can not disappear
Except).Meanwhile because carrying out internal compensation using monolithic foil gauge, additional capacitor element used in external compensation is able to
Save, measuring system is simplified, and foil gauge quantity used in one element of every detection is reduced to 1 from 2, saved at
This.Therefore, existing measuring device and method are compared, this invention simplifies measuring system and reduces foil gauge usage amount, and
And improve measurement accuracy.
The embodiment of the present invention also provides a kind of applied to the pressure between layers measuring device based on metallization film capacitor
The specific embodiment of pressure between layers measurement method based on metallization film capacitor, referring to Fig. 5 and Fig. 8, this method is specifically wrapped
Include following content:
Step 100: measured respectively according to the resistance of foil gauge 2, foil gauge 3, foil gauge 4 and foil gauge 5 by metalized film
From the deformation quantity of the mandrel 7 of the removing of metallization film capacitor 1 front and back.
It is understood that as metallization film capacitor element be using metalized film made of the mandrel winding,
When by mandrel winding at capacitor element, each layer metalized film that foil gauge and mandrel are applied simultaneously compresses and generates receipts
Compression deformation, after removing the film layer of outsourcing, mandrel deformation accordingly restores.Since each tunic is uniformly to be wound up on mandrel, answer
Thickness only 30 microns for becoming piece can ignore the influence of the size to test result of foil gauge itself, therefore can consider core
The shrinkage degree of axis everywhere is identical.That is, the special capacitor element successively remove metalized film when because being applied to core
Stress on axis is accordingly reduced, and axle diameter restores, and the perimeter of mandrel circular section also restore by equal proportion, drives foil gauge wire
Equal proportion is restored, so that strain sheet resistance values corresponding change.The situation of change that sheet resistance is strained by bridge measurement, can calculate
The deformation amount of recovery of mandrel out.
Step 200: the elasticity modulus of the deformation quantity according to obtained in step 100 and mandrel 7 calculates between metalized film
Pressure.
It is understood that material, in elastic deformation stage, stress and strain direct proportionality (it is fixed to meet Hooke
Rule), proportionality coefficient is known as elasticity modulus.
In step 100 and step 200, since metalized film is in tight state in winding process, after winding
It will receive corresponding stress on mandrel, this stress is uniformly that the stress of the layer of metallized film of all windings passes jointly
Passing the effect being applied on mandrel is to make finally to have accumulated a certain amount of uniform radial compression deformation on mandrel.And if dismantling
Fall several metalized films, is then split the stress that the metalized film superposition taken off is applied on mandrel and is released, mandrel deformation can phase
It should restore.According to the transmission characteristic of pressure, stress needed for making mandrel generate corresponding deformation amount is equal to is stripped metal accordingly
Change the innermost layer of film and do not strip the pressure between metalized film outermost layer, value are as follows:
P=Δ ε × Em
Wherein P is pressure values, and Δ ε is mandrel deformation amount of recovery, EmFor mandrel elasticity modulus (for known quantity).Δ ε can be with
Mandrel surface is attached to using foil resistance foil gauge and electric bridge is cooperated to measure, and principle is as shown in FIG. 9 and 10.
As can be seen from the above description, the base applied to the pressure between layers measuring device based on metallization film capacitor of the invention
In the pressure between layers measurement method of metallization film capacitor, monolithic vertical double gate area foil resistance foil gauge is creatively devised
With matched measuring circuit, outer member in the prior art compensation is changed into inside detected element and is compensated, is made
Obtain the extra error resistance change in resistance strain gage two grid region all extremely sensitive to the pressure and temperature of vertical direction
Subtract each other, resultant error is completely canceled out from principle, only retains due to mandrel deformation band dynamic strain piece and generate just
Normal resistance change, so measurement accuracy greatly improves, (external compensation mode cannot occur to during removing metalized film
Pressure, temperature variation caused by extra resistance variation compensate, this fractional error can not be eliminated).Meanwhile because using
Monolithic foil gauge carries out internal compensation, therefore additional capacitor element used in external compensation is saved, and measuring system is able to
Simplify, foil gauge quantity used in one element of every detection is reduced to 1 from 2, has saved cost.Therefore, present invention letter
Change measuring system and reduced foil gauge usage amount, and improves measurement accuracy.
In one embodiment, referring to Figure 11, step 100 specifically includes following content:
Step 101: according to foil gauge 2 and the initial resistance of foil gauge 3, the resistance of foil gauge 4 and foil gauge 5 utilizes favour
More this electrical bridge principle measures respectively to be removed 2 resistance change of foil gauge of front and back from metallization film capacitor for metalized film and answers
Become 3 resistance change of piece.
It is understood that foil resistance foil gauge be by wire caused by the deformation behavior under stress
Resistance variations reflect a kind of strain transducer of the change in shape of object that substrate is adhered to.Wire is by external force
When deformation occurs, since corresponding change occurs for cross-sectional area and resistivity, the all-in resistance of wire also corresponding change, electricity
The relationship of resistive and deformation quantity are as follows:
Δ r/r=K ε
Wherein, Δ r is resistance change, and r is initial resistivity value, and ε is deformation quantity, and K is the sensitivity coefficient of foil gauge.
Step 102: according to the electricity by metalized film from foil gauge 2 and foil gauge 3 before and after metallization film capacitor removing
Variable quantity is hindered, the difference because of the resistance change of foil gauge 2 and foil gauge 3 caused by mandrel deformation is calculated.
Specifically, " because of the difference of the resistance change of foil gauge 2 and foil gauge 3 caused by mandrel deformation " in step 102
Refer to because of the resistance change of foil gauge 2 caused by mandrel deformation and because of the resistance variations of strain 3 caused by mandrel deformation
Difference between amount, it is to be understood that 2 resistance change of foil gauge in step 102 includes: because caused by mandrel deformation
The resistance change of foil gauge 2, and the resistance change generated due to 2 stress of foil gauge and the strain generated by temperature change
The resistance change of piece 2；3 resistance change of foil gauge includes: the resistance change because of foil gauge 3 caused by mandrel deformation,
And the resistance change of the resistance change and the foil gauge 3 generated by temperature change generated due to 3 stress of foil gauge.
Foil gauge is measuring Shi Buying by the active force perpendicular to its surface.Because perpendicular to foil gauge surface
Active force wire can be made to generate additional deformation, its sectional area, length and resistivity all can be produced accordingly under contention effect
Changing, and then the all-in resistance of wire is made to change the deformation variation for not exclusively reflecting its sensitive direction x, but doped with vertical
Undesirable additional deformation variation under the influence of the active force in direction, referring to fig. 4.
Step 103: core is calculated according to the difference because of the resistance change of foil gauge 2 and foil gauge 3 caused by mandrel deformation
The deformation quantity of axis.
In one embodiment, the pressure between layers measurement method based on metallization film capacitor further include: by static program-controlled strain
The output of instrument is returned to zero, to obtain the initial deformation amount of foil gauge 2 and foil gauge 3.
In one embodiment, by metalized film from metallization film capacitor stripping process, removing the number of plies every time is 10 to 100
Layer.
As can be seen from the above description, the base applied to the pressure between layers measuring device based on metallization film capacitor of the invention
In the pressure between layers measurement method of metallization film capacitor, monolithic vertical double gate area foil resistance foil gauge is creatively devised
With matched measuring circuit, outer member in the prior art compensation is changed into inside detected element and is compensated, is made
Obtain the extra error resistance change in resistance strain gage two grid region all extremely sensitive to the pressure and temperature of vertical direction
Subtract each other, resultant error is completely canceled out from principle, only retains due to mandrel deformation band dynamic strain piece and generate just
Normal resistance change, so measurement accuracy greatly improves, (external compensation mode cannot occur to during removing metalized film
Pressure, temperature variation caused by extra resistance variation compensate, this fractional error can not be eliminated).Meanwhile because using
Monolithic foil gauge carries out internal compensation, therefore additional capacitor element used in external compensation is saved, and measuring system is able to
Simplify, foil gauge quantity used in one element of every detection is reduced to 1 from 2, has saved cost.Therefore, present invention letter
Change measuring system and reduced foil gauge usage amount, and improves measurement accuracy.
To further explain this programme, the present invention provides and is applied to based on metalized film electricity by taking foil gage as an example
The pressure between layers measurement method specific application example based on metallization film capacitor of the pressure between layers measuring device of container, the tool
Body application example specifically includes following content, referring to Fig. 5 and Figure 12.
S0: the output of static program-controlled deformeter is returned to zero, to obtain the initial deformation amount of foil gauge 2 and foil gauge 3.
S1: metalized film is removed 2 resistance change of foil gauge and foil gauge 3 of front and back by measurement from metallization film capacitor
Resistance change.
Referring to Fig. 7, bridge resistor R1 and R2 respectively correspond the wire grid region of foil gauge 2 and the metal wire grid of foil gauge 3
Area, initial resistance R is equal, and R3 and R4 are strain-gauge test electric bridge internal resistances, and value is also equal.
Because the resistance change rate very little of resistance strain gage, has according to Wheatstone bridge principle:
Δ U ∝ (R1-R2)/R=(Δ R1- Δ R2)/R
Wherein R is the initial resistivity value in the single grid region of foil gauge, and Δ U is the voltage variety under stress, Δ R1
It is respectively the grid region resistance change of foil gauge 2 and foil gauge 3 with Δ R2, has respectively:
ΔR1=rT1+rP1+r1
ΔR2=rT2+rP2+r2
S2: the difference because of the resistance change of 2 foil gauges and foil gauge 3 caused by mandrel deformation is calculated.
In S1, rT1And rT2Respectively grid region resistance R1And R2The volume generated under the active force perpendicular to foil gauge direction
External resistance changing value, because the specification in two grid regions is consistent, pressure also uniformity, therefore rT1=rT2。rP1And rP2Respectively
For the extra resistance changing value that two grid regions are generated by temperature change, because two grid region specifications are consistent, local environment is consistent, so
It generates heat also consistent with heat dissipation balancing, therefore rP1=rP2。r1And r2Respectively foil gauge grid region changes with capacitor element axle diameter
And the resistance-strain variable quantity (what is actually intentionally got is measured) generated, because axle diameter variation tendency becomes with axial stretching
Gesture according to characteristic of material mechanics on the contrary, have:
Had according to characteristic of material mechanics
r2=-ρ r1
Wherein ρ is the Poisson's ratio of mandrel material.So that
ΔU∝(R1-R2)/R=(Δ R1-ΔR2)/R
=[(rT1+rP1+r1)-(rT2+rP2+r2)]/R
=(1+ ρ) r1/R
Had according to the principle of foil resistance foil gauge
r1/R∝Kε
Wherein K is the sensitivity coefficient of foil gauge, and ε is the dependent variable of foil gauge.
S3: the deformation quantity of mandrel 7 is calculated.
S2 is met, is had: Δ U ∝ (1+ ρ) K ε, accordingly can be in the hope of mandrel deformation quantity ε, and eliminate temperature and vertical direction pressure
Power influences the error of measurement.
S4: the pressure between layers of metalized film are calculated.
The pressure between layers of metalized film are calculated according to the elasticity modulus of mandrel deformation quantity and mandrel, specifically: successively stripping
The metalized film of capacitor element, then after stripping n-layer, if comparing initial full state, mandrel dependent variable difference is Δ ε, then is shelled
The metalized film removed is applied to the pressure summation on residual metallic film outermost layer
Δ P=Δ ε E
Wherein, Δ P is pressure change amount, and Δ ε is mandrel deformation amount of recovery, EmFor mandrel elasticity modulus (for known quantity).
This step Δ P be stripped in metalized film in most interior one layer and residual metallic film between outermost one layer element completely not
Strip pressure between layers value when metalized film state.One section of metalized film is often stripped, the number of plies being stripped and mandrel strain are recorded
Difference is measured, the relation curve between every double-layer metallization film between pressure and the metalized film number of plies is obtained after can calculating, is such as schemed
Shown in 13.
As can be seen from the above description, the base applied to the pressure between layers measuring device based on metallization film capacitor of the invention
In the pressure between layers measurement method of metallization film capacitor, monolithic vertical double gate area foil resistance foil gauge is creatively devised
With matched measuring circuit, outer member in the prior art compensation is changed into inside detected element and is compensated, is made
Obtain the extra error resistance change in resistance strain gage two grid region all extremely sensitive to the pressure and temperature of vertical direction
Subtract each other, resultant error is completely canceled out from principle, only retains due to mandrel deformation band dynamic strain piece and generate just
Normal resistance change, so measurement accuracy greatly improves, (external compensation mode cannot occur to during removing metalized film
Pressure, temperature variation caused by extra resistance variation compensate, this fractional error can not be eliminated).Meanwhile because using
Monolithic foil gauge carries out internal compensation, therefore additional capacitor element used in external compensation is saved, and measuring system is able to
Simplify, foil gauge quantity used in one element of every detection is reduced to 1 from 2, has saved cost.Therefore, compared to existing
Measuring device and method, this invention simplifies measuring system and reduce foil gauge usage amount, and improve measurement accuracy.
It is above-mentioned that this specification specific embodiment is described.Other embodiments are in the scope of the appended claims
It is interior.In some cases, the movement recorded in detail in the claims or step can be come according to the sequence being different from embodiment
It executes and desired result still may be implemented.In addition, process depicted in the drawing not necessarily require show it is specific suitable
Sequence or consecutive order are just able to achieve desired result.In some embodiments, multitasking and parallel processing be also can
With or may be advantageous.
Although this application provides the method operating procedure as described in embodiment or flow chart, based on conventional or noninvasive
The labour for the property made may include more or less operating procedure.The step of enumerating in embodiment sequence is only numerous steps
One of execution sequence mode, does not represent and unique executes sequence.It, can when device or client production in practice executes
To execute or parallel execute (such as at parallel processor or multithreading according to embodiment or method shown in the drawings sequence
The environment of reason).
Although this specification embodiment provides the method operating procedure as described in embodiment or flow chart, based on conventional
It may include either more or less operating procedure without creative means.The step of being enumerated in embodiment sequence be only
One of numerous step execution sequence mode does not represent and unique executes sequence.Device or end product in practice is held
When row, can be executed according to embodiment or method shown in the drawings sequence or it is parallel execute (such as parallel processor or
The environment of multiple threads, even distributed data processing environment).The terms "include", "comprise" or its any other change
Body is intended to non-exclusive inclusion, so that process, method, product or equipment including a series of elements are not only wrapped
Those elements are included, but also including other elements that are not explicitly listed, or further includes for this process, method, product
Or the element that equipment is intrinsic.In the absence of more restrictions, being not precluded is including process, the side of the element
There is also other identical or equivalent elements in method, product or equipment.
All the embodiments in this specification are described in a progressive manner, same and similar portion between each embodiment
Dividing may refer to each other, and each embodiment focuses on the differences from other embodiments.Especially for system reality
For applying example, since it is substantially similar to the method embodiment, so being described relatively simple, related place is referring to embodiment of the method
Part explanation.In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ",
The description of " specific example " or " some examples " etc. means specific features described in conjunction with this embodiment or example, structure, material
Or feature is contained at least one embodiment or example of this specification embodiment.In the present specification, to above-mentioned term
Schematic representation be necessarily directed to identical embodiment or example.Moreover, description specific features, structure, material or
Person's feature may be combined in any suitable manner in any one or more of the embodiments or examples.In addition, in not conflicting feelings
Under condition, those skilled in the art by different embodiments or examples described in this specification and different embodiment or can show
The feature of example is combined.
The foregoing is merely the embodiments of this specification embodiment, are not limited to this specification embodiment.It is right
For those skilled in the art, this specification embodiment can have various modifications and variations.It is all in this specification embodiment
Any modification, equivalent replacement, improvement and so within spirit and principle, the right that should be included in this specification embodiment are wanted
Within the scope of asking.
Claims (10)
1. a kind of pressure between layers measuring device based on metallization film capacitor characterized by comprising metalized film capacitor
Device, the first foil gauge, the second foil gauge, third foil gauge and the 4th foil gauge, static program-controlled deformeter and processor；Wherein:
First foil gauge and the second foil gauge are connected with each other, and are all set on the mandrel of the metallization film capacitor；It is described
The sensitive direction of first foil gauge and the sensitive direction of the second foil gauge are mutually perpendicular to, the sensitive direction of first foil gauge with
The axial direction of the mandrel is parallel；
The third foil gauge and the 4th foil gauge are arranged in the program-controlled deformeter of static state；
One end of first foil gauge connects second foil gauge one end, and one end connection the described 4th of third foil gauge is answered
Become one end of piece, the other end of first foil gauge connects the other end of the 4th foil gauge, and second foil gauge is another
One end connects the other end of the third foil gauge；The both ends of power supply in the program-controlled deformeter of static state are connected to described
Between first foil gauge and the 4th foil gauge and between second foil gauge and the third foil gauge；
First foil gauge and the second foil gauge are identical foil gauge, and third foil gauge and the 4th foil gauge are identical strain
Piece；
The processor connects the program-controlled deformeter of static state, the mandrel for obtaining according to the program-controlled strain-ga(u)ge measurement of static state
The pressure between layers of the elasticity modulus of deformation quantity and mandrel calculating metalized film.
2. pressure between layers measuring device according to claim 1, which is characterized in that the metal of the metallization film capacitor
Changing film Winding Layer is 500 to 2000 layers.
3. pressure between layers measuring device according to claim 1 characterized by comprising
The size of first foil gauge and the second foil gauge is 36mm × 41mm；
The size of the third foil gauge and the 4th foil gauge is 37mm × 43mm.
4. pressure between layers measuring device according to claim 1, which is characterized in that the metallization film capacitor is cylinder
Body Wound capacitor.
5. it is described in any item to be applied to claim 1-4 for a kind of pressure between layers measurement method based on metallization film capacitor
Pressure between layers measuring device based on metallization film capacitor characterized by comprising
It is measured respectively according to the resistance of first foil gauge, the second foil gauge, third foil gauge and the 4th foil gauge by metal
Change deformation quantity of the film from the mandrel before and after metallization film capacitor removing；
The pressure between metalized film is calculated according to the elasticity modulus of the deformation quantity and the mandrel.
6. pressure between layers measurement method as claimed in claim 5, which is characterized in that described according to first foil gauge,
The resistance of two foil gauges, third foil gauge and the 4th foil gauge is measured respectively by metalized film before metallization film capacitor removing
The deformation quantity of the mandrel afterwards, comprising:
According to the first foil gauge and the initial resistance of the second foil gauge, the resistance of third foil gauge and the 4th foil gauge utilizes favour
More this electrical bridge principle measures respectively becomes metalized film from the first strain sheet resistance of metallization film capacitor removing front and back
Change amount and the second foil gauge resistance change；
According to it is described by metalized film from first foil gauge and the second foil gauge of metallization film capacitor removing front and back
Resistance change calculates the difference because of the first foil gauge caused by the mandrel deformation and the resistance change of the second foil gauge；
According to described because the difference of the first foil gauge caused by the mandrel deformation and the resistance change of the second foil gauge calculates
The deformation quantity of the mandrel.
7. pressure between layers measurement method as claimed in claim 6, which is characterized in that the first foil gauge resistance change packet
It includes: because of the resistance change of the first foil gauge caused by the mandrel deformation, being generated because of the first foil gauge stress
The resistance change of resistance change and the first foil gauge generated by temperature change.
8. pressure between layers measurement method as claimed in claim 6, which is characterized in that the second foil gauge resistance change packet
It includes: because of the resistance change of the second foil gauge caused by the mandrel deformation, being generated because of the second foil gauge stress
The resistance change of resistance change and the second foil gauge generated by temperature change.
9. pressure between layers measurement method as claimed in claim 6, which is characterized in that further include: by the program-controlled strain of static state
The output of instrument is returned to zero, to obtain the initial deformation amount of first foil gauge and the second foil gauge.
10. pressure between layers measurement method as claimed in claim 5, which is characterized in that further include: by metalized film from metallization
In membrane capacitance stripping process, removing the number of plies every time is 10 to 100 layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910609904.7A CN110346073B (en) | 2019-07-08 | 2019-07-08 | Interlayer pressure measuring device and method based on metallized film capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910609904.7A CN110346073B (en) | 2019-07-08 | 2019-07-08 | Interlayer pressure measuring device and method based on metallized film capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110346073A true CN110346073A (en) | 2019-10-18 |
| CN110346073B CN110346073B (en) | 2021-03-16 |
Family
ID=68178361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910609904.7A Active CN110346073B (en) | 2019-07-08 | 2019-07-08 | Interlayer pressure measuring device and method based on metallized film capacitor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110346073B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112461433A (en) * | 2020-11-27 | 2021-03-09 | 芯海科技（深圳）股份有限公司 | Capacitive pressure sensing device and electronic equipment |
| CN116660574A (en) * | 2023-05-29 | 2023-08-29 | 北京瑞科同创能源科技有限公司 | Detection device, flow rate detection method, and flow direction detection method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1469683A (en) * | 1974-08-06 | 1977-04-06 | Benson Sa | Negative pressure detector |
| JPH0521270A (en) * | 1991-07-09 | 1993-01-29 | Matsushita Electric Ind Co Ltd | Metallized film capacitor |
| CN1340833A (en) * | 2000-08-30 | 2002-03-20 | 阿尔卑斯电气株式会社 | Film capacitor for temperature compensation |
| CN1845327A (en) * | 2005-04-07 | 2006-10-11 | 中国科学院电子学研究所 | Single slice integration temperature, humidity, pressure sensor chip based on polymer material |
| CN103487177A (en) * | 2013-09-05 | 2014-01-01 | 华中科技大学 | Method and device for measuring metallized film capacitor interlayer pressure intensity |
| CN108267076A (en) * | 2016-12-30 | 2018-07-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of self-temperature compensating gage |
-
2019
- 2019-07-08 CN CN201910609904.7A patent/CN110346073B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1469683A (en) * | 1974-08-06 | 1977-04-06 | Benson Sa | Negative pressure detector |
| JPH0521270A (en) * | 1991-07-09 | 1993-01-29 | Matsushita Electric Ind Co Ltd | Metallized film capacitor |
| CN1340833A (en) * | 2000-08-30 | 2002-03-20 | 阿尔卑斯电气株式会社 | Film capacitor for temperature compensation |
| CN1845327A (en) * | 2005-04-07 | 2006-10-11 | 中国科学院电子学研究所 | Single slice integration temperature, humidity, pressure sensor chip based on polymer material |
| CN103487177A (en) * | 2013-09-05 | 2014-01-01 | 华中科技大学 | Method and device for measuring metallized film capacitor interlayer pressure intensity |
| CN108267076A (en) * | 2016-12-30 | 2018-07-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of self-temperature compensating gage |
Non-Patent Citations (2)
| Title |
|---|
| 孔中华 等: "金属化膜电容器层间压强计算", 《高压电气》 * |
| 王文娟 等: "通过电容器层间压强的增强提高电容器寿命", 《强激光与粒子束》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112461433A (en) * | 2020-11-27 | 2021-03-09 | 芯海科技（深圳）股份有限公司 | Capacitive pressure sensing device and electronic equipment |
| CN116660574A (en) * | 2023-05-29 | 2023-08-29 | 北京瑞科同创能源科技有限公司 | Detection device, flow rate detection method, and flow direction detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110346073B (en) | 2021-03-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8253425B2 (en) | Production testing of a capacitive touch sensing device | |
| Liang et al. | High sensitivity piezoelectric sensors using flexible PZT thick-film for shock tube pressure testing | |
| GB2086584A (en) | A transducer for measurement of mechanical values on hollow bodies | |
| CN110346073A (en) | Pressure between layers measuring device and method based on metallization film capacitor | |
| CN101133309A (en) | Calibrated pressure sensor | |
| Zeiser et al. | Capacitive strain gauges on flexible polymer substrates for wireless, intelligent systems | |
| KR101806490B1 (en) | sensor element | |
| CN105917204A (en) | Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method | |
| JP2012504772A (en) | Process transmitter and thermal diagnostic method | |
| US9568387B2 (en) | Thermal diagnostic for single-crystal process fluid pressure sensor | |
| WO2007121586A1 (en) | Capacitive node measurement in a capacitive matrix pressure transducer | |
| CN103487177B (en) | Method and device for measuring metallized film capacitor interlayer pressure intensity | |
| CN110530571A (en) | The method that a kind of pair of belt sensor threaded male fastener carries out pretightning force calibration | |
| CN103196526B (en) | Dynamometry weighing sensor with unbalance loading isolating function and isolating measuring method thereof | |
| WO2021087348A1 (en) | Temperature compensation of strain gauge output | |
| RU2312319C2 (en) | Thin-film pressure gage | |
| US20050013526A1 (en) | Patch-type extrinsic fabry-perot interferometric fiber optic sensor and real-time structural vibration monitoring method using the same | |
| CN110132122B (en) | Solid engine grain strain measurement method based on full-flexible large strain sensor | |
| CN209945592U (en) | Stress measuring device for compliant hinge | |
| CN111829648A (en) | Piezoelectric noise sensor probe | |
| CN109341930A (en) | A kind of detection system and method for battery core bulging power | |
| CN210464785U (en) | Bipolar capacitance type vacuum gauge and corresponding measuring circuit thereof | |
| CN112114009B (en) | Humidity sensor chip with self-diagnosis function and self-diagnosis method of humidity sensor chip | |
| RU2661456C1 (en) | Method and device of tensoelectric transformation | |
| RU2500986C2 (en) | Digital multi-component motion sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |