CN110342689A - A kind of waste water indirect regeneration applied to semiconductor packing process cleaning process - Google Patents
A kind of waste water indirect regeneration applied to semiconductor packing process cleaning process Download PDFInfo
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- CN110342689A CN110342689A CN201910745777.3A CN201910745777A CN110342689A CN 110342689 A CN110342689 A CN 110342689A CN 201910745777 A CN201910745777 A CN 201910745777A CN 110342689 A CN110342689 A CN 110342689A
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- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000004140 cleaning Methods 0.000 title claims abstract description 38
- 239000002351 wastewater Substances 0.000 title claims abstract description 33
- 239000004065 semiconductor Substances 0.000 title claims abstract description 32
- 238000012856 packing Methods 0.000 title claims abstract description 22
- 230000008929 regeneration Effects 0.000 title claims abstract description 22
- 238000011069 regeneration method Methods 0.000 title claims abstract description 22
- 238000001914 filtration Methods 0.000 claims abstract description 95
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 93
- 229920000742 Cotton Polymers 0.000 claims description 60
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 30
- 239000003456 ion exchange resin Substances 0.000 claims description 30
- 229920003303 ion-exchange polymer Polymers 0.000 claims description 30
- 230000000694 effects Effects 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 16
- 239000006004 Quartz sand Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 238000004659 sterilization and disinfection Methods 0.000 claims description 6
- 238000004064 recycling Methods 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 238000000746 purification Methods 0.000 abstract description 4
- 238000009776 industrial production Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/28—Treatment of water, waste water, or sewage by sorption
- C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
- C02F2201/005—Valves
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2303/00—Specific treatment goals
- C02F2303/04—Disinfection
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Treatment Of Water By Ion Exchange (AREA)
Abstract
The invention discloses a kind of waste water indirect regenerations applied to semiconductor packing process cleaning process, it includes the filtering C line for being connected to city's water inlet, it is connected to the filtering A line and filtering B line of the output end of raw water bucket, the filtering A line, filtering B line and the output end for filtering C line are connected to pure water bucket, the pure water of the output end output of pure water bucket is delivered to cleaning device, waste water after cleaned semiconductor package part is again at overflow to raw water bucket, it is recycled after purified system purification again, realizes waste water reclamation.It completes the purified treatment to water quality by filtering A line, filtering B line and filtering C line jointly, and forms a circulation closed-loop regeneration system with cleaning device, has not only saved water resource, but also greatly reduce industrial production cost.
Description
Technical field
The present invention relates to cycling utilization of wastewater technical fields, more particularly to one kind to be applied to semiconductor packing process scavenger
The waste water indirect regeneration of sequence.
Background technique
With semicon industry high speed development, product Highgrade integration, reliability requirement is higher and higher, and micro pollution is all
It performance, the reliability of product can be had a huge impact, it is therefore desirable to have stringent control to pollution, for example particle, have
Machine object, scaling powder etc..It is thus cleaned in each processing procedure of semiconductor packages particularly important.Cleaning way be divided into wet-cleaning and
Dry method is cleaned, in the majority with wet-cleaning in industry, due to the demand of wet-cleaning making technology, can be generated a large amount of waste water, be made
At water resource waste, wastewater treatment also increases cost to enterprise.
Summary of the invention
In order to meet above-mentioned requirements, it is an object of that present invention to provide a kind of applied to semiconductor packing process cleaning process
Waste water indirect regeneration, it is desirable to provide one kind recycles waste water, reduces the wasting of resources and reduces the recycled water of production cost
System.
To achieve the goals above, the invention adopts the following technical scheme:
Embodiment of the invention discloses a kind of waste water circular regeneration systems applied to semiconductor packing process cleaning process
System comprising: it is connected to the first control valve of city's water inlet, the output end of first control valve is connected to raw water bucket,
First pump housing is also connected on the raw water bucket, the output end of first pump housing, which is connected separately with, purifies raw water
The filtering A line and filtering B line of processing, the filtering A line and the output end for filtering B line are connected to a pure water bucket, described
Second pump housing is also connected on pure water bucket, the pure water in pure water bucket is delivered to semiconductor packages by second pump housing
Semiconductor package part is cleaned at the cleaning device of line clean process, the waste water after cleaning semiconductor package part passes through again
In overflow to the raw water bucket, to complete waste water recycling, wherein the filtering A line and filtering B line are standby each other
With filtering.
Wherein, the filtering A line includes: the second control valve for being connected to the first pump housing output end, is connected to described second
The A line quartz sand filter core of the output end of control valve is connected to the A line level-one cotton filter core of the A line quartz sand filter core, is connected to
The A line second level cotton filter core of the A line level-one cotton filter core is connected to the third control valve of the A line second level cotton filter core, even
The A line primary activity filtration core for passing through the output end of the third control valve, is connected to the A of the A line primary activity filtration core
Line second order activity filtration core, is connected to the A line ion exchange resin filter core of the A line second order activity filtration core, and is connected to
The conductivity detector of the A line ion exchange resin filter core, the raw water after the A line ion exchange resin filter core is through
Pure water bucket is connected to after four control valves.
Wherein, the filtering B line includes: the 5th control valve for being connected to the output end of first pump housing, is connected to described
The B line quartz sand filter core of the output end of five control valves is connected to the B line level-one cotton filter core of the B line quartz sand filter core, connection
In the B line second level cotton filter core of the B line level-one cotton filter core, it is connected to the 6th control valve of the B line second level cotton filter core,
It is connected to the B line primary activity filtration core of the output end of the 6th control valve, is connected to the B line primary activity filtration core
B line second order activity filtration core, is connected to the B line ion exchange resin filter core of the B line second order activity filtration core, and is connected to
The conductivity detector of the B line ion exchange resin filter core, the raw water after the B line ion exchange resin filter core is through
Pure water bucket is connected to after seven control valves.
Wherein, the node between the A line second level cotton filter core and third control valve and B line second level cotton filter core and the 6th
Node between control valve is also communicated with one the 8th control valve, common by third control valve, the 6th control valve and the 8th control valve
Complete in filtering A line and filter the middle part filtering circuit switching of B line.
Wherein, the A line level-one cotton filter core and B line level-one cotton filter core are 20um cotton filter core.
Wherein, the A line second level cotton filter core and B line second level cotton filter core are 2um cotton filter core.
Wherein, a third pump housing is also connected on the raw water bucket, the output end of the third pump housing, which is connected to, to be added
Heat pipe, the raw water after the heating tube heating disinfection flow back into raw water bucket.
Wherein, one the 4th pump housing is also communicated on the pure water bucket, the output end of the 4th pump housing, which is connected to, to be added
Heat pipe, the pure water after the heating tube heating disinfection flow back into pure water bucket.
Wherein, also a filtering C line, the filtering C line output terminal for being connected to city's water inlet are connected to pure water bucket.
Wherein, the filtering C line includes: the 9th control valve for being connected to city's water inlet, is connected to the 9th control valve
Output end C line level-one cotton filter core, be connected to the C line second level cotton filter core of the C line level-one cotton filter core, be connected to C
The active carbon filter core of line second level cotton filter core is connected to the ion exchange resin filter core of active carbon filter core, is connected to ion exchange
Tenth control valve of resin filter element, and the conductivity detection of the output end water quality for detecting the ion exchange resin filter core
Device.
Compared with the prior art, the beneficial effects of the present invention are: should be applied to semiconductor packing process cleaning process
Waste water indirect regeneration, by filtering A line, filtering B line and filtering C line complete the purified treatment to water quality jointly, and with
Cleaning device forms a circulation closed-loop regeneration system, has not only saved water resource, but also greatly reduce industrial production cost.
Detailed description of the invention
Fig. 1 is the structural representation of the waste water indirect regeneration applied to semiconductor packing process cleaning process of the invention
Figure.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawing and specific implementation
Invention is further described in detail for mode.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those skilled in the art's every other implementation obtained without creative efforts
Example, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of
The description present invention and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy
Fixed orientation construction and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be connection, may be a detachable connection, or integral；It can be mechanical connection,
It is also possible to be electrically connected；It can be directly connected, can also can be inside two elements indirectly connected through an intermediary
The interaction relationship of connection or two elements.For the ordinary skill in the art, it can manage as the case may be
Solve the concrete meaning of above-mentioned term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It is interpreted as that identical embodiment or example must be directed to.Moreover, particular features, structures, materials, or characteristics described
It can be combined in any suitable manner in any one or more of the embodiments or examples.In addition, those skilled in the art can
Different embodiments or examples described in this specification to be combined.
Referring to Fig. 1, a kind of waste water circulation applied to semiconductor packing process cleaning process disclosed in the embodiment is again
Raw system comprising be connected to the filtering C line 1 of city's water inlet 100, be connected to the filtering A line 3 of the output end of raw water bucket 5
With filtering B line 2, the filtering A line 3, filtering B line 2 and the output end for filtering C line 1 are connected to pure water bucket 6, and pure water is deposited
The pure water of the output end output of storage tank 6 is delivered to cleaning device 200, and overflow is extremely again for the waste water after cleaned semiconductor package part
It at raw water bucket 5, is recycled after purified system purification again, realizes waste water reclamation.
Specifically, comprising: be connected to the first control valve 4 that city's water enters 100 mouthfuls, the output end of first control valve 4
It is connected to raw water bucket 5, first pump housing 7, the output end point of first pump housing 7 are also connected on the raw water bucket 5
It is not connected with the filtering A line 3 and filtering B line 2 that purified treatment is carried out to raw water, the filtering A line 3 and the output end for filtering B line 2
It is connected to a pure water bucket 6, is also connected with second pump housing 8 on the pure water bucket 6, second pump housing 8 is by pure water
Pure water in bucket 6, which is delivered at the cleaning device 200 of semiconductor packing process cleaning process, carries out semiconductor package part
Cleaning, waste water after cleaning semiconductor package part is again through in overflow to the raw water bucket 5, to complete waste water circular regeneration
It utilizes, wherein the filtering A line 3 and filtering 2 mutual backup of B line filtering, when cleaning or replacing filter core or failure, the two
It is mutually changeable.
Further, the filtering A line 3 includes: the second control valve 39 for being connected to first pump housing, 7 output end, is connected to
The A line quartz sand filter core 31 of the output end of second control valve 39, is connected to the A line level-one of the A line quartz sand filter core 31
Cotton filter core 32 is connected to the A line second level cotton filter core 33 of the A line level-one cotton filter core 32, is connected to the A line second level cotton
The third control valve 34 of matter filter core 33 is connected to the A line primary activity filtration core 35 of the output end of the third control valve 34, even
The A line second order activity filtration core 36 for passing through the A line primary activity filtration core 35, is connected to the A line second order activity filtration core
36 A line ion exchange resin filter core 37, and it is connected to the conductivity detector of the A line ion exchange resin filter core 37
30, the raw water after the A line ion exchange resin filter core 37 is connected to pure water bucket 6 after the 4th control valve 301.Its
In, in the present embodiment, it is also communicated with another ion exchange resin filter core 38 after A line ion exchange resin filter core 37, with enhancing
Its clean-up effect to predetermined substance.
Wherein, the filtering B line 2 includes: the 5th control valve 21 for being connected to the output end of first pump housing 7, is connected to institute
The B line quartz sand filter core 22 for stating the output end of the 5th control valve 21 is connected to the B line level-one cotton of the B line quartz sand filter core 22
Matter filter core 23 is connected to the B line second level cotton filter core 24 of the B line level-one cotton filter core 23, is connected to the B line second level cotton
6th control valve 25 of filter core 24 is connected to the B line primary activity filtration core 26 of the output end of the 6th control valve 25, connection
In the B line second order activity filtration core 27 of the B line primary activity filtration core 26, it is connected to the B line second order activity filtration core 27
B line ion exchange resin filter core 28, and be connected to the conductivity detector 20 of the B line ion exchange resin filter core,
Raw water after the B line ion exchange resin filter core 28 is connected to pure water bucket 6 after the 7th control valve 201.Wherein, exist
In the present embodiment, it is also communicated with another ion exchange resin filter core 29 after B line ion exchange resin filter core 28, to enhance it to spy
The clean-up effect of earnest matter.
Node and B line second level referring to Fig. 1, between the A line second level cotton filter core 33 and third control valve 34
Node between cotton filter core 24 and the 6th control valve 25 is also communicated with one the 8th control valve 01, by third control valve the 33, the 6th
The middle part filtering circuit switching of B line 2 is completed jointly in filtering A line 3 and filtered to control valve 25 and the 8th control valve 01.In short
It, if the filter element damage being located at before third control valve 34 in filtering A line 3, then can pass through the 8th control valve 01
Opening, make its with filtering B line 2 the 6th control valve 25 before filter element carry out cooperation realize filtering A line and filter B
Bridge joint combination purification route between line, other situations are similar.
Wherein, the A line level-one cotton filter core 32 and B line level-one cotton filter core 23 are 20um cotton filter core.
Wherein, the A line second level cotton filter core 33 and B line second level cotton filter core 24 are 2um cotton filter core.
Wherein, a third pump housing 9 is also connected on the raw water bucket 5, the output end of the third pump housing 9 is connected to
Heating tube 91, the raw water after 91 heating disinfection of heating tube flow back into raw water bucket 5.
Wherein, one the 4th pump housing 10, the output end connection of the 4th pump housing 10 are also communicated on the pure water bucket 6
In heating tube 101, the pure water after 101 heating disinfection of heating tube flows back into pure water bucket 6.
In the present embodiment, also a filtering C line 1,1 output end of filtering C line for being connected to city's water inlet are connected to
Pure water bucket 6.Filtering C line is filtering auxiliary system when using for the first time, needs a large amount of DI water to enter for the first time plus when water, increases effect
Rate.
Wherein, the filtering C line 1 includes: the 9th control valve 11 for being connected to city's water inlet 100, is connected to the described 9th
The C line level-one cotton filter core 12 of the output end of control valve 11 is connected to the C line second level cotton of the C line level-one cotton filter core 12
Filter core 13 is connected to the active carbon filter core 14 of C line second level cotton filter core 13, is connected to the ion exchange resin of active carbon filter core 14
Filter core 15 is connected to the tenth control valve 17 of ion exchange resin filter core 15, and for detecting the ion exchange resin filter
The conductivity detector 16 of the output end water quality of core 15.
In addition, it should be noted that: the filtering A line 3, filtering B line 2 and filtering C line 1, in each filter purification filter cores
It is nearby additionally provided with the pressure gauge 02 for detecting its own water pressure, is used to detect the water pressure at relevance filtering purifying part, with
Improve later maintenance efficiency.
Compared with the prior art, the beneficial effect of the present embodiment is: should be applied to semiconductor packing process cleaning process
Waste water indirect regeneration, by filtering A line, filtering B line and filtering C line complete the purified treatment to water quality jointly, and
With cleaning device formed a circulation closed-loop regeneration system, not only saved water resource, and greatly reduce industrial production at
This.
It will be apparent to those skilled in the art that it is various that other can be made according to the above description of the technical scheme and ideas
It is corresponding to change and deformation, and all these change and deformation should belong to the claims in the present invention protection scope it
It is interior.
Claims (10)
1. a kind of waste water indirect regeneration applied to semiconductor packing process cleaning process characterized by comprising connection
In the first control valve of city's water inlet, the output end of first control valve is connected to raw water bucket, the raw water bucket
On be also connected with first pump housing, the output end of first pump housing is connected separately with the filtering A line that purified treatment is carried out to raw water
With filtering B line, the filtering A line and the output end for filtering B line are connected to a pure water bucket, go back on the pure water bucket
It is connected with second pump housing, the pure water in pure water bucket is delivered to semiconductor packing process cleaning process by second pump housing
Semiconductor package part is cleaned at cleaning device, the waste water after cleaning semiconductor package part is again through overflow to the raw water
In bucket, to complete waste water recycling, wherein the filtering A line and filtering B line mutual backup filtering.
2. being applied to the waste water indirect regeneration of semiconductor packing process cleaning process, feature as described in claim 1
It is, the filtering A line includes: the second control valve for being connected to the first pump housing output end, is connected to second control valve
The A line quartz sand filter core of output end is connected to the A line level-one cotton filter core of the A line quartz sand filter core, is connected to the A line
The A line second level cotton filter core of level-one cotton filter core, is connected to the third control valve of the A line second level cotton filter core, is connected to institute
The A line primary activity filtration core for stating the output end of third control valve, is connected to the A line second level of the A line primary activity filtration core
Active carbon filter core, is connected to the A line ion exchange resin filter core of the A line second order activity filtration core, and is connected to the A line
The conductivity detector of ion exchange resin filter core, the raw water after the A line ion exchange resin filter core is through the 4th control
Pure water bucket is connected to after valve.
3. being applied to the waste water indirect regeneration of semiconductor packing process cleaning process as claimed in claim 2, feature exists
In the filtering B line includes: the 5th control valve for being connected to the output end of first pump housing, is connected to the 5th control valve
The B line quartz sand filter core of output end is connected to the B line level-one cotton filter core of the B line quartz sand filter core, is connected to the B line
The B line second level cotton filter core of level-one cotton filter core, is connected to the 6th control valve of the B line second level cotton filter core, is connected to institute
The B line primary activity filtration core for stating the output end of the 6th control valve is connected to the B line second level of the B line primary activity filtration core
Active carbon filter core, is connected to the B line ion exchange resin filter core of the B line second order activity filtration core, and is connected to the B line
The conductivity detector of ion exchange resin filter core, the raw water after the B line ion exchange resin filter core is through the 7th control
Pure water bucket is connected to after valve.
4. being applied to the waste water indirect regeneration of semiconductor packing process cleaning process as claimed in claim 3, feature exists
In between the node and B line second level cotton filter core and the 6th control valve between the A line second level cotton filter core and third control valve
Node be also communicated with one the 8th control valve, by third control valve, the 6th control valve and the 8th control valve complete jointly filtering A
The middle part filtering circuit switching of line and filtering B line.
5. being applied to the waste water indirect regeneration of semiconductor packing process cleaning process as claimed in claim 3, feature exists
In the A line level-one cotton filter core and B line level-one cotton filter core are 20um cotton filter core.
6. the waste water indirect regeneration according to claim 3 applied to semiconductor packing process cleaning process, special
Sign is that the A line second level cotton filter core and B line second level cotton filter core are 2um cotton filter core.
7. the waste water indirect regeneration according to claim 1 applied to semiconductor packing process cleaning process, special
Sign is, a third pump housing is also connected on the raw water bucket, and the output end of the third pump housing is connected to heating tube, warp
Raw water after the heating tube heating disinfection flows back into raw water bucket.
8. the waste water indirect regeneration according to claim 1 applied to semiconductor packing process cleaning process, special
Sign is, one the 4th pump housing is also communicated on the pure water bucket, and the output end of the 4th pump housing is connected to heating tube, warp
Pure water after the heating tube heating disinfection flows back into pure water bucket.
9. being recycled again to the waste water for being applied to semiconductor packing process cleaning process described in 8 any one according to claim 1
Raw system, which is characterized in that also a filtering C line, the filtering C line output terminal for being connected to city's water inlet are connected to pure water and deposit
Storage tank.
10. being applied to the waste water indirect regeneration of semiconductor packing process cleaning process, feature as claimed in claim 9
It is, the filtering C line includes: the 9th control valve for being connected to city's water inlet, is connected to the output end of the 9th control valve
C line level-one cotton filter core, be connected to the C line second level cotton filter core of the C line level-one cotton filter core, be connected to C line second level cotton
The active carbon filter core of matter filter core is connected to the ion exchange resin filter core of active carbon filter core, is connected to ion exchange resin filter core
The tenth control valve, and the conductivity detector of the output end water quality for detecting the ion exchange resin filter core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910745777.3A CN110342689A (en) | 2019-08-13 | 2019-08-13 | A kind of waste water indirect regeneration applied to semiconductor packing process cleaning process |
Applications Claiming Priority (1)
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Effective date of registration: 20221209 Address after: 523770 Room 101, No. 6, jinjinhu industrial 1st Road, songmushan, Dalang Town, Dongguan City, Guangdong Province Applicant after: Guangdong jinshilan Cleaning Technology Co.,Ltd. Address before: 523000 1st floor, building a, No.16, huangjinhu Industrial Zone, songmushan village, Dalang Town, Dongguan City, Guangdong Province Applicant before: Guangdong keldi Cleaning Technology Co.,Ltd. |
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Application publication date: 20191018 |