CN110335830A - A kind of semiconductors manufacture bonding equipment protective device - Google Patents
A kind of semiconductors manufacture bonding equipment protective device Download PDFInfo
- Publication number
- CN110335830A CN110335830A CN201910579775.1A CN201910579775A CN110335830A CN 110335830 A CN110335830 A CN 110335830A CN 201910579775 A CN201910579775 A CN 201910579775A CN 110335830 A CN110335830 A CN 110335830A
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- CN
- China
- Prior art keywords
- bonding equipment
- pulling
- pulling eye
- limit
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/789—Means for monitoring the connection process
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Connection Of Plates (AREA)
- Wire Bonding (AREA)
Abstract
The invention discloses a kind of semiconductors manufacture bonding equipment protective devices, including pedestal and the screw drive mechanism for being mounted on central rack, adjustment seat is installed on screw drive mechanism, the bottom edge of pedestal is slidably fitted with elastic supporting seat simultaneously, is connected by link mechanism between adjustment seat and four elastic supporting seats；Pedestal includes four limit battens that central plate and integrally connected are fixed on central plate side, integrally connected is fixed with first rotating shaft at the centre of surface of central plate, the surface middle part integrally connected of central plate is fixed with the second shaft simultaneously, and the surface middle part for limiting batten is provided with bar limit slot.The present invention enables four elastic supporting seats to gather to middle part by setting four cooperations between elastic supporting seat and adjustment seat, and then realizes and be fixedly clamped to bonding equipment, and preventing bonding equipment, movement causes welding position inaccurate in use.
Description
Technical field
The invention belongs to field of semiconductor manufacture, are related to a kind of semiconductors manufacture bonding equipment protective device.
Background technique
Bonding equipment welds for realizing the surface of different medium, the head end of spun gold is formed spherical shape by processing, and right
The metal surface of welding first carries out the pre-heat treatment, and then gold wire ball welds table in metal under the collective effect of time and pressure
Face generates plastic deformation, so that two media is reached reliable contact, and vibrate by ultrasonic friction, between two kinds of metallic atoms
Metallic bond is formed under the action of atom affinity, realizes the welding of spun gold lead, therefore bonding equipment needs in use
It is fixed, if there is vibration, that it will cause welding positions is inaccurate, while when bonding equipment is collided, the vibration of bonding equipment
It is be easy to cause the shaking of inner components, and then influences the service life of bonding equipment.
Summary of the invention
The purpose of the present invention is to provide a kind of semiconductors manufacture bonding equipment protective devices, pass through four elasticity branch of setting
The cooperation between seat and adjustment seat is supportted, four elastic supporting seats are gathered to middle part, and then realizes the folder to bonding equipment
It fastens, preventing bonding equipment, movement causes welding position inaccurate in use.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of semiconductors manufacture bonding equipment protective device, including pedestal and the screw drive machine for being mounted on central rack
Structure, is equipped with adjustment seat on screw drive mechanism, while the bottom edge of pedestal is slidably fitted with elastic supporting seat, adjustment seat and four
It is connected by link mechanism between elastic supporting seat；
Pedestal includes four limit battens that central plate and integrally connected are fixed on central plate side, in the surface of central plate
Integrally connected is fixed with first rotating shaft at the heart, while the surface middle part integrally connected of central plate is fixed with the second shaft, positive stop strip
The surface middle part of plate is provided with bar limit slot；
Screw drive mechanism includes the driving wheel being mounted in the second shaft and the driven wheel that is mounted in first rotating shaft, from
Driving wheel and driving wheel engagement, the end face of driven wheel is equipped with screw rod, while driving wheel is connected with the power output end of decelerating motor
It connects, adjustment seat is mounted on screw rod.
Adjustment seat includes four pulling blocks that adjusting ring and integrally connected are fixed on adjusting ring side, and four pulling blocks angularly divide
Cloth is in the side of adjusting ring, and pulling block and adjusting ring are perpendicular, and the side wall inner surfaces of adjusting ring are provided with to be cooperated with screw flight
Internal screw thread, while the side wall of pulling block has the first pulling eye and the second pulling eye up and down；Link mechanism includes being mounted on first
The first fixing axle and the second fixing axle in pulling eye and the second pulling eye, the both ends of the first fixing axle are arranged fixation, and there are two the first drawings
Bar, while the both ends of the second fixing axle are arranged the second pull rod there are two fixations.
Further, elastic supporting seat includes support plate, and the surface side of support plate is vertically fixedly connected with baffle, and
The plane perpendicular of support plate is fixed there are two the limit articulated slab being oppositely arranged, and two hinged limit plates are connected to bar limit slot
In, while the bottom surface of limit plate connects with the bottom surface of bar limit slot；The side wall of two hinged limit plates is respectively provided with up and down
Third pulling eye and the 4th pulling eye, are equipped with third fixing axle between the third pulling eye of two hinged limit plates, between the 4th pulling eye
4th fixing axle is installed, two the first pull rods are hinged in third fixing axle, while two the second pull rods are hinged on the 4th and consolidate
On dead axle, the surface side of support plate is opened there are two limit hole, and the other side is provided with an arc slide opening, is equipped with branch in limit hole
Item seat, bonding equipment are placed on lattice framing seat.
Further, the distance between the first pulling eye and the second pulling eye center of circle are between third pulling eye and the 4th pulling eye center of circle
Distance it is identical.
Further, lattice framing seat includes the slide post that branch batten and integrally connected are fixed on branch batten one end bottom surface, sliding
Column is matched with limit hole, and the bottom surface integral middle of branch batten is fixedly connected with bumping post, and bumping post sliding plug is sliding in arc
Kong Zhong, while pressure spring is arranged on bumping post, the bottom end of pressure spring connects with the surface of support plate, the bottom surface phase on top and branch batten
It connects.
Further, the bottom face of bumping post is equipped with retaining ring.
Beneficial effects of the present invention:
1, the present invention is by four cooperations between elastic supporting seat and adjustment seat of setting, enables four elastic supporting seats
It is enough to gather to middle part, and then realize and be fixedly clamped to bonding equipment, preventing bonding equipment, movement causes welding position in use
It sets inaccurate.
2, the present invention is provided with eight pressure springs in elastic support seat, and bumper and absorbing shock can be played when bonding equipment is mobile and is made
With, and in use two branch battens can be realized by pulling branch batten to slide bumping post in arc slide opening
Different directions is stretched to, uniformly dividing for branch batten butt welding line machine support force is realized in the angular separation by adjusting two branch battens
It dissipates.
Detailed description of the invention
In order to facilitate the understanding of those skilled in the art, the present invention will be further described below with reference to the drawings.
Fig. 1 is bonding equipment protective device structure schematic diagram of the present invention；
Fig. 2 is the Structure explosion diagram of Fig. 1；
Fig. 3 is the structural schematic diagram of pedestal；
Fig. 4 is elastic supporting seat structural schematic diagram；
Fig. 5 is elastic supporting seat structural schematic diagram；
Fig. 6 is elastic supporting seat structural schematic diagram；
Fig. 7 is the Structure explosion diagram of Fig. 4.
Specific embodiment
A kind of semiconductors manufacture bonding equipment protective device as depicted in figs. 1 and 2, including pedestal 1 and is mounted on rack 1
The screw drive mechanism 2 at middle part is equipped with adjustment seat 3 on screw drive mechanism 2, while the bottom edge of pedestal 1 is slidably fitted with bullet
Property support base 4, be connected by link mechanism 5 between adjustment seat 3 and four elastic supporting seats 4；
As shown in figure 3, pedestal 1 includes four limit battens that central plate 11 and integrally connected are fixed on 11 side of central plate
12, integrally connected is fixed with first rotating shaft 13 at the centre of surface of central plate 11, while the surface middle part of central plate 11 integrally connects
It connects and is fixed with the second shaft 14, the surface middle part of limit batten 12 is provided with bar limit slot 15；
Screw drive mechanism 2 include the driving wheel 21 that is mounted in the second shaft 14 and be mounted in first rotating shaft 13 from
Driving wheel 22, driven wheel 22 and driving wheel 21 engage, and the end face of driven wheel 22 is equipped with screw rod 23, while driving wheel 21 and the electricity that slows down
The power output end of machine is connected, and is rotated by decelerating motor and driving wheel 21 is driven to rotate around the second shaft 14, driving wheel 21
Driven wheel 22 is driven to rotate in rotation process, the rotation of driven wheel 22 drives screw rod 23 to rotate, and adjustment seat 3 is mounted on screw rod 23；
Adjustment seat 3 includes four pulling blocks 32 that adjusting ring 31 and integrally connected are fixed on 31 side of adjusting ring, four pulling blocks
32 are angularly distributed in the side of adjusting ring 31, and pulling block 32 and adjusting ring 31 are perpendicular, the side wall inner surfaces of adjusting ring 31
It is provided with the internal screw thread being threadedly engaged with screw rod 23, while the side wall of pulling block 32 has the first pulling eye 33 and the second pulling eye up and down
34；
Link mechanism 5 includes being mounted on the first pulling eye 33 and the first fixing axle and the second fixing axle in the second pulling eye 34,
The both ends of first fixing axle are arranged fixed there are two the first pull rod 51, while the both ends of the second fixing axle are arranged that fixed there are two the
Two pull rods 52；
As shown in figs. 4-7, elastic supporting seat 4 includes support plate 41, and the surface side of support plate 41 is vertically fixedly connected with
Baffle 42, and there are two the limit articulated slab 43 being oppositely arranged, two hinged limit plates for the plane perpendicular fixation of support plate 41
43 are connected in bar limit slot 15, while the bottom surface of limit plate 43 connects with the bottom surface of bar limit slot 15；Two hinges
The side wall for connecing limit plate 43 is respectively provided with third pulling eye 431 and the 4th pulling eye 432,34 center of circle of the first pulling eye 33 and the second pulling eye up and down
The distance between the distance between 432 center of circle of third pulling eye 431 and the 4th pulling eye it is identical；The third of two hinged limit plates 43
Third fixing axle is installed between pulling eye 431, the 4th fixing axle, two the first pull rod 51 hinges are installed between the 4th pulling eye 432
It connects in third fixing axle, while two the second pull rods 52 are hinged in the 4th fixing axle；The surface side of support plate 41 is provided with
Two limit holes 411, the other side are provided with an arc slide opening 412, and lattice framing seat 44 is equipped in limit hole 411, and bonding equipment is placed
On lattice framing seat 44, lattice framing seat 44 includes the slide post that branch batten 441 and integrally connected are fixed on 441 one end bottom surface of branch batten
442, slide post 442 is matched with limit hole 411, and the bottom surface integral middle of branch batten 441 is fixedly connected with bumping post 443,
The bottom face of bumping post 443 is equipped with retaining ring 444, and 443 sliding plug of bumping post is arranged in arc slide opening 412, while on bumping post 443
There is pressure spring 45, the bottom end of pressure spring 45 connects with the surface of support plate 41, and top connects with the bottom surface of branch batten 441, is using
It can realize that two branch battens 441 stretch to by pulling branch batten 441 to slide bumping post 443 in arc slide opening 412 in journey
Uniformly the dividing to bonding equipment support force of branch batten 441 is realized in different directions, the angular separation by adjusting two branch battens 441
It dissipates；
The specifically used method of the bonding equipment protective device is as follows:
S1: four side bottom surface of bonding equipment is individually positioned on the lattice framing seat 44 on elastic supporting seat 4, so that the bottom of bonding equipment
Face connects with 441 surface of branch batten in lattice framing seat 44, is pressed downward lattice framing plate 441 since the gravity of bonding equipment is bigger, lattice framing
Plate 441 applies pressure to pressure spring 45, so that pressure spring 45 compresses, realizes the cushioning supportive to bonding equipment by eight pressure springs 45；
S2: it after bonding equipment is placed, is rotated by decelerating motor and driving wheel 21 is driven to rotate around the second shaft 14, actively
Taking turns in 21 rotation processes drives driven wheel 22 to rotate, and the rotation of driven wheel 22 drives screw rod 23 to rotate, and leads in 23 rotation process of screw rod
Crossing threaded function drives adjusting ring 31 to rotate, due to the pulling of the first pull rod 51 and the second pull rod 52 on four link mechanisms 5
Position-limiting action, when adjusting ring 31 moves up, drives the first pull rod so that adjusting ring 31 can only be moved up and down along screw rod 23
51 and second pull rod 52 tilt upward movement, drive elastic supporting seat 4 to move up by the first pull rod 51 and the second pull rod 52,
It since the gravity of bonding equipment prevents elastic supporting seat 4 from moving up, only moves forward, and then realizes four elasticity
Support base 4 is mobile to the center of pedestal 1 simultaneously, and then realizes the baffle 42 in elastic supporting seat 4 to the compression of bonding wire pusher side wall
It is fixed, it prevents from sliding in the bonding equipment course of work.
Present invention disclosed above preferred embodiment is only intended to help to illustrate the present invention.There is no detailed for preferred embodiment
All details are described, are not limited the invention to the specific embodiments described.Obviously, according to the content of this specification,
It can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to better explain the present invention
Principle and practical application, so that skilled artisan be enable to better understand and utilize the present invention.The present invention is only
It is limited by claims and its full scope and equivalent.
Claims (6)
1. a kind of semiconductors manufacture bonding equipment protective device, which is characterized in that including pedestal (1) and be mounted in rack (1)
The screw drive mechanism (2) in portion is equipped with adjustment seat (3) on screw drive mechanism (2), while peace is slided on the bottom edge of pedestal (1)
Equipped with elastic supporting seat (4), it is connected by link mechanism (5) between adjustment seat (3) and four elastic supporting seats (4)；
Pedestal (1) includes four limit battens (12) that central plate (11) and integrally connected are fixed on central plate (11) side, in
Integrally connected is fixed with first rotating shaft (13) at the centre of surface of core (11), while the surface middle part of central plate (11) integrally connects
It connects and is fixed with the second shaft (14), the surface middle part of limit batten (12) is provided with bar limit slot (15)；
Screw drive mechanism (2) includes the driving wheel (21) being mounted on the second shaft (14) and is mounted on first rotating shaft (13)
Driven wheel (22), driven wheel (22) and driving wheel (21) engagement, the end face of driven wheel (22) is equipped with screw rod (23), main simultaneously
Driving wheel (21) is connected with the power output end of decelerating motor, and adjustment seat (3) is mounted on screw rod (23).
2. a kind of semiconductors manufacture bonding equipment protective device according to claim 1, which is characterized in that adjustment seat (3)
Four pulling blocks (32) of adjusting ring (31) side are fixed on including adjusting ring (31) and integrally connected, four pulling blocks (32) are angularly
It is distributed in the side of adjusting ring (31), and pulling block (32) and adjusting ring (31) are perpendicular, the side wall inner surfaces of adjusting ring (31)
It is provided with the internal screw thread being threadedly engaged with screw rod (23), while the side wall of pulling block (32) has the first pulling eye (33) and the up and down
Two pulling eyes (34)；Link mechanism (5) includes being mounted on the first pulling eye (33) and the first fixing axle in the second pulling eye (34) and the
Two fixing axles, the both ends of the first fixing axle are arranged fixation, and there are two the first pull rod (51), while the both ends of the second fixing axle are arranged
It is fixed that there are two the second pull rod (52).
3. a kind of semiconductors manufacture bonding equipment protective device according to claim 1, which is characterized in that elastic supporting seat
It (4) include support plate (41), the surface side of support plate (41) is vertically fixedly connected with baffle (42), and support plate (41)
Plane perpendicular is fixed there are two the limit articulated slab (43) being oppositely arranged, and two hinged limit plates (43) are connected to bar limit slot
(15) in, while the bottom surface of limit plate (43) connects with the bottom surface of bar limit slot (15)；Two hinged limit plates (43)
Side wall be respectively provided with third pulling eye (431) and the 4th pulling eye (432), the third pulling eye of two hinged limit plates (43) up and down
(431) third fixing axle is installed between, the 4th fixing axle, two the first pull rods (51) are installed between the 4th pulling eye (432)
It is hinged in third fixing axle, while two the second pull rods (52) are hinged in the 4th fixing axle, the surface one of support plate (41)
Side is opened there are two limit hole (411), and the other side is provided with an arc slide opening (412), and limit hole is equipped with lattice framing seat in (411)
(44), bonding equipment is placed on lattice framing seat (44).
4. a kind of semiconductors manufacture bonding equipment protective device according to claim 1, which is characterized in that the first pulling eye
(33) and the distance between the second pulling eye (34) center of circle and the distance between third pulling eye (431) and the 4th pulling eye (432) center of circle
It is identical.
5. a kind of semiconductors manufacture bonding equipment protective device according to claim 4, which is characterized in that lattice framing seat (44)
Be fixed on the slide post (442) of branch batten (441) one end bottom surface including branch batten (441) and integrally connected, slide post (442) with
Limit hole (411) matches, and the bottom surface integral middle of branch batten (441) is fixedly connected with bumping post (443), bumping post (443)
Sliding plug is arranged with pressure spring (45) in arc slide opening (412) on bumping post (443), the bottom end of pressure spring (45) and support
The surface of plate (41) connects, and top connects with the bottom surface of branch batten (441).
6. a kind of semiconductors manufacture bonding equipment protective device according to claim 5, which is characterized in that bumping post (443)
Bottom face retaining ring (444) are installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910579775.1A CN110335830B (en) | 2019-06-28 | 2019-06-28 | Wire bonding machine protector for semiconductor manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910579775.1A CN110335830B (en) | 2019-06-28 | 2019-06-28 | Wire bonding machine protector for semiconductor manufacturing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110335830A true CN110335830A (en) | 2019-10-15 |
| CN110335830B CN110335830B (en) | 2021-01-29 |
Family
ID=68144584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910579775.1A Expired - Fee Related CN110335830B (en) | 2019-06-28 | 2019-06-28 | Wire bonding machine protector for semiconductor manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110335830B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111007237A (en) * | 2019-12-26 | 2020-04-14 | 安徽九陆生物科技有限公司 | Full-automatic microelement analyzer removes bears device |
| CN116443550A (en) * | 2023-01-10 | 2023-07-18 | 芜湖毅昌科技有限公司 | Rotary platform and application thereof in surface treatment of automobile lightweight products |
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| US6112783A (en) * | 1998-12-09 | 2000-09-05 | Newman; Roger R. | Router guide and clamping apparatus |
| CN108044030A (en) * | 2017-12-23 | 2018-05-18 | 安徽鑫宏机械有限公司 | A kind of automatic wax injector of four stations |
| CN207826172U (en) * | 2018-01-31 | 2018-09-07 | 安徽文达信息工程学院 | A kind of automobile storage battery adjusting protective device |
| CN108907683A (en) * | 2018-08-07 | 2018-11-30 | 淮安信息职业技术学院 | A kind of linkage type screw assembly machine device people |
| CN109399968A (en) * | 2018-12-21 | 2019-03-01 | 浙江晶鲸科技有限公司 | Build dimming glass edge seal system |
-
2019
- 2019-06-28 CN CN201910579775.1A patent/CN110335830B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6112783A (en) * | 1998-12-09 | 2000-09-05 | Newman; Roger R. | Router guide and clamping apparatus |
| CN108044030A (en) * | 2017-12-23 | 2018-05-18 | 安徽鑫宏机械有限公司 | A kind of automatic wax injector of four stations |
| CN207826172U (en) * | 2018-01-31 | 2018-09-07 | 安徽文达信息工程学院 | A kind of automobile storage battery adjusting protective device |
| CN108907683A (en) * | 2018-08-07 | 2018-11-30 | 淮安信息职业技术学院 | A kind of linkage type screw assembly machine device people |
| CN109399968A (en) * | 2018-12-21 | 2019-03-01 | 浙江晶鲸科技有限公司 | Build dimming glass edge seal system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111007237A (en) * | 2019-12-26 | 2020-04-14 | 安徽九陆生物科技有限公司 | Full-automatic microelement analyzer removes bears device |
| CN111007237B (en) * | 2019-12-26 | 2021-09-28 | 安徽九陆生物科技有限公司 | Full-automatic microelement analyzer removes bears device |
| CN116443550A (en) * | 2023-01-10 | 2023-07-18 | 芜湖毅昌科技有限公司 | Rotary platform and application thereof in surface treatment of automobile lightweight products |
| CN116443550B (en) * | 2023-01-10 | 2024-07-05 | 芜湖毅昌科技有限公司 | Rotary platform and application thereof in surface treatment of automobile lightweight products |
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| Publication number | Publication date |
|---|---|
| CN110335830B (en) | 2021-01-29 |
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