CN110333190A - A kind of diffusion type optoacoustic microcavity gas sensor - Google Patents
A kind of diffusion type optoacoustic microcavity gas sensor Download PDFInfo
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 19
- 238000012360 testing method Methods 0.000 claims abstract description 14
- 238000005259 measurement Methods 0.000 claims abstract description 12
- 238000012545 processing Methods 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 3
- 230000004044 response Effects 0.000 abstract description 27
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 238000012544 monitoring process Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 4
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 239000011148 porous material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 69
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 26
- 238000001514 detection method Methods 0.000 description 16
- 238000004867 photoacoustic spectroscopy Methods 0.000 description 9
- 238000004088 simulation Methods 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000005457 optimization Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003345 natural gas Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 241000209140 Triticum Species 0.000 description 1
- 235000021307 Triticum Nutrition 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
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Abstract
The present invention provides a kind of diffusion type optoacoustic microcavity gas sensors.The sensor includes light source, optoacoustic microcavity, aperture, microphone, circuit board and display screen.Gas is diffused into optoacoustic microcavity through aperture, the influence to photo-acoustic responses of stomata is equivalent to one " high-pass filter ", stomata is bigger, the cutoff frequency of " high-pass filter " is higher, increases the response speed that pore opening improves sensor as far as possible under the premise of guaranteeing that stomata does not reduce photo-acoustic responses.The amplitude of photoacoustic signal is directly proportional to gas concentration, and the concentration of under test gas can be finally inversed by after the size using microphone measurement photoacoustic signal.Gas sensor of the invention have structure simple, high sensitivity, small in size, at low cost, fast response time and it is low in energy consumption many advantages, such as, provide a kind of technical solution of great competitiveness for highly sensitive gas leakage monitoring.
Description
Technical field
The invention belongs to gas detections and optoacoustic spectroscopy field, are related to a kind of diffusion type optoacoustic microcavity gas sensing
Device.
Background technique
Gas leakage monitoring is for ensureing that it is important that natural gas station, gas pipeline and the safe and reliable operation in chemical plant have played
Effect, it helps safe handling of the resident to natural gas, this is because inflammable and explosive or toxic gas leakage may cause
Serious accident, and the early warning of accident can be provided to the real-time monitoring of micro-leakage gas.
Traditional diffusion type gas detection method mainly includes electrochemical sensing method, semiconductor sensing method and tunable two pole
Pipe laser absorption spectrum (TDLAS) method.In recent years, electrochemical gas sensor and semiconductor gas sensor with its low cost and
Small size advantage is widely applied.However, electrochemical sensor has short working life, and they all have gas
The shortcomings that poor selectivity.In addition, if semiconductor transducer does not contact probe gas for a long time, it can be due to gas sensitive aoxidizes
Into sleep state.Measuring method based on TDLAS has the advantages that long service life and selectivity are good.However, for
TDLAS system, increasing gas detection sensitivity and reducing chamber volume is usually to be difficult to take into account, this is because gas detection
Sensitivity is usually proportional to the length in path is absorbed.Therefore, it is necessary to big gas absorption cell or complexity multi-way absorption cell with
Improve detection sensitivity.
Due to having the characteristic without background absorption, photocaustic spectroscopy is one of most sensitive trace gas detection method.One
A particular advantage is that gas detection sensitivity is usually inversely proportional with the volume of photoacoustic cell, therefore can effectively reduce absorption cell
Volume.Document Peltola J, Vainio M, Hieta T, et al.High sensitivity trace gas
detection by cantilever-enhanced photoacoustic spectroscopy using a mid-
infrared continuous-wave optical parametric oscillator.Optics express,2013,21
(8): 10240-10250 infrared cw frequency adjustable optical parametric oscillator in illustrates a kind of based on cantilever increasing
The CH_4 detection system of strong type optoacoustic spectroscopy, the minimum detection limit reach 65ppt, however in this off-resonance photo acoustic spectrometry system
In need to open air valve and air pump samples gas, then must shut off air valve and air pump in measurement process.Therefore, traditional
Off-resonance photo acoustic spectrometry system can not to the gas leakage of diffusion carry out real-time monitoring.In order to realize flow measurement, document
Wang J,Wang H,Liu X.A portable laser photoacoustic methane sensor based on
FPGA.Sensors, 2016,16 (9): 1551 and Mao X, Zheng P, Wang X, et al.Breath methane
detection based on all-optical photoacoustic spectrometer.Sensors and
Actuators B:Chemical, 2017,239:1257-1260 successively use the resonant photoacoustic cell with surge chamber, in conjunction with
Near-infrared laser devises trace methane gas detecting system, and the minimum detection limit respectively reaches 10ppm and 64ppb.However, passing
The volume of the resonant photoacoustic cell of system is typically larger than 200mL, and samples there is still a need for air pump to gas in system.Therefore existing
Some optoacoustic spectroscopies, which are difficult at the scene detect micro diffusion gas, carries out application.Thus, it designs a kind of for leaking gas
The high-sensitivity miniature optoacoustic gas sensor of body monitoring has important application value.
Summary of the invention
It is an object of the invention to propose a kind of diffusion type optoacoustic microcavity gas sensor, it is intended to solve current optoacoustic spectroscopy
Gas detecting system volume is larger and the problem of needs using air valve and air pump, is that optoacoustic spectroscopy is led in trace gas detection
The bigger space of application extension in domain.
Technical solution of the present invention:
A kind of diffusion type optoacoustic microcavity gas sensor, including light source 1, optoacoustic microcavity 2, aperture 3, microphone 4, circuit board
5 and display screen 6；Aperture 3 is provided on 2 side wall of optoacoustic microcavity, under test gas diffuses into optoacoustic microcavity 2 through small holes 3；
Circuit board 5 drives light source 1, and the optoacoustic excitation light of transmitting is incident in optoacoustic microcavity 2；Microphone 4 detects to be generated in optoacoustic microcavity 2
Photoacoustic pressure wave, circuit board 5 calculates the concentration of under test gas after measuring the amplitude of photoacoustic signal；Display screen 6 and circuit board 5
It is connected, for showing gas concentration value.
The light source 1 is LED or tunable wave length narrow-linewidth laser light source.
The quantity of the aperture 3 is more than or equal to 1.
The microphone 4 is electret microphone or MEMS microphone.
The circuit board 5 mainly has the function of light source driving and Signal acquiring and processing.
The principle of the present invention is as follows: gas is diffused into optoacoustic microcavity through aperture, the transmitting of under test gas Absorption modulation light source
Luminous energy after through radiationless transition generate thermal energy expand with heat and contract with cold with making the micro- intracavity gas generating period of optoacoustic, the optoacoustic pressure of generation
Reeb indicates are as follows:
Wherein, ω is modulation angular frequency, ωjIt is jth rank resonant angular frequency, QjIt is PA cell in ωjUnder quality factor, α
It is the absorption coefficient of under test gas, C is the concentration of under test gas, and γ is the heat capacity ratio of gas, P0It is the power of light source, l is light
The length of the operatic tunes, V are the volume of PA cell, τ1It is hot damping time, τ2It is damping effect caused by air-flow and hot-fluid through aperture
Time constant.τ1And τ2It may be expressed as:
Wherein, r is the radius of the cylindrical light operatic tunes, DTIt is gas thermal diffusivity, AgIt is the area of aperture, υ is in PA cell
The velocity of sound.According to formula (1), (2), (3), (4) and (5), the amplitude of photoacoustic signal is directly proportional to gas concentration, therefore, using wheat
The concentration of under test gas can be finally inversed by after the size of gram wind measurement photoacoustic signal.
According to formula (1), (2) and (4), the amplitude of photoacoustic signal can be improved by the radius of optimization PA cell.In addition, root
According to formula (3) and (5), influence of the aperture to photo-acoustic responses is equivalent to one " high-pass filter ", and aperture is bigger, " high-pass filter "
Cutoff frequency it is higher.According to formula (1), (2), (3), (4) and (5), when the interior diameter and length of optoacoustic microcavity be respectively 1mm and
When 5mm, calculating is responded without aperture with the photoacoustic frequency for having different radii aperture situation lower sensor, as shown in Figure 2.In optoacoustic
After opening aperture on microcavity, when frequency is lower than 400Hz, photo-acoustic responses have apparent decaying.In addition, aperture radius is bigger, to biography
The influence of the low frequency photo-acoustic responses of sensor is more obvious.According to fig. 2, when working frequency selection near 600Hz when, radius be less than or
Influence of the person equal to the aperture of 0.1mm for photo-acoustic responses is smaller.
Aperture radius should be increased as far as possible under the premise of guaranteeing that aperture does not reduce photo-acoustic responses to improve optoacoustic microcavity gas
The response speed of sensor.Fig. 3 is the time response of the sensor for the different aperture radius simulated using hydrodynamics software, when
When aperture radius is greater than 0.1mm, the response time is less than 10s, can meet the requirement of most of gas leak scene.Therefore, for
Interior diameter and length are respectively the optoacoustic microcavity of 1mm and 5mm, and it is preferably to select that hole diameter, which is selected as 0.1mm,.
Beneficial effects of the present invention: the aperture by increasing optimization design on optoacoustic microcavity diffuses under test gas
Enter volume be only microlitre magnitude optoacoustic microcavity in, solve traditional photoacoustic spectroscopy gas detecting system volume it is larger and need make
The problem of with air valve and air pump.In addition, by the radius of optimization optoacoustic microcavity, it can be achieved that the high sensitivity under test gas is visited
It surveys.This simple sensor of structure has high sensitivity, small in size, at low cost, fast response time and low in energy consumption etc. many excellent
Point.The present invention provides a kind of technical solution of great competitiveness for highly sensitive gas leakage monitoring.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of inventive sensor.
Fig. 2 is responding without aperture with the photoacoustic frequency for having different radii aperture situation lower sensor for calculating.
Fig. 3 is the time response of the sensor of the different aperture radius of simulation.
The frequency response of the optoacoustic microcavity gas sensor of Fig. 4 measurement.
Fig. 5 is the second harmonic photoacoustic signal of the leakage methane gas of measurement.
Fig. 6 is the second harmonic photoacoustic signal peak value of measurement and the relationship of concentration of methane gas.
Fig. 7 is the photoacoustic signal amplitude of the simulated leakage methane gas continuously measured.
Fig. 8 is the ambient noise that inventive sensor measures in air.
In figure: 1 light source；2 optoacoustic microcavitys；3 apertures；4 microphones；5 circuit boards；6 display screens；
7 calculate without aperture when photoacoustic frequency response；
Photoacoustic frequency response when 8 aperture radius calculated are 0.05mm；
Photoacoustic frequency response when 9 aperture radius calculated are 0.1mm；
Photoacoustic frequency response when 10 aperture radius calculated are 0.2mm；
The time response when aperture radius of 11 simulations is 0.02mm；
The time response that the aperture radius of 12 simulations is 0.05mm；
The time response that the aperture radius of 13 simulations is 0.1mm；
The time response that the aperture radius of 14 simulations is 0.2mm.
Specific embodiment
A specific embodiment of the invention is described in detail below in conjunction with technical solution and attached drawing.
A kind of diffusion type optoacoustic microcavity gas sensor, including light source 1, optoacoustic microcavity 2, aperture 3, microphone 4, circuit board
5 and display screen 6；Under test gas diffuses into optoacoustic microcavity 2 through small holes 3；Circuit board 5 generates modulated signal and drives light source
1, the optoacoustic excitation light of transmitting is incident in optoacoustic microcavity 2；Under test gas in optoacoustic microcavity 2 absorbs luminous energy and transits to high energy
Grade, then release heat makes air generation periodically expand with heat and contract with cold during radiationless transition is to ground state, and then generates
Photoacoustic pressure wave；Microphone 4 detects the photoacoustic pressure wave in optoacoustic microcavity 2, and the locking phase amplification module in circuit board 5 measures optoacoustic
The concentration of under test gas is calculated after the amplitude of signal；Finally, circuit board 5 is by controlling display screen 6 for the gas concentration of measurement
Value is shown.
Wherein, light source 1 is narrow linewidth distributed feed-back (DFB) laser of the tunable wave length of TO encapsulation, and central wavelength is
1650.96nm.The interior diameter of optoacoustic microcavity 2 is 1mm, length 5mm.Aperture 3 is located at the centre of optoacoustic microcavity 2, and radius is
0.1mm.Microphone 4 is MEMS microphone.
Circuit board 5 has the function of laser light source driving and Signal acquiring and processing.Wherein, laser light source drive part is used
In generating the length scanning and modulation of sawtooth wave and sine wave realization to laser light source, the frequency of sawtooth wave is 1Hz, sine wave
Frequency is 300Hz；Signal acquiring and processing part is used to acquire the photoacoustic signal of the detection of microphone 4, and put based on locking phase
Big Digital Signal Processing further calculates gas concentration to extract second harmonic photoacoustic signal.
The amplitude-frequency response of the optoacoustic microcavity gas sensor of Fig. 4 measurement.Because gas caused by aperture and heat leakage cause
Amplitude-frequency response exists in low frequency significantly decays.
Fig. 5 is the second harmonic photoacoustic signal of the leakage methane gas of measurement.Optoacoustic probe 3 is placed in simulation gas chamber,
Methane/nitrogen mixed gas of 50000ppm is passed through in simulation gas chamber, it is secondary to extract wavelength modulation using phase lock amplifying technology
Harmonic wave photoacoustic signal.
Fig. 6 is the second harmonic photoacoustic signal peak value of measurement and the relationship of concentration of methane gas.Have between the two preferable
Linear relationship, obtaining responsiveness by linear fit is 0.02 μ V/ppm, it can be achieved that high sensitivity to micro-leakage gas
Detection.
Fig. 7 is the photoacoustic signal amplitude of the simulated leakage methane gas continuously measured.Optoacoustic probe 3 is placed in simulation gas chamber
In, the methane/nitrogen mixed gas for being successively continuously passed through 0ppm and 50000ppm in gas chamber is simulated, inventive sensor is measured
The 10%-90% response time and recovery time be respectively 4.6s and 4.8s.
Fig. 8 is the ambient noise that inventive sensor measures in air.One times of standard deviation of ambient noise is 0.31 μ V,
0.02 μ V/ppm is spent according to response, and the minimum detection limit for calculating system is 16ppm.
The above description is only a preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.All within the spirits and principles of the present invention, it is made it is any modification,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of diffusion type optoacoustic microcavity gas sensor, which is characterized in that the diffusion type optoacoustic microcavity gas sensor
Including light source (1), optoacoustic microcavity (2), aperture (3), microphone (4), circuit board (6) and display screen (6)；In optoacoustic microcavity (2)
It is provided on side wall aperture (3), under test gas diffuses into optoacoustic microcavity (2) through small holes (3)；Circuit board (6) drives light
Source (1), the optoacoustic excitation light of transmitting are incident in optoacoustic microcavity (2)；Microphone (4) detects the light generated in optoacoustic microcavity (2)
Acoustic pressure wave calculates the concentration of under test gas after the amplitude of circuit board (6) measurement photoacoustic signal；Display screen (6) and circuit board
(6) it is connected, for showing gas concentration value.
2. diffusion type optoacoustic microcavity gas sensor according to claim 1, which is characterized in that the light source (1) is
LED or tunable wave length narrow-linewidth laser light source.
3. diffusion type optoacoustic microcavity gas sensor according to claim 1 or 2, which is characterized in that the aperture (3)
Quantity be more than or equal to 1.
4. diffusion type optoacoustic microcavity gas sensor according to claim 1 or 2, which is characterized in that the microphone
It (4) is electret microphone or MEMS microphone.
5. diffusion type optoacoustic microcavity gas sensor according to claim 3, which is characterized in that the microphone (4)
It is electret microphone or MEMS microphone.
6. according to claim 1, diffusion type optoacoustic microcavity gas sensor described in 2 or 5, which is characterized in that the circuit
Plate (6) mainly has the function of light source driving and Signal acquiring and processing.
7. diffusion type optoacoustic microcavity gas sensor according to claim 3, which is characterized in that the circuit board (6)
Mainly have the function of light source driving and Signal acquiring and processing.
8. diffusion type optoacoustic microcavity gas sensor according to claim 4, which is characterized in that the circuit board (6)
Mainly have the function of light source driving and Signal acquiring and processing.
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Cited By (4)
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| CN111157456A (en) * | 2019-12-31 | 2020-05-15 | 西安电子科技大学 | Gas detection system based on open type photoacoustic resonant cavity |
| CN111289460A (en) * | 2020-03-16 | 2020-06-16 | 潍坊歌尔微电子有限公司 | Gas concentration detection device, detection method thereof, control device and storage medium |
| CN113516824A (en) * | 2021-04-14 | 2021-10-19 | 汉威科技集团股份有限公司 | Composite fire detector and detection method thereof |
| WO2022175058A1 (en) * | 2021-02-19 | 2022-08-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and sensor for determining the concentration of a target gas in the blood of a living being |
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Application publication date: 20191015 |