CN110325483B - Optical glass - Google Patents
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- CN110325483B CN110325483B CN201880013298.6A CN201880013298A CN110325483B CN 110325483 B CN110325483 B CN 110325483B CN 201880013298 A CN201880013298 A CN 201880013298A CN 110325483 B CN110325483 B CN 110325483B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
The invention provides an optical glass with high ultraviolet transmittance and excellent press molding property. The optical glass is characterized in that: contains 40 to 75 mass% of SiO21 to 30% of B2O30 to 15% of Al2O30.1 to 10% of RO (R is at least 1 selected from Mg, Ca, Sr, Ba and Zn), 0.1 to 10% of Li2O, 0.5-15% of Na2O+K2O, 0 to 3% ZrO20 to 5% of F2Substantially free of Sb2O3。
Description
Technical Field
The invention relates to an optical glass.
Background
In recent years, electronic components and the like have been miniaturized. Therefore, there is a demand for high precision in ultraviolet cameras used for quality control of electronic circuits, optical fibers, semiconductor materials, and the like, and ultraviolet lasers for forming electronic circuits on silicon wafers, and the shapes of lenses used for these are also complicated. Conventionally, silica glass having high ultraviolet (approximately 350nm or less in wavelength) transmittance is used for lenses used for ultraviolet lasers and the like (see, for example, patent document 1).
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 4-305035
Disclosure of Invention
Technical problem to be solved by the invention
However, since silica glass has a high glass transition temperature and a high softening point, it has a problem that press formability is poor and it is difficult to obtain a desired lens shape.
In view of the above-described problems, an object of the present invention is to provide an optical glass having high ultraviolet transmittance and excellent press moldability.
Technical solution for solving technical problem
The optical glass of the present invention is characterized in that: contains 40 to 75 mass% of SiO21 to 30% of B2O30 to 15% of Al2O30.1 to 10% of RO (R is at least 1 selected from Mg, Ca, Sr, Ba and Zn), 0.1 to 10% of Li2O, 0.5-15% of Na2O+K2O, 0 to 3% ZrO20 to 5% of F2Substantially free of Sb2O3. Wherein "Na" is2O+K2O "means Na2O and K2Total amount of O content. In the present invention, the transmittance of ultraviolet ray is improved by using SiO2The content of (b) is defined to be 40 mass% or more, and the content of an alkali component which lowers the ultraviolet transmittance is defined to be 25 mass% or less in total, thereby achieving high ultraviolet transmittance. In addition, excellent press formability is achieved by defining the content of RO (R is at least 1 selected from Mg, Ca, Sr, Ba and Zn) that lowers the glass transition temperature to 0.1 mass% or more and defining the content of alkali components to 0.6 mass% or more in total. In addition to this, the present invention is,"substantially free of Sb2O3"" means not intentionally contained as a raw material, and objectively means Sb2O3The content of (A) is less than 0.1%.
The optical glass of the present invention preferably further contains 0 to 0.05% by mass of La2O3+Nb2O5+Bi2O3+WO3. Wherein "La" is2O3+Nb2O5+Bi2O3+WO3"means La2O3、Nb2O5、Bi2O3And WO3The total amount of (A) and (B).
The optical glass of the present invention preferably further contains 100ppm or less of TiO in mass%250ppm or less of Fe2O3。
The optical glass of the present invention preferably has a refractive index (nd) of 1.45 to 1.55. Where "nd" is the refractive index of the d-line.
The glass transition temperature of the optical glass of the present invention is preferably 550 ℃ or lower.
The optical glass of the present invention preferably has a softening point of 700 ℃ or lower.
The optical glass of the present invention preferably has a transmittance of 50% or more at a thickness of 1mm and a wavelength of 270 nm.
The optical glass of the present invention preferably has a transmittance of 80% or more at a thickness of 1mm and a wavelength of 300 nm.
The optical glass of the present invention is preferably used for press molding.
The optical glass lens of the present invention is characterized in that: including the optical glass described above.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, an optical glass having high ultraviolet transmittance and excellent press moldability can be provided.
Detailed Description
The optical glass of the present invention contains 40 to 75% of SiO21 to 30% of B2O30 to 15% of Al2O30.1-10% RO (R is at least 1 selected from Mg, Ca, Sr, Ba and Zn), 0.1-E10% of Li2O, 0.5-15% of Na2O+K2O, 0 to 3% ZrO20 to 5% of F2Substantially free of Sb2O3. The reason why the contents of the respective components are specified as described above will be described in detail below. In addition, unless otherwise specified, "%" below means "% by mass".
SiO2Has the effects of improving ultraviolet transmittance and weather resistance, reducing refractive index, and improving liquid phase viscosity. SiO 22The content of (B) is preferably 40 to 75%, 45 to 70%, particularly 50 to 65%. SiO 22When the content of (b) is too small, the refractive index tends to be difficult to decrease, and the ultraviolet transmittance tends to decrease. On the other hand, SiO2When the content of (b) is too large, the glass transition temperature tends to be increased, and the press formability tends to be lowered. In addition, the glass has poor melting property and easily precipitates SiO2The devitrified article of (1).
B2O3Has the effects of reducing the refractive index, increasing the liquid phase viscosity, and improving the weather resistance. B is2O3The content of (B) is preferably 1 to 30%, 3 to 26%, particularly 5 to 22%. B is2O3When the content of (B) is too small, the refractive index is difficult to decrease. On the other hand, B2O3When the content of (b) is too large, the weather resistance is deteriorated and the film is easily evaporated during molding to easily form a texture.
Al2O3Has the effects of reducing the refractive index, increasing the liquid phase viscosity, and improving the weather resistance. Al (Al)2O3The content of (B) is preferably 0 to 15%, 1 to 13%, 2 to 11%, particularly 3 to 9%. Al (Al)2O3When the content of (A) is too large, the melting property of the glass is deteriorated and Al is easily precipitated2O3The devitrified article of (1).
Furthermore, SiO2/B2O3Preferably 10 or less, 7.5 or less, 5 or less, 4 or less, particularly 3 or less. SiO 22/B2O3When too large, the glass will have poor melting properties and SiO will be easily precipitated2The devitrified article of (1). In addition, SiO2/B2O3The lower limit of (b) is not particularly limited, but is preferably 1 or more in reality. Wherein, SiO2/B2O3"means SiO2Is divided by B2O3The content of (b).
In addition, SiO2/Al2O3Preferably 10 or less, 7.5 or less, 5 or less, 4 or less, particularly 3 or less. SiO 22/Al2O3When too large, the glass will have poor melting properties and SiO will be easily precipitated2The devitrified article of (1). In addition, SiO2/Al2O3The lower limit of (b) is not particularly limited, but is preferably 1 or more in reality. Wherein, SiO2/Al2O3"means SiO2Is divided by Al2O3The content of (b).
RO (R is at least 1 selected from Mg, Ca, Sr, Ba, and Zn) is a component that lowers the glass transition temperature and lowers the high-temperature viscosity of the glass. The content (total amount) of RO is preferably 0.1 to 10%, 1 to 8%, particularly 2 to 5%. When the content of RO is too small, it is difficult to lower the glass transition temperature. On the other hand, if the RO content is too large, devitrification tends to be strong and vitrification becomes difficult, and glass tends to melt and adhere to a press mold during press molding. Further, the content of each component of RO is preferably within the above range.
Li2O is a component that lowers the glass transition temperature and lowers the high-temperature viscosity of the glass. Li2The content of O is preferably 0.1 to 10%, 1 to 8%, particularly 2 to 6%. Li2When the content of O is too small, it is difficult to lower the glass transition temperature. On the other hand, Li2When the content of O is too large, the ultraviolet transmittance is lowered and the weather resistance is easily deteriorated. In addition, glass is easily melted and adhered to a pressing mold during press molding.
Na2O and K2O is a component that lowers the glass transition temperature and lowers the high-temperature viscosity of the glass. Na (Na)2O+K2The preferable content of O is 0.5-15%, 1-10%, 1-8%, 2-7%, especially 3-6%. Na (Na)2O+K2Of OWhen the content is too small, the above-mentioned effects are hardly obtained. On the other hand, Na2O+K2When the content of O is too large, the ultraviolet transmittance is lowered and the weather resistance is liable to deteriorate.
Further, Na2O and K2Preferable ranges of the content of O are as follows.
Na2The content of O is preferably 0 to 10%, 0.5 to 8%, 1 to 7%, particularly 2 to 6%.
K2The content of O is preferably 0 to 10%, 0.5 to 8%, 1 to 7%, particularly 2 to 6%.
Li2O+Na2O+K2The content of O is preferably 0.6 to 25%, 2 to 18%, particularly 5 to 12%. Li2O+Na2O+K2When the content of O is too small, it is difficult to lower the glass transition temperature. On the other hand, Li2O+Na2O+K2When the content of O is too large, the ultraviolet transmittance is lowered and the weather resistance is easily deteriorated. Wherein "Li2O+Na2O+K2O "means Li2O、Na2O and K2Total amount of O content.
Li2O/(Na2O+K2O) is preferably 10 or less, 5 or less, 3 or less, 2 or less, particularly 1 or less. Li2O/(Na2O+K2O) is too large, glass is easily melted and adhered to the pressing mold during press molding. Preferably Li2O/(Na2O+K2O) is 0.01 or more. Wherein "Li2O/(Na2O+K2O) "means Li2O content divided by Na2O+K2The content of O.
(Li2O+Na2O+K2O)/RO is preferably 100 or less, 50 or less, 30 or less, 25 or less, particularly 20 or less. (Li)2O+Na2O+K2When O)/RO is too large, the ultraviolet transmittance is lowered and the weather resistance is liable to deteriorate. Preferably (Li)2O+Na2O+K2The lower limit of O)/RO is 0.1 or more. Wherein, "(Li)2O+Na2O+K2O)/RO "means Li2O+Na2O+K2Content of ODivided by the RO content.
ZrO2Has the effect of improving weather resistance. ZrO (ZrO)2The content of (B) is preferably 0 to 3%, 0 to 2%, particularly 0.1 to 2%. ZrO (ZrO)2When the content of (b) is too large, the ultraviolet transmittance decreases, the liquid phase viscosity decreases, and devitrification becomes easy.
F2A component for improving ultraviolet transmittance. F2The content of (B) is preferably 0 to 5%, 0.5 to 3%, particularly 1 to 2%. F2When the content of (b) is too large, evaporation during melting increases to cause a texture or the like, and the glass tends to become inhomogeneous. In addition, glass is easily melted and adhered to a pressing mold during press molding.
Sb2O3It is preferable that the ultraviolet transmittance is substantially not contained because the ultraviolet transmittance is easily lowered.
In addition to the above components, various components shown below may be contained.
La2O3、Nb2O5、Bi2O3And WO3Ingredients for improving weather resistance and chemical resistance. Further, by containing these components, the refractive index can be adjusted. La2O3+Nb2O5+Bi2O3+WO3The content of (B) is preferably 0 to 0.05%. When the content of these components is too large, defects such as a decrease in devitrification resistance, an increase in melting temperature, or a decrease in ultraviolet transmittance are likely to occur. Further, La is preferable2O3、Nb2O5、Bi2O3And WO3The content of each component (c) is also within the above range.
TiO2Since the ultraviolet transmittance is liable to be lowered, the content is preferably as small as possible. In particular, TiO2The content of (B) is preferably 100ppm or less, particularly 50ppm or less.
Fe which is easily mixed as an impurity2O3Since the ultraviolet transmittance is liable to be lowered, the content is preferably as small as possible. In particular, Fe2O3The content of (B) is preferably 50ppm or less, particularly 30ppm or less.
When melting glass, a reducing agent such as carbon or metallic tin may be added in an amount of 1% or less.
Further, Cu, Ag, Pr, and Br are components for coloring the glass, and therefore are preferably not substantially contained. In consideration of the influence on the environment, it is preferable that Cd is substantially not contained. The term "substantially free of Cu, Ag, Pr, Br, and Cd" means that the compound is not intentionally contained as a raw material, and objectively means that the content of Cu, Ag, Pr, Br, and Cd is less than 0.1%.
The refractive index nd of the optical glass having the above composition is preferably 1.45 to 1.55, 1.48 to 1.53, particularly 1.49 to 1.52. The Abbe number is preferably 50 to 65, 52 to 63, particularly 54 to 60.
The optical glass of the present invention has a relatively low refractive index as described above, and therefore has high light incidence efficiency. Therefore, there is substantially no problem even if the antireflection film is not provided. However, an antireflection film may be formed as necessary.
The glass transition temperature of the optical glass of the present invention is preferably 550 ℃ or lower, 530 ℃ or lower, particularly 500 ℃ or lower. The lower limit of the glass transition temperature is not particularly limited, but is actually 400 ℃ or higher. The softening point is preferably 700 ℃ or lower, 680 ℃ or lower, and particularly 650 ℃ or lower. The lower limit of the softening point is not particularly limited, but is actually 550 ℃ or higher. Since the glass transition temperature and softening point are low, the press molding temperature is low, and deterioration of the press mold is easily suppressed.
The difference between the glass transition temperature and the softening point of the optical glass of the present invention is preferably 245 ℃ or lower, 220 ℃ or lower, particularly 200 ℃ or lower. When the difference between the glass transition temperature and the softening point is small, the glass is likely to be rapidly solidified when the glass is press-molded and cooled, and therefore, the glass is less likely to melt and adhere to the pressing mold.
The optical glass of the present invention preferably has a thermal expansion coefficient of 40X 10 in the range of 30 to 300 DEG C－750X 10 at a temperature of 50 ℃ or higher－760X 10 at a temperature of 60 ℃ or higher－7Over/° C, in particular 70X 10－7Above/° c. When the thermal expansion coefficient is too low, the glass is formed by pressing and cooledThe glass is difficult to release from the pressing mold. Although the upper limit of the thermal expansion coefficient is not particularly limited, it is actually 150 × 10－7Below/° c.
The optical glass of the present invention has good light transmittance in the deep ultraviolet region having a wavelength of approximately 350nm or less. Specifically, the optical glass of the present invention preferably has a light transmittance of 50% or more, 60% or more, particularly 70% or more, at a thickness of 1mm and a wavelength of 270 nm. The light transmittance at a thickness of 1mm and a wavelength of 300nm is preferably 80% or more, 85% or more, particularly 90% or more.
Next, a method for producing the optical glass lens of the present invention will be described.
First, glass raw materials are prepared so as to have a desired composition, and then melted in a glass melting furnace. The glass preferably has a melting temperature of 1150 ℃ or higher, 1200 ℃ or higher, particularly 1250 ℃ or higher. In addition, the melting temperature is preferably 1450 ℃ or lower, 1400 ℃ or lower, 1350 ℃ or lower, and particularly 1300 ℃ or lower, from the viewpoint of preventing coloration of the glass due to infiltration of Pt from the platinum metal constituting the melting vessel.
When the melting time is too short, there is a possibility that sufficient defoaming cannot be achieved, and therefore the melting time is preferably 2 hours or more, particularly 3 hours or more. However, the melting time is preferably within 8 hours, particularly within 5 hours, from the viewpoint of preventing coloration of the glass due to infiltration of Pt from the melting vessel.
Next, the molten glass was dropped from the tip of the nozzle to produce a droplet-like glass, and an optical glass was obtained. Alternatively, the optical glass is obtained by performing rapid cooling casting on molten glass, temporarily making a glass block, and then grinding, polishing, and cleaning.
Next, the optical glass is put into a mold after precision machining, and press-molded while being heated to a softened state, so that the surface shape of the mold is transferred to the optical glass. In this way, an optical glass lens can be obtained.
Examples
Hereinafter, the optical glass of the present invention will be described in detail based on examples.
Tables 1 and 2 show examples (sample Nos. 1 to 12) and comparative examples (sample No.13) of the present invention.
[ Table 1]
[ Table 2]
Each sample was prepared as follows.
First, glass raw materials prepared with the compositions shown in tables 1 and 2 were placed in platinum crucibles and melted at 1300 ℃ for 2 hours, respectively. Next, the molten glass was poured onto a carbon plate, cooled and solidified, and then annealed to produce a glass block. Then, the glass was ground, polished, and cleaned to obtain optical glass. The optical glass thus obtained was evaluated for various properties. The results are shown in the tables. Then, an optical glass was put into a precision-machined mold, and press-molded while heating at a softening point to transfer the surface shape of the mold to the optical glass, thereby obtaining a plano-convex lens having a front curvature radius of 20mm and a center thickness of 4mm, a plano-convex lens having a front curvature radius of 10mm and a center thickness of 0.5mm, and a biconvex lens having a front curvature radius of 10mm, a back curvature radius of 10mm and a center thickness of 0.5 mm.
The refractive index nd was expressed as a measured value of d-line (wavelength: 587.6nm) by a refractometer.
The glass transition temperature was measured by a dilatometer.
The softening point was measured by the fiber elongation method.
The coefficient of thermal expansion is measured by a dilatometer over a temperature range of 30 to 300 ℃.
The light transmittance was measured by a spectrophotometer (UV-3100, Shimadzu corporation).
TiO2And Fe2O3The content of (b) was analyzed by an inductively coupled plasma mass spectrometer (ICP-MS).
As is clear from the table, the samples No.1 to 12 of the examples of the present invention have a refractive index nd of 1.46 to 1.54, a glass transition temperature of 440 to 540 ℃, a softening point of 600 to 699 ℃, and a thermal expansion coefficient of 42 to 90X 10－7(ii)/° C, a light transmittance (270nm) of 55 to 78%, and a light transmittance (300nm) of 81 to 94%. In contrast, the sample No.13 as comparative example was found to have a glass transition temperature as high as 630 ℃ and a softening point as high as 785 ℃ and to have poor press formability.
Claims (9)
1. An optical glass characterized in that:
contains 55.0 to 75 mass% of SiO21 to 30% of B2O30 to 13% of Al2O30.1 to 10% of RO, 0.1 to 1.5% of Li2O, 0.5-4.0% of Na2O+K2O, 0 to 3% ZrO20 to 5% of F2Substantially free of Sb2O3Wherein R is at least 1 selected from Mg, Ca, Sr, Ba and Zn,
the transmittance at a thickness of 1mm and a wavelength of 270nm is 50% or more.
2. The optical glass of claim 1, wherein:
0 to 0.05% by mass of La2O3+Nb2O5+Bi2O3+WO3。
3. The optical glass according to claim 1 or 2, wherein:
contains TiO of 100ppm or less in mass250ppm or less of Fe2O3。
4. The optical glass according to claim 1 or 2, wherein:
the refractive index nd is 1.45 to 1.55.
5. The optical glass according to claim 1 or 2, wherein:
the glass transition temperature is 550 ℃ or lower.
6. The optical glass according to claim 1 or 2, wherein:
the softening point is below 700 ℃.
7. The optical glass according to claim 1 or 2, wherein:
the transmittance at a thickness of 1mm and a wavelength of 300nm is 80% or more.
8. The optical glass according to claim 1 or 2, wherein:
it is used for compression molding.
9. An optical glass lens, characterized in that:
an optical glass comprising the optical glass as defined in any one of claims 1 to 8.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017033379 | 2017-02-24 | ||
| JP2017-033379 | 2017-02-24 | ||
| JP2017250550A JP7134396B2 (en) | 2017-02-24 | 2017-12-27 | optical glass |
| JP2017-250550 | 2017-12-27 | ||
| PCT/JP2018/003034 WO2018155105A1 (en) | 2017-02-24 | 2018-01-30 | Optical glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110325483A CN110325483A (en) | 2019-10-11 |
| CN110325483B true CN110325483B (en) | 2021-09-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880013298.6A Active CN110325483B (en) | 2017-02-24 | 2018-01-30 | Optical glass |
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| JP (1) | JP7134396B2 (en) |
| CN (1) | CN110325483B (en) |
| TW (1) | TWI791483B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110240402B (en) * | 2019-06-28 | 2021-09-28 | 中国建筑材料科学研究总院有限公司 | Environment-friendly deep ultraviolet-transmitting borosilicate glass and preparation method and application thereof |
| CN110255898B (en) * | 2019-06-28 | 2021-09-28 | 中国建筑材料科学研究总院有限公司 | Deep ultraviolet transparent glass, preparation method, application and melting device thereof |
| CN112047625B (en) * | 2020-09-17 | 2022-04-15 | 成都光明光电股份有限公司 | Ultraviolet-transmitting optical glass |
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| EP0609685A1 (en) * | 1993-02-01 | 1994-08-10 | Corning Incorporated | Photochromic glasses which darken to a pink hue |
| JP2007126298A (en) * | 2005-10-31 | 2007-05-24 | Ohara Inc | Optical glass |
| JP2011225418A (en) * | 2010-03-30 | 2011-11-10 | Nippon Electric Glass Co Ltd | Optical glass |
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| JPS57188431A (en) * | 1981-05-12 | 1982-11-19 | Nippon Sheet Glass Co Ltd | Optical glass containing thallium |
| EP0252723B1 (en) * | 1986-07-11 | 1991-09-11 | Corning Glass Works | Lightly tinted glasses of variable transmission |
| JPS63169601A (en) * | 1987-01-07 | 1988-07-13 | Nippon Sheet Glass Co Ltd | Distributed index type optical element |
| JPS6442343A (en) * | 1987-08-07 | 1989-02-14 | Nippon Electric Glass Co | Borosilicate glass for optical element |
| DE3801840A1 (en) * | 1988-01-20 | 1989-08-03 | Schott Glaswerke | UV-transparent glass |
| DE3825210A1 (en) * | 1988-07-25 | 1990-02-08 | Deutsche Spezialglas Ag | HIGH-BREAKING PHOTOTROPIC GLASS LOW DENSITY |
| JPH0274536A (en) * | 1988-09-07 | 1990-03-14 | Toshiba Glass Co Ltd | Hard glass for press molding |
| JP3100726B2 (en) * | 1992-01-23 | 2000-10-23 | 株式会社住田光学ガラス | Optical glass for precision press molding |
| JP3192013B2 (en) * | 1992-11-13 | 2001-07-23 | 旭テクノグラス株式会社 | UV transparent glass |
| FR2769618B1 (en) | 1997-10-10 | 2000-01-21 | Corning Sa | HIGH REFRACTIVE INDEX GLASSES, MULTIFOCAL CORRECTIVE LENSES INCORPORATING THE SAME |
| DE10311802B4 (en) | 2003-03-12 | 2006-03-02 | Schott Ag | Boroaluminosilicate glass and its use |
| CN101381203B (en) * | 2008-10-27 | 2011-02-09 | 北京滨松光子技术股份有限公司 | Component of molybdenum-containing sunalux glass and application |
| JP6157067B2 (en) | 2012-07-04 | 2017-07-05 | 川西 勝三 | Health management device, health management program, and health management method |
-
2017
- 2017-12-27 JP JP2017250550A patent/JP7134396B2/en active Active
-
2018
- 2018-01-30 CN CN201880013298.6A patent/CN110325483B/en active Active
- 2018-02-09 TW TW107104674A patent/TWI791483B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0609685A1 (en) * | 1993-02-01 | 1994-08-10 | Corning Incorporated | Photochromic glasses which darken to a pink hue |
| JP2007126298A (en) * | 2005-10-31 | 2007-05-24 | Ohara Inc | Optical glass |
| JP2011225418A (en) * | 2010-03-30 | 2011-11-10 | Nippon Electric Glass Co Ltd | Optical glass |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110325483A (en) | 2019-10-11 |
| JP2018140928A (en) | 2018-09-13 |
| TW201837005A (en) | 2018-10-16 |
| JP7134396B2 (en) | 2022-09-12 |
| TWI791483B (en) | 2023-02-11 |
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