CN110323114B - Protection device and scanning electron microscope - Google Patents
Protection device and scanning electron microscope Download PDFInfo
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- CN110323114B CN110323114B CN201910635816.4A CN201910635816A CN110323114B CN 110323114 B CN110323114 B CN 110323114B CN 201910635816 A CN201910635816 A CN 201910635816A CN 110323114 B CN110323114 B CN 110323114B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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Abstract
The invention relates to a protection device and a scanning electron microscope, wherein the protection device is used for preventing a sample platform of the scanning electron microscope from colliding with a gun head of an electron gun of the scanning electron microscope, and comprises the following components: a support frame; the detection assembly is arranged on the support frame and is used for being electrically connected with a power supply to form a detection loop; at least one part of the detection assembly is positioned between the gun head and the sample table, so that the sample table can be firstly contacted with the detection assembly when moving in the first direction, and then the detection loop is disconnected at the detection assembly, so that the sample table is controlled to stop moving in the first direction, and the collision between the sample table and the gun head is avoided.
Description
Technical Field
The invention relates to the field of sample detection equipment, in particular to a protection device and a scanning electron microscope.
Background
When using scanning electron microscope to observe the sample, need place the sample on the sample platform, then operating personnel can adjust the height of sample platform, makes the sample rise to suitable observation position, then scanning electron gun of scanning electron microscope can launch scanning electron beam to scan the sample. When the height of the sample table is adjusted by an operator, the ascending height of the sample can be always observed until the sample reaches a proper position. However, the distance between the proper observation position and the gun head of the electron gun is very small (only 4mm approximately), and during actual detection, factors such as bulges on the sample or operation errors of operators exist, which may cause the gun head to be impacted by the sample table and damaged.
Disclosure of Invention
In view of this, it is necessary to provide a protection device and a scanning electron microscope for solving the problem that the tip of the scanning electron microscope is easily impacted.
The utility model provides a protection device for prevent the collision of scanning electron microscope's sample platform with the rifle head of scanning electron microscope's electron gun, protection device includes: a support frame; the detection assembly is arranged on the support frame and is electrically connected with the power supply so as to enable the detection assembly to be connected to the detection loop in series; at least one part of the detection assembly is positioned between the gun head and the sample table, so that the sample table can firstly touch the detection assembly when moving in a first direction, and then the detection loop is disconnected at the detection assembly, so that the sample table is controlled to stop moving in the first direction, wherein the first direction is the direction from the sample table to the gun head.
Further, the detection assembly includes: the first conducting strip is arranged on the support frame and is used for being connected with a first electrode of the power supply; the second conducting strip is arranged on the support frame and is arranged at an interval with the first conducting strip, and the second conducting strip is used for being connected with a second electrode of the power supply; the conductor is respectively electrically connected with the first conducting strip and the second conducting strip so as to conduct the detection loop; the conductor is arranged between the gun head and the sample stage, and when the sample stage moves in the first direction, the sample stage firstly touches the conductor to separate the conductor from the first conducting strip and/or separate the conductor from the second conducting strip, so that the detection circuit is disconnected.
Further, the support frame comprises a first support frame and a second support frame arranged at intervals with the first support frame; the first conducting strip is arranged on the first support, and the second conducting strip is arranged on the second support; an accommodating space is formed among the first bracket, the first conducting strip, the second bracket and the second conducting strip in a surrounding manner; the conductor penetrates through the accommodating space and can be abutted to the first conducting strip and the second conducting strip, and when the conductor is abutted to the first conducting strip and the second conducting strip, one end, close to the sample stage, of the conductor extends out of the accommodating space to receive collision of the sample stage.
Further, the first support and the second support are both annular supports, wherein the inner diameter of the first support is larger than the outer diameter of the second support, and the second support is arranged in the first support.
Further, the first conducting strip is obliquely arranged, so that the distance between the first conducting strip and the second conducting strip is gradually increased in the first direction; and/or the second conducting strip is obliquely arranged, so that the distance between the second conducting strip and the first conducting strip is gradually increased in the first direction.
Further, an included angle between the inclination direction of the first conductive sheet and the first direction is 20 to 30 degrees; and/or the included angle between the inclination direction of the second conducting strip and the first direction is 0-30 degrees.
Further, the electric conductor comprises a conductive ball, and the conductive ball is located between the first conductive sheet and the second conductive sheet and is respectively abutted against the first conductive sheet and the second conductive sheet.
Furthermore, one end of the conductive ball close to the sample stage extends out of the accommodating space; and/or one side of the conductive ball close to the sample stage is a plane.
Furthermore, the detection assembly further comprises an elastic piece, one end of the elastic piece is connected with the support frame, and the other end of the elastic piece is opposite to the electric conductor; when the sample table is inclined, the sample table can touch the elastic piece, so that the elastic piece moves towards the conductor, the force is applied to the conductor, the detection circuit is disconnected, and the sample table is controlled to stop moving.
Furthermore, the number of the detection assemblies is multiple, and the conductors of the detection assemblies are connected in series in the detection circuit.
Furthermore, the protection device comprises three detection assemblies which are connected in sequence and are respectively a first detection assembly, a second detection assembly and a third detection assembly; the first conducting strip of the first detection assembly is connected with the first electrode, the second conducting strip of the first detection assembly is directly connected with the second conducting strip of the second detection assembly, the first conducting strip of the second detection assembly is directly connected with the first conducting strip of the third detection assembly, and the second conducting strip of the third detection assembly is connected with the second electrode.
A scanning electron microscope, comprising: a body; an electron gun disposed on the body; the sample stage is arranged on the machine body and is opposite to the gun head of the electron gun; and the protection device is arranged on the machine body, at least one part of the protection device is positioned between the gun head and the sample table and is used for preventing the sample table from colliding with the gun head, and the protection device is as described in any one of the above items.
The protection device provided by the invention is arranged between the gun head of the electron gun and the sample platform, and the protection device is connected in a detection loop, when the sample platform moves towards the electron gun, the sample platform collides with the protection device firstly, at the moment, the detection loop is broken at the protection device, and the sample platform can be directly or indirectly controlled to stop moving by using a breaking signal of the detection loop, so that the collision between the sample platform and the gun head can be avoided.
Drawings
FIG. 1 is a schematic view of a protection device provided in the present invention in cooperation with an electron gun and a sample stage;
FIG. 2 is a schematic view of the detection assembly provided by the present invention;
FIG. 3 is a schematic view of a circuit break at the detection assembly provided by the present invention;
FIG. 4 is a schematic structural diagram of a protection device provided by the present invention;
FIG. 5 is a schematic view of another detection assembly provided by the present invention;
FIG. 6 is a top view of a protective device provided by the present invention;
FIG. 7 is a side view of a protective device provided by the present invention;
FIG. 8 is a cross-sectional view taken along line A-A of FIG. 7 in accordance with the present invention;
fig. 9 is a schematic diagram of the sample stage provided by the present invention being matched with an electron gun when the sample stage is tilted.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. However, the present invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to," mounted on, "or provided with" another element, or the like, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" or "contiguous" to another element, it can be directly connected or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, in a scanning electron microscope provided in an embodiment of the present invention, the scanning electron microscope includes an electron gun 1, a sample stage 2, a protection device 3, and a machine body 4, wherein the electron gun 1, the sample stage 2, and the protection device 3 are all disposed on the machine body 4. In this embodiment, the sample stage 2 is opposite to the tip 11 of the electron gun 1, and at least a part of the protection device 3 is located between the tip 11 of the electron gun 1 and the sample stage 2, so as to prevent the sample stage 2 from colliding with the tip 11. It is understood that the embodiment of preventing the sample stage 2 from colliding with the tip 11 includes preventing the sample stage 2 from directly colliding with the tip 11, and also includes preventing the sample fixed on the sample stage 2 from colliding with the tip 11.
Referring to fig. 1 to 3, in the present embodiment, the protection device 3 includes a support frame 31 and a detection assembly 32 disposed on the support frame 31, wherein the detection assembly 32 is connected to the power source 6 through a conductive wire 5 so as to connect the detection assembly 32 to the detection circuit 7. In addition, at least a part of the detection assembly 32 is located between the gun head 11 of the scanning electron microscope and the sample stage 2 of the scanning electron microscope, when the sample stage 2 moves in the first direction a, the sample stage 2 will firstly touch the detection assembly 32, so that the detection circuit 7 is disconnected at the detection assembly 32, and the sample stage 2 is controlled to stop moving in the first direction a, thereby avoiding collision between the sample stage 2 and the gun head 11. In this embodiment, the first direction a is a direction from the sample stage 2 to the tip 11.
It can be understood that, by properly setting the position of the detecting component 32, the sample stage 2 can be moved to a proper position, so as to conveniently detect the sample on the sample stage 2.
In this embodiment, the movement of the sample stage 2 in the first direction a may be automatically controlled by a driving device such as a motor, but in other embodiments, the movement of the sample stage 2 in the first direction a may also be manually controlled by an operator. In this embodiment, the manner of controlling the sample stage 2 to stop moving in the first direction a when the detection circuit 7 is open is as follows: the detection circuit 7 is actually a circuit for controlling the rotation of the motor, and when the detection circuit 7 is broken, the power supply 6 stops supplying power to the motor, so that the sample stage 2 stops moving.
Of course, in other embodiments, whether the detection circuit 7 is turned on may also be detected by a controller (the controller may be a main controller of the scanning electron microscope), where when the detection circuit 7 is turned on, the controller may control the motor to operate to drive the sample stage 2 to move in the first direction a, and when the detection circuit 7 is turned off, the controller controls the motor to stop operating. In addition, when the movement of the sample stage 2 in the first direction a is manually controlled by the operator, and the detection circuit 7 is disconnected, a prompt message is sent to the operator, so that the operator can control the sample stage 2 to stop moving. For example, an indicator light is connected in series in the detection circuit 7, when the detection circuit 7 is disconnected, the indicator light is turned off, and at this time, it is proved that the sample stage 2 has reached a predetermined position, and an operator can stop driving the sample stage 2.
Referring to fig. 1 to 3, in the present embodiment, the detecting assembly 32 includes a first conductive sheet 321, a second conductive sheet 322, and a conductive body 323. The first conductive sheet 321 and the second conductive sheet 322 are disposed on the supporting frame 31 (in this embodiment, the supporting frame 31 is made of a non-conductive material such as ceramic, etc.), wherein the first conductive sheet 321 is used for electrically connecting with the first electrode 61 of the power source 6, and the second conductive sheet 322 is used for electrically connecting with the second electrode 62 of the power source 6, wherein the polarities of the first electrode 61 and the second electrode 62 of the power source 6 are opposite, that is, the first electrode 61 and the second electrode 62 are the positive electrode and the negative electrode of the power source 6, respectively. It will be appreciated that the power source 6 may also be mains power, in which case the first electrode 61 and the second electrode 62 are respectively a neutral wire and a live wire.
Referring to fig. 2, a conductor 323 is electrically connected to the first conductive plate 321 and the second conductive plate 322, respectively, that is, the two conductive plates are electrically connected by the conductor 323, so as to enable conduction of the detection circuit 7. In addition, in the present embodiment, the conductive body 323 is detachably connected to the first conductive sheet 321, that is, the conductive body 323 can move relative to the first conductive sheet 321, so that the conductive body 323 can be separated from the electrical connection with the first conductive sheet 321. In addition, in the present embodiment, the conductive body 323 and the second conductive sheet 322 are also detachably connected together. As shown in fig. 3, when the sample stage 2 moves in the first direction a, the conductor 323 is touched, that is, the sample stage 2 applies a thrust to the conductor 323, so that the conductor 323 is separated from one or both of the first conductive plate 321 and the second conductive plate 322, thereby disconnecting the detection circuit 7.
It will be appreciated that in other embodiments, the conductor 323 may be movably connected to one of the conductive sheets, for example, rotatably connected to the other conductive sheet, when the sample stage 2 collides with the conductor 323, the conductor 323 is separated from the other conductive sheet, and the detection circuit 7 is disconnected.
As shown in fig. 4, in the present embodiment, the supporting frame 31 includes a first bracket 311 and a second bracket 312 spaced apart from the first bracket 311, and both of the brackets may be made of a non-conductive material such as ceramic. The first conductive plate 321 is disposed on the first support 311, the second conductive plate 322 is disposed on the second support 312, and an accommodating space 313 is formed between the first support 311, the first conductive plate 321, the second support 312, and the second conductive plate 322.
In the present embodiment, the depth direction of the accommodating space 313 coincides with the first direction a. The conductor 323 is inserted into the accommodating space 313 and can abut against the first conductive plate 321 and the second conductive plate 322, so that the first conductive plate 321 and the second conductive plate 322 are electrically connected. In the present embodiment, when the conductor 323 abuts against the first conductive plate 321 and the second conductive plate 322, one end of the conductor 323 close to the sample stage 2 protrudes from the housing space 313. When the sample stage 2 moves in the first direction a, it touches one end of the conductor 323 extending out of the accommodating space 313, i.e. the point of application of force to the conductor 323 by the sample stage 2 is located at one end of the conductor 323 extending out of the accommodating space 313.
Since the direction of the force applied to the conductor 323 by the sample stage 2 changes during actual operation, when the conductor 323 moves in the first direction a, both the conductive sheets may be out of contact with each other, or only one of the conductive sheets may be out of contact with the other conductive sheet and remain in contact with the other conductive sheet (see fig. 3).
As shown in fig. 2, in the present embodiment, the first conducting plate 321 is disposed obliquely, so that the distance between the first conducting plate 321 and the second conducting plate 322 gradually increases in the first direction a, which facilitates the placement of the conductor 323 from one end of the accommodating space 313 away from the sample stage 2 into the accommodating space 313. In addition, in the embodiment, the included angle α between the inclined direction of the first conductive plate 321 and the first direction a is 20 to 30 degrees, so that the conductive body 323 can be more easily placed in the accommodating space 313, and meanwhile, the conductive body 323 can be rapidly separated from the first conductive plate 321 when moving in the first direction a.
Further, as shown in fig. 2, in the present embodiment, the second conductive plate 322 is also disposed obliquely, so that the distance between the second conductive plate 322 and the first conductive plate 321 is gradually decreased in the first direction a, which can make the opening of the end of the accommodating space 313 far from the sample stage 2 larger, and facilitate the insertion of the conductive plate. Meanwhile, in the present embodiment, the angle β between the inclined direction of the second conductive sheet 322 and the first direction a is 0 to 30 degrees.
In addition, in order to facilitate the placement of conductor 323 into accommodating space 313 and to facilitate the detachment of conductor 323 from the two conductive sheets, as shown in fig. 2 and 5, in this embodiment, conductor 323 includes conductive ball 3230 (conductor 323 itself may be conductive ball 3230), wherein conductive ball 3230 is located between and in contact with the two conductive sheets, respectively. That is, the body of the conductor 323 for controlling the on-off of the detection loop 7 is a spherical structure. Further, as shown in fig. 2, in the present embodiment, one end of the conductive ball 3230 near the sample stage 2 protrudes out of the accommodating space 313, i.e., the conductive ball 3230 can directly receive the impact force of the sample stage 2. In addition, in order to make the detection assembly 32 have a large detection area, as shown in fig. 5, in the present embodiment, the side of the conductive ball 3230 close to the sample stage 2 is a flat surface, i.e., the end surface 3231 is a flat surface.
It is understood that in other embodiments, the conductive body 323 may have a circular truncated cone structure, a conical structure, a cylindrical structure, or the like. In addition, in order to better define the conductive body 323 in the accommodating space 313, the surfaces of the first conductive plate 321 and the second conductive plate 322, which are in contact with the conductive body 323, are arc-shaped surfaces.
As shown in fig. 4, in the present embodiment, the first bracket 311 and the second bracket 312 are both annular brackets, wherein the inner diameter of the first bracket 311 is larger than the outer diameter of the second bracket 312, and the second bracket 312 is disposed in the first bracket 311. Preferably, the two annular supports are arranged coaxially.
As shown in fig. 6, in order to increase the detection range of the protection device 3, in the present embodiment, the number of the detection assemblies 32 is plural, and the conductors 323 of each detection assembly 32 are connected in series in the detection circuit 7, so that the detection circuit 7 is opened after any one conductor 323 is out of contact with its corresponding conductive sheet, so as to control the sample stage 2 to stop moving in the first direction a. Further, in the present embodiment, the detecting elements 32 are uniformly arranged on the annular support.
As shown in fig. 6, in the present embodiment, the protection device 3 includes three detection assemblies 32 connected in sequence, which are respectively defined as a first detection assembly 32a, a second detection assembly 32b, and a third detection assembly 32c, and the connection mode of the three detection assemblies 32 is taken as an example to describe the mode of realizing the serial connection of the conductors 323 of the detection assemblies 32.
As shown in fig. 6, in the present embodiment, the first conductive sheet 321 of the first detecting element 32a is electrically connected to the first electrode 61, which may be directly connected to the first electrode or electrically connected to the first electrode through an intermediate transition element; the second conductive sheet 322 of the first detecting member 32a is directly connected to the second conductive sheet 322 of the second detecting member 32 b; the first conductive plate 321 of the second detection assembly 32b is directly connected with the first conductive plate 321 of the third detection assembly 32 c; the second conductive sheet 322 of the third conductive detecting element 32c is connected to the second electrode 62, and the two may be directly connected to each other or electrically connected to each other through an intermediate transition element. Or the connection mode of the three is as follows: the second conductive sheet 322 of the first detecting member 32a is connected to the second electrode 62; the first conductive plate 321 of the first detecting element 32a is directly connected with the first conductive plate 321 of the second detecting element 32 b; the second conductive sheet 322 of the second detecting element 32b is directly connected to the second conductive sheet 322 of the third detecting element 32c, and the first conductive sheet 321 of the third detecting element 32c is connected to the first electrode 61.
As can be seen from the above, in this embodiment, the two directly connected conductive plates (the first conductive plate 321 or the second conductive plate 322) are located on the same bracket, so that the adjacent first conductive plate 321 and the second conductive plate 322 are not directly connected through the middle conductive wire 5, which not only makes the whole protection device 3 more tidy and beautiful, but also avoids the middle conductive wire 5 interfering with the movement of the conductive body 323. Further, for the convenience of assembly, in this embodiment, the two directly connected conductive sheets are integrally disposed.
Referring to fig. 7 and 8, in the present embodiment, the detecting assembly 32 further includes a resilient member 324, and the resilient member 324 is electrically non-conductive and may be made of a plastic material. One end of the elastic member 324 is connected to the support frame 31, and the other end of the elastic member 324 is opposite to the conductor 323, i.e. the elastic member 324 is also located between the gun head 11 and the sample platform 2. Specifically, in the present embodiment, the elastic member 324 has a V-shaped structure, one end of which is fixed to the first bracket 311, and the other end of which is opposite to the portion of the conductive body 323 extending out of the accommodating space 313. As shown in fig. 9, when the sample stage 2 is tilted, for example, the sample stage 2 needs to be tilted by 52 degrees before FIB cutting (FIB is an abbreviation of Focused Ion beam, and the name of the word is Focused Ion beam), the sample stage 2 collides with the elastic member 324 to move the elastic member 324 toward the conductor 323, and further applies a force to the conductor 323 to separate the conductor 323 from contact with one or both of the two conductive sheets, so as to disconnect the detection circuit 7, thereby controlling the sample stage 2 to stop moving.
In this embodiment, the elastic element 324 is located on a side of the conductive element 323 away from the second conductive element 322, and the direction of the force applied by the conductive element to the conductive element 323 faces the second conductive element 322, so the conductive element 323 is usually separated from the first conductive element 321 and kept in contact with the second conductive element 322.
In order to make the detection of the detecting assembly 32 more sensitive, in the present embodiment, when the conductive body 323 abuts against the two conductive sheets, the elastic member 324 just contacts with the conductive body 323, so that when the sample stage 2 collides with the elastic member 324, a force can be applied to the conductive body 323.
Referring to fig. 7 and 8, in the present embodiment, the protector 3 further includes a connection plate 33, and the connection plate 33 is used to connect the first bracket 311 and the second bracket 312 together. Specifically, in the present embodiment, the ends of the first bracket 311 and the second bracket 312 away from the sample stage 2 are both disposed on the connecting plate 33. Meanwhile, the connecting plate 33 is provided with an avoiding through hole 331, and the avoiding through hole 331 is communicated with a hollow part of the second support 312 (hollow parts of the avoiding through hole 331 and the hollow part of the second support 312 are coaxially arranged), so that the gun head 11 is directly opposite to the sample platform 2, and further, the electron gun 1 can perform corresponding operation on a sample on the sample platform 2. In addition, in the embodiment, the connection plate 33 and the two brackets may be fixedly connected by bonding, welding, or the like, or may be detachably connected by a threaded fastener or the like.
Meanwhile, in the present embodiment, the distance between the connecting plate 33 and the electric conductor 323 is set to be appropriate, so that the electric conductor 323 cannot exit from the accommodating space 313 from the end close to the lance tip 11 after assembly, that is, when the electric conductor 323 moves towards the lance tip 11, the electric conductor 323 abuts against the connecting plate 33, and when the electric conductor 323 abuts against the connecting plate 33, a part of the electric conductor 323 is still located in the accommodating space 313.
In this embodiment, the protection device 3 may be directly installed on the electron gun 1, for example, the second support 312 is directly sleeved on the gun head 11 (the second support 312 has an annular structure, and a hollow portion thereof is clamped on the gun head 11), and of course, the protection device 3 and the electron gun 1 may be fixed together by bonding, welding, or connecting by a connecting member, and the like, so that the protection device 3 may move together with the electron gun 1, and the electron gun 1 may be better protected. In addition, in other embodiments, the protection device 3 may be disposed separately from the electron gun 1, and in this case, the protection device 3 may be mounted on the body 4 through a corresponding fixing frame.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (11)
1. The utility model provides a protection device for prevent scanning electron microscope's sample platform with the rifle head collision of scanning electron microscope's electron gun, its characterized in that, protection device includes:
a support frame; and
the detection assembly is arranged on the support frame and is electrically connected with the power supply so as to enable the detection assembly to be connected to the detection loop in series;
at least one part of the detection assembly is positioned between the gun head and the sample table, so that when the sample table moves in a first direction, the sample table can firstly touch the detection assembly, and then the detection loop is disconnected at the detection assembly, so that the sample table is controlled to stop moving in the first direction, wherein the first direction is the direction from the sample table to the gun head;
the detection assembly comprises:
the first conducting strip is arranged on the support frame and is used for being connected with a first electrode of the power supply;
the second conducting strip is arranged on the support frame and is arranged at an interval with the first conducting strip, and the second conducting strip is used for being connected with a second electrode of the power supply;
the conductor is respectively electrically connected with the first conducting strip and the second conducting strip so as to conduct the detection loop;
the conductor is arranged between the gun head and the sample stage, and when the sample stage moves in a first direction, the sample stage firstly touches the conductor to separate the conductor from the first conducting strip and/or separate the conductor from the second conducting strip, so that the detection circuit is disconnected;
the sample stage is configured to move in a first direction under the control of a driving device, the detection circuit controls the driving device to work, and the driving device is configured to be powered by the power supply.
2. The protective device of claim 1, wherein the support frame includes a first bracket and a second bracket spaced from the first bracket; the first conducting strip is arranged on the first support, and the second conducting strip is arranged on the second support; an accommodating space is formed among the first bracket, the first conducting strip, the second bracket and the second conducting strip in a surrounding manner;
the conductor penetrates through the accommodating space and can be abutted to the first conducting strip and the second conducting strip, and when the conductor is abutted to the first conducting strip and the second conducting strip, one end, close to the sample stage, of the conductor extends out of the accommodating space to receive collision of the sample stage.
3. The protective device according to claim 2, wherein the first and second brackets are both annular brackets, wherein the first bracket has an inner diameter that is greater than an outer diameter of the second bracket, and wherein the second bracket is disposed within the first bracket.
4. The protective device according to claim 2, wherein the first conductive sheet is disposed obliquely such that a distance between the first conductive sheet and the second conductive sheet is gradually increased in the first direction; and/or
The second conducting strip is obliquely arranged, so that the distance between the second conducting strip and the first conducting strip is gradually increased in the first direction.
5. The protection device of claim 4, wherein the first conductive sheet is inclined at an angle of 20 to 30 degrees to the first direction; and/or
The inclined direction of the second conducting strip and the first direction form an included angle of 0-30 degrees.
6. The protective device of claim 4, wherein the conductive body comprises a conductive ball positioned between and abutting the first and second conductive pads, respectively.
7. The protection device of claim 6, wherein one end of the conductive ball close to the sample stage extends out of the accommodating space; and/or
One side of the conductive ball close to the sample stage is a plane.
8. The protection device of claim 1, wherein the detection assembly further comprises an elastic member, one end of the elastic member is connected with the support frame, and the other end of the elastic member is opposite to the electric conductor; when the sample table is inclined, the sample table can touch the elastic piece, so that the elastic piece moves towards the conductor, the force is applied to the conductor, the detection circuit is disconnected, and the sample table is controlled to stop moving.
9. The protection device according to any one of claims 2 to 8, wherein the number of the detection assemblies is plural, and the conductive body of each detection assembly is connected in series in the detection circuit.
10. The protection device according to claim 9, wherein the protection device comprises three detection assemblies which are connected in sequence, namely a first detection assembly, a second detection assembly and a third detection assembly;
the first conducting strip of the first detection assembly is connected with the first electrode, the second conducting strip of the first detection assembly is directly connected with the second conducting strip of the second detection assembly, the first conducting strip of the second detection assembly is directly connected with the first conducting strip of the third detection assembly, and the second conducting strip of the third detection assembly is connected with the second electrode.
11. A scanning electron microscope, comprising:
a body;
an electron gun disposed on the body;
the sample stage is arranged on the machine body and is opposite to the gun head of the electron gun;
the protection device is arranged on the machine body, wherein at least one part of the protection device is positioned between the gun head and the sample table and is used for preventing the sample table from colliding with the gun head, and the protection device is as defined in any one of claims 1 to 10.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910635816.4A CN110323114B (en) | 2019-07-15 | 2019-07-15 | Protection device and scanning electron microscope |
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| CN201910635816.4A CN110323114B (en) | 2019-07-15 | 2019-07-15 | Protection device and scanning electron microscope |
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| CN110323114A CN110323114A (en) | 2019-10-11 |
| CN110323114B true CN110323114B (en) | 2021-11-26 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS6070350A (en) * | 1983-09-28 | 1985-04-22 | Hitachi Ltd | Focal distance confirming method and apparatus therefor |
| CN102032434A (en) * | 2009-09-28 | 2011-04-27 | 唐毅机械有限公司 | Signal device of error action anti-collision detector for machine table or equipment working head |
| CN104898265B (en) * | 2015-06-11 | 2017-09-26 | 昆山国显光电有限公司 | Prevent system and method, the image-taking system of micro objective bumped substrate |
| CN107437487A (en) * | 2016-05-25 | 2017-12-05 | 宝山钢铁股份有限公司 | One kind is used for sample platform of scanning electronic microscope lifting anticollision device, collision-prevention device |
| CN108326629A (en) * | 2018-03-27 | 2018-07-27 | 山东豪迈机械制造有限公司 | A kind of anticollision device, collision-prevention device and its application and probe protective device and lathe |
| CN108594415A (en) * | 2018-04-18 | 2018-09-28 | 上海天马有机发光显示技术有限公司 | A kind of micro objective anti-collision equipment and collision-proof method |
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