CN110307818A - A kind of ladder plan range and hole depth measuring device - Google Patents
A kind of ladder plan range and hole depth measuring device Download PDFInfo
- Publication number
- CN110307818A CN110307818A CN201910543366.6A CN201910543366A CN110307818A CN 110307818 A CN110307818 A CN 110307818A CN 201910543366 A CN201910543366 A CN 201910543366A CN 110307818 A CN110307818 A CN 110307818A
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- measurement
- slide damper
- measuring device
- measuring rod
- fixed baffle
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/18—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring depth
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention belongs to be machined measuring device technical field, more particularly to a kind of ladder plan range and hole depth measuring device, including measurement substrate, measuring rod, signal conditioner and computer, the two sides of the measurement substrate are respectively arranged with fixed baffle and slide damper, the slide damper is mobile close to or far from fixed baffle, and the latch assembly for locking positioning slide damper is provided on the slide damper；Running through on the measurement substrate has measured hole, the measuring rod slides through measured hole, the glide direction of the measuring rod is measurement end close to one end of fixed baffle perpendicular to measurement substrate, the measuring rod, and the measuring rod is provided with displacement sensor far from one end of fixed baffle；The signal conditioner is used to receive the signal of displacement sensor transmission, and carries out the amplification and filtering of signal, and the signal conditioner passes through data processor and the calculating mechatronics.
Description
Technical field
The invention belongs to be machined measuring device technical field more particularly to a kind of ladder plan range and hole depth to survey
Measure device.
Background technique
Higher and higher with user demand, the previous not high aspect of some pairs of measurement requests, which also started to improve, to be required, example
The distance and hole depth of such as ladder interplanar are not originally very high for the measurement request in terms of these, it is only necessary to use
Such as the typical measuring arrangements of vernier caliper one kind, as vernier caliper can use the distance of its depthometer measurement ladder interplanar with
And hole depth, but its precision does not often reach requirement, different operation personnel have measurement difference using vernier caliper measurement, lead
Cause measurement result different, but also the constraint by structure on workpiece, the inconvenient efficiency of measurement is lower, is not suitable for high-volume and examines
It surveys, and existing some measuring devices can reach requirement, as three-dimensional coordinates measurement can be measured accurately, and have very high
Precision, but its testing cost is high, is not suitable for mass detection.In order to improve the efficiency of detection, while cost can be reduced again,
Therefore, the present invention, which provides a kind of ladder plan range and hole depth measuring device, can overcome the problems, such as that presently, there are make measurement more
Increase effect, easy to operate, as a result accurately, the scope of application is wider, there is certain market promotion prospect.
Summary of the invention
Be not suitable for high-volume to solve the measuring device of detection ladder plan range and hole depth of the existing technology
The problem of detection, the present invention provide a kind of ladder plan range and hole depth measuring device.
In order to solve the above technical problems, the technical solution adopted in the present invention is as follows, a kind of ladder plan range and hole depth
Measuring device, including measurement substrate, measuring rod, signal conditioner and computer are spent, the two sides of the measurement substrate are respectively set
There are fixed baffle and slide damper, the slide damper is mobile close to or far from fixed baffle, is provided on the slide damper
Latch assembly for locking positioning slide damper；Through there is measured hole on the measurement substrate, the measuring rod is slid through
Measured hole, for the glide direction of the measuring rod perpendicular to measurement substrate, the measuring rod is measurement close to one end of fixed baffle
End, the measuring rod are provided with displacement sensor far from one end of fixed baffle；
The signal conditioner is used to receive the signal of displacement sensor transmission, and carries out the amplification and filtering of signal, institute
It states signal conditioner and passes through data processor and the calculating mechatronics.
Preferably, the quantity of the measured hole is two, length direction point of two measured holes along fixed baffle
Cloth.Traverse measurement substrate can be reduced and realize measurement of two cascaded surfaces relative to datum level distance, simplify measurement operation, improve
Measurement efficiency.
Preferably, the measuring rod is threadedly coupled with measured hole.Convenient for measuring rod relative to the sliding of measurement substrate and lock
Fastening position, simple and reliable for structure, it is convenient to operate, at low cost.
Further, dovetail groove is offered on the measurement substrate, is extended on the slide damper and is slided with dovetail groove
The dovetail slide block of cooperation.Sliding precision of the slide damper on measurement substrate is improved, the measurement accuracy of the measuring device is improved.
Further, the latch assembly includes lock-screw, and the lock-screw is threadedly coupled with slide damper, and institute
State glide direction of the lock-screw towards slide damper.The mechanism of latch assembly is simple and reliable, and it is convenient to operate, at low cost.
The utility model has the advantages that ladder plan range and hole depth measuring device of the invention, are utilized displacement sensor, signal tune
The new technologies detection mode such as device and data processor is managed, wherein the information of displacement sensor passes through signal conditioner and data processing
The processing of device is able to detect the distance of ladder plane and the depth in hole, compared with traditional technology, detection accuracy height, data
Accurately, compared with some other high-accuracy measuring instrument such as three-coordinates measuring machine, structure is simple, cost is relatively low, can use
In mass detection；Ladder plan range and hole depth measuring device of the invention, due to using sensing technology, measurement is more increased
Effect operates simpler, the saving more time；Ladder plan range and hole depth measuring device of the invention, works as datum plane
When there is ladder plane to be measured at both ends, the number that may be implemented to reduce disassembly measurement substrate measures two ladder planes relative to base
The distance of directrix plane greatly improves measurement efficiency, saves time of measuring；When measuring the depth of through-hole or stepped hole, only need
Original measuring device, which is carried out adjustment appropriate, just can be carried out measurement, is not required to re-replace measuring device, greatly simplifies operation
Process so that measurement is more efficient, while also reducing cost.
Detailed description of the invention
Stereochemical structure when Fig. 1 is the measurement ladder plan range of ladder plan range of the present invention and hole depth measuring device
Schematic diagram；
Another angle when Fig. 2 is the measurement ladder plan range of ladder plan range of the present invention and hole depth measuring device
Schematic perspective view；
Stereochemical structure signal when Fig. 3 is the measurement hole depth of ladder plan range of the present invention and hole depth measuring device
Figure；
Schematic cross-sectional view when Fig. 4 is the measurement hole depth of ladder plan range of the present invention and hole depth measuring device；
Fig. 5 is the measuring principle schematic diagram of ladder plan range of the present invention and hole depth measuring device；
In figure: 1, measuring substrate, 11, measured hole, 12, dovetail groove, 2, fixed baffle, 3, slide damper, 31, dovetail cunning
Block, 32, lock-screw, 4, measuring rod, 41, measurement end, 5, displacement sensor, 6, workpiece, 61, datum plane, 62, ladder plane,
63, stepped hole, 631, macropore, 632, aperture, 7, signal conditioner, 8, data processor, 9, computer.
Specific embodiment
Embodiment
As shown in Fig. 1~5, a kind of ladder plan range and hole depth measuring device, including measurement substrate 1, measuring rod 4,
The two sides of signal conditioner 7 and computer 9, the measurement substrate 1 are respectively arranged with fixed baffle 2 and slide damper 3, the cunning
Dynamic baffle 3 is mobile close to or far from fixed baffle 2, in order to improve measurement accuracy, offers dovetail groove on the measurement substrate 1
12, the dovetail slide block 31 being slidably matched with dovetail groove 12 is extended on the slide damper 3, is provided on the slide damper 3
For the latch assembly of locking positioning slide damper 3, specifically, the latch assembly includes lock-screw 32, the locking screw
Nail 32 is threadedly coupled with slide damper 3, and the lock-screw 32 is towards the glide direction of slide damper 3；The measurement substrate 1
Above through there is measured hole 11, the measuring rod 4 slides through measured hole 11, and the glide direction of the measuring rod 4 is perpendicular to measurement
Substrate 1, the measuring rod 4 are threadedly coupled with measured hole 11, and in order to improve measurement efficiency, the quantity of the measured hole 11 is two
A, two measured holes 11 are distributed along the length direction of fixed baffle 2, and the measuring rod 4 is close to one end of fixed baffle 2
Measurement end 41, the measuring rod 4 are provided with displacement sensor 5 far from one end of fixed baffle 2；
As shown in figure 5, the signal conditioner 7 is used to receive the electric signal of the transmission of displacement sensor 5, the signal condition
Device 7 is electrically connected by data processor 8 with the computer 9；Specifically, the signal conditioner 7 includes amplifying circuit and filter
Wave circuit can be amplified and be filtered to electric signal, and the signal conditioner 7 selects the signal condition of IEPE series
Device, by the electric signal transmission of conditioning to data processor 8, the output of the input terminal and signal conditioner 7 of the data processor 8
End electrical connection, output end and computer 9 electrical connection of the data processor 8, shows displacement sensor 5 by computer 9
Numerical value, the data processor 8 include A/D converter, and received electric signal is converted to digital signal by data processor 8, this
Sample computer 9 could directly handle received data.
As shown in figures 1-4, it is in convex that the workpiece for measurement 6 of the present embodiment is whole comprising protrudes position among workpiece 6
The datum plane 61 set, and through there is stepped hole in the ladder plane 62 of 6 both ends recessed position of workpiece, the workpiece 6
63, the stepped hole 63 includes sequentially connected macropore 631 and aperture 632.
The ladder plan range and the measuring process of hole depth measuring device are as follows:
(1) as depicted in figs. 1 and 2, distance of the detection ladder plane 62 relative to datum plane 61:
1. datum plane 61 upward, will measure the bottom of substrate 1 at this time firstly, workpiece for measurement 6 is placed in detection platform
Face is bonded with datum plane 61, and first measured hole 11 is located at the top of datum plane 61, and makes fixed baffle 2 and workpiece for measurement
6 side fitting, then slide damper 3 is slided to the direction of fixed baffle 2, when the other side of slide damper 3 and workpiece for measurement 6 is pasted
When conjunction, lock-screw 32 is tightened, workpiece for measurement 6 is clamped and positioned by slide damper 3 and the cooperation of fixed baffle 2 at this time；
2. turning measuring rod 4 still further below, stop turning measuring rod 4 when measurement end 41 is contacted with datum plane 61；It twists again
Loose lock-screw 32, after so that slide damper 3 is detached from workpiece for measurement 6,1 to the first measured hole of traverse measurement substrate 11 is located at first
The top of a ladder plane 62, and when second measured hole 11 is located at the top of datum plane 61, then keep the bottom of measurement substrate 1
Face is fitted on datum plane 61 and fixed baffle 2 is bonded with the side of workpiece for measurement 6, slide damper 3 and workpiece for measurement 6
The other side fitting, tighten lock-screw 32, at this time slide damper 3 and fixed baffle 2 cooperation by workpiece for measurement 6 clamp position；
3. continuation turns measuring rod 4 downwards, when measurement end 41 and first ladder plane 62 contact, stopping turns measurement
Bar 4, during being somebody's turn to do, displacement sensor 5 constantly issues electric signal, and signal conditioner 7 is amplified and filtered after receiving the electric signal
Wave processing, data processor 8, which receives the electric signal again and is converted to digital signal, passes to computer 9, and computer 9 is just continuously available
And record new numerical value, when measurement end 41 and ladder plane 62 contact, the data of 9 pairs of computer acquisitions compare and
Processing obtains the distance that first ladder plane 62 arrives datum plane 61；
4. again taking out measuring rod 4 from first measured hole 11, be screwed into second measured hole 11, repeat step 2.~
3. measuring the distance that second ladder plane 62 arrives datum plane 61.
(2) as shown in Figure 3 and Figure 4, the depth of stepped hole 63 is detected:
1. the end face of aperture 632 is bonded with measuring table at this time, greatly firstly, workpiece for measurement 6 is placed in detection platform
The end face in hole 631 upward, then by measure substrate 1 top surface be bonded with the end face of macropore 631, at this time fixed baffle 2 upward, first
A measured hole 11 is located at the top of 631 end face of macropore；
2. turning measuring rod 4 still further below, stop turning measuring rod 4 when measurement end 41 is contacted with 631 end face of macropore；It moves again
Dynamic measurement 1 to the first measured hole of substrate 11 is located at the top of the stepped locations of aperture 632；
3. continuation turns measuring rod 4 downwards, stop turning measurement when the stepped locations of measurement end 41 and aperture 632 contact
Bar 4, during being somebody's turn to do, displacement sensor 5 constantly issues electric signal, and signal conditioner 7 is amplified and filtered after receiving the electric signal
Wave processing, data processor 8, which receives the electric signal again and is converted to digital signal, passes to computer 9, and computer 9 is just continuously available
And new numerical value is recorded, when stepped locations that measurement end 41 passes through macropore 631 and aperture 632 contact, computer 9 is to obtaining
The data obtained are compared and are handled, and obtain the depth of macropore 631；
4. 1 to the first measured hole of traverse measurement substrate 11 is located at the top of aperture 632 again；Step is repeated 3., until surveying
Amount end 41 sequentially passes through macropore 631 and aperture 632 and when measuring table contacts, the data of 9 pairs of computer acquisitions compare and
Processing, obtains the total depth of stepped hole 63.
Claims (5)
1. a kind of ladder plan range and hole depth measuring device, it is characterised in that: including measurement substrate (1), measuring rod (4),
The two sides of signal conditioner (7) and computer (9), measurement substrate (1) are respectively arranged with fixed baffle (2) and slide damper
(3), the slide damper (3) is mobile close to or far from fixed baffle (2), is provided on the slide damper (3) for locking
Position the latch assembly of slide damper (3)；Through having measured hole (11) on the measurement substrate (1), the measuring rod (4) is slided
Across measured hole (11), the glide direction of the measuring rod (4) is perpendicular to measurement substrate (1), and the measuring rod (4) is close to fixed
One end of baffle (2) is measurement end (41), and the measuring rod (4) is provided with displacement sensor far from the one end of fixed baffle (2)
(5)；
The signal conditioner (7) is used to receive the signal of displacement sensor (5) transmission, and carries out the amplification and filtering of signal,
The signal conditioner (7) is electrically connected by data processor (8) with the computer (9).
2. ladder plan range according to claim 1 and hole depth measuring device, it is characterised in that: the measured hole
(11) quantity is two, and two measured holes (11) are distributed along the length direction of fixed baffle (2).
3. ladder plan range according to claim 1 or 2 and hole depth measuring device, it is characterised in that: the measurement
Bar (4) is threadedly coupled with measured hole (11).
4. ladder plan range according to claim 1 and hole depth measuring device, it is characterised in that: the measurement substrate
(1) it is offered on dovetail groove (12), the dovetail slide block being slidably matched with dovetail groove (12) is extended on the slide damper (3)
(31)。
5. ladder plan range according to claim 1 or 4 and hole depth measuring device, it is characterised in that: the locking
Component includes lock-screw (32), and the lock-screw (32) is threadedly coupled with slide damper (3), and the lock-screw (32)
Towards the glide direction of slide damper (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910543366.6A CN110307818B (en) | 2019-06-21 | 2019-06-21 | Step plane distance and hole depth measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910543366.6A CN110307818B (en) | 2019-06-21 | 2019-06-21 | Step plane distance and hole depth measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110307818A true CN110307818A (en) | 2019-10-08 |
| CN110307818B CN110307818B (en) | 2021-06-29 |
Family
ID=68076895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910543366.6A Active CN110307818B (en) | 2019-06-21 | 2019-06-21 | Step plane distance and hole depth measuring device |
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| Country | Link |
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| CN (1) | CN110307818B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114252042A (en) * | 2020-09-25 | 2022-03-29 | 上海微电子装备（集团）股份有限公司 | Mask table vertical measurement tool and mask table vertical measurement method |
| CN116164687A (en) * | 2023-04-26 | 2023-05-26 | 南京泰普森自动化设备有限公司 | Workpiece size measuring method and device |
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Cited By (3)
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| CN114252042A (en) * | 2020-09-25 | 2022-03-29 | 上海微电子装备（集团）股份有限公司 | Mask table vertical measurement tool and mask table vertical measurement method |
| CN114252042B (en) * | 2020-09-25 | 2023-12-22 | 上海微电子装备（集团）股份有限公司 | Mask table vertical measurement tool and mask table vertical measurement method |
| CN116164687A (en) * | 2023-04-26 | 2023-05-26 | 南京泰普森自动化设备有限公司 | Workpiece size measuring method and device |
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| Publication number | Publication date |
|---|---|
| CN110307818B (en) | 2021-06-29 |
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