CN110299416A - 一种太阳能电池的掺杂层表面钝化层结构及其制备方法 - Google Patents
一种太阳能电池的掺杂层表面钝化层结构及其制备方法 Download PDFInfo
- Publication number
- CN110299416A CN110299416A CN201910486159.1A CN201910486159A CN110299416A CN 110299416 A CN110299416 A CN 110299416A CN 201910486159 A CN201910486159 A CN 201910486159A CN 110299416 A CN110299416 A CN 110299416A
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- CN
- China
- Prior art keywords
- layer
- siox
- doped layer
- surface passivation
- silicon oxide
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- Pending
Links
- 238000002161 passivation Methods 0.000 title claims abstract description 64
- 238000002360 preparation method Methods 0.000 title claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 94
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 94
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 36
- 239000010703 silicon Substances 0.000 claims abstract description 36
- 238000009792 diffusion process Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- 239000011159 matrix material Substances 0.000 claims description 32
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 19
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 238000004140 cleaning Methods 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 8
- 230000003647 oxidation Effects 0.000 claims description 8
- 238000007254 oxidation reaction Methods 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 235000008216 herbs Nutrition 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- 210000002268 wool Anatomy 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 4
- 238000009790 rate-determining step (RDS) Methods 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000415 inactivating effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (11)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910486159.1A CN110299416A (zh) | 2019-06-05 | 2019-06-05 | 一种太阳能电池的掺杂层表面钝化层结构及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910486159.1A CN110299416A (zh) | 2019-06-05 | 2019-06-05 | 一种太阳能电池的掺杂层表面钝化层结构及其制备方法 |
Publications (1)
Publication Number | Publication Date |
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CN110299416A true CN110299416A (zh) | 2019-10-01 |
Family
ID=68027716
Family Applications (1)
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CN201910486159.1A Pending CN110299416A (zh) | 2019-06-05 | 2019-06-05 | 一种太阳能电池的掺杂层表面钝化层结构及其制备方法 |
Country Status (1)
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CN (1) | CN110299416A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111128697A (zh) * | 2019-12-12 | 2020-05-08 | 浙江爱旭太阳能科技有限公司 | 一种TopCon太阳能电池非原位磷掺杂的方法 |
CN111509054A (zh) * | 2019-10-22 | 2020-08-07 | 国家电投集团西安太阳能电力有限公司 | 一种topcon钝化结构及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011143449A2 (en) * | 2010-05-12 | 2011-11-17 | Applied Materials, Inc. | Method of manufacturing crystalline silicon solar cells using epitaxial deposition |
CN103236470A (zh) * | 2013-04-26 | 2013-08-07 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅太阳电池二氧化硅薄膜的制备方法 |
CN103887347A (zh) * | 2014-03-13 | 2014-06-25 | 中国东方电气集团有限公司 | 一种双面p型晶体硅电池结构及其制备方法 |
CN203812893U (zh) * | 2014-04-15 | 2014-09-03 | 苏州阿特斯阳光电力科技有限公司 | 一种n型背结太阳能电池 |
CN109802008A (zh) * | 2019-01-18 | 2019-05-24 | 江苏大学 | 一种高效低成本n型背结pert双面电池的制造方法 |
-
2019
- 2019-06-05 CN CN201910486159.1A patent/CN110299416A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011143449A2 (en) * | 2010-05-12 | 2011-11-17 | Applied Materials, Inc. | Method of manufacturing crystalline silicon solar cells using epitaxial deposition |
CN103236470A (zh) * | 2013-04-26 | 2013-08-07 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅太阳电池二氧化硅薄膜的制备方法 |
CN103887347A (zh) * | 2014-03-13 | 2014-06-25 | 中国东方电气集团有限公司 | 一种双面p型晶体硅电池结构及其制备方法 |
CN203812893U (zh) * | 2014-04-15 | 2014-09-03 | 苏州阿特斯阳光电力科技有限公司 | 一种n型背结太阳能电池 |
CN109802008A (zh) * | 2019-01-18 | 2019-05-24 | 江苏大学 | 一种高效低成本n型背结pert双面电池的制造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111509054A (zh) * | 2019-10-22 | 2020-08-07 | 国家电投集团西安太阳能电力有限公司 | 一种topcon钝化结构及其制备方法 |
CN111128697A (zh) * | 2019-12-12 | 2020-05-08 | 浙江爱旭太阳能科技有限公司 | 一种TopCon太阳能电池非原位磷掺杂的方法 |
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Effective date of registration: 20200824 Address after: 710099 589 East Chang'an Street, Xi'an Space Base, Shaanxi Province Applicant after: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Applicant after: Huanghe hydropower Xining Solar Power Co.,Ltd. Applicant after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Applicant after: Huanghe Hydropower Development Co., Ltd. Address before: 710099 589 East Chang'an Street, Xi'an Space Base, Shaanxi Province Applicant before: STATE POWER INVESTMENT CORPORATION XI'AN SOLAR POWER Co.,Ltd. Applicant before: XINING BRANCH OF SPIC XI'AN SOLAR POWER Co.,Ltd. Applicant before: Huanghe Hydropower Development Co., Ltd. Applicant before: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. |
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Application publication date: 20191001 |