CN110291380A - Optical profile type component sensor - Google Patents

Optical profile type component sensor Download PDF

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Publication number
CN110291380A
CN110291380A CN201880011371.6A CN201880011371A CN110291380A CN 110291380 A CN110291380 A CN 110291380A CN 201880011371 A CN201880011371 A CN 201880011371A CN 110291380 A CN110291380 A CN 110291380A
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CN
China
Prior art keywords
light
optical filter
receiving element
detection
optical
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CN201880011371.6A
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Chinese (zh)
Inventor
松浪弘贵
渡部祥文
马场徹
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Panasonic Intellectual Property Management Co Ltd
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Panasonic Intellectual Property Management Co Ltd
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Publication of CN110291380A publication Critical patent/CN110291380A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content

Abstract

Optical profile type component sensor (1) of the invention has: light source (21), issues the injection light (LR1) of the absorbing wavelength comprising being prescribed ingredient draws;Framework (10) stores light source;Light-projecting portion (22) projects light to the object (2) being located at outside framework;Sensitive lens (31) assembles the light reflected by object;First optical filter (32a), the light for the first wave length band in light that transmission sensitive lens is assembled, and reflect the light of second wave length band;Second optical filter (32b) transmits in the light of sensitive lens aggregation by the light of the second wave length band of the first filter reflection;First light receiving element (33a), is accommodated in framework, receives the detection light for having transmitted the first optical filter, and will test light and be converted into the first electric signal;Second light receiving element (33b), is accommodated in framework, receives the reference light for further being reflected by the first optical filter and being transmitted the second optical filter, and reference light is converted into the second electric signal.

Description

Optical profile type component sensor
Technical field
The present invention relates to a kind of optical profile type component sensors.
Background technique
In the past, there is known the photoelectric sensor in remote detection object can be differentiated (for example, referring to patent document 1).Reflective photoelectric sensor documented by patent document 1 has: light-projecting portion, and two different illumination of wavelength are mapped to inspection Survey object;Reflecting plate reflects any one light in two light;And acceptance part, receiving is by test object object or instead Penetrate the light of plate reflection.Detectable substance is able to know that by processing acceptance part output by optical signal according to reflective photoelectric sensor The presence or absence of body etc..
Citation
Patent document
Patent document 1: Japanese Unexamined Patent Publication 8-255533 bulletin
Summary of the invention
Problems to be solved by the invention
In the reflective photoelectric sensor documented by patent document 1, light-projecting portion, which has, makes consistent two, optical axis to shine Element, two light-emitting components configure in such a way that mutual outgoing plane becomes opposite direction.An institute in two light-emitting components The light of injection is projected by baffle reflection, and by projection lens to outside.Configured with luminous on the reflection direction of reflecting plate Element is blocked by the light of baffle reflection by light-emitting component, and the luminous energy projected to outside is reduced.The object of ingredient as a result, Detection accuracy reduces.
Therefore, the light projected to outside can be increased the purpose of the present invention is to provide one kind, steadily obtain reflected light Optical profile type component sensor.
The means solved the problems, such as
Optical profile type component sensor of the invention, has: light source, issues the absorption wave of the ingredient draws comprising being prescribed Long injection light;Framework stores the light source;Light-projecting portion projects light to the object for the outside for being located at the framework;By Optical lens assembles the light reflected by the object;First optical filter transmits the in the light of sensitive lens aggregation The light of one wavelength band, and reflect the light of second wave length band;Second optical filter transmits the institute in the light of the sensitive lens aggregation State the light of second wave length band;First light receiving element is accommodated in the framework, receives the inspection for having transmitted first optical filter Light is surveyed, and will test light and be converted into the first electric signal;And second light receiving element, it is accommodated in the framework, receives transmission The reference light of second optical filter, and reference light is converted into the second electric signal.
The effect of invention
According to the present invention, increase the light projected to outside, steadily obtain reflected light.
Detailed description of the invention
Fig. 1 is the schematic structural diagram for indicating the structure of optical profile type component sensor of embodiment.
Fig. 2 is the block diagram for indicating the functional structure of optical profile type component sensor of embodiment.
Fig. 3 is the figure for indicating the absorption spectrum of moisture and vapor.
Fig. 4 is the schematic structural diagram for indicating the structure of light projector optical module of embodiment.
Fig. 5 is the schematic structural diagram for indicating the structure of the variation 1 of optical profile type component sensor of embodiment.
Fig. 6 is the schematic structural diagram for indicating the structure of the variation 2 of light receiving optical system module of embodiment.
Specific embodiment
Hereinafter, being described in detail using optical profile type component sensor of the attached drawing to embodiments of the present invention.In addition, with The embodiment of lower explanation indicates a preferred concrete example of the invention.Therefore, numerical value shown in the following embodiments and the accompanying drawings, Shape, material, the configuration of constituent element and connection form, the sequence of step etc. are an examples, and the non-limiting meaning of the invention. Therefore, among the constituent elements in the following embodiments, be not recorded in the independence for indicating upper concept of the invention The constituent element of claim is illustrated as arbitrary constituent element.
In addition, each figure is schematic diagram, not strictly illustrate.Thus, for example, scale bar etc. may not be consistent in the various figures. In addition, in the various figures, marking identical appended drawing reference for substantially the same structure, repeat description being omitted or simplified.
(embodiment)
[summary]
Firstly, being illustrated to the summary of the optical profile type component sensor 1 of embodiment.
Optical profile type component sensor 1 is by the way that light beam (projecting light LR1) is irradiated to object 2, and accepting object object 2 Reflected light LR2 (reflection detection light LR21 and reflection reference light LR22), carry out the non-contact of the ingredient for including in test object object 2 The optical profile type component sensor of formula.In the present embodiment, as shown in Figure 1, the detection of optical profile type component sensor 1, which is located at, separates sky Between 3 and the moisture that includes in the object 2 at separate position.
Object 2 is clothing etc. in the absence of special restrictions.As the object 2 other than clothing, bed can be enumerated The beddings such as list, pillowcase.For example, being able to confirm that the dry of clothing by the way that optical profile type component sensor 1 is installed on clothesdrier etc. Dry situation.Thereby, it is possible to inhibit damage of the clothing generated because over-drying etc..
Space 3 is the space (free space) between optical profile type component sensor 1 and object 2, and includes moisture (water Steam).Space 3 is the exterior space of the framework 10 of optical profile type component sensor 1.
As shown in Figure 1, optical profile type component sensor 1 has framework 10, light projector optical module 20 and light optical module 30.Light projector optical module 20 has light source 21 and projection lens 22.In addition, light optical module 30 has sensitive lens 31, inspection Survey bandpass optical filter 32a, referring to bandpass optical filter 32b, detection light receiving element 33a and referring to light receiving element 33b.
In addition, in following this specification, on the basis of projection lens 22, by the direction (X-axis of figure of 21 irradiation light of light source Positive direction) it is set as " front ", opposite direction (the X-axis negative direction of figure) is set as " rear ".
In addition, as shown in Fig. 2, optical profile type component sensor 1 has control circuit 40 and signal processing circuit 50.
Hereinafter, each component of optical profile type component sensor 1 is described in detail.
[framework]
Framework 10 is to store the framework of light source 21.As shown in Figure 1, the inside of framework 10 be also accommodated with sensitive lens 31, Detection bandpass optical filter 32a, light receiving element is used referring to bandpass optical filter 32b, detection light receiving element 33a and reference 33b。
Framework 10 is formed by the material of light-proofness.Thereby, it is possible to inhibit exterior light to be injected into framework 10.Specifically, 10 couples of detection light receiving element 33a of framework and referring to the light received with light receiving element 33b have light-proofness.It is more specific and Speech, framework 10 have light-proofness for reflected light LR2 (reflection detection light LR21 and reflection reference light LR22), such as by resin Material or metal material are formed.
In addition, being equipped with opening on the outer wall of framework 10, projection lens 22 and sensitive lens 31 are installed in the opening.
[light projector optical module]
Light projector optical module 20 is the optical system for irradiating the light for detecting ingredient, has light source 21 and projection lens 22。
[light source]
Light source 21 is an example for issuing the light source of injection light LR1 of the absorbing wavelength comprising the ingredient as test object. Specifically, light source 21 issues the light comprising first wave length band and the light comprising second wave length band as injection light to object 2 LR1, the degree of being only absorbed by the water in the first wave length band are greater than specified value, and the degree of being only absorbed by the water in the second wave length band is providing Value is following.
Light source 21 be, for example, issue comprising constitute detection light first wave length band and constitute reference light second wave length band and Peak wavelength is located at LED (Light EmittingDiode) light source of continuous light of the second wave length with side.Specifically, light Source 21 is the LED light source being made of compound semiconductor.
Fig. 3 is the figure for indicating the absorption spectrum of moisture and vapor.As shown in figure 3, moisture is in about 1450nm peace treaty There is absorption peak at the wavelength of 1900nm.Vapor in the slightly lower wavelength of the absorption peak than moisture, specifically, about There is absorption peak at the wavelength of 1350nm~1400nm and about 1800nm~1900nm.
Therefore, as the first wave length band for constituting detection light, the wavelength band for selecting the absorbance of water high, as composition reference The second wave length band of light, the wavelength band for selecting the dulling luminosity ratio first wave length band of water small.Also, the mean wavelength of second wave length band It is longer than the mean wavelength of first wave length band.
In Fig. 3, the absorbance for illustrating vapor has peak value (the first peak value at the wavelength of about 1350nm~1400nm P1), there is the case where peak value (the second peak value P2) at the wavelength of about 1800nm~1900nm.For example, being with the first peak value P1 In the case where benchmark, the central wavelength of first wave length band is set as 1450nm, the central wavelength of second wave length band is set as The absorbance of vapor is less than the wavelength of specified value between one peak value P1 and the second peak value P2.Specifically, second wave length band Central wavelength is within 1.2 times of the central wavelength of first wave length band.The central wavelength of second wave length band is set as 1450nm Within × 1.2 ≈ 1740nm.Specifically, the central wavelength of second wave length band is set as 1700nm.
In this way, light source 21 irradiates the continuous light comprising first wave length band and second wave length band, therefore irradiates and examine to object 2 Light and reference light are surveyed, the detection light includes the big first wave length band of degree of being only absorbed by the water, and the reference light includes degree of being only absorbed by the water Less than first wave length band and almost without by the second wave length band of water vapor absorption degree.
Light source 21 is configured on the optical axis of light source 21 opposite with projection lens 22 in framework.
[projection lens]
Projection lens 22 are an examples for the light-projecting portion that the injection light LR1 for irradiating light source 21 is irradiated to object 2.
As illustrated in figure 1 or 4, the mode that projection lens 22 are for example located on the optical axis of light source 21 with focus is fixed on framework 10。
Projection lens 22 are made of the transparent synthetic resin such as acrylic acid, be shaped to injection direction width diameter gradually Widened shape i.e. substantially inverted cone mesa-shaped.Light source 21 is configured in the end of the X-axis negative direction of projection lens 22.Projection lens 22 are irradiated to the front of projection lens 22 by the injection light LR1 optically focused from light source 21 and as the light beam of some strength.
The peripheral wall 221 of projection lens 22 is shaped to from the end of the X-axis negative direction of projection lens 22 to front surface 222 outward The curve form that side slightly bloats.The front surface 222 of outgoing plane as projection lens 22 is formed as planar portions.In projection lens The end of 22 X-axis negative direction, is formed with recess portion 223 in a manner of ambient light source 21.It is convex that recess portion 223, which has in 21 side of light source, The bottom surface 223a of the shape and lateral circle surface 223b for being formed as surrounding bottom surface 223a.Lateral circle surface 223b is shaped to from projection lens 22 The cone-shaped that the end of X-axis negative direction forwards becomes narrow gradually aperture.Recess portion 223 becomes the thin substantially cylinder in front end as a result, Shape.
In addition, aperture/height/taper of recess portion 223 is according to the size of light source 21, corresponding to the material of projection lens 22 Refractive index and the size of shape and it is appropriately designed.
Enter the convex surface of bottom surface 223a to the light emission of the bottom surface 223a of recess portion 223 from the light that light source 21 projects and is understood Poly-, the straight ahead in projection lens 22 is irradiated by the front surface 222 of projection lens 22 to object 2.
In addition, from light source 21 project light in the light of the lateral circle surface 223b of recess portion 223 relative to lateral circle surface 223b with The corresponding angle of total reflection of the refractive index of projection lens 22 angle below injects projection lens 22.Throwing is injected into from lateral circle surface 223b Light in optical lens 22 is totally reflected relative to the peripheral wall 221 of projection lens 22 with the angle more than angle of total reflection, passes through light projector Lens 22 are irradiated from front surface 222 to object 2.At this point, the injection light LR1 projected from projection lens 22 becomes roughly parallel light And irradiation object object 2.
Projection lens 22 are by being set as convex form for the bottom surface 223a of recess portion 223, to pass through the bottom surface 223a of recess portion 223 Light assembled to a certain degree on the convex form face and from front surface 222 irradiate.Thereby, it is possible to desired test object object 2 In the test object region RA1 of moisture content irradiate more light quantity (that is, intensity), can be improved light reception sensitivity.
In addition, though by the front surface 222 of projection lens 22 as planar portions, but can also only outer peripheral portion be plane Portion, central part are convex lens shape.As a result, recess portion 223 bottom surface 223a assemble light in front surface 222 also assemble and to Object 2 irradiates, therefore can irradiate more light quantities to test object region RA1, can be improved light reception sensitivity.
[light optical module]
As depicted in figs. 1 and 2, light optical module 30 is to receive the injection light LR1 from the injection of light source 21 on object 2 A part in the light of reflection carries out the optical system of the measurement of moisture content.Light optical module 30 has sensitive lens 31, detection bandpass optical filter 32a, reference are with bandpass optical filter 32b, detection light receiving element 33a and referring to first with light Part 33b.
[sensitive lens]
Sensitive lens 31 is reflected light LR2 (reflection detection light LR21 and the reflection reference for will be reflected by object 2 Light LR22) it is concentrated on detection light receiving element 33a and an example referring to the sensitive lens with light receiving element 33b.Sensitive lens 31 be, for example, collector lens.Sensitive lens 31 configures on the optical axis in detection with light receiving element 33a, is located at focus and is used than detection The mode of the remote position of the light-receiving surface of light receiving element 33a is fixed on framework 10.Sensitive lens 31 is resin in the present embodiment The convex lens of system, but not limited to this.
[detection bandpass optical filter]
Detection is the reflection detection light LR21 transmitted in the reflected light LR2 that sensitive lens 31 is assembled with bandpass optical filter 32a And make its injection detection light receiving element 33a, and the first optical filter of the light of the wavelength band other than reflective detection light LR21 An example.
In the present embodiment, as shown in Figure 1, detection bandpass optical filter 32a is arranged in sensitive lens 31 and detection use Between light receiving element 33a, on the optical axis of reflection detection light LR21, it is arranged obliquely relative to sensitive lens 31.As long as at this point, Reflecting reference light LR22 can reflect in detection bandpass optical filter 32a and inject to referring to light receiving element 33b, and band is used in detection The inclined direction of logical optical filter 32a, angle are unlimited.
By the configuration, the light transmission for the peak wavelength that detection uses bandpass optical filter 32a to make as reflection detection light LR21, And make the light reflection for reflecting the peak wavelength band other than detection light LR21.
Detection bandpass optical filter 32a is for example configured to by being stacked by SiO2The refractive index of equal formation is different Dielectric film and reflect.
[referring to bandpass optical filter is used]
Reference is that the light injected referring to the reflection reference light LR22 with light receiving element 33b is arranged in bandpass optical filter 32b An example of second optical filter of road.
In the present embodiment, as shown in Figure 1, being arranged referring to bandpass optical filter 32b in detection bandpass optical filter 32a And referring to between light receiving element 33b, the optical axis relative to reflection reference light LR22 is generally perpendicularly configured.
As long as in addition, so as to becoming the peak of reflection reference light LR22 in the light reflected by detection bandpass optical filter 32a The mode of value wavelength band transmissive is configured referring to bandpass optical filter 32b is used, and reference can with the setting angle of bandpass optical filter 32b To be suitably designed change.
Reference bandpass optical filter 32b only Transflective reference light LR22, and absorption or reflective detection light LR21. Therefore, detection light LR21 referenced bandpass optical filter 32b absorption or reflection are reflected, barely uses light receiving element up to reference 33b。
[detection light receiving element]
Detection is an example of the first light receiving element with light receiving element 33a, and first light receiving element receives anti-by object 2 The reflection detection light LR21 of detection bandpass optical filter 32a has been transmitted in at least part for the light penetrated i.e. reflected light LR2.Detection With light receiving element 33a by carrying out photoelectric conversion to the reflection detection light LR21 received, to generate and reflection detection light The corresponding electric signal of light income (that is, intensity) detects signal.Detection signal generated is output to signal processing circuit 50.
Detection preferably has sufficiently strong light sensitive the peak wavelength of reflection detection light LR21 with light receiving element 33a Degree.Therefore, detection light receiving element 33a can receive to reflect detection light LR21, and generate electric signal corresponding with light income (inspection Survey signal).
Detection is accommodated in framework 10 with light receiving element 33a.Detection configures the light in sensitive lens 31 with light receiving element 33a On axis, on optical axis, as shown in Figure 1, being configured to the focal position than sensitive lens 31 by 31 side of sensitive lens.That is, set by Optical lens 31 and detection are d with the distance of light receiving element 33a1, sensitive lens 31 focal length be f1In the case where, it is each configured to Meet 0 < d1< f1
It is formed with region RA2 as a result, the region RA2 does not form focus on the surface of sensitive lens 31, advises as having The diffusion light of fixed radius of curvature and be taken into reflected light LR2 (reflection detection light LR21 and reflection reference light LR22).Spread light Radius of curvature is bigger, then the region RA2 for being taken into reflected light LR2 (reflection detection light LR21 and reflection reference light LR22) is wider, instead Penetrate light LR2 (reflection detection light LR21 and reflect reference light LR22) to be taken into rate bigger.That is, can expand by optical range.
At this point, it is preferred that be taken into the region of reflected light LR2 (reflection detection light LR21 and reflection reference light LR22) with detection The mode of at least part overlapping of subject area RA1 is irradiated to object 2.
Detection is, for example, photodiode with light receiving element 33a, but not limited to this.For example, detection light receiving element 33a It can be phototransistor or imaging sensor.In addition, detection light receiving element 33a and referring to can also be with light receiving element 33b Utilize the different zones of an imaging sensor.
[referring to light receiving element is used]
Referring to an example for light receiving element 33b being the second light receiving element, second light receiving element receives anti-by object 2 It is reflected in at least part for the light penetrated i.e. reflected light LR2 by detection bandpass optical filter 32a and has transmitted reference and filtered with band logical The reflection reference light LR22 of light device 32b.Reference is with light receiving element 33b by carrying out photoelectricity to the reflection reference light LR22 received Conversion generates the contrast signal as electric signal corresponding with the reflection light income of reference light LR22.The contrast signal quilt of generation It is output to signal processing circuit 50.
Reflection reference light LR22 is the light for projecting light LR1 and being reflected by object 2.In the present embodiment, reference light is reflected The peak wavelength of LR22 is measured as about 1570nm.
Reference is accommodated in framework 10 with light receiving element 33b.Reference light of the light receiving element 33b relative to sensitive lens 31 Axis configures substantially in parallel.Referring to light receiving element 33b is used on the optical axis of reflection reference light LR22, with the focal position ratio of light Light-receiving surface is configured close to reference with the mode of the side bandpass optical filter 32b.That is, setting sensitive lens 31 and referring to using light receiving element The distance of 33b is d2, sensitive lens 31 focal length be f2In the case where, it is each configured to meet 0 < d2< f2
Reference is, for example, photodiode with light receiving element 33b, but not limited to this.For example, referring to light receiving element 33b It can be phototransistor or imaging sensor.
[control circuit]
The injection light LR1 of the control light source 21 of control circuit 40.Specifically, control circuit 40 can independently control light source 21 luminous and extinguishing.
For example, control circuit 40 makes light source 21 shine.Specifically, control circuit 40 sends out light source 21 with impulse waveform Light.For example, control circuit 40 is by the output of pulse signal of assigned frequency (such as 1kHz) to light source 21.For example, being light source 21 Duty ratio is 50% pulse signal below.
Although being not shown in Fig. 1, control circuit 40 can be accommodated in framework 10, or can also be installed on framework 10 lateral surface.Alternatively, control circuit 40 also can have the communication functions such as wireless communication, the pulse signal of control is sent To light source 21.
Control circuit 40 is for example made of driving circuit and microcontroller.Control circuit 40 has the control for being stored with light source The nonvolatile memory of program, the volatile memory as the temporary storage area for executing program, input/output terminal Mouth, the processor for executing program etc..
[signal processing circuit]
Signal processing circuit 50 is based on the detection corresponding with reflection detection light LR21 exported from detection with light receiving element 33a Signal and the contrast signal corresponding with reflection reference light LR22 exported from reference with light receiving element 33b, computing object object 2 wrap The ingredient contained.Specifically, signal processing circuit 50 based on detection signal voltage level and contrast signal voltage level it Carry out the moisture content that test object object 2 is included than (energy ratio).It, will about detection (calculating) method of specific moisture content It is explained below.
Signal processing circuit 50 can be accommodated in framework 10, or can be installed on the lateral surface of framework 10.Alternatively, signal Processing circuit 50 also can have the communication functions such as wireless communication, and reception carrys out self-test light receiving element 33a and light is used in reference The output signal of element 33b.
Signal processing circuit 50 is, for example, microcontroller.Signal processing circuit 50 has the non-easy of storage signal handler The property lost memory, input/output port, executes program at the volatile memory as the temporary storage area for executing program Processor etc..
[signal processing (detection processing)]
Then, the signal processing of signal processing circuit 50 (calculation processing of ingredient) is illustrated.
In the present embodiment, luminous energy Pd and reflection reference of the signal processing circuit 50 by comparing reflection detection light LR21 The luminous energy Pr of light LR22, carrys out the component content for including in test object object 2.In addition, luminous energy Pd with from detection light receiving element 33a The intensity of the detection signal of output is corresponding, and luminous energy Pr is corresponding with the intensity of contrast signal exported from reference with light receiving element 33b.
Injecting detection is indicated with the luminous energy Pd of the reflection detection light LR21 of light receiving element 33a with following (formula 1).
(formula 1) Pd=Pd0 × Gd × Rd × Td × Aa × Ivd
Here, Pd0 is the luminous energy of the injection light LR1 issued from light source 21.Gd is the phase for the injection light LR1 that light source 21 issues For the coupling efficiency (concentration ratio) of detection light receiving element 33a.Specifically, Gd, which is equivalent to project, becomes right in light LR1 As the ratio of the part of a part (that is, reflection detection light LR21) of the irreflexive ingredient of object 2.
Rd is the reflectivity of the injection light LR1 of object 2.Td is the reflection detection light of detection bandpass optical filter 32a The transmissivity of LR21.Ivd is light reception sensitivity of the detection light receiving element 33a to reflection detection light LR21.
Aa is the absorptivity for projecting light LR1 and reflecting detection light LR21 for the ingredient (moisture) for including in object 2, under (formula 2) in face indicates.
(formula 2) Aad=10-α×C×D
Here, α is predetermined absorptivity, specifically, being injection light LR1 and the reflection detection of ingredient (moisture) The absorptivity of light LR21.C is the volumetric concentration for the ingredient (moisture) for including in object 2.D is effect thickness, and the effect is thick Degree contributes to project 2 times of the thickness of the ingredient of the absorption of light LR1 and reflection detection light LR21.
More specifically, in the object 2 that moisture disperses in heterogeneity, light emission enter object 2 and it is internally reflected and In the case where the injection of object 2, C is equivalent to the volumetric concentration in the ingredient of object 2 included.In addition, D is equivalent in inside Reflection and from object 2 project until optical path length.For example, being cancellous solid content or the sponges such as fiber in object 2 In the case where porous solid content, it is assumed that surface reflection of the light in solid content.In this case, for example, C is that covering is solid The concentration for the moisture for including in the liquid phase of shape object.In addition, D is the average thickness of the liquid phase as covering solid content and the work that converts Use thickness.
Therefore, α × C × D is equivalent to the component content (moisture content) in object 2 included.
Equally, the luminous energy Pr injected referring to the reflection reference light LR22 with light receiving element 33b is indicated with following (formula 3).
(formula 3) Pr=Pr0 × Gr × Rr × Tr × Ivr
In the present embodiment, according to the suction of the detection light of the first wave length band for the ingredient (moisture) for including in object 2 Receive the absorptivity Aad that moisture is found out with the difference of the absorption of the reference light of second wave length band.In addition, due to can be considered reflection reference light The ingredient draws that LR22 is not substantially included in object 2, therefore it is found that absorptivity Aa phase with moisture compared with (formula 1) When light be not included in (formula 3).
In (formula 3), Pr0 is the luminous energy for the injection light LR1 that light source 21 issues.Gr is the injection light LR1 that light source 21 issues Relative to referring to the coupling efficiency (concentration ratio) for using light receiving element 33b.Specifically, Gr, which is equivalent to project, becomes quilt in light LR1 The ratio of the part of a part (that is, reflection reference light LR22) of the irreflexive ingredient of object 2.
Rr is the reflectivity of the injection light LR1 of object 2.Tr is referring to the reflection reference light for using bandpass optical filter 32b The transmissivity of LR22.Ivr is referring to the light reception sensitivity with light receiving element 33b to reflection reference light LR22.
In the present embodiment, since detection is with the injection light LR1 in light receiving element 33a and referring to light receiving element 33b In injection light LR1 be same light, so coupling efficiency Gd and coupling efficiency Gr are roughly equal.Further, since peak wavelength Relatively, so reflectivity Rd and reflectivity Rr are roughly equal.
Therefore, by the ratio between acquirement (formula 1) and (formula 3), following (formula 4) is exported.
(formula 4) Pd/Pr=Z × Aad
Here, Z is constant term, indicated by (formula 5).
(formula 5) Z=(Pd0/Pr0) × (Td/Tr) × (Ivd/Ivr)
Luminous energy Pd0 and Pr0 respectively as light source 21 it is initial output and predefine.In addition, reflection detection light LR21 The transmissivity Tr of transmissivity Td and reflection reference light LR22 use bandpass filter according to detection bandpass optical filter 32a and reference respectively The transmissison characteristic of device 32b and predefine.Reflect the light of the light reception sensitivity Ivd and reflection reference light LR22 of detection light LR21 Sensitivity I vr is respectively according to detection with light receiving element 33a and referring to being predefined by light characteristic with light receiving element 33b.Cause This, can be regarded as constant by the Z that (formula 5) indicates.
Signal processing circuit 50 calculates the luminous energy Pd of reflection detection light LR21 based on detection signal, is calculated based on contrast signal Reflect the luminous energy Pr of reference light LR22.Specifically, the signal level (voltage level) of detection signal is equivalent to luminous energy Pd, reference The signal level (voltage level) of signal is equivalent to luminous energy Pr.
Therefore, signal processing circuit 50 can be based on the absorptivity Aa for the moisture for including in (formula 5) computing object object 2.By This, signal processing circuit 50 can calculate moisture content based on (formula 2).
[summary]
As described above, the optical profile type component sensor 1 of present embodiment has: light source 21, issuing includes to be prescribed The injection light LR1 of the absorbing wavelength of ingredient draws;Framework 10 stores light source 21;Light-projecting portion (projection lens 22), to positioned at framework The object 2 of 10 outside projects light;Sensitive lens 31 assembles the light reflected by object 2;First optical filter (detection band Logical optical filter 32a), the light for the first wave length band in light that transmission sensitive lens 31 is assembled, and reflect the light of second wave length band;The Two optical filters (referring to bandpass optical filter 32b is used), the light for the second wave length band in light that transmission sensitive lens 31 is assembled;First by Optical element (detection light receiving element 33a), is accommodated in framework 10, receives the detection light for having transmitted the first optical filter, and convert For the first electric signal;Second light receiving element (referring to light receiving element 33b is used), is accommodated in framework 10, receiving has transmitted the second filter The reference light of light device, and be converted to the second electric signal.
As a result, compared with the case where using two light optical modules, the amount of received reflected light can be increased, separately Outside, it can reduce the fluctuation of the amount of reflected light, therefore can steadily carry out light.Moreover, being able to suppress because of sensitive lens The worry of wavelength change caused by deteriorating, can accurately detect ingredient.
In addition, ingredient is preferably moisture.
The moisture that thereby, it is possible to include in accurately test object object 2.
(variation 1)
In the above-described embodiment, optical profile type component sensor 1 is also possible to also have pellicle mirror 34 in framework 10 Structure.In addition, in the following description, marking identical appended drawing reference to part identical with above embodiment sometimes and saving Slightly its explanation.
Specifically, as shown in figure 5, the setting of pellicle mirror 34 in sensitive lens 31 and detection between light receiving element 33a, position In on the optical axis of reflection detection light LR21, it is arranged obliquely relative to sensitive lens 31.At this point, detection is existed with bandpass optical filter 32a On the optical axis of reflected light LR2 and reflection detection light LR21, configured in the mode substantially vertical relative to optical axis.
Pellicle mirror 34 by transmission and reflective object object 2 reflect reflected light LR2, thus project reflection detection light LR21 and Reflect reference light LR22.Specifically, the reflected light LR2 that directly (the not changing direction of travel substantially) transmission of pellicle mirror 34 is injected A part, and make remaining smooth mirror-reflection.Reflect to such as substantially 1:1 of pellicle mirror 34 and transmit the light injected.That is, semi-transparent Mirror 34 make inject reflected light LR2 light beam 50% reflection detection light LR21 and 50% reflection reference light LR22 injection and Reflection.Later, in the light for having transmitted pellicle mirror 34, only reflect detection light LR21 transmit detection bandpass optical filter 32a, and by It is oriented to detection light receiving element 33a.In addition, only reflecting reference light LR22 transmission reference in the light that pellicle mirror 34 reflects and using band Logical optical filter 32b, and be directed to referring to light receiving element 33b is used, thus carry out the measurement of ingredient.
Pellicle mirror 34 is, for example, to be formed with the translucency of the reflective films such as metallic film or multilayer dielectric film on surface Plate.As the plate of translucency, such as use the glass materials such as transparent soda-lime glass or acrylic acid (PMMA), poly- carbon The transparent resin materials such as acid esters (PC) and formed.Metallic film is using metal materials such as aluminium, with anti-with transmitance and light The degree of penetrating property is compared with the film thinly formed.
Thereby, it is possible to make, reflected light LR2 is concentrated on detection light receiving element 33a with aliquot and light receiving element is used in reference 33b, therefore the detection of ingredient can be accurately proceed.
(variation 2)
In the above-described embodiment, optical profile type component sensor 1 can also each light receiving element and bandpass optical filter it Between have collector lens 35a, 35b.In this case, detection has been transmitted to filter with bandpass optical filter 32a and reference with band logical The light of light device 32b is assembled by collector lens 35a, 35b respectively, and is detected and uses light receiving element with light receiving element 33a and reference 33b receives.
Specifically, as shown in fig. 6, detection distinguishes maintained portion with light receiving element 33a and referring to light receiving element 33b 36a, 36b are kept.It is located at the detection side bandpass optical filter 32a and referring to bandpass optical filter 32b in maintaining part 36a, 36b On the face of side, configuring oriented bandpass optical filter side becomes collector lens 35a, 35b of convex form.Detection bandpass filter is transmitted Device 32a and injected referring to the light of bandpass optical filter 32b to collector lens 35a, 35b, and again by collector lens 35a and 35b aggregation.
Therefore, expanded by the injection face of collector lens 35a, 35b light, the light quantity that can assemble becomes more, therefore can be with More light quantities measure.
In addition, the light for 34 transmission or reflections of bandpass optical filter and pellicle mirror being made of multilayer dielectric film, due to Central wavelength is easy to change dependent on incidence angle, and therefore, it is difficult to carry out high-precision measurement.As described above, passing through setting optically focused Lens 35a, 35b, in the further optically focused in the inside of collector lens 35a, 35b, can only make desired wavelength band efficiently by Light.
Collector lens 35a, 35b are for example formed by transparent resin material.In addition, maintaining part 36a, 36b is also by saturating with optically focused The identical transparent resin material of mirror 35a, 35b is formed, therefore, inject collector lens 35a, 35b light optical path do not reflect and by It is directed to each light receiving element.
(other)
More than, optical profile type component sensor 1 of the invention is carried out based on above-mentioned embodiment and its variation Illustrate, but the present invention is not limited to above-mentioned embodiment and variations.
For example, the injection face of light is set as convex curved surface by projection lens 22, but not limited to this, it is also possible to planar or recessed Shape curved surface.If making the Curvature varying of horizontal direction must be bigger than vertical direction, the variation of horizontal direction can be larger corresponded to, Therefore in the case where wishing that the horizontal field of view angle of picture is greater than vertical field of view angle, glancing incidence angle is greater than the feelings at vertical incidence angle Under condition especially effectively.
In addition, the first light receiving element and the second light receiving element are respectively detection light receiving element, referring to light receiving element, but The configuration of detection light receiving element and reference light receiving element may be reversed.At this point, correspondingly, bandpass optical filter is matched It sets and is also replaced.
In addition, for example, in the above-described embodiment, optical profile type component sensor 1 detects moisture as including in object 2 Ingredient, but not limited to this.For example, optical profile type component sensor 1 also can detecte alcohol or oil.For example, optical profile type ingredient Sensor 1 can irradiate the detection light comprising the absorbing wavelength based on the alcohol for becoming test object and not included to object 2 The reference light of absorbing wavelength based on alcohol.
Alternatively, it is also possible to which both variation 1 and variation 2 are combined in above embodiment to come as a mode Implement.
In addition, to each embodiment implement those skilled in the art it is conceivable that various modifications obtained from mode, Without departing from the spirit and scope of the invention in each embodiment constituent element and function carry out any combination and reality Existing mode is also included in the present invention.
The explanation of appended drawing reference
1 optical profile type component sensor
2 objects
10 frameworks
20 light projector optical modules
21 light sources
22 projection lens (light-projecting portion)
30 light optical modules
31 sensitive lens
Bandpass optical filter (the first optical filter) is used in 32a detection
Bandpass optical filter (the second optical filter) is used in 32b reference
Light receiving element (the first light receiving element) is used in 33a detection
Light receiving element (the second light receiving element) is used in 33b reference
34 pellicle mirrors
40 control circuits
50 signal processing circuits
Claims (according to the 19th article of modification of treaty)
A kind of (1. after modification) optical profile type component sensor, wherein have:
Light source issues the injection light of the absorbing wavelength of the ingredient draws comprising being prescribed;
Framework stores the light source;
Light-projecting portion projects light to the object for the outside for being located at the framework;
Sensitive lens assembles the light reflected by the object;
First optical filter, transmits the light of the first wave length band in the light of the sensitive lens aggregation, and reflects second wave length band Light;
Second optical filter transmits the light of the second wave length band in the light of the sensitive lens aggregation;
First light receiving element is accommodated in the framework, receives the detection light for having transmitted first optical filter, and will test Light is converted into the first electric signal;And
Second light receiving element is accommodated in the framework, receives to have transmitted the reference light of second optical filter, and by reference Light is converted into the second electric signal,
The first light receiving element configuration is configured to the focal position than the sensitive lens on the optical axis of the sensitive lens Closer to the sensitive lens side.
2. optical profile type component sensor according to claim 1, wherein
Pellicle mirror is also equipped with,
The light of the sensitive lens aggregation is injected to the pellicle mirror,
The first optical filter described in the light transmission of the first wave length band in the light of the pellicle mirror is transmitted and by the first light Element receives,
Second optical filter described in the light transmission of the second wave length band in the light of pellicle mirror reflection and by described second by Optical element receives.
3. optical profile type component sensor according to claim 1 or 2, wherein
Each light of first optical filter and second optical filter has been transmitted by collector lens focus and by first light Element and second light receiving element receive.
4. optical profile type component sensor described in any one of claim 1 to 3, wherein
The ingredient is moisture.

Claims (4)

1. a kind of optical profile type component sensor, wherein have:
Light source issues the injection light of the absorbing wavelength of the ingredient draws comprising being prescribed;
Framework stores the light source;
Light-projecting portion projects light to the object for the outside for being located at the framework;
Sensitive lens assembles the light reflected by the object;
First optical filter, transmits the light of the first wave length band in the light of the sensitive lens aggregation, and reflects second wave length band Light;
Second optical filter transmits the light of the second wave length band in the light of the sensitive lens aggregation;
First light receiving element is accommodated in the framework, receives the detection light for having transmitted first optical filter, and will test Light is converted into the first electric signal;And
Second light receiving element is accommodated in the framework, receives to have transmitted the reference light of second optical filter, and by reference Light is converted into the second electric signal.
2. optical profile type component sensor according to claim 1, wherein
Pellicle mirror is also equipped with,
The light of the sensitive lens aggregation is injected to the pellicle mirror,
The first optical filter described in the light transmission of the first wave length band in the light of the pellicle mirror is transmitted and by the first light Element receives,
Second optical filter described in the light transmission of the second wave length band in the light of pellicle mirror reflection and by described second by Optical element receives.
3. optical profile type component sensor according to claim 1 or 2, wherein
Each light of first optical filter and second optical filter has been transmitted by collector lens focus and by first light Element and second light receiving element receive.
4. optical profile type component sensor described in any one of claim 1 to 3, wherein
The ingredient is moisture.
CN201880011371.6A 2017-02-27 2018-02-15 Optical profile type component sensor Pending CN110291380A (en)

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