CN1102886A - Optical waveguide module and method of manufacturing the same - Google Patents
Optical waveguide module and method of manufacturing the same Download PDFInfo
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- CN1102886A CN1102886A CN 94105823 CN94105823A CN1102886A CN 1102886 A CN1102886 A CN 1102886A CN 94105823 CN94105823 CN 94105823 CN 94105823 A CN94105823 A CN 94105823A CN 1102886 A CN1102886 A CN 1102886A
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Abstract
An optical waveguide module according to the present invention comprises an optical waveguide substrate having an optical waveguide formed therein, an optical waveguide holder for mounting the optical waveguide substrate thereon, an optical fiber connector supporting an optical fiber therein, and an optical fiber holder for mounting the optical fiber connector thereon, the end faces of the optical waveguide holder and the optical fiber holder are brought into contact with each other while aligning the optical waveguide and the optical fiber, the end faces of the optical waveguide substrate and the optical fiber connector are bonded at least partially through a gap, and a hardening matching agent having a refractive index matching with those of the optical waveguide and the optical fiber is filled in the gap. Therefore, the optical waveguide and the optical fiber do not wear out or are damaged when alignment is performed, and stable coupling characteristics can be obtained by the sufficiently filled hardening matching agent.
Description
The present invention relates to a kind of optical waveguide module and manufacture method thereof.It is used for optical communication net or similar site, by connecting optical waveguide bearing and optic fibre adminiculum manufacturing.
In recent years,, wish very much to realize being connected of single-mode transmission optical fiber (hereinafter single-mode fiber) slightly and optical waveguide along with the progress of optical communication, optical information processing or similar techniques, thus optically coupled circuit or optics branch road that formation has high reliability.In this case, a few approximately μ m of the diameter of single-mode optics fibre core are to 10 μ m.Thereby when single-mode fiber was connected with optical waveguide, the skew of relative position must be below 1 μ m, to prevent the increase of junction loss between them.
Usually, when optical waveguide links to each other with single-mode fiber, when being aligned, its relative position also to monitor junction loss.The surface of contact of the bearing of supporting optical waveguide is near the location of the surface of contact that supports optic fibre adminiculum with acquisition junction loss minimum.Butted part between two bearings is fixed by bonding or laser bonding.Coupling part between optical waveguide and optical fiber uses refractive index matched agent (agent) (as coupling (matching) oil) to prevent reflection of light.
In the conventional optical waveguide module, the both sides of the joints of optical fibre that link to each other with optical fiber and optical waveguide substrate are coupled by refractive index matched agent, and this substrate has the optical waveguide as 1 * 8 branch road.This optical waveguide substrate is fixed on the stainless optical waveguide bearing, and the cross section of this bearing is roughly U-shaped.Each joints of optical fibre is installed on the stainless steel optic fibre adminiculum in cross section that a bottom surface and is roughly U-shaped.
A single-mode fiber that removes covered section is embedded in the joints of optical fibre.Removing a plurality of single-mode fibers that covered section and link partly intercouple is embedded in another joints of optical fibre.Butted part between optical waveguide bearing and optic fibre adminiculum is bonding or use the YAG(yttrium aluminum garnet with ultraviolet) laser instrument spot welding formation.Utilize in this structure, the optical waveguide of optical waveguide substrate, be divided into 8 bundles and be transferred to 8 optical fiber that link to each other with other joints of optical fibre from the light of the optical fiber input that links to each other with joints of optical fibre.
In this optical waveguide module, the end face of bearing of the end face of optical waveguide and supporting optical waveguide, or the end face of the end face of optical fiber and the bearing of supporting optical fiber is polished, these end faces are aligned to form the plane.For this reason, when the end face of optical waveguide and optical fiber joins when adjusting the position of optical waveguide and fiber orientation, the optics coupling part between them just is worn or is damaged so that cause the increase of junction loss.
In addition, refractive index matched agent only is filled in the very little gap that forms between optical waveguide substrate, the joints of optical fibre and bearing surface of contact thereof.In this case, thus refractive index matched agent can flow out with the variation of temperature or conditions of similarity and make optically-coupled characteristic instability.
For addressing the above problem, in Japanese patent application 4-58116 number (unexposed) in first to file according to the applicant, the end face of the optical waveguide substrate or the joints of optical fibre retreats to obtain to be used for filling the space of refractive index matched agent from the end face of its bearing.Yet, in Japanese patent application 4-58116, these elements must fix like this make the optical waveguide substrate or the joints of optical fibre end face retreat-preset distance from the end face of its bearing, this causes assembling complicated.
In addition, Jap.P. postpones among the open 4-355413 in the disclosed structure, in the coupling part or the side of the bearing of optical waveguide and optic fibre adminiculum form a waterproof covering, thereby prevent degeneration by damp and hot each optics that causes.Yet Jap.P. postpones among the open 4-355413, and when optical waveguide and optical fiber were aligned, connecting portion branch therebetween was impaired.
In addition, in ultraviolet was bonding, the UV-cured resin of flow-like (curing resin) material was applied to butted part between optical waveguide bearing and optic fibre adminiculum with bonding two elements.But, can shrink during the hardening of ultraviolet resin material.Therefore, thus the optical waveguide substrate and the joints of optical fibre depart from the optical axis that causes between optical waveguide and optical fiber not to collimate.Yet the alignment precision that connects owing to optical fiber must remain in the 0.1 μ m, so the uncollimated problem of optical axis can not be ignored.
On the other hand, when adopting the welding of YAG laser instrument, as, four parts of the two sides of optical waveguide bearing and optic fibre adminiculum butted part are soldered.When these welding portions were welded, the thermal stress of generation made the optical waveguide substrate be offset more on the direction vertical with interface with the joints of optical fibre.This welding portion that moves at every especially easily becomes inhomogeneous.Therefore the optical waveguide substrate and the joints of optical fibre fixedly is insecure, simultaneously, is prone to optical axis and does not collimate.
For overcoming the above problems, in Japanese patent gazette 3-75708 in the disclosed structure, the paraffin medium of packing into of the coupling part between optical waveguide bearing and optic fibre adminiculum, and the output of adjusting the YAG laser instrument is to avoid the optical axis misalignment.Yet in Japanese patent gazette 3-75708, the material of optical waveguide substrate, the joints of optical fibre and its bearing is different.Therefore, because heat expansion or contraction that temperature variation causes can not obtain stable optically-coupled characteristic.
As mentioned above, in conventional coupling process, the end face of optical waveguide bearing and joints of optical fibre bearing docks each other, and surface of contact bonding or YAG welding fixed light optical waveguide substrates and joints of optical fibre with ultraviolet fixedly is insecure, or optical axis occurs in the coupling part of optical waveguide and optical fiber and do not calibrate.
Owing to can increase constant intensity (for example), YAG welds tested a kind of fabulous fixing means that is decided to be.Yet when the air layer with the refractive index that is different from the optical waveguide substrate or the joints of optical fibre is inserted in when causing reflection of light between the optical waveguide substrate and the joints of optical fibre, light signal can not correctly transmission between the optical waveguide substrate and the joints of optical fibre.For avoiding this disadvantage, need between two elements by adopting refractive index matched agent to realize refractive index match.As refractive index matched agent, adopt disclosed resin work coupling oil among silicone oil or similar thing or the Japanese patent gazette 5-34543 usually.
Yet, when mating oil as refractive index matched agent, coupling oil meeting passage, thus make long-term reliability poor.In the Japanese patent gazette 5-34543 invention disclosed, need carry out line welding with the gas-tight seal resin and after gas-tight seal, make hardening of resin.If heating resin generation gas when sclerosis, gas is not because there is breach, and be trapped.The appearance of this gas greatly reduces the performance of optical waveguide module.
The purpose of this invention is to provide a kind of optical waveguide module that has optical waveguide and optical connection structure, and manufacture method, the problem above this module has solved.
For achieving the above object, according to of the present invention, a kind of optical waveguide module is provided, it comprises the optical waveguide bearing, be installed in the optical waveguide substrate on the optical waveguide bearing, the optical waveguide that in the optical waveguide substrate, forms, optic fibre adminiculum, be installed in the joints of optical fibre in the optic fibre adminiculum, and the optical fiber that exposes from the joints of optical fibre by joints of optical fibre supportings and end face, wherein the end face of optical waveguide bearing and optic fibre adminiculum is interconnected when alignment light waveguide and optical fiber, each end face of the optical waveguide substrate and the joints of optical fibre is welded together by a gap at least in part, and the sclerosis matching agent with light-transfer characteristic is filled in this gap.In other words, the gap is meant the space that has preset distance between optical waveguide (or optical waveguide substrate) end face and optical fiber (or joints of optical fibre) end face.
The gap can form between the end face of the end face of optical waveguide and the joints of optical fibre, and the optical waveguide end face moves behind the end face of optical waveguide bearing and optical waveguide substrate.In addition, the gap also can form between fiber end face and optical waveguide end face, and fiber end face moves behind optic fibre adminiculum and end surface of optical fiber connector.The gap also can form between optical waveguide substrate end face and end surface of optical fiber connector, and optical waveguide substrate end face moves behind the end face of optical waveguide bearing and optical waveguide.The gap also can form between the end face of the end face of the joints of optical fibre and optical waveguide, and the joints of optical fibre move behind the end face of optic fibre adminiculum and optical fiber.
In this optical waveguide module, the end face of the optical waveguide substrate and the joints of optical fibre to small part by a gap bonding so that make the sclerosis matching agent that has with the refractive index of optical waveguide and optical fiber coupling be filled in this gap.Therefore, when on time, optical waveguide and optical fiber can not wear and tear or damage.
For achieving the above object, according to of the present invention, first kind of method of making optical waveguide module is provided, it comprises the first step: the optical waveguide substrate that is installed on it on the optical waveguide bearing and has optical waveguide, the joints of optical fibre of mounting support optical fiber on optic fibre adminiculum, polish the end face of optical waveguide, optical waveguide substrate and optical waveguide bearing respectively fully, and the end face of optical fiber, the joints of optical fibre and optic fibre adminiculum; Second step: the end face of optical waveguide substrate is immersed in the predetermined etchant solution so that the end face of removing the optical waveguide substrate to small part retreats its end face from optic fibre adminiculum; The 3rd step: the end face with optical waveguide bearing and optic fibre adminiculum in alignment light waveguide and optical fiber is connected to each other, and inserts the sclerosis matching agent of light-transfer characteristic in the gap of bonding optical waveguide substrate and joints of optical fibre formation; The 4th step: the sclerosis matching agent is solidified with the coupling part between the fixed light optical waveguide substrates and the joints of optical fibre.
For achieving the above object, according to the method that second kind of manufacturing optical waveguide module is provided of the present invention, it comprises the first step: the optical waveguide substrate that is installed on it on the optical waveguide bearing and is shaped on optical waveguide, the joints of optical fibre of mounting support optical fiber on optic fibre adminiculum, and polish the end face of optical waveguide, optical waveguide substrate and optical waveguide bearing and the end face of optical fiber, the joints of optical fibre and optic fibre adminiculum respectively fully; Second step: the end face of the joints of optical fibre immersed in the predetermined corrosive liquid so that the end face of removing the joints of optical fibre to small part retreats its end face from optic fibre adminiculum; The 3rd step: the end face of optical waveguide bearing and optic fibre adminiculum is coupled together, and alignment light waveguide simultaneously and optical fiber also are filled with the sclerosis matching agent of light-transfer characteristic in the gap of bonding optical waveguide substrate and joints of optical fibre formation; The 4th step: the sclerosis matching agent is solidified with the coupling part between the fixed light optical waveguide substrates and the joints of optical fibre.
In the method for first kind and second kind manufacturing optical waveguide module, the end face of the optical waveguide substrate or the joints of optical fibre to small part is corroded and removes so that form a gap between the optical waveguide substrate and the joints of optical fibre.Therefore, the interval of the end face of the optical waveguide substrate and the joints of optical fibre in this gap can be set by control accurately.Thereby the light loss consumption that the sclerosis matching agent causes between optical waveguide and optical fiber can be set at the value of permission.Meanwhile, the rate of peeling off (peeling frequency) of the sclerosis matching agent that is caused by the thermal stress between optical waveguide bearing and optic fibre adminiculum and the optical waveguide substrate and the joints of optical fibre can be set at the value of permission.
For achieving the above object, according to of the present invention, the third method of making optical waveguide module is provided, comprise the first step: in alignment light waveguide and optical fiber, the end face of optical waveguide bearing and the end face of optic fibre adminiculum are coupled together, the optical waveguide substrate that is shaped on optical waveguide is housed on the optical waveguide bearing, is adorning the joints of optical fibre that support optical fiber on the optic fibre adminiculum; Second step: between the optical waveguide substrate and the joints of optical fibre, inject the sclerosis matching agent, its have light-transfer characteristic and and optical waveguide bearing and optic fibre adminiculum, optical waveguide substrate and the joints of optical fibre between the corresponding Young modulus of thermal stress; The 3rd step: with the coupling part between YAG laser bonding fixed light waveguide bearing and optic fibre adminiculum; The 4th step: the sclerosis matching agent is solidified with the coupling part between the fixed light optical waveguide substrates and the joints of optical fibre.
The third is made in the method for optical waveguide module, and optical waveguide and optical fiber are aligned, and then with the coupling part between YAG laser bonding fixed light waveguide bearing and optic fibre adminiculum, thereby the enough physical strengths in maintenance coupling part.In addition, as the subsequent treatment of YAG laser bonding, the coupling part between the optical waveguide substrate and the joints of optical fibre is fixed by the sclerosis matching agent is solidified, thereby axially not calibrating between optical waveguide and optical fiber reduced to minimum.Therefore, the coupled characteristic between optical waveguide and optical fiber has high reliability.In addition, because the sclerosis matching agent has the corresponding Young modulus of thermal stress between optical waveguide bearing and optic fibre adminiculum, optical waveguide substrate and the joints of optical fibre, so the thermal expansion of drawing by temperature variation or shrink just because the matching agent of hardening plays the effect of cushion is reduced.Thereby, can obtain coupled characteristic stable between optical waveguide and optical fiber.
For achieving the above object, according to of the present invention, the 4th kind of method making optical waveguide module is provided, it comprises the first step: the end face of optical waveguide bearing and the end face of optic fibre adminiculum are coupled together, adorning the optical waveguide substrate that is shaped on optical waveguide on the optical waveguide bearing, the sclerosis matching agent that is injected with light-transfer characteristic in the coupling part of the joints of optical fibre between the optical waveguide substrate and the joints of optical fibre of supporting optical fiber is being housed on the optic fibre adminiculum; Second step: with optical waveguide and optical fiber align and with the coupling part of spot welding fixed light waveguide bearing and optic fibre adminiculum, the 3rd step: the sclerosis matching agent is solidified with the coupling part between the fixed light optical waveguide substrates and the joints of optical fibre; The 4th step: with the coupling part between line weldering gas-tight seal optical waveguide bearing and optic fibre adminiculum.
In the method for the 4th kind of manufacturing optical waveguide module, after optical waveguide and optical fiber are aligned, coupling part between optical waveguide bearing and optic fibre adminiculum is temporarily fixed with spot welding, the setting and hardening matching agent is with the coupling part of the fixed light optical waveguide substrates and the joints of optical fibre again, thereby the gas that produces will solidify matching agent the time is removed from the gap of coupling part.Therefore, the coupled characteristic between optical waveguide and optical fiber is fine.As the subsequent treatment of setting and hardening matching agent, gas-tight seal is welded with line in the coupling part between optical waveguide bearing and optic fibre adminiculum, and is minimum thereby the variation in the sclerosis matching agent life-span that ectocine is drawn is reduced to.Therefore, the coupled characteristic between optical waveguide and optical fiber can guarantee long-term reliability.
For achieving the above object, according to the 5th kind of method making optical waveguide module that provide of the present invention, it comprises a step: the optical waveguide bearing that installation is shaped on the optical waveguide substrate of optical waveguide immerses with the optic fibre adminiculum that the joints of optical fibre that support optical fiber are housed and has in the refractive index matched agent of light-transfer characteristic, and the end face of optical waveguide bearing and optic fibre adminiculum is connected with each other; Second step: alignment light waveguide and optical fiber and with the coupling part between line weldering gas-tight seal optical waveguide bearing and optic fibre adminiculum.
In the method for the 5th kind of manufacturing optical waveguide module, gas-tight seal is welded with line in the coupling part of optical waveguide bearing and optic fibre adminiculum when being dipped into refractive index matched agent, can not run off so that be filled in the refractive index matched agent of coupling part.Thereby the coupled characteristic between optical waveguide and optical fiber has guaranteed long-term high reliability.
Fig. 1 is the planimetric map according to the described optical waveguide structure of first embodiment of the invention;
Fig. 2 is the planimetric map that amplify the coupling part between the optical waveguide unit of optical waveguide module in the displayed map 1 and fiber unit;
Fig. 3 is the skeleton view that is separated from each other of the state of the optical waveguide substrate of optical waveguide module in the displayed map 1 and optical waveguide bearing;
Fig. 4 shows the planimetric map according to the described optical waveguide module structure of second embodiment of the invention;
Fig. 5 is the optical waveguide substrate of optical waveguide module in the displayed map 4 and the planimetric map that the state of refractive index matched agent is not filled in the gap between the joints of optical fibre;
Fig. 6 provides in the optical waveguide module of Fig. 4, the graph of relation of the insertion loss of fiber end face backway and optical waveguide and optical fiber;
Fig. 7 provides in the optical waveguide module of Fig. 1, and fiber end face backway and bonding agent are peeled off the graph of relation of rate;
Fig. 8 is the planimetric map according to the described optical waveguide module structure of third embodiment of the invention;
Fig. 9 is the optical waveguide substrate of optical waveguide module in the displayed map 8 and the planimetric map that the state of refractive index matched agent is not inserted in the gap between the joints of optical fibre;
Figure 10 provides skeleton view according to the described optical waveguide module manufacturing step of fourth embodiment of the invention in turn to Figure 13;
Figure 14 to 16 gives the skeleton view according to the described optical waveguide module manufacturing step of fifth embodiment of the invention in turn.
Below with reference to structure and the effect of Fig. 1-16 description according to embodiment of the present invention.When describing accompanying drawing, identical reference number is represented components identical, and its detailed description is left in the basket.The not of uniform size of figure decided with described consistent.
Fig. 1 is the planimetric map that provides according to the described optical waveguide module structure of first embodiment of the invention.Fig. 2 is the planimetric map that amplify the coupling part between the light wave unit of optical waveguide module among Fig. 1 and fiber unit.Fig. 3 is the optical waveguide substrate of optical waveguide module in the displayed map 1 and the skeleton view that the optical waveguide bearing is separated from each other state.
Among the optical waveguide module 1a, the joints of optical fibre 4 and 5 that link to each other with optical fiber place the two sides of the optical waveguide substrate 3 with optical waveguide 2.Optical waveguide substrate 3 is installed on the stainless steel optical waveguide bearing 6 that is roughly U-shaped.The joints of optical fibre 4 and 5 are installed in stainless bottom surface respectively, are roughly on the optic fibre adminiculum 7 and 8 of U-shaped.
The single-mode fiber 10 that removes crust 9 is embedded in the joints of optical fibre 4.Removing crust 9 and continuous end parts a plurality of single-mode fibers 10 coupled to each other is embedded in the joints of optical fibre 5.Optical waveguide bearing 6 and optic fibre adminiculum 7 or 8 butt end part YAG(yttrium aluminum garnets) the suitable spot welding of laser instrument is in aggregates.Incident light from optical fiber 10 is divided into 8 bundles and is transferred to 8 optical fiber 10 in optical waveguide 2.
The inventor will be described below according to described making one sample of present embodiment.The optical waveguide with 1 * 8 branched structure that is shown in Fig. 1 is made in the optical waveguide substrate.The both ends of the surface of this optical waveguide substrate are polished earlier and be cut so that be installed on the optical waveguide bearing that is equipped with respectively.This bearing is processed to total length and is about 20 μ m than the length of optical waveguide substrate.Stainless steel-based material, fernico, Rhometal or similar material are used as a seat material.Adopt the optical waveguide bearing that method shown in Figure 1 is equipped with by this way and the location of optic fibre adminiculum.At this moment, form by the acrylates resin of fluoridize compound, Young modulus is 8kgf/mm
2, refractive index is that 1.44 UV-cured bonding agent 11 is filled in the gap between the optical waveguide substrate and the joints of optical fibre.
In first enforcement, the end face 3a of optical waveguide substrate 3 is from the recessed preliminary dimension L of end face 6a of optical waveguide bearing 6
1
At first, optical waveguide bearing 6 is placed row next-door neighbour optic fibre adminiculum 8.Optical waveguide 2 adopts XYZ platform (sfage) (not providing) to be aligned in vertical and horizontal direction with optical fiber 10.UV-cured then resin 11 is applied to the butting surface of the bearing of placing in turn.The end face 8a of optic fibre adminiculum 8 and the end face 6a of optical waveguide bearing 6 are tightly joined, use the XYZ platform simultaneously again at vertical and waveguide 2 of horizontal direction alignment light and optical fiber 10.Behind the aligning, it is welded with YAG laser beam irradiation end face 6a and 8a.
After the welding, be placed near the mercury lamp 14 in optical fiber 10 banded rear ends and be opened, thereby the center section of UV-cured bonding agent 11 is hardened so that ultraviolet light (365nm) incides on optical fiber 10 and the optical waveguide 2 along direction shown in the arrow among Fig. 1.Meanwhile, the edge of UV-cured bonding agent 11 is shone by ultraviolet rays and hardens.According to top coupling process, ultraviolet ray makes 11 sclerosis of UV-cured bonding agent from edge illumination, simultaneously ultraviolet light also incide on the optical waveguide 2 of placing in turn and the optical fiber 10 so that UV-cured bonding agent near the partially hardened at center.In this case, hardened reliably near the core, and the center of optical waveguide 2 and optical fiber 10 is almost constant in position, sclerosis neutralization sclerosis back.Therefore the vertical and horizontal-shift that is positioned at the center of the optical waveguide 2 of UV-cured bonding agent 11 center sections and optical fiber 10 reduces greatly.
The coupling device made is as stated above carried out the thermal cycle test and is that 80 ℃, humidity are to carry out environmental test at 95% o'clock in temperature in temperature range-10～70 ℃.The increase of inserting loss is no more than 0.3dB.Bonding agent of the present invention not only has the function of bonding end face, but also can slow down the change of shape that is caused by temperature variation.For this reason, the Young modulus of bonding agent preferably is no more than 100kgf/mm
2
In addition, for compensating gap between bonding end face or the axial non-collimation between optical waveguide and optical fiber, bonding agent is gone into the preferably refractive index of optical waveguide and optical fiber no better than of refractive index.Thermosetting bonding agent (as mainly being made up of epoxy resin) with above-mentioned feature can be used as this bonding agent.
According to first embodiment, behind the axle aligning with optical waveguide and optical fiber, annotate between the coupling end face having than the bonding agent of low Young modulus, end face is welded, fixes.Thereby can guarantee the physical strength of coupling part, from obtaining the coupling device of high reliability.Then, adhesive hardens can make the axial non-collimation that causes in the sclerosis subtract minimum.Because the Young modulus of bonding agent is little, so when coupling device varied with temperature expansion or shrinks, bonding agent also can play the cushion effect, thereby prevents to produce extention effect power.In addition, bonding agent has the characteristic of coupling, makes the increase of the coupling loss that caused by axial non-collimation, gap or similar factor reduce to minimum.
Fig. 4 provides the planimetric map according to the described optical waveguide module of second embodiment of the invention.Fig. 5 provides not the planimetric map of filling the state of refractive index matched agent in the optical waveguide substrate of Fig. 4 and the gap between the joints of optical fibre.
Show according to the described optical waveguide module 1b(of second embodiment such as Fig. 5) in, the link part (crust is removed) of the optical fiber 10 on the light entrance face is embedded in first joints of optical fibre 4.The joints of optical fibre 4 are installed in from end face and base plate and see on (not providing) optic fibre adminiculum 7 that takes the shape of the letter U.
The emitting edge end face 2a of the optical waveguide of making in optical waveguide substrate 32 places relatively with the end face 10a of the optical fiber 10 that is supported by first joints of optical fibre 4.This optical waveguide has the structure of 1 * 4 branch.Optical waveguide substrate 3 has a base plate (not providing), and is installed on the optical waveguide bearing with U-shaped cross section.The end face 2a on optical waveguide 2 outgoing limits places relatively with the end face 10a of a plurality of single-mode fibers 10 of being supported by second joints of optical fibre 5.The joints of optical fibre 5 are installed in from top and base plate (not providing) and see on the optic fibre adminiculum 8 that is roughly U-shaped.
In above-mentioned optical waveguide module 1b, each end face 10a of left and right optical fiber 10 is placed on from the end face 4a of corresponding light fiber connector 4 or 5 or the recessed preliminary dimension L of 5a
2The position of (being shown in Fig. 5) is to constitute first end face part 12.The size L of recess
2Preferably be set in the scope of 2 to 50 μ m.
In addition, the end face 7a of the joints of optical fibre 4 or 5 end face 4a or 5a and corresponding optic fibre adminiculum or 8 or 8a are at grade.Refractive index matched agent 11 is filled in the recess that forms between fiber end face 10a and connector ends 4a and 5a to prevent the light reflection in the optically-coupled part.Except that coupling oil, preferably can make refractive index matched agent 11 with thermosetting acrylates resin or thermoset epoxy resin.Be shown in table 1 as the acrylates resin of coupling bonding agent and the characteristic of epoxy resin.
Table 1
Coupling bonding agent title Lacstrap
* 1Epotec
* 2
Refractive index 1.45 1.51
Glass transition temperature (℃) 58 60
Thermal expansivity (K
-1) 2 * 10
-41.8 * 10
-4
Young modulus (kgf/mm) 8≤100
Bonding strength (kgf/cm
2) 170-
* 1: the acrylates resin of fluoridize compound can obtain from ICI
* 2: epoxy resin can obtain from epoxy resin technology company
Determine, comprise that by a non-matting first end face part 12 of connector ends 4a or 5a and fiber end face 10a is by following technology manufacturing.
In the joints of optical fibre 4 or 5 were installed in state on optic fibre adminiculum 7 or 8, connector ends 4a or 5a, fiber end face 10a and bearing end face 7a or 8a were almost at grade.At this state, end face 4a, 5a, 10a, 7a and 8a are polished.
When the joints of optical fibre 4 and 5 are dipped into 20 ℃ with optic fibre adminiculum 7 and 8 in 5% the hydrofluoric acid aqueous solution about 1 hour.At this moment, have only optical fiber to be corroded, fiber end face 10a retreats about 5 μ m from connector ends 4a or 5a.
The inventor carried out respectively having joints of optical fibre dress bearing thereon and the location that optical waveguide substrate dress bearing is thereon arranged, and all elements prepare as stated above.At this moment, refractive index matched agent 11 is received in the gap between the end face 10a of the end face 2a of optical waveguide 2 and optical fiber 10.Behind optical waveguide 2 and optical fiber 10 location, optical waveguide bearing 6 is fixing with the YAG welding with 8 contact surface mutually with the joints of optical fibre 7.
Loss when the optical waveguide module 1b by above-mentioned size preparation has been measured that temperature changes in-10 to 70 ℃ of scopes changes, and has obtained variation range to be ± the very gratifying value of 0.2dB.In addition, example as a comparison, the loss that the conventional optical waveguide module that the end face of optical waveguide and optical fiber is not retreated from optical waveguide substrate and end surface of optical fiber connector is measured under the same temperature conditions changes.In this case, the scope of loss variation reaches ± 0.5dB.
Among second embodiment, as the end face 3a of the end face 2a of the optical waveguide 2 of second end face part 13 and optical waveguide substrate 3 on same plane.Yet, use identical etching process with a last embodiment, the end face 2a of optical waveguide 2 can retreat 2～50 μ m(from the end face 3a of optical waveguide substrate 3 and not provide).In this case, as the end face 4a of the end face 10a of the optical fiber 10 of first end face part 12 and the joints of optical fibre 4 or 5 or 5a on same plane.
To be described as determining rightly the experiment that the fiber end face backway is done among the optical waveguide module 1b below.In this case, the optical waveguide substrate and the joints of optical fibre are made by silicon.Optical waveguide bearing and optic fibre adminiculum as shell are made by Rhometal or stainless steel (SUS304).These material coefficient of thermal expansion coefficients are shown in table 2.
Table 2
Title material thermal expansivity (K
-1)
Silicon 2.5 * 10
-6
Stainless steel (SUS304) 1.47 * 10
-5
Fig. 6 shows the curve map that inserts the relation of loss between the fiber end face amount of retreating and optical waveguide and optical fiber.According to this result, when the fiber end face backway increased, the insertion loss between optical waveguide and optical fiber increased.Thereby the maximal value supposition relevant with the fiber end face backway is to determine according to the upper limit of the value of inserting the loss permission.
Fig. 7 shows the fiber end face backway and mates the curve map that bonding agent is peeled off the rate relation.By this result, when the fiber end face backway reduced, the coupling bonding agent is peeled off rate to be increased.Thereby the supposition of the minimum value of fiber end face backway is based on that the rate of the peeling off higher limit of requirement determines.
Therefore, when optical waveguide bearing and optic fibre adminiculum are when being made by Rhometal, the back logical distance L of fiber end face
2Preferably place in the scope of 2～30 μ m.When optical waveguide bearing and optic fibre adminiculum by stainless steel (SUS304) when making, the backway L of fiber end face
2Be preferably disposed in the scope of 5～30 μ m.
Fig. 8 has provided the planimetric map according to the described optical waveguide module of third embodiment of the invention.Fig. 9 has provided the planimetric map of not filling the state of the coupling part between the optical waveguide substrate and the joints of optical fibre with refractive index matched agent.
In the described optical waveguide module 1c of the 3rd embodiment, opposite with second embodiment, the joints of optical fibre 4 and 5 end face 4a and 5a are from the end face 10a backway L of optical fiber 10
2(being shown in Fig. 9).Among the 3rd embodiment, because the end face 10a of the end face 7a of optic fibre adminiculum 7 or 8 or 8a and optical fiber 10 at grade, the position of connector ends 4a or 5a is from corresponding bearing end face 7a or 8a backway L
3Thereby first end face part 12 that is made of fiber end face 10a and connector ends 4a or 5a becomes non-smooth surface, and recess 15 forms around fiber end face 10a.Distance L
3Preferably be set in the scope of 2～100 μ m.
Non-flat surface according to described first end face part 12 of the 3rd embodiment prepares with following technology.
The preparation joints of optical fibre 4 or 5 o'clock, the Si crystal is cut, and forms a V-shaped groove therein to obtain the optical fiber installation component, and light transmitting fiber is placed and is fixed in the V-shaped groove of this optical fiber installation component.The joints of optical fibre 4 and 5 are mounted respectively after on optic fibre adminiculum 7 and 8, and bearing end face 7a and 8a, connector ends 4a and 5a and fiber end face 10a are polished so that flush each other.
The joints of optical fibre 4 and 5 are immersed in 50 ℃ of down KOH(potassium hydroxide of 30%) in the aqueous solution about 1 hour.As a result, optical fiber 10 and optic fibre adminiculum 7 and 8 are not corroded, and have only the optical fiber installation component of the joints of optical fibre 4 and 5 to be corroded.Therefore connector ends 4a and 5a retreat about 10 μ m from fiber end face 10a.
After being installed in optical waveguide substrate 3 on the optical waveguide bearing 6, substrate end face 3a, Waveguide end face 2a and bearing end face 6a are polished on the same plane.
Be equipped with on it joints of optical fibre 4 and 5 optic fibre adminiculum 7 and 8 and on be equipped with the optical waveguide substrate optical waveguide bearing 6(its all use method for preparing) location, simultaneously it comprises recess 15 at optical waveguide substrate 3 and the joints of optical fibre 4 or 5() the gap in fill refractive index matched agent 11.Optical waveguide bearing 6 and optic fibre adminiculum 7 and 8 s' the 6a of contact surface mutually, 7a and 8a are fixing with the YAG welding.
The optical waveguide module 1C that adopts above-mentioned size preparation is carried out characteristic test at-10～70 ℃.As a result, the scope of loss variation is little arrives ± 0.2dB.Otherwise, example as a comparison, the optical waveguide module that corrodes behind the mirror polish of opposite end (be connector ends and fiber end face at grade) carries out the temperature survey test at-10～70 ℃.As a result, variation range reaches ± 0.5dB.
Opposite with the 3rd embodiment, second end face part 13 can be made into non-flat surface.In this case, first end face part 12 can be made into smooth surface (not providing).
In this case, end face part can be by following technology preparation.That is, have the chip of light waveguide that is produced on the quartzy optical waveguide on the Si substrate in installation on the bearing, and end face is polished to same plane.Then chip of light waveguide is immersed 50 ℃ about 1 hour of 30%KOH aqueous solution with bearing.As a result, optical waveguide and bearing are not corroded, and have only the Si substrate of optical waveguide to be corroded, thereby make the substrate end face retreat about 10 μ m.
Undertaken by this method after the location of optic fibre adminiculum and optical waveguide bearing end face, with the phase contact surface of YAG welding hold-down support.At this moment, refractive index matched agent is charged in the gap of the optical waveguide substrate and the joints of optical fibre.
Optical waveguide module with method for preparing is carried out temperature characteristic measuring in-10～70 ℃ of temperature ranges, as what the optical waveguide module of the 3rd embodiment was done.As a result, loss variation range has only ± 0.2dB.On the other hand, example as a comparison, to optical waveguide be installed on the bearing, end face is polished and the optical waveguide module that corrodes (that is, optical waveguide end face and substrate end face are at grade) is carrying out attribute testing under same temperature conditions.In this case, loss variation range reaches ± 0.5dB.
According to the second and the 3rd embodiment, end surface of optical fiber connector or optical waveguide substrate end face are made into a non-flat surface.A certain amount of refractive index matched agent that is used for optically-coupled can be received in the recess that forms on the non-flat surface.Therefore optical waveguide can be coupled with optical fiber is stable.In addition, be installed in the joints of optical fibre or optical waveguide substrate on the bearing and, carry out corrosion treatment so that the end face of optical fiber or optical waveguide protrudes or recessed from end surface of optical fiber connector or optical waveguide substrate end face with after its end face polishing.For this reason, can accurately control protrusion or recessed amount so that make optical waveguide and optical fiber optically-coupled accurately.
Figure 10 to 13 shows the skeleton view of manufacturing according to the described optical waveguide module step of fourth embodiment of the invention in turn.
Preparation wherein is shaped on the optical waveguide substrate 3 of optical waveguide.Optical waveguide substrate 3 is made by the Si crystal.Except that the Si crystal, resemble ZnO, LiN
bO
3, chalkogenide or similar material also can be used as backing material.
Show as Figure 10, optical waveguide substrate 3 is fixed on the optical waveguide bearing, this bearing plays the substrate fixed component, and member is constituted with first sheet metal 62 that is assemblied in first metal shell, 61 upper surfaces by first metal shell 61 with U-shaped cross section, thereby constitutes optical waveguide unit 60.The resin that optical waveguide substrate 3 usefulness are injected first metal shell 61 is fixed on the substrate fixed component.Usually use (thermosetting) epoxy resin as used resin this moment.But acrylic resin or similar material also can use.
Junction loss when then the polishing of the end face of optical waveguide unit 60 being connected with fiber unit 70 to reduce optical waveguide unit 60.
Except that the optical waveguide unit, also to prepare the joints of optical fibre 4 and 5.In the joints of optical fibre 4 and 5, multifiber 10 is fixed along two dimension or three-dimensional arrangement and with target substrate or similar component.Specifically, the joints of optical fibre 4 comprise by the Si crystal form and have a plurality of V-arrangement guide grooves V-shaped groove substrate 41, be installed in the optical fiber 10 in these V-arrangement guide grooves and be assemblied in the pressing plate 42 that constitutes with fixed fiber 10, by the Si crystal on the V-shaped groove substrate 41.Notice that the joints of optical fibre 5 have the structure same with the joints of optical fibre 4.Except that the Si crystal, resemble plastic material, multicomponent glass, silicones or similar material and also can do the joints of optical fibre 4 and 5.
Show that as Figure 11 the joints of optical fibre 4 are fixed on the optic fibre adminiculum, thereby constitute fiber unit 70.Bearing is as the optical fiber fixed component, and this member has second metal shell 71 with U-shaped cross section and second sheet metal 72 that is assemblied in second metal shell, 71 upper surfaces.The resin that the joints of optical fibre 4 usefulness are injected second shell 71 is fixed on the optical fiber fixed component.This moment, described resin was generally the thermoset epoxy resin.But also available acrylic resin.Notice that fiber unit 80 has the structure same with fiber unit 70.
End face with fiber unit 70 and 80 polishes then.
The end face of pressing the optical waveguide unit 60 of above-mentioned technology manufacturing docks with the end face of fiber unit 70 and 80 respectively by resin.This resin adopts silicones.But also can adopt epoxy resin.This resin is used to realize the former coupling of refractive index between optical waveguide and the optical fiber 10, and it has and optical waveguide and optical fiber refractive index about equally usually.Thereby this layer resin must be coated between optical waveguide and the optical fiber really.But resin may be coated in another part (as, the whole surface of coupling part 73).At this moment, carry out optical waveguide and optical fiber 10 calibration so that signal can accurately transmit in optical waveguide and 10 of optical fiber that are contained in the joints of optical fibre 4 and 5.
As shown in figure 12, the optical waveguide unit 60 of aligning and fiber unit 70 or 80 s' coupling part 73 or each side of 83 by in three places spot welding (each coupling part has 6 points) with temporary transient fixed light Wave guide unit 60 and fiber unit 70 or 80.
In the present embodiment, carry out spot welding temporarily fixedly the time, adopt the YAG laser instrument.But carrying out spot welding with other method can certainly.
Among this embodiment, 6 temporary transient point of fixity of conduct have been selected.Yet the number of temporary transient point of fixity is not limited thereto.As long as optical waveguide unit and fiber unit can be fixed really, the point of arbitrary number can be fixed.
Blow the coupling part 73 and 80 that forms by resin with xeothermic air between the end face of the end face of optical waveguide unit 60 and fiber unit 70 and 80, heating is so that hardening of resin.At this moment, under 80 ℃ temperature, heated 60 minutes.Coupling part 73 and 83 two sides only temporarily are fixed, and are gapped in the coupling part 73 and 83.For this reason, because heating and the gas that produces from resin is outwards overflowed, do not stay between the end face of the end face of optical waveguide unit 60 and optical fiber 70 and 80.Dry up hot-air as mentioned above or under proper temperature, directly heat the coupling part and can be used as to coupling part 73 and 83 methods that heat with well heater or similar device.
Except that this embodiment method therefor, also available deoxidization technique is as the method for hardening resin.Specifically, make container and be evacuated removing oxygen, thereby make hardening of resin, thereby or replace oxygen to remove the oxygen hardening resin in the manufacturing container with nitrogen, argon or similar gas.
After resin hardens fully, as shown in figure 13, carry out the line weldering with gas-tight seal coupling part 73 and 83 with the YAG laser instrument, thereby make optical waveguide module.In line when weldering,, the welding position is 73 and 83 two connect and move forward gradually with in turn with its welding along the coupling part.
According to the 4th embodiment, the gas that heats generation for hardening resin before with line weldering gas-tight seal is overflowed.Therefore, there is not residual gas between the end face of the end face of optical waveguide unit 60 and fiber unit 70 and 80.As a result, just can provide performance not degenerate and the optical waveguide module of the long-term reliability of determining is arranged thus.
Figure 14 to 16 is the skeleton views that show in turn according to the manufacturing step of the described optical waveguide module of fifth embodiment of the invention.
Make among optical waveguide unit 60 and fiber unit 70 and 80 step and the 4th embodiment identically among the 5th embodiment, ignore its detailed description.
As shown in figure 14, optical waveguide unit 60 is dipped in the silicone oil 91 of fuel tank 90 with the fiber unit 70 and 80 that is attached thereto.When silicone oil 91 links to each other with fiber unit 70 and 80 as optical waveguide unit 60, obtain the coupling oil of refractive index match between optical waveguide and the optical fiber 10.Optical waveguide unit 60 and fiber unit 70 and 80 usefulness, one fulcrum arrangements (not providing) frame are in fuel tank 90.When silicone oil 91 was evenly coated on the end face of optical waveguide unit 60 and fiber unit 70 and 80 in advance, silicone oil 91 also can be sealed equably.
As shown in figure 15, when optical waveguide unit 60 and fiber unit 70 and 80 remain in the silicone oil 91, optical waveguide and optical fiber 10 are carried out alignment function.When carrying out alignment function, light is incided on the optical fiber 10 and optical waveguide is passed in monitoring, by the light that comes out in other optical fiber 10.At this moment, optical waveguide and optical fiber 10 are aimed at so that signal must and be contained in transmission exactly between optical fiber in the joints of optical fibre 4 and 5 in optical waveguide.
As shown in figure 16, when behind the alignment function be immersed in optical waveguide unit 60 and fiber unit 70 and 80 in the silicone oil 91 time, carry out seal welding with the coupling part 73 and 83 between the end face of gas-tight seal optical waveguide unit 60 and fiber unit 70 and 80 with the YAG laser beam irradiation, thereby make optical waveguide module.
As mentioned above, carry out line when weldering of coupling part 73 and 83 in silicone oil 91, coupling part 73 and 83 is hermetically sealed when silicone oil is full of between the end face of optical waveguide unit 60 and fine unit 70 and 80.Therefore, silicone oil 91 does not run off, and the 1e of the optical waveguide module with predetermined long-term reliability can be provided.
According to the 4th and the 5th embodiment, temporarily be fixedly coupled part with spot welding around, form a space, resin is hardened under this state.For this reason, when promptly using heating arrangement to make the hardening of resin device, at this moment the gas of Chan Shenging is not stayed the coupling part yet, but has been removed.In addition, connect part and have the space in the wide range on every side.Thereby, except that with the heating means hardening resin, also can use deoxidation technology.
In addition, according to of the present invention, coupling oil can not flow to the outside, coupling part.
Therefore, according to the manufacture method of optical waveguide module of the present invention, can make optical waveguide module with predetermined long-term reliability.
Claims (40)
1, a kind of optical waveguide module comprises:
The optical waveguide bearing;
The optical waveguide substrate, it is installed in the described optical waveguide bearing;
Be formed in the described optical waveguide substrate optical waveguide that its end face exposes from described optical waveguide substrate;
Optic fibre adminiculum;
Be installed in the joints of optical fibre in the described optic fibre adminiculum; With
By described joints of optical fibre supporting, the optical fiber that end face exposes from the described joints of optical fibre;
It is characterized in that, the end face of described optical waveguide bearing and optic fibre adminiculum is connected with each other when aiming at described optical waveguide and optical fiber, the end face of the described optical waveguide substrate and the joints of optical fibre to small part is passed through a gap by bonding, and the sclerosis matching agent with light transmission spy is received in this gap.
2, according to the described module of claim 1, it is characterized in that described gap forms between the end face of the end face of described optical waveguide and described optical fiber, described optical waveguide end face retreats from the end face of described optical waveguide bearing and optical waveguide substrate.
3, module according to claim 1 is characterized in that described gap is to form between described fiber end face and described optical waveguide end face, described fiber end face is stepped back from described optic fibre adminiculum and end surface of optical fiber connector.
4, want 1 described module according to claim, it is characterized in that described gap forms between described optical waveguide substrate end face and described end surface of optical fiber connector, the end face of described optical waveguide substrate is stepped back from the end face of described optic fibre adminiculum and optical waveguide.
5, module according to claim 1 is characterized in that described gap forms between the end face of the end face of the described joints of optical fibre and described optical waveguide substrate, the end face of the described joints of optical fibre is stepped back from the end face of described optic fibre adminiculum and optical fiber.
6, module according to claim 1, it is characterized in that described sclerosis matching agent be a kind ofly have that light is solid, thermosetting and deoxidation solidify in the bonding agent of arbitrary character.
7, according to the described module of claim 1, it is characterized in that the permissible value of the higher limit at described optical waveguide substrate and the interval of end surface of optical fiber connector in described gap based on sclerosis matching agent optical loss size between described optical waveguide and optical fiber, the sclerosis matching agent that lower limit causes based on thermal stress between described optical waveguide bearing and optic fibre adminiculum and the described optical waveguide substrate and the joints of optical fibre is peeled off the permissible value of rate (peeling frequency).
8, module according to claim 7, it is characterized in that described optical waveguide bearing and optic fibre adminiculum are made of Rhometal, and the scope at the interval of end face in described gap of described optical waveguide substrate and the joints of optical fibre is 2～30 μ m when optical waveguide substrate and the joints of optical fibre are made up of silicon.
9, the module of year stating according to claim 7, it is characterized in that described optical waveguide bearing and optic fibre adminiculum and optic fibre adminiculum be made up of stainless steel, and when described optical waveguide substrate and the joints of optical fibre were made up of silicon, described optical waveguide substrate and the interval of end surface of optical fiber connector in described gap were in the scope of 5～30 μ m.
10, the method for manufacturing optical waveguide module comprises:
The first step: the optical waveguide substrate that is shaped on optical waveguide on it is installed on the optical waveguide bearing, the joints of optical fibre of supporting optical fiber are installed on the optic fibre adminiculum, and the end face of described optical waveguide, optical waveguide substrate and optical waveguide bearing and the end face of optical fiber, the joints of optical fibre and optic fibre adminiculum are polished respectively;
Second step: described optical waveguide end face is immersed in the predetermined etchant solution, remove the end face of described optical waveguide substrate, its end face than described optical waveguide bearing is stepped back to small part;
In the 3rd step, the end face with described optical waveguide bearing and optic fibre adminiculum when aligning is stated optical waveguide and optical fiber joins, and fills the sclerosis matching agent with light-transfer characteristic in the formed gap of the joints of optical fibre of bonding described optical waveguide substrate; With
In the 4th step, described sclerosis matching agent is solidified with the coupling part between the fixing described optical waveguide substrate and the joints of optical fibre.
11, in the method according to claim 10, it is characterized in that second step comprised the end face that partly corrodes and remove described optical waveguide, the step that it is stepped back by the end face of described optical waveguide bearing and optical waveguide substrate.
12,, it is characterized in that the step that second step comprised the end face that partly corrodes and remove described optical waveguide substrate, it is stepped back by described optical waveguide and optical waveguide bearing and end face according in the described method of claim 10.
13, in the method according to claim 10, it is characterized in that the 4th step comprises that coupling part between heating described optical waveguide substrate and the joints of optical fibre is with the step of the described sclerosis matching agent of hardening.
14, in the method according to claim 10, it is characterized in that the 4th step comprise make light from the fiber end face incident that is exposed to described joints of optical fibre outside to solidify the step of described sclerosis matching agent.
15, in the method according to claim 10, it is characterized in that the 4th goes on foot the airborne oxygen that comprises coupling part between the described optical waveguide substrate of removal and the joints of optical fibre, to solidify the step of described sclerosis matching agent.
16, method according to claim 10 is characterized in that the 4th step comprised with the coupling part between fixing described optical waveguide bearing of YAG laser bonding and optic fibre adminiculum, then by solidifying the step of coupling part between the described optical waveguide substrate and the joints of optical fibre.
17, method according to claim 10, it is characterized in that the 4th step comprised step: with the coupling part of spot welding fixed light waveguide bearing and described optic fibre adminiculum, by described sclerosis matching agent is solidified with the coupling part between the fixing described optical waveguide substrate and the joints of optical fibre, and with the coupling part between line weldering described optical waveguide bearing of gas-tight seal and joints of optical fibre bearing.
18, the method for manufacturing optical waveguide module is characterized in that comprising:
The first step, the optical waveguide substrate that is shaped on optical waveguide on it is installed on the optical waveguide bearing, the joints of optical fibre of supporting optical fiber are installed on the optic fibre adminiculum, and polish described optical waveguide fully respectively, optical waveguide substrate and the end face of optical waveguide bearing and the end face of described optical fiber, the joints of optical fibre and optic fibre adminiculum;
Second step, described end surface of optical fiber connector is immersed in the predetermined corrosive liquid, so that small part is removed the end face of the described joints of optical fibre, its end face from described optic fibre adminiculum is stepped back;
The 3rd step, when aiming at described optical waveguide and optical fiber, the end face of described optical waveguide bearing and optic fibre adminiculum is joined each other, and in the formed gap of end face of the bonding described optical waveguide substrate and the joints of optical fibre, be filled with the sclerosis matching agent of light-transfer characteristic; With
In the 4th step, described sclerosis matching agent is solidified with the coupling part between the fixing described optical waveguide substrate and the joints of optical fibre.
19, method according to claim 18, it is characterized in that second the step comprise step: partly corrode and remove the end face of described optical fiber, it is stepped back from described optic fibre adminiculum and end surface of optical fiber connector.
20, according to the described method of claim 18, it is characterized in that second the step comprise step: partly corrode and remove the end face of the described joints of optical fibre, its end face from described optical fiber and optic fibre adminiculum is stepped back.
21, method according to claim 18, it is characterized in that the 4th the step comprise step: heat the coupling part between the described optical waveguide substrate and the joints of optical fibre, make the sclerosis matching agent.
22,, it is characterized in that the 4th step comprised step according to the described method of claim 18: make light from the surface feeding sputtering of the described optical fiber that is exposed to joints of optical fibre outsides so that the sclerosis matching agent solidify.
23, method according to claim 18, it is characterized in that the 4th the step comprise step: remove coupling part between the described optical waveguide substrate and the joints of optical fibre airborne oxygen so that the matching agent of hardening solidify.
24, method according to claim 18, it is characterized in that the 4th step comprised step: with the coupling part between fixing described optical waveguide bearing of YAG laser bonding and optic fibre adminiculum, then by described sclerosis matching agent is solidified with the coupling part between the fixing described optical waveguide substrate and the joints of optical fibre.
25, method according to claim 18, it is characterized in that the 4th step comprised step: with the coupling part between fixing described optical waveguide bearing of spot welding and optic fibre adminiculum, thereby by making described sclerosis matching agent solidify coupling part between the fixing described optical waveguide substrate and the joints of optical fibre, and and line weldering described optical waveguide bearing of gas-tight seal and optic fibre adminiculum between the coupling part.
26, the method for manufacturing optical waveguide module comprises:
The first step, when aiming at described optical waveguide and optical fiber, the end face that makes the optical waveguide bearing of adorning the optical waveguide substrate that is shaped on optical waveguide joins each other with the end face of the optic fibre adminiculum of the joints of optical fibre that supporting optical fiber is housed;
Second step, the sclerosis matching agent with light-transfer characteristic is injected in coupling part between the described optical waveguide substrate and the joints of optical fibre, and aim at described optical waveguide and optical fiber, the medium of injection have and described optical waveguide bearing and optic fibre adminiculum between and the corresponding Young modulus of thermal stress between the described optical waveguide substrate and the joints of optical fibre;
The 3rd step is with the coupling part between fixing described optical waveguide bearing of YAG laser bonding and optic fibre adminiculum; With
In the 4th step, described sclerosis matching agent is solidified with the fixing coupling part between the institute's optical waveguide substrate and the joints of optical fibre.
27, method according to claim 26, it is characterized in that the first step comprises step: the end face of described optical waveguide substrate is immersed in the predetermined corrosive liquid, so that remove this end face to small part, it is stepped back from described optical waveguide bearing end face, and the end face that makes described optical waveguide bearing and optic fibre adminiculum then interconnects when described optical waveguide and optical fiber are aimed at mutually and touches.
28, method according to claim 26, it is characterized in that the first step comprises step: with end face of the described joints of optical fibre immerse predetermined corrosion molten in, so that small part is removed this end face, its end face from the described joints of optical fibre is stepped back, when aiming at described optical waveguide and optical fiber, the end face of described optical waveguide bearing and optic fibre adminiculum is joined each other then.
29, method according to claim 26, it is characterized in that the 4th the step comprise step: heat the coupling part between the described optical waveguide substrate and the joints of optical fibre, make the sclerosis matching agent solidify.
30, method according to claim 26 is characterized in that the 4th step comprised step: make the surface feeding sputtering of light from the described optical fiber that is exposed to described joints of optical fibre outside, to solidify described sclerosis matching agent.
31, method according to claim 26, it is characterized in that the 4th the step comprise step: remove the airborne oxygen of coupling part between described optical waveguide substrate and optic fibre adminiculum, make the sclerosis matching agent solidify.
32, the method for manufacturing optical waveguide module is characterized in that comprising:
The first step is joined the end face of optical waveguide bearing and the end of optic fibre adminiculum each other, is adorning the optical waveguide substrate that is formed with optical waveguide on the optical waveguide bearing, and the joints of optical fibre of supporting optical fiber are housed on the optic fibre adminiculum; And the sclerosis matching agent with light-transfer characteristic is injected in the coupling part between the described optical waveguide substrate and the joints of optical fibre;
In second step, aim at described optical waveguide and optical fiber and with the coupling part between fixing described optical waveguide bearing of spot welding and optic fibre adminiculum;
In the 3rd step, described sclerosis matching agent is solidified with the coupling part between the fixing described optical waveguide substrate and the joints of optical fibre; With
The 4th step is with the coupling part between line welding described optical waveguide bearing of gas-tight seal and optic fibre adminiculum.
33, method according to claim 32, it is characterized in that the first step comprises step: the end face of described optical waveguide substrate is immersed in the predetermined etchant solution, it is removed at least in part and steps back, when aiming at described optical waveguide and optical fiber, the end face of described optical waveguide bearing and optic fibre adminiculum is joined each other then from the end face of described optical waveguide bearing.
34, method according to claim 32, it is characterized in that the first step comprises step: the end face of the described joints of optical fibre is immersed in the etchant solution of being scheduled to, make it be removed and retreat to small part, when aiming at described optical waveguide and optical fiber, the end face of described optical waveguide bearing and optic fibre adminiculum is joined each other then from the end face of described optic fibre adminiculum.
35, according to the described method of claim 32, it is characterized in that the 3rd the step comprise step: heat the coupling part between described optical waveguide substrate and light connector substrate, described sclerosis matching agent solidified.
36, method according to claim 32 is characterized in that the 3rd step comprised step: make light from being exposed to the described fiber end face incident of described joints of optical fibre outside, so that described sclerosis matching agent is solidified.
37, method according to claim 32, it is characterized in that the 4th the step comprise step: remove airborne oxygen between the described optical waveguide substrate and the joints of optical fibre, so that described sclerosis matching agent is solidified.
38, the method for manufacturing optical waveguide module is characterized in that comprising:
The first step, have in the refractive index matched agent of light-transfer characteristic the optical waveguide bearing of the optical waveguide substrate that is shaped on optical waveguide and the optic fibre adminiculum immersion of the joints of optical fibre that supporting optical fiber is housed are installed, and the end face of described optical waveguide bearing and optic fibre adminiculum is joined each other;
In second step, aim at described optical waveguide and optical fiber and with the coupling part between line weldering described optical waveguide bearing of gas-tight seal and optic fibre adminiculum.
39, according to the described method of claim 38, it is characterized in that the first step comprises step: described optical waveguide substrate end face is immersed in the predetermined etchant solution, so that it is removed and its end face from described optical waveguide bearing is retreated to small part, then described optical waveguide bearing and optic fibre adminiculum are immersed described penetrating in the rate matching agent, and the end face of described optical waveguide bearing and optic fibre adminiculum is joined each other.
40, according to the described method of claim 38, it is characterized in that the first step comprises step: described end surface of optical fiber connector is immersed in the predetermined etchant solution, so that small part is with its removal and its end face from described optic fibre adminiculum is stepped back, then described optic fibre adminiculum and optical waveguide bearing are immersed in the refractive index matched agent, and the end face of described light wave bearing and optic fibre adminiculum is joined each other.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP123947/93 | 1993-05-26 | ||
| JP5123947A JPH06331856A (en) | 1993-05-26 | 1993-05-26 | Method for coupling optical waveguide with optical fiber |
| JP155360/93 | 1993-06-25 | ||
| JP286825/93 | 1993-11-16 | ||
| JP28682593A JP3293112B2 (en) | 1993-11-16 | 1993-11-16 | Method for manufacturing optical waveguide module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1102886A true CN1102886A (en) | 1995-05-24 |
Family
ID=26460736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94105823 Pending CN1102886A (en) | 1993-05-26 | 1994-05-25 | Optical waveguide module and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1102886A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1317576C (en) * | 2004-07-06 | 2007-05-23 | 财团法人工业技术研究院 | Coupling structure of optical fiber and light wave guide |
| CN102217948A (en) * | 2011-05-12 | 2011-10-19 | 刘继国 | Device and method for sticking crystals and light guides of PET (position-emission tomography) detector |
| CN102411169A (en) * | 2010-09-22 | 2012-04-11 | 日本电气株式会社 | Optical module and manufacturing method thereof |
| WO2020024284A1 (en) * | 2018-08-03 | 2020-02-06 | Lumentum Operations Llc | Laser welding for planar lightwave circuit–fiber packaging |
-
1994
- 1994-05-25 CN CN 94105823 patent/CN1102886A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1317576C (en) * | 2004-07-06 | 2007-05-23 | 财团法人工业技术研究院 | Coupling structure of optical fiber and light wave guide |
| CN102411169A (en) * | 2010-09-22 | 2012-04-11 | 日本电气株式会社 | Optical module and manufacturing method thereof |
| CN102411169B (en) * | 2010-09-22 | 2017-05-17 | 日本电气株式会社 | Optical module and manufacturing method thereof |
| CN102217948A (en) * | 2011-05-12 | 2011-10-19 | 刘继国 | Device and method for sticking crystals and light guides of PET (position-emission tomography) detector |
| CN102217948B (en) * | 2011-05-12 | 2013-04-17 | 刘继国 | Device and method for sticking crystals and light guides of PET (position-emission tomography) detector |
| WO2020024284A1 (en) * | 2018-08-03 | 2020-02-06 | Lumentum Operations Llc | Laser welding for planar lightwave circuit–fiber packaging |
| CN110794523A (en) * | 2018-08-03 | 2020-02-14 | 朗美通经营有限责任公司 | Coupling between waveguide device and fiber stub |
| US11181690B2 (en) | 2018-08-03 | 2021-11-23 | Lumentum Operations Llc | Coupling between a waveguide device and fiber stub |
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