CN110277294A - Ion calibrating installation - Google Patents
Ion calibrating installation Download PDFInfo
- Publication number
- CN110277294A CN110277294A CN201910349486.2A CN201910349486A CN110277294A CN 110277294 A CN110277294 A CN 110277294A CN 201910349486 A CN201910349486 A CN 201910349486A CN 110277294 A CN110277294 A CN 110277294A
- Authority
- CN
- China
- Prior art keywords
- ion
- plate
- calibrating installation
- section
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 title claims abstract description 32
- 150000002500 ions Chemical class 0.000 claims abstract description 98
- 238000012360 testing method Methods 0.000 claims abstract description 23
- 230000008602 contraction Effects 0.000 claims abstract description 21
- 238000005192 partition Methods 0.000 claims abstract description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 23
- 229910052802 copper Inorganic materials 0.000 claims description 17
- 239000010949 copper Substances 0.000 claims description 17
- 229920006395 saturated elastomer Polymers 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 6
- 230000008676 import Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 229920000742 Cotton Polymers 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 3
- 150000001450 anions Chemical class 0.000 claims description 3
- 150000001768 cations Chemical class 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 230000006872 improvement Effects 0.000 description 9
- 230000010287 polarization Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
- H01J37/3023—Programme control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Abstract
The invention discloses a kind of ion calibrating installations, including interconnected ion saturation room, contraction section, diffuser, test section and power section, it is connected with control room between the contraction section and diffuser, which has cavity, several partitions and the multiple polarising sheets in cavity surrounded by lateral wall；Cavity is divided into several channels by the partition.By adding control room in ion calibrating installation, the control room has opposed facing positive plate and negative plate, and gap is formed between positive plate and negative plate, to absorb different ions, to control the mobility of ion, to realize a kind of ideal ion concentration environment, accurately to calibrate measuring ion instrument.
Description
Technical field
The present invention relates to a kind of ion calibrating installation more particularly to a kind of ion calibrating installations of detectable ion concentration.
Background technique
It is of different sizes based on air intermediate ion, and be difficult to generate stable ion source, ion concentration survey is increased as a result,
The difficulty that measuring appratus accurately detects.The ion calibrating installation that there is no controllable ion concentration on the market at present, i.e., have in generation
When constant negative ion concentration of different sizes, measuring ion instrument can not be calibrated.
Therefore, it is necessary to a kind of ion calibrating installation be designed, to detect the measurement error of measuring ion instrument, to confirm
Measure the concentration of ion.
Summary of the invention
The object of the present invention is to provide a kind of ion calibrating installations that can generate stabilizing ion concentration.
The present invention has a kind of following technical solution: ion calibrating installation to achieve the above object, including what is be interconnected
Ion is saturated room, contraction section, diffuser, test section and power section, and ion saturation room provides ion source, the power section
Fan including driving motor and connection driving motor drives fan to rotate and formed air-flow when driving motor rotation, with
Ion is driven to be saturated indoor ion flow, and the ion flows through and shrinks short, diffuser, enters back into test section；The test section
Ion detection instrument is inside installed, is connected with control room between the contraction section and diffuser, which has by outside
Cavity, several partitions and the multiple polarising sheets in cavity that wall surrounds；Cavity is divided into several channels, institute by the partition
It states cavity connection contraction section and diffuser, the polarising sheet is placed in channel in left-right direction, and the polarising sheet includes mutual
The positive plate and negative plate faced, and gap is formed between positive plate and negative plate, to control the flowing of ion.
Further improvement scheme: in an at least channel positive plate and negative plate be electrified stream when, and form electric field,
Charged ion can be moved under electric field action, part anion is moved on positive plate and is collected, and part of cation moves to cathode
It is collected on plate, and remaining ion passes through from gap, flows into test section.
Further improvement scheme: the ion calibrating installation further include it is multiple have support plate, the positive plate is installed on one
Support plate, and shape is integral and is set in the side of channel, the negative plate is installed in another support plate, and is formed another
It one entirety and is set in the other side of channel, and positive plate is oppositely arranged with negative plate interval.
Further improvement scheme: the positive plate and negative plate are L-shaped, and are latched by screw in support plate.
Further improvement scheme: at least a positive plate or negative plate are in U-shape, and negative plate or anode are provided among U-shaped
Plate.
Further improvement scheme: the positive and negative pole plate is positive pole copper sheet and cathode copper sheet.
Further improvement scheme: the support plate is not penetrated after being separated for support copper sheet, and several channels by partition.
Further improvement scheme: the contraction section be equipped with ion saturation room outlet import and with control room phase
The logical and sectional dimension contraction section smaller than shrinking short import exports, and contraction section outlet is connected to control room.
Further improvement scheme: the ion calibrating installation is additionally provided with advance section, and the advance section of both ends open is of different sizes
And be in infundibulate, the larger end connection test section one end of split shed, opening small end is in face of driving motor.
Further improvement scheme: the arrival end of ion saturation room is equipped with several apertures, and is saturated indoor peace in ion
It is equipped with extra large pa cotton.
Multi-functional wind system of the invention has the following beneficial effects: by adding control room in ion calibrating installation,
The control room has opposed facing positive plate and negative plate, and gap is formed between positive plate and negative plate, to absorb not
Same ion, enters test section to control the concentration of ion, so that a kind of ideal ion concentration environment is realized, with accurate
Calibrate measuring ion instrument.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of ion calibrating installation of the present invention；
Fig. 2 is the diagrammatic cross-section of ion calibrating installation of the present invention；
Fig. 3 is the schematic diagram of control room shown in Fig. 1；
Fig. 4 is front end face schematic diagram shown in FIG. 1；
Fig. 5 is partial enlargement diagram shown in Fig. 4.
Specific embodiment
Please refer to shown in Fig. 1 to Fig. 5, for the invention discloses a kind of ion calibrating installation 100 schematic diagram comprising
Interconnected ion saturation room 1, contraction section 2, control room 3, diffuser 4, test section 5 and power section 6, and it is placed in one
In space, the arrival end which is saturated room is equipped with several apertures 10, and power section 5 is in communication with the outside, flowed into forming gas,
Outflow path, and the arrival end of ion saturation room is mounted with extra large pa cotton, to purify air.
Ion saturation room 1 is to provide ion source, and the power section 6 includes driving motor 61 and connection driving motor
Fan 62, the control room 3 is set between contraction section 2 and diffuser 4；The contraction section 2 is equipped with to be gone out with ion saturation room
It the import of mouthful connection and is communicated with control room and contraction section that sectional dimension is smaller than shrinking short import exports, which goes out
Mouth is connected to control room.
The control room 3 has cavity 32, several partitions 33 and the multiple poles in cavity surrounded by 31 wall of outside
Change plate 34；Cavity is divided into several channels 35 by the partition, and the cavity 32 is connected to contraction section 2 and diffuser 4, the polarization
Plate 34 is placed in left-right direction in channel 35, and the polarising sheet includes opposed facing positive plate 341 and negative plate 342, and
Gap 340 is formed, between positive plate 341 and negative plate 342 to control the mobility of ion.Pacify in the test section 5
Equipped with ion detection instrument 51, the concentration that can detect ion, Rong Hou are entered in ion detection instrument 51 by the mobility of ion
It is described in detail.
The ion calibrating installation is additionally provided with advance section 7, and the advance section of both ends open is of different sizes and is in infundibulate,
For split shed compared with 5 end of big end connection test section, the small end that is open faces driving motor 61, will be saturated from the ion room 1,
Confined space is formed between contraction section 2, control room 3, diffuser 4, test section 5 and power section 6.
The ion calibrating installation further includes that be installed in channel 35 multiple have support plate 36, and the positive plate 341 is pacified
Loaded in a support plate 36, and shape is integral and is set in 35 side of channel, and the negative plate 342 is installed on another
It on fagging 36, and forms another entirety and is set in same 35 other side of channel, and positive plate 341 and negative plate 342 are spaced
It is oppositely arranged.The positive plate 341 and negative plate 342 are L-shaped, and are latched by screw 343 in support plate 36；Certainly
An at least positive plate 341 or the setting of negative plate 342 can also be in U-shape, and be provided with negative plate 341 or positive plate among U-shaped
342, positive and negative pole plate can be faced each other setting, and form gap 340 therebetween.
In the present embodiment, the positive and negative pole plate is anode copper sheet 341 and cathode copper sheet 342 made of copper product,
And the support plate 36 is support copper sheet, several channels 35 are not penetrated after being separated by partition 33, to control obstructed channel 33
Interior Ion transfer state.
When driving motor 61 rotates, drive fan 62 to rotate and simultaneously form air-flow, with drive in ion saturation room 1 from
Son migrates and goes out, and the ion flows through and shrinks short 2, diffuser 4, enters back into test section 5.Meanwhile in an at least channel 35
When positive copper sheet 341 and cathode copper sheet 342 are electrified stream, and electric field is formed, which will move under electric field action,
Part anion is moved on positive copper sheet 341 and is collected, and part of cation is moved on cathode copper sheet 342 and is collected, and remaining
Ion passes through from gap 340 or passage portion 35, flows into test section.
The present invention in ion calibrating installation by being mounted with control room 4, to control ionic mobility, it is ensured that test section 5
It is interior that there is stable ion concentration.I.e. motor rotate in the case where, to provide a stable wind speed, and drive ion oneself from
The migration of room 1 of son saturation flows into test section 5, can be by the polarization copper sheet in channel 35 when ion concentration is not met in expected situation
34 are electrified pressure, of course, it is possible to optionally open the polarization copper sheet 34 in a channel 35 or the polarization copper in multiple channels
Plate 34, and the voltage swing on controllable polarization copper sheet, to control there is the air of certain ion concentration to flow into test section.
When the copper sheet 34 that polarizes is electrified pressure, the positive and negative ion in gap 340 will be towards 342 He of negative polarization copper sheet
341 side of positive polarization copper sheet is mobile, and is adsorbed on the polarization copper sheet, and the ion (such as biggish ion) not being adsorbed will
Continue to move towards in test section, and can be by the voltage swing on control polarization copper sheet 34, to control corresponding Ion transfer
Air ion enters in test section.
Although for illustrative purposes, the preferred embodiment of the present invention is had been disclosed, but the ordinary skill people of this field
Member will realize without departing from the scope and spirit of the invention as disclosed by the appended claims, various to change
Into, increase and replace be possible.
Claims (10)
1. a kind of ion calibrating installation is saturated room, contraction section, diffuser, test section and power section including interconnected ion,
Ion saturation room provides ion source, and the power section includes driving motor and the fan for connecting driving motor, when driving electricity
When machine rotates, fan is driven to rotate and formed air-flow, to drive ion to be saturated indoor ion flow, and the ion flows through contraction
Short, diffuser, enters back into test section；Ion detection instrument is installed in the test section, it is characterised in that: the contraction section with
Control room is connected between diffuser, which has the cavity surrounded by lateral wall, several partitions and in cavity
Multiple polarising sheets；Cavity is divided into several channels, the cavity connection contraction section and diffuser, the polarising sheet edge by the partition
Left and right directions is placed in channel, and the polarising sheet includes opposed facing positive plate and negative plate, and in positive plate and cathode
Gap is formed between plate, to control the flowing of ion.
2. ion calibrating installation according to claim 1, it is characterised in that: in positive plate and cathode in an at least channel
When plate is electrified stream, and electric field is formed, charged ion moves under electric field action, and part anion is moved on positive plate and received
Collection, part of cation is moved on negative plate and is collected, and remaining ion passes through from gap, flows into test section.
3. ion calibrating installation according to claim 1, it is characterised in that: the ion calibrating installation further includes multiple having
Support plate, the positive plate is installed on a support plate, and shape is integral and is set in the side of channel, the negative plate installation
It in another support plate, and forms another entirety and is set in the other side of channel, and positive plate is opposite with negative plate interval sets
It sets.
4. ion calibrating installation according to claim 3, it is characterised in that: the positive plate and negative plate are L-shaped, and lead to
Screw lock is crossed in support plate.
5. ion calibrating installation according to claim 3, it is characterised in that: at least a positive plate or negative plate are in U-shape, and
Negative plate or positive plate are provided among U-shaped.
6. ion calibrating installation according to any one of claim 1 to 5, it is characterised in that: the positive and negative pole plate is positive
Pole copper sheet and cathode copper sheet.
7. ion calibrating installation according to claim 6, it is characterised in that: the support plate is support copper sheet, and several
Channel is not penetrated after being separated by partition.
8. ion calibrating installation according to claim 1, it is characterised in that: the contraction section is equipped with to be gone out with ion saturation room
It the import of mouthful connection and is communicated with control room and contraction section that sectional dimension is smaller than shrinking short import exports, contraction section outlet
It is connected to control room.
9. ion calibrating installation according to claim 8, it is characterised in that: the ion calibrating installation is additionally provided with advance
Section, the advance section of both ends open is of different sizes and is in infundibulate, and the larger end connection test section one end of split shed, be open small end
In face of driving motor.
10. ion calibrating installation according to claim 1, it is characterised in that: the arrival end of ion saturation room is equipped with
Several apertures, and have extra large pa cotton in ion saturation indoor placement device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910349486.2A CN110277294A (en) | 2019-04-28 | 2019-04-28 | Ion calibrating installation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910349486.2A CN110277294A (en) | 2019-04-28 | 2019-04-28 | Ion calibrating installation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110277294A true CN110277294A (en) | 2019-09-24 |
Family
ID=67960290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910349486.2A Pending CN110277294A (en) | 2019-04-28 | 2019-04-28 | Ion calibrating installation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110277294A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6107624A (en) * | 1997-07-18 | 2000-08-22 | Bruker-Saxonia Analytik Gmbh | Ion mobility spectrometer with switchable electrodes |
| CN101738429A (en) * | 2008-11-26 | 2010-06-16 | 岛津分析技术研发（上海）有限公司 | Ion separation, enrichment and detection device |
| US20150340221A1 (en) * | 2014-05-22 | 2015-11-26 | W. Henry Benner | Instruments for measuring ion size distribution and concentration |
-
2019
- 2019-04-28 CN CN201910349486.2A patent/CN110277294A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6107624A (en) * | 1997-07-18 | 2000-08-22 | Bruker-Saxonia Analytik Gmbh | Ion mobility spectrometer with switchable electrodes |
| CN101738429A (en) * | 2008-11-26 | 2010-06-16 | 岛津分析技术研发（上海）有限公司 | Ion separation, enrichment and detection device |
| US20150340221A1 (en) * | 2014-05-22 | 2015-11-26 | W. Henry Benner | Instruments for measuring ion size distribution and concentration |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |