CN110261034A - A kind of six-dimension force sensor calibration device and its scaling method - Google Patents

Abstract

The present invention provides a kind of six-dimension force sensor calibration device and its scaling method, comprising: six-dimension force sensor calibration unit, rotary unit, running rail unit, overturning mobile unit, mobile press unit, overall base unit；The rotation of rotary unit control six-dimension force sensor, running rail unit moves horizontally six-dimension force sensor, overturning mobile unit is moved up and down and is overturn to six-dimension force sensor, mobile press unit is used for after overturning mobile unit integrally overturns six-dimension force sensor, press machine and six-dimension force sensor is set to be constantly in identical relative position, with the power and torque of precise measurement six-dimension force sensor six direction；Realize the fully automatic integral calibration of six-dimension force sensor, and calibration is laborsaving, both the burden of manual handling had been reduced or remitted, after having demarcated the power/torque in a direction every time, carry out manual adjusting operation, and indirectly increase the accuracy of calibration, and be used cooperatively with normal pressure machine, so that calibration is more tended to standardization and systematization.

Description

A kind of six-dimension force sensor calibration device and its scaling method

Technical field

The present invention relates to transducer calibration technical fields, more specifically to a kind of six-dimension force sensor calibration device And its scaling method.

Background technique

Six-dimension force sensor can detect all one's effort information of three-dimensional space simultaneously, i.e., three-dimensional force information and three-dimensional moment letter Breath.Six-dimension force sensor is all widely used in fields such as aerospace, robot technology, as flywheel transmission system by Power monitoring, lunar rover landing experiment, the low impact docking of aircraft, precision instrument assembly, the control of robot two hands coordination etc..China High-precision six-dimension force sensor relies primarily on import, and therefore, developing six-dimension force sensor with independent intellectual property rights has weight The strategic importance wanted.Caliberating device is in the development process of sensor in occupation of extremely important effect, the precision of caliberating device The measurement accuracy of six-dimension force sensor directly is restrict, develops the six-dimension force sensor calibration device of high accuracy positioning and load Important technical support can be provided for the Accurate Calibration of six-dimension force sensor, be with a wide range of applications.

It is demarcated currently, caliberating device has using weight type, weight type calibration is to provide normal loading force using grade counterweight, The independent calibration that all directions unit force is realized by pulley or lever principle, needs manually to carry weight during the calibration process Code not can be carried out automatic load and dynamic load load calibration not only, bring the puzzlement of carrying heavy goods to calibration personnel yet, grasp Make complexity, calibration is laborious, demarcates low efficiency, and the not system of scaling method calibration, cannot achieve fully automatic integral and demarcate.

Summary of the invention

It is a primary object of the present invention to propose a kind of six-dimension force sensor calibration device and its scaling method, it is intended to solve In the prior art, caliberating device has is demarcated using weight type, is needed manually to carry counterweight, not can be carried out automatic load not only And dynamic load load calibration, the puzzlement of carrying heavy goods also is brought to calibration personnel, complicated for operation, calibration is laborious, calibration effect The problem of rate is low, and the not system of scaling method calibration, cannot achieve fully automatic integral calibration.

In order to solve the above technical problems, the present invention provides a kind of six-dimension force sensor calibration device, comprising:

Six-dimension force sensor calibration unit (1), rotary unit (2), running rail unit (3), overturning mobile unit (4), movement Press unit (5), overall base unit (6)；The rotary unit (2) connect with the running rail unit (3)；The sliding rail list The both ends of first (3) are connect with two overturning mobile units (4) respectively；The overturning mobile unit (4) and the mobile pressure Power machine unit (5) is fixedly connected on the overall base unit (6)；The six-dimension force sensor calibration unit (1) and six Dimensional force sensor upper end is closely connected；The rotary unit (2) and the bottom of the six-dimension force sensor are closely connected It connects；

The rotary unit (2) is used to control the rotation of the six-dimension force sensor, and the running rail unit (3) is for level The mobile six-dimension force sensor, the overturning mobile unit (4) be used to move up and down the six-dimension force sensor with Flip-flop movement, the mobile press unit (5) includes press machine (18), and the mobile press unit (5) is used for described After overturning mobile unit (4) integrally overturns the six-dimension force sensor, sense the press machine (18) and the six-dimensional force Device is constantly in identical relative position, realizes the power and torque for measuring the six-dimension force sensor six direction.

Optionally, the six-dimension force sensor calibration unit 1 includes 17 calibration holes (1-1), clockwise with X-axis positive direction Sequence, respectively K1, K2, K3, K4, K5, K6, K7, K8, K9, K10, K11, K12, K13, K14, K15, K16, K17；Described six Dimensional force sensor calibration unit (1) includes rounded portions and four protrusions positioned at the rounded portions periphery, four protrusions Angle in portion between any two is 90 degree, and the center of circle of the rounded portions is the K17, is established using the center of circle as coordinate axis origin three-dimensional Reference axis, described K1, K2, K3, K4 are located at X-axis forward direction, and it is positive that described K5, K6, K7, K8 are located at Y-axis, the K9, K10, K11, K12 is located at X-axis negative sense, and described K13, K14, K15, K16 are located at Y-axis negative sense；Described K1, K5, K9, K13 are respectively positioned on described four The upper surface of protrusion, described K3, K7, K11, K15 are located at before four protrusions, the K2, K6, K10, K14 is located at the right side of four protrusions, and described K4, K8, K12, K16 are located at a left side for four protrusions Side；

The six-dimension force sensor calibration device further includes electric control system, and the electric control system includes man-machine boundary Face, industrial personal computer, servo controller, the man-machine interface and the industrial personal computer are as host computer, monitoring displacement, angle and power letter Number；The position variation signal of the six-dimension force sensor described in mark timing acquiring, and the position variation signal passed to described Feedback signal and required displacement are compared by servo controller and the host computer, the host computer, and with the difference after relatively Value is controlled, and forms closed loop Displacement Feedback control system, and the press machine according to power/Torque Control of calibration (18) is to institute Corresponding calibration hole (1-1) for stating six-dimension force sensor calibration unit (1) is operated, and carries out signal acquisition, final control in real time The size of pressing pressure；It is transferred to by acquisition, amplification, the processing to the six-dimension force sensor signal, and by the data of measurement The host computer is shown and is recorded.

Optionally, the rotary unit (2) include transmission module (7), link block (8), support storage module (9) and by Dynamic rotating module (10)；The transmission module (7) includes first servo motor (7-1), first shaft coupling (7-2), planetary reduction gear Device (7-3)；The link block (8) includes first bearing connected unit (8-1), bearing support platform (8-2), the first connecting hole (8- 3), Circular gratings (8-4), Circular gratings trestle table (8-5)；The support storage module (9) includes support storage ontology (9-1), the Two connecting holes (9-2), ball (9-3), second bearing connected unit (9-4)；The passive rotation module (10) includes first bearing (10-1), the first washer (10-2)；The first servo motor (7-1) and the planetary reduction gear (7-3) pass through described first Shaft coupling (7-2) is attached, and transmission force and torque is realized, for slowing down；The support storage module (9) and the connection mould Block (8) carries out axis by the first bearing connected unit (8-1), the ball (9-3), the second bearing connected unit (9-4) Hold formula connection；The support storage module (9) is for carrying the first servo motor (7-1) and the six-dimensional force being supported to pass Sensor；

Second connecting hole (9-2) is attached with the running rail unit (3), guarantees that the running rail unit (3) will be put down Shifting movement is transferred on the six-dimension force sensor；The Circular gratings (8-4) are for real-time detection and feed back the six-dimensional force biography The rotation angle of sensor gives the first servo motor (7-1)；The Circular gratings trestle table (8-5) is by the Circular gratings (8-4) It is fixed on the bearing support platform (8-2).

Optionally, the first bearing (10-1) uses different calibration positions to be applicable in the calibration of different ranges；Specifically Refer to the change by the position of action point of the power in the three elements to power, that is, change its demarcate hole relative to calibration center away from From so as to measure the torque of different ranges；The first bearing (10-1) uses different size size different to be applicable in The model of the six-dimension force sensor；The size of the i.e. described first bearing (10-1) according to the six-dimension force sensor maximum ruler It is very little to be designed, and annulus of different specifications and sizes is designed, by being added and described six among the first bearing (10-1) The same annulus of the specification of the concentric contact of dimensional force sensor, to connect the six-dimension force sensor of different model.

Optionally, the running rail unit (3) includes sliding rail matrix (11), The gear deceleration module (12), lead screw transmission module (13), connection sliding block module (14)；The sliding rail matrix (11) includes locating slot (11-1), motor hole (11-2), gear shaft (11-3), motor shaft (11-4), motor locating slot (11-5), track fixation hole (11-6), sliding block shifting chute (11-7), the first light Grid ruler (11-8) moves integrally slot (11-9), motor axillare (11-10)；The lead screw transmission module (13) includes connecting shaft (13-1), the first locating piece (13-2), second packing ring (13-3), second bearing (13-4), lead screw (13-5)；The connection sliding block Module (14) include sliding rail (14-1), can along the sliding rail (14-1) slide the first sliding block (14-2), with first sliding block The auxiliary slider (14-3) of (14-2) connection, the first hole (14-4) being located on the sliding rail (14-1) are slided positioned at described first The second hole (14-5) on block (14-2), the third hole (14-6) for being located at the upper end the auxiliary slider (14-3), be located at it is described auxiliary Help the 4th hole (14-7) of sliding block (14-3) lower end side；Pass through the motor hole (11-2), the gear shaft (11-3) and institute Connecting shaft (13-1) is stated, power is transferred to the The gear deceleration module (12), and be finally transmitted to the lead screw (13-5), institute Lead screw (13-5) is stated by the 4th hole (14-7) on the auxiliary slider (14-3), power is transferred to the auxiliary and is slided Block (14-3), first sliding block (14-2) connect with the rotary unit (2), realize the translation of the six-dimension force sensor； First grating scale (11-8) real-time detection and the location information for feeding back the six-dimension force sensor realize closed-loop control；Institute It states the second connecting hole (9-2) to be attached with second hole (14-5), guarantees that the lead screw (13-5) transmits translational motion On to the six-dimension force sensor.

Optionally, the overturning mobile unit (4) includes turbine slowdown module (15), electric pushrod (16), support ontology Module (17)；The turbine slowdown module (15) includes worm type of reduction gearing (15-1), second shaft coupling (15-2), second watches Take motor (15-3)；The support body module (17) includes hole guide rail (17-1), the 5th hole (17-2)；Hole guide rail (the 17- 1) it is connect with the end of the running rail unit (3)；The overturning mobile unit (4) is fixed on institute by the 5th hole (17-2) It states on overall base unit (6)；The turbine slowdown module (15) is used for for realizing turn over function, the electric pushrod (16) Realization moves up and down function.

Optionally, the mobile press unit (5) further includes slide module (19)；The press machine (18) includes pressure Machine ontology and the press machine sensor (18-1) that the press body end is set；The slide module (19) includes third Bearing (19-1), third washer (19-2), the second locating piece (19-3), screw rod (19-4), third shaft coupling (19-5), third are watched Take motor (19-6), the second sliding block (19-7), guide rail (19-8), mobile platform (19-9)；Second locating piece (19-3) with The totality base unit (6) is fixedly connected, and the screw rod (19-4) passes through the 3rd bearing (19-1), the third The cooperation of washer (19-2), second locating piece (19-3) drives the mobile platform (19-9) to be moved.

Optionally, the overall base unit (6) include servo motor storage groove (20-1), passive swivelling chute (20-2), Gear storage groove (20-3), third connecting hole (20-4), second grating scale (20-5)；

The servo motor storage groove (20-1) is used to store the third servo electricity of the mobile press unit (5) Machine (19-6)；The passive swivelling chute (20-2) carries out the first bearing (10-1) on the rotary unit (2) steady Support and turning effort；The gear storage groove (20-3) is used to store the gear after overturn on the running rail unit (3)；It is described Third connecting hole (20-4) and the 5th hole (17-2) of overturning mobile unit (4) are attached.

Optionally, when demarcating power in Z-direction, the slide module (19) is moved, the second grating scale (20-5) First displacement signal is passed into the servo controller and the host computer, the host computer by the first feedback signal with it is required Displacement is compared, and is controlled with the difference after relatively, and closed loop Displacement Feedback control system is formed, and finally obtains the first essence True shift position；The press machine (18) operates the K17 of the six-dimension force sensor calibration unit (1), demarcates Z axis side To power；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By to described six Acquisition, amplification, the processing of dimensional force sensor signal, and the data real-time delivery of measurement is shown simultaneously to the host computer Record；

On the basis of the state of the six-dimension force sensor calibration device of power on having demarcated the Z-direction, continue to mark The fixed torque around X-axis, the running rail unit (3) are moved left and right, and the first grating scale (11-8) is by second displacement signal The servo controller and the host computer are passed to, the second feedback signal and required displacement are compared by the host computer, And controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the second accurate movement position is finally obtained；Institute Press machine (18) is stated to operate the K5 and K13 of the six-dimension force sensor calibration unit (1), calibration around X-axis positive direction and The torque of negative direction；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By right Acquisition, amplification, the processing of the six-dimension force sensor signal, and by the data real-time delivery of measurement to the host computer, it carries out It shows and records；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around X-axis, continue Demarcate the torque around Y-axis, the rotary unit (2) carries out positive/negative 90 ° of rotation, and the Circular gratings (8-4) are by the first angle of rotation Degree signal passes to the servo controller and the host computer, and the host computer carries out third feedback signal and required displacement Compare, and controlled with the difference after relatively, forms closed loop Displacement Feedback control system, finally obtain the first fine rotational angle Degree；Then the running rail unit (3) is moved left and right, and third displacement signal is passed to institute by the first grating scale (11-8) State servo controller and the host computer, the 4th feedback signal and required displacement are compared by the host computer, and with comparing Difference afterwards is controlled, and is formed closed loop Displacement Feedback system, is finally obtained third accurate movement position；The press machine (18) The K1 and K9 of the six-dimension force sensor calibration unit (1) are operated, the torque around Y-axis positive direction and negative direction is demarcated； The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By being passed to the six-dimensional force Acquisition, amplification, the processing of sensor signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around Y-axis, continue The power of Y-direction is demarcated, the running rail unit (3) is moved to middle position, and the first grating scale (11-8) believes the 4th displacement Number the servo controller and the host computer are passed to, the host computer compares the 5th feedback signal with required displacement Compared with, and controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the 4th accurate movement position is finally obtained It sets；The overturning mobile unit (4) moves up, overturns 90 °, moves down, and finally places the six-dimension force sensor vertically and is fixed up, institute It states press machine (18) to operate the K7 of the six-dimension force sensor calibration unit (1), demarcates the torque around Y-axis positive direction； Then 180 ° of rotation of rotary unit (2) control, the second rotational angle signal is passed to described watch by the Circular gratings (8-4) Take controller and the host computer, the 6th feedback signal and required displacement are compared by the host computer, and with after relatively Difference is controlled, and is formed closed loop Displacement Feedback system, is finally obtained the second fine rotational angle；The press machine (18) is to institute The K15 for stating six-dimension force sensor calibration unit (1) is operated, and the torque around Y-axis negative direction is demarcated；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By acquisition to the six-dimension force sensor signal, put Greatly, it handles, and by the data real-time delivery of measurement to the host computer, is shown and recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the Y-direction, continue to mark Determine the power of X-direction, the rotary unit (2) carries out 90 ° and 180 ° of rotation, and the Circular gratings (8-4) are by third rotational angle Signal passes to the servo controller and the host computer, and the host computer compares the 7th feedback signal with required displacement Compared with, and controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, third fine rotational angle is finally obtained Degree；The press machine (18) operates the K3 and K11 of the six-dimension force sensor calibration unit (1), demarcates X-axis positive direction With the power of negative direction；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By right Acquisition, amplification, the processing of the six-dimension force sensor signal, and by the data real-time delivery of measurement to the host computer, it carries out It shows and records；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the X-direction, continue to mark Fixed torque about the z axis, the running rail unit (3) is mobile to Y-axis forward direction, and the first grating scale (11-8) is by the 5th displacement signal The servo controller and the host computer are passed to, the 8th feedback signal and required displacement are compared by the host computer, And controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the 5th accurate movement position is finally obtained；So Afterwards the rotary unit (2) rotate in the forward direction about the z axis 3 times 90 °, the Circular gratings (8-4) pass to the 4th rotational angle signal The servo controller and the host computer, the host computer by the 9th feedback signal and it is required displacement be compared, and with than Difference after relatively is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 4th fine rotational angle；The pressure Machine (18) operates K4, K8, K12, K16 of the six-dimension force sensor calibration unit (1), calibration positive direction about the z axis Torque；The running rail unit (3) is mobile to Y-axis negative sense, and the 6th displacement signal is passed to institute by the first grating scale (11-8) State servo controller and the host computer, the tenth feedback signal and required displacement are compared by the host computer, and with comparing Difference afterwards is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 6th accurate movement position；Then the rotation Turn unit (2) about the z axis negative sense rotate 3 times 90 °, the 5th rotational angle signal is passed to the servo by the Circular gratings (8-4) 11st feedback signal and required displacement are compared by controller and the host computer, the host computer, and with after relatively Difference is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 5th fine rotational angle；The press machine (18) It to K2, K6 of the six-dimension force sensor calibration unit (1), K10, K14, operates, the torque of calibration negative direction about the z axis； The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By being passed to the six-dimensional force Acquisition, amplification, the processing of sensor signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded.

In order to solve the above technical problems, the present invention also provides a kind of marks using above-mentioned six-dimension force sensor calibration device Determine method, comprising:

When demarcating power in Z-direction, the slide module (19) is moved, and the second grating scale (20-5) is by first Shifting signal passes to the servo controller and the host computer, and the host computer carries out the first feedback signal and required displacement Compare, and controlled with the difference after relatively, forms closed loop Displacement Feedback control system, finally obtain the first accurate movement position It sets；The press machine (18) operates the K17 of the six-dimension force sensor calibration unit (1), demarcates the power of Z-direction； The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By being passed to the six-dimensional force Acquisition, amplification, the processing of sensor signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded；

On the basis of the state of the six-dimension force sensor calibration device of power on having demarcated the Z-direction, continue to mark The fixed torque around X-axis, the running rail unit (3) are moved left and right, and the first grating scale (11-8) is by second displacement signal The servo controller and the host computer are passed to, the second feedback signal and required displacement are compared by the host computer, And controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the second accurate movement position is finally obtained；Institute Press machine (18) is stated to operate the K5 and K13 of the six-dimension force sensor calibration unit (1), calibration around X-axis positive direction and The torque of negative direction；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By right Acquisition, amplification, the processing of the six-dimension force sensor signal, and by the data real-time delivery of measurement to the host computer, it carries out It shows and records；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around X-axis, continue Demarcate the torque around Y-axis, the rotary unit (2) carries out positive/negative 90 ° of rotation, and the Circular gratings (8-4) are by the first angle of rotation Degree signal passes to the servo controller and the host computer, and the host computer carries out third feedback signal and required displacement Compare, and controlled with the difference after relatively, forms closed loop Displacement Feedback control system, finally obtain the first fine rotational angle Degree；Then the running rail unit (3) is moved left and right, and third displacement signal is passed to institute by the first grating scale (11-8) State servo controller and the host computer, the 4th feedback signal and required displacement are compared by the host computer, and with comparing Difference afterwards is controlled, and is formed closed loop Displacement Feedback system, is finally obtained third accurate movement position；The press machine (18) The K1 and K9 of the six-dimension force sensor calibration unit (1) are operated, the torque around Y-axis positive direction and negative direction is demarcated； The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By being passed to the six-dimensional force Acquisition, amplification, the processing of sensor signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around Y-axis, continue The power of Y-direction is demarcated, the running rail unit (3) is moved to middle position, and the first grating scale (11-8) believes the 4th displacement Number the servo controller and the host computer are passed to, the host computer compares the 5th feedback signal with required displacement Compared with, and controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the 4th accurate movement position is finally obtained It sets；The overturning mobile unit (4) moves up, overturns 90 °, moves down, and finally places the six-dimension force sensor vertically and is fixed up, institute It states press machine (18) to operate the K7 of the six-dimension force sensor calibration unit (1), demarcates the torque around Y-axis positive direction； Then 180 ° of rotation of rotary unit (2) control, the second rotational angle signal is passed to described watch by the Circular gratings (8-4) Take controller and the host computer, the 6th feedback signal and required displacement are compared by the host computer, and with after relatively Difference is controlled, and is formed closed loop Displacement Feedback system, is finally obtained the second fine rotational angle；The press machine (18) is to institute The K15 for stating six-dimension force sensor calibration unit (1) is operated, and the torque around Y-axis negative direction is demarcated；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By acquisition to the six-dimension force sensor signal, put Greatly, it handles, and by the data real-time delivery of measurement to the host computer, is shown and recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the Y-direction, continue to mark Determine the power of X-direction, the rotary unit (2) carries out 90 ° and 180 ° of rotation, and the Circular gratings (8-4) are by third rotational angle Signal passes to the servo controller and the host computer, and the host computer compares the 7th feedback signal with required displacement Compared with, and controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, third fine rotational angle is finally obtained Degree；The press machine (18) operates the K3 and K11 of the six-dimension force sensor calibration unit (1), demarcates X-axis positive direction With the power of negative direction；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By right Acquisition, amplification, the processing of the six-dimension force sensor signal, and by the data real-time delivery of measurement to the host computer, it carries out It shows and records；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the X-direction, continue to mark Fixed torque about the z axis, the running rail unit (3) is mobile to Y-axis forward direction, and the first grating scale (11-8) is by the 5th displacement signal The servo controller and the host computer are passed to, the 8th feedback signal and required displacement are compared by the host computer, And controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the 5th accurate movement position is finally obtained；So Afterwards the rotary unit (2) rotate in the forward direction about the z axis 3 times 90 °, the Circular gratings (8-4) pass to the 4th rotational angle signal The servo controller and the host computer, the host computer by the 9th feedback signal and it is required displacement be compared, and with than Difference after relatively is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 4th fine rotational angle；The pressure Machine (18) operates K4, K8, K12, K16 of the six-dimension force sensor calibration unit (1), calibration positive direction about the z axis Torque；The running rail unit (3) is mobile to Y-axis negative sense, and the 6th displacement signal is passed to institute by the first grating scale (11-8) State servo controller and the host computer, the tenth feedback signal and required displacement are compared by the host computer, and with comparing Difference afterwards is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 6th accurate movement position；Then the rotation Turn unit (2) about the z axis negative sense rotate 3 times 90 °, the 5th rotational angle signal is passed to the servo by the Circular gratings (8-4) 11st feedback signal and required displacement are compared by controller and the host computer, the host computer, and with after relatively Difference is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 5th fine rotational angle；The press machine (18) K2, K6, K10, K14 of the six-dimension force sensor calibration unit (1) are operated, the torque of negative direction about the z axis is demarcated；Institute It states press machine sensor (18-1) and carries out signal acquisition, the size of final real-time control pressure；By being sensed to the six-dimensional force Acquisition, amplification, the processing of device signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded.

Beneficial effect

The present invention provides a kind of six-dimension force sensor calibration device and its scaling method, six-dimension force sensor calibration dresses Set includes: six-dimension force sensor calibration unit (1), rotary unit (2), running rail unit (3), overturning mobile unit (4), mobile pressure Power machine unit (5), overall base unit (6)；Rotary unit (2) is connect with running rail unit (3)；The both ends of running rail unit (3) point It is not connect with two overturning mobile units (4)；Overturning mobile unit (4) and mobile press unit (5) are fixedly connected with total On body base unit (6)；Six-dimension force sensor calibration unit (1) is closely connect with six-dimension force sensor upper end；Rotation is single First (2) are closely connect with the bottom of six-dimension force sensor；Rotary unit (2) is used to control the rotation of six-dimension force sensor, Running rail unit (3) is used to carry out up and down six-dimension force sensor for moving horizontally six-dimension force sensor, overturning mobile unit (4) Mobile and flip-flop movement, mobile press unit (5) include press machine (18), and mobile press unit (5) are used to move in overturning After moving cell (4) integrally overturns six-dimension force sensor, press machine (18) is made to be constantly in identical phase with six-dimension force sensor To position, the power and torque of measurement six-dimension force sensor six direction are realized；By above-mentioned six-dimension force sensor calibration device, Fully automatic integral calibration may be implemented, calibration is laborsaving, and calibration efficiency is improved, the burden of manual handling had both been reduced or remitted, without After having demarcated the power/torque in a direction every time, then manual adjusting operation is carried out, and indirectly increases the accuracy of calibration, And be used cooperatively with normal pressure machine, so that calibration is more tended to standardization and systematization.

Detailed description of the invention

Fig. 1 is a kind of schematic diagram of six-dimension force sensor calibration device provided in an embodiment of the present invention；

Fig. 2 is a kind of schematic diagram of six-dimension force sensor calibration unit provided in an embodiment of the present invention；

Fig. 3 is a kind of schematic diagram for demarcating hole provided in an embodiment of the present invention；

Fig. 4 is a kind of schematic diagram of rotary unit provided in an embodiment of the present invention；

Fig. 5 is a kind of schematic diagram of transmission module provided in an embodiment of the present invention；

Fig. 6 is a kind of schematic diagram of link block provided in an embodiment of the present invention；

Fig. 7 is a kind of schematic diagram for supporting storage module provided in an embodiment of the present invention；

Fig. 8 is a kind of schematic diagram of running rail unit provided in an embodiment of the present invention；

Fig. 9 is a kind of schematic diagram of sliding rail matrix provided in an embodiment of the present invention；

Figure 10 is the schematic diagram of a kind of lead screw transmission module provided in an embodiment of the present invention and the first locating piece；

Figure 11 is a kind of schematic diagram of connection sliding block module provided in an embodiment of the present invention；

Figure 12 is a kind of schematic diagram for overturning mobile unit provided in an embodiment of the present invention；

Figure 13 is a kind of schematic diagram for supporting body module provided in an embodiment of the present invention；

Figure 14 is a kind of schematic diagram of mobile press unit provided in an embodiment of the present invention；

Figure 15 is a kind of schematic diagram of overall base unit provided in an embodiment of the present invention；

Figure 16 is a kind of flow chart of the main program of six-dimension force sensor calibration method provided in an embodiment of the present invention；

Figure 17 is a kind of subroutine flow chart for demarcating Z-direction power provided in an embodiment of the present invention；

Figure 18 is a kind of subroutine flow chart of torque of the calibration provided in an embodiment of the present invention around X-axis；

Figure 19 is a kind of subroutine flow chart of torque of the calibration provided in an embodiment of the present invention around Y-axis；

Figure 20 is a kind of subroutine flow chart of power for demarcating Y-direction provided in an embodiment of the present invention；

Figure 21 is a kind of subroutine flow chart of power for demarcating X-direction provided in an embodiment of the present invention；

Figure 22 is a kind of subroutine flow chart of the torque of calibration provided in an embodiment of the present invention about the z axis.

Specific embodiment

Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.

The present embodiment will provide a kind of six-dimension force sensor calibration device, and referring to Fig. 1, Fig. 1 is provided in this embodiment one The schematic diagram of kind six-dimension force sensor calibration device, the six-dimension force sensor calibration device include:

Six-dimension force sensor calibration unit (1), rotary unit (2), running rail unit (3), overturning mobile unit (4), movement Press unit (5), overall base unit (6)；Rotary unit (2) is connect with running rail unit (3)；The both ends of running rail unit (3) It is connect respectively with two overturning mobile units (4)；Overturning mobile unit (4) and mobile press unit (5) are fixedly connected with On overall base unit (6)；Six-dimension force sensor calibration unit (1) is closely connect with six-dimension force sensor upper end；Rotation Unit (2) is closely connect with the bottom of six-dimension force sensor；Six-dimension force sensor calibration unit (1) and six-dimension force sensor Upper end can closely be connected by bolt；Rotary unit (2) and the bottom of six-dimension force sensor can be carried out by bolt Close connection；Rotary unit (2) is used to control the rotation of six-dimension force sensor, and running rail unit (3) is for moving horizontally six-dimensional force Sensor, overturning mobile unit (4) is used to move up and down six-dimension force sensor and flip-flop movement, mobile press unit It (5) include press machine (18), mobile press unit (5) are used to integrally turn over six-dimension force sensor in overturning mobile unit (4) After turning, press machine (18) and six-dimension force sensor is made to be constantly in identical relative position, realizes measurement six-dimension force sensor six The power and torque in a direction.

The rotation of rotary unit (2), running rail unit (3) move horizontally, and overturning mobile unit (4) moving up and down and turning over Transhipment is dynamic, and mobile press unit (5) are all the movements realized using full-automatic mode.

By above-mentioned six-dimension force sensor calibration device, fully automatic integral calibration may be implemented, demarcate laborsaving, raising Efficiency is demarcated, the burden of manual handling had both been reduced or remitted, and after having demarcated the power/torque in a direction every time, then had carried out hand It is dynamic to adjust operation, and the accuracy of calibration indirectly is increased, and be used cooperatively with normal pressure machine, make calibration more tend to mark Standardization and systematization.

Optionally, in the present embodiment, mobile press unit (5) are used to pass six-dimensional force in overturning mobile unit (4) After sensor integrally overturns 90 °, press machine (18) and six-dimension force sensor is made to be constantly in identical relative position.

Optionally, in the present embodiment, referring to fig. 2, Fig. 3, Fig. 2 be a kind of six-dimension force sensor mark provided in this embodiment The schematic diagram of order member, Fig. 3 are a kind of schematic diagram for demarcating hole provided in this embodiment, six-dimension force sensor calibration unit (1) Including 17 calibration holes (1-1), with X-axis positive direction up time needle sort, respectively K1, K2, K3, K4, K5, K6, K7, K8, K9, K10,K11,K12,K13,K14,K15,K16,K17；Six-dimension force sensor calibration unit (1) include rounded portions and be located at rounded portions Four protrusions of periphery, the angle in four protrusions between any two is 90 degree, and the center of circle of rounded portions is K17, is with the center of circle Coordinate axis origin establishes 3-D walls and floor, and K1, K2, K3, K4 are located at X-axis forward direction, and it is positive that K5, K6, K7, K8 are located at Y-axis, K9, K10, K11, K12 are located at X-axis negative sense, and K13, K14, K15, K16 are located at Y-axis negative sense；K1, K5, K9, K13 are respectively positioned on four protrusions The upper surface in portion, K3, K7, K11, K15 are located at before four protrusions, K2, K6, K10, K14 be located at four it is convex The right side in portion out, K4, K8, K12, K16 are located at the left side of four protrusions；Six-dimension force sensor calibration unit (1) It further include 4 connecting holes (1-2) positioned at rounded portions；

Six-dimension force sensor calibration device further includes electric control system, and electric control system includes man-machine interface, industry control Machine, servo controller, man-machine interface and industrial personal computer are as host computer, monitoring displacement, angle and force signal；In mark timing acquiring six The position variation signal of dimensional force sensor, and position variation signal is passed into servo controller and host computer, host computer will be anti- Feedback signal is compared with required displacement, and is controlled with the difference after relatively, and closed loop Displacement Feedback control system is formed, and It is carried out according to corresponding calibration hole (1-1) of the power of the calibration/Torque Control press machine (18) to six-dimension force sensor calibration unit (1) Operation, and signal acquisition is carried out, the size of final real-time control pressure；By acquisition to six-dimension force sensor signal, amplification, Processing, and the data of measurement are transferred to host computer, it is shown and is recorded.

Motor rotation is controlled by PC machine, is used cooperatively, six-dimension force sensor can be connected with the press machine of standard Continuous sound calibration realizes the accurate load of calibration power using closed loop force-feedback control system, and is continuously loaded, and operates It is simple and convenient, demarcate loading force size is stepless adjustable and high resolution.

Wherein six-dimension force sensor calibration unit (1) is special in order to make uniaxial press machine (18) that can measure six-dimensional force Door one stressing device of design, and the present invention uses seriation, modular think of to six-dimension force sensor calibration unit (1) Think, devises the six-dimension force sensor calibration unit (1) and first bearing (10-1) of a variety of different models, different range sizes； Different ranges specifically refer to the change of the position of action point by the power in the three elements to power, that is, change its demarcate hole relative to The distance at calibration center, to allow to measure the torque of different ranges by different model；Different model specifically refers to First bearing (10-1) uses different size size to be applicable in the model of the different six-dimension force sensors；First bearing (10- 1) size is designed according to the full-size of six-dimension force sensor, and designs annulus of different specifications and sizes, by The annulus as the specification of the concentric contact of six-dimension force sensor is added among one bearing (10-1), to connect different model Six-dimension force sensor；Six-dimension force sensor calibration unit (1) is closely connect by bolt with six-dimension force sensor upper end.It is logical The rotary unit (2) of the six-dimension force sensor calibration unit (1) for developing seriation and compatibility is crossed, realizes and is compatible with multrirange, more The fully automatic integral of the six-dimension force sensor of model is demarcated.

Optionally, in the present embodiment, referring to fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 4 be a kind of rotation provided in this embodiment singly The schematic diagram of member, Fig. 5 are a kind of schematic diagram of transmission module provided in this embodiment, and Fig. 6 is a kind of company provided in this embodiment The schematic diagram of connection module, Fig. 7 are a kind of schematic diagram for supporting storage module provided in this embodiment, and rotary unit (2) includes passing Dynamic model block (7), link block (8), support storage module (9) and passive rotation module (10)；Transmission module (7) is watched including first Take motor (7-1), first shaft coupling (7-2), planetary reduction gear (7-3)；Link block (8) includes first bearing connected unit (8- 1), bearing support platform (8-2), the first connecting hole (8-3), Circular gratings (8-4), Circular gratings trestle table (8-5)；Support storage module It (9) include support storage ontology (9-1), the second connecting hole (9-2), ball (9-3), second bearing connected unit (9-4)；By turn Dynamic model block (10) includes first bearing (10-1), the first washer (10-2)；First servo motor (7-1) and planetary reduction gear (7- 3) it is attached by first shaft coupling (7-2), transmission force and torque is realized, for slowing down；It supports storage module (9) and connects Module (8) carries out bearing type connection by first bearing connected unit (8-1), ball (9-3), second bearing connected unit (9-4)；Branch Support storage module (9) is for carrying first servo motor (7-1) and supporting six-dimension force sensor；Second connecting hole (9-2) and cunning Rail unit (3) is attached, specifically, the second connecting hole (9-2) is attached with the second hole (14-5), guarantees running rail unit (3) translational motion is transferred on six-dimension force sensor；Circular gratings (8-4) are for real-time detection and feed back six-dimension force sensor Angle is rotated to servo controller and host computer, achievees the purpose that be precisely controlled；Circular gratings trestle table (8-5) is by Circular gratings (8- 4) it is fixed on bearing support platform (8-2).

Optionally, in the present embodiment, rotary unit (2) is according to compatible principle, in order to be suitable for the six of disposable type Dimensional force sensor, can be in the following ways: first bearing (10-1) uses different size size to be applicable in different six-dimensional forces The model of sensor；The size of first bearing (10-1) is designed according to the full-size of six-dimension force sensor, and is designed not The annulus of same specification size, by the way that the specification one with the concentric contact of six-dimension force sensor is added among first bearing (10-1) The annulus of sample, to connect the six-dimension force sensor of different model.Namely it is carried out using maximum sized six-dimension force sensor at present Design, and annulus of different specifications and sizes is designed, it can be with six-dimension force sensor by being added among first bearing (10-1) The same annulus of the specification of concentric contact, makes the calibration facility can connect the six-dimension force sensor of different model, reaches pair The effect of polytypic six-dimension force sensor calibration realizes the calibration of polytypic six-dimension force sensor.

Optionally, in the present embodiment, calibration unit (1) is according to seriation principle, in order to demarcate the torque of arbitrary size, Can be in the following ways: first bearing (10-1) uses different calibration positions to be applicable in the calibration of different ranges；It specifically refers to By the change of the position of action point of the power in the three elements to power, that is, changes it and demarcates distance of the hole relative to calibration center, To measure the torque of different ranges.

It optionally, in the present embodiment, is a kind of sliding rail provided in this embodiment referring to Fig. 8, Fig. 9, Figure 10, Figure 11, Fig. 8 The schematic diagram of unit, Fig. 9 are a kind of schematic diagram of sliding rail matrix provided in this embodiment, and Figure 10 is one kind provided in this embodiment The schematic diagram of lead screw transmission module and the first locating piece, Figure 11 are a kind of signal of connection sliding block module provided in this embodiment Figure, running rail unit (3) includes sliding rail matrix (11), The gear deceleration module (12), lead screw transmission module (13), connection sliding block module (14)；Sliding rail matrix (11) includes locating slot (11-1), motor hole (11-2), gear shaft (11-3), motor shaft (11-4), motor Locating slot (11-5), sliding block shifting chute (11-7), first grating scale (11-8), moves integrally slot at track fixation hole (11-6) (11-9), motor axillare (11-10)；Lead screw transmission module (13) includes connecting shaft (13-1), the first locating piece (13-2), second Washer (13-3), second bearing (13-4), lead screw (13-5)；Connection sliding block module (14) includes sliding rail (14-1), can be along sliding rail First sliding block (14-2) of (14-1) sliding, is located at sliding rail (14- at the auxiliary slider (14-3) connecting with the first sliding block (14-2) 1) the first hole (14-4) on, is located at the upper end auxiliary slider (14-3) at the second hole (14-5) on the first sliding block (14-2) Third hole (14-6), be located at auxiliary slider (14-3) lower end side the 4th hole (14-7)；Auxiliary slider (14-3) and first Sliding block (14-2) can be bolted；By motor hole (11-2), gear shaft (11-3) and connecting shaft (13-1), by power The gear deceleration module (12) are transferred to, and are finally transmitted to lead screw (13-5), lead screw (13-5) passes through on auxiliary slider (14-3) The 4th hole (14-7), power is transferred to auxiliary slider (14-3), the second of the first sliding block (14-2) and rotary unit (2) connects Connecing hole (9-2) can be bolted, and realize the translation of six-dimension force sensor；First grating scale (11-8) real-time detection is simultaneously anti- The location information of six-dimension force sensor is presented, realizes closed-loop control；Second connecting hole (9-2) is attached with the second hole (14-5), Guarantee that translational motion is transferred on six-dimension force sensor by lead screw (13-5).Support the of storage module (9) and running rail unit (3) One sliding block (14-2) can be bolted, and drive six-dimension force sensor to move horizontally indirectly.

It optionally, in the present embodiment, is that a kind of overturning provided in this embodiment is mobile single referring to Figure 12, Figure 13, Figure 12 The schematic diagram of member, Figure 13 are a kind of schematic diagram for supporting body module provided in this embodiment, and overturning mobile unit (4) includes whirlpool Take turns slowdown module (15), electric pushrod (16), support body module (17)；Turbine slowdown module (15) includes that worm and gear slows down Device (15-1), second shaft coupling (15-2), the second servo motor (15-3)；Supporting body module (17) includes hole guide rail (17- 1), the 5th hole (17-2)；Hole guide rail (17-1) is connect with the end of running rail unit (3)；It overturns mobile unit (4) and passes through the 5th hole (17-2) is fixed on overall base unit (6)；Turbine slowdown module (15) is used for realizing turn over function, electric pushrod (16) Function is moved up and down in realization.

Overturning mobile unit (4) is mainly used to carry out six-dimension force sensor to move up and down and flip-flop movement, passes six-dimensional force Sensor continues the calibration task of next step, answers after having demarcated the power in Z-direction, the torque in X-direction, the torque in Y-direction When understanding, the sequencing of calibration is in the present embodiment with no restrictions；Overturning mobile unit (4) passes through second shaft coupling The motor shaft (11-4) of (15-2) and running rail unit (3) are attached, and complete overturning moving operation；And fixation is bolted On overall base unit (6).

It optionally, in the present embodiment, is a kind of mobile press unit provided in this embodiment referring to Figure 14, Figure 14 Schematic diagram, mobile press unit (5) further include slide module (19)；Press machine (18) includes that press body and setting are being pressed The press machine sensor (18-1) of power machine body end；Slide module (19) includes 3rd bearing (19-1), third washer (19- 2), the second locating piece (19-3), screw rod (19-4), third shaft coupling (19-5), third servo motor (19-6), the second sliding block (19-7), guide rail (19-8), mobile platform (19-9)；Second locating piece (19-3) and overall base unit (6) company of being fixed It connects, screw rod (19-4) passes through the cooperation of 3rd bearing (19-1), third washer (19-2), the second locating piece (19-3), drives and moves Moving platform (19-9) is moved.

Mobile press unit (5) integrally overturn six-dimension force sensor primarily to adapting to overturning mobile unit (4) After 90 °, the variation that the relative position of six-dimension force sensor and press machine (18) occurs makes press machine (18) and six-dimension force sensor It is constantly in identical relative position；The guide rail (19-8) of mobile press unit (5) is bolted on overall pedestal list On first (6), third servo motor (19-6) is embedded in and is affixed to overall base unit (6) by bolt.

It optionally, in the present embodiment, is a kind of showing for overall base unit provided in this embodiment referring to Figure 15, Figure 15 It is intended to, overall base unit (6) includes servo motor storage groove (20-1), passive swivelling chute (20-2), gear storage groove (20- 3), third connecting hole (20-4), second grating scale (20-5)；

Servo motor storage groove (20-1) is used to store the third servo motor (19-6) of mobile press unit (5)；Quilt Dynamic swivelling chute (20-2) carries out gentle support and turning effort to the first bearing (10-1) on rotary unit (2)；Gear storage Slot (20-3) is used to store the gear in overturning aft ramp unit (3)；Third connecting hole (20-4) and overturning mobile unit (4) 5th hole (17-2) can be attached by bolt.

Optionally, in the present embodiment, when demarcating the power in Z-direction, slide module (19) is moved, second grating scale First displacement signal is passed to servo controller and host computer by (20-5), host computer by the first feedback signal and it is required be displaced into Row compares, and is controlled with the difference after relatively, forms closed loop Displacement Feedback control system, finally obtains the first accurate movement Position；Press machine (18) operates the K17 of six-dimension force sensor calibration unit (1), demarcates the power of Z-direction；Press machine Sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By acquisition to six-dimension force sensor signal, Amplification, processing, and by the data real-time delivery of measurement to host computer, it is shown and is recorded；

On the basis of the state of the six-dimension force sensor calibration device of power on having demarcated Z-direction, continue to demarcate around X-axis Torque, running rail unit (3) are moved left and right, first grating scale (11-8) by second displacement signal pass to servo controller and Host computer, the second feedback signal and required displacement are compared by host computer, and are controlled with the difference after relatively, and formation is closed Ring Displacement Feedback control system finally obtains the second accurate movement position；Press machine (18) is to six-dimension force sensor calibration unit (1) K5 and K13 is operated, and the torque around X-axis positive direction and negative direction is demarcated；Press machine sensor (18-1) carries out signal Acquisition, the size of final real-time control pressure；By acquisition, amplification, the processing to six-dimension force sensor signal, and by measurement Data real-time delivery is shown and is recorded to host computer；

On the basis of having demarcated the state of six-dimension force sensor calibration device of the torque around X-axis, continue calibration around Y-axis Torque, rotary unit (2) carries out positive and negative 90 ° of rotation, and the first rotational angle signal is passed to servo control by Circular gratings (8-4) Device and host computer processed, third feedback signal and required displacement are compared by host computer, and are controlled with the difference after relatively, Closed loop Displacement Feedback control system is formed, the first fine rotational angle is finally obtained；Then running rail unit (3) carries out left and right shifting Dynamic, third displacement signal is passed to servo controller and host computer by first grating scale (11-8), and host computer is by the 4th feedback letter It number is compared, and is controlled with the difference after relatively, formation closed loop Displacement Feedback system with required displacement, finally obtain the Three accurate movement positions；Press machine (18) operates the K1 and K9 of six-dimension force sensor calibration unit (1), demarcates around Y-axis The torque of positive direction and negative direction；Press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；It is logical The acquisition to six-dimension force sensor signal, amplification, processing are crossed, and the data real-time delivery of measurement is shown to host computer And it records；

On the basis of having demarcated the state of six-dimension force sensor calibration device of the torque around Y-axis, continue to demarcate Y-direction Power, running rail unit (3) is moved to middle position, and the 4th displacement signal is passed to servo controller by first grating scale (11-8) And host computer, the 5th feedback signal and required displacement are compared by host computer, and are controlled with the difference after relatively, are formed Closed loop Displacement Feedback control system, finally obtains the 4th accurate movement position；Overturning mobile unit (4) move up, overturn 90 °, under It moves, finally six-dimension force sensor is placed vertically and is fixed up, press machine (18) carries out the K7 of six-dimension force sensor calibration unit (1) The torque around Y-axis positive direction is demarcated in operation；Then 180 ° of rotary unit (2) control rotation, Circular gratings (8-4) are rotated second Angle signal passes to servo controller and host computer, and the 6th feedback signal and required displacement are compared, are used in combination by host computer Difference after comparing is controlled, and is formed closed loop Displacement Feedback system, is finally obtained the second fine rotational angle；Press machine (18) The K15 of six-dimension force sensor calibration unit (1) is operated, the torque around Y-axis negative direction is demarcated；Press machine sensor (18- 1) signal acquisition, the size of final real-time control pressure are carried out；By acquisition, amplification, the processing to six-dimension force sensor signal, And by the data real-time delivery of measurement to host computer, is shown and recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of power of Y-direction, continue to demarcate X-direction Power, rotary unit (2) carry out 90 ° and 180 ° of rotation, and third rotational angle signal is passed to SERVO CONTROL by Circular gratings (8-4) Device and host computer, the 7th feedback signal and required displacement are compared by host computer, and are controlled with the difference after relatively, shape At closed loop Displacement Feedback control system, third fine rotational angle is finally obtained；Press machine (18) is to six-dimension force sensor calibration The K3 and K11 of unit (1) are operated, and the power of X-axis positive direction and negative direction is demarcated；Press machine sensor (18-1) carries out signal Acquisition, the size of final real-time control pressure；By acquisition, amplification, the processing to six-dimension force sensor signal, and by measurement Data real-time delivery is shown and is recorded to host computer；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of power of X-direction, continue to demarcate about the z axis Torque, running rail unit (3) is mobile to Y-axis forward direction, and the 5th displacement signal is passed to servo controller by first grating scale (11-8) And host computer, the 8th feedback signal and required displacement are compared by host computer, and are controlled with the difference after relatively, are formed Closed loop Displacement Feedback control system, finally obtains the 5th accurate movement position；Then rotary unit (2) rotates in the forward direction 3 times about the z axis 90 °, the 4th rotational angle signal is passed to servo controller and host computer by Circular gratings (8-4), and host computer is by the 9th feedback letter Number be compared, and controlled with the difference after relatively with required displacement, form closed loop Displacement Feedback control system, it is final must To the 4th fine rotational angle；Press machine (18) grasps K4, K8, K12, K16 of six-dimension force sensor calibration unit (1) Make, demarcates the torque of positive direction about the z axis；Running rail unit (3) is mobile to Y-axis negative sense, and first grating scale (11-8) is displaced the 6th Signal passes to servo controller and host computer, and the tenth feedback signal and required displacement are compared by host computer, and with comparing Difference afterwards is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 6th accurate movement position；Then rotation is single First (2) about the z axis negative sense rotate 3 times 90 °, the 5th rotational angle signal is passed to servo controller and upper by Circular gratings (8-4) Machine, the 11st feedback signal and required displacement are compared by host computer, and are controlled with the difference after relatively, form closed loop Displacement Feedback control system finally obtains the 5th fine rotational angle；Press machine (18) is to six-dimension force sensor calibration unit (1) K2, K6, K10, K14 operated, the torque of calibration negative direction about the z axis；Press machine sensor (18-1) carries out signal acquisition, The size of final real-time control pressure；By acquisition, amplification, the processing to six-dimension force sensor signal, and by the data of measurement Real-time delivery is shown and is recorded to host computer.

Referring to Figure 16, Figure 16 is a kind of process of the main program of six-dimension force sensor calibration method provided in this embodiment Figure selects matched six-dimension force sensor calibration list according to transducer range and model specification size first in practical operation First (1) installs fixed six-dimension force sensor, opens six-dimension force sensor calibration device, into man machine operation interface, on operation circle Input pickup size in face；Judge whether select measurement pattern, measurement pattern include: according to the progressive mode of power size, according to The progressive mode of power percentage, according to time progressive mode；If it is not, then using default mode of operation；If so, judging whether to select According to the progressive mode of power size, and when mode progressive according to power size, determines the range of the progressive rate power of power, start to demarcate, if When mode progressive according to power percentage, determines the range of progressive percentage specific force, start to demarcate, if when mode progressive according to the time, The range for determining interval time total time power starts to demarcate；Call subroutine 1 when demarcating Z-direction power calls when calibration X is to torque Subprogram 2, call subroutine 3 when demarcating Y-direction torque, call subroutine 4 when demarcating Y-direction power, call subroutine when calibration X is to power 5, call subroutine 6 when demarcating Z-direction torque；

Referring to Figure 17, Figure 17 is a kind of subroutine flow chart for demarcating Z-direction power provided in this embodiment, when demarcating Z-direction power Call subroutine 1, subprogram 1 include: slide module (19) to the mobile X1 of X-axis forward direction, and second grating scale (20-5) acquires data, First displacement signal is passed into servo controller and host computer, host computer compares the first feedback signal and required displacement Compared with whether the difference after judgement relatively is equal to 0；If it is not, then controlling servo motor movement, second grating scale (20-5) is reentered The step of acquiring data；If so, the six-dimension force sensor has had been moved into designated position, press machine calibration, pressure are carried out at this time Power machine sensor (18-1) acquires data, applies pressure, acquisition, amplification, the processing of six-dimension force sensor signal by mode, and incite somebody to action The data real-time delivery of measurement is shown and is recorded to host computer；

Referring to Figure 18, Figure 18 is a kind of subroutine flow chart of torque of the calibration provided in this embodiment around X-axis, is being demarcated In complete Z-direction on the basis of the state of the six-dimension force sensor calibration device of power, continue to demarcate the torque around X-axis, demarcates X to power Call subroutine 2 when square, subprogram 2 include: running rail unit (3) to the mobile X2 of Y-axis forward direction, and first grating scale (11-8) acquires number According to displacement signal being passed to servo controller and host computer, feedback signal and required displacement are compared by host computer, are judged Whether the difference after comparing is equal to 0；If it is not, then controlling servo motor movement, first grating scale (11-8) acquisition number is reentered According to the step of；If so, the six-dimension force sensor has had been moved into designated position, press machine calibration is carried out at this time, and press machine passes Sensor (18-1) acquires data, by mode application pressure, acquisition, amplification, the processing of six-dimension force sensor signal, and by measurement Data real-time delivery is shown and is recorded to host computer；Then running rail unit (3) moves 2*X2, the first grating to Y-axis negative sense Ruler (11-8) acquires data, and displacement signal is passed to servo controller and host computer, and host computer is by feedback signal and required position Shifting is compared, and whether the difference after judgement relatively is equal to 0；If it is not, then controlling servo motor movement, the first grating is reentered Ruler (11-8) acquires the step of data；If so, the six-dimension force sensor has had been moved into designated position, press machine is carried out at this time Calibration, press machine sensor (18-1) acquire data, apply pressure, the acquisition of six-dimension force sensor signal, amplification, place by mode Reason, and by the data real-time delivery of measurement to host computer, it is shown and is recorded；

Referring to Figure 19, Figure 19 is a kind of subroutine flow chart of torque of the calibration provided in this embodiment around Y-axis, is being demarcated It is complete to continue to demarcate the torque around Y-axis on the basis of the state of the six-dimension force sensor calibration device of the torque of X-axis, demarcate Y-direction Call subroutine 3 when torque, subprogram 3 include: that rotary unit (2) rotates in the forward direction 90 ° about the z axis, and Circular gratings (8-4) acquire number According to the first rotational angle signal being passed to servo controller and host computer, host computer is by third feedback signal and required displacement It is compared, whether the difference after judgement relatively is equal to 0；If it is not, then controlling servo motor movement, Circular gratings (8- is reentered 4) the step of acquiring data；If so, the six-dimension force sensor has had been rotated to specified angle, press machine calibration is carried out at this time, Press machine sensor (18-1) acquire data, by mode application pressure, acquisition, amplification, the processing of six-dimension force sensor signal, and By the data real-time delivery of measurement to host computer, is shown and recorded；Then running rail unit (3) moves 2*X2 to Y-axis forward direction, First grating scale (11-8) acquires data, and third displacement signal is passed to servo controller and host computer, and host computer is by the 4th Feedback signal is compared with required displacement, and whether the difference after judgement relatively is equal to 0；If it is not, servo motor movement is then controlled, The step of reentering first grating scale (11-8) acquisition data；If so, the six-dimension force sensor has had been moved into specific bit It sets, carries out press machine calibration at this time, press machine sensor (18-1) acquires data, applies pressure, six-dimension force sensor by mode Acquisition, amplification, the processing of signal, and by the data real-time delivery of measurement to host computer, it is shown and is recorded；

0, Figure 20 is a kind of subroutine flow chart of power for demarcating Y-direction provided in this embodiment referring to fig. 2, is being demarcated On the basis of the state of the six-dimension force sensor calibration device of the torque of Y-axis, continue the power for demarcating Y-direction, when demarcating Y-direction power Call subroutine 4, subprogram 4 include: running rail unit (3) to the mobile X2 of Y-axis negative sense, and first grating scale (11-8) acquires data, 4th displacement signal is passed into servo controller and host computer, host computer compares the 5th feedback signal with required displacement Compared with whether the difference after judgement relatively is equal to 0；If it is not, then controlling servo motor movement, first grating scale (11-8) is reentered The step of acquiring data；If so, the six-dimension force sensor has had been moved into designated position, overturning mobile unit (4) move up X3, 90 ° of overturning moves down X4, carries out press machine calibration at this time, and press machine sensor (18-1) acquires data, applies pressure by mode, Acquisition, amplification, the processing of six-dimension force sensor signal, and by the data real-time delivery of measurement to host computer, it is shown and is remembered Record；Then rotary unit (2) rotates in the forward direction 180 ° about the z axis, and Circular gratings (8-4) acquire data, and the second rotational angle signal is passed Servo controller and host computer are passed, the 6th feedback signal and required displacement are compared by host computer, the difference after judgement relatively Whether value is equal to 0；If it is not, the step of then controlling servo motor movement, reentering Circular gratings (8-4) acquisition data；If so, The six-dimension force sensor has had been rotated to specified angle, carries out press machine calibration at this time, and press machine sensor (18-1) acquires number According to applying pressure, acquisition, amplification, the processing of six-dimension force sensor signal, and the data real-time delivery of measurement is supreme by mode Position machine, is shown and is recorded；

1, Figure 21 is a kind of subroutine flow chart of power for demarcating X-direction provided in this embodiment referring to fig. 2, is being demarcated On the basis of the state of the six-dimension force sensor calibration device of the power of Y-direction, continues the power for demarcating X-direction, demarcate the power of X-direction When call subroutine 5, subprogram 5 includes: that rotary unit (2) rotates in the forward direction 90 ° about the z axis, and Circular gratings (8-4) acquire data, will Rotational angle signal passes to servo controller and host computer, and feedback signal and required displacement are compared, judge by host computer Whether the difference after comparing is equal to 0；If it is not, then controlling servo motor movement, the step of Circular gratings (8-4) acquisition data is reentered Suddenly；If so, the six-dimension force sensor has had been rotated to specified angle, press machine calibration, press machine sensor are carried out at this time (18-1) acquires data, by mode application pressure, acquisition, amplification, the processing of six-dimension force sensor signal, and by the data of measurement Real-time delivery is shown and is recorded to host computer；Then rotary unit (2) rotates in the forward direction 180 ° about the z axis, Circular gratings (8-4) Acquire data, rotational angle signal passed into servo controller and host computer, host computer by feedback signal and it is required be displaced into Row compares, and whether the difference after judgement relatively is equal to 0；If it is not, then controlling servo motor movement, Circular gratings (8-4) is reentered The step of acquiring data；If so, the six-dimension force sensor has had been rotated to specified angle, press machine calibration, pressure are carried out at this time Power machine sensor (18-1) acquires data, applies pressure, acquisition, amplification, the processing of six-dimension force sensor signal by mode, and incite somebody to action The data real-time delivery of measurement is shown and is recorded to host computer；

2, Figure 22 is a kind of subroutine flow chart of the torque of calibration provided in this embodiment about the z axis referring to fig. 2, is being demarcated On the basis of the state of the six-dimension force sensor calibration device of the power of complete X-direction, continues to demarcate torque about the z axis, demarcate Z-direction power Call subroutine 6 when square, subprogram 6 include: running rail unit (3) to the mobile X2 of Y-axis forward direction, and first grating scale (11-8) acquires number According to the 5th displacement signal being passed to servo controller and host computer, host computer carries out the 8th feedback signal and required displacement Compare, whether the difference after judgement relatively is equal to 0；If it is not, then controlling servo motor movement, first grating scale (11- is reentered 8) the step of acquiring data；If so, the six-dimension force sensor has had been moved into designated position, press machine calibration is carried out at this time, Press machine sensor (18-1) acquire data, by mode application pressure, acquisition, amplification, the processing of six-dimension force sensor signal, and By the data real-time delivery of measurement to host computer, is shown and recorded；Then rotary unit (2) rotates in the forward direction 3 times about the z axis 90 °, Circular gratings (8-4) acquire data, and the 4th rotational angle signal is passed to servo controller and host computer, and host computer is by the Nine feedback signals are compared with required displacement, and whether the difference after judgement relatively is equal to 0；If it is not, then controlling servo motor fortune It is dynamic, reenter the step of Circular gratings (8-4) acquires data；If so, the six-dimension force sensor has had been rotated to specified angle, Press machine calibration is carried out at this time, and press machine sensor (18-1) acquires data, applies pressure, six-dimension force sensor signal by mode Acquisition, amplification, processing shown and recorded and by the data real-time delivery of measurement to host computer；Then running rail unit (3) to the mobile 2*X2 of Y-axis negative sense, first grating scale (11-8) acquires data, the 6th displacement signal is passed to servo controller And the tenth feedback signal and required displacement are compared by host computer, host computer, whether the difference after judgement relatively is equal to 0；If It is no, then the step of controlling servo motor movement, reenter first grating scale (11-8) acquisition data；If so, the six-dimensional force Sensor has had been moved into designated position, carries out press machine calibration at this time, press machine sensor (18-1) acquires data, by mode Application pressure, acquisition, amplification, the processing of six-dimension force sensor signal, and by the data real-time delivery of measurement to host computer, it carries out It shows and records；Then rotary unit (2) about the z axis negative sense rotate 3 times 90 °, Circular gratings (8-4) acquire data, by the 5th rotation Angle signal passes to servo controller and host computer, and the 11st feedback signal and required displacement are compared, sentence by host computer Whether the difference after disconnected comparison is equal to 0；If it is not, then controlling servo motor movement, Circular gratings (8-4) acquisition data are reentered Step；If so, the six-dimension force sensor has had been rotated to specified angle, press machine calibration, press machine sensor are carried out at this time (18-1) acquires data, by mode application pressure, acquisition, amplification, the processing of six-dimension force sensor signal, and by the data of measurement Real-time delivery is shown and is recorded to host computer.

By the implementation of the present embodiment, the fully automatic integral calibration for realizing six-dimension force sensor, demarcates laborsaving, raising Efficiency is demarcated, the burden of manual handling had both been reduced or remitted, and after having demarcated the power/torque in a direction every time, then had carried out hand It is dynamic to adjust operation, and indirectly increase the accuracy of calibration；And the six-dimension force sensor calibration list by having developed seriation The rotary unit (2) of first (1) and compatibility, realize can be directed to multrirange, polytypic, more specification six-dimension force sensors it is complete Automatic Calibration；And when demarcating each time, there is support device to be supported, make caliberating device is more stable, the service life is longer, Stated accuracy is higher；And be used cooperatively with normal pressure machine, so that calibration is more tended to standardization and systematization；It provides a kind of complete Automatically, multrirange, polytypic six-dimension force sensor calibration device and its scaling method.

The above is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills Art field, is included within the scope of the present invention.

Claims (10)

1. a kind of six-dimension force sensor calibration device characterized by comprising

Six-dimension force sensor calibration unit (1), rotary unit (2), running rail unit (3), overturning mobile unit (4), mobile pressure Machine unit (5), overall base unit (6)；

The rotary unit (2) connect with the running rail unit (3)；The both ends of the running rail unit (3) are respectively and described in two Overturn mobile unit (4) connection；The overturning mobile unit (4) and the mobile press unit (5) are fixedly connected in institute It states on overall base unit (6)；

The six-dimension force sensor calibration unit (1) is closely connect with six-dimension force sensor upper end；The rotary unit (2) It is closely connect with the bottom of the six-dimension force sensor；

The rotary unit (2) is used to control the rotation of the six-dimension force sensor, and the running rail unit (3) is for moving horizontally The six-dimension force sensor, the overturning mobile unit (4) is for moving up and down and overturning to the six-dimension force sensor Movement, the mobile press unit (5) includes press machine (18), and the mobile press unit (5) is used in the overturning After mobile unit (4) integrally overturns the six-dimension force sensor, make the press machine (18) and the six-dimension force sensor one It is directly in identical relative position, realizes the power and torque for measuring the six-dimension force sensor six direction.

2. six-dimension force sensor calibration device as described in claim 1, which is characterized in that the six-dimension force sensor calibration list Member 1 includes 17 calibration holes (1-1), with X-axis positive direction up time needle sort, respectively K1, K2, K3, K4, K5, K6, K7, K8, K9,K10,K11,K12,K13,K14,K15,K16,K17；The six-dimension force sensor calibration unit (1) includes rounded portions and position Four protrusions in the rounded portions periphery, the angle in four protrusions between any two is 90 degree, the rounded portions The center of circle be the K17, establish 3-D walls and floor using the center of circle as coordinate axis origin, described K1, K2, K3, K4 are located at X-axis forward direction, Described K5, K6, K7, K8 are located at Y-axis forward direction, and described K9, K10, K11, K12 are located at X-axis negative sense, described K13, K14, K15, K16 Positioned at Y-axis negative sense；Described K1, K5, K9, K13 are respectively positioned on the upper surface of four protrusions, and described K3, K7, K11, K15 divide Wei Yu not be before four protrusions, described K2, K6, K10, K14 are located at the right side of four protrusions, institute State the left side that K4, K8, K12, K16 are located at four protrusions；

The six-dimension force sensor calibration device further includes electric control system, the electric control system include man-machine interface, Industrial personal computer, servo controller, the man-machine interface and the industrial personal computer are as host computer, monitoring displacement, angle and force signal；

The position variation signal of the six-dimension force sensor described in mark timing acquiring, and the position variation signal passed to described Feedback signal and required displacement are compared by servo controller and the host computer, the host computer, and with the difference after relatively Value is controlled, and forms closed loop Displacement Feedback control system, and the press machine according to power/Torque Control of calibration (18) is to institute Corresponding calibration hole (1-1) for stating six-dimension force sensor calibration unit (1) is operated, and carries out signal acquisition, final control in real time The size of pressing pressure；It is transferred to by acquisition, amplification, the processing to the six-dimension force sensor signal, and by the data of measurement The host computer is shown and is recorded.

3. six-dimension force sensor calibration device as claimed in claim 2, which is characterized in that the rotary unit (2) includes passing Dynamic model block (7), link block (8), support storage module (9) and passive rotation module (10)；

The transmission module (7) includes first servo motor (7-1), first shaft coupling (7-2), planetary reduction gear (7-3)；

The link block (8) includes first bearing connected unit (8-1), bearing support platform (8-2), the first connecting hole (8-3), circle Grating (8-4), Circular gratings trestle table (8-5)；

The support storage module (9) includes support storage ontology (9-1), the second connecting hole (9-2), ball (9-3), the second axis Hold connected unit (9-4)；

The passive rotation module (10) includes first bearing (10-1), the first washer (10-2)；

The first servo motor (7-1) is connected with the planetary reduction gear (7-3) by the first shaft coupling (7-2) It connects, transmission force and torque is realized, for slowing down；

The support storage module (9) and the link block (8) pass through the first bearing connected unit (8-1), the ball (9-3), the second bearing connected unit (9-4) carry out bearing type connection；The support storage module (9) is for carrying described the One servo motor (7-1) simultaneously supports the six-dimension force sensor；

Second connecting hole (9-2) is attached with the running rail unit (3), guarantees that the running rail unit (3) transports translation It is dynamic to be transferred on the six-dimension force sensor；The Circular gratings (8-4) are for real-time detection and feed back the six-dimension force sensor Rotation angle give the servo controller and the host computer；The Circular gratings trestle table (8-5) is by the Circular gratings (8-4) It is fixed on the bearing support platform (8-2).

4. six-dimension force sensor calibration device as claimed in claim 3, which is characterized in that the first bearing (10-1) uses Difference demarcates position to be applicable in the calibration of different ranges；It specifically refers to through the position of action point of the power in the three elements to power Change, that is, changes it and demarcate distance of the hole relative to calibration center, to measure the torque of different ranges；The first bearing (10-1) uses different size size to be applicable in the model of the different six-dimension force sensors；The i.e. described first bearing (10-1) Size be designed according to the full-size of the six-dimension force sensor, and design annulus of different specifications and sizes, by The annulus as the specification of the concentric contact of the six-dimension force sensor is added among the first bearing (10-1), with connection The six-dimension force sensor of different model.

5. six-dimension force sensor calibration device as described in claim 3 or 4, which is characterized in that the running rail unit (3) includes Sliding rail matrix (11), The gear deceleration module (12), lead screw transmission module (13), connection sliding block module (14)；

The sliding rail matrix (11) include locating slot (11-1), motor hole (11-2), gear shaft (11-3), motor shaft (11-4), Motor locating slot (11-5), sliding block shifting chute (11-7), first grating scale (11-8), moves integrally track fixation hole (11-6) Slot (11-9), motor axillare (11-10)；

The lead screw transmission module (13) includes connecting shaft (13-1), the first locating piece (13-2), second packing ring (13-3), second Bearing (13-4), lead screw (13-5)；

The connection sliding block module (14) include sliding rail (14-1), can along the sliding rail (14-1) slide the first sliding block (14- 2) auxiliary slider (14-3), being connect with first sliding block (14-2), the first hole (14- being located on the sliding rail (14-1) 4) the third hole for, being located at the second hole (14-5) on first sliding block (14-2), being located at the upper end the auxiliary slider (14-3) (14-6), the 4th hole (14-7) for being located at the auxiliary slider (14-3) lower end side；

By the motor hole (11-2), the gear shaft (11-3) and the connecting shaft (13-1), power is transferred to described The gear deceleration module (12), and it is finally transmitted to the lead screw (13-5), the lead screw (13-5) passes through the auxiliary slider The 4th hole (14-7) on (14-3), power is transferred to the auxiliary slider (14-3), first sliding block (14-2) It is connect with the rotary unit (2), realizes the translation of the six-dimension force sensor；First grating scale (11-8) real-time detection And the location information of the six-dimension force sensor is fed back, realize closed-loop control；Second connecting hole (9-2) and second hole (14-5) is attached, and guarantees that translational motion is transferred on the six-dimension force sensor by the lead screw (13-5).

6. six-dimension force sensor calibration device as claimed in claim 5, which is characterized in that overturning mobile unit (4) packet Include turbine slowdown module (15), electric pushrod (16), support body module (17)；

The turbine slowdown module (15) includes worm type of reduction gearing (15-1), second shaft coupling (15-2), the second servo electricity Machine (15-3)；

The support body module (17) includes hole guide rail (17-1), the 5th hole (17-2)；The hole guide rail (17-1) with it is described The end of running rail unit (3) connects；The overturning mobile unit (4) is fixed on the overall bottom by the 5th hole (17-2) On seat unit (6)；

The turbine slowdown module (15) is for realizing turn over function, and the electric pushrod (16) is for realizing moving up and down function Energy.

7. six-dimension force sensor calibration device as claimed in claim 6, which is characterized in that the mobile press unit (5) It further include slide module (19)；

The press machine (18) includes press body and the press machine sensor (18- that the press body end is arranged in 1)；

The slide module (19) includes 3rd bearing (19-1), third washer (19-2), the second locating piece (19-3), screw rod (19-4), third shaft coupling (19-5), third servo motor (19-6), the second sliding block (19-7), guide rail (19-8), mobile platform (19-9)；

Second locating piece (19-3) is fixedly connected with the overall base unit (6), and the screw rod (19-4) passes through The cooperation of the 3rd bearing (19-1), the third washer (19-2), second locating piece (19-3), drives the movement Platform (19-9) is moved.

8. six-dimension force sensor calibration device as claimed in claim 7, which is characterized in that the totality base unit (6) is wrapped Include servo motor storage groove (20-1), passive swivelling chute (20-2), gear storage groove (20-3), third connecting hole (20-4), Two grating scales (20-5)；

The servo motor storage groove (20-1) is used to store the third servo motor of the mobile press unit (5) (19-6)；The passive swivelling chute (20-2) steadily props up the first bearing (10-1) on the rotary unit (2) Support and turning effort；The gear storage groove (20-3) is used to store the gear after overturn on the running rail unit (3)；Described Three connecting holes (20-4) and the 5th hole (17-2) of overturning mobile unit (4) are attached.

9. six-dimension force sensor calibration device as claimed in claim 8, which is characterized in that in calibration Z-direction when power, the cunning Road module (19) is moved, and the first displacement signal is passed to the servo controller and institute by the second grating scale (20-5) Host computer is stated, the first feedback signal and required displacement are compared by the host computer, and are controlled with the difference after relatively, Closed loop Displacement Feedback control system is formed, the first accurate movement position is finally obtained；The press machine (18) is to the six-dimensional force The K17 of transducer calibration unit (1) is operated, and the power of Z-direction is demarcated；The press machine sensor (18-1) carries out signal Acquisition, the size of final real-time control pressure；By acquisition, amplification, the processing to the six-dimension force sensor signal, and will survey The data real-time delivery of amount is shown and is recorded to the host computer；

On the basis of the state of the six-dimension force sensor calibration device of power on having demarcated the Z-direction, continue calibration around X The torque of axis, the running rail unit (3) are moved left and right, and the first grating scale (11-8) passes to second displacement signal The servo controller and the host computer, the host computer by the second feedback signal and it is required displacement be compared, and with than Difference after relatively is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the second accurate movement position；The pressure Machine (18) operates the K5 and K13 of the six-dimension force sensor calibration unit (1), demarcates around X-axis positive direction and negative direction Torque；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By to described six Acquisition, amplification, the processing of dimensional force sensor signal, and the data real-time delivery of measurement is shown simultaneously to the host computer Record；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around X-axis, continue to demarcate Around the torque of Y-axis, the rotary unit (2) carries out positive/negative 90 ° of rotation, and the Circular gratings (8-4) believe the first rotational angle Number the servo controller and the host computer are passed to, the host computer compares third feedback signal and required displacement Compared with, and controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the first fine rotational angle is finally obtained Degree；Then the running rail unit (3) is moved left and right, and third displacement signal is passed to institute by the first grating scale (11-8) State servo controller and the host computer, the 4th feedback signal and required displacement are compared by the host computer, and with comparing Difference afterwards is controlled, and is formed closed loop Displacement Feedback system, is finally obtained third accurate movement position；The press machine (18) The K1 and K9 of the six-dimension force sensor calibration unit (1) are operated, the torque around Y-axis positive direction and negative direction is demarcated； The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By being passed to the six-dimensional force Acquisition, amplification, the processing of sensor signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around Y-axis, continue to demarcate Y The power in direction, the running rail unit (3) are moved to middle position, and the first grating scale (11-8) transmits the 4th displacement signal To the servo controller and the host computer, the 5th feedback signal and required displacement are compared by the host computer, are used in combination Difference after comparing is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 4th accurate movement position；It is described to turn over Transfer moving cell (4) moves up, overturns 90 °, moves down, and finally places the six-dimension force sensor vertically and is fixed up, the press machine (18) K7 of the six-dimension force sensor calibration unit (1) is operated, demarcates the torque around Y-axis positive direction；Then described 180 ° of rotation of rotary unit (2) control, the second rotational angle signal is passed to the servo controller by the Circular gratings (8-4) With the host computer, the 6th feedback signal and required displacement are compared by the host computer, and are carried out with the difference after relatively Control forms closed loop Displacement Feedback system, finally obtains the second fine rotational angle；The press machine (18) is to the six-dimensional force The K15 of transducer calibration unit (1) is operated, and the torque around Y-axis negative direction is demarcated；The press machine sensor (18-1) into Row signal acquisition, the size of final real-time control pressure；By acquisition, amplification, the processing to the six-dimension force sensor signal, And by the data real-time delivery of measurement to the host computer, is shown and recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the Y-direction, continue to demarcate the side X To power, the rotary unit (2) carries out 90 ° and 180 ° of rotation, and the Circular gratings (8-4) are by third rotational angle signal biography The servo controller and the host computer are passed, the 7th feedback signal and required displacement are compared by the host computer, and It is controlled with the difference after comparison, forms closed loop Displacement Feedback control system, finally obtain third fine rotational angle；It is described Press machine (18) operates the K3 and K11 of the six-dimension force sensor calibration unit (1), demarcates X-axis positive direction and losing side To power；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By to described six Acquisition, amplification, the processing of dimensional force sensor signal, and the data real-time delivery of measurement is shown simultaneously to the host computer Record；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the X-direction, continue calibration around Z The torque of axis, the running rail unit (3) is mobile to Y-axis forward direction, and the first grating scale (11-8) transmits the 5th displacement signal To the servo controller and the host computer, the 8th feedback signal and required displacement are compared by the host computer, are used in combination Difference after comparing is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 5th accurate movement position；Then institute State rotary unit (2) rotate in the forward direction about the z axis 3 times 90 °, the Circular gratings (8-4) pass to the 4th rotational angle signal described 9th feedback signal and required displacement are compared by servo controller and the host computer, the host computer, and with after relatively Difference controlled, formed closed loop Displacement Feedback control system, finally obtain the 4th fine rotational angle；The press machine (18) K4, K8, K12, K16 of the six-dimension force sensor calibration unit (1) are operated, demarcates the power of positive direction about the z axis Square；The running rail unit (3) is mobile to Y-axis negative sense, and the first grating scale (11-8) passes to the 6th displacement signal described Tenth feedback signal and required displacement are compared by servo controller and the host computer, the host computer, and with after relatively Difference controlled, formed closed loop Displacement Feedback control system, finally obtain the 6th accurate movement position；Then the rotation Unit (2) about the z axis negative sense rotate 3 times 90 °, the 5th rotational angle signal is passed to the servo control by the Circular gratings (8-4) 11st feedback signal and required displacement are compared by device processed and the host computer, the host computer, and with the difference after relatively Value is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 5th fine rotational angle；The press machine (18) is right K2, K6, K10, K14 of the six-dimension force sensor calibration unit (1) are operated, and the torque of negative direction about the z axis is demarcated；It is described Press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By to the six-dimension force sensor Acquisition, amplification, the processing of signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded.

10. a kind of scaling method using six-dimension force sensor calibration device as claimed in claim 8 or 9, which is characterized in that Include:

When demarcating power in Z-direction, the slide module (19) is moved, and the second grating scale (20-5) believes the first displacement Number the servo controller and the host computer are passed to, the host computer compares the first feedback signal and required displacement Compared with, and controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the first accurate movement position is finally obtained It sets；The press machine (18) operates the K17 of the six-dimension force sensor calibration unit (1), demarcates the power of Z-direction； The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By being passed to the six-dimensional force Acquisition, amplification, the processing of sensor signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded；

On the basis of the state of the six-dimension force sensor calibration device of power on having demarcated the Z-direction, continue calibration around X The torque of axis, the running rail unit (3) are moved left and right, and the first grating scale (11-8) passes to second displacement signal The servo controller and the host computer, the host computer by the second feedback signal and it is required displacement be compared, and with than Difference after relatively is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the second accurate movement position；The pressure Machine (18) operates the K5 and K13 of the six-dimension force sensor calibration unit (1), demarcates around X-axis positive direction and negative direction Torque；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By to described six Acquisition, amplification, the processing of dimensional force sensor signal, and the data real-time delivery of measurement is shown simultaneously to the host computer Record；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around X-axis, continue to demarcate Around the torque of Y-axis, the rotary unit (2) carries out positive/negative 90 ° of rotation, and the Circular gratings (8-4) believe the first rotational angle Number the servo controller and the host computer are passed to, the host computer compares third feedback signal and required displacement Compared with, and controlled with the difference after relatively, closed loop Displacement Feedback control system is formed, the first fine rotational angle is finally obtained Degree；Then the running rail unit (3) is moved left and right, and third displacement signal is passed to institute by the first grating scale (11-8) State servo controller and the host computer, the 4th feedback signal and required displacement are compared by the host computer, and with comparing Difference afterwards is controlled, and is formed closed loop Displacement Feedback system, is finally obtained third accurate movement position；The press machine (18) The K1 and K9 of the six-dimension force sensor calibration unit (1) are operated, the torque around Y-axis positive direction and negative direction is demarcated； The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By being passed to the six-dimensional force Acquisition, amplification, the processing of sensor signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the torque around Y-axis, continue to demarcate Y The power in direction, the running rail unit (3) are moved to middle position, and the first grating scale (11-8) transmits the 4th displacement signal To the servo controller and the host computer, the 5th feedback signal and required displacement are compared by the host computer, are used in combination Difference after comparing is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 4th accurate movement position；It is described to turn over Transfer moving cell (4) moves up, overturns 90 °, moves down, and finally places the six-dimension force sensor vertically and is fixed up, the press machine (18) K7 of the six-dimension force sensor calibration unit (1) is operated, demarcates the torque around Y-axis positive direction；Then described 180 ° of rotation of rotary unit (2) control, the second rotational angle signal is passed to the servo controller by the Circular gratings (8-4) With the host computer, the 6th feedback signal and required displacement are compared by the host computer, and are carried out with the difference after relatively Control forms closed loop Displacement Feedback system, finally obtains the second fine rotational angle；The press machine (18) is to the six-dimensional force The K15 of transducer calibration unit (1) is operated, and the torque around Y-axis negative direction is demarcated；The press machine sensor (18-1) into Row signal acquisition, the size of final real-time control pressure；By acquisition, amplification, the processing to the six-dimension force sensor signal, And by the data real-time delivery of measurement to the host computer, is shown and recorded；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the Y-direction, continue to demarcate the side X To power, the rotary unit (2) carries out 90 ° and 180 ° of rotation, and the Circular gratings (8-4) are by third rotational angle signal biography The servo controller and the host computer are passed, the 7th feedback signal and required displacement are compared by the host computer, and It is controlled with the difference after comparison, forms closed loop Displacement Feedback control system, finally obtain third fine rotational angle；It is described Press machine (18) operates the K3 and K11 of the six-dimension force sensor calibration unit (1), demarcates X-axis positive direction and losing side To power；The press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By to described six Acquisition, amplification, the processing of dimensional force sensor signal, and the data real-time delivery of measurement is shown simultaneously to the host computer Record；

On the basis of having demarcated the state of the six-dimension force sensor calibration device of the power of the X-direction, continue calibration around Z The torque of axis, the running rail unit (3) is mobile to Y-axis forward direction, and the first grating scale (11-8) transmits the 5th displacement signal To the servo controller and the host computer, the 8th feedback signal and required displacement are compared by the host computer, are used in combination Difference after comparing is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 5th accurate movement position；Then institute State rotary unit (2) rotate in the forward direction about the z axis 3 times 90 °, the Circular gratings (8-4) pass to the 4th rotational angle signal described 9th feedback signal and required displacement are compared by servo controller and the host computer, the host computer, and with after relatively Difference controlled, formed closed loop Displacement Feedback control system, finally obtain the 4th fine rotational angle；The press machine (18) K4, K8, K12, K16 of the six-dimension force sensor calibration unit (1) are operated, demarcates the power of positive direction about the z axis Square；The running rail unit (3) is mobile to Y-axis negative sense, and the first grating scale (11-8) passes to the 6th displacement signal described Tenth feedback signal and required displacement are compared by servo controller and the host computer, the host computer, and with after relatively Difference controlled, formed closed loop Displacement Feedback control system, finally obtain the 6th accurate movement position；Then the rotation Unit (2) about the z axis negative sense rotate 3 times 90 °, the 5th rotational angle signal is passed to the servo control by the Circular gratings (8-4) 11st feedback signal and required displacement are compared by device processed and the host computer, the host computer, and with the difference after relatively Value is controlled, and is formed closed loop Displacement Feedback control system, is finally obtained the 5th fine rotational angle；The press machine (18) is right K2, K6, K10, K14 of the six-dimension force sensor calibration unit (1) are operated, and the torque of negative direction about the z axis is demarcated；It is described Press machine sensor (18-1) carries out signal acquisition, the size of final real-time control pressure；By to the six-dimension force sensor Acquisition, amplification, the processing of signal, and by the data real-time delivery of measurement to the host computer, it is shown and is recorded.