CN110260973B - Automatic debugging system and method for echelle grating spectrometer - Google Patents

Automatic debugging system and method for echelle grating spectrometer Download PDF

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CN110260973B
CN110260973B CN201910542604.1A CN201910542604A CN110260973B CN 110260973 B CN110260973 B CN 110260973B CN 201910542604 A CN201910542604 A CN 201910542604A CN 110260973 B CN110260973 B CN 110260973B
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echelle grating
debugging
adjusting
debugged
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CN110260973A (en
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赵英飞
曹海霞
王卫东
罗剑秋
夏钟海
周伟
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Ncs Testing Technology Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0278—Control or determination of height or angle information for sensors or receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum

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Abstract

The invention relates to an automatic debugging system and method of an echelle grating spectrometer, wherein the system comprises an automatic debugging platform, and the automatic debugging platform is provided with an upper computer, a control module, a storage module, a spectrogram analysis module, a debugging model, a motor controller and a posture adjusting motor set; the detector acquisition module transmits the acquired spectrogram to the spectrogram analysis module; the spectrogram analysis module analyzes the spectrogram through the relative position information of the characteristic light spot and judges the working posture of the module to be debugged; the debugging model calculates the adjusting mode and the adjusting quantity of the module to be debugged according to prestored debugging parameters and a received judgment result of the working posture of the module to be debugged, and sends the adjusting mode and the adjusting quantity to an upper computer which sends a debugging instruction to the control module; the control module is used for sending an instruction to the motor controller, and the motor controller controls the attitude adjustment motor set through the driver, so that the working state of the module to be debugged is changed. The invention has low labor cost and high reliability.

Description

Automatic debugging system and method for echelle grating spectrometer
Technical Field
The invention belongs to the technical field of optical instruments, and particularly relates to an automatic debugging system and method of an echelle grating spectrometer.
Background
The echelle grating spectrometer is an optical system with very high requirements on the debugging process, and the debugging process of the echelle grating spectrometer has very high requirements on debugging experience of a debugger. In the prior art, no patent/patent application about automatic debugging of the echelle grating spectrometer is found so far, and all the debugging processes need manual operation and are debugged and verified according to experience. Thus, if the adjustment is performed manually, all by human power, the required cycle time is long, 2-3 hours are required, and the requirements on the adjustment experience are very high. In order to mass-produce, a very large amount of human resources are required, and the operation cost is high.
In addition, because the existing debugging technology of the echelle grating spectrometer needs manual operation, the indexes of accuracy, reliability and the like are all limited by the process level of operators. Therefore, the training and the management of the operators are very important, and meanwhile, each operator needs one set of debugging platform and production space, so that the setup cost of the echelle grating spectrometer debugging technology is high, and the device comprises auxiliary equipment such as factory building setup cost and platform construction cost. When the yield is to be increased, various factors such as recruitment staff, personnel training, factory building, platform building and the like can limit the increasing speed. Therefore, there is a pressing need in the art for techniques that can implement automated tuning of echelle grating spectrometers.
Disclosure of Invention
Aiming at the problems existing in the installation and debugging process of the traditional echelle grating spectrometer, the automatic debugging system and method of the echelle grating spectrometer with low labor cost and high reliability are provided.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides an automatic debugging system of echelle grating spectrometer for debugging echelle grating spectrometer 2, echelle grating spectrometer 2 includes light source 3, treats debugging module 4 and detector acquisition module 5, treat that debugging module 4 includes collimating mirror module 401, echelle grating module 402 and focusing mirror module 403.
The system comprises an automatic debugging platform 1, wherein an upper computer 6, a control module 7, a storage module 8, a spectrogram analysis module 9, a debugging model 10, a motor controller 11 and an attitude adjusting motor set 12 are arranged on the automatic debugging platform 1.
The attitude adjustment motor group 12 includes a plurality of attitude adjustment motors for adjusting the module 4 to be debugged.
The detector acquisition module 5 transmits the acquired spectrogram to the spectrogram analysis module 9.
The spectrogram analyzing module 9 analyzes the spectrogram through the relative position information of the characteristic light spot, judges the working posture of the module to be debugged 4, and transmits the spectrogram analyzing result and the judgment result to the storage module 8 and the debugging model 10 respectively.
The debugging model 10 calculates the adjustment mode and the adjustment amount of the module 4 to be debugged according to the prestored debugging parameters and the received judgment result of the working posture of the module 4 to be debugged, then sends the information of the adjustment mode and the adjustment amount to the upper computer 6, and the upper computer 6 sends a debugging instruction to the control module 7.
The control module 7 is configured to send an instruction to the motor controller 11, and the motor controller 11 controls each attitude adjustment motor of the attitude adjustment motor group 12 through the driver, thereby implementing a change of the operating state of the module to be debugged 4.
The spectrogram analysis module 9 is further configured to determine whether the spectrogram meets the test requirement.
The upper computer 6 is also used for storing the information of the adjusting mode and the adjusting amount in the storage module 8.
The attitude adjusting motor group 12 includes a collimator attitude adjusting motor for adjusting the working attitude of the collimator module 401, an echelle grating attitude adjusting motor for adjusting the working attitude of the echelle grating module 402, and a focusing mirror attitude adjusting motor for adjusting the working attitude of the focusing mirror module 403.
Adjusting the working posture of the collimator lens module 401 and adjusting the working posture of the focusing lens module 403 include adjusting the pitch, tilt, and front-back positions of the collimator lens module 401 and the focusing lens module 403; adjusting the operating pose of the echelle grating module 402 includes adjusting the pitch, and roll of the echelle grating module 402.
The adjustment of the front-back position of the collimator lens module 401 is the adjustment of the collimator lens module 401 in the object distance direction, and the adjustment of the front-back position of the focusing lens module 403 is the adjustment of the focusing lens module 403 in the image distance direction.
An automatic debugging method of an echelle grating spectrometer by utilizing the automatic debugging system of the echelle grating spectrometer comprises the following steps:
s0, setting an automatic debugging platform 1, connecting the echelle grating spectrometer 2 to be debugged with the automatic debugging platform 1, butting the module 4 to be debugged with an attitude adjustment motor set 12, connecting drivers of all attitude adjustment motors to a motor controller 11, and enabling a spectrogram analysis module 9 to receive a spectrogram acquired by a detector acquisition module 5;
s1, the detector acquisition module 5 transmits acquired spectrogram information to the spectrogram analysis module 9, and the spectrogram analysis module 9 analyzes the spectrogram and judges the working posture of the module to be debugged 4;
s2, the debugging model 10 calculates the adjusting mode and the adjusting amount of the module 4 to be debugged according to the prestored debugging parameters and the received judgment result of the working posture of the module 4 to be debugged, and uploads the information of the adjusting mode and the adjusting amount to the upper computer 6, and the upper computer 6 sends a debugging instruction to the control module 7;
s3, the control module 7 sends the information of the adjustment mode and the adjustment amount of the module to be debugged 4 to the motor controller 11, and the motor controller 11 sends an instruction to the attitude adjustment motor group 12 according to the adjustment mode and the adjustment amount to adjust the working state of the module to be debugged 4.
The judging sequence and the debugging sequence of the module to be debugged 4 are firstly the collimating mirror module 401, secondly the echelle grating module 402 and finally the focusing mirror module 403.
In step S2, 4 optical chamber parameters f, θ, i are calculated according to the following formula1Adjustment amount of ω:
the adjustment amount of the prism incident angle is Δ i ═ i1-i0
The adjustment amount of the blaze angle of the grating is delta theta ═ theta-theta0
The focus of the echelle grating spectrometer is adjusted to delta f ═ f-f0
The adjustment amount of the echelle grating offset angle is delta omega ═ omega-omega0
In the formula i1Is the prism incident angle, i0Is the initial parameter of the prism incidence angle, f is the system focal length of the echelle grating spectrometer, f0For echelle gratingInitial parameter of system focal length of spectrometer, theta is echelle grating blaze angle, theta0Is the initial parameter of the blaze angle of the echelle grating, omega is the offset angle of the echelle grating, omega0Is the initial parameter of the bias angle of the echelle grating.
In step S3, after the attitude adjustment motor group 12 completes the instruction, the detector acquisition module 5 acquires the spectrogram information after adjustment, and returns to step S1 until the working states of all the elements of the module to be debugged 4 meet the test requirements, and the test is completed.
Compared with the prior art, the invention has the beneficial effects that:
in the debugging method, the automatic debugging can be realized without manual intervention, so that manpower and material resources are saved, errors in manual judgment and debugging are not required to be considered completely through motor debugging, and the reliability and consistency of debugging are improved. Even if the initial state of the echelle grating spectrometer is different due to production errors, the control module can also find out the cause according to the detection signals and correct the influence of the errors. By adopting the automatic debugging system and the automatic debugging method provided by the invention, the debugging work of the echelle grating spectrometer can be completed within 2-3 hours under the condition of no manual intervention.
Drawings
FIG. 1 is a schematic block diagram of an automatic debugging system of an echelle grating spectrometer of the present invention;
FIG. 2 is a flow chart of the method for automatically tuning an echelle grating spectrometer of the present invention;
FIG. 3 is an initial state spectrum of the echelle grating spectrometer of the present invention before it is automatically debugged;
FIG. 4 is a target spectrum of the echelle grating spectrometer of the present invention.
Wherein the reference numerals are:
1 automatic debugging platform
2 echelle grating spectrometer
3 light source
4 waiting debugging module
5 Detector acquisition module
6 upper computer
7 control module
8 storage module
9 spectrogram analysis module
10 debugging model
11 electric machine controller
12 attitude adjusting motor set
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention is implemented according to a schematic block diagram of an automatic debugging system of an echelle grating spectrometer as shown in fig. 1, and is used for debugging an echelle grating spectrometer 2. The echelle grating spectrometer 2 comprises a light source 3, a module to be debugged 4 and a detector acquisition module 5. The light source 3 is a pen-shaped mercury lamp, and the reference characteristic wavelengths of the pen-shaped mercury lamp are 253.652nm, 312.566nm, 313.1548nm, 313.184nm, 365.015nm, 404.66nm, 435.835nm, 546.074nm and 579.066nm, but the invention is not limited to the wavelengths.
The module 4 to be debugged of the echelle grating spectrometer 2 comprises a collimating mirror module 401, an echelle grating module 402 and a focusing mirror module 403.
The automatic debugging system comprises an automatic debugging platform 1, wherein an upper computer 6, a control module 7, a storage module 8, a spectrogram analysis module 9, a debugging model 10, a motor controller 11 and an attitude adjusting motor set 12 are arranged on the automatic debugging platform 1. The detector acquisition module 5 of the echelle grating spectrometer 2 is connected with the spectrogram analysis module 9 of the automatic debugging system; the spectrogram analysis module 9 is respectively connected with the storage module 8 and the debugging model 10; the debugging model 10 is connected with the upper computer 6; the upper computer 6 is respectively connected with the control module 7 and the storage module 8; the control module 7 is connected with a motor controller 11; the motor controller 11 is connected to an attitude adjusting motor group 12.
The attitude adjusting motor set 12 includes a collimator attitude adjusting motor, an echelle grating attitude adjusting motor, and a focusing mirror attitude adjusting motor, which are respectively used for adjusting the working attitudes of the collimator module 401, the echelle grating module 402, and the focusing mirror module 403.
The detector acquisition module 5 transmits the acquired spectrogram to the spectrogram analysis module 9.
The spectrogram analysis module 9 analyzes the spectrogram through the relative position information of the characteristic light spot, judges the working posture of the module to be debugged 4, and respectively transmits the spectrogram analysis result and the judgment result to the storage module 8 and the debugging model 10; the storage module 8 stores the spectrogram analysis result.
The debugging model 10 calculates the adjustment mode and the adjustment amount of the module 4 to be debugged according to the prestored debugging parameters and the received judgment result of the working posture of the module 4 to be debugged, then sends the information of the adjustment mode and the adjustment amount to the upper computer 6, the upper computer 6 sends a debugging instruction to the control module 7, and simultaneously stores the information of the adjustment mode and the adjustment amount in the storage module 8.
The adjustment mode of the module to be debugged 4 comprises adjusting the working posture of the collimating mirror module 401, adjusting the working posture of the echelle grating module 402 and adjusting the working posture of the focusing mirror module 403; adjusting the working posture of the collimating mirror module 401 and adjusting the working posture of the focusing mirror module 403 include adjusting the pitch, tilt, and front-back positions of the collimating mirror module 401 and the focusing mirror module 403; adjusting the operating pose of the echelle grating module 402 includes adjusting the pitch, and roll of the echelle grating module 402.
The control module 7 is configured to send an instruction to the motor controller 11, and the motor controller 11 controls each attitude adjustment motor of the attitude adjustment motor group 12 through the driver, thereby implementing a change of the operating state of the module to be debugged 4.
The spectrogram analysis module 9 is further configured to determine whether the spectrogram meets the test requirement.
As shown in fig. 2, the present invention further provides an automatic debugging method of an echelle grating spectrometer, which is used for realizing the automatic debugging of the echelle grating spectrometer, and the method includes the following steps:
s0, setting an automatic debugging platform 1, connecting the echelle grating spectrometer 2 to be debugged with the automatic debugging platform 1, butting the module 4 to be debugged with an attitude adjustment motor set 12, connecting drivers of all attitude adjustment motors to a motor controller 11, and enabling a spectrogram analysis module 9 to receive a spectrogram acquired by a detector acquisition module 5;
s1, the detector acquisition module 5 transmits acquired spectrogram information to the spectrogram analysis module 9, and the spectrogram analysis module 9 analyzes the spectrogram and judges the working posture of the module to be debugged 4;
s2, the debugging model 10 calculates the adjusting mode and the adjusting quantity of the module 4 to be debugged, and uploads the information of the adjusting mode and the adjusting quantity to the upper computer 6, and the upper computer 6 sends a debugging instruction to the control module 7;
s3, the control module 7 sends the information of the adjustment mode and the adjustment amount of the module to be debugged 4 to the motor controller 11, and the motor controller 11 sends an instruction to the attitude adjustment motor group 12 according to the adjustment mode and the adjustment amount to adjust the working state of the module to be debugged 4.
The step S0 further includes the following steps:
s001, a light source 3 of the echelle grating spectrometer 2 to be debugged is a pen-shaped mercury lamp, and a detector acquisition module 5 can normally operate to acquire a spectrogram.
S002, setting the attitude adjustment motor group 12 corresponding to the module 4 to be debugged to be in an initial state, and recording initial parameters; an initial spectrogram (in a certain state and without representation) before automatic debugging of the echelle grating spectrometer to be debugged is butted with an automatic debugging system, as shown in fig. 3, and information such as the position and the shape of a light spot is different from a target spectrogram shown in fig. 4.
The step S1 specifically includes the following steps:
s101, the spectrogram analysis module 9 analyzes spectrogram information acquired by the detector acquisition module 5;
s102, according to the light beam transmission direction of the echelle grating spectrometer 2, combining spectrogram information, and judging the working state of the module 4 to be debugged;
s103, judging the sequence of spectrogram characteristic light spots firstly in the dispersion direction of the prism and secondly in the dispersion direction of the echelle grating; .
The step S3 specifically includes the following steps:
s301, the motor controller 11 controls the attitude adjustment motor set 12 through the driver to adjust the attitude of the module 4 to be debugged;
s302, after the gesture adjustment motor group 12 completes the instruction, the detector acquisition module 5 acquires the spectrogram information after adjustment, and returns to step S1 until the working states of all the elements of the module to be debugged 4 meet the test requirement, as shown in fig. 4, the test is completed.
By adopting the automatic debugging system and the automatic debugging method provided by the invention, the debugging work of the echelle grating spectrometer can be completed within 2-3 hours under the condition of no manual intervention.
The analysis of the spectrogram analysis module 9 is as follows:
the calculation formula of the database of the echelle grating spectrometer 2 is as follows:
Figure BDA0002103008830000091
y＝f·tan(i) (2)
Figure BDA0002103008830000092
x＝f·tan(θ) (4)
Figure BDA0002103008830000093
in the formula, delta i is an intermediate quantity in the process of calculating the value of the coordinate y and has no physical significance, A is the vertex angle of the prism, and i is1The prism incident angle is shown as the prism incident angle, n is the prism refractive index, f is the system focal length of the echelle grating spectrometer, delta theta is the intermediate quantity in the process of calculating the coordinate x value, and has no physical significance, theta is the blaze angle of the echelle grating, d is the grating constant of the echelle grating, m is the diffraction order m which is 40,41, …,200, lambda is the wavelength, omega is the offset angle of the echelle grating,and x and y are coordinate positions of light spots on the spectrogram acquired by the detector acquisition module 5 respectively.
At step S0:
f＝f0
θ＝θ0
i1＝i0
ω＝ω0
f,θ,i1all ω may have a small amount of deviation;
the adjustment amount of the prism incident angle is Δ i ═ i1-i0
The adjustment amount of the blaze angle of the grating is delta theta ═ theta-theta0
The focus of the echelle grating spectrometer is adjusted to delta f ═ f-f0
The adjustment amount of the echelle grating offset angle is delta omega ═ omega-omega0
In the formula i1Is the prism incident angle, i0Is the initial parameter of the prism incidence angle, f is the system focal length of the echelle grating spectrometer, f0Is the initial parameter of the system focal length of the echelle grating spectrometer, theta is the blaze angle of the echelle grating, theta is the initial parameter of the system focal length of the echelle grating spectrometer0Is the initial parameter of the blaze angle of the echelle grating, omega is the offset angle of the echelle grating, omega0Is the initial parameter of the bias angle of the echelle grating.
When the light chamber is debugged, the coordinate position of the spot of the mercury lamp characteristic wavelength on the detector is as follows. 253.652nm (710,423) ± 1, 312.566nm (673,281) ± 1, 313.1548nm (802,281) ± 1, 313.184nm (808,281) ± 1, 365.015nm (296,216) ± 1, 404.66nm (290,182) ± 1, 435.835nm (228,163) ± 1, 546.074nm (789,119) ± 1, 579.066nm (253,110) ± 1.
The spectrogram analysis model 9 is used for debugging a module to be debugged:
1. the light source is a pen-shaped mercury lamp.
2. The relative position of the characteristic light spot of the pen-shaped mercury lamp on the detector is represented by coordinates (x, y), and the coordinates of the wavelength of different characteristic light spots are unique and can be inquired in a database.
3. And searching the position of the 253.652nm light spot by using a software searching function, and adjusting the pitch and the tilt of the focusing mirror to the position of the database according to the position of 253.652 in the database.
4. Based on the current state of 253.652nm, positions of 312.566nm, 313.1548nm, 313.184nm, 365.015nm, 404.66nm, 435.835nm, 546.074nm and 579.066nm are searched, and the tolerance is controlled within the range of 20 pixels;
5. debugging the module 4 to be debugged according to the relative position of the characteristic light spot on the image surface, wherein the pitch angle, the inclination angle and the front and back positions of the collimating mirror module 401 pass through theta respectively1、α1And l1To describe; the pitch angle, tilt angle and front-back position of the focusing mirror module 403 are respectively theta3、α3And l3To describe; the pitch, tilt, and roll angles of the echelle grating module 402 are each measured by θ2、α2And beta2To describe; the corresponding relationship between the adjustment mode of the module to be debugged 4 and the optical chamber parameters is as follows:
1) when i is1≠i0When the angle of incidence of the prism is deviated, the inclination angle α of the collimator lens module 401 can be adjusted1Realizing the prism incident angle i1Adjusting;
2) when theta is not equal to theta0In the meantime, it is described that the incident angle of the echelle grating is deviated, and the pitch angle θ of the collimating mirror module 401 can be adjusted1And the pitch angle θ of the echelle grating module 4022The adjustment of the blazed angle theta of the echelle grating is realized;
3) when f is not equal to f0In the process, the system focal length of the echelle grating spectrometer is shown to be deviated, and the front and rear positions l of the collimating mirror module 401 can be adjusted1And the front and rear positions l of the focusing mirror block 4033The system focal length f of the echelle grating spectrometer is adjusted;
4) when omega is not equal to omega0In the description, the bias angle of the echelle grating is deviated, and the inclination angle α of the echelle grating module 402 can be adjusted2And roll angle beta2The adjustment of the offset angle omega of the echelle grating is realized;
f,θ,i1the initial parameters of the four values of ω are f0,θ0,i0,ω0Inverting f, theta, i according to the position of the spot with the characteristic wavelength of the mercury lamp on the image surface1The 4 optical chamber parameters ω are the parameters, and a functional relationship exists between the 4 optical chamber parameters and the module 4 to be debugged, see the above formulas (1) to (5), and the adjustment mode and the adjustment amount of the module 4 to be debugged can be analyzed according to the functional relationship.
Recording the adjustment parameter as viTo indicate the control of each driver,
Figure BDA0002103008830000111
wherein n isjIs the number of drivers; the corresponding motor has a unit adjustment of
Figure BDA0002103008830000112
In the debugging process, the adjustment amount of the module to be debugged 4 needs to be compared with the last debugging result, and reference is provided for the adjustment amount of the next time. When the spectrogram is analyzed each time, the spectrogram analysis result and the debugging process are saved in the storage module 8.
After debugging the module 4 to be debugged each time, when calculating the relative position of the characteristic wavelength, the pitch angle θ of the focusing mirror module 403 is debugged3And an angle of inclination alpha3Adjusting the 253.652nm light spot to the corresponding position in the database, namely (710,423); based on this, the spectrum analysis model 9 analyzes the spectrum information.
6. The light spot position refers to the data value of the brightest point of the light spot;
7. and when the relative position of the characteristic light spot is matched with the database, the automatic debugging is completed.
While the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from its scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims (8)

1. The utility model provides an automatic debugging system of echelle grating spectrometer for debugging echelle grating spectrometer (2), echelle grating spectrometer (2) include light source (3), wait to debug module (4) and detector acquisition module (5), it includes collimating mirror module (401), echelle grating module (402) and focusing mirror module (403) to wait to debug module (4), its characterized in that:
the system comprises an automatic debugging platform (1), wherein an upper computer (6), a control module (7), a storage module (8), a spectrogram analysis module (9), a debugging model (10), a motor controller (11) and a posture adjusting motor set (12) are arranged on the automatic debugging platform (1);
the attitude adjusting motor set (12) comprises a plurality of attitude adjusting motors for adjusting the module to be debugged (4);
the detector acquisition module (5) transmits the acquired spectrogram to the spectrogram analysis module (9);
the spectrogram analyzing module (9) analyzes the spectrogram through the relative position information of the characteristic light spot, judges the working posture of the module to be debugged (4), and respectively transmits the spectrogram analyzing result and the judging result to the storage module (8) and the debugging model (10);
the debugging model (10) calculates the adjusting mode and the adjusting amount of the module to be debugged (4) according to prestored debugging parameters and a received judgment result of the working posture of the module to be debugged (4), then sends the information of the adjusting mode and the adjusting amount to the upper computer (6), and the upper computer (6) sends a debugging instruction to the control module (7); the prestored debugging parameters comprise initial parameters i of the prism incident angle0Initial parameter f of system focal length of echelle grating spectrometer0Initial parameter theta of blaze angle of echelle grating0Initial parameter omega of the bias angle of the echelle grating0；
The control module (7) is used for sending an instruction to the motor controller (11), and the motor controller (11) controls each attitude adjusting motor of the attitude adjusting motor set (12) through the driver, so that the change of the working state of the module (4) to be debugged is realized;
the attitude adjusting motor set (12) comprises a collimating mirror attitude adjusting motor for adjusting the working attitude of the collimating mirror module (401), an echelle grating attitude adjusting motor for adjusting the working attitude of the echelle grating module (402) and a focusing mirror attitude adjusting motor for adjusting the working attitude of the focusing mirror module (403);
the adjustment of the working posture of the collimating mirror module (401) and the adjustment of the working posture of the focusing mirror module (403) comprise the adjustment of the pitching, the tilting and the front-back positions of the collimating mirror module (401) and the focusing mirror module (403); adjusting the operating attitude of the echelle grating module (402) includes adjusting the pitch, and roll of the echelle grating module (402);
the judging sequence and the debugging sequence of the module to be debugged (4) are firstly a collimating mirror module (401), secondly an echelle grating module (402) and finally a focusing mirror module (403).
2. The automatic debugging system of the echelle grating spectrometer of claim 1, comprising: the spectrogram analysis module (9) is also used for judging whether the spectrogram meets the test requirement.
3. The automatic debugging system of the echelle grating spectrometer of claim 1, comprising: the upper computer (6) is also used for storing the information of the adjusting mode and the adjusting amount in the storage module (8).
4. The automatic debugging system of the echelle grating spectrometer of claim 1, comprising: the adjustment of the front-back position of the collimator lens module (401) is the adjustment of the collimator lens module (401) in the object distance direction, and the adjustment of the front-back position of the focusing lens module (403) is the adjustment of the focusing lens module (403) in the image distance direction.
5. An automatic debugging method of an echelle grating spectrometer using the automatic debugging system of an echelle grating spectrometer as claimed in claim 1, characterized in that: the method comprises the following steps:
s0, setting an automatic debugging platform (1), connecting the echelle grating spectrometer (2) to be debugged with the automatic debugging platform (1), butting a module (4) to be debugged with an attitude adjusting motor set (12), connecting drivers of all attitude adjusting motors to a motor controller (11), and enabling a spectrogram analysis module (9) to receive a spectrogram acquired by a detector acquisition module (5);
s1, the detector acquisition module (5) transmits acquired spectrogram information to the spectrogram analysis module (9), and the spectrogram analysis module (9) analyzes the spectrogram and judges the working posture of the module to be debugged (4);
s2, the debugging model (10) calculates the adjusting mode and the adjusting quantity of the module to be debugged (4) according to the prestored debugging parameters and the received judgment result of the working posture of the module to be debugged (4), and uploads the information of the adjusting mode and the adjusting quantity to the upper computer (6), and the upper computer (6) sends a debugging instruction to the control module (7);
s3, the control module (7) sends the information of the adjustment mode and the adjustment quantity of the module to be debugged (4) to the motor controller (11), and the motor controller (11) sends an instruction to the attitude adjustment motor group (12) according to the adjustment mode and the adjustment quantity to adjust the working state of the module to be debugged (4).
6. The method of claim 5, wherein:
the judging sequence and the debugging sequence of the module to be debugged (4) are firstly a collimating mirror module (401), secondly an echelle grating module (402) and finally a focusing mirror module (403).
7. The method of claim 5, wherein:
in step S2, 4 optical chamber parameters f, θ, i are calculated according to the following formula1Adjustment amount of ω:
the adjustment amount of the prism incident angle is Δ i ═ i1-i0
The adjustment amount of the blaze angle of the grating is delta theta ═ theta-theta0
The focus of the echelle grating spectrometer is adjusted to delta f ═ f-f0
The adjustment amount of the echelle grating offset angle is delta omega ═ omega-omega0
In the formula i1Is the prism incident angle, i0Is the initial parameter of the prism incidence angle, f is the system focal length of the echelle grating spectrometer, f0Is the initial parameter of the system focal length of the echelle grating spectrometer, theta is the blaze angle of the echelle grating, theta is the initial parameter of the system focal length of the echelle grating spectrometer0Is the initial parameter of the blaze angle of the echelle grating, omega is the offset angle of the echelle grating, omega0Is the initial parameter of the bias angle of the echelle grating.
8. The method of claim 5, wherein:
in the step S3, after the gesture adjustment motor unit (12) completes the instruction, the detector acquisition module (5) acquires the spectrogram information after adjustment, and the step S1 is returned until the working states of all the elements of the module to be debugged (4) meet the test requirements, and the test is completed.
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