CN110256049A - A kind of preparation method of ito powder - Google Patents

A kind of preparation method of ito powder Download PDF

Info

Publication number
CN110256049A
CN110256049A CN201910717384.1A CN201910717384A CN110256049A CN 110256049 A CN110256049 A CN 110256049A CN 201910717384 A CN201910717384 A CN 201910717384A CN 110256049 A CN110256049 A CN 110256049A
Authority
CN
China
Prior art keywords
slurry
indium oxide
sand milling
ito
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910717384.1A
Other languages
Chinese (zh)
Inventor
凤吾生
张莉兰
何坤鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilot Film Materials Co Ltd
Original Assignee
Pilot Film Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilot Film Materials Co Ltd filed Critical Pilot Film Materials Co Ltd
Priority to CN201910717384.1A priority Critical patent/CN110256049A/en
Publication of CN110256049A publication Critical patent/CN110256049A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605Treating the starting powders individually or as mixtures
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632Organic additives
    • C04B35/634Polymers
    • C04B35/63404Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3293Tin oxides, stannates or oxide forming salts thereof, e.g. indium tin oxide [ITO]

Abstract

The present invention provides a kind of preparation methods of ito powder, comprising the following steps: indium oxide, dispersing agent a) are mixed sand milling with water, obtain indium oxide slurry;B) tin oxide and dispersant are sanded, obtain tin oxide slurry;C) the indium oxide slurry, tin oxide slurry are mixed into sand milling with binder, obtains ITO slurry;D) the ITO slurry is spray-dried, obtains ito powder;The step a) and step b) is limited without sequence.Preparation method according to the invention can not only obtain ito powder, moreover it is possible to improve the mobility of ito powder, reduce its apparent density;Moreover, thinner particle can be obtained by the above method, and grain diameter is uniform, good dispersion.

Description

A kind of preparation method of ito powder
Technical field
The present invention relates to technical field of semiconductor, in particular to a kind of preparation method of ito powder.
Background technique
Indium tin oxide (ITO) also known as tin-doped indium oxide powder, by In2O3And SnO2It is combined, is a kind of height degeneracy N-type semiconductor, with high visible light transmittance, infrared reflection rate, excellent electric conductivity and preferable etching performance by To extensive concern.Therefore, the preparation of ITO powder is of great significance.
Currently, the method for preparing ITO powder mainly has: mechanical mixing, spray pyrolysis, hydro-thermal method, chemical precipitation method, molten Glue-gel method, micro emulsion method etc..Wherein, prepared by spray pyrolysis, hydro-thermal method, chemical precipitation method, sol-gel method, micro emulsion method etc. Process is complicated, condition is stringent;In contrast, mechanical mixing is relatively simple.Mechanical mixing be by indium oxide and tin oxide by It after certain proportion mixing, is heat-treated, and then obtains ito powder.However, in mechanical the preparation method, the mobility of gained powder Difference, apparent density are high, to influence sintered density when ito powder molding.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of preparation method of ito powder, preparation method energy of the invention It enough improves the mobility of ito powder, reduce its apparent density.
The present invention provides a kind of preparation methods of ito powder, comprising the following steps:
A) indium oxide, dispersing agent are mixed into sand milling with water, obtains indium oxide slurry;
B) tin oxide and dispersant are sanded, obtain tin oxide slurry;
C) the indium oxide slurry, tin oxide slurry are mixed into sand milling with binder, obtains ITO slurry;
D) the ITO slurry is spray-dried, obtains ito powder;
The step a) and step b) is limited without sequence.
Preferably, in the step a), the specific surface area of indium oxide is 5~25m2/g;
The mass ratio of indium oxide and water is (1.5~6): 1.
Preferably, in the step b), the specific surface area of tin oxide is 5~20m2/g。
Preferably, the mass ratio of the indium oxide and binder is (20~60): 1;
The binder is the oligomeric species binder of dihydric alcohol.
Preferably, in the step a), being sanded to the average particle size of indium oxide is 1.5 μm or less;
In the step b), being sanded to the average particle size of tin oxide is 0.1~2.5 μm.
Preferably, in the step a): dispersing agent is selected from alcohols dispersing agent;The mass ratio of indium oxide and dispersing agent is (120 ~250): 1.
Preferably, in the step b): dispersing agent is selected from alcohols dispersing agent;The mass ratio of tin oxide and dispersing agent is (20 ~60): 1.
Preferably, the step c) includes:
C1 indium oxide slurry) is mixed into sand milling with tin oxide slurry, obtains intermediate pulp;
C2 the intermediate pulp) is mixed into sand milling with binder, obtains ITO slurry;
The step c1) in:
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 100~600min;
The step c2) in:
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 50~300min.
Preferably, in the step a):
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 100~600min;
In the step b):
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 50~300min.
Preferably, the mass ratio of the indium oxide and tin oxide is (8~99.5): 1;
The inlet temperature of the spray drying is 150~250 DEG C, and outlet temperature is 50~150 DEG C;
The binder is polyethylene glycol;
The dispersing agent is polyvinyl alcohol.
The present invention provides a kind of preparation methods of ito powder, comprising the following steps: a) by indium oxide, dispersing agent and water Mixing is sanded, and obtains indium oxide slurry;B) tin oxide and dispersant are sanded, obtain tin oxide slurry;C) by the oxygen Change indium slurry, tin oxide slurry mix sand milling with binder, obtain ITO slurry;D) the ITO slurry is spray-dried, is obtained Ito powder;The step a) and step b) is limited without sequence.Initial oxidation indium, dispersing agent and water of the present invention are sanded, and are obtained The indium oxide slurry of certain particle size;Tin oxide and dispersing agent are sanded, the tin oxide slurry of certain particle size is obtained;Again by indium oxide Slurry, tin oxide slurry and binder are sanded, and obtain ITO slurry;The present invention is ground using specific sand milling mode, and The specific gradually sand grinding process of setting, and the control of some parameters is combined also to occur so that process of lapping not only has physical change Chemical change, the crystal grain of particle becomes smaller combination, formation ITO object phase, and ITO slurry system with preferable slurry state, then leads to Spray drying is crossed, that is, forms the ito powder that apparent density is low, mobility is high.Moreover, can be obtained by the above method thinner Particle, and grain diameter is uniform, good dispersion.In addition, the present invention simplifies without being heat-treated compared to existing machinery method Preparation process simultaneously reduces energy consumption.
Test result shows preparation method provided by the invention, and ito powder, and the stream of gained powder is not only successfully made Dynamic property value is in 70s/50g hereinafter, apparent density is in 1.75g/cm2Hereinafter, having high fluidity and low-apparent-density, can make The sintered density of ito powder reaches 7.135g/cm3More than.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is the XRD diagram of mixed-powder;
Fig. 2 is the XRD diagram of 1 gained ito powder of embodiment;
Fig. 3 is SEM figure of the 1 gained ito powder of embodiment under 100 multiplying powers;
Fig. 4 is SEM figure of the 1 gained ito powder of embodiment under 500 multiplying powers;
Fig. 5 is SEM figure of the 2 gained ito powder of embodiment under 100 multiplying powers;
Fig. 6 is SEM figure of the 2 gained ito powder of embodiment under 500 multiplying powers;
Fig. 7 is SEM figure of the 3 gained ito powder of embodiment under 100 multiplying powers;
Fig. 8 is SEM figure of the 3 gained ito powder of embodiment under 500 multiplying powers.
Specific embodiment
The present invention provides a kind of preparation methods of ito powder, comprising the following steps:
A) indium oxide, dispersing agent are mixed into sand milling with water, obtains indium oxide slurry;
B) tin oxide and dispersant are sanded, obtain tin oxide slurry;
C) the indium oxide slurry, tin oxide slurry are mixed into sand milling with binder, obtains ITO slurry;
D) the ITO slurry is spray-dried, obtains ito powder;
The step a) and step b) is limited without sequence.
Initial oxidation indium, dispersing agent and water of the present invention are sanded, and the indium oxide slurry of certain particle size is obtained;By tin oxide with Dispersing agent is sanded, and obtains the tin oxide slurry of certain particle size;Indium oxide slurry, tin oxide slurry and binder are sanded again, obtained To ITO slurry;The present invention is ground using specific sand milling mode, and sets specific gradually sand grinding process, and combine Chemical change also occur so that process of lapping not only has physical change for the control of some parameters, and the crystal grain of particle becomes smaller combination, Formed ITO object phase, and ITO slurry system have preferable slurry state, then by spray drying, that is, formed apparent density it is low, The high ito powder of mobility.Moreover, thinner particle can be obtained by the above method, and grain diameter is uniform, dispersed It is good.
According to the present invention, indium oxide, dispersing agent are mixed into sand milling with water, obtain indium oxide slurry.
In the present invention, the specific surface area of the indium oxide is preferably 5~25m2/ g, using the oxidation under above-mentioned specific surface area Indium particle advantageously forms ITO object phase in conjunction with preparation process of the invention, and improves the mobility of ito powder, reduces its pine Fill density.Wherein, the specific surface area of the indium oxide is more preferably 8~20m2/ g prepares effect and product under the range Above-mentioned characteristic is further promoted.The present invention is not particularly limited the source of the indium oxide, ripe according to those skilled in the art The preparation method known obtains, and such as using indium metal, sulfuric acid and ammonium hydroxide as raw material, prepares indium hydroxide precipitating, then by forging It burns and obtains powdered indium oxide;It wherein, is the indium oxide for obtaining above-mentioned specific surface area, the temperature of calcining is 500~1200 DEG C.
In the present invention, the dispersing agent is preferably modified high-molecular Ionomer, more preferably in alcohols dispersing agent One or more;Further preferably polyvinyl alcohol.The present invention is not particularly limited the source of the dispersing agent, is general Commercially available product is made according to preparation method well known to those skilled in the art.
In the present invention, the mass ratio of the indium oxide and dispersing agent is preferably (120~250): 1, more preferably (150~ 210)∶1。
In the present invention, the mass ratio of the indium oxide and water is preferably (1.5~.6): 1.Under the material-water ratio, in conjunction with this The preparation process of invention is conducive to improve the mobility of ito powder, reduces its apparent density.
In the present invention, in the mixing sand milling, the sand mill of use is preferably horizontal sand mill.In the present invention, the sand The target of mill is that the average particle size of indium oxide in slurry is preferably made to reach 2.5 μm hereinafter, more preferably 1~2.5 μm, if granularity mistake Small, particle is easy to reunite, if granularity is excessive, it will cause the apparent density of the ITO powder gone out by spraying is larger.
In the present invention, to realize above-mentioned sand milling purpose, the partial size of the zirconia ball used in the sand milling is preferably 0.1~ 3.0mm.The revolving speed of the sand milling is preferably 500~1500rpm, more preferably 600~1400rpm;The time of the sand milling is excellent It is selected as 100~600min, more preferably 150~500min.After above-mentioned sand milling, indium oxide slurry is obtained.
According to the present invention, tin oxide and dispersant are sanded, tin oxide slurry is obtained.
In the present invention, the specific surface area of the tin oxide is preferably 5~20m2/ g, using the oxidation under above-mentioned specific surface area Tin particles advantageously form ITO object phase in conjunction with preparation process of the invention, and improve the mobility of ito powder, reduce its pine Fill density.The present invention is not particularly limited the source of the tin oxide, for general commercially available product or according to those skilled in the art Well known preparation method obtains.
In the present invention, the dispersing agent is preferably modified high-molecular Ionomer, more preferably in alcohols dispersing agent One or more;Further preferably polyvinyl alcohol.The present invention is not particularly limited the source of the dispersing agent, is general Commercially available product is made according to preparation method well known to those skilled in the art.
In the present invention, the mass ratio of the tin oxide and dispersing agent is preferably (20~60): 1, more preferably (25~50): 1。
In the present invention, in the mixing sand milling, the sand mill of use is preferably horizontal sand mill.In the present invention, the sand The target of mill is that the average particle size of tin oxide in slurry is preferably made to reach 0.1~2.5 μm, if undersized, particle is easy to reunite, If granularity is excessive, it will cause the apparent density of the ITO powder gone out by spraying is larger.
In the present invention, to realize above-mentioned sand milling purpose, the partial size of the zirconia ball used in the sand milling is preferably 0.1~ 3.0mm.The revolving speed of the sand milling is preferably 500~1500rpm, more preferably 600~1400rpm;The time of the sand milling is excellent It is selected as 50~300min.After above-mentioned sand milling, tin oxide slurry is obtained.
In the present invention, to sequence of the above-mentioned indium oxide slurry with acquisition tin oxide slurry is obtained, there is no limit.
According to the present invention, after obtaining indium oxide slurry and tin oxide slurry, by indium oxide slurry, tin oxide slurry and glue It ties agent mixing to be sanded, obtains ITO slurry.
In the present invention, the mass ratio of the indium oxide and tin oxide is preferably (8~99.5): 1.
In the present invention, the binder is preferably the oligomeric species binder of dihydric alcohol;More preferably polyethylene glycol.The oxygen The mass ratio for changing indium and binder is preferably (20~60): 1, more preferably (30~50): 1.Under the ratio, be conducive to mention The mobility of high ito powder reduces its apparent density.
In the present invention, when mixing sand milling, preferably carry out in the following manner:
C1 indium oxide slurry) is mixed into sand milling with tin oxide slurry, obtains intermediate pulp;
C2 the intermediate pulp) is mixed into sand milling with binder, obtains ITO slurry.
Wherein, the step c1) in, it is sanded and preferably uses horizontal sand mill.The zirconia ball used in the sand milling Partial size is preferably 0.1~3.0mm.The revolving speed of the sand milling is preferably 500~1500rpm, more preferably 600~1400rpm;Institute The time for stating sand milling is preferably 100~600min, more preferably 150~600min.
The step c2) in, it is sanded and preferably uses horizontal sand mill.The partial size of the zirconia ball used in the sand milling is excellent It is selected as 0.1~3.0mm.The revolving speed of the sand milling is preferably 500~1500rpm, more preferably 600~1400rpm;The sand milling Time be preferably 50~300min, more preferably 100~300min.After above-mentioned sanded treatment, ITO slurry is obtained.
According to the present invention, after obtaining ITO slurry, the ITO slurry is spray-dried, ito powder is obtained.
In the present invention, in the spray drying, condition is as follows: inlet temperature is preferably 150~250 DEG C, and outlet temperature is excellent It is selected as 50~150 DEG C.After above-mentioned spray drying, ito powder is obtained.In the present invention, after the spray drying, preferably also into Row screening.
It in preparation method provided by the invention, is ground, and is set specifically gradually using specific sand milling mode Sand grinding process, and combine the control of some parameters that chemical change, particle also occurs so that process of lapping not only has physical change Crystal grain become smaller combination, form ITO object phase, and ITO slurry system has preferable slurry state, then by spray drying, i.e., Form the ito powder that apparent density is low, mobility is high;Moreover, thinner particle, and particle can be obtained by the above method Diameter is uniform, good dispersion.Specifically, in above-mentioned preparation process, the indium oxide raw material of suitable particle size, indium oxide and water ratio, The sand milling granularity of the ratio and indium oxide slurry of indium oxide and binder and sand milling granularity, the two kinds of slurries of tin oxide slurry Mixed proportion etc. for forming ITO object phase and improving that the mobility of ito powder, to reduce apparent density more crucial, pass through this The setting of the specific preparation process of invention, and the control of above-mentioned parameter is combined, ito powder can be successfully obtained, and can mention The mobility of high ito powder reduces its apparent density, and the sintered density of ITO powder is made to reach 7.135g/cm3More than;Moreover, energy Thinner particle is enough obtained, and grain diameter is uniform, good dispersion.
For a further understanding of the present invention, the preferred embodiment of the invention is described below with reference to embodiment, still It should be appreciated that these descriptions are only further explanation the features and advantages of the present invention, rather than to the claims in the present invention Limitation.In following embodiment, using 200 meshes in screening.
Embodiment 1
The preparation of 1.1ITO powder
Take indium oxide powder (specific surface area 15m2/ g) 200g, dispersing agent PVA 1g, deionized water 133g;By above-mentioned object Material is placed in horizontal sand mill, wherein the partial size of zirconia ball is 1.2mm, and 600min is sanded under 600rpm revolving speed;Obtain oxygen Change indium slurry, wherein indium oxide average particle size is at 1.5 μm or less.
Take stannic oxide powder (specific surface area 5m2/ g) 20g, dispersing agent PVA 1g;Above-mentioned material is placed in horizontal sand milling In machine, wherein the partial size of zirconia ball is 1.2mm, and 300min is sanded under 500rpm revolving speed;Obtain tin oxide slurry, wherein Tin oxide average particle size is 1.2 μm.
Above-mentioned indium oxide slurry is added in tin oxide slurry, in sand mill, 600min is sanded with 600rpm revolving speed Afterwards, binder PEG 5g is added, continues that 300min is sanded with 600rpm revolving speed, obtains ITO slurry.
Above-mentioned ITO slurry is spray-dried, inlet temperature is 250 DEG C, outlet temperature is 150 DEG C, after screening, obtains ITO Powder.
The characterization and test of 1.2 samples
(1) above-mentioned indium oxide powder and stannic oxide powder are obtained into mixed-powder with the mixing of mass ratio 10: 1.
X- ray powder diffraction test is carried out respectively to above-mentioned mixed-powder and gained ito powder, as a result respectively such as Fig. 1 and Shown in Fig. 2, Fig. 1 is the XRD diagram of mixed-powder, and Fig. 2 is the XRD diagram of 1 gained ito powder of embodiment.As can be seen that being in Fig. 1 In2O3With SnO2Mixture phase;And in Fig. 2, do not find SnO in Fig. 12Characteristic peak, and mainly with In2O3Crystal structure For phase structure, it was demonstrated that gained powder is with In2O3Crystal structure is the composite metal oxide powder of phase structure.
(2) mobility and apparent density are tested respectively to gained ito powder, the results show that the mobility of ito powder is 35.56s/50g, apparent density 1.35g/cm2
(3) Electronic Speculum test is scanned to gained ito powder, as a result as shown in Figure 3 and Figure 4, Fig. 3 is 1 gained of embodiment SEM figure of the ito powder under 100 multiplying powers, Fig. 4 are SEM figure of the 1 gained ito powder of embodiment under 500 multiplying powers.As can be seen that Gained ito powder particle dispersion is preferable, and granularity is smaller, reaches 55~120 μm, and granularity is more uniform.And it can be seen by Fig. 4 Out, particle sphericity is preferable in gained powder, and surface is relatively smooth.
Embodiment 2
The preparation of 1.1ITO powder
Take indium oxide powder (specific surface area 8m2/ g) 1000g, dispersing agent PVA 5g, deionized water 500g;By above-mentioned object Material is placed in horizontal sand mill, wherein the partial size of zirconia ball is 1.2mm, and 300min is sanded under 1000rpm revolving speed;It obtains Indium oxide slurry, wherein indium oxide average particle size is at 1.5 μm or less.
Take stannic oxide powder (specific surface area 5m2/ g) 100g, dispersing agent PVA 5g;Above-mentioned material is placed in horizontal sand milling In machine, wherein the partial size of zirconia ball is 1.2mm, and 200min is sanded under 1000rpm revolving speed;Tin oxide slurry is obtained, In, tin oxide average particle size is 1.2 μm.
Above-mentioned indium oxide slurry is added in tin oxide slurry, in sand mill, 300min is sanded with 1000rpm revolving speed Afterwards, binder PEG 28.6g is added, continues that 150min is sanded with 1000rpm revolving speed, obtains ITO slurry.
Above-mentioned ITO slurry is spray-dried, inlet temperature is 150 DEG C, outlet temperature is 100 DEG C, after screening, obtains ITO Powder.
The characterization and test of 1.2 samples
(1) carry out x- ray powder diffraction test respectively to gained ito powder, it is as a result similar with Fig. 2, gained powder be with In2O3Crystal structure is the composite metal oxide powder of phase structure.
(2) mobility and apparent density are tested respectively to gained ito powder, the results show that the mobility of ito powder is 55.23s/50g, apparent density 1.58g/cm2
(3) Electronic Speculum test is scanned to gained ito powder, as a result as shown in Figure 5 and Figure 6, Fig. 5 is 2 gained of embodiment SEM figure of the ito powder under 100 multiplying powers, Fig. 6 are SEM figure of the 2 gained ito powder of embodiment under 500 multiplying powers.As can be seen that Gained ito powder particle dispersion is preferable, and granularity is smaller, reaches 50~120 μm, and granularity is more uniform.And it can be seen by Fig. 6 Out, particle sphericity is preferable in gained powder, and surface is relatively smooth.
Embodiment 3
The preparation of 1.1ITO powder
Take indium oxide powder (specific surface area 20m2/ g) 10Kg, dispersing agent PVA 50g, deionized water 2.857Kg;It will be upper It states material to be placed in horizontal sand mill, wherein the partial size of zirconia ball is 1.2mm, and 100min is sanded under 1500rpm revolving speed; Obtain indium oxide slurry, wherein indium oxide average particle size is at 1.5 μm or less.
Take stannic oxide powder (specific surface area 13m2/ g) 1Kg, dispersing agent PVA 50g;Above-mentioned material is placed in Horizontal sand In grinding machine, wherein the partial size of zirconia ball is 1.2mm, and 50min is sanded under 1500rpm revolving speed;Tin oxide slurry is obtained, In, tin oxide average particle size is 1.2 μm.
Above-mentioned indium oxide slurry is added in tin oxide slurry, in sand mill, 150min is sanded with 1500rpm revolving speed Afterwards, binder PEG 250g is added, continues that 100min is sanded with 1500rpm revolving speed, obtains ITO slurry.
Above-mentioned ITO slurry is spray-dried, inlet temperature is 200 DEG C, outlet temperature is 100 DEG C, after screening, obtains ITO Powder.
The characterization and test of 1.2 samples
(1) carry out x- ray powder diffraction test respectively to gained ito powder, it is as a result similar with Fig. 2, gained powder be with In2O3Crystal structure is the composite metal oxide powder of phase structure.
(2) mobility and apparent density are tested respectively to gained ito powder, the results show that the mobility of ito powder is 61.31s/50g, apparent density 1.69g/cm2
(3) Electronic Speculum test is scanned to gained ito powder, as a result as shown in Figure 7 and Figure 8, Fig. 7 is 3 gained of embodiment SEM figure of the ito powder under 100 multiplying powers, Fig. 8 are SEM figure of the 3 gained ito powder of embodiment under 500 multiplying powers.As can be seen that Gained ito powder particle dispersion is preferable, and granularity is smaller, and granularity is more uniform.And as seen from Figure 8, in gained powder Particle sphericity is preferable, and surface is relatively smooth.
Embodiment 4
It is carried out according to the preparation process of embodiment 1, unlike, when preparing indium oxide slurry, adjust the addition of dispersing agent Amount, makes the mass ratio 190: 1 of indium oxide and dispersing agent;When preparing tin oxide slurry, the additive amount of dispersing agent is adjusted, makes to aoxidize The mass ratio of tin and dispersing agent is 40: 1.
The test of x- ray powder diffraction is carried out to gained powder, the results show that gained sample is ito powder.
According to the mobility and apparent density of the test method test gained powder of embodiment 1, the results show that its mobility For 36.26s/50g, apparent density 1.55g/cm2
Embodiment 5
It is carried out according to the preparation process of embodiment 1, unlike, when preparing indium oxide slurry, adjust the addition of dispersing agent Amount, makes the mass ratio 220: 1 of indium oxide and dispersing agent;When preparing tin oxide slurry, the additive amount of dispersing agent is adjusted, makes to aoxidize The mass ratio of tin and dispersing agent is 60: 1.
The test of x- ray powder diffraction is carried out to gained powder, the results show that gained sample is ito powder.
According to the mobility and apparent density of the test method test gained powder of embodiment 1, the results show that its mobility For 40.56s/50g, apparent density 1.35g/cm2
Embodiment 6
It is carried out according to the preparation process of embodiment 1, unlike, when preparing indium oxide slurry, the proportion between each component is not Become, but dosage of each component increases simultaneously, makes the mass ratio 99: 1 of tin oxide in indium oxide and subsequent oxidation tin slurry.
The test of x- ray powder diffraction is carried out to gained powder, the results show that gained sample is ito powder.
According to the mobility and apparent density of the test method test gained powder of embodiment 1, the results show that its mobility For 60s/50g, apparent density 1.62g/cm2
Comparative example 1
It is carried out according to the preparation process of embodiment 4, unlike:
The additive amount of deionized water is adjusted, making indium oxide and the mass ratio of deionized water is respectively 5: 1;
It is respectively 50: 1 that the additive amount for adjusting binder, which is the mass ratio of indium oxide and binder,.
According to the test method in embodiment 1, the mobility and apparent density of 1 gained powder of test comparison example are distinguished, with Examples 1 to 5 compares, as a result referring to table 1.
The performance test results of 1 gained powder of 1 Examples 1 to 5 of table and comparative example
It can be seen from 1 test result of table compared with comparative example 1, the mobility of Examples 1 to 5 products obtained therefrom is obviously mentioned It rises, apparent density is substantially reduced.It proves, indium oxide: the mass ratio of water is in (1.5~6): 1, indium oxide: the mass ratio of binder In (20~60): when 1, being able to ascend the mobility of product, reduce its apparent density.
Comparative example 2
It is carried out according to the preparation process of embodiment 2, unlike:
The specific surface area for adjusting indium oxide raw material, adjusts to 30~35m2/g;
The sand milling condition (zirconia ball partial size is 1.2mm, and 600min is sanded under 600rpm revolving speed) of tin oxide slurry is adjusted, The average particle size of tin oxide in tin oxide slurry is sanded to 5 μm.
According to the test method in embodiment 1, the object phase of 2 gained powder of comparative example, and the mobility of test powders are detected And apparent density, it is compared with embodiment 2, as a result referring to table 2.
The performance test results of 2 comparative example of table, 2 gained powder
It can be seen from 2 test result of table compared with comparative example 2, the mobility of 2 products obtained therefrom of embodiment is obviously improved, Apparent density is substantially reduced.It proves, indium oxide specific surface area is controlled in 5~25m2/ g, and control the sand milling of tin oxide slurry When partial size to tin oxide average particle size is 0.1~2.5 μm, it is able to ascend the mobility of product, and keep low-apparent-density.
Comparative example 3
Feeding is carried out according to embodiment 3, unlike, preparation method is ground using direct mixing;It is specific as follows: will to own Material is placed in horizontal sand mill, is turned that 600min is sanded with 1500rpm, is obtained ITO slurry.Above-mentioned ITO slurry is spray-dried, Inlet temperature is 200 DEG C, outlet temperature is 80 DEG C, after screening, obtains powder.
Mobility and apparent density test are carried out to gained powder, it is found that apparent density and mobility value increase, respectively For 2.56g/cm2And 102.23s/50g.It proves, prepared by the specific mode that is gradually sanded according to the invention, could be acquired of fine quality Good ito powder.
The above description of the embodiment is only used to help understand the method for the present invention and its core ideas.To these embodiments A variety of modifications will be readily apparent to those skilled in the art, the general principles defined herein can be with Without departing from the spirit or scope of the present invention, it realizes in other embodiments.Therefore, the present invention will not be limited In the embodiments shown herein, and it is to fit to widest model consistent with the principles and novel features disclosed in this article It encloses.

Claims (10)

1. a kind of preparation method of ito powder, which comprises the following steps:
A) indium oxide, dispersing agent are mixed into sand milling with water, obtains indium oxide slurry;
B) tin oxide and dispersant are sanded, obtain tin oxide slurry;
C) the indium oxide slurry, tin oxide slurry are mixed into sand milling with binder, obtains ITO slurry;
D) the ITO slurry is spray-dried, obtains ito powder;
The step a) and step b) is limited without sequence.
2. preparation method according to claim 1, which is characterized in that in the step a), the specific surface area of indium oxide is 5 ~25m2/g;
The mass ratio of indium oxide and water is (1.5~6): 1.
3. preparation method according to claim 1, which is characterized in that in the step b), the specific surface area of tin oxide is 5 ~20m2/g。
4. preparation method according to claim 1, which is characterized in that the mass ratio of the indium oxide and binder is (20 ~60): 1;
The binder is the oligomeric species binder of dihydric alcohol.
5. preparation method according to claim 1, which is characterized in that in the step a), being averaged to indium oxide is sanded Granularity is 2.5 μm or less;
In the step b), being sanded to the average particle size of tin oxide is 0.1~2.5 μm.
6. preparation method according to claim 1 or 5, which is characterized in that in the step a):
Dispersing agent is selected from alcohols dispersing agent;
The mass ratio of indium oxide and dispersing agent is (120~250): 1.
7. preparation method according to claim 1 or 5, which is characterized in that in the step b):
Dispersing agent is selected from alcohols dispersing agent;
The mass ratio of tin oxide and dispersing agent is (20~60): 1.
8. preparation method according to claim 1 or 4, which is characterized in that the step c) includes:
C1 indium oxide slurry) is mixed into sand milling with tin oxide slurry, obtains intermediate pulp;
C2 the intermediate pulp) is mixed into sand milling with binder, obtains ITO slurry;
The step c1) in:
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 100~600min;
The step c2) in:
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 50~300min.
9. preparation method according to claim 1 or 5, which is characterized in that in the step a):
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 100~600min;
In the step b):
The zirconia ball partial size used in sand milling is 0.1~3.0mm;
The revolving speed of sand milling is 500~1500rpm, and the time is 50~300min.
10. preparation method according to claim 1, which is characterized in that the mass ratio of the indium oxide and tin oxide is (8 ~99.5): 1;
The inlet temperature of the spray drying is 150~250 DEG C, and outlet temperature is 50~150 DEG C;
The binder is polyethylene glycol;
The dispersing agent is polyvinyl alcohol.
CN201910717384.1A 2019-08-05 2019-08-05 A kind of preparation method of ito powder Pending CN110256049A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910717384.1A CN110256049A (en) 2019-08-05 2019-08-05 A kind of preparation method of ito powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910717384.1A CN110256049A (en) 2019-08-05 2019-08-05 A kind of preparation method of ito powder

Publications (1)

Publication Number Publication Date
CN110256049A true CN110256049A (en) 2019-09-20

Family

ID=67912779

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910717384.1A Pending CN110256049A (en) 2019-08-05 2019-08-05 A kind of preparation method of ito powder

Country Status (1)

Country Link
CN (1) CN110256049A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111138202A (en) * 2020-01-16 2020-05-12 洛阳晶联光电材料有限责任公司 Method for preparing ITO (indium tin oxide) granulation powder by mixing method
CN113800900A (en) * 2021-08-17 2021-12-17 芜湖映日科技股份有限公司 Method for processing high-density ITO target material powder
CN114163217A (en) * 2021-12-15 2022-03-11 先导薄膜材料(广东)有限公司 Indium oxide tantalum yttrium powder and preparation method thereof
CN114591070A (en) * 2022-01-11 2022-06-07 先导薄膜材料有限公司 Preparation method of high-purity Mo-doped ITO target material
CN114804855A (en) * 2022-04-29 2022-07-29 先导薄膜材料有限公司 Low-sodium ITO powder and preparation method thereof
CN116216770A (en) * 2022-12-15 2023-06-06 先导薄膜材料(广东)有限公司 Blue IZO powder and preparation method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062108A (en) * 1992-06-18 1994-01-11 Dowa Mining Co Ltd Pulverizing and dispersing media and production of high purity ito starting material
US20030178751A1 (en) * 2002-03-22 2003-09-25 Song Kyong-Hwa Tin oxide powder, method for preparing the same, and method for manufacturing high-density indium tin oxide target
CN101575203A (en) * 2009-06-19 2009-11-11 西北稀有金属材料研究院 Preparation method of ITO sputtering target material
CN106082993A (en) * 2016-06-08 2016-11-09 中国船舶重工集团公司第七二五研究所 A kind of method preparing high-performance ITO pelletizing
CN106830925A (en) * 2016-12-20 2017-06-13 西北稀有金属材料研究院 The method that sieving improves ito powder apparent density and tap density is crushed by biscuit
CN108623298A (en) * 2018-07-04 2018-10-09 郑州大学 A kind of degreasing sintered integral preparation method of high density tin indium oxide tubular target

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062108A (en) * 1992-06-18 1994-01-11 Dowa Mining Co Ltd Pulverizing and dispersing media and production of high purity ito starting material
US20030178751A1 (en) * 2002-03-22 2003-09-25 Song Kyong-Hwa Tin oxide powder, method for preparing the same, and method for manufacturing high-density indium tin oxide target
CN101575203A (en) * 2009-06-19 2009-11-11 西北稀有金属材料研究院 Preparation method of ITO sputtering target material
CN106082993A (en) * 2016-06-08 2016-11-09 中国船舶重工集团公司第七二五研究所 A kind of method preparing high-performance ITO pelletizing
CN106830925A (en) * 2016-12-20 2017-06-13 西北稀有金属材料研究院 The method that sieving improves ito powder apparent density and tap density is crushed by biscuit
CN108623298A (en) * 2018-07-04 2018-10-09 郑州大学 A kind of degreasing sintered integral preparation method of high density tin indium oxide tubular target

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
彭平等: "纳米ITO粉末的离心喷雾造粒工艺", 《粉末冶金材料科学与工程》 *
戴遐明: "《超微陶瓷粉体实用化处理技术》", 30 September 2009, 国防工业出版社 *
李建颖等: "《食品添加剂速查手册》", 30 November 2017, 南开大学出版社 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111138202A (en) * 2020-01-16 2020-05-12 洛阳晶联光电材料有限责任公司 Method for preparing ITO (indium tin oxide) granulation powder by mixing method
CN113800900A (en) * 2021-08-17 2021-12-17 芜湖映日科技股份有限公司 Method for processing high-density ITO target material powder
CN114163217A (en) * 2021-12-15 2022-03-11 先导薄膜材料(广东)有限公司 Indium oxide tantalum yttrium powder and preparation method thereof
CN114591070A (en) * 2022-01-11 2022-06-07 先导薄膜材料有限公司 Preparation method of high-purity Mo-doped ITO target material
CN114804855A (en) * 2022-04-29 2022-07-29 先导薄膜材料有限公司 Low-sodium ITO powder and preparation method thereof
CN116216770A (en) * 2022-12-15 2023-06-06 先导薄膜材料(广东)有限公司 Blue IZO powder and preparation method thereof

Similar Documents

Publication Publication Date Title
CN110256049A (en) A kind of preparation method of ito powder
CN106082993A (en) A kind of method preparing high-performance ITO pelletizing
CN108640677B (en) Preparation method of nano composite zirconia powder with controllable grain size
CN1841588B (en) Method for manufacturing dielectric ceramic powder, and multilayer ceramic capacitor
TWI401211B (en) Indium oxide powder and method for producing same
CN108779381A (en) The manufacturing method of near-infrared shielding ultramicron dispersion, sunshine shielding intermediate coat, infrared shield sandwich structural body and near-infrared shielding ultramicron dispersion
CN111533553A (en) Nanocrystalline barium titanate ceramic and preparation method thereof
CN108751247B (en) Preparation method of nano yttrium oxide with stable BET
CN104576043B (en) Electrode size
CN112939576A (en) IGZO powder, target material and preparation method thereof
CN102974833B (en) Method for preparing flake silver powder
JP7062900B2 (en) Zirconia powder and its manufacturing method
CN106928753A (en) A kind of preparation method for PVC automobile chassis stone-impact-proof paint modified calcium carbonates
CN110451962B (en) Submillimeter-level zirconia ceramic ball and preparation method thereof
CN111924889A (en) Preparation method of cobaltosic oxide for sintering-free agglomerated cobalt powder
CN105924168A (en) Preparation method of TiO2-doped ZnNb2O6 ceramic target material
CN113104877A (en) Preparation method and application of superfine dolomite
CN105503183B (en) Preparation method of zirconia ceramic cutter based on gel casting process
CN110885637A (en) Preparation method of rare earth fluoride polishing powder and rare earth fluoride polishing solution
CN103570347B (en) Method for tetragonal phase conversion of nano barium titanate
CN109369173B (en) Preparation method of tetragonal phase barium titanate powder and product
CN115196970A (en) Preparation method of high-fluidity AlON spherical powder
CN105314674B (en) Preparation method of ultrasmall nanometer titanium dioxide hybrid material
CN114436305A (en) Method for controlling thickness of plate-shaped boehmite
CN109850938A (en) The preparation method of the spherical nanocrystal of strontium titanates

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20190920