CN110247576A - A kind of synchronous electrostatic motor - Google Patents

A kind of synchronous electrostatic motor Download PDF

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Publication number
CN110247576A
CN110247576A CN201910332659.XA CN201910332659A CN110247576A CN 110247576 A CN110247576 A CN 110247576A CN 201910332659 A CN201910332659 A CN 201910332659A CN 110247576 A CN110247576 A CN 110247576A
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China
Prior art keywords
electrode
phase
induction electrode
rotor
driving electrodes
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CN201910332659.XA
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CN110247576B (en
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徐园平
周瑾
金超武
张思远
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors

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  • Micromachines (AREA)

Abstract

The invention discloses a kind of synchronous electrostatic motor, stator and rotor are disk shape, and stator and rotor face are placed;Driving electrodes are placed in stator surface periphery, driving electrodes piece is divided into three-phase, the identical mutual connection of phase electrode slice;Induction electrode A is placed on the stator surface among driving electrodes, induction electrode A includes 3 electrode slices, each electrode slice represents a phase;Induction electrode C is placed in rotor surface periphery, induction electrode C and driving electrodes are consistent on the geomery of electrode slice, quantity and relative position, and the electrode slice of induction electrode C is divided into three-phase, the identical mutual connection of phase electrode slice;Induction electrode B is placed on the rotor surface among induction electrode C, each phase of induction electrode C is connected with each of induction electrode B, induction electrode B and induction electrode A is consistent on the geomery of electrode slice, quantity and relative position, each electrode slice represents a phase.The shortcomings that the present invention overcomes existing asynchronous, synchronous electrostatic motors.

Description

A kind of synchronous electrostatic motor
Technical field
The invention belongs to motor fields.
Background technique
MEMS (Micro-electro-mechanical system, MEMS) collects micromechanics and microelectronics function In one, it is widely used in the new high-tech industries such as microelectronics, aerospace, sensor, actuator, is a section, n-th-trem relation n country Skill development, the key technology of prosperous economy with national defense safety.With the sustainable development of MEMS technology, micromotor has become The core equipment of energy conversion, function-driven, accurate control in MEMS system, in Micro-Robot, microsatellite, biologic medical etc. Key area bears the dual function of precision actuation and control.
There are two types of the operation logics of electrostatic motor: one is electronic using the asynchronous electrostatic induction of dielectric relaxation principle Machine, another kind are to utilize the synchronous electrostatic motor of variable capacitance principle.Asynchronous electrostatic induction motor is established by dielectric relaxation Distribution of charges on rotor, rather than the salient-pole structure of rotor is leaned on, then the rotor of induction conductivity can be smooth even. But asynchronous electrostatic drive is only equipped with electrode film in stator unilateral side, and driving moment is only the 1/ of synchronous double sided electrode electrostatic drive 4, cause its limit speed relatively low;And the electrical property of directric relaxation effect material is very quick to environmental factor (temperature, humidity etc.) Sense, causes performance inconsistency.Bigger torque and stability can be obtained using the synchronous electrostatic motor of variable capacitance principle, still Rotor surface need to use salient-pole structure, cause to process the processing step that such structure needs complexity.
Summary of the invention
In order to solve the technical issues of above-mentioned background technique is mentioned, the invention proposes a kind of synchronous electrostatic motors.
In order to achieve the above technical purposes, the technical solution of the present invention is as follows:
A kind of synchronous electrostatic motor, including stator and rotor, stator and rotor are disk shape, and stator and rotor are just To placement;Driving electrodes are placed in the stator surface periphery close to rotor side, which includes 3n driving electrodes piece, N is positive integer, and the shape of each driving electrodes piece is sector, and all driving electrodes pieces are divided into three-phase, identical phase driving electrodes The mutual connection of piece, the mutual not connection of different phase driving electrodes pieces;Induction electrode A is placed on the stator surface among driving electrodes, Induction electrode A includes 3 electrode slices, is successively distributed in a ring, each electrode slice represents a phase;In turning close to stator side Sub- surface periphery places induction electrode C, and induction electrode C and driving electrodes are in the geomery of electrode slice, quantity and relative position On be consistent, the electrode slice of all induction electrode C is divided into three-phase, the identical mutual connection of phase electrode slice, not in-phase electrodes The mutual not connection of piece;Induction electrode B, induction electrode B and induction electrode A are placed on the rotor surface among induction electrode C in electricity It being consistent on the geomery of pole piece, quantity and relative position, each of induction electrode B electrode slice represents a phase, Three-phase altogether;Each phase of induction electrode C is connected with each of induction electrode B;Respectively into the three-phase electricity pole piece of induction electrode A It is passed through three-phase high-voltage, the amplitude of the three-phase high-voltage is identical with frequency, and phase successively differs 120 °;To the three-phase of driving motor Three-phase high-voltage is each led into electrode slice, the amplitude of the three-phase high-voltage is identical with frequency, and phase successively differs 120 °.
Preferred embodiment based on the above-mentioned technical proposal, driving electrodes, induction electrode A, induction electrode B and induction electrode C are equal It is prepared using FPC technique.
Preferred embodiment based on the above-mentioned technical proposal is preparing driving electrodes, induction electrode A, induced electricity using FPC technique During pole B and induction electrode C, the surface of all electrode slices not covering protection film, so that covering copper in naked on electrode slice Dewiness state.
Preferred embodiment based on the above-mentioned technical proposal, rotor are located on stator, and there are between small between rotor and stator Gap.
Preferred embodiment based on the above-mentioned technical proposal, stator are made of permanent magnet, and rotor is made of pyrolytic graphite.
By adopting the above technical scheme bring the utility model has the advantages that
(1) present invention solves existing synchronous electrostatic motor rotor surface and need to cause to process needs using salient-pole structure The shortcomings that processing step of complexity, rotor of the present invention are not necessarily to salient-pole structure, circular configuration;
(2) present invention, which solves existing asynchronous electrostatic drive driving moment deficiency, causes limit speed relatively low;And dielectric is relaxed The shortcomings that electrical property of Henan effect material is very sensitive to environmental factor (temperature, humidity etc.), causes performance inconsistency;
(3) present invention is avoided current loss fever, is reduced motor using the synchronous electrostatic drive principle of voltage induced formula Power consumption;
(4) present invention is using the synchronous electrostatic drive principle of voltage induced formula, so that motor size reduces, convenient for micromation.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention;
Fig. 2 is diagrammatic cross-section of the invention.
Specific embodiment
Below with reference to attached drawing, technical solution of the present invention is described in detail.
As shown in Figure 1, the synchronization electrostatic motor that the present invention designs, is made of motor stator, rotor two parts. Motor stator, rotor are disk shape.
Stator and rotor face are placed, and in the present embodiment, rotor is placed on stator.Have between stator and rotor small Gap.
In motor stator upper face periphery, driving electrodes are placed.Each driving electrodes piece is fan-shaped, and driving electrodes piece The multiple that total quantity is 3, is divided into 3 phases.The electrode slice of identical phase is not joined mutually by the mutual connection of conducting wire, out of phase electrode slice It is logical.
In motor stator top intermediate surface, induction electrode A is placed.Induction electrode A includes 3 electrode slices, is divided in a ring Cloth, each is a phase, totally 3 phase.
In rotor lower surface periphery, it is placed with induction electrode C.Each electrode slice and driving electrodes in induction electrode C Piece is consistent on size, quantity, relative position.The electrode slice of induction electrode C is also classified into 3 phases.The electrode slice of identical phase By the mutual connection of conducting wire, the mutual not connection of out of phase electrode slice.
Among rotor lower surface, it is placed with induction electrode B.There are three electrode slices by induction electrode B, divide in a ring Cloth.The electrode slice of induction electrode B and the electrode slice of induction electrode A are consistent on size, quantity, relative position.It is each A is a phase, totally 3 phase.
As shown in Fig. 2, each phase of induction electrode C and each phase of induction electrode B are connected.Induction electrode C and driving electricity Pole-face face is corresponding;Induction electrode B is corresponding with the face induction machine A face.
Preferably, driving electrodes, induction electrode A, induction electrode B, induction electrode C are all made of FPC (Flexible Printed Circuit, flexible circuit board) technique preparation.Utilizing FPC technique preparation driving electrodes, induction electrode A, induction During electrode B, induction electrode C, the surface of all electrode slices not covering protection film, so that covering copper in exposed on electrode slice State.
Preferably, motor stator is made of permanent magnet, and rotor is made of pyrolytic graphite.
3 phase sine high-voltage electricity V4, V5, V6 are passed through in the 3 phase electrode slices of induction electrode A.High-voltage electricity V4, V5, V6 amplitude is equal Using 700V, phase successively falls behind 120 degree.
3 phase sine high-voltage electricity V1, V2, V3 are passed through in 3 phase electrode slices of driving electrodes.High-voltage electricity V1, V2, V3 amplitude is adopted With 700V, frequency is identical, but phase successively falls behind 120 degree.
Due to being passed through 3 phase sine high-voltage electricity on induction electrode A, so induction electrode B is each under electrostatic effect effect Phase electrode slice surface also produces 3 phases induction electrostatic.Since each phase of induction electrode C and each phase of induction electrode B are connected, So induction electrode C each phase electrode slice surface also produces 3 phases induction electrostatic.Due to the drive arranged in opposite directions with induction electrode C 3 phase high-voltage electricity are passed through in 3 phase electrode slices of moving electrode, so electrostatic force is generated between driving electrodes and induction electrode C, into And pushing motor rotor rotates.
Embodiment is merely illustrative of the invention's technical idea, and this does not limit the scope of protection of the present invention, it is all according to Technical idea proposed by the present invention, any changes made on the basis of the technical scheme are fallen within the scope of the present invention.

Claims (5)

1. a kind of synchronous electrostatic motor, including stator and rotor, it is characterised in that: stator and rotor are disk shape, fixed Son is placed with rotor face;Driving electrodes are placed in the stator surface periphery close to rotor side, which includes 3n Driving electrodes piece, n are positive integer, and the shape of each driving electrodes piece is sector, and all driving electrodes pieces are divided into three-phase, identical The mutual connection of phase driving electrodes piece, the mutual not connection of different phase driving electrodes pieces;It is placed on the stator surface among driving electrodes Induction electrode A, induction electrode A include 3 electrode slices, are successively distributed in a ring, each electrode slice represents a phase;Close to fixed Induction electrode C is placed in the rotor surface periphery of sub- side, geomery in electrode slice of induction electrode C and driving electrodes, quantity Be consistent on relative position, the electrode slice of all induction electrode C is divided into three-phase, the identical mutual connection of phase electrode slice, The mutual not connection of different phase electrode slices;Induction electrode B, induction electrode B and induction are placed on the rotor surface among induction electrode C Electrode A is consistent on the geomery of electrode slice, quantity and relative position, each of induction electrode B electrode slice A phase is represented, altogether three-phase;Each phase of induction electrode C is connected with each of induction electrode B;To the three-phase electricity of induction electrode A Three-phase high-voltage is each led into pole piece, the amplitude of the three-phase high-voltage is identical with frequency, and phase successively differs 120 °;To driving Three-phase high-voltage is each led into the three-phase electricity pole piece of motor, the amplitude of the three-phase high-voltage is identical with frequency, phase successively phase Poor 120 °.
2. synchronizing electrostatic motor according to claim 1, it is characterised in that: driving electrodes, induction electrode A, induction electrode B The preparation of FPC technique is all made of with induction electrode C.
3. synchronizing electrostatic motor according to claim 2, it is characterised in that: utilizing FPC technique preparation driving electrodes, sense During answering electrode A, induction electrode B and induction electrode C, the surface of all electrode slices not covering protection film, so that electrode On piece covers copper in naked state.
4. synchronizing electrostatic motor according to claim 1, it is characterised in that: rotor is located on stator, rotor and stator Between there are minim gaps.
5. synchronizing electrostatic motor according to claim 1, it is characterised in that: stator is made of permanent magnet, and rotor uses Pyrolytic graphite production.
CN201910332659.XA 2019-04-24 2019-04-24 Synchronous electrostatic motor Active CN110247576B (en)

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Application Number Priority Date Filing Date Title
CN201910332659.XA CN110247576B (en) 2019-04-24 2019-04-24 Synchronous electrostatic motor

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Application Number Priority Date Filing Date Title
CN201910332659.XA CN110247576B (en) 2019-04-24 2019-04-24 Synchronous electrostatic motor

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CN110247576A true CN110247576A (en) 2019-09-17
CN110247576B CN110247576B (en) 2020-07-07

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1829064A (en) * 2006-04-07 2006-09-06 清华大学 Variable capacitance micro electrostatic motor adopting five freedom degree static suspension
FR2887705A1 (en) * 2005-06-27 2006-12-29 Commissariat Energie Atomique Liquid droplets displacing device for use in e.g. fluid pumping device, has substrate with hydrophobic surface and electrodes situated under hydrophobic surface in fixed manner for displacing liquid droplet by electrowetting
US20170366103A1 (en) * 2016-06-20 2017-12-21 Faez Ba-Tis One-directional piston-tube electrostatic microactuator
CN109343293A (en) * 2018-08-27 2019-02-15 中国科学院苏州纳米技术与纳米仿生研究所 Electrostatic drive and Optical devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2887705A1 (en) * 2005-06-27 2006-12-29 Commissariat Energie Atomique Liquid droplets displacing device for use in e.g. fluid pumping device, has substrate with hydrophobic surface and electrodes situated under hydrophobic surface in fixed manner for displacing liquid droplet by electrowetting
CN1829064A (en) * 2006-04-07 2006-09-06 清华大学 Variable capacitance micro electrostatic motor adopting five freedom degree static suspension
US20170366103A1 (en) * 2016-06-20 2017-12-21 Faez Ba-Tis One-directional piston-tube electrostatic microactuator
CN109343293A (en) * 2018-08-27 2019-02-15 中国科学院苏州纳米技术与纳米仿生研究所 Electrostatic drive and Optical devices

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘晓伟,何广平: "可变电容静电型超微电机的优化设计", 《微特电机》 *

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