CN110245317B - Extraction method and device for magnetorheological polishing removal function - Google Patents

Extraction method and device for magnetorheological polishing removal function Download PDF

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CN110245317B
CN110245317B CN201910407648.3A CN201910407648A CN110245317B CN 110245317 B CN110245317 B CN 110245317B CN 201910407648 A CN201910407648 A CN 201910407648A CN 110245317 B CN110245317 B CN 110245317B
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removal function
data
spot
surface shape
shape detection
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CN110245317A (en
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唐才学
温圣林
张远航
颜浩
嵇保建
王翔峰
邓燕
石琦凯
张清华
李昂
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Laser Fusion Research Center China Academy of Engineering Physics
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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Abstract

The invention discloses a method and a device for extracting a magnetorheological polishing removal function, wherein the method comprises the following steps: acquiring surface shape detection data of a substrate element before and after spot collection; the substrate element has position marks at its edges; calculating residual data according to the surface shape detection data before and after spot collection and the position marks of the substrate elements; performing median filtering processing on the residual data; removing the function contour of the filtered residual data by adopting elliptical arc approximation to generate a plurality of removing functions with the same parameters; and executing data migration and averaging operation on the plurality of removing functions containing the same parameters, and extracting the removing functions. The method can accurately extract the magnetorheological polishing removal function, and improve the accuracy of the removal function and the magnetorheological processing precision.

Description

Extraction method and device for magnetorheological polishing removal function
Technical Field
The invention relates to the field of optical processing, in particular to a method and a device for extracting a magnetorheological polishing removal function.
Background
The magnetorheological polishing technology is a novel optical surface precision processing technology, and has the advantages of no subsurface defect, easy realization of numerical control precision control, high processing precision, high polishing efficiency and the like. The magnetorheological polishing technology is widely applied to polishing of large-caliber planar optical elements, forming of Continuous Phase Plates (CPP) and fine polishing of aspheric optical elements, and has important significance for processing of high-precision optical elements.
The accuracy of the magnetorheological removal function is a key factor for realizing the high-certainty machining of the magnetorheological fluid, and the machining precision of the optical element is directly determined. The traditional method for extracting the magneto-rheological removal function directly adopts a rectangular mask for framing, and extracts data inside the mask as effective data of the removal function, but because the magneto-rheological removal function is an asymmetric D-shaped structure, the rectangular mask cannot well approach the shape outline of the actual removal function, so that unreal data is introduced into the removal function, and distortion of the removal function is caused; meanwhile, errors are introduced due to the fluctuation of the magneto-rheological ribbon in the magneto-rheological speckle collecting process and the factors such as burrs and noise possibly generated in the interference detection process, so that the accuracy of function extraction removal is reduced, and the precision of magneto-rheological processing is further reduced.
Therefore, how to accurately extract effective data of the magnetorheological polishing removal function and improve the precision of magnetorheological processing is a problem to be solved urgently by practitioners of the same industry.
Disclosure of Invention
In view of the above problems, the present invention aims to solve the problem that the conventional method is difficult to accurately extract effective data of a magnetorheological polishing removal function, thereby reducing the precision of magnetorheological processing.
In a first aspect, an embodiment of the present invention provides a method for extracting a magnetorheological polishing removal function, including:
acquiring surface shape detection data of a substrate element before and after spot collection; the substrate element has position marks at its edges;
calculating residual data according to the surface shape detection data before and after spot collection and the position marks of the substrate elements;
performing median filtering processing on the residual data;
removing the function contour of the filtered residual data by adopting elliptical arc approximation to generate a plurality of removing functions with the same parameters;
and executing data migration and averaging operation on the plurality of removing functions containing the same parameters, and extracting the removing functions.
In one embodiment, the calculating residual data according to the surface shape detection data before and after spot collection and the position mark of the substrate element includes:
respectively performing data rotation operation on the surface shape detection data before and after spot collection; the data rotation operation includes: taking the geometric center of the surface shape detection data as a rotation center O, and taking the rotation angle as an included angle alpha between a position mark on the speckle collecting substrate element and the Y axis; rotating the position mark point A of the surface-shaped edge to a point B right above the Y axis;
and according to the position mark, when the positions of the surface shape detection data before and after the spot collection correspond to each other, subtracting the surface shape detection data before the spot collection from the surface shape detection data after the spot collection, and calculating to obtain residual data.
In one embodiment, for residual data after filtering, an elliptic arc approximation is used to remove a function contour, and a plurality of removal functions having the same parameters are generated, including:
rotating the residual error data after filtering processing to ensure that the small end of the removal function is positioned right below;
and (3) adopting MRFSpot mask to approximate the contour edge of each removal function, and generating a plurality of removal functions containing the same parameters.
In one embodiment, the MRFSpot mask includes: the cross line is positioned at the central position and used for positioning the central position of the removal function; the elliptical arc is positioned at the lower part and used for controlling the shape of the outline of the small end of the removal function; the elliptical arc is positioned above and used for controlling the shape of the contour of the large end of the removal function;
the mathematical expression is as follows:
Figure GDA0003486385360000031
Figure GDA0003486385360000032
in the above formula x0、y0Denotes a reticle center coordinate, x denotes a horizontal direction coordinate, y denotes a vertical direction coordinate, a denotes a width coefficient, b denotes a height coefficient, and c denotes a curvature coefficient.
In one embodiment, the data migration and averaging operation is performed on the plurality of removal functions having the same parameter, and the extraction of the removal function includes:
calculating and extracting the maximum value in the plurality of removal functions containing the same parameters, wherein the calculation formula is as follows:
Figure GDA0003486385360000033
in the above formula, spotiRepresenting a removal function, wherein i is 1-N, and N is the number of the collected spots during the spot collecting operation; v. ofiRepresents a maximum value, i is 1 to N; the spot represents the extraction of the final removal function.
In a second aspect, the present invention further provides an extraction apparatus for a magnetorheological polishing removal function, comprising:
the acquisition module is used for acquiring surface shape detection data of the substrate element before and after spot collection; the substrate element has position marks at its edges;
the calculation module is used for calculating residual data according to the surface shape detection data before and after spot collection and the position marks of the substrate elements;
the filtering module is used for carrying out median filtering processing on the residual error data;
the generating module is used for removing the function outline by adopting elliptical arc approximation to the residual data after filtering processing to generate a plurality of removing functions containing the same parameters;
and the extraction module is used for executing data migration and averaging operation on the plurality of removal functions containing the same parameters to extract the removal functions.
In one embodiment, the calculation module includes:
the rotation submodule is used for respectively carrying out data rotation operation on the surface shape detection data before and after the spot collection; the data rotation operation includes: taking the geometric center of the surface shape detection data as a rotation center O, and taking the rotation angle as an included angle alpha between a position mark on the speckle collecting substrate element and the Y axis; rotating the position mark point A of the surface-shaped edge to a point B right above the Y axis;
and the calculating submodule is used for subtracting the surface shape detection data before the spot collection from the surface shape detection data after the spot collection according to the position mark when the positions of the surface shape detection data before the spot collection and the surface shape detection data after the spot collection correspond to each other, and calculating to obtain residual data.
In one embodiment, the generating module includes:
the determining submodule is used for rotating the residual error data after filtering processing and ensuring that the small end of the removing function is positioned right below;
and the generation submodule is used for approximating the outline edge of each removal function by adopting an MRFSpot mask to generate a plurality of removal functions containing the same parameters.
In an embodiment, the generating the MRFSpot mask in the sub-module specifically includes:
the cross line is positioned at the central position and used for positioning the central position of the removal function; the elliptical arc is positioned at the lower part and used for controlling the shape of the outline of the small end of the removal function; the elliptical arc is positioned above and used for controlling the shape of the contour of the large end of the removal function;
the mathematical expression is as follows:
Figure GDA0003486385360000041
Figure GDA0003486385360000042
in the above formula x0、y0Denotes a reticle center coordinate, x denotes a horizontal direction coordinate, y denotes a vertical direction coordinate, a denotes a width coefficient, b denotes a height coefficient, and c denotes a curvature coefficient.
In an embodiment, the extracting module is specifically configured to calculate and extract a maximum value of the plurality of removing functions having the same parameter, where the calculation formula is:
Figure GDA0003486385360000043
in the above formula, spotiRepresenting a removal function, wherein i is 1-N, and N is the number of the collected spots during the spot collecting operation; v. ofiRepresents a maximum value, i is 1 to N; the spot represents the extraction of the final removal function.
The technical scheme provided by the embodiment of the invention has the beneficial effects that at least:
the method for extracting the magnetorheological polishing removal function is suitable for removing the function in the magnetorheological processing process, eliminates noise points and burr points possibly introduced in interference detection by adopting a median filtering method, and improves the accuracy of removing the surface shape data of the function; the method can obtain a relatively accurate magneto-rheological removal function, is simple and accurate to operate, is easy to realize, can effectively extract the magneto-rheological removal function, improves the magneto-rheological processing precision, and is a magneto-rheological removal function extraction method which is worthy of popularization.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a flow chart of a method for extracting a magnetorheological polishing removal function according to an embodiment of the present invention;
FIG. 2 is a flowchart of step S104 according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a positioning label pasted with a triangle shape in a substrate for collecting spots according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a surface data rotation according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of an MRFSpot mask structure provided in the embodiment of the present invention;
FIG. 6 is a flow chart of the extraction of a magnetorheological removal function provided in example 1;
fig. 7 is a schematic diagram of the initial profile start, PV ═ 0.486 λ of the spotted substrate in example 1;
FIG. 8 is a schematic representation of the substrate of example 1 showing the end, PV, 0.440 λ after spot application;
FIG. 9 is a schematic representation of the substrate speckle residual error profile sub, PV 0.396 λ of example 1;
FIG. 10 is a schematic diagram of the MRFSpot mask approximation removal function contour in example 1;
FIG. 11 is the left side removal function spot in the sub data of example 11A schematic diagram of (a);
FIG. 12 is the right side removal function spot in the sub data of example 12A schematic diagram of (a);
FIG. 13 is the removal function spot of example 11、spot2A schematic diagram of the final removal function spot after averaging;
FIG. 14 is a block diagram of an extraction apparatus for a magnetorheological finishing removal function according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Referring to fig. 1, an embodiment of the present invention provides a method for extracting a magnetorheological polishing removal function, where the method includes: s101 to S105;
s101, acquiring surface shape detection data of a substrate element before and after spot collection; the substrate element has position marks at its edges;
s102, calculating to obtain residual error data according to the surface shape detection data before and after spot collection and the position marks of the substrate elements;
s103, performing median filtering processing on the residual error data; burrs and noise points which are possibly introduced during detection can be effectively removed, and a filtering template with the size of 3 multiplied by 3 is selected during median filtering;
s104, removing the function contour of the filtered residual data by adopting elliptical arc approximation to generate a plurality of removing functions with the same parameters;
and S105, executing data migration and averaging operation on the plurality of removing functions containing the same parameters, and extracting the removing functions.
In the embodiment, the median filtering method is adopted to eliminate noise points and burr points which are possibly introduced in interference detection, improve the accuracy of the surface shape data of the function, reduce errors in the process of extracting the magnetorheological removal function and facilitate the effective extraction of the magnetorheological polishing removal function. The method in the embodiment is simple, convenient and accurate to operate, is easy to implement, is an effective magnetorheological removal function extraction method, can improve the magnetorheological processing precision, and is a magnetorheological removal function extraction method which is worthy of popularization.
In step S101, acquiring surface shape detection data of the substrate element before and after the spot collection includes:
such as: selecting a spot-collecting substrate element, wherein the interference detection surface shape is required to be as flat as possible, PV is less than or equal to 1.0 lambda (lambda is 632.8nm), PV (Peak to valley) represents the difference value of a peak value and a valley value, and PV represents the difference value of a maximum value and a minimum value in surface shape data in optical processing; wiping the surface of the element, making position marks, for example, cutting the label paper into a triangle with a side length of about 5mm with scissors, and attaching the triangle to the edge of the substrate element, wherein one vertex of the triangle points to the center of the substrate element for position marks, as shown in fig. 3; the embodiment of the invention does not limit the shape of the position mark; the spot collection is as follows: the process of removing the functional form on the magnetorheological machine tool is called spot collection.
Measuring the surface shape of a substrate element by adopting an interferometer, storing detection data and naming the detection data as start;
setting spot collecting technological parameters such as magnetorheological fluid flow, polishing wheel rotating speed, ribbon thickness and the like of a magnetorheological machine tool, placing an element on a worktable of the magnetorheological machine tool, fixing the element on the surface of the worktable in a vacuum adsorption mode, setting spot collecting parameters after alignment and leveling operations, wherein the number of spot collecting functions of the same parameter is 2-4, the retention time is 2-5 seconds, the specific numerical value is selected according to the hardness of the element material, if the material is softer, the number of spot collecting functions is increased, the retention time is reduced, otherwise, the effect is that the spot collecting error is reduced and the depth of the spot removing function can meet the detection condition of an interferometer; then, running a spot collecting numerical control program of the magnetorheological machine tool to carry out spot collecting operation; wherein the same parameters, for example, include: immersion depth, residence time, etc.
And wiping the surface of the element after spot collection, measuring the surface shape of the substrate element by using an interferometer, and storing detection data, namely end.
In an embodiment, the step S102 of calculating residual data according to the surface shape detection data before and after the spot sampling and the position mark of the substrate element includes:
s1021, performing data rotation operation on the surface shape detection data before and after spot collection, namely the start data and the end data respectively; the data rotation operation includes: taking the geometric center of the surface shape data as a rotation center O, and taking the rotation angle as an included angle alpha between a position mark on the speckle collecting substrate element and the Y axis; rotating the position mark point A of the surface-shaped edge to a point B right above the Y axis; as shown in fig. 4;
the formula used for data rotation is:
x＝(x′-rx)·cos(α)-(y′-ry)·sin(α)+rx
y＝(x′-rx)·sin(α)+(y′-ry)·cos(α)+ry
in the formula, x and y represent coordinates of a point A, x 'and y' represent coordinates of a point B, and rx and ry represent coordinates of a point O in a surface-shaped data center; the data rotation is used for ensuring the surface shape positions before and after the spot collection to correspond;
and S1022, according to the position marks, when the positions of the surface shape detection data before and after spot collection correspond to each other, subtracting the surface shape data before spot collection from the surface shape detection data after spot collection, namely subtracting the start data from the end data, and calculating to obtain residual error data sub.
In one embodiment, referring to fig. 2, in the step S104, the removing function contour by using elliptic arc approximation to the filtered residual data generates a plurality of removing functions having the same parameters, including:
s1041, rotating the residual error data after filtering processing to ensure that the small end of the removal function is right below;
s1042, adopting MRFSpot mask to approximate the outline edge of each removal function, and generating a plurality of removal functions containing the same parameters.
In the embodiment, the method for removing the actual contour of the function by adopting the elliptic arc approximation fully matches the actual shape of the magnetorheological actual removal function, and overcomes the defect that the data of the effective region of the removal function cannot be accurately extracted due to the large difference between the traditional rectangular mask form and the form of the removal function.
In step S1042, the MRFSpot mask is a mask specially designed for the form of the magnetorheological removal function, and is composed of three parts, namely, a cross line at a center position for positioning the center position of the removal function, an elliptical arc at a lower part for controlling the form of removing the contour of the small end of the function, and an elliptical arc at an upper part for controlling the form of removing the contour of the large end of the function, where a mathematical expression of the MRFSpot mask is:
Figure GDA0003486385360000091
Figure GDA0003486385360000092
in the above formula x0、y0Denotes a reticle center coordinate, x denotes an x-direction (horizontal direction) coordinate, y denotes a y-direction (vertical direction) coordinate, a denotes a width coefficient, b denotes a height coefficient, and c denotes a curvature coefficient.
The width of the mask can be controlled by adjusting the coefficient a, the height of the mask can be controlled by adjusting the coefficient variable b, and the upper region of the removal function can be controlled by adjusting the coefficient c, as shown in fig. 5.
Fully approximating the actual removal function outline region by adjusting MRFSpot mask coefficients a, b and c, then extracting data in the MRFSpot mask to obtain a removal function, and naming the spot1Extracting the removing function with the same parameters by the same method, and naming the removing function as spoti(i is 2 to N), and N is the number of spot-picking operation.
In one embodiment, the extracted removal function spot is calculatediMaximum value v of (i-1 to N)i(i is 1 to N), then performing data migration and averaging on the maximum value of the removal function to obtain a final removal function, which is named as spot, and the calculation formula is as follows:
Figure GDA0003486385360000093
in the implementation, a multi-spot averaging method is adopted, the fluctuation of the form and the depth of a removal function caused by errors such as the fluctuation of the flow of the magnetorheological fluid in the spot collecting process of the magnetorheological machine tool is inhibited, the conformity between the theory and the practice of the magnetorheological removal function is improved, and the accurate extraction of the magnetorheological removal function is facilitated.
The method of extracting the magnetorheological polishing removal function is described below in a complete example.
Example 1:
for example, the spot-picking operation of the embodiment is performed on a domestic magnetorheological machine tool, and the spot-picking substrate is a fused quartz circular substrate with the caliber of 50mm and the thickness of 5 mm.
Specifically, as shown in fig. 6, the extraction of the magnetorheological removal function is performed by the following method steps.
1. Selecting a spot-picking substrate element, wherein the surface shape of the substrate is required to be flat, selecting a fused quartz substrate with PV (potential of Hydrogen) of 0.5 lambda for spot-picking, firstly wiping the surface of the element clean, cutting the label paper into a triangle with the side length of about 5mm by using scissors, and pasting the triangle at the edge of the substrate element;
2. measuring the surface shape of a substrate element by using an interferometer, storing detection data, namely start, wherein the initial PV of the substrate is 0.486 lambda, and the positioning mark is clearly visible, as shown in FIG. 7;
3. setting spot collecting technological parameters of the magnetorheological machine tool: the flow rate of the magnetorheological fluid is 1600mm3Min, the thickness of the ribbon is 1.3mm, the element is placed on a worktable of a magnetorheological machine tool, the element is fixed on the surface of the worktable in a vacuum adsorption mode, alignment and leveling operations are carried out, and as the hardness of the fused quartz material is higher, the number of the collected spots of the same parameter removal function is set to be 2, and the retention time is 3 seconds; then, running a spot collecting numerical control program of the magnetorheological machine tool to carry out spot collecting operation;
4. wiping the surface of the element after spot collection, measuring the surface shape of the substrate element by using an interferometer, storing detection data, namely end, wherein the surface shape PV is 0.440 lambda, and the positioning mark is clearly visible as shown in figure 8;
5. processing the surface shape detection data of the elements before and after spot collection, and respectively rotating the start data and the end data to enable the triangular marks on the edges of the surface shapes to be positioned right above; then, performing a data subtraction operation, and subtracting start data from end data to obtain residual data, namely sub, PV being 0.396 λ, as shown in fig. 9;
6. performing median filtering on the sub data to remove burrs and noise points possibly introduced by detection, wherein a filtering template with the size of 3 multiplied by 3 is selected during median filtering;
7. rotating the sub data to ensure that the small end of the removal function is positioned right below the sub data to match the shape of the MRFSpot mask;
8. extracting a left-side removal function in sub data, adopting an MRFSpot mask, controlling the width of the mask through an adjusting coefficient a, controlling the height of the mask through an adjusting coefficient variable b, and controlling an upper area of the removal function through an adjusting coefficient c to fully approximate the edge of the removal function outline, as shown in FIG. 10;
extracting data in the MRFSpot mask to obtain a removal function named as spot1As shown in fig. 11, the same method is used to extract the right-side removal function in the sub data to obtain a spot2As shown in fig. 12;
9. computing an extracted removal function spot1Maximum value v of10, volumetric removal efficiency of 0.224mm3Min, removal function spot2Maximum value v of20, volumetric removal efficiency of 0.216mm3Min, then performing data migration and averaging operation to obtain the final removal function named as spot with volume removal efficiency of 0.221mm3The results are shown in FIG. 13,/min.
In this embodiment, if the same sub data is extracted by using the conventional rectangular mask, the function spot is removed from the left side11The volume removal efficiency was 0.262mm3Min, right side removal function spot22The volume removal efficiency was 0.276mm3Min; because the rectangular mask cannot accurately approach the actual contour of the removal function, irrelevant data outside the contour of the removal function is also taken as effective data of the removal function during extraction, so that the volume removal efficiency of the extracted removal function is high; on the other hand, due to errors caused by the fluctuation of a circulation system of the magnetorheological machine tool, the spot collecting parameters of the removing functions on the left side and the right side of sub data are completely the same, but the removing efficiency is obviously different.
The embodiment of the invention adopts a multi-spot averaging method to effectively inhibit the error, so that the extracted removal function is more practical, and the method has obvious advantages in the aspects of extraction accuracy and conformity.
Based on the same inventive concept, the embodiment of the invention also provides a device for extracting the magnetorheological polishing removal function, and as the principle of the problem solved by the device is similar to the method for extracting the magnetorheological polishing removal function, the implementation of the device can refer to the implementation of the method, and repeated parts are not repeated.
The extraction device for a magnetorheological polishing removal function provided by the embodiment of the invention, as shown in fig. 14, includes:
an obtaining module 151, configured to obtain surface shape detection data of the substrate element before and after spot collection; the substrate element has position marks at its edges;
the calculation module 152 is used for calculating residual data according to the surface shape detection data before and after the spot collection and the position marks of the substrate elements;
a filtering module 153, configured to perform median filtering on the residual data;
a generating module 154, configured to remove function contours by using elliptic arc approximation on the filtered residual data, and generate a plurality of removal functions with the same parameters;
the extracting module 155 is configured to perform data shifting and averaging operations on the plurality of removing functions with the same parameter, so as to extract the removing functions.
In one embodiment, the calculation module 152 includes:
a rotation sub-module 1521, configured to perform data rotation operations on the surface shape detection data before and after the spot collection, respectively; the data rotation operation includes: taking the geometric center of the surface shape data as a rotation center O, and taking the rotation angle as an included angle alpha between a position mark on the speckle collecting substrate element and the Y axis; rotating the position mark point A of the surface-shaped edge to a point B right above the Y axis;
and a calculating submodule 1522, configured to subtract the surface shape data before the spot collection from the surface shape detection data after the spot collection according to the position mark when the positions of the surface shape detection data before the spot collection and the surface shape detection data after the spot collection correspond to each other, and calculate residual data.
In one embodiment, the generating module 154 includes:
determining a submodule 1541, configured to rotate the filtered residual data, so as to ensure that a small end of the removal function is located right below the residual data;
the generating submodule 1542 is configured to approximate the contour edge of each removal function by using an MRFSpot mask, and generate a plurality of removal functions having the same parameter.
In an embodiment, the generating the MRFSpot mask in the sub-module 1542 specifically includes:
the cross line is positioned at the central position and used for positioning the central position of the removal function; the elliptical arc is positioned at the lower part and used for controlling the shape of the outline of the small end of the removal function; the elliptical arc is positioned above and used for controlling the shape of the contour of the large end of the removal function;
the mathematical expression is as follows:
Figure GDA0003486385360000121
Figure GDA0003486385360000122
in the above formula x0、y0Denotes a reticle center coordinate, x denotes a horizontal direction coordinate, y denotes a vertical direction coordinate, a denotes a width coefficient, b denotes a height coefficient, and c denotes a curvature coefficient.
In an embodiment, the extracting module 155 is specifically configured to calculate and extract a maximum value of the plurality of removing functions containing the same parameter, where the calculation formula is:
Figure GDA0003486385360000123
in the above formula, spotiRepresenting a removal function, wherein i is 1-N, and N is the number of the collected spots during the spot collecting operation; v. ofiRepresents a maximum value, i is 1 to N; the spot represents the extraction of the final removal function.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (6)

1. A method for extracting a magnetorheological polishing removal function is characterized by comprising the following steps:
acquiring surface shape detection data of a substrate element before and after spot collection; the substrate element has position marks at its edges;
calculating residual data according to the surface shape detection data before and after spot collection and the position marks of the substrate elements;
performing median filtering processing on the residual data;
removing the function contour of the filtered residual data by adopting elliptical arc approximation to generate a plurality of removing functions with the same parameters;
executing data migration and averaging operation on the plurality of removing functions containing the same parameters, and extracting the removing functions;
the method for removing the function contour of the residual data after filtering processing by adopting elliptic arc approximation comprises the following steps of:
rotating the residual error data after filtering processing to ensure that the small end of the removal function is positioned right below;
adopting MRFSpot mask to approximate the outline edge of each removal function to generate a plurality of removal functions containing the same parameters;
the MRFSpot mask comprises: the cross line is positioned at the central position and used for positioning the central position of the removal function; the elliptical arc is positioned at the lower part and used for controlling the shape of the outline of the small end of the removal function; the elliptical arc is positioned above and used for controlling the shape of the contour of the large end of the removal function;
the mathematical expression is as follows:
Figure FDA0003462180250000011
Figure FDA0003462180250000012
in the above formula x0、y0Denotes a reticle center coordinate, x denotes a horizontal direction coordinate, y denotes a vertical direction coordinate, a denotes a width coefficient, b denotes a height coefficient, and c denotes a curvature coefficient.
2. The method of claim 1, wherein calculating residual data based on the pre-spot-picking and post-spot-picking profile inspection data and the position markers of the substrate elements comprises:
respectively performing data rotation operation on the surface shape detection data before and after spot collection; the data rotation operation includes: taking the geometric center of the surface shape detection data as a rotation center O, and taking the rotation angle as an included angle alpha between a position mark on the speckle collecting substrate element and the Y axis; rotating the position mark point A of the surface-shaped edge to a point B right above the Y axis;
and according to the position mark, when the positions of the surface shape detection data before and after the spot collection correspond to each other, subtracting the surface shape detection data before the spot collection from the surface shape detection data after the spot collection, and calculating to obtain residual data.
3. The method of claim 1, wherein the step of performing a data shifting and averaging operation on the plurality of removal functions having the same parameters to extract the removal function comprises:
calculating and extracting the maximum value in the plurality of removal functions containing the same parameters, wherein the calculation formula is as follows:
Figure FDA0003462180250000021
in the above formula, spotiRepresenting a removal function, wherein i is 1-N, and N is the number of the collected spots during the spot collecting operation; v. ofiTo representMaximum value, i is 1 to N; the spot represents the extraction of the final removal function.
4. An extraction device for a magnetorheological polishing removal function, comprising:
the acquisition module is used for acquiring surface shape detection data of the substrate element before and after spot collection; the substrate element has position marks at its edges;
the calculation module is used for calculating residual data according to the surface shape detection data before and after spot collection and the position marks of the substrate elements;
the filtering module is used for carrying out median filtering processing on the residual error data;
the generating module is used for removing the function outline by adopting elliptical arc approximation to the residual data after filtering processing to generate a plurality of removing functions containing the same parameters;
the extraction module is used for executing data migration and averaging operation on the plurality of removal functions containing the same parameters and extracting the removal functions;
the generation module comprises:
the determining submodule is used for rotating the residual error data after filtering processing and ensuring that the small end of the removing function is positioned right below;
the generation submodule is used for approximating the outline edge of each removal function by adopting an MRFSpot mask to generate a plurality of removal functions containing the same parameters;
the generating of the MRFSpot mask in the sub-module specifically includes:
the cross line is positioned at the central position and used for positioning the central position of the removal function; the elliptical arc is positioned at the lower part and used for controlling the shape of the outline of the small end of the removal function; the elliptical arc is positioned above and used for controlling the shape of the contour of the large end of the removal function;
the mathematical expression is as follows:
Figure FDA0003462180250000031
Figure FDA0003462180250000032
in the above formula x0、y0Denotes a reticle center coordinate, x denotes a horizontal direction coordinate, y denotes a vertical direction coordinate, a denotes a width coefficient, b denotes a height coefficient, and c denotes a curvature coefficient.
5. The extraction device of a magnetorheological polishing removal function according to claim 4, wherein the calculation module comprises:
the rotation submodule is used for respectively carrying out data rotation operation on the surface shape detection data before and after the spot collection; the data rotation operation includes: taking the geometric center of the surface shape detection data as a rotation center O, and taking the rotation angle as an included angle alpha between a position mark on the speckle collecting substrate element and the Y axis; rotating the position mark point A of the surface-shaped edge to a point B right above the Y axis;
and the calculating submodule is used for subtracting the surface shape detection data before the spot collection from the surface shape detection data after the spot collection according to the position mark when the positions of the surface shape detection data before the spot collection and the surface shape detection data after the spot collection correspond to each other, and calculating to obtain residual data.
6. The device for extracting a magnetorheological polishing removal function according to claim 4, wherein the extracting module is specifically configured to calculate and extract a maximum value of the plurality of removal functions having the same parameter, and the calculation formula is as follows:
Figure FDA0003462180250000041
in the above formula, spotiRepresenting a removal function, wherein i is 1-N, and N is the number of the collected spots during the spot collecting operation; v. ofiRepresents a maximum value, i is 1 to N; the spot represents the extraction of the final removal function.
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